Ultra-high vacuum transfer device and transfer method for docking with glove box

Abstract

The embodiment of the present invention discloses an ultra-high vacuum transfer device and a transfer method for docking with a glove box, the device comprising: a connecting cavity which is communicably or closedly connected to the glove box and forms a plurality of channels, and a vacuum environment generating mechanism, an inert gas generating mechanism and a sample transmission mechanism which are communicably or closedly connected to one of the channels respectively; and the vacuum environment generating mechanism is used to form an ultra-high vacuum environment in the connecting cavity; the inert gas generating mechanism is used to provide inert gas to the connecting cavity; and the sample transmission mechanism is used to transfer the sample from the connecting cavity to the glove box. The switching of the sample between the ultra-high vacuum environment and the controllable high-purity inert gas environment is realized, and at the same time, the whole process can effectively ensure the high cleanliness of the sample, providing a favorable supporting effect for subsequent research.

Description

Technical Field

[0001] The embodiments of the present invention relate to the technical field of vacuum transfer of new material samples, and specifically to an ultra-high vacuum transfer device and a transfer method for docking with a glove box. Background Art

[0002] Glove boxes are widely used in the fields of medicine, semiconductor devices, organic devices, vacuum coating, new materials research, etc. due to their excellent isolation properties. However, there are certain problems with the compatibility of sample transfer between glove boxes and the currently common ultra-high vacuum systems used for material preparation and characterization in the field of condensed matter physics research, such as molecular beam epitaxy, scanning tunneling microscopy, photoelectron spectroscopy, etc. During the entire transfer process, it is difficult to effectively achieve the conversion between vacuum and a certain pressure environment. In addition, during the transfer process, the samples being transferred are easily affected and contaminated by the environment, thus affecting the accuracy of the research results of the subsequent research process. Summary of the invention

[0003] To this end, an embodiment of the present invention provides an ultra-high vacuum transfer device and a transfer method for docking with a glove box. Through the synchronous cooperation of a vacuum environment generating mechanism and an inert gas generating mechanism, and under the effective coordination of a sample transmission mechanism, the switching of samples between an ultra-high vacuum environment and a controllable high-purity inert gas environment is achieved. At the same time, the entire process can effectively ensure the high cleanliness of the samples, providing favorable support for subsequent research.

[0004] In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:

[0005] In one aspect of an embodiment of the present invention, an ultra-high vacuum transfer device for docking with a glove box is provided, comprising:

[0006] a communicating cavity which is communicatively or closedly connected to the glove box and has a plurality of channels, and a vacuum environment generating mechanism, an inert gas generating mechanism and a sample transporting mechanism which are communicatively or closedly connected to one of the channels respectively; and,

[0007] The vacuum environment generating mechanism is used to form an ultra-high vacuum environment in the communicating cavity;

[0008] The inert gas generating mechanism is used to provide inert gas into the communicating cavity;

[0009] The sample transfer mechanism is used to transfer the sample from the connecting cavity to the glove box.

[0010] As a preferred solution of the present invention, the vacuum environment generating mechanism comprises at least a plurality of vacuum generators respectively arranged to be communicable with one of the channels; and,

[0011] The maximum vacuum degrees of the plurality of vacuum generators are not completely the same.

[0012] As a preferred solution of the present invention, the plurality of vacuum generators at least include a multi-stage vacuum pump group and a cryogenic adsorption pump.

[0013] As a preferred solution of the present invention, the multi-stage vacuum pump group is a two-stage vacuum pump group having a molecular pump and a mechanical pump.

[0014] As a preferred solution of the present invention, the sample transmission mechanism comprises a sample transfer member and a sample delivery member respectively arranged to be communicated with one of the channels; and,

[0015] The sample transfer member is used to transfer the sample from the outside to the communicating cavity, and / or to move the sample in the communicating cavity to the glove box;

[0016] The sample transfer member is used to transfer the sample in the communicating cavity between the sample transfer members.

[0017] As a preferred solution of the present invention, an observation window is also provided on the communicating cavity;

[0018] At least one of the communicating cavity, the vacuum environment generating mechanism, the inert gas generating mechanism and the sample transmission mechanism is mounted on a bracket;

[0019] At least one of the vacuum environment generating mechanism, the inert gas generating mechanism and the sample transmission mechanism is connected to the communication cavity in a communicable or closed manner via a gate valve;

[0020] The communicating cavity is also connected with a vacuum measuring mechanism.

[0021] As a preferred solution of the present invention, an elastic gas dispersion member is further provided at one end of the channel connected to the inert gas generating mechanism and away from the inert gas generating mechanism;

[0022] The elastic gas dispersion member at least includes an annular connector connected to the side wall of the channel and extending toward the inner wall of the connecting cavity, and an elastic gas dispersion ball located at the end of the annular connector, and the diameter of the elastic gas dispersion ball is smaller than the diameter of the channel, and a plurality of gas through holes are formed thereon.

[0023] As a preferred solution of the present invention, the diameter of the gas through hole on the elastic gas dispersion ball gradually increases from being away from the annular connector to being close to the annular connector.

[0024] In another aspect of the embodiment of the present invention, an ultra-high vacuum transfer method for a glove box is provided, using the ultra-high vacuum transfer device described above, and the ultra-high vacuum transfer method comprises:

[0025] S101, moving the sample to a sample transfer mechanism formed into an ultra-high vacuum environment;

[0026] S102, under the condition that the channel is closed, the sample transmission mechanism containing the sample is closed and connected to the communication cavity;

[0027] S103, opening the vacuum environment generating mechanism connected to the communication cavity until a preset vacuum degree is reached in the communication cavity;

[0028] S104, opening the passage between the sample transmission mechanism and the communicating cavity, transferring the sample from the sample transmission mechanism to the communicating cavity, and closing the passage between the vacuum environment generating mechanism and the communicating cavity;

[0029] S105, opening the passage between the inert gas generating mechanism and the connecting cavity, and introducing inert gas into the connecting cavity through the inert gas generating mechanism until the pressure in the connecting cavity reaches a preset value;

[0030] S106, connecting the glove box and the connecting cavity, transferring the sample in the connecting cavity to the glove box, and closing the passage between the connecting cavity and the glove box;

[0031] S107, opening the passage between the vacuum environment generating mechanism and the communicating cavity, and opening the passage until an ultra-high vacuum environment is formed in the communicating cavity;

[0032] Alternatively, the ultra-high vacuum transfer method comprises:

[0033] S201, opening the passage between the inert gas generating mechanism and the connecting cavity, and introducing inert gas into the connecting cavity through the inert gas generating mechanism until the pressure in the connecting cavity reaches a preset value;

[0034] S202, connecting the glove box and the connecting cavity, transferring the sample in the glove box to the connecting cavity, and closing the passage between the connecting cavity and the glove box;

[0035] S203, opening the vacuum environment generating mechanism connected to the communication cavity until a preset vacuum degree is reached in the communication cavity;

[0036] S204, opening the passage between the connecting cavity and the sample transmission mechanism, and moving the sample from the connecting cavity to the sample transmission mechanism;

[0037] S205, closing the passage between the connecting cavity and the sample transmission mechanism, closing the vacuum environment generating mechanism, and then opening the inert gas generating mechanism until the pressure in the connecting cavity reaches a preset value;

[0038] S206, after separating the connecting cavity from the sample transmission mechanism, seal the flange originally used to connect the connecting cavity and the sample transmission mechanism with a corresponding blind plate or observation window, and open the vacuum environment generating mechanism until the connecting cavity reaches a preset vacuum degree.

[0039] As a preferred embodiment of the present invention, the preset vacuum degree in step S103, the ultra-high vacuum environment in step S107, the preset vacuum degree in step S203 and the preset vacuum degree in step S206 are each no greater than 1×10 -8 mbar.

[0040] The embodiment of the present invention adopts a connecting cavity and a glove box that can be connected or closed, so that the condition parameters of the entire environment can be kept stable during the docking transfer process between the two, and the sample transfer mechanism is assisted to realize the transfer of the sample. At the same time, the two can be separated after the transfer to realize the effective detachment of the sample from at least one of them. On this basis, by respectively connecting the vacuum environment generating mechanism and the inert gas generating mechanism of the connecting cavity, the entire device can quickly obtain an ultra-high vacuum environment, can effectively be compatible with ultra-high vacuum material preparation and characterization equipment such as molecular beam epitaxy, scanning tunneling microscope, photoelectron spectroscopy, and realize the sample transfer between the glove boxes in the high-purity inert gas atmospheric pressure environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0042] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with the technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantial technical significance. Any structural modification, change in proportion or adjustment of size shall still fall within the scope of the technical contents and functions disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.

[0043] Figure 1 A schematic diagram of the structure of a connecting cavity provided by an embodiment of the present invention;

[0044] Figure 2A schematic diagram of the structure of a bracket provided in an embodiment of the present invention;

[0045] Figure 3 An exploded view of an ultra-high vacuum transfer device provided in an embodiment of the present invention;

[0046] Figure 4 A schematic diagram of the structure of an ultra-high vacuum transfer device provided in an embodiment of the present invention;

[0047] Figure 5 A schematic diagram of a partial structure of a sample transmission mechanism provided in an embodiment of the present invention;

[0048] Figure 6 A schematic diagram of the structure of an elastic gas dispersion element provided in an embodiment of the present invention.

[0049] In the figure:

[0050] 1-glove box; 2-connecting cavity; 3-vacuum environment generating mechanism; 4-sample transmission mechanism; 5-bracket; 6-vacuum measurement mechanism; 7-sample rack;

[0051] 11-channel; 12-annular connector; 13-elastic gas dispersion ball; 14-gas through hole; 15-first flange; 16-second flange; 17-stainless steel bar; 18-threaded hole;

[0052] 31-cryogenic adsorption pump; 32-molecular pump; 33-mechanical pump; 34-controller; 35-intake valve;

[0053] 42-sample transfer part;

[0054] 411-Ultra-high vacuum sample transfer equipment; 412-Magnetic sample storage rod; 413-Stainless steel column. DETAILED DESCRIPTION

[0055] The following is a description of the implementation of the present invention by specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] A specific embodiment of the present invention is further described below with reference to the accompanying drawings:

[0057] like Figure 1-Figure 5 As shown, the present invention provides an ultra-high vacuum transfer device for docking with a glove box, comprising:

[0058] like Figure 1The connecting cavity 2 shown in the figure has a plurality of channels 11 arranged on the connecting cavity 2, and a flange is installed at the opening of each channel 11 for detachably connecting with other mechanisms, for example, Figure 1 As specifically shown, in a specific embodiment of the present invention, 11 flanges can be provided, and those skilled in the art can select the corresponding flange type according to the difference in the connected structure. For example, in the present invention, six first flanges 15 and five second flanges 16 are provided, and the model of the first flange 15 is a CF63 flange, and the model of the second flange 16 is a CF35 flange. It should be noted that those skilled in the art can make adaptive adjustments to the number and type of flanges according to actual conditions, and the above conventional adjustments are also included in the technical solution of the present invention. Further, three stainless steel bars 17 with an angle of 120° are welded on the connecting cavity 2.

[0059] Furthermore, the stainless steel bars 17 are provided with M8 threaded holes 18 for fixing the connecting cavity 2 and the bracket 5 .

[0060] One of the first flanges 15 of the communication chamber 2 is communicable or sealed with the glove box 1 via a gate valve.

[0061] One of the second flanges 15 of the communication cavity 2 is sealedly connected to a vacuum measuring mechanism 6 .

[0062] Furthermore, the vacuum measuring mechanism 6 can be specifically selected as a full-range vacuum gauge.

[0063] The other second flange 16 of the communication cavity 2 is sealedly connected to a cryogenic adsorption pump 31 .

[0064] The cryogenic adsorption pump 31 can be any type that can be conventionally used by those skilled in the art. For example, the cryogenic adsorption pump 31 can adopt a vacuum acquisition device with a patent authorization announcement number of CN110230588A. It should be noted that other adsorption pumps that can be understood and used in the art to achieve vacuum environment by pumping gas based on low-temperature surface condensation gas, etc. can be used here, and the present invention is not limited to the above-mentioned specific adsorption pump structure.

[0065] Furthermore, another first flange 15 of the communication cavity 2 may also be sealed and connected to a secondary vacuum pump set.

[0066] Furthermore, the secondary vacuum pump group includes a mechanical pump 33 for obtaining a rough vacuum and a molecular pump 32 for obtaining a higher vacuum.

[0067] A sample transfer component 42 (for example, an ultra-high vacuum magnetic sample transfer rod) is sealed and connected to another first flange 15 of the communication cavity 2 .

[0068] Another first flange 15 of the communicating cavity 2 is sealedly connected to a magnetic sample storage rod 412 (an ultra-high vacuum condition can be formed inside and can be used in an ultra-high vacuum environment).

[0069] Furthermore, the magnetic sample storage rod 412 is provided with two M6 threaded holes and is connected to the bracket 5 via two stainless steel columns 413 .

[0070] Another second flange 16 of the communication cavity 2 is sealedly connected with an air intake valve 35 .

[0071] Further, the air inlet valve 35 is connected to a high-purity inert gas cylinder, such as high-purity argon gas, so that when the inert gas needs to be introduced, the air inlet valve 35 is opened to connect the high-purity inert gas cylinder and the connecting cavity 2 to achieve the introduction of the inert gas.

[0072] Furthermore, an elastic gas dispersion member is provided at one end of the channel of the connecting cavity 2 for connecting the high-purity inert gas cylinder away from the high-purity inert gas cylinder; Figure 6 As shown, the elastic gas dispersion member at least includes an annular connector 12 connected to the side wall of the channel 11 and extending toward the inner wall of the connecting cavity 2, and an elastic gas dispersion ball 13 located at the end of the annular connector 12, and a plurality of gas through holes 14 are formed on the elastic gas dispersion ball 13. This method enables the elastic gas dispersion ball 13 to be opened when the high-purity inert gas cylinder is supplied, and the gas is supplied to the connecting cavity 2 after the transition through the elastic gas dispersion ball 13, thereby realizing the dispersed supply of gas and avoiding excessive local pressure affecting the placed samples.

[0073] Furthermore, the diameter of the gas through hole 14 on the elastic gas dispersion ball 13 gradually increases from far away from the annular connector 12 to close to the annular connector 12. Such a setting can further improve the overall ventilation flow while avoiding the problem of excessive direct blowing pressure on the sample, so that the airflow during the gas filling process can be better dispersed and introduced from all sides.

[0074] One of the first flanges 15 of the communication cavity 2 is connected to the ultra-high vacuum sample transfer device 411 through a gate valve.

[0075] Furthermore, the ultra-high vacuum sample transfer device can be a device that can provide an ultra-high vacuum environment and can be mobile and transferred, which can be understood by those skilled in the art, for example, it can be the device described in Patent Grant Announcement No. CN203849265U. It should be noted that, similarly, such structures that can maintain an ultra-high vacuum environment and can be mobile and transferred that can be routinely obtained by those skilled in the art are all within the scope of protection of the present invention, and the present invention is not limited to the above-mentioned specific example.

[0076] An observation window may be further provided on one or more first flanges 15 and / or second flanges 16 of the communication cavity 2 so that the operation inside the communication cavity 2 can be clearly seen through the observation window.

[0077] In a more specific embodiment, the present invention further describes the structure and material of the bracket 5 so that it can be more convenient to use in actual operation. Specifically, the bracket 5 is a three-layer rack assembled from aluminum profiles, each layer has a matching aluminum alloy panel, wherein the top panel is not fully covered, leaving three M8 threaded holes to be fixedly connected to the connecting cavity 2, such as Figure 3 and Figure 4 As shown; the middle layer has two M6 threaded holes to fix two stainless steel columns 413 to support the magnetic sample storage rod 412, and the middle layer has holes so that the molecular pump 32 can pass through the holes through the bellows to seal and connect with the mechanical pump 33 at the bottom layer, and the middle layer can be used to place the controller 34 of the molecular pump 32; the bottom panel is fully covered and can be used to place the mechanical pump 33. The bottom of the bracket 5 is equipped with four rollers and four height-adjustable feet.

[0078] The present invention also provides an ultra-high vacuum transfer method for a glove box as described in any of the above, comprising the following:

[0079] Sample transfer steps from the ultra-high vacuum transfer device to the glove box 1:

[0080] The sample and the sample rack 7 prepared in the ultra-high vacuum environment are transferred into the ultra-high vacuum sample transfer device 411 (specifically, the device described in patent authorization announcement number CN203849265U can be selected);

[0081] like Figure 3 As shown, the ultra-high vacuum sample transfer device 411 containing the sample and the sample rack 7 is sealed and connected to one of the flanges of the communication cavity 2 through a gate valve;

[0082] Check to ensure that the inlet valve 35 is closed, turn on the power of the secondary vacuum pump group, open the valve between the molecular pump 32 and the mechanical pump 33, and open the exhaust valve of the mechanical pump 33 until the vacuum measuring mechanism 6 shows 1×10 -9 mbar level;

[0083] Liquid nitrogen is introduced into the cryogenic adsorption pump 31;

[0084] When the indication of the vacuum measuring mechanism 6 no longer changes, open the gate valve between the ultra-high vacuum sample transfer device 411 and the connecting cavity 2, and transfer the sample and the sample rack 7 to the card slot of the ultra-high vacuum magnetic sample storage rod 412; if the ultra-high vacuum sample transfer device 411 only has a magnetic sample storage rod 412 (that is, there is only one sample transfer component here, and it is the magnetic sample storage rod 412), it is necessary to use the ultra-high vacuum magnetic sample transfer rod (that is, the sample transfer component 42) to transfer the sample and the sample rack 7 to the card slot of the magnetic sample storage rod 412. It should be noted that the sample transfer component here includes the magnetic sample storage rod 412 and the ultra-high vacuum sample transfer device 411. When the ultra-high vacuum sample transfer device 411 is connected to the connecting cavity 2, the sample on the ultra-high vacuum sample transfer device 411 can be transferred relative to the connecting cavity 2 through the cooperation of the magnetic sample storage rod 412, and then the sample can be transferred to the glove box 1.

[0085] Close the gate valve between the ultra-high vacuum sample transfer device 411 and the communication chamber 2;

[0086] Close the valve between the molecular pump 32 and the mechanical pump 33 of the secondary vacuum pump group, and the exhaust valve after the mechanical pump 33, and then turn off the power supply of the secondary vacuum pump group;

[0087] Wait for the molecular pump 32 to slow down and pass the resonance state, and then open the air inlet valve 35 connected to the high-purity inert gas cylinder until the overpressure valve of the molecular pump 32 discharges gas;

[0088] Open the gate valve between the communication chamber 2 and the glove box 1;

[0089] The card slot of the magnetic sample storage rod 412 containing the sample and the sample rack 7 is introduced into the glove box 1;

[0090] The sample and the sample rack 7 are removed from the slot of the magnetic sample storage rod 412 in the glove box 1, and the slot of the magnetic sample storage rod 412 is withdrawn to the initial position;

[0091] Close the gate valve between the communication chamber 2 and the glove box 1;

[0092] Stop supplying liquid nitrogen to the cryogenic adsorption pump 31;

[0093] Turn on the power of the secondary vacuum pump group, open the valve between the molecular pump 32 and the mechanical pump 33, open the exhaust valve of the mechanical pump 33, and evacuate the connecting chamber 2 to 1×10 -9 Vacuum degree in the mbar range.

[0094] Sample transfer steps from glove box 1 to ultra-high vacuum transfer device:

[0095] Close the valve between the molecular pump 32 and the mechanical pump 33, close the exhaust valve of the mechanical pump 33, and turn off the power supply of the entire secondary vacuum pump group;

[0096] When the molecular pump 32 is slowed down and has passed the resonance state, the inlet valve 35 connected to the high-purity inert gas cylinder is opened until the overpressure valve of the molecular pump 32 discharges gas, and then the inlet valve 35 connected to the high-purity inert gas cylinder is closed;

[0097] Open the gate valve between the communication chamber 2 and the glove box 1;

[0098] The card slot of the magnetic sample storage rod 412 is introduced into the glove box 1;

[0099] Place the sample and the sample rack 7 from the glove box 1 onto the slot of the magnetic sample storage rod 412;

[0100] Pull the slot of the magnetic sample storage rod 412 with the sample and the sample rack 7 back to the initial position of the connecting cavity 2;

[0101] Close the gate valve between the communication chamber 2 and the glove box 1;

[0102] Turn on the power of the secondary vacuum pump group, open the valve between the molecular pump 32 and the mechanical pump 33, open the exhaust valve of the mechanical pump 33, and evacuate the communicating cavity 2 to 1×10 -9 Vacuum degree in the mbar range;

[0103] Liquid nitrogen is introduced into the cryogenic adsorption pump 31;

[0104] Open the valve between the ultra-high vacuum sample transfer device 411 and the communication chamber 2;

[0105] The sample and the sample rack 7 are removed from the card slot of the magnetic sample storage rod 412 and transferred into the ultra-high vacuum sample transfer device 411;

[0106] Close the valve between the ultra-high vacuum sample transfer device 411 and the communication chamber 2;

[0107] Stop supplying liquid nitrogen to the cryogenic adsorption pump 31;

[0108] Close the valve between the molecular pump 32 and the mechanical pump 33 of the secondary vacuum pump group, close the exhaust valve after the mechanical pump 33, and then turn off the power supply of the secondary vacuum pump group;

[0109] When the molecular pump 32 is slowed down and has passed the resonance state, the inlet valve 35 connected to the high-purity inert gas cylinder is opened until the overpressure valve of the molecular pump 32 is discharged;

[0110] At this time, the ultra-high vacuum sample transfer device 411 can be removed from the flange of the communication cavity 2, and the flange of the communication cavity 2 can be sealed and connected with an observation window or a blind plate of matching size;

[0111] Turn on the power of the secondary vacuum pump group, open the valve between the molecular pump 32 and the mechanical pump 33, open the exhaust valve of the mechanical pump 33, and evacuate the communicating cavity 2 to 1×10 -9 Vacuum degree in the mbar range.

[0112] Although the present invention has been described in detail above by general description and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements can be made to the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all belong to the scope of protection claimed by the present invention.

Claims

1. An ultra-high vacuum transfer device for docking with a glove box, characterized in that: include: A communicating cavity (2) which is communicatively or closably connected to the glove box (1) and has a plurality of channels (11), and a vacuum environment generating mechanism (3), an inert gas generating mechanism and a sample transporting mechanism (4) which are communicatively or closably connected to one of the channels (11); and The vacuum environment generating mechanism (3) is used to form an ultra-high vacuum environment in the communicating cavity (2); The inert gas generating mechanism is used to provide inert gas into the communicating cavity (2); The sample transfer mechanism (4) is used to transfer the sample from the connecting cavity (2) to the glove box (1); An elastic gas dispersion member is also provided at one end of the channel (11) connected to the inert gas generating mechanism and away from the inert gas generating mechanism; The elastic gas dispersion element at least comprises an annular connector (12) connected to the side wall of the channel (11) and extending toward the inner wall of the connecting cavity (2), and an elastic gas dispersion ball (13) located at the end of the annular connector (12), wherein the diameter of the elastic gas dispersion ball (13) is smaller than the diameter of the channel (11), and a plurality of gas through holes (14) are formed thereon.

2. The ultra-high vacuum transfer device for docking with a glove box according to claim 1, characterized in that: The vacuum environment generating mechanism (3) comprises at least a plurality of vacuum generators respectively arranged to be communicable with one of the channels (11); and, The maximum vacuum degrees of the plurality of vacuum generators are not completely the same.

3. The ultra-high vacuum transfer device for docking with a glove box according to claim 2, characterized in that: The plurality of vacuum generators at least include a multi-stage vacuum pump group and a cryogenic adsorption pump (31).

4. The ultra-high vacuum transfer device for docking with a glove box according to claim 3, characterized in that: The multi-stage vacuum pump group is a two-stage vacuum pump group having a molecular pump (32) and a mechanical pump (33).

5. An ultra-high vacuum transfer device for docking with a glove box according to any one of claims 1 to 4, characterized in that: The sample transmission mechanism (4) comprises a sample transfer member and a sample delivery member (42) which are respectively arranged to be communicable with one of the channels (11); and, The sample transfer member is used to transfer a sample from the outside to the connecting cavity (2), and / or to move a sample in the connecting cavity (2) to the glove box (1); The sample transfer member (42) is used to transfer the sample located in the connecting cavity (2) between the sample transfer members.

6. An ultra-high vacuum transfer device for docking with a glove box according to any one of claims 1 to 4, characterized in that: The communicating cavity (2) is also provided with an observation window; At least one of the communicating cavity (2), the vacuum environment generating mechanism (3), the inert gas generating mechanism and the sample transmission mechanism (4) is mounted on a bracket (5); At least one of the vacuum environment generating mechanism (3), the inert gas generating mechanism and the sample transmission mechanism (4) is connected to the communication cavity (2) in a communicable or closed manner via a gate valve; The communicating cavity (2) is also connected to a vacuum measuring mechanism (6).

7. An ultra-high vacuum transfer device for docking with a glove box according to any one of claims 1 to 4, characterized in that: The diameter of the gas through hole (14) on the elastic gas dispersion ball (13) gradually increases from being away from the annular connector (12) to being close to the annular connector (12).

8. An ultra-high vacuum transfer method for a glove box, characterized in that: Using the ultra-high vacuum transfer device according to any one of claims 1 to 7, the ultra-high vacuum transfer method comprises: S101, moving the sample to a sample transfer mechanism (4) formed into an ultra-high vacuum environment; S102, under the condition that the channel (11) is closed, the sample transmission mechanism (4) containing the sample is closed and connected to the communication cavity (2); S103, opening the vacuum environment generating mechanism (3) connected to the communicating cavity (2), until a preset vacuum degree is reached in the communicating cavity (2); S104, opening the channel (11) between the sample transmission mechanism (4) and the communicating cavity (2), transferring the sample from the sample transmission mechanism (4) to the communicating cavity (2), and closing the channel (11) between the vacuum environment generating mechanism (3) and the communicating cavity (2); S105, opening the passage (11) between the inert gas generating mechanism and the communicating cavity (2), and introducing inert gas into the communicating cavity (2) through the inert gas generating mechanism until the pressure in the communicating cavity (2) reaches a preset value; S106, connecting the glove box (1) and the connecting cavity (2), transferring the sample in the connecting cavity (2) to the glove box (1), and closing the passage between the connecting cavity (2) and the glove box (1); S107, opening the channel (11) between the vacuum environment generating mechanism (3) and the communicating cavity (2), and opening the channel until an ultra-high vacuum environment is formed in the communicating cavity (2); Alternatively, the ultra-high vacuum transfer method comprises: S201, opening the passage (11) between the inert gas generating mechanism and the connecting cavity (2), and introducing inert gas into the connecting cavity (2) through the inert gas generating mechanism until the pressure in the connecting cavity (2) reaches a preset value; S202, connecting the glove box (1) and the connecting cavity (2), transferring the sample in the glove box (1) to the connecting cavity (2), and closing the passage between the connecting cavity (2) and the glove box (1); S203, opening the vacuum environment generating mechanism (3) connected to the communicating cavity (2), until a preset vacuum degree is reached in the communicating cavity (2); S204, opening the channel (11) between the connecting cavity (2) and the sample transmission mechanism (4), and moving the sample from the connecting cavity (2) to the sample transmission mechanism (4); S205, closing the passage (11) between the connecting cavity (2) and the sample transmission mechanism (4), closing the vacuum environment generating mechanism (3), and then opening the inert gas generating mechanism until the pressure in the connecting cavity (2) reaches a preset value; S206, after separating the connecting cavity (2) from the sample transmission mechanism (4), sealing the channel (11) in the connecting cavity (2) for connecting to the sample transmission mechanism (4), and then opening the vacuum environment generating mechanism (3) until the connecting cavity (2) reaches a preset vacuum degree.

9. The ultra-high vacuum transfer method for a glove box according to claim 8, characterized in that: The preset vacuum degree in step S103, the ultra-high vacuum environment in step S107, the preset vacuum degree in step S203, and the preset vacuum degree in step S206 are each no greater than 1×10 -8 mbar.

Images