A magnetic fluid sealing device

Abstract

The present invention discloses a magnetic fluid sealing device, including a magnetic fluid sealing component, the magnetic fluid sealing component is integrated on a body shaft, a transmission mechanism component is integrated on the body shaft, a base with a cooling structure is arranged outside the magnetic fluid sealing component and the transmission mechanism component, and a body shaft cooling sealing component is arranged on the body shaft, which is connected with the inside of the body shaft to form a body shaft cooling system. In the magnetic fluid sealing device, the inner diameter part and the outer diameter part of the regional position of the magnetic fluid sealing component are provided with a circulating cooling structure, the lower part of the body shaft is assembled with an independent body shaft cooling sealing component, the cooling fluid or cooling gas is input from the lower part of the body shaft radially, flows to the upper part through multiple channels after diversion, refluxes to the lower part after circulation, and is output from the radial direction; the comprehensive cooling of the body shaft is realized, and the long-term operation requirements under high temperature conditions are met. The structure has high integration and good stability, and is suitable for more precise vacuum sealing of long-axis and long-stroke equipment.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic fluid sealing devices, in particular to a magnetic fluid sealing device that ensures vacuum sealing when a main shaft is lifted and rotated over an ultra-long stroke in a high temperature environment. Background Art

[0002] A magnetic fluid sealing device is a device that can input rotational motion from the atmosphere side to the vacuum side and ensure vacuum sealing. In vacuum and high-temperature equipment in the semiconductor, single crystal furnace, vacuum coating and other industries, the temperature inside the vacuum chamber is high. The magnetic fluid sealing device that works in a high-temperature environment for a long time requires a cooling structure to extend the service life of the device. The existing cooling methods include: base inlet cooling (including base inlet cooling magnetic fluid sealing components) and shaft inlet cooling. For solid shaft type magnetic fluid sealing devices, a cooling flow is introduced from the base and enters the annular flow channel on the outer diameter of the magnetic fluid seal pole to cool the magnetic fluid. The rotating shaft cooling structure is to connect the rotary joint through the central threaded hole at the atmospheric side of the cooling shaft to allow the cooling flow to enter and exit.

[0003] For hollow shaft type magnetic fluid sealing devices, such as magnetic fluid sealing devices for rotating and lifting the crucible parts of single crystal furnace equipment. The inner diameter of the hollow body shaft of the magnetic fluid sealing device is assembled with the crucible shaft of the equipment, and the static seal is sealed with a compressed O-ring. The hollow magnetic fluid body shaft has no cooling structure, the equipment spindle has a cooling structure, the spindle is connected to the rotary joint, and the cooling flow enters and exits. Usually, there is no axial relative movement between the equipment spindle and the hollow shaft magnetic fluid sealing device. When the single crystal furnace equipment is running, the crucible spindle needs to be lifted and lowered. When working, the crucible spindle is fixed with the hollow body shaft, and the axial movement is synchronously lifted and lowered. The axial dynamic seal is sealed with a bellows outside the magnetic fluid. This type of bellows sealing structure is suitable for equipment with a short spindle and a small lifting stroke. When the spindle of some equipment is super long and the stroke is more than 3 meters, the spindle needs to be lifted and lowered at the start and end of the work. When working, the equipment spindle and the hollow body shaft rotate together. Extra long stroke is not suitable for adding bellows sealing on the outside. For this type of equipment, when the spindle is made of non-metallic materials such as quartz, the high-temperature spindle has no cooling system. If the hollow main body shaft is also not cooled, the life of the magnetic fluid sealing device is extremely short. Long-term operation at high temperatures will cause problems such as aging, evaporation, and drying of magnetic fluid, wear of transmission components, and evaporation and drying of bearing grease. This will lead to failure of magnetic fluid seals, leakage, and wear of seals; deformation, wear, and jamming of transmission components. Spare parts need to be replaced, and the equipment will be shut down for a long time. Summary of the invention

[0004] The purpose of the present invention is to provide a long-life magnetic fluid sealing device that can adapt to long-term operation in a high temperature range. After being equipped with a limited self-locking mechanism, the magnetic fluid sealing device can be applied to equipment with no spindle cooling and an ultra-long lifting stroke during operation, and realize vacuum sealing during spindle lifting and rotation. It reduces the replacement of vulnerable seals, reduces the frequency of downtime for replacement of spare parts, reduces production costs, and improves work efficiency. The magnetic fluid sealing device has a high degree of structural integration and good stability, and is suitable for more precise vacuum sealing of long-axis and long-stroke equipment.

[0005] The technical solution adopted by the present invention to achieve its invention purpose is: a magnetic fluid sealing device, including a magnetic fluid sealing component, the magnetic fluid sealing component is integrated on a body shaft, the body shaft is integrated with a transmission mechanism component, the magnetic fluid sealing component and the transmission mechanism component are provided with a base with a cooling structure outside, and the body shaft is provided with a body shaft cooling sealing component connected with the inside of the body shaft to form a body shaft cooling system. The magnetic fluid sealing device is provided with a body shaft that has been heat-treated and can improve the stability and magnetic permeability at high temperatures, and a transmission mechanism component is integrated on the body shaft. When working, the external transmission member drives the transmission mechanism component on the body shaft to rotate, thereby driving the body shaft to rotate together, and the rotation of the body shaft drives the main shaft matched therewith to rotate together, so that the overall stability performance is greatly improved, and the shaft end runout is effectively reduced after the main shaft is assembled, the shaft end runout is small, and the operation precision is high. In order to meet the needs of long-term work under high temperature conditions, a body shaft cooling seal assembly is arranged on the body shaft. By arranging a body shaft cooling system between the body shaft cooling seal assembly and the cooling channel inside the body shaft, the inner diameter of the magnetic liquid sealing device can be effectively cooled, and the cooling of the main shaft can also be achieved; the body shaft cooling seal assembly and the inside of the body shaft form a cooling system that is radially input from the lower part of the body shaft, and axially cooled from bottom to top, circulated axially backflows to the lower part, and outputs from the radial direction. The independent body shaft circulation cooling system is radially input and radially output from the body shaft. When the body shaft rotates, reliable high-temperature sealing performance is guaranteed, wear-resistant, and leak-free. It can be applied to equipment without spindle cooling and with an ultra-long lifting stroke during operation, and vacuum sealing is achieved when the spindle is lifted and rotated. In order to achieve comprehensive cooling of the magnetic fluid sealing assembly and enable it to work for a long time under high temperature conditions, a cooling structure is arranged on the base outside the magnetic fluid sealing assembly to achieve comprehensive cooling of the outer diameter of the magnetic fluid sealing assembly. The two cooling systems cool the inner diameter and outer diameter of the magnetic fluid sealing assembly respectively, thereby improving the high temperature resistance of the magnetic fluid sealing assembly. The magnetic fluid sealing device has high structural integration, good stability, and good high temperature resistance, and is suitable for more precise vacuum sealing of long-axis and long-stroke equipment.

[0006] Preferably, a plurality of cooling channels are arranged inside the main body shaft, a radial inlet and outlet are arranged at the lower part of the main body shaft, an annular flow groove is arranged at the upper part of the main body shaft, and the radial inlet and outlet, cooling channels and annular flow groove are interconnected to form a main body shaft cooling system. The main body shaft cooling system arranges the inlet and outlet at the lower part of the main body shaft and is arranged radially, which solves the problem that the existing solid shaft can only be cooled by setting a rotating cooling joint along the axis. It can not only meet the setting needs of the cooling structure, but also realize the compact setting of the structure to meet the different equipment use requirements. More importantly, it can be applied to the type where the main shaft is made of non-metallic materials such as quartz and the high-temperature main shaft has no cooling system, and can ensure that the magnetic fluid sealing assembly works at high temperature for a long time without the problems of aging, evaporation, and drying of magnetic fluid, wear of transmission structure parts, and evaporation and drying of bearing grease.

[0007] Preferably, the plurality of cooling channels include a plurality of inlet channels and a plurality of outlet channels; the radial inlet and outlet ports include radial inlets and radial outlet ports; the radial inlets are connected with the inlet channels and the annular flow grooves to form inlet cooling channels, and the radial outlet ports are connected with the outlet channels and the annular flow grooves to form outlet cooling channels. In order to realize the setting of an independent cooling system for the main body shaft, radial inlets and radial outlets are provided at the lower part of the main body shaft for realizing the entry and exit of cooling fluid, and an annular flow groove is provided at the upper part of the main body shaft for realizing the entry and exit circulation of the fluid. When in use, the cooling fluid enters the annular flow groove along the radial inlet and the inlet channel, and then enters an outlet channel from the annular flow groove, and flows out from the radial outlet port through the outlet channel, thereby realizing comprehensive cooling of the rotating main body shaft.

[0008] Preferably, a plurality of independent slot body units are arranged circumferentially inside the annular flow groove, and two adjacent groups of independent slot body units are not connected to each other; each group of independent slot body units is partially provided with an inlet slot unit and an outlet slot unit, and the slot tops of the inlet slot unit and the outlet slot unit are connected; the inlet slot unit is connected to the inlet channel, and the outlet slot unit is connected to the outlet channel. The annular flow groove is circumferentially spaced into a plurality of independent slot body units, and the independent slot body units are not connected to each other and do not leak, so as to ensure the independent flow of the cooling liquid; and an inlet slot unit and an outlet slot unit are respectively arranged inside the independent slot body units, and the inlet slot unit and the outlet slot unit are connected at the slot top, that is, the cooling liquid inside the inlet slot unit flows into the outlet slot unit through the slot top to achieve reflux, thereby ensuring the effect of comprehensive cooling of the main body shaft.

[0009] Preferably, the main body shaft comprises a main body shaft and a main body shaft water jacket sealingly connected to the upper end of the main body shaft, a cavity is arranged inside the main body shaft water jacket, the cavity constitutes an annular flow groove, a plurality of long guide baffles are evenly spaced inside the annular flow groove, the annular flow groove is divided into a plurality of independent trough body units, each adjacent group of independent trough body units are not connected, each group of independent trough body units is respectively provided with a short guide baffle, the short guide baffles divide the independent trough body units into inlet trough units and outlet trough units, and a gap is arranged between the top of the short guide baffle and the upper part of the annular flow groove.

[0010] Preferably, the body shaft cooling seal assembly is disposed on the body shaft below the base and is sealably connected to the base, and the body shaft cooling seal assembly is connected to the inside of the body shaft to form a body shaft liquid cooling system.

[0011] Preferably, the main body shaft cooling seal assembly includes a main body shaft inlet and outlet seat, a shunt wear-resistant ring and a locking cover; the main body shaft inlet and outlet seat is radially provided with a seat body inlet and multiple seat body outlets, and the shunt wear-resistant ring is provided with a ring body inlet corresponding to the seat body inlet and a ring body outlet corresponding to the seat body outlet. The main body shaft cooling seal assembly mainly includes a main body shaft inlet and outlet seat, a shunt wear-resistant ring, and a locking cover. By providing a seat body inlet and multiple seat body outlets on the main body shaft inlet and outlet seat, the cooling liquid is introduced into the main body shaft to achieve cooling of the main body shaft, and the purpose of providing multiple seat body outlets is to achieve shunt reflux of the cooling liquid, which can ensure the cooling effect of the main body shaft. The shunt wear-resistant ring is provided to achieve shunt of the inlet and outlet cooling liquid, so as to distribute the cooling liquid to multiple inlet channels inside the main body shaft, and the cooling liquid refluxed from the multiple outlet channels flows out quickly through multiple channels through the shunt wear-resistant ring. The second is to increase the rotary sealing effect between the main body shaft and the liquid inlet and outlet seat and increase the wear resistance.

[0012] Preferably, the main body shaft liquid inlet and outlet seat sleeve is arranged on the outer circumference of the lower part of the main body shaft, the diverter wear-resistant ring is arranged inside the main body shaft liquid inlet and outlet seat and is statically sealed with the outer circumference of the main body shaft, and the diverter wear-resistant ring is dynamically sealed with the inner wall of the main body shaft liquid inlet and outlet seat; the locking cover is pressed on the end of the diverter wear-resistant ring and is locked with the end of the diverter wear-resistant ring. The main body shaft liquid inlet and outlet seat sleeve is arranged on the outer circumference of the lower part of the main body shaft. When working, the main body shaft liquid inlet and outlet seat is fixed relative to the main body shaft, and the diverter wear-resistant ring is statically sealed with the outer diameter of the main body shaft. The diverter wear-resistant ring does not rotate relative to the main body shaft, but rotates with the main body shaft. Therefore, the outer diameter of the diverter wear-resistant ring is dynamically sealed with the inner wall of the main body shaft liquid inlet and outlet seat. In order to meet the need of the diverter wear-resistant ring to rotate with the main body shaft, a locking structure is provided at the locking cover and the end of the diverter wear-resistant ring to achieve a locking fit, which can realize the axial locking and positioning of the diverter wear-resistant ring. At the same time, the inner diameter of the locking cover is tightly held with the main body shaft, and the circumference does not slip.

[0013] Preferably, a positioning stop is provided on the outer diameter of the main body shaft inlet and outlet seat facing the vacuum side, and the positioning stop cooperates with the base for positioning. The main body shaft inlet and outlet seat is radially provided with a seat inlet and multiple seat outlets, and the inner wall of the main body shaft inlet and outlet seat is provided with multiple sealing grooves, and a rotating sealing ring is provided inside each sealing groove. In order to achieve relative movement between the shunt wear-resistant ring and the main body shaft inlet and outlet seat, and to achieve sealing performance at the same time, a rotating sealing ring is used to achieve dynamic sealing between the two. The rotating sealing ring has good low friction performance and wear resistance during the rotation of the shunt wear-resistant ring, small compression and good sealing effect. The positioning stop is connected to the base as a whole.

[0014] Preferably, the outer diameter surface of the diverter wear-resistant ring is provided with multiple outer ring surfaces, the inner diameter surface of the diverter wear-resistant ring is provided with multiple sealing surfaces, and the inner end of the diverter wear-resistant ring facing the atmosphere is provided with a locking inner cone surface. The diverter wear-resistant ring is provided with multiple outer ring surfaces to cooperate with the rotating sealing ring to achieve dynamic sealing, while the inner sealing surface is provided to cooperate with the sealing member to achieve static sealing with the main body shaft. The locking inner cone surface is provided to cooperate with the locking gland to achieve axial locking of the diverter wear-resistant ring.

[0015] Preferably, the locking gland is provided with a locking outer cone, and the locking gland is provided with a groove in the radial direction on its circumference. The locking outer cone is provided on the locking gland to cooperate with the locking inner cone on the shunt wear ring to achieve axial locking of the shunt wear ring, and to hold the body shaft tightly without axial slippage. The groove is provided on the locking gland to facilitate the installation and locking of the locking gland.

[0016] Preferably, the body shaft cooling seal assembly is arranged on the body shaft inside the base to form an integrated sealing structure, and the body shaft cooling seal assembly is connected to the inside of the body shaft to form a body shaft gas cooling system.

[0017] Preferably, the main body shaft cooling seal assembly includes a magnetic pole 1, a magnetic pole 2, a magnetic fluid, a magnetic block and a magnetic pole locking cover; the magnetic pole 1 and the magnetic pole 2 are respectively sleeved on the main body shaft from top to bottom and dynamically seal with the main body shaft through a closed magnetic field structure, and the outer walls of the magnetic pole 1 and the magnetic pole 2 are statically sealed with the inner wall of the base; the magnetic pole 1 and the magnetic pole 2 are respectively provided with an inner guide groove, an outer guide groove and a guide hole connecting the inner guide groove and the outer guide groove; the outer diameter of the base is provided with an air inlet and an air outlet connecting the outer guide groove; the air inlet is connected to an air inlet joint, and the air outlet is connected to an air outlet joint; the inner guide groove is connected to the internal flow channel of the main body shaft. The main components of the main body shaft cooling seal assembly are all arranged inside the base, and the whole device is integrated. The high-pressure gas inlet and outlet interfaces for cooling the main body shaft are at the bottom of the device, and are radially inlet and radially outlet, and a magnetic fluid sealing structure is arranged between the high-pressure gas flow channels for sealing and separation. High-pressure cooling gas is input from the air inlet of the base, passes through the external guide groove, guide hole and internal guide groove on the magnetic pole one, enters the radial inlet at the lower part of the main body shaft, rises to the high-temperature zone on the vacuum side, flows back to the lower part of the main body shaft after circulation, and is discharged from the radial outlet at the lower part of the main body shaft, flows through the internal guide groove, guide hole and external guide groove of the magnetic pole two, and is output from the air outlet on the base.

[0018] Preferably, the closed magnetic field structure includes a tooth-shaped structure, a magnetic fluid and a magnetic block. The tooth-shaped structure is arranged on the main body shaft at a sealing fit with the magnetic poles one and two or on the magnetic poles one and two at a sealing fit with the main body shaft; the magnetic fluid is coated on the top of the teeth of the tooth-shaped structure; the magnetic block is arranged between the axial matching surfaces of the magnetic poles one and two, the magnetic poles one and two, the magnetic block and the main body shaft constitute a closed magnetic field, and the magnetic fluid works inside the closed magnetic block. The tooth-shaped structure can be arranged on the main body shaft or on the magnetic poles one and two. The top of the teeth of the tooth-shaped structure is coated with magnetic fluid, and the magnetic fluid works inside the magnetic field. The magnetic block is arranged between the magnetic poles one and two to form a closed magnetic field with the main body shaft. When the main body shaft rotates, a dynamic sealing structure is formed to separate and seal the atmosphere and the high-pressure gas.

[0019] Preferably, a cooling flange is provided on the base, and the base cooling structure includes an annular flow channel provided inside the base, a water inlet hole connected to the annular cooling groove on the outer diameter of the magnetic fluid sealing component, and a flange inlet and a flange outlet provided on the cooling flange. A cooling flange is provided on the base, and an annular flow channel is provided inside the base, the annular flow channel is connected to the annular cooling groove on the outer diameter of the magnet sealing component, and a flange inlet and a flange outlet are provided on the side of the cooling flange facing the atmosphere. When in use, the cooling liquid enters the annular flow channel through the flange inlet, and enters the annular cooling groove on the outer diameter of the magnetic fluid sealing component from the annular flow channel, and cools the magnetic fluid sealing component from the outer diameter of the magnetic fluid sealing component, thereby realizing independent circulation cooling of the inner diameter part and the outer diameter part of the magnetic fluid sealing component. The high temperature resistance of the magnetic fluid sealing component is greatly improved, and the service life is long.

[0020] Preferably, the transmission mechanism assembly includes a transmission gear and a transmission bearing which are integrated with the main body shaft, the transmission gear is fixed on the main body shaft, and the transmission bearings are arranged on the main body shaft at both ends of the transmission gear. The transmission mechanism assembly mainly includes a transmission gear and a transmission bearing, the transmission gear is fixed on the main body shaft in an integrated manner with the main body shaft, and the transmission bearings are arranged on the main body shaft at both ends of the transmission gear, thereby realizing the design of integrating the transmission mechanism assembly on the main body shaft. When in use, the external gear drives the transmission gear on the main body shaft to rotate, thereby driving the main body shaft to rotate, and the rotation of the main body shaft further drives the main shaft connected to the main body shaft to rotate, so that the overall stability is good, the shaft end runout is small after the main shaft is assembled, the operation accuracy is high, and the vacuum sealing requirements when the main shaft is lifted and rotated over a long stroke under high temperature conditions can be met. When the main shaft is lifted axially, the main shaft is lifted and lowered along the inner diameter of the main body shaft, while the main body shaft remains stationary, and the sealing of the main shaft rotation process and the lifting process are realized through the rotating seal.

[0021] As a preference, a self-locking component is also included, the self-locking component includes a shaft seal gland and a limit self-locking ring, the shaft seal gland is embedded in the lower end of the main body shaft and is pressed on the lower end of the main body shaft and fixedly connected to the main body shaft; the limit self-locking ring and the shaft seal gland are arranged relative to each other, and the shaft seal glands are engaged with each other for limit self-locking. The self-locking component is set to ensure the axial sealing of the main shaft under ultra-long stroke. When the main body shaft rotates, the main shaft runs synchronously and self-locks, and does not slip in the circumferential direction. The self-locking component mainly includes a shaft seal gland arranged on the main body shaft and a limit self-locking ring arranged on the main shaft, and the shaft seal gland and the limit self-locking ring are engaged with each other for limit self-locking. When the main shaft needs to rotate, the limit self-locking ring on the main shaft engages with the shaft seal gland on the main body shaft, and the rotation of the main shaft is driven by the rotation of the main body shaft. When the main shaft is lifted or lowered, the main shaft is lifted or lowered along the axial direction of the main body shaft.

[0022] Preferably, a rotary sealing groove and an installation groove are provided on the inner wall of the shaft sealing cover, a rotary sealing member is provided inside the rotary sealing groove, a lower cover wear-resistant ring is provided inside the installation groove, and a cover engaging tooth is provided at the end of the shaft sealing cover; the limiting self-locking ring includes two symmetrically arranged limiting self-locking half rings, the two limiting self-locking half rings are buckled and locked together, and each limiting self-locking half ring is respectively provided with a ring engaging tooth. The shaft seal gland must not only achieve self-locking with the self-locking ring, but also achieve sealing of the main shaft. Therefore, a rotating seal groove and an installation groove are provided on the inner wall of the shaft seal gland. A rotating seal is pressed inside the rotating seal groove, and a lower gland wear ring is provided inside the installation groove. When matched with the main shaft, the lower gland wear ring contacts the main shaft to guide the axial movement of the main shaft. When in use, the rotating seal contacts the main shaft. The O-ring of the rotating seal has a small compression amount and is only used for vacuum sealing. When rotating, there is no need to use the friction generated by excessive compression of the O-ring to drive the main shaft to rotate, thereby ensuring reliable high-temperature sealing performance, wear resistance and no leakage.

[0023] Preferably, it also includes an upper gland, which is embedded in the upper end of the main body shaft and pressed on the upper end of the main body shaft and fixedly connected to the main body shaft; an upper gland wear ring is embedded on the inner wall of the upper gland. In order to achieve the sealing setting of the entire magnetic fluid sealing device, an upper gland assembly is also provided at the upper end of the main body shaft, the upper gland assembly is pressed inside the main body shaft and its end is fixedly connected to the end of the main body shaft, and an upper gland wear ring is provided inside the upper gland. The upper gland wear ring plays an axial guiding role during use, guiding the main shaft. When in use, the upper gland wear ring contacts the main shaft, ensuring the axial running accuracy of the main shaft at high temperature, wear resistance, and no leakage.

[0024] The beneficial effects of the present invention are as follows: the inner diameter part and the outer diameter part of the regional position of the magnetic fluid sealing component of the magnetic fluid sealing device are provided with a circulating cooling structure, and the setting of the base cooling system and the main body shaft cooling system realizes that the base, the main body shaft, and the sealed magnetic pole all have internal circulating cooling channels and guide structures, and the lower part of the main body shaft is assembled with an independent main body shaft cooling sealing component, and the cooling fluid or cooling gas is input radially from the lower part of the main body shaft, flows to the upper part through multiple channels after diversion, flows back to the lower part after circulation, and is output radially; comprehensive cooling of the main body shaft is realized, and long-term operation requirements under high temperature conditions are met.

[0025] The magnetic fluid sealing device is equipped with a limited self-locking mechanism and can be applied to equipment with no spindle cooling and an extremely long lifting stroke during operation, to achieve vacuum sealing during spindle lifting and rotation. By setting a wear-resistant ring, the replacement of vulnerable seals is reduced, the frequency of downtime for replacement of spare parts is reduced, production costs are reduced, and work efficiency is improved. The transmission mechanism assembly is integrated on the main body shaft. The magnetic fluid sealing device has a high degree of structural integration and good stability, and is suitable for more precise vacuum sealing of long-axis and long-stroke equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of the magnetic fluid sealing device of the present invention;

[0027] Figure 2 It is a structural schematic diagram of the main body shaft in the present invention;

[0028] Figure 3 is a cross-sectional view of the main body axis in the present invention;

[0029] Figure 4 It is a structural schematic diagram of the cooperation between the body shaft cooling seal assembly and the body shaft in the present invention;

[0030] Figure 5 It is a structural schematic diagram of the split flow wear-resistant ring in the present invention;

[0031] Figure 6 It is a structural schematic diagram of the locking gland in the present invention;

[0032] Figure 7 yes Figure 6 A front view of the middle locking gland;

[0033] Figure 8 It is a structural schematic diagram of the cooperation between the self-locking component and the main body shaft in the present invention;

[0034] Fig. 9 It is a structural schematic diagram of the shaft sealing gland of the present invention;

[0035] Fig.10 This is a front view of the shaft seal gland of the present invention;

[0036] Fig.11 It is a cross-sectional view of the shaft seal gland of the present invention;

[0037] Fig.12 It is a structural schematic diagram of a limiting self-locking half ring in the present invention;

[0038] Fig.13 This is a front view of the position-limiting self-locking ring in the present invention;

[0039] Fig.14 It is a cross-sectional view of the position-limiting self-locking ring in the present invention;

[0040] Fig.15 It is an enlarged view of the matching position between the magnetic fluid sealing component, the body shaft and the base in the present invention;

[0041] Fig.16 is a structural schematic diagram of a magnetic fluid sealing device in Example 2 of the present invention;

[0042] Fig.17 This is a schematic diagram of the structure of the body shaft cooling seal assembly and the body shaft in Embodiment 2 of the present invention;

[0043] Fig.18 is a structural schematic diagram of a magnetic pole in Embodiment 2 of the present invention;

[0044] Fig.19 is a top view of the magnetic pole in Embodiment 2 of the present invention;

[0045] In the figure: 1, main shaft, 101, main shaft body, 102, main shaft water jacket, 103, long guide baffle, 104, short guide baffle, 105, gap, 106, bearing positioning convex ring, 107, gear mounting ring, 108, bearing gland, 109, spindle mounting cavity, 2, base, 3, magnetic fluid sealing assembly, 4, transmission mechanism assembly, 5, cooling channel, 6, main shaft cooling seal assembly, 7, Radial inlet, 8, radial outlet, 9, annular flow groove, 10, inlet channel, 11, outlet channel, 12, independent trough unit, 13, inlet channel unit, 14, outlet channel unit, 15, main body shaft inlet and outlet seat, 151, positioning stop, 16, diversion wear-resistant ring, 161, outer ring surface, 162, sealing surface, 163, locking inner cone surface, 17, locking cover, 171, locking outer cone surface, 172, slotting , 18, seat body inlet, 19, seat body outlet, 191, seat body main outlet, 192, primary outlet, 193, secondary outlet, 194, sealing groove, 195, rotating sealing ring, 20, ring body inlet, 21, ring body outlet, 22, cooling flange, 23, annular flow channel, 24, flange inlet, 25, flange outlet, 26, transmission gear, 27, transmission bearing, 28, automatic Lock assembly, 29, shaft sealing cover, 30, limit self-locking ring, 31, rotary sealing groove, 32, mounting groove, 33, rotary seal, 34, lower cover wear ring, 35, cover bite teeth, 36, limit self-locking half ring, 37, ring bite teeth, 38, shaft cover, 39, upper cover wear ring, 40, main shaft, 41, static seal O-ring, 42, air inlet connector, 43, air outlet connector, 44, tooth structure, 6-1, magnetic pole one, 6-2, magnetic pole two, 6-3, magnetic fluid, 6-4, magnetic block, 6-5, magnetic pole locking cover, 6-6, inner guide groove, 6-7, outer guide groove, 6-8, guide hole, 6-9, sealing groove, 6-10, sealing ring, 2-1, air inlet, 2-2, air outlet. DETAILED DESCRIPTION

[0046] The various aspects of the present invention are described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0047] Embodiment 1:

[0048] In the embodiment shown in FIG1 , a magnetic fluid sealing device includes a magnetic fluid sealing component 3, the magnetic fluid sealing component 3 is integrated on a body shaft 1, a transmission mechanism component 4 is integrated on the body shaft 1 below the magnetic fluid sealing component 3, a base 2 with a cooling structure is arranged outside the magnetic fluid sealing component 3 and the transmission mechanism component 4, a body shaft cooling seal component 6 is arranged on the body shaft 1 below the transmission mechanism component 4, and the body shaft cooling seal component 6 is connected to the inside of the body shaft to form a body shaft cooling system. The body shaft cooling seal component 6 is arranged on the body shaft 1 below the base 2 and is sealed and docked with the base 2, and the body shaft cooling seal component 6 is connected to the inside of the body shaft 1 to form a body shaft liquid cooling system.

[0049] The main body shaft 1 is provided with a plurality of cooling channels 5 inside, the lower part of the main body shaft 1 is provided with radial inlet and outlet ports, the upper part of the main body shaft 1 is provided with an annular flow groove 9, and the radial inlet and outlet ports, cooling channels and annular flow grooves are interconnected to form a main body shaft cooling system. The plurality of cooling channels 5 include a plurality of inlet channels 10 and a plurality of outlet channels 11; the radial inlet and outlet ports include radial inlet ports 7 and radial outlet ports 8; the radial inlet ports 7 are connected with the inlet channels 10 and the annular flow groove 9 to form an inlet cooling channel, and the radial outlet ports 8 are connected with the outlet channels 11 and the annular flow groove 9 to form an outlet cooling channel. The main body shaft cooling system sets the inlet and outlet ports at the lower part of the main body shaft and in a radial direction, which solves the problem that the existing solid shaft can only be cooled by setting a rotating cooling joint along the axis, and the problem exists in the equipment structure limitation. It can not only meet the setting requirements of the cooling structure, but also realize the compact setting of the structure to meet the different equipment use requirements. More importantly, it can be applied to the case where the main shaft is made of non-metallic materials such as quartz and the high-temperature main shaft has no cooling system, and can ensure that the magnetic fluid sealing components work at high temperatures for a long time without the occurrence of problems such as aging, evaporation, and drying of magnetic fluid, wear of transmission structural parts, and evaporation and drying of bearing grease. When in use, the cooling fluid enters the annular flow groove along the radial inlet and the inlet channel, then enters an outlet channel from the annular flow groove, and flows out from the radial outlet through the outlet channel, thereby achieving comprehensive cooling of the rotating main body shaft.

[0050] like Figure 3As shown, the annular flow groove 9 is provided with a plurality of independent groove body units 12 at intervals along the circumferential direction, and two adjacent groups of independent groove body units 12 are not connected to each other; each group of independent groove body units 12 is provided with an inlet groove unit 13 and an outlet groove unit 14, and the groove tops of the inlet groove unit 13 and the outlet groove unit 14 are connected; the inlet groove unit 13 is connected to the inlet channel 10, and the outlet groove unit 14 is connected to the outlet channel 11. The annular flow groove is spaced into a plurality of independent groove body units along the circumferential direction, and the independent groove body units are not connected to each other and do not leak, so as to ensure the independent flow of the cooling liquid; and an inlet groove unit and an outlet groove unit are respectively provided inside the independent groove body units, and the inlet groove unit and the outlet groove unit are connected at the groove top, that is, the cooling liquid inside the inlet groove unit flows into the outlet groove unit through the groove top to achieve reflux, thereby ensuring the effect of comprehensive cooling of the main body shaft.

[0051] like Figure 4 As shown, the main body shaft cooling seal assembly 6 includes a main body shaft liquid inlet and outlet seat 15, a flow-dividing wear-resistant ring 16 and a locking gland 17; the main body shaft liquid inlet and outlet seat 15 is radially provided with a seat body inlet 18 and a plurality of seat body outlets 19, and the flow-dividing wear-resistant ring 16 is provided with a ring body inlet 20 corresponding to the seat body inlet 18 and a ring body outlet 21 corresponding to the seat body outlet 19. The main body shaft cooling seal assembly mainly includes a main body shaft inlet and outlet seat, a flow-dividing wear-resistant ring, and a locking gland. By providing a seat body inlet and a plurality of seat body outlets on the main body shaft inlet and outlet seat, the cooling liquid is introduced into the main body shaft to achieve cooling of the main body shaft, and the purpose of providing a plurality of seat body outlets is to achieve a shunt reflux of the cooling liquid, which can ensure the cooling effect of the main body shaft. The purpose of the split wear-resistant ring is to realize the splitting of the inflow and outflow of the coolant, so as to distribute the coolant to multiple inlet channels inside the main body shaft, and the coolant returning from the multiple outlet channels flows out quickly through the split wear-resistant ring in multiple channels.

[0052] The main body shaft liquid inlet and outlet seat 15 is sleeved on the outer circumference of the lower part of the main body shaft 1, the diverter wear-resistant ring 16 is arranged inside the main body shaft liquid inlet and outlet seat 15 and is statically sealed with the outer circumference of the main body shaft 1, and the diverter wear-resistant ring 1 is dynamically sealed with the inner wall of the main body shaft liquid inlet and outlet seat 15; the locking pressure cover 17 is pressed on the end of the diverter wear-resistant ring 1 and is locked with the end of the diverter wear-resistant ring 16. The main body shaft liquid inlet and outlet seat is sleeved on the outer circumference of the lower part of the main body shaft, and the diverter wear-resistant ring is arranged in cooperation with the main body shaft liquid inlet and outlet seat, the outer diameter of the diverter wear-resistant ring is dynamically sealed with the inner wall of the main body shaft liquid inlet and outlet seat, and the inner wall of the diverter wear-resistant ring is statically sealed with the outer circumference of the main body shaft. In order to meet the need for the main body shaft to rotate with the main shaft, a locking structure is provided at the locking pressure cover and the end of the diverter wear-resistant ring to achieve a locked fit.

[0053] In this embodiment, a positioning stop 151 is provided on the outer diameter of the main body shaft inlet and outlet seat 15 facing the vacuum side. The positioning stop 151 cooperates with the base 2 for installation and positioning to ensure the verticality of the installation surface of the cooling seal assembly and the coaxiality of the main body shaft. The main body shaft liquid inlet and outlet seat 15 is radially provided with a seat body inlet 18 and three seat body outlets 19, namely a seat body main outlet 191, a primary outlet 192 and a secondary outlet 193. The seat body main outlet 191 is arranged on the main body shaft liquid inlet and outlet seat obliquely above the seat body inlet 18 and is connected with the ring body outlet 21. The primary outlet 192 is arranged below the seat body main outlet 191 and is located at the lower part of the seat body inlet 18. Before use, the primary outlet 192 is not connected to the ring body inlet 20 on the diversion wear-resistant ring through a rotary seal seal. When the rotary seal is slightly worn during operation, if there is leakage of cooling liquid in the inflow process, it will flow out through the primary outlet 192. The primary outlet 192 plays a role in assisting the discharge of liquid. The secondary outlet 193 is arranged above the seat body inlet 18. Before use, the secondary outlet 193 is not connected to the ring body outlet 21 on the diverter wear-resistant ring through a rotary seal. When the rotary seal is slightly worn during operation, if there is leakage in the cooling liquid during the outflow process, it will flow out through the secondary outlet 193. The secondary outlet 193 plays a role in assisting the outflow. Five sealing grooves 194 are arranged on the inner wall of the main shaft inlet and outlet seat 15, and a rotating sealing ring 195 is arranged inside each sealing groove. The diverter wear-resistant ring 16 has five outer ring surfaces 161 on the outer diameter surface that are in contact with the rotating sealing ring 195, which are hardened to increase the wear resistance. Three sealing surfaces 162 are arranged on the inner diameter of the diverter wear-resistant ring 16, and the radial inlet 7 and radial outlet 8 of the main shaft are sealed with O-rings. Figure 5 As shown, the flow-dividing wear-resistant ring 16 is provided with a locking inner conical surface 163 on the inner diameter atmospheric side. Figure 6 As shown, the corresponding locking gland 17 is also provided with a locking outer conical surface 171, and the locking inner conical surface 163 is provided in cooperation with the locking outer conical surface 171. Figure 7 As shown, there is a groove 172 on the circumference of the locking gland 17. After the locking gland 17 and the shunt wear-resistant ring 16 are assembled, the shunt wear-resistant ring 16 can be axially locked and positioned. At the same time, the inner diameter of the locking gland 1 is tightly held with the main shaft body, and the circumference does not slip.

[0054] like Fig.15 As shown, in this embodiment, two annular cooling grooves 301 are provided on the outer diameter of the magnetic fluid sealing component 3, and the annular cooling grooves 301 are connected to the water inlet hole 41 inside the base. The cooling liquid enters the annular flow channel through the flange inlet, and enters the annular cooling grooves on the outer diameter of the magnetic fluid sealing component from the annular flow channel, so as to cool the magnetic fluid sealing component from the outer diameter of the magnetic fluid sealing component.

[0055] The base 2 is provided with a cooling flange 22, and the cooling structure of the base 2 includes an annular flow channel 23 arranged inside the base 2, a water inlet 41 connected to the annular cooling groove 301 on the outer diameter of the magnetic fluid sealing component 3, and a flange inlet 24 and a flange outlet 25 arranged on the cooling flange 22. A cooling flange is arranged on the base, and the cooling flange is connected to the equipment vacuum chamber. The upper part of the base is arranged inside the vacuum chamber. An annular flow channel is arranged inside the base, and the annular flow channel is connected to the annular cooling groove on the outer diameter of the magnet sealing component. The side of the cooling flange facing the atmosphere is provided with a flange inlet and a flange outlet. When in use, the cooling liquid enters the annular flow channel through the flange inlet, and enters the annular cooling groove on the outer diameter of the magnetic fluid sealing component from the annular flow channel. The magnetic fluid sealing component is cooled from the outer diameter of the magnetic fluid sealing component, thereby realizing independent circulation cooling of the inner diameter part and the outer diameter part of the magnetic fluid sealing component. The high temperature resistance of the magnetic fluid sealing component is greatly improved, and the service life is long.

[0056] The transmission mechanism assembly 4 includes a transmission gear 26 and a transmission bearing 27 which are integrally arranged with the main body shaft 1. The transmission gear 26 is fixed on the main body shaft 1, and the transmission bearings 27 are arranged on the main body shaft 1 at both ends of the transmission gear 26. The transmission mechanism assembly mainly includes a transmission gear and a transmission bearing. The transmission gear is fixed on the main body shaft in an integrated manner with the main body shaft, and the transmission bearings are arranged on the main body shaft at both ends of the transmission gear, thereby realizing a design in which the seat mechanism assembly is integrated on the main body shaft, so that the overall stability is good, the shaft end runout is small after the main shaft is assembled, the operation precision is high, and the vacuum sealing requirements when the main shaft is lifted and rotated over a long stroke under high temperature conditions can be met.

[0057] like Figure 2 As shown, in this embodiment, the body shaft 1 is used to cooperate with the main shaft 40. The body shaft is heat-treated to improve the stability and magnetic permeability at high temperatures. Therefore, a main shaft installation cavity 109 is provided inside the body shaft 1. The body shaft includes a body shaft body 101 and a body shaft water jacket 102 sealed and connected to the upper end of the body shaft body. Figure 3As shown, a cavity is provided inside the main body shaft water jacket 102, and the cavity forms an annular flow groove 9. A plurality of long guide baffles 103 are evenly spaced inside the annular flow groove 9, and the annular flow groove 9 is divided into 5 groups of independent trough units 12. There is no liquid leakage between each group of adjacent independent trough units 12. A short guide baffle 104 is provided inside each group of independent trough units 12, and the independent trough units 12 are divided into an inlet trough unit 13 and an outlet trough unit 14. A gap 105 is provided between the top of the short guide baffle 104 and the upper part of the annular flow groove 9, so that the top of the inlet trough unit 13 and the outlet trough unit 14 are connected to ensure that the coolant inside the inlet trough unit 13 flows back to the outlet trough unit 14 from the gap. The main body 101 of the main body shaft is provided with an inlet channel 10 and an outlet channel 11 in the axial direction corresponding to the inlet trough unit 13 and the outlet trough unit 14. The lower part of the main body of the main body shaft is provided with a radial inlet 7 connected to the inlet channel 10 and a radial outlet 8 connected to the outlet channel 11. In this embodiment, the radial inlet 7 is an annular inlet groove opened along the circumference of the main body shaft, and the radial outlet 8 is a radial outlet corresponding to the outlet channel 11. Correspondingly, a plurality of ring body inlets 20 connected to the radial inlet 7 and a plurality of ring body outlets 21 connected to the radial outlet 8 are evenly distributed on the split wear-resistant ring, and an outlet ring groove 164 is provided on the inner ring surface of the split wear-resistant ring, and the ring body outlet 21 is connected to the outlet ring groove 164. The cooling fluid is input from the lower part of the main body shaft in a radial direction, flows to the upper part through multiple channels after splitting, refluxes to the lower part after circulation, and is output from the radial direction. The magnetic fluid seal assembly 3 is arranged on the outer circumference of the water jacket of the main body shaft and arranged inside the cooling flange 22 on the base 2. The main shaft cooling system can cool the magnetic fluid sealing component 3 from the inner diameter, while the cooling flange can cool the magnetic fluid sealing component 3 from the outer diameter, thereby achieving comprehensive cooling of the magnetic fluid sealing component 3 inside and outside, and being able to adapt to long-term work under high temperature conditions.

[0058] In the middle of the main body of the main shaft, a bearing positioning convex ring 106 and a gear mounting ring 107 are arranged in a stepped manner. The transmission gear 26 is fixed on the gear mounting ring by fasteners. There are two sets of transmission bearings 27, one set is positioned at the upper end of the transmission gear 26 through the bearing positioning convex ring 106, and one set of transmission bearings is positioned at the lower end of the transmission gear 26 and is limited inside the base 2 by a bearing gland 108. The middle of the main body of the main shaft is integrated with the transmission mechanism assembly, the transmission gear is fixedly assembled with the main body of the main shaft, and the two transmission bearings are distributed at both ends of the transmission gear. The overall stability of the device is improved, and the runout of the shaft end after the main shaft is assembled is reduced. The transmission bearing is lubricated with high-temperature resistant grease to meet the needs of working under high temperature conditions.

[0059] like Figure 8As shown, it also includes a self-locking component 28, which includes a shaft seal gland 29 and a limit self-locking ring 30. The shaft seal gland 29 is embedded in the lower end of the main body shaft 1 and pressed on the lower end of the main body shaft 1 to be fixedly connected to the main body shaft 1; the limit self-locking ring 30 is arranged opposite to the shaft seal gland 29 and engages with the shaft seal gland 29 to limit and self-lock. The self-locking component is set to ensure the axial sealing of the main shaft under ultra-long stroke. When the main body shaft rotates, the main shaft runs synchronously and self-locks, and does not slip in the circumferential direction. The self-locking component mainly includes a shaft seal gland set on the main body shaft and a limit self-locking ring set on the main shaft. The shaft seal gland and the limit self-locking ring engage with each other to limit and self-lock. The lower end of the main body shaft is the atmosphere side. The shaft seal gland 29 and the limit self-locking ring 30 have toothed matching bites, which can limit axial position and self-lock during rotation to prevent slipping in the circumferential direction. When the main shaft needs to rotate, the limit self-locking ring on the main shaft and the shaft seal gland on the main body shaft engage with each other, and the rotation of the main shaft is driven by the rotation of the main body shaft. When the main shaft is lifted or lowered, the main shaft is lifted or lowered along the axial direction of the main body shaft. During the rotation and lifting process, dynamic sealing is achieved through the rotating seal ring 195 between the shunt wear ring and the main body shaft inlet and outlet seat, and the sealing and wear-resistant setting between the main shaft and the main body shaft are achieved through the rotating seal 33 between the lower end shaft seal gland and the main shaft, the lower gland wear ring 34, and the upper gland wear ring 39 at the upper end.

[0060] like Fig. 9 , Fig.10 , Fig.11 As shown, the inner wall of the shaft seal gland 29 is provided with a rotary seal groove 31 and a mounting groove 32, a rotary seal 33 is provided inside the rotary seal groove 31, a lower gland wear ring 34 is provided inside the mounting groove 32, and a gland bite tooth 35 is provided at the end of the shaft seal gland 29; Fig.12 , Fig.13 , Fig.14As shown, the position-limiting self-locking ring 30 includes two position-limiting self-locking half rings 36 symmetrically arranged, and the two position-limiting self-locking half rings 36 are buckled and locked together as a whole, and each position-limiting self-locking half ring 36 is respectively provided with a ring engaging tooth 37. The shaft seal gland must not only realize self-locking with the self-locking ring, but also realize sealing of the main body shaft. Therefore, a rotary seal groove and an installation groove are arranged on the inner wall of the shaft seal gland, and a rotary seal is pressed inside the rotary seal groove. A lower gland wear ring is arranged inside the installation groove. When matched with the main shaft, the lower gland wear ring contacts the main shaft 40 to guide the main shaft. The rotary seal that contacts and seals the main shaft is a high-temperature and wear-resistant rotary seal. The O-ring in the rotary seal has a small compression amount and is only used for vacuum sealing. When rotating, it is not necessary to use the friction generated by excessive compression of the O-ring to drive the main shaft to rotate, thereby ensuring reliable high-temperature sealing performance, wear resistance, and no leakage. At the same time, a static sealing O-ring 41 is arranged between the end face of the shaft seal gland and the end face of the body end to achieve static sealing between the shaft seal gland and the body shaft end face, thereby ensuring the sealing performance between the shaft seal gland and the body shaft end.

[0061] It also includes an upper shaft gland 38, which is embedded in the upper end of the main body shaft 1 and pressed on the upper end of the main body shaft 1 and fixedly connected to the main body shaft 1; an upper gland wear ring 39 is embedded on the inner wall of the upper shaft gland 38. In order to ensure the axial running accuracy of the main shaft of the entire magnetic fluid sealing device at high temperature, an upper shaft gland assembly is also provided at the upper end of the main body shaft, the upper shaft gland assembly is pressed inside the main body shaft and its end is fixedly connected to the end of the main body shaft, and an upper gland wear ring is provided inside the upper shaft gland to guide the main shaft. When in use, the upper gland wear ring contacts the main shaft, ensuring reliable high-temperature sealing performance, wear resistance, and no leakage.

[0062] Embodiment 2:

[0063] exist Fig.16 , Fig.17 In the embodiment shown, the technical solution is basically the same as that of Embodiment 1, except that the main body shaft cooling seal assembly 6 is arranged on the main body shaft 1 inside the base 2 to form an integrated sealing structure, and the main body shaft cooling seal assembly 6 is connected to the inside of the main body shaft to form a main body shaft gas cooling system.

[0064] In this embodiment, the main body shaft cooling seal assembly 6 includes a magnetic pole 1 6-1, a magnetic pole 2 6-2, a closed magnetic block structure and a magnetic pole locking cover 6-5; the magnetic pole 1 6-1 and the magnetic pole 2 6-2 are respectively sleeved on the main body shaft 1 from top to bottom and dynamically seal with the main body shaft 1 through a closed magnetic field structure, and the outer walls of the magnetic pole 1 6-1 and the magnetic pole 2 6-2 are statically sealed with the inner wall of the base 2; Fig.18As shown, in this embodiment, two sealing grooves 6-9 are respectively provided on the outer diameter of the pole one and the pole two, and a sealing ring 6-10 is provided inside the sealing groove 6-9 to achieve static sealing with the inner wall of the base. The pole one 6-1 and the pole two 6-2 are respectively provided with an inner guide groove 6-6, an outer guide groove 6-7 and a guide hole 6-8 connecting the inner guide groove and the outer guide groove; the outer diameter of the base 2 is provided with an air inlet hole 2-1 and an air outlet hole 2-2 connecting the outer guide groove 6-7; the air inlet hole 2-1 is connected to an air inlet connector 42, and the air outlet hole 2-2 is connected to an air outlet connector 43; the inner guide groove 6-6 is connected to the internal flow channel of the main body shaft. As shown Fig.19 As shown, in this embodiment, the first magnetic pole and the second magnetic pole are annular components, and the inner guide groove and the outer guide groove are respectively annular grooves.

[0065] The closed magnetic field structure includes a toothed structure 44, a magnetic fluid 6-3 and a magnetic block 6-4. The toothed structure is arranged on the main body shaft 1 at a sealed fit with the magnetic pole 1 6-1 and the magnetic pole 2 6-2 or at a sealed fit with the main body shaft on the magnetic poles 1 and 2; the magnetic fluid 6-3 is coated on the top of the tooth of the toothed structure 44; the magnetic block 6-4 is arranged between the axial matching surfaces of the magnetic poles 1 6-1 and the magnetic poles 2 6-2; the magnetic poles 1 6-1, the magnetic poles 2 6-2, the magnetic block 6-4 and the main body shaft 1 constitute a closed magnetic field, and the magnetic fluid 6-3 works inside the closed magnetic block. The toothed structure can be arranged on the main body shaft or on the magnetic poles 1 and 2. The top of the toothed structure is coated with magnetic fluid, and the magnetic fluid works inside the magnetic field. The magnetic block is arranged between the magnetic poles 1 and 2 to form a closed magnetic field with the main body shaft. In this embodiment, four groups of closed magnetic field structures are arranged. When the main body shaft rotates, the four groups of closed magnetic field structures form a dynamic sealing structure to separate and seal the atmosphere and the high-pressure gas.

[0066] In this embodiment, the main components of the main body shaft cooling seal assembly are all arranged inside the base, and the entire device is integrated. The high-pressure gas inlet and outlet interfaces for cooling the main body shaft are at the bottom of the device, and the gas enters and exits radially. A magnetic fluid sealing structure is arranged between the high-pressure gas flow channels for sealing and separation. The high-pressure cooling gas is input from the air inlet of the base, passes through the external guide groove, guide hole, and internal guide groove on the magnetic pole one, enters the radial inlet of the lower part of the main body shaft, rises to the high-temperature zone on the vacuum side, and flows back to the lower part of the main body shaft after circulation, and is discharged from the radial outlet of the lower part of the main body shaft, flows through the internal guide groove, guide hole, and external guide groove of the magnetic pole two, and is output from the outlet on the base. Thus, an independent main body shaft circulation cooling system is formed, which is radially input from the lower part of the main body shaft, axially cooled from bottom to top, flows back to the lower part axially after circulation, and is output radially.

[0067] The magnetic fluid sealing device described in the above embodiment has a long service life, can withstand a higher ambient temperature range, has a multi-channel circulation cooling structure, an independent main body shaft circulation cooling structure, and radial input and output from the main body shaft. When the main body shaft rotates, it ensures reliable high-temperature sealing performance, wear resistance, and no leakage. The main shaft lifting and rotating shaft seal limit self-locking mechanism ensures the axial sealing of the main shaft under ultra-long strokes. When the main body shaft rotates, the main shaft runs synchronously and self-locks without slipping in the circumferential direction. The rotating seal is wear-resistant and has a long service life at high temperatures. There is an integrated transmission mechanism in the middle of the main body shaft, which has good overall stability, small shaft end runout after the main shaft is assembled, and high operating accuracy.

[0068] The magnetic fluid sealing device described in the above embodiment is provided with a main body shaft that has been heat-treated and can improve stability and magnetic permeability at high temperatures, and a transmission mechanism assembly is integrated on the main body shaft. When working, the external transmission member drives the transmission mechanism assembly on the main body shaft to rotate, thereby driving the main body shaft to rotate together. The rotation of the main body shaft drives the main shaft that cooperates with it to rotate together, so that the overall stability performance is greatly improved. After the main shaft is assembled, the shaft end runout is effectively reduced, the shaft end runout is small, and the operation accuracy is high. In order to meet the needs of long-term work under high temperature conditions, a body shaft cooling seal assembly is arranged at the lower part of the body shaft. By arranging a body shaft cooling system between the body shaft cooling seal assembly and the cooling channel inside the body shaft, the inner diameter of the magnetic liquid sealing device can be effectively cooled, and the cooling of the main shaft can also be achieved; the body shaft cooling seal assembly and the inside of the body shaft form a cooling system that is radially input from the lower part of the body shaft, and axially cooled from bottom to top, circulated axially backflows to the lower part, and outputs from the radial direction. The independent body shaft circulation cooling system is radially input and radially output from the body shaft. When the body shaft rotates, reliable high-temperature sealing performance is guaranteed, wear-resistant, and leak-free. It can be applied to equipment without spindle cooling and with an ultra-long lifting stroke during operation, and vacuum sealing is achieved when the spindle is lifted and rotated. In order to achieve comprehensive cooling of the magnetic fluid sealing assembly and enable it to work for a long time under high temperature conditions, a cooling structure is arranged on the base outside the magnetic fluid sealing assembly to achieve comprehensive cooling of the outer diameter of the magnetic fluid sealing assembly. The two cooling systems cool the inner diameter and outer diameter of the magnetic fluid sealing assembly respectively, thereby improving the high temperature resistance of the magnetic fluid sealing assembly. The magnetic fluid sealing device has high structural integration, good stability, and good high temperature resistance, and is suitable for more precise vacuum sealing of long-axis and long-stroke equipment.

[0069] It should be noted that the above describes the embodiments of the present invention. However, those skilled in the art should understand that the present invention is not limited by the above embodiments, and the above embodiments are only for illustrating the principles of the present invention. The present invention may have various changes and improvements without departing from the scope of the present invention, and these changes and improvements all fall within the scope of the invention claimed for protection. Based on the embodiments described in the present invention, all other embodiments obtained by those of ordinary skill in the art on the basis of the technical solution of the present application without making creative work should fall within the scope of protection of the present invention.

Claims

1. A magnetic fluid sealing device, comprising a magnetic fluid sealing assembly (3), characterized in that: The magnetic fluid sealing component (3) is integrated on a body shaft (1), a transmission mechanism component (4) is integrated on the body shaft (1), a base (2) with a cooling structure is arranged outside the magnetic fluid sealing component (3) and the transmission mechanism component (4), and a body shaft cooling sealing component (6) is arranged on the body shaft (1) and is connected to the inside of the body shaft to form a body shaft cooling system; The main body shaft cooling seal assembly (6) is arranged on the main body shaft below the base and is sealed and docked with the base. The main body shaft cooling seal assembly (6) is connected to the inside of the main body shaft to form a main body shaft liquid cooling system; the main body shaft cooling seal assembly (6) comprises a main body shaft liquid inlet and outlet seat (15), a diverter wear-resistant ring (16) and a locking cover (17); the main body shaft liquid inlet and outlet seat (15) is radially provided with a seat body inlet (18) and a plurality of seat body outlets (19); the diverter wear-resistant ring (16) is provided with a ring body inlet (20) corresponding to the seat body inlet (18) and a ring body outlet (21) corresponding to the seat body outlet (19).

2. A magnetic fluid sealing device according to claim 1, characterized in that: The main body shaft (1) is provided with a plurality of cooling channels (5), the lower part of the main body shaft (1) is provided with radial inlet and outlet ports, the upper part of the main body shaft (1) is provided with an annular flow groove (9), and the radial inlet and outlet ports, the cooling channels and the annular flow groove are interconnected to form a main body shaft cooling system; a plurality of independent slot body units (12) are arranged at intervals along the circumferential direction inside the annular flow groove (9), and two adjacent groups of independent slot body units (12) are not connected to each other; each group of independent slot body units (12) is provided with an inlet slot unit (13) and an outlet slot unit (14), and the slot tops of the inlet slot unit (13) and the outlet slot unit (14) are connected.

3. A magnetic fluid sealing device according to claim 1, characterized in that: The main body shaft liquid inlet and outlet seat (15) is sleeved on the outer circumference of the lower part of the main body shaft (1); the diverter wear-resistant ring (16) is arranged inside the main body shaft liquid inlet and outlet seat (15) and is statically sealed with the outer circumference of the main body shaft (1); the diverter wear-resistant ring (16) is dynamically sealed with the inner wall of the main body shaft liquid inlet and outlet seat (15); the locking gland (17) is pressed on the end of the diverter wear-resistant ring (16) and is locked with the end of the diverter wear-resistant ring (16).

4. A magnetic fluid sealing device according to claim 1 or 2, characterized in that: A cooling flange (22) is provided on the base (2), and the cooling structure of the base (2) comprises an annular flow channel (23) provided inside the base (2), a water inlet hole (41) connected to the outer diameter annular cooling groove (301) of the magnetic fluid sealing component (3), and a flange inlet (24) and a flange outlet (25) provided on the cooling flange (22).

5. A magnetic fluid sealing device according to claim 1 or 2, characterized in that: The invention also comprises a self-locking component (28), wherein the self-locking component (28) comprises a shaft seal gland (29) and a limit self-locking ring (30), wherein the shaft seal gland (29) is embedded in the lower end of the main body shaft (1) and is pressed on the lower end of the main body shaft (1) and fixedly connected to the main body shaft (1); the limit self-locking ring (30) is arranged opposite to the shaft seal gland (29) and engages with the shaft seal gland (29) to form a limit self-locking; a rotating seal groove (31) and an installation groove (32) are arranged on the inner wall of the shaft seal gland (29), a rotating seal (33) is arranged inside the rotating seal groove (31), a lower gland wear-resistant ring (34) is arranged inside the installation groove (32), and gland engaging teeth (35) are arranged at the end of the shaft seal gland (29); and ring engaging teeth (37) are arranged on the limit self-locking ring (30).

6. A magnetic fluid sealing device, comprising a magnetic fluid sealing assembly (3), characterized in that: The magnetic fluid sealing component (3) is integrated on a body shaft (1), a transmission mechanism component (4) is integrated on the body shaft (1), a base (2) with a cooling structure is arranged outside the magnetic fluid sealing component (3) and the transmission mechanism component (4), and a body shaft cooling sealing component (6) is arranged on the body shaft (1) and is connected to the inside of the body shaft to form a body shaft cooling system; The body shaft cooling seal assembly (6) is arranged on the body shaft (1) inside the base (2) to form an integrated sealing structure, and the body shaft cooling seal assembly (6) is connected to the inside of the body shaft (1) to form a body shaft gas cooling system; The main body shaft cooling seal assembly (6) comprises a first magnetic pole (6-1), a second magnetic pole (6-2), a closed magnetic field structure and a magnetic pole locking cover (6-5); the first magnetic pole (6-1) and the second magnetic pole (6-2) are respectively provided with an inner guide groove (6-6), an outer guide groove (6-7) and a guide hole (6-8) connecting the inner guide groove and the outer guide groove; the outer diameter of the base (2) is provided with an air inlet (2-1) and an air outlet (2-2) connecting the outer guide groove; the inner guide groove is connected to the internal flow channel of the main body shaft.

7. A magnetic fluid sealing device according to claim 6, characterized in that: The main body shaft (1) is provided with a plurality of cooling channels (5), the lower part of the main body shaft (1) is provided with radial inlet and outlet ports, the upper part of the main body shaft (1) is provided with an annular flow groove (9), and the radial inlet and outlet ports, the cooling channels and the annular flow groove are interconnected to form a main body shaft cooling system; a plurality of independent slot body units (12) are arranged at intervals along the circumferential direction inside the annular flow groove (9), and two adjacent groups of independent slot body units (12) are not connected to each other; each group of independent slot body units (12) is provided with an inlet slot unit (13) and an outlet slot unit (14), and the slot tops of the inlet slot unit (13) and the outlet slot unit (14) are connected.

8. A magnetic fluid sealing device according to claim 6 or 7, characterized in that: The magnetic pole one (6-1) and the magnetic pole two (6-2) are respectively sleeved on the main body shaft (1) from top to bottom and are dynamically sealed with the main body shaft (1) through a closed magnetic field structure, and the outer walls of the magnetic pole one (6-1) and the magnetic pole two (6-2) are statically sealed with the inner wall of the base (2); the air inlet (2-1) is connected to an air inlet connector (42), and the air outlet (2-2) is connected to an air outlet connector (43).

9. A magnetic fluid sealing device according to claim 8, characterized in that: The closed magnetic field structure comprises a toothed structure (44), a magnetic fluid (6-3) and a magnetic block (6-4); the toothed structure (44) is arranged on the main body shaft at a sealing fit with magnetic poles one and two or arranged on magnetic poles one and two at a sealing fit with the main body shaft; the magnetic fluid (6-3) is coated on the top of the teeth of the toothed structure (44); the magnetic block (6-4) is arranged between the axial fitting surfaces of magnetic poles one and two; the magnetic poles one, two, the magnetic block and the main body shaft constitute a closed magnetic field.

10. A magnetic fluid sealing device according to claim 6 or 7, characterized in that: A cooling flange (22) is provided on the base (2), and the cooling structure of the base (2) comprises an annular flow channel (23) provided inside the base (2), a water inlet hole (41) connected to the outer diameter annular cooling groove (301) of the magnetic fluid sealing component (3), and a flange inlet (24) and a flange outlet (25) provided on the cooling flange (22).

11. A magnetic fluid sealing device according to claim 6 or 7, characterized in that: The invention also comprises a self-locking component (28), wherein the self-locking component (28) comprises a shaft seal gland (29) and a limit self-locking ring (30), wherein the shaft seal gland (29) is embedded in the lower end of the main body shaft (1) and is pressed on the lower end of the main body shaft (1) and fixedly connected to the main body shaft (1); the limit self-locking ring (30) is arranged opposite to the shaft seal gland (29) and engages with the shaft seal gland (29) to form a limit self-locking; a rotating seal groove (31) and an installation groove (32) are arranged on the inner wall of the shaft seal gland (29), a rotating seal (33) is arranged inside the rotating seal groove (31), a lower gland wear-resistant ring (34) is arranged inside the installation groove (32), and gland engaging teeth (35) are arranged at the end of the shaft seal gland (29); and ring engaging teeth (37) are arranged on the limit self-locking ring (30).

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