Pneumatic devices for semiconductor equipment

Abstract

The present invention relates to the technical field of fluid control devices in semiconductor equipment, and in particular to a pneumatic device for semiconductor equipment. The pneumatic device for semiconductor equipment comprises: a main pipe, a diverter valve block, and a plurality of branch pipes; the main pipe is connected to the plurality of branch pipes through the diverter valve block; each branch pipe is provided with a pressure regulating valve, a pressure detection element, a speed regulating valve, and a flow detection element. The pneumatic device for semiconductor equipment provided by the present invention can adjust the gas pressure and gas flow of a plurality of branches at the same time, and is convenient to use.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid control devices in semiconductor equipment, and in particular to a pneumatic device for semiconductor equipment. Background Art

[0002] When a semiconductor device includes multiple components, different components have different pressure and flow requirements for gases (for example, positive pressure gas, compressed gas, or vacuum gas). Multiple components correspond to multiple branches, and each branch has different requirements for gas pressure and flow. There is an urgent need for a pneumatic device that can simultaneously adjust the gas pressure and gas flow of different branches. Summary of the invention

[0003] The object of the present invention is to provide a pneumatic device for semiconductor equipment to solve the above technical problems to a certain extent.

[0004] The present invention provides a pneumatic device for semiconductor equipment, comprising: a main pipe, a diverter valve block and a plurality of branch pipes; the main pipe is connected with the plurality of branch pipes respectively through the diverter valve block; each branch pipe is provided with a pressure regulating valve, a pressure detection element, a speed regulating valve and a flow detection element.

[0005] Each branch pipe corresponds to a different component of the semiconductor equipment. The gas to be transported is introduced into the main pipe, and the gas is divided into multiple branches through the diverter valve block and transported to the corresponding branch pipes. The gas pressure on the branch can be adjusted by the pressure regulating valve on each branch pipe, and the gas flow on the branch can be adjusted by the speed regulating valve. The gas pressure on the branch can be obtained in real time through the pressure detection element, and the gas flow on the branch can be obtained in real time through the flow detection element. In this way, the gas pressure and gas flow on the branch can be adjusted to the required range as needed. The pneumatic device for semiconductor equipment provided by the present invention can adjust the gas pressure and gas flow of multiple branches at the same time, which is convenient to use.

[0006] Furthermore, a main valve is provided on the main pipe, and the main valve is located on a side of the diverter valve block away from the branch pipe.

[0007] Furthermore, the pressure regulating valve is arranged close to the diverter valve block, the speed regulating valve is arranged away from the diverter valve block, the pressure detection element is connected between the pressure regulating valve and the speed regulating valve, and the flow detection element is connected to the side of the speed regulating valve away from the pressure regulating valve.

[0008] Furthermore, the main pipe includes an air supply main pipe and an air exhaust main pipe, the diverter valve block includes an air supply diverter valve block and an air exhaust diverter valve block, the main valve includes an air supply main valve and an air exhaust main valve, and the multiple branch pipes include multiple air supply branches and multiple air exhaust branches; the air supply main pipe is connected with the multiple air supply branches respectively through the air supply diverter valve block, and the air exhaust main pipe is connected with the multiple air exhaust branches respectively through the air exhaust diverter valve block; each of the air supply branches is provided with an air supply pressure regulating valve, an air supply pressure detection element, an air supply speed regulating valve and an air supply flow detection element; each of the air exhaust branch pipes is provided with an air exhaust pressure regulating valve, an air exhaust pressure detection element, an air exhaust speed regulating valve and an air exhaust flow detection element.

[0009] Furthermore, the pneumatic device for semiconductor equipment also includes a box body, wherein the gas supply main pipe, the gas exhaust main pipe, the gas supply diverter valve block, the gas exhaust diverter valve block, the gas supply branch pipe, the gas exhaust branch pipe, the gas supply pressure regulating valve, the gas supply pressure detection element, the gas supply speed regulating valve, the gas supply flow detection element, the gas exhaust pressure regulating valve, the gas exhaust pressure detection element, the gas exhaust speed regulating valve and the gas exhaust flow detection element are all arranged in the box body;

[0010] The outer wall of the box body is provided with a main air supply interface connected to the main air supply pipe, a main air extraction interface connected to the main air extraction pipe, an air supply branch interface connected to multiple air supply branch pipes in a one-to-one correspondence, and an air extraction branch interface connected to multiple air extraction branch pipes in a one-to-one correspondence.

[0011] Furthermore, the box body includes a first side plate and a second side plate that are arranged opposite to each other, the main air supply valve and the main air extraction valve are arranged on the first side plate, and the plurality of air supply branch pipes and the plurality of air extraction branch pipes are arranged on the second side plate.

[0012] Furthermore, the second side panel is also provided with an installation connector, a network cable connector and a power connector.

[0013] Furthermore, along the length direction of the box body, a plurality of the air supply pressure regulating valves are arranged at intervals, and a plurality of the air extraction pressure regulating valves are arranged at intervals; along the width direction of the box body, the air supply pressure regulating valves and the air extraction pressure regulating valves are arranged side by side.

[0014] Furthermore, along the length direction of the box body, a plurality of the air supply pressure detection elements and a plurality of the air exhaust pressure detection elements are stacked and arranged; and the air supply pressure detection elements and the air exhaust pressure detection elements are arranged close to the second side plate.

[0015] Furthermore, the box body further comprises a third side plate and a fourth side plate which are arranged opposite to each other, and the third side plate and the fourth side plate are both connected between the first side plate and the second side plate; the air supply diverter valve block and the air exhaust diverter valve block are arranged on the inner wall of the third side plate;

[0016] In the length direction of the box body, the plurality of air supply flow detection elements are located on a side of the air supply pressure regulating valve close to the third side plate, and the plurality of air exhaust flow detection elements are located on a side of the air exhaust pressure regulating valve close to the third side plate.

[0017] It should be understood that both the foregoing general description and the following specific embodiments are for the purpose of example and illustration and do not necessarily limit the present disclosure. The accompanying drawings, which are incorporated into and constitute a part of the specification, illustrate the subject matter of the present disclosure. At the same time, the specification and the drawings are used to explain the principles of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of the structure of a pneumatic device for semiconductor equipment according to an embodiment of the present invention from a first perspective;

[0020] Figure 2 for Figure 1 A schematic diagram of the structure of the pneumatic device for semiconductor equipment from a second perspective is shown;

[0021] Figure 3 for Figure 1 A third perspective structural diagram of a pneumatic device for semiconductor equipment shown;

[0022] Figure 4 for Figure 1 A schematic diagram of the structure of a pneumatic device for semiconductor equipment from a fourth perspective shown;

[0023] Figure 5 for Figure 1 A fifth perspective structural diagram of a pneumatic device for semiconductor equipment shown;

[0024] Figure 6 for Figure 1 The schematic diagram of the pneumatic device used in semiconductor equipment is shown.

[0025] Icons: 1-box; 2-air supply branch interface; 3-air exhaust branch interface; 4-air supply main valve; 5-air exhaust main valve; 6-air supply diverter valve block; 7-air exhaust diverter valve block; 8-air supply pressure regulating valve; 9-air supply pressure detection element; 10-air supply speed regulating valve; 11-air supply flow detection element; 12-air exhaust pressure regulating valve; 13-air exhaust pressure detection element; 14-air exhaust speed regulating valve; 15-air exhaust flow detection element; 16-installation connector; 17-network cable connector; 18-power connector; 19-covering plate; 20-electrical parts; 21-aluminum rail; 22-grounding column. DETAILED DESCRIPTION

[0026] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0028] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] like Figures 1 to 6As shown, an embodiment of the present invention provides a pneumatic device for semiconductor equipment, including: a main pipe, a diverter valve block and a plurality of branch pipes; the main pipe is connected to the plurality of branch pipes respectively through the diverter valve block; each of the branch pipes is provided with a pressure regulating valve, a pressure detection element, a speed regulating valve and a flow detection element.

[0032] In this embodiment, each branch pipe corresponds to a different component of the semiconductor device, so that the gas flows in the main pipe, and the diverter valve block divides the gas in the main pipe into multiple branches and transports them to the corresponding multiple branches, or the diverter valve block merges the gas in multiple branches into the main pipe; the gas pressure on the branch can be adjusted by the pressure regulating valve on each branch pipe, the gas flow on the branch can be adjusted by the speed regulating valve, the gas pressure on the branch can be obtained in real time by the pressure detection element, and the gas flow on the branch can be obtained in real time by the flow detection element, so that the gas pressure and gas flow on the branch can be adjusted to the required range as needed. The pneumatic device for semiconductor equipment can adjust multiple branches separately at the same time, which is convenient to use.

[0033] The pressure detection element can be connected to a terminal (e.g., a mobile phone or a computer, etc.) for communication, and the staff can obtain the gas pressure on the branch through the terminal. Optionally, the pressure detection element uses a readable pressure detection element, and the staff can directly obtain the gas pressure information, which is further convenient for use.

[0034] The flow detection element can be connected to a terminal (such as a mobile phone or a computer, etc.) for communication, and the staff can obtain the gas flow on the branch through the terminal. Optionally, the flow detection element uses a readable flow detection element, and the staff can directly obtain the gas flow information, which is further convenient for use.

[0035] like Figure 6 As shown, based on the above embodiment, further, a main valve is provided on the main pipe, and the main valve is located on a side of the diverter valve block away from the branch pipe.

[0036] In this embodiment, a main valve is provided on the main pipe to control the gas flow in the main pipe and control the gas flow as a whole.

[0037] Among them, the positions of the pressure regulating valve, the pressure detection element, the speed regulating valve and the flow detection element connected to the branch can be set as needed.

[0038] Optional, such as Figure 6 As shown, the pressure regulating valve is arranged close to the diverter valve block, the speed regulating valve is arranged far away from the diverter valve block, the pressure detection element is connected between the pressure regulating valve and the speed regulating valve, and the flow detection element is connected to the side of the speed regulating valve far away from the pressure regulating valve.

[0039] In this embodiment, the pressure regulating valve, the pressure detecting element, the speed regulating valve and the flow detecting element are arranged in sequence in the direction away from the diverter valve block 6 .

[0040] Specifically, Figures 1 to 5 As shown, the main pipe includes an air supply main pipe and an air exhaust main pipe, the diverter valve block includes an air supply diverter valve block 6 and an air exhaust diverter valve block 7, the main valve includes an air supply main valve 4 and an air exhaust main valve 5, and the multiple branch pipes include multiple air supply branches and multiple air exhaust branches; the air supply main pipe is connected with the multiple air supply branches through the air supply diverter valve block 6, and the air exhaust main pipe is connected with the multiple air exhaust branches through the air exhaust diverter valve block 7; each of the air supply branches is provided with an air supply pressure regulating valve 8, an air supply pressure detection element 9, an air supply speed regulating valve 10 and an air supply flow detection element 11; each of the air exhaust branch pipes is provided with an air exhaust pressure regulating valve 12, an air exhaust pressure detection element 13, an air exhaust speed regulating valve 14 and an air exhaust flow detection element 15.

[0041] In this embodiment, positive-pressure gas or compressed gas can be delivered to the components through the gas supply main pipe and the gas supply branch pipes; the components can be evacuated through the gas exhaust main pipe and the gas exhaust branch pipes, that is, positive-pressure gas or compressed gas is delivered to the gas supply main pipe, the gas is diverted by the diverter valve block and then enters the corresponding branch pipes, and then is delivered to the corresponding components by the branch pipes. The gas exhaust device (for example: a vacuum pump) works, and the gas enters the branch pipe from the component, and then enters the main pipe through the diverter valve block.

[0042] The main air supply valve 4 and the air supply diverter valve block 6 are arranged on the main air supply pipe, which is used to transport positive pressure gas or compressed gas. Multiple air supply branches are connected to the main air supply pipe through the air supply diverter valve block 6 respectively. The air supply pressure regulating valve 8 is used to adjust the gas pressure of the air supply branch. The air supply pressure detection element 9 is used to detect the gas pressure of the air supply branch. The air supply speed regulating valve 10 is used to adjust the gas flow of the air supply branch. The air supply flow detection element 11 is used to detect the gas flow of the air supply branch; the main air extraction valve 5 and the air extraction diverter valve block 7 are arranged on the main air extraction pipe. The main air extraction pipe is used to transport vacuum gas. Multiple air extraction branches are connected to the main air extraction pipe through the air extraction diverter valve block 7 respectively. The air extraction pressure regulating valve 12 is used to adjust the gas pressure of the air extraction branch. The air extraction pressure detection element 13 is used to detect the gas pressure of the air extraction branch. The air extraction speed regulating valve 14 is used to adjust the gas flow of the air extraction branch. The air extraction flow detection element 15 is used to detect the gas flow of the air extraction branch.

[0043] like Figures 1 to 5As shown, on the basis of the above embodiments, further, the pneumatic device for semiconductor equipment also includes a box body 1, and the gas supply main pipe, the gas exhaust main pipe, the gas supply diversion valve block 6, the gas exhaust diversion valve block 7, the gas supply branch pipe, the gas exhaust branch pipe, the gas supply pressure regulating valve 8, the gas supply pressure detection element 9, the gas supply speed regulating valve 10, the gas supply flow detection element 11, the gas exhaust pressure regulating valve 12, the gas exhaust pressure detection element 13, the gas exhaust speed regulating valve 14 and the gas exhaust flow detection element 15 are all arranged in the box body 1; the outer wall of the box body 1 is provided with a gas supply main interface connected to the gas supply main pipe, a gas exhaust main interface connected to the gas exhaust main pipe, a gas supply branch interface 2 connected to multiple gas supply branch pipes one-to-one, and a gas exhaust branch interface 3 connected to multiple gas exhaust branch pipes one-to-one.

[0044] In this embodiment, the external gas supply device supplies corresponding gas to the gas supply main pipe through the gas supply main interface, and the gas extraction device is connected to the gas extraction main pipe through the gas extraction main interface. The pneumatic device for semiconductor equipment with this structure has a high degree of integration and is easy to use.

[0045] like Figures 1 to 5 As shown, based on the above embodiment, further, the box body 1 includes a first side panel and a second side panel arranged relatively to each other, the main air supply valve 4 and the main air exhaust valve 5 are arranged on the first side panel, and the plurality of the air supply branch pipes and the plurality of the air exhaust branch pipes are arranged on the second side panel. This layout makes the structure inside the box body 1 compact and regular, saving installation space.

[0046] like Figures 1 to 5 As shown, based on the above embodiment, further, the second side panel is further provided with a mounting connector 16, a network cable connector 17 and a power connector 18. In this embodiment, the mounting connector 16 can be provided to realize connection with external components, the network cable connector 17 can be provided to realize communication connection of the device, and the power connector 18 can be provided to realize power supply of the external power supply element to the power-consuming element in the box body 1.

[0047] Specifically, a control element may be disposed in the housing 1, and the control element is communicatively connected with the pressure detection element and the flow detection element.

[0048] like Figures 1 to 5 As shown, based on the above embodiment, further, along the length direction of the box body 1, multiple air supply pressure regulating valves 8 are arranged at intervals, and multiple air extraction pressure regulating valves 12 are arranged at intervals; along the width direction of the box body 1, the air supply pressure regulating valves 8 and the air extraction pressure regulating valves 12 are arranged side by side. This layout makes the structure inside the box body 1 compact and regular, saves space, and thus makes the volume of the device small.

[0049] like Figures 1 to 5As shown, based on the above embodiment, further, along the length direction of the box body 1, multiple air supply pressure detection elements and multiple air exhaust pressure detection elements are stacked and arranged; and the air supply pressure detection elements and the air exhaust pressure detection elements are arranged close to the second side panel.

[0050] The plurality of air supply pressure detection elements are stacked as a whole above or below the plurality of air exhaust pressure detection elements.

[0051] like Figures 1 to 5 As shown, on the basis of the above embodiment, further, the box body 1 also includes a third side panel and a fourth side panel arranged opposite to each other, and the third side panel and the fourth side panel are both connected between the first side panel and the second side panel; the air supply diverter valve block 6 and the air exhaust diverter valve block 7 are arranged on the inner wall of the third side panel; in the length direction of the box body 1, the plurality of air supply flow detection elements 11 are located on the side of the air supply pressure regulating valve 8 close to the third side panel, and the plurality of air exhaust flow detection elements 15 are located on the side of the plurality of air exhaust pressure regulating valves 12 close to the third side panel.

[0052] Specifically, the box body 1 may be provided with an opening on one side, so as to facilitate installation of components into the box body 1 . The pneumatic device for semiconductor equipment further comprises a sealing plate 19 , which is provided on the opening side of the box body 1 to cover the opening.

[0053] like Figures 1 to 5 As shown, based on the above embodiment, further, an electrical component 20 may be arranged in the box 1, and the electrical component 20 is connected to the box 1 through an aluminum track 21. A grounding column 22 may also be arranged on the box 1.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention. In the description provided herein, a large number of specific details are described. However, it can be understood that the embodiments of the present invention can be practiced without these specific details. In some examples, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description. In addition, those skilled in the art can understand that although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features of different embodiments means being within the scope of the present invention and forming different embodiments.

Claims

1. A pneumatic device for semiconductor equipment, characterized in that: include: A main pipe, a flow dividing valve block and a plurality of branch pipes; the main pipe is connected to the plurality of branch pipes respectively through the flow dividing valve block; each branch pipe is provided with a pressure regulating valve, a pressure detection element, a speed regulating valve and a flow detection element; The main pipe is provided with a main valve, and the main valve is located on a side of the diverter valve block away from the branch pipe; The main pipe comprises an air supply main pipe and an air extraction main pipe, the diverter valve block comprises an air supply diverter valve block (6) and an air extraction diverter valve block (7), the main valve comprises an air supply main valve (4) and an air extraction main valve (5), and the plurality of branch pipes comprises a plurality of air supply branch pipes and a plurality of air extraction branch pipes; the air supply main pipe is connected to the plurality of air supply branch pipes through the air supply diverter valve block (6), and the air extraction main pipe is connected to the plurality of air extraction branch pipes through the air extraction diverter valve block (7); each of the air supply branch pipes The pipes are each provided with an air supply pressure regulating valve (8), an air supply pressure detection element (9), an air supply speed regulating valve (10) and an air supply flow detection element (11); each of the air extraction branch pipes is provided with an air extraction pressure regulating valve (12), an air extraction pressure detection element (13), an air extraction speed regulating valve (14) and an air extraction flow detection element (15); positive pressure gas or compressed gas is delivered to the component through the air supply main pipe and the air supply branch pipes; the component is evacuated through the air extraction main pipe and the air extraction branch pipes; It also comprises a box body (1), wherein the air supply main pipe, the air exhaust main pipe, the air supply diverter valve block (6), the air exhaust diverter valve block (7), the air supply branch pipe, the air exhaust branch pipe, the air supply pressure regulating valve (8), the air supply pressure detection element (9), the air supply speed regulating valve (10), the air supply flow detection element (11), the air exhaust pressure regulating valve (12), the air exhaust pressure detection element (13), the air exhaust speed regulating valve (14) and the air exhaust flow detection element (15) are all arranged in the box body (1).

2. The pneumatic device for semiconductor equipment according to claim 1, characterized in that: The pressure regulating valve is arranged close to the diverter valve block, the speed regulating valve is arranged far away from the diverter valve block, the pressure detecting element is connected between the pressure regulating valve and the speed regulating valve, and the flow detecting element is connected to the side of the speed regulating valve far away from the pressure regulating valve.

3. The pneumatic device for semiconductor equipment according to claim 1, characterized in that: The outer wall of the box body (1) is provided with a main air supply interface connected to the main air supply pipe, a main air extraction interface connected to the main air extraction pipe, an air supply branch interface (2) connected to the plurality of air supply branch pipes in a one-to-one correspondence, and an air extraction branch interface (3) connected to the plurality of air extraction branch pipes in a one-to-one correspondence.

4. The pneumatic device for semiconductor equipment according to claim 3, characterized in that: The box body (1) comprises a first side plate and a second side plate which are arranged opposite to each other, the main air supply valve (4) and the main air extraction valve (5) are arranged on the first side plate, and a plurality of the air supply branch pipes and a plurality of the air extraction branch pipes are arranged on the second side plate.

5. The pneumatic device for semiconductor equipment according to claim 4, characterized in that: The second side panel is also provided with a mounting connector (16), a network cable connector (17) and a power connector (18).

6. The pneumatic device for semiconductor equipment according to claim 4, characterized in that: Along the length direction of the box body (1), a plurality of the air supply pressure regulating valves (8) are arranged at intervals, and a plurality of the air exhaust pressure regulating valves (12) are arranged at intervals; along the width direction of the box body (1), the air supply pressure regulating valves (8) and the air exhaust pressure regulating valves (12) are arranged side by side.

7. The pneumatic device for semiconductor equipment according to claim 6, characterized in that: Along the length direction of the box body (1), a plurality of the air supply pressure detection elements and a plurality of the air exhaust pressure detection elements are stacked and arranged; and the air supply pressure detection elements and the air exhaust pressure detection elements are arranged close to the second side plate.

8. The pneumatic device for semiconductor equipment according to claim 7, characterized in that: The box body (1) further comprises a third side plate and a fourth side plate which are arranged opposite to each other, wherein the third side plate and the fourth side plate are connected between the first side plate and the second side plate; the air supply diverter valve block (6) and the air exhaust diverter valve block (7) are arranged on the inner wall of the third side plate; In the length direction of the box body (1), the plurality of air supply flow detection elements (11) are located on a side of the air supply pressure regulating valve (8) close to the third side plate, and the plurality of air exhaust flow detection elements (15) are located on a side of the plurality of air exhaust pressure regulating valves (12) close to the third side plate.

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