Vacuum chamber inner membrane material irradiation device

Abstract

The present invention relates to a membrane material irradiation device in a vacuum chamber, comprising: a static membrane irradiation device and a dynamic membrane irradiation device disposed within the vacuum chamber; the static membrane irradiation device being provided with a single microporous membrane to be irradiated, for verifying the current irradiation environment; and the dynamic membrane irradiation device being provided with a microporous membrane roll to be irradiated, for subjecting the microporous membrane roll to be irradiated to ion beam irradiation after the current irradiation environment is verified to meet the requirements. The present invention first uses the static membrane irradiation device to verify the current irradiation environment, and when it meets the requirements, the dynamic membrane irradiation device is used to automatically prepare the microporous membrane. The present invention has a simple and practical structure and can be used for membrane material irradiation experiments or small-batch trial production of heavy ion microporous membranes. The present invention can be widely applied to the field of membrane material irradiation.

Description

Technical Field

[0001] The invention relates to an irradiation experiment and production device, in particular to an irradiation device for membrane materials in a vacuum cavity, and belongs to the field of experiments and production of heavy ion microporous membranes and other membrane materials. Background Art

[0002] Heavy ion microporous membranes are the world's most sophisticated microporous filtration membranes. They are porous plastic films with densely packed pores, each of which is nearly identical in shape and size. Heavy ion microporous membranes are typically punched using heavy ions from a high-energy accelerator. Heavy ion punching is a critical step in the production process, and ion beam irradiation is therefore a crucial step in its production.

[0003] However, in current irradiation production, there is no simple and miniaturized device for irradiation in a vacuum chamber, which has great limitations in high-density, high-quality heavy ion microporous membranes and other materials that require irradiation in a vacuum chamber. Summary of the Invention

[0004] In view of the above problems, the purpose of the present invention is to provide a vacuum chamber inner membrane material irradiation device capable of producing high-density, high-quality heavy ion microporous membranes.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A device for irradiating membrane materials in a vacuum chamber comprises: a static membrane irradiation device and a dynamic membrane irradiation device arranged in the vacuum chamber; the static membrane irradiation device is provided with a single microporous membrane to be irradiated, for verifying the current irradiation environment; the dynamic membrane irradiation device is provided with a microporous membrane roll to be irradiated, for performing ion beam irradiation on the microporous membrane roll to be processed after the current irradiation environment is verified to meet the requirements.

[0007] Furthermore, the static membrane irradiation device includes a static membrane irradiation connection device, a supporting device and a membrane material clamping device; the static membrane irradiation connection device is used to realize the detachable connection between the static membrane irradiation device and the vacuum cavity; the supporting device is connected to the lower end of the static membrane irradiation connection device and is inserted into the vacuum cavity; the membrane material clamping device is detachably arranged on the supporting device, and is used to clamp a single microporous membrane to be processed.

[0008] Furthermore, the static film irradiation connection device includes a first connecting flange and a connecting flange support body, the first connecting flange is used to connect to the vacuum chamber flange on the vacuum chamber; the connecting flange support body is fastened to the other side of the first connecting flange, and its lower end is used to connect the support device.

[0009] Furthermore, the supporting device includes two supporting bases and a device bracket arranged between the two supporting bases; the device bracket is composed of four columns, which are respectively arranged at the four corners of the two supporting bases; the inner walls of the two supporting bases are provided with grooves for realizing the free insertion and withdrawal of the membrane material clamping device.

[0010] Furthermore, the membrane material clamping device includes a membrane plate frame and a film pressing frame. The membrane plate frame is used to place a single microporous membrane to be processed; the film pressing frame is used to fix the placed single microporous membrane on the membrane plate frame.

[0011] Furthermore, the membrane plate frame includes a membrane plate frame and a lower guide rail, and the membrane plate frame is used to place a single microporous membrane, and the lower guide rail is arranged at both ends of the membrane plate frame and is used to be inserted into the grooves of the two support bases.

[0012] Furthermore, the dynamic membrane irradiation device includes an automatic membrane material retraction device and a beam detection device; the automatic membrane material retraction device is fixedly arranged on the vacuum chamber, and is used to automatically retract and release the microporous membrane roll to be processed; the beam detection device is arranged behind the microporous membrane roll to be processed, and is used to detect the flow intensity of the heavy ion beam after penetrating the membrane, and according to the flow intensity, the automatic membrane material retraction device is interlocked so that the heavy ion beam intensity matches the movement speed of the membrane material.

[0013] Furthermore, the automatic film material rewinding and unwinding device includes a second connecting flange, a material rewinding reel, a material rewinding film roll, a material unwinding reel, a material unwinding film roll, a first connecting rod, a second connecting rod, a mechanical transmission device, a servo motor, and a control device; the servo motor is fixedly arranged in the vacuum chamber through the second connecting flange, and is used to control the mechanical transmission device according to the control signal sent by the control device; the mechanical transmission device is arranged on the other side of the second connecting flange through the first connecting rod and the second connecting rod, and is used to drive the material rewinding reel and the material unwinding reel under the control of the servo motor, thereby driving the material rewinding film roll to automatically rewind and unwind the material unwinding film roll.

[0014] Furthermore, the mechanical transmission device includes an active transmission rod and a passive transmission rod; a first material receiving reel and a first material unloading reel are arranged at intervals on the active transmission rod, and a second material receiving reel and a second material unloading reel are arranged at intervals on the passive transmission rod, and the first material receiving reel and the first material unloading reel are symmetrically arranged with the second material receiving reel and the second material unloading reel respectively, for clamping the material receiving film roll and the material unloading film roll.

[0015] Furthermore, the beam current detection device includes a beam current intensity detector, a connecting device and a data acquisition device; the beam current intensity detector is fixedly arranged behind the microporous membrane roll in the vacuum chamber through the connecting device, and is used to detect the current intensity of the heavy ion beam at a preset detection point after penetrating the membrane, and analyze the distribution range of the beam spot based on the distribution of the surrounding detection points; the data acquisition device is used to collect the detection data of the beam current intensity detector to provide a linkage basis for the motion control of the automatic retracting and releasing device of the membrane material.

[0016] The present invention has the following advantages due to the adoption of the above technical solution:

[0017] 1. The present invention sets up a static membrane irradiation device and a dynamic membrane irradiation device. First, the static membrane irradiation device is used to verify the current irradiation environment. When it meets the requirements, the dynamic membrane irradiation device is used to automatically prepare the microporous membrane. The structure is simple and practical. It can be used for membrane material irradiation experiments or small-batch trial production of heavy ion microporous membranes. It has low cost and can make up for the problem of insufficient funds in small-batch production and experiments.

[0018] 2. In the present invention, since the membrane material clamping device in the static membrane irradiation device can be freely checked in the supporting device, when the irradiation environment changes, the microporous membrane material can be conveniently replaced with simple operation.

[0019] 3. The dynamic membrane irradiation device of the present invention can realize automatic retraction and extension of the membrane material, and can adjust the retraction and extension speed of the membrane material according to the current beam size, so that the movement speed of the membrane material matches the beam intensity, thereby ensuring the accuracy of membrane material irradiation.

[0020] In summary, the present invention can be widely applied to the irradiation of heavy ion microporous membranes and other similar material experiments and production. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present invention. Throughout the drawings, the same reference numerals are used to denote the same components. In the drawings:

[0022] Figure 1 The invention provides a static vacuum chamber inner membrane material irradiation device;

[0023] Figure 2 1 is a schematic structural diagram of a static film irradiation device provided by an embodiment of the present invention;

[0024] Figure 3 The membrane plate provided by the embodiment of the present invention;

[0025] Figure 4 The film pressing frame provided by the embodiment of the present invention;

[0026] Figure 5 Schematic diagram of the structure of the automatic film material retracting and unretracting device provided by an embodiment of the present invention;

[0027] Figure 6 1 is a schematic structural diagram of a mechanical transmission device provided by an embodiment of the present invention;

[0028] Figure 7 This is a beam current intensity detection distribution diagram provided by an embodiment of the present invention;

[0029] The reference numerals in the figures are as follows:

[0030] 1. Vacuum chamber; 2. Static film irradiation device; 21. Static film irradiation connection device; 211. First connection flange; 212. Connection flange support; 2121. Support plate; 2122. Auxiliary support plate; 22. Support device; 221. Support base; 222. Device bracket; 23. Membrane material clamping device; 231. Membrane plate rack; 232. Film pressing rack; 2311. Membrane plate frame; 2312. Lower guide rail; 3. Dynamic film irradiation device; 31. Automatic film material retracting and unreeling device; 310. Second connection flange; 311. Reeling reel; 3111. First material-rewinding reel; 3112, second material-rewinding reel; 312, unwinding film roll; 313, unwinding reel; 3131, first unwinding reel; 3132, second unwinding reel; 3133, pneumatic telescopic rod; 314, material-rewinding film roll; 315, first connecting rod; 316, second connecting rod; 317, mechanical transmission device; 3171, active transmission rod; 3172, passive transmission rod; 318, servo motor; 319, control device; 32, beam detection device; 321, beam current intensity detector; 322, connecting device; 323, data acquisition device. DETAILED DESCRIPTION

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of the present invention.

[0032] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0033] Based on the limitations of irradiating membrane materials in vacuum chambers during current irradiation production, some embodiments of the present invention provide a device for irradiating membrane materials in vacuum chambers, comprising a static membrane irradiation device and a dynamic membrane irradiation device disposed within the vacuum chamber; the static membrane irradiation device is provided with a single microporous membrane to be irradiated, for verifying the current irradiation environment; the dynamic membrane irradiation device is provided with a microporous membrane roll to be irradiated, for subjecting the microporous membrane roll to be irradiated to ion beam irradiation after the current irradiation environment is verified to meet the requirements. The static membrane irradiation device is first used to verify the current irradiation environment, and when it meets the requirements, the dynamic membrane irradiation device is used to automatically prepare the microporous membrane. The device has a simple and practical structure and can be used for membrane material irradiation experiments or small-batch trial production of heavy ion microporous membranes. It is low-cost and can make up for the problem of insufficient funds for small-batch production and experiments.

[0034] Example 1

[0035] like Figure 1 As shown, this embodiment provides a membrane material irradiation device in a vacuum chamber, comprising: a static membrane irradiation device 2 and a dynamic membrane irradiation device 3 disposed in a vacuum chamber 1. The static membrane irradiation device 2 is provided with a single heavy ion microporous membrane or other membrane material to be irradiated, for verifying the current irradiation environment; the dynamic membrane irradiation device 3 is provided with a membrane roll of heavy ion microporous membrane or other membrane material to be irradiated, for performing ion beam irradiation on the membrane roll of heavy ion microporous membrane or other membrane material to be irradiated after the current irradiation environment is verified to meet the requirements.

[0036] Preferably, if Figure 2 As shown, the static membrane irradiation device 2 includes a static membrane irradiation connection device 21, a support device 22, and a membrane material clamping device 23. The static membrane irradiation connection device 21 is used to achieve a detachable connection between the static membrane irradiation device 2 and the vacuum chamber 1; the support device 22 is connected to the lower end of the static membrane irradiation connection device 21 and is inserted into the vacuum chamber 1; the membrane material clamping device 23 is detachably mounted on the support device 22 and is used to clamp a single heavy ion microporous membrane or other membrane material to be processed.

[0037] Preferably, the static film irradiation connection device 21 includes a first connection flange 211 and a connection flange support body 212. The first connection flange 211 is used to connect to the vacuum chamber flange on the vacuum chamber 1; the connection flange support body 212 is fastened to the other side of the first connection flange 211, and its lower end is used to connect the support device 22.

[0038] Preferably, the connecting flange support body 212 includes two supporting plates 2121 , both ends of the two supporting plates 2121 are respectively connected to the static film irradiation connecting flange 211 and the supporting device 22 , and an auxiliary supporting plate 2122 is provided between the two supporting plates 2121 .

[0039] Preferably, the support device 22 includes two support bases 221 and a device bracket 222 disposed between the two support bases 221. The device bracket 222 is composed of four columns, which are respectively disposed at the four corners of the two support bases 221; the inner walls of the two support bases 221 are provided with grooves for enabling free insertion and withdrawal of the membrane material clamping device 23, thereby achieving detachability.

[0040] Preferably, if Figure 3 、 Figure 4 As shown, the membrane material clamping device 23 includes a membrane plate frame 231 and a membrane pressing frame 232. The membrane plate frame 231 is used to place a single heavy ion microporous membrane and other membrane materials to be processed; the membrane pressing frame 232 is used to fix the placed heavy ion microporous membrane and other membrane materials on the membrane plate frame 231 so that they cannot be shaken.

[0041] Preferably, the membrane plate frame 231 includes a membrane plate frame 2311 and a lower guide rail 2312, and the membrane plate frame 2311 is used to place heavy ion microporous membranes and other membrane materials. The lower guide rail 2312 is arranged at both ends of the membrane plate frame 2311 and is used to be inserted into the grooves of the two support bases 221.

[0042] Preferably, if Figure 1 As shown, the dynamic membrane irradiation device 3 includes this embodiment also provides a membrane material irradiation device in a vacuum chamber, which includes: a membrane material automatic retracting and unretracting device 31 and a beam detection device 32. Among them, the membrane material automatic retracting and unretracting device 31 is fixedly set on the vacuum chamber 1, and is used to automatically retract and unretract the membrane roll of the heavy ion microporous membrane or other membrane material to be processed; the beam detection device 32 is set behind the membrane roll of the heavy ion microporous membrane or other membrane material to be processed, and is used to detect the flow intensity of the heavy ion beam after it penetrates the membrane, and according to the flow intensity, the automatic membrane material retracting and unretracting device 31 is interlocked in movement, so that the heavy ion beam intensity matches the movement speed of the membrane material.

[0043] Preferably, if Figure 5As shown, the automatic membrane material retraction and unloading device 31 includes a second connecting flange 310, a retraction reel 311, a discharge film roll 312, a discharge reel 313, a retraction film roll 314, a first connecting rod 315, a second connecting rod 316, a mechanical transmission device 317, a servo motor 318, and a control device 319. The servo motor 318 is fixedly mounted within the vacuum chamber 1 via the second connecting flange 310 and is configured to control the mechanical transmission device 317 based on control signals sent by the control device 319. The mechanical transmission device 317 is mounted on the other side of the second connecting flange 310 via the first connecting rod 315 and the second connecting rod 316 and is configured to drive the retraction reel 311 and the discharge reel 313 under the control of the servo motor 318, thereby driving the retraction film roll 314 and the discharge film roll 312, thereby achieving automatic placement or retraction of heavy ion microporous membranes and other membrane materials.

[0044] Preferably, if Figure 6 As shown, the mechanical transmission device 317 includes an active transmission rod 3171 and a passive transmission rod 3172. A first take-up reel 3111 and a first unwinding reel 3131 are spaced apart on the active transmission rod 3171, and a second take-up reel 3112 and a second unwinding reel 3132 are spaced apart on the passive transmission rod 3172. The first take-up reel 3111 and the first unwinding reel 3131 are symmetrically arranged with the second take-up reel 3112 and the second unwinding reel 3132, respectively, for holding the film roll to be irradiated.

[0045] Preferably, the second take-up reel 3112 and the second unwinding reel 3132 are retractable structures. For example, pneumatic telescopic rods 3133 are provided in the second take-up reel 3112 and the second unwinding reel 3132, which can automatically extend and retract to facilitate the removal of the unwinding film roll 312 and the take-up film roll 314 to be irradiated. For example, when the film roll needs to be removed, the pneumatic telescopic rods 3133 are pneumatically retracted backward to remove the film roll. When the film roll needs to be unwound, the pneumatic telescopic rods 3133 are pneumatically clamped forward to secure the film roll.

[0046] Preferably, the beam current detection device 32 includes a beam current detector 321, a connecting device 322, and a data acquisition device 323. The beam current detector 321 is fixedly mounted behind the membrane material in the vacuum chamber via the connecting device 322. It is used to detect the current intensity of the heavy ion beam at a preset detection point after it penetrates the membrane, and analyze the distribution range of the beam spot based on the distribution of surrounding detection points. The data acquisition device 323 is used to collect detection data from the beam current detector 321 to provide a linkage basis for the motion control of the membrane material automatic retracting and unretracting device 31.

[0047] like Figure 7As shown, the beam current detector 321 is composed of multiple detection points distributed on a plane. The data detected by each detection point is collected by the data acquisition device 323. If the current intensity data of the five points are basically the same, it can be considered that the uniformity of the beam distribution meets the requirements. If the difference is too large, it can be considered that the beam uniformity has deviated, and the beam can be adjusted according to the current intensity data of the specific detection point.

[0048] The above embodiments are only used to illustrate the present invention, wherein the structure, connection mode and manufacturing process of each component can be changed. Any equivalent transformations and improvements based on the technical solution of the present invention should not be excluded from the scope of protection of the present invention.

Claims

1. A vacuum chamber inner membrane material irradiation device, characterized in that: include: A static film irradiation device and a dynamic film irradiation device are arranged in the vacuum chamber; The static membrane irradiation device is provided with a single microporous membrane to be irradiated, which is used to verify the current irradiation environment; The dynamic membrane irradiation device is provided with a microporous membrane roll to be irradiated, and is used to perform ion beam irradiation on the microporous membrane roll to be irradiated after the current irradiation environment is verified to meet the requirements; The static membrane irradiation device includes a static membrane irradiation connection device, a support device, and a membrane material clamping device; the static membrane irradiation connection device is used to realize a detachable connection between the static membrane irradiation device and the vacuum chamber; the support device is connected to the lower end of the static membrane irradiation connection device and is inserted into the vacuum chamber; the membrane material clamping device is detachably provided on the support device and is used to clamp a single microporous membrane to be irradiated; The support device includes two support bases and a device bracket arranged between the two support bases; the device bracket is composed of four columns, which are respectively arranged at the four corners of the two support bases; the inner walls of the two support bases are provided with grooves for realizing the free insertion and withdrawal of the membrane material clamping device; The membrane material clamping device includes a membrane plate frame and a film pressing frame, wherein the membrane plate frame is used to place a single microporous membrane to be processed; and the film pressing frame is used to fix the placed single microporous membrane on the membrane plate frame; The membrane plate frame includes a membrane plate frame and a lower guide rail, and the membrane plate frame is used to place a single microporous membrane. The lower guide rail is arranged at both ends of the membrane plate frame and is used to be inserted into the grooves of the two support bases.

2. The device for irradiating inner film material of a vacuum chamber according to claim 1, characterized in that: The static film irradiation connection device includes a first connecting flange and a connecting flange support body. The first connecting flange is used to connect to the vacuum chamber flange on the vacuum chamber; the connecting flange support body is fastened to the other side of the first connecting flange, and its lower end is used to connect to the support device.

3. The device for irradiating inner film material of a vacuum chamber according to claim 1, characterized in that: The dynamic membrane irradiation device includes an automatic membrane material retraction device and a beam detection device; the automatic membrane material retraction device is fixedly arranged on the vacuum chamber, and is used to automatically retract and release the microporous membrane roll to be processed; the beam detection device is arranged behind the microporous membrane roll to be processed, and is used to detect the flow intensity of the heavy ion beam after penetrating the membrane, and according to the flow intensity, the automatic membrane material retraction device is linked to make the heavy ion beam intensity match the movement speed of the membrane material.

4. The device for irradiating inner film material of a vacuum chamber according to claim 3, characterized in that: The automatic film material rewinding and unwinding device includes a second connecting flange, a rewinding reel, a rewinding film roll, a discharging reel, a first connecting rod, a second connecting rod, a mechanical transmission device, a servo motor, and a control device; the servo motor is fixedly arranged in the vacuum chamber through the second connecting flange, and is used to control the mechanical transmission device according to the control signal sent by the control device; the mechanical transmission device is arranged on the other side of the second connecting flange through the first connecting rod and the second connecting rod, and is used to drive the rewinding reel and the discharging reel under the control of the servo motor, thereby driving the rewinding film roll to automatically rewind and unload the discharging film roll.

5. The device for irradiating inner film material of a vacuum chamber according to claim 4, characterized in that: The mechanical transmission device includes an active transmission rod and a passive transmission rod; a first material taking-up reel and a first material unwinding reel are arranged at intervals on the active transmission rod, and a second material taking-up reel and a second material unwinding reel are arranged at intervals on the passive transmission rod, and the first material taking-up reel and the first material unwinding reel are symmetrically arranged with the second material taking-up reel and the second material unwinding reel respectively, for clamping and fixing the unwinding film roll and the material taking-up film roll.

6. The device for irradiating inner film material of a vacuum chamber according to claim 3, characterized in that: The beam detection device includes a beam current intensity detector, a connecting device and a data acquisition device; the beam current intensity detector is fixedly arranged behind the microporous membrane roll in the vacuum chamber through the connecting device, and is used to detect the current intensity of the heavy ion beam at a preset detection point after penetrating the membrane, and analyze the distribution range of the beam spot based on the distribution of the surrounding detection points; the data acquisition device is used to collect the detection data of the beam current intensity detector, and provide a linkage basis for the motion control of the automatic retracting and releasing device of the membrane material.

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