Wafer box disassembly tool

Abstract

The present invention discloses a wafer box disassembly and assembly tool, which includes a base, a top block that can be relatively slidably arranged on the base along the front-back direction, a push block that can be relatively slidably arranged on the base along the front-back direction, a driving assembly for driving the push block to move along the front-back direction, and a limiting structure arranged between the top block and the push block. Among them, the front part of the top block has a top push inclined surface that gradually extends upward from the front to the back, and the push block is located above the top block. The disassembly and assembly tool of the wafer box can realize the front-back movement of the top block and the push block through the driving assembly, and the locking structure between the wafer box body and the wafer box base can be unlocked through the top push inclined surface of the top block. After the locking structure is unlocked, the push block can continue to push the wafer box base through the limiting structure, so that it can be disengaged from the wafer box body. The operation is simple and will not cause damage to the surface of the wafer box.

Description

Technical Field

[0001] The invention relates to a wafer box disassembly and assembly tool, in particular to a FOSB disassembly and assembly tool. Background Art

[0002] FOSB (Front Opening Shipping Box), also known as front-opening wafer transport box, is widely used as a container for storing and transporting wafers in the field of semiconductor production. Fig.11 As shown, FOSB generally includes a wafer box body 61 and a wafer box base 62. During use, the wafer box base 62 needs to be frequently disassembled. At present, the conventional disassembly method is as follows: Fig.13 As shown, the operator needs to first press the spring piece 76 under the wafer box base 62 from below with his hand, so that the spring piece 76 is separated from the wafer box body 61, and then use a tool such as a hammer and a pad to knock the wafer box base 62 to the left, at which time the second rib 72 on the wafer box body 61 will be elastically deformed, and the wafer box base 62 will move to the upper left, and then separate from the wafer box body 61, so as to realize the removal of the wafer box base 62. This traditional operation method is not only inefficient in removal, but also requires high experience of the operator, which is easy to cause work-related accidents, and in the process of removal, the hammer and other tools may knock down the wafer box 6, causing scratches or damage to the surface of the wafer box 6. Summary of the invention

[0003] An object of the present invention is to provide a wafer box disassembly and assembly tool to solve one or more problems of the prior art.

[0004] In order to achieve the above object, the technical solution adopted by the present invention is:

[0005] A wafer box disassembly and assembly tool, the disassembly and assembly tool comprising:

[0006] Base;

[0007] A top block, which is relatively slidably disposed on the base in a front-to-rear direction, and a front portion of the top block has a top-pushing inclined surface extending gradually upward from front to rear;

[0008] A push block, which is relatively slidably arranged on the base in a front-rear direction, and is located above the top block;

[0009] A driving assembly, used for driving the push block to move in a front-rear direction;

[0010] A limiting structure is arranged between the top block and the push block, and the limiting structure has a limiting state and a releasing state. When the limiting structure is in the limiting state, the top block and the push block are relatively fixed and can move forward and backward synchronously; when the limiting structure is in the releasing state, the push block and the top block are separated from each other, and the push block is driven by the driving assembly to move independently, wherein the base is also provided with a releasing structure for converting the limiting structure from the limiting state to the releasing state during the forward movement of the push block.

[0011] Preferably, the limiting structure includes a first limiting groove arranged at the bottom of the pushing block, a second limiting groove arranged at the top of the top block, and a limiting block arranged in the first limiting groove and / or the second limiting groove and capable of moving in the up and down directions; when the limiting structure is in a limiting state, a part of the limiting block is located in the first limiting groove and the other part is located in the second limiting groove; when the limiting structure is in a released limiting state, the limiting block disengages from the second limiting groove and moves back and forth synchronously with the pushing block.

[0012] Preferably, the limit release structure comprises an unlocking inclined plane arranged on the base, the unlocking inclined plane extends obliquely from rear to front and upward, and the unlocking inclined plane is located in front of the second limit groove.

[0013] Preferably, the upper portion of the top block is provided with a slide groove extending in the front-to-back direction, and the rear portion of the push block has a protrusion protruding downward, and the protrusion is slidably fitted in the slide groove.

[0014] Preferably, the front end surface of the push block is located behind the push inclined surface.

[0015] Preferably, the base is provided with a receiving groove for accommodating the push block, the push block is slidably arranged in the receiving groove, guide pins are provided on the left and right sides of the push block, and guide grooves are provided on the base on the left and right sides of the receiving groove, and the guide pins are slidably arranged in the guide grooves.

[0016] Preferably, a stopper extending in the front-to-back direction is provided on one or both side portions in the left-right direction of the base, and at least a front end portion of the stopper is higher than the top block.

[0017] Preferably, the driving assembly includes an operating handle, a push rod extending in the front-to-back direction and movable in the front-to-back direction and arranged on the base, and a linkage rod arranged between the operating handle and the push rod, the push rod is fixedly arranged with the push block, or the push rod is detachably arranged behind the push block.

[0018] Furthermore, one end of the operating handle is rotatably connected to the base, one end of the linkage rod is rotatably connected to the push rod, and the other end of the linkage rod is rotatably connected to the operating handle.

[0019] Furthermore, a handle for holding is fixedly provided on the upper part of the base.

[0020] Due to the application of the above technical scheme, the present invention has the following advantages compared with the prior art: the wafer box disassembly and assembly tool of the present invention includes a base, a top block, a push block, a driving assembly, and a limiting structure. The driving assembly can realize the forward and backward movement of the top block and the push block. The locking structure between the wafer box body and the wafer box base can be unlocked through the pushing inclined surface of the top block. The limiting structure can enable the push block to continue to push the wafer box base after the locking structure is unlocked, thereby disengaging it from the wafer box body. The operation is simple and will not cause damage to the surface of the wafer box. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Attached Figure 1 It is a schematic diagram of the three-dimensional structure of the wafer box disassembly and assembly tool of the present invention, wherein the limiting structure is in a limiting state;

[0022] Attached Figure 2 For attachment Figure 1 A schematic diagram of the three-dimensional structure of the wafer box disassembly and assembly tool from another perspective;

[0023] Attached Figure 3 For attachment Figure 1 A top view of the wafer box disassembly and assembly tool;

[0024] Attached Figure 4 For attachment Figure 3 Section view along AA direction;

[0025] Attached Figure 5 For attachment Figure 3 Cross-sectional view along BB direction;

[0026] Attached Figure 6 It is a three-dimensional structural schematic diagram of the wafer box disassembly and assembly tool of the present invention, wherein the limiting structure is in a released limiting state;

[0027] Attached Figure 7 For attachment Figure 6 A three-dimensional and structural schematic diagram of the wafer box disassembly and assembly tool in another viewing angle;

[0028] Attached Figure 8 For attachment Figure 6 A top view of the wafer box disassembly and assembly tool;

[0029] Attached Fig. 9 For attachment Figure 8 Cross-sectional view along CC direction;

[0030] Attached Fig.10 For attachment Figure 8 Cross-sectional view along DD direction;

[0031] Attached Fig.11 is a schematic diagram of the three-dimensional structure of the wafer box in this embodiment;

[0032] Attached Fig.12 For attachment Fig.11 A cross-sectional view of the wafer box;

[0033] Attached Fig.13 For attachment Fig.12 A partial enlarged view of point E in the middle;

[0034] Attached Fig.14 It is a schematic diagram of the three-dimensional structure of the wafer box disassembly and assembly tool of the present invention and the wafer box when they are matched;

[0035] Attached Fig.15 It is a schematic diagram of the three-dimensional structure of the wafer box disassembly and assembly tool of the present invention and the wafer box when they are matched;

[0036] Attached Fig.16 For attachment Fig.15 A partial enlarged view of point F in the middle;

[0037] in:

[0038] 1. Base; 11. Accommodation groove; 12. Guide groove; 13. Stopper; 14. Handle; 15. Unlocking slope;

[0039] 2. Ejector block; 21. Ejector inclined plane; 22. Slide groove;

[0040] 3. Push block; 31. Protrusion; 32. Guide pin;

[0041] 4. driving assembly; 41. handle; 42. push rod; 43. linkage rod;

[0042] 5. Limiting structure; 51. First limiting groove; 52. Second limiting groove; 53. Limiting block;

[0043] 6. Wafer box; 61. Wafer box body; 611. Flange; 62. Base; 621. Sliding part;

[0044] 71. first convex rib; 72. second convex rib; 73. third convex rib; 74. fourth convex rib; 75. slot; 76. spring piece; 761. limiting protrusion. DETAILED DESCRIPTION

[0045] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0046] Referring to the drawings, a wafer box disassembly and assembly tool is shown, which includes a base 1, a top block 2 slidably disposed on the base 1 along the front-rear direction, a push block 3 slidably disposed on the base 1 along the front-rear direction, a driving component for driving the push block 3 to move along the front-rear direction, and a limiting structure 5 disposed between the top block 2 and the push block 3. Among them, the upper part of the base 1 is fixedly provided with a handle 14 for holding, the front part of the top block 2 has a push inclined surface 21 which extends gradually upward from front to back, the push block 3 is located above the top block 2, and the front end face of the push block 3 is located behind the push inclined surface 21, the limiting structure 5 has a limiting state and a releasing state, when the limiting structure 5 is in the limiting state, the top block 2 and the push block 3 are relatively fixed and can move forward and backward synchronously; when the limiting structure 5 is in the releasing state, the push block 3 and the top block 2 are separated from each other, and the push block 3 is driven by the driving assembly 4 and moves independently, wherein the base 1 is also provided with a releasing structure for converting the limiting structure 5 from the limiting state to the releasing state during the forward movement of the push block 3.

[0047] See attached Fig.11 To Attachment Fig.13 As shown, the wafer box 6 includes a wafer box body 61 and a wafer box base 62 detachably arranged on the wafer box body 61. Specifically, the wafer box body 61 is provided with two groups of slide grooves (not shown in the figure) extending in the front-to-back direction, and the left and right side edges of the wafer box base 62 are provided with sliding parts 621 that can slide along the slide grooves, and each group of sliding parts 621 is correspondingly inserted in the slide grooves. In this embodiment, one end of the wafer box body 61 in the front-to-back direction is an open end provided with an opening, and the open end of the wafer box body 61 has a flange 611, and there is a space between the flange 611 and the wafer box base 62 that can accommodate the base 1.

[0048] A locking mechanism is also provided between the wafer box body 61 and the wafer box base 62 for locking the two relative to each other, and the locking mechanism includes a first rib 71, a second rib 72 and a third rib 73 which are arranged on the wafer box body 61 and are arranged in sequence along the front-to-back direction, and a fourth rib 74, a clamping groove 75 and a spring piece 76 which are arranged on the wafer box base 62 and are arranged along the front-to-back direction. The first rib 71, the second rib 72, the third rib 73 and the fourth rib 74 all extend in the vertical direction, the spring piece 76 extends in the front-to-back direction, and the spring piece 76 has a limiting protrusion 761 extending in the vertical direction. The fourth rib 74 can be clamped on the outer side surface of the first rib 71, the limiting protrusion 761 is clamped on the outer side surface of the third rib 73, and the second rib 72 is clamped in the clamping groove 75. In this embodiment, the slot wall of the slot 75 and the spring piece 76 have a certain elasticity to facilitate the disassembly of the wafer box base 62 , and there is a distance between the end of the spring piece 76 and the wafer box body 61 .

[0049] See attached Figure 4 and attached Fig. 9 As shown, the limiting structure 5 includes a first limiting groove 51 arranged at the bottom of the push block 3, a second limiting groove 52 arranged at the top of the top block 2, and a limiting block 53 which can be moved in the first limiting groove 51 or the second limiting groove 52 in the up and down directions. When the limiting structure 5 is in a limiting state, a part of the limiting block 53 is located in the first limiting groove 51 and the other part is located in the second limiting groove 52, and the push block 3 can push the top block 2 to move forward. At this time, the push block 3 and the top block 2 move synchronously; when the limiting structure 5 is in a released limiting state, the limiting block 53 is disengaged from the second limiting groove 52 and moves forward and backward synchronously with the push block 3, and the top block 2 is stationary.

[0050] See attached Figure 5 and attached Fig.10 As shown, the release limit structure includes an unlocking inclined surface 15 arranged on the base 1, and the unlocking inclined surface 15 extends obliquely upward from the back to the front, and the unlocking inclined surface 15 is located in front of the second limit groove 52. When the limit block 53 moves obliquely upward along the unlocking inclined surface 15, the limit block 53 moves upward along the first limit groove 51 and the second limit groove 52 until the limit block 53 escapes from the first limit groove 51; when the limit block 53 moves obliquely downward along the unlocking inclined surface 15, the limit block 53 moves downward along the first limit groove 51 and the second limit groove 52, and the limit block 53 pushes the top block 2 to move backward.

[0051] See attached Figure 4 and attached Fig. 9 As shown, the upper part of the top block 2 is provided with a slide groove 22 extending in the front-to-back direction, and the rear part of the push block 3 is provided with a protrusion 31 protruding downward, and the protrusion 31 is slidably arranged in the slide groove 22. When the limiting structure 5 is in the limiting state, the protrusion 31 is stationary relative to the slide groove 22; when the limiting structure 5 is in the unlocking state, the protrusion 31 can slide relative to the slide groove 22 in the backward direction.

[0052] See attached Figure 1 To Attachment Figure 3 , Attachment Figure 6 To Attachment Figure 8 As shown, the base 1 is provided with a receiving groove 11 for accommodating the push block 3, the push block 3 is slidably arranged in the receiving groove 11, and guide pins 32 are arranged on the left and right sides of the push block 3. The base 1 is provided with guide grooves 12 on the left and right sides of the receiving groove 11, the guide groove 12 extends in the front-to-back direction, and the guide pins 32 are slidably arranged in the guide groove 12, and the distance that the guide pins 32 can slide along the guide groove 12 is the stroke of the push block 3. In this embodiment, the guide pins 32 have two groups arranged in the front-to-back direction, and the diameter of the guide pins 32 is equal to the groove width of the guide groove 12, so that the push block 3 can be restricted from moving in the vertical direction and the push block 3 can be ensured to move smoothly.

[0053] See attached Fig.14 and attached Fig.15 As shown, a stopper 13 extending in the front-to-back direction is provided on one or both sides of the base 1 in the left-right direction, and at least the front end of the stopper 13 is higher than the top block 2. When the wafer box disassembly tool of this embodiment is in use, the stopper 13 can be stuck on the side of the wafer box base 62, which has a certain limiting and guiding effect.

[0054] See attached Figure 1 To Attachment Figure 4 , Attachment Figure 6 To Attachment Fig. 9 As shown, the driving assembly 4 includes an operating handle 41, a push rod 42 extending in the front-to-back direction and being movable in the front-to-back direction and arranged on the base 1, and a linkage rod 43 arranged between the operating handle 41 and the push rod 42. The push rod 42 is fixedly arranged with the push block 3, or the push rod 42 is detachably arranged behind the push block 3. Among them, one end of the operating handle 41 is rotatably connected to the base 1, one end of the linkage rod 43 is rotatably connected to the push rod 42, and the other end of the linkage rod 43 is rotatably connected to the operating handle 41. When the operating handle 41 rotates forward, the linkage rod 43 pushes the push rod 42 to move forward, and the push rod 42 drives the push block 3 to move forward; when the operating handle 41 rotates backward, the linkage rod 43 pulls the push rod 42 to move backward, thereby driving the push block 3 to move backward.

[0055] The working principle of the wafer box disassembly and assembly tool of this embodiment is described in detail below:

[0056] See attached Fig.14 and attached Fig.15 As shown, the operating handle 41 is rotated to the maximum angle relative to the push rod 42. At this time, the limiting structure 5 is in a limiting state, the wafer box disassembly and assembly tool is placed between the flange 611 and the base 1, and the stop block 13 is leaned against the side of the wafer box base 62, while the base 1 is leaned against the flange 611, the operating handle 41 is rotated forward, the top block 2 and the push block 3 move forward, the end of the spring piece 76 is leaned against the push inclined surface 21 of the top block 2, the push inclined surface 21 drives the spring piece 76 to bend upward, and the limiting protrusion 761 and the third rib 73 are disengaged, and the second rib 72 and the slot 75 are disengaged. At the same time, the push block 3 pushes the wafer box base 62 to move backward until the wafer box base 62 and the wafer box body 61 are disengaged. At this time, the limiting structure 5 is in a released limiting state.

[0057] To summarize, the wafer box disassembly and assembly tool of the present embodiment includes a base 1, a top block 2, a push block 3, a drive assembly 4, and a limiting structure 5. The drive assembly 4 can realize the forward and backward movement of the top block 2 and the push block 3. The locking structure 7 between the wafer box body 61 and the wafer box base 62 can be unlocked through the push inclined surface 21 of the top block 2. After the locking structure 7 is unlocked, the push block 3 can continue to push the wafer box base 62 through the limiting structure 5, thereby disengaging it from the wafer box body 61. The operation is simple and will not cause damage to the surface of the wafer box 6.

[0058] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer box disassembly and assembly tool, characterized in that: The disassembly and assembly tool comprises: Base; A top block, which is relatively slidably disposed on the base in a front-to-rear direction, and a front portion of the top block has a top-pushing inclined surface extending gradually upward from front to rear; A push block, which is relatively slidably arranged on the base in a front-rear direction, and is located above the top block; A driving assembly, used for driving the push block to move in a front-rear direction; A limiting structure is arranged between the top block and the push block, and the limiting structure has a limiting state and a releasing state. When the limiting structure is in the limiting state, the top block and the push block are relatively fixed and can move forward and backward synchronously; when the limiting structure is in the releasing state, the push block and the top block are separated from each other, and the push block is driven by the driving assembly to move independently, wherein the base is also provided with a releasing structure for converting the limiting structure from the limiting state to the releasing state during the forward movement of the push block. Wherein, the upper part of the top block is provided with a slide groove extending in the front-to-back direction, and the rear part of the push block is provided with a protrusion protruding downward, and the protrusion is slidably fitted in the slide groove; The limiting structure includes a first limiting groove arranged at the bottom of the pushing block, a second limiting groove arranged at the top of the top block, and a limiting block arranged in the first limiting groove and / or the second limiting groove and capable of moving in the up and down directions. When the limiting structure is in a limiting state, a part of the limiting block is located in the first limiting groove and the other part is located in the second limiting groove; when the limiting structure is in a released limiting state, the limiting block is disengaged from the second limiting groove and moves forward and backward synchronously with the pushing block.

2. The wafer box disassembly and assembly tool according to claim 1, characterized in that: The limit release structure includes an unlocking inclined surface arranged on the base, the unlocking inclined surface extends obliquely from rear to front and upward, and the unlocking inclined surface is located in front of the second limit groove.

3. The wafer box disassembly and assembly tool according to claim 1, characterized in that: The front end surface of the push block is located behind the push inclined surface.

4. The wafer box disassembly and assembly tool according to claim 1, characterized in that: The base is provided with a receiving groove for receiving the push block, the push block is slidably arranged in the receiving groove, the left and right sides of the push block are provided with guide pins, and the base is provided with guide grooves on the left and right sides of the receiving groove, and the guide pins are slidably arranged in the guide grooves.

5. The wafer box disassembly and assembly tool according to claim 1, characterized in that: A stopper extending in the front-to-back direction is arranged on one or both side portions of the base in the left-right direction, and at least the front end portion of the stopper is higher than the top block.

6. The wafer box disassembly and assembly tool according to claim 1, characterized in that: The driving assembly includes an operating handle, a push rod extending in the front-to-back direction and movable in the front-to-back direction and arranged on the base, and a linkage rod arranged between the operating handle and the push rod. The push rod is fixedly arranged with the push block, or the push rod is detachably arranged behind the push block.

7. The wafer box disassembly and assembly tool according to claim 6, characterized in that: One end of the operating handle is rotatably connected to the base, one end of the linkage rod is rotatably connected to the push rod, and the other end of the linkage rod is rotatably connected to the operating handle.

8. The wafer box disassembly and assembly tool according to claim 1, characterized in that: A handle for holding is also fixedly arranged on the upper part of the base.

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