Temperature control system

Abstract

The temperature control system comprises: a circulation flow path including a temperature control object and through which a fluid flows; a first temperature control device for supplying at least one of a fluid having a first temperature and a fluid having a second temperature higher than the first temperature to a first portion of the circulation flow path to adjust the temperature of the fluid in the first portion; a second temperature control device for adjusting the temperature of the fluid supplied to the temperature control object at a second portion of the circulation flow path between the first portion and the temperature control object; a first temperature sensor for detecting the temperature of the fluid supplied from the first portion to the second portion; a second temperature sensor for detecting the temperature of the fluid or the temperature control object at a predetermined position of the circulation flow path between an outlet of the second portion and an inlet of the first portion; a first controller for controlling the first temperature control device based on a detection value of the first temperature sensor so that the fluid supplied from the first portion to the second portion becomes a first target temperature; and a second controller for controlling the second temperature control device based on a detection value of the second temperature sensor so that the fluid becomes a second target temperature at a predetermined position. The first target temperature is determined based on the second target temperature.

Description

Technical Field

[0001] The present disclosure relates to temperature control systems. Background Art

[0002] In the technical field of semiconductor manufacturing equipment, a temperature control system is used that controls the temperature of a temperature control object by circulating a fluid, as disclosed in Patent Document 1. Patent Document 1 describes a method of using a mixing valve to mix a supply fluid from an external high-temperature cooler and a low-temperature cooler with a circulating fluid to achieve a target temperature in order to switch the target temperature as quickly as possible during a process.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2013-105359 Summary of the invention

[0006] Problems to be solved by the invention

[0007] However, in the method disclosed in Patent Document 1, although the dynamic characteristics of the mixing valve are high gain and high response, there is a problem that the temperature controllability deteriorates and easily causes fluctuations due to the nonlinear characteristics of the valve opening and flow rate of the mixing valve, the insensitive zone of the valve opening, nonlinear elements such as hysteresis, the low response of the temperature control object, and the invalid time of the temperature control object.

[0008] An object of the present disclosure is to control the temperature of a fluid with high precision.

[0009] Means for solving problems

[0010] According to the present disclosure, a temperature control system is provided, wherein the temperature control system comprises: a circulation flow path including a temperature control object and through which a fluid flows; a first temperature control device that supplies at least one of a fluid at a first temperature and a fluid at a second temperature higher than the first temperature to a first portion of the circulation flow path to adjust the temperature of the fluid in the first portion; a second temperature control device that adjusts the temperature of the fluid supplied to the temperature control object at a second portion of the circulation flow path between the first portion and the temperature control object; a first temperature sensor that detects the temperature of the fluid supplied from the first portion to the second portion; a second temperature sensor that detects the temperature of the fluid or the temperature control object at a predetermined position of the circulation flow path between an outlet of the second portion and an inlet of the first portion; a first controller that controls the first temperature control device based on a detection value of the first temperature sensor so that the fluid supplied from the first portion to the second portion becomes a first target temperature; and a second controller that controls the second temperature control device based on a detection value of the second temperature sensor so that the fluid becomes a second target temperature at the predetermined position; the first target temperature is determined based on the second target temperature.

[0011] Effects of the Invention

[0012] According to the present disclosure, the temperature of the fluid can be controlled with high accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a diagram showing the configuration of a temperature control system according to the first embodiment.

[0014] Figure 2 It is a diagram schematically showing the second temperature regulation device according to the first embodiment.

[0015] Figure 3 This is a cross-sectional view showing a part of the temperature adjustment unit of the first embodiment in an enlarged manner.

[0016] Figure 4 It is a block diagram showing the temperature control system according to the first embodiment.

[0017] Figure 5 This is a diagram for explaining the prescribed values ​​in the first embodiment.

[0018] Figure 6 It is a block diagram showing a temperature control system according to the second embodiment.

[0019] Figure 7 It is a block diagram showing a temperature control system according to a third embodiment.

[0020] Figure 8 It is a block diagram showing a temperature control system according to a fourth embodiment.

[0021] Fig. 9 It is a block diagram showing a temperature control system according to a fifth embodiment. DETAILED DESCRIPTION

[0022] Hereinafter, the embodiments of the present disclosure will be described with reference to the drawings, but the present disclosure is not limited to the embodiments. The constituent elements of the embodiments described below can be combined appropriately. In addition, there is also a case where some constituent elements are not used.

[0023] [First embodiment]

[0024] <Overview of temperature control system>

[0025] Figure 1 1 is a diagram showing the structure of the temperature control system 1 of this embodiment. Figure 1 As shown, the temperature control system 1 comprises: a circulation path 2, which includes a temperature control object S and a supply fluid F to circulate; a first temperature control device 3, which adjusts the temperature of the fluid F in a first portion 2A of the circulation path 2; a second temperature control device 4, which adjusts the temperature of the fluid F in a second portion 2B of the circulation path 2 between the first portion 2A and the temperature control object S; a pump 5, which allows the fluid F to circulate in the circulation path 2; a temperature sensor 6, which detects the temperature of the fluid F; a first controller 7, which controls the first temperature control device 3; and a second controller 8, which controls the second temperature control device 4.

[0026] The temperature control object S includes at least a part of a semiconductor manufacturing device. The temperature control object S includes, for example, a wafer holder of a plasma processing device. The wafer holder holds a semiconductor wafer to be subjected to plasma processing in the plasma processing device. The wafer holder is made of, for example, aluminum. The wafer holder has an electrostatic chuck that holds the semiconductor wafer by electrostatic adsorption force. The electrostatic chuck uses Coulomb force to adsorb and hold the semiconductor wafer by applying a DC voltage. The temperature of the semiconductor wafer held by the wafer holder is adjusted by controlling the temperature of the wafer holder.

[0027] The temperature control system 1 controls the temperature of the temperature control object S by supplying a fluid F to the temperature control object S. In the present embodiment, the fluid F is a liquid. Alternatively, the fluid F may be a gas. In the circulation flow path 2, the fluid F is supplied from the first temperature control device 3 to the second temperature control device 4 and then supplied to the temperature control object S. The fluid F supplied to the temperature control object S returns to the first temperature control device 3.

[0028] The temperature control object S has an inlet Ma for the fluid F from the second temperature control device 4 to flow in, and an outlet Mb for the fluid F to flow out. The first temperature control device 3 has an inlet Mc for the fluid F from the temperature control object S to flow in, and an outlet Md for the fluid F to flow out. The second temperature control device 4 has an inlet Me for the fluid F from the first temperature control device 3 to flow in, and an outlet Mf for the fluid F to flow out. The inlet Mc of the first temperature control device 3 refers to the inlet of the first part 2A. The outlet Md of the first temperature control device 3 refers to the outlet of the first part 2A. The inlet Me of the second temperature control device 4 refers to the inlet of the second part 2B. The outlet Mf of the second temperature control device 4 refers to the outlet of the second part 2B.

[0029] The first temperature control device 3 is a so-called coarse temperature control device. The second temperature control device 4 is a so-called fine temperature control device. The temperature adjustable range (gain) of the first temperature control device 3 is larger than the temperature adjustable range of the second temperature control device 4. As an example, the temperature adjustable range of the first temperature control device 3 is ±50°C, and the temperature adjustable range of the second temperature control device 4 is ±1°C. The response speed (responsiveness) of the second temperature control device 4 is higher than the response speed of the first temperature control device 3. The so-called response speed refers to the time required for the temperature of the fluid F to reach the target temperature. A high response speed means that the time required for the temperature of the fluid F to reach the target temperature is short. A low response speed means that the time required for the temperature of the fluid F to reach the target temperature is long.

[0030] The storage tank 9 is arranged on the circulation flow path 2. In the embodiment, the first portion 2A includes the storage tank 9 arranged on the circulation flow path 2. The storage tank 9 is provided with an inlet port Mc and an outlet port Md.

[0031] The first temperature control device 3 supplies a first temperature T to the storage tank 9 of the circulation flow path 2 L The fluid F and the first temperature T L High second temperature T H The temperature of the fluid F in the storage tank 9 is adjusted by using at least one of the fluids F in the storage tank 9. The first temperature adjustment device 3 roughly adjusts the temperature of the fluid F.

[0032] The second temperature regulating device 4 regulates the temperature of the fluid F supplied to the temperature regulating target S in the second portion 2B of the circulation flow path 2 between the tank 9 and the temperature regulating target S. The second temperature regulating device 4 regulates the temperature of the fluid F with high accuracy.

[0033] The pump 5 is disposed in the circulation flow path 2 between the storage tank 9 and the second temperature regulating device 4. The fluid F circulates in the circulation flow path 2 by being driven by the pump 5.

[0034] The temperature sensor 6 includes a first temperature sensor 61 that detects the temperature T1 of the fluid F supplied from the first part 2A to the second part 2B, and a second temperature sensor 62 that detects the temperature T2 of the fluid F or the temperature control object S at a specified position of the circulation flow path 2 between the outlet Mf of the second part 2B (the second temperature control device 4) and the inlet Mc of the first part 2A (the first temperature control device 3).

[0035] The prescribed position of the circulation flow path 2 where the temperature T2 of the fluid F is detected by the second temperature sensor 62 includes a first prescribed position P1 set between the second portion 2B and the temperature control object S, and a second prescribed position P2 and a third prescribed position P3 set between the inlet Ma of the temperature control object S and the inlet Mc of the first portion 2A. The second temperature sensor 62 includes a second temperature sensor 62A that detects the temperature T2a of the fluid F at the first prescribed position P1 set between the second portion 2B and the temperature control object S, a second temperature sensor 62B that detects the temperature T2b of the temperature control object S at the second prescribed position P2 set at the temperature control object S, and a second temperature sensor 62C that detects the temperature T2c of the fluid F at the third prescribed position P3 set between the temperature control object S and the first portion 2A.

[0036] <First temperature control device>

[0037] The first temperature control device 3 has a first temperature storage device T L The low temperature temperature control unit 10L of the fluid F stores the first temperature T L High second temperature T H A high-temperature temperature control unit 10H for supplying a fluid F, a low-temperature flow path 11L for circulating the fluid F supplied from the low-temperature temperature control unit 10L to the storage tank 9, a high-temperature flow path 11H for circulating the fluid F supplied from the high-temperature temperature control unit 10H to the storage tank 9, a low-temperature overflow flow path 12L for circulating the fluid F returned from the storage tank 9 to the low-temperature temperature control unit 10L, a high-temperature overflow flow path 12H for circulating the fluid F returned from the storage tank 9 to the high-temperature temperature control unit 10H, and a valve system 13 for adjusting the flow rate of the fluid F flowing in the low-temperature flow path 11L and the flow rate of the fluid flowing in the high-temperature flow path 11H.

[0038] The low temperature regulating unit 10L stores the first temperature T L The low temperature temperature control unit 10L can adjust the first temperature T L The fluid F is sent to the storage tank 9. The low temperature temperature control unit 10L includes a low temperature storage tank, a low temperature temperature control device, and a low temperature pump for sending the fluid F. The low temperature temperature control device includes a heat exchanger. The low temperature temperature control device adjusts the temperature of the fluid F to a first temperature T L . is adjusted to the first temperature T L The fluid F is stored in a low temperature tank. As an example, the first temperature T L It's 5℃.

[0039] The high temperature regulating unit 10H stores the first temperature T L High second temperature T H The high temperature control unit 10H can adjust the second temperature T H The fluid F is sent to the storage tank 9. The high temperature temperature control unit 10H includes a high temperature storage tank, a high temperature temperature control device, and a high temperature pump for sending the fluid F. The high temperature temperature control device includes a heat exchanger. The high temperature temperature control device adjusts the temperature of the fluid F to the second temperature T H . is adjusted to the second temperature T H The fluid F is stored in a high temperature tank. As an example, the second temperature T H It is 90℃.

[0040] The low temperature flow path 11L connects the low temperature temperature control unit 10L and the storage tank 9. The low temperature temperature control unit 10L can adjust the first temperature T L The fluid F is supplied to the tank 9. The fluid F supplied from the low-temperature temperature control unit 10L to the tank 9 flows through the low-temperature flow path 11L.

[0041] The high temperature flow path 11H connects the high temperature temperature control unit 10H to the tank 9. The high temperature temperature control unit 10H can adjust the second temperature T H The fluid F is supplied to the tank 9. The fluid F supplied from the high temperature control unit 10H to the tank 9 flows through the high temperature flow path 11H.

[0042] The valve system 13 can switch between a first state where the fluid F is not supplied from the low temperature temperature control unit 10L and the high temperature temperature control unit 10H to the tank 9, a second state where the fluid F is supplied from the low temperature temperature control unit 10L to the tank 9, and a third state where the fluid F is supplied from the high temperature temperature control unit 10H to the tank 9. The first state is a state where the fluid F is not supplied from both the low temperature temperature control unit 10L and the high temperature temperature control unit 10H to the tank 9. The second state is a state where the fluid F is supplied from the low temperature temperature control unit 10L to the tank 9. L The third state is a state in which the fluid F of the second temperature T is supplied to the tank 9 from the high temperature temperature control unit 10H. H The fluid F is not supplied from the low-temperature temperature control unit 10L to the tank 9.

[0043] In addition, the valve system 13 can switch between a fourth state in which the fluid F is not returned from the tank 9 to each of the low-temperature temperature control unit 10L and the high-temperature temperature control unit 10H, a fifth state in which the fluid F is returned from the tank 9 to the low-temperature temperature control unit 10L, and a sixth state in which the fluid F is returned from the tank 9 to the high-temperature temperature control unit 10H. The fourth state is a state in which the fluid F is not returned from the tank 9 to both the low-temperature temperature control unit 10L and the high-temperature temperature control unit 10H. The fifth state is a state in which the fluid F is returned from the tank 9 to the low-temperature temperature control unit 10L, and the fluid F is not returned from the tank 9 to the high-temperature temperature control unit 10H. The sixth state is a state in which the fluid F is returned from the tank 9 to the high-temperature temperature control unit 10H, and the fluid F is not returned from the tank 9 to the low-temperature temperature control unit 10L.

[0044] The valve system 13 is controlled by the first controller 7. The first controller 7 controls the valve system 13 of the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F supplied from the first part 2A (tank 9) to the second part 2B (second temperature regulating device 4) becomes the first target temperature SV1. The valve system 13 controls the valve system 13 to adjust the flow rate of the fluid F flowing from the low temperature temperature regulating unit 10L to the tank 9 in the low temperature flow path 11L and the flow rate of the fluid F flowing from the high temperature temperature regulating unit 10H to the tank 9 in the high temperature flow path 11H so that the fluid F in the tank 9 becomes the first target temperature SV1.

[0045] The valve system 13 includes a low-temperature flow regulating valve 14L arranged in the low-temperature flow path 11L, a high-temperature flow regulating valve 14H arranged in the high-temperature flow path 11H, a low-temperature on-off valve 15L arranged in the low-temperature relief flow path 12L, and a high-temperature on-off valve 15H arranged in the high-temperature relief flow path 12H.

[0046] The low temperature flow regulating valve 14L is controlled by the first controller 7. The first controller 7 can control the low temperature flow regulating valve 14L to switch the supply and stop of the fluid F from the low temperature temperature regulating unit 10L to the storage tank 9, or adjust the flow rate of the fluid F supplied from the low temperature temperature regulating unit 10L to the storage tank 9. By opening the low temperature flow regulating valve 14L, the first temperature T is supplied from the low temperature temperature regulating unit 10L to the storage tank 9. L The supply of the fluid F from the low-temperature temperature control unit 10L to the tank 9 is stopped by closing the low-temperature flow rate regulating valve 14L.

[0047] The high temperature flow regulating valve 14H is controlled by the first controller 7. The first controller 7 can control the high temperature flow regulating valve 14H to switch the supply and stop of the fluid F from the high temperature temperature regulating unit 10H to the storage tank 9, or adjust the flow rate of the fluid F supplied from the high temperature temperature regulating unit 10H to the storage tank 9. By opening the high temperature flow regulating valve 14H, the second temperature T is supplied from the high temperature temperature regulating unit 10H to the storage tank 9. HThe supply of the fluid F from the high temperature temperature control unit 10H to the tank 9 is stopped by closing the high temperature flow rate regulating valve 14H.

[0048] The low-temperature flow regulating valve 14L may be either a proportional valve or an on-off valve. The proportional valve can implement flow control of the fluid F with high precision. Therefore, when a proportional valve is used as the low-temperature flow regulating valve 14L, the temperature control of the fluid F in the storage tank 9 can be implemented with high precision. In addition, when high-precision flow control of the fluid F and high-precision temperature control of the fluid F in the storage tank 9 are not required, an inexpensive on-off valve may be used as the low-temperature flow regulating valve 14L. Similarly, the high-temperature flow regulating valve 14H may be either a proportional valve or an on-off valve.

[0049] The low temperature on-off valve 15L is an on-off valve. When the low temperature on-off valve 15L is opened, the fluid F returns from the tank 9 to the low temperature temperature control unit 10L. When the low temperature on-off valve 15L is closed, the fluid F does not return from the tank 9 to the low temperature temperature control unit 10L. The on-off valve is, for example, a solenoid valve.

[0050] The high temperature on-off valve 15H is an on-off valve. When the high temperature on-off valve 15H is opened, the fluid F returns from the tank 9 to the high temperature temperature control unit 10H. When the high temperature on-off valve 15H is closed, the fluid F does not return from the tank 9 to the high temperature temperature control unit 10H. The on-off valve is, for example, a solenoid valve.

[0051] The first controller 7 closes the low temperature flow regulating valve 14L and the high temperature flow regulating valve 14H when setting the flow state of the fluid F to the first state. Thus, the fluid F is not supplied from the low temperature control unit 10L and the high temperature control unit 10H to the tank 9 .

[0052] When the flow state of the fluid F is set to the second state, the first controller 7 opens the low temperature flow control valve 14L and closes the high temperature flow control valve 14H. L The fluid F is supplied to the storage tank 9 at a predetermined flow rate via the low-temperature flow path 11L.

[0053] When the flow state of the fluid F is set to the third state, the first controller 7 opens the high temperature flow control valve 14H and closes the low temperature flow control valve 14L. H The fluid F is supplied to the tank 9 at a predetermined flow rate via the high temperature flow path 11H.

[0054] The first controller 7 closes the low temperature on-off valve 15L and the high temperature on-off valve 15H when setting the flow state of the fluid F to the fourth state. Thus, the fluid F does not return from the tank 9 to the low temperature temperature control unit 10L and the high temperature temperature control unit 10H.

[0055] When the flow state of the fluid F is set to the fifth state, the first controller 7 opens the low temperature on-off valve 15L and closes the high temperature on-off valve 15H. Thus, at least a portion of the fluid F stored in the tank 9 is returned to the low temperature temperature regulating unit 10L via the low temperature relief flow path 12L.

[0056] When the flow state of the fluid F is set to the sixth state, the first controller 7 opens the high temperature on-off valve 15H and closes the low temperature on-off valve 15L. Thus, at least a portion of the fluid F stored in the tank 9 returns to the high temperature temperature regulating unit 10H via the high temperature relief flow path 12H.

[0057] <Second temperature control device>

[0058] Figure 2 Schematically shows the second temperature control device 4 of this embodiment. The second temperature control device 4 has a thermoelectric module 60. Figure 2 As shown, the second temperature control device 4 includes a main body component 40 having a temperature control flow path 42, a temperature control unit 50 having a thermoelectric component 60 connected to the main body component 40, a heat exchange plate 44 connected to the temperature control unit 50, and a drive circuit 45 for driving the temperature control unit 50.

[0059] The temperature control flow path 42 is provided inside the body member 40. The fluid F from the tank 9 flows into the temperature control flow path 42 through the inlet Me. The fluid F flowing through the temperature control flow path 42 flows out of the temperature control flow path 42 through the outlet Mf. The fluid F flowing out of the temperature control flow path 42 is supplied to the temperature control object S.

[0060] The temperature adjustment unit 50 adjusts the temperature of the fluid F flowing through the temperature adjustment flow path 42 via the main body member 40. The temperature adjustment unit 50 includes a thermoelectric element 60. The temperature adjustment unit 50 adjusts the temperature of the fluid F using the thermoelectric element 60.

[0061] The thermoelectric element 60 absorbs heat or generates heat to adjust the temperature of the fluid F flowing through the temperature control flow path 42. The thermoelectric element 60 absorbs heat or generates heat by the supply of electric power. The thermoelectric element 60 absorbs heat or generates heat by the Peltier effect.

[0062] The heat exchange plate 44 exchanges heat with the temperature control unit 50. The heat exchange plate 44 has an internal flow path (not shown) through which a temperature control medium flows. The temperature control medium flows into the internal flow path of the heat exchange plate 44 after the temperature is adjusted by a medium temperature control device (not shown). The temperature control medium flows in the internal flow path, taking heat from the heat exchange plate 44 or providing heat to the heat exchange plate 44. The temperature control medium flows out of the internal flow path and returns to the fluid temperature control device.

[0063] Figure 3FIG. 5 is a cross-sectional view of a part of the temperature regulating unit 50 of the present embodiment, which is enlarged. Figure 3 As shown, the temperature control unit 50 includes a plurality of thermoelectric modules 60 and a housing 51 for accommodating the plurality of thermoelectric modules 60. One end surface of the housing 51 is connected to the body member 40. The other end surface of the housing 51 is connected to the heat exchange plate 44.

[0064] The thermoelectric component 60 has a first electrode 65, a second electrode 66, and a thermoelectric semiconductor element 63. The thermoelectric semiconductor element 63 includes a p-type thermoelectric semiconductor element 63P and an n-type thermoelectric semiconductor element 63N. The first electrode 65 is connected to the p-type thermoelectric semiconductor element 63P and the n-type thermoelectric semiconductor element 63N, respectively. The second electrode 66 is connected to the p-type thermoelectric semiconductor element 63P and the n-type thermoelectric semiconductor element 63N, respectively. The first electrode 65 is adjacent to the body part 40. The second electrode 66 is adjacent to the heat exchange plate 44. One end surface of the p-type thermoelectric semiconductor element 63P and one end surface of the n-type thermoelectric semiconductor element 63N are connected to the first electrode 65, respectively. The other end surface of the p-type thermoelectric semiconductor element 63P and the other end surface of the n-type thermoelectric semiconductor element 63N are connected to the second electrode 66, respectively.

[0065] The thermoelectric component 60 absorbs heat or generates heat by the Peltier effect. The driving circuit 45 supplies electric power to the thermoelectric component 60 for causing the thermoelectric component 60 to absorb heat or generate heat. The driving circuit 45 provides a potential difference between the first electrode 65 and the second electrode 66. If a potential difference is provided between the first electrode 65 and the second electrode 66, electric charges move in the thermoelectric semiconductor element 63. Heat moves in the thermoelectric semiconductor element 63 by the movement of electric charges. Thus, the thermoelectric component 60 absorbs heat or generates heat. For example, if a potential difference is provided between the first electrode 65 and the second electrode 66 so that the first electrode 65 generates heat and the second electrode 66 absorbs heat, the fluid F flowing through the temperature control flow path 42 is heated. If a potential difference is provided between the first electrode 65 and the second electrode 66 so that the first electrode 65 absorbs heat and the second electrode 66 generates heat, the fluid F flowing through the temperature control flow path 42 is cooled.

[0066] The drive circuit 45 supplies power (potential difference) to the thermoelectric assembly 60. The drive circuit 45 is controlled by the second controller 8. The second controller 8 controls the thermoelectric assembly 60 by controlling the drive circuit 45. The amount of heat absorbed or generated by the thermoelectric assembly 60 is adjusted by adjusting the power supplied from the thermoelectric assembly 60. The amount of heat absorbed or generated by the thermoelectric assembly 60 is adjusted to adjust the temperature of the fluid F flowing through the temperature control flow path 42.

[0067] The second controller 8 controls the thermoelectric module 60 of the second temperature regulating device 4 based on the detection value of the second temperature sensor 62 so that the fluid F reaches the second target temperature SV2 at a predetermined position of the circulation flow path 2 .

[0068] <Control method>

[0069] Figure 4 1 is a block diagram showing the temperature control system 1 of the present embodiment. In the present embodiment, a control method for setting the fluid F at the first predetermined position P1 between the second temperature regulation device 4 and the temperature regulation object S to the second target temperature SV2 will be described.

[0070] like Figure 4 As shown, the temperature control system 1 comprises: a circulation flow path 2 including a temperature control object S; a first temperature control device 3 for supplying a first temperature T to a first portion 2A of the circulation flow path 2; L The fluid F and the first temperature T L High second temperature T H a second temperature regulating device 4 which adjusts the temperature of the fluid F supplied to the temperature regulating object S in the second portion 2B of the circulation path 2 between the first portion 2A and the temperature regulating object S; a first temperature sensor 61 which detects the temperature of the fluid F supplied from the first portion 2A to the second portion 2B; a second temperature sensor 62A which detects the temperature of the fluid F at a first predetermined position P1 of the circulation path 2 between the second portion 2B and the temperature regulating object S; a first controller 7 which controls the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F supplied from the first portion 2A to the second portion 2B becomes the first target temperature SV1; and a second controller 8 which controls the second temperature regulating device 4 based on the detection value of the second temperature sensor 62A so that the fluid F becomes the second target temperature SV2 at the first predetermined position P1 of the circulation path 2 between the second portion 2B and the temperature regulating object S.

[0071] The first temperature regulating device 3 and the second temperature regulating device 4 are connected in series in the circulation flow path 2. The outlet Mf of the second temperature regulating device 4 is connected to the inlet Ma of the temperature regulating object S via the flow path of the circulation flow path 2. The outlet Mb of the temperature regulating object S is connected to the inlet Mc of the first temperature regulating device 3 via the flow path of the circulation flow path 2.

[0072] The response speed of the first temperature control device 3 is slower than that of the temperature control object S. The response speed of the second temperature control device 4 is faster than that of the temperature control object S. The temperature controllable range of the first temperature control device 3 is larger than that of the second temperature control device 4 .

[0073] When the temperature control object S is a wafer holder of a plasma processing device, the temperature control object S is subjected to external heat disturbance of plasma. If the temperature control object S is subjected to external heat disturbance, the temperature of the fluid F in at least a portion of the circulation flow path 2 may rise. Even if the temperature control object S is subjected to external heat disturbance, the temperature control system 1 suppresses the change in the temperature of the fluid F.

[0074] The first controller 7 performs feedback control on the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F flowing out of the first temperature regulating device 3 becomes the first target temperature SV1. That is, the first controller 7 feeds back the detection value of the first temperature sensor 61, that is, the temperature T1, calculates the operation amount MV1 according to the deviation between the temperature T1 and the first target temperature SV1, and controls the first temperature regulating device 3 based on the operation amount MV1.

[0075] The second controller 8 performs feedback control on the second temperature regulating device 4 based on the detection value of the second temperature sensor 62A so that the fluid F flowing out of the second temperature regulating device 4 becomes the second target temperature SV2. That is, the second controller 8 feeds back the detection value of the second temperature sensor 62A, that is, the temperature T2a, calculates the operation amount MV2 according to the deviation between the temperature T2a and the second target temperature SV2, and controls the second temperature regulating device 4 based on the operation amount MV2.

[0076] The temperature of the fluid F controlled by the first controller 7 is the so-called outlet temperature of the first temperature control device 3. In addition, the temperature of the fluid F controlled by the first controller 7 can also be regarded as the so-called inlet temperature of the second temperature control device 4.

[0077] The temperature of the fluid F controlled by the second controller 8 is the so-called inlet temperature of the temperature control object S. In addition, the temperature of the fluid F controlled by the second controller 8 can also be regarded as the so-called outlet temperature of the second temperature control device 4 .

[0078] The second target temperature SV2 is a target temperature of the temperature control object S. The target temperature of the temperature control object S may change. When the temperature control object S is a wafer holder of a plasma processing device, the target temperature of the temperature control object S is determined based on the process of the plasma processing. The target temperature of the temperature control object S changes to, for example, 20°C, 60°C, or 80°C during the process of the plasma processing.

[0079] In this embodiment, the first target temperature SV1 is determined based on the second target temperature SV2. The first target temperature SV1 is a function of the second target temperature SV2.

[0080] The second controller 8 determines the first target temperature SV1 based on the second target temperature SV2 and outputs the result to the first controller 7. In addition, the first controller 7 may also determine the first target temperature SV1.

[0081] In the present embodiment, the first target temperature SV1 is determined based on the second target temperature SV2 and a predetermined value α related to the temperature regulation capability of the second temperature regulation device 4. The predetermined value α is zero or a positive number (α≧0). In the present embodiment, [SV1=SV2-α] holds.

[0082] In this embodiment, the second temperature control device 4 has a thermoelectric module 60. The temperature adjustable range of the thermoelectric module 60 is large at low temperatures and small at high temperatures. The predetermined value α is set to a larger value as the second target temperature SV2 is lower, and is set to a smaller value as the second target temperature SV2 is higher.

[0083] Figure 5 α is a diagram for explaining the predetermined value α of this embodiment. Figure 5 As shown, the higher the second target temperature SV2 is, the lower the prescribed value α is set. For example, when the second target temperature SV2 is 20°C, the prescribed value α is determined to be a value α1. When the second target temperature SV2 is 80°C, the prescribed value α is determined to be a value α2 which is smaller than the value α1. The relationship between the prescribed value α and the second target temperature SV2 is known data determined based on the temperature adjustment capability (specification) of the second temperature adjustment device 4.

[0084] When the second target temperature SV2 is 20°C, the first target temperature SV1 is [SV2-α1]. When the second target temperature SV2 is 80°C, the first target temperature SV1 is [SV2-α2]. The relationship [SV2-α1]<[SV2-α2] holds. The lower the second target temperature SV2, the greater the difference between the first target temperature SV1 and the second target temperature SV2. The higher the second target temperature SV2, the smaller the difference between the first target temperature SV1 and the second target temperature SV2. In other words, the lower the second target temperature SV2, the more the temperature of the fluid F adjusted by the first temperature control device 3 is allowed to deviate from the second target temperature SV2 (the target temperature of the temperature control object S). The higher the second target temperature SV2, the closer the temperature of the fluid F adjusted by the first temperature control device 3 needs to be to the second target temperature SV2 (the target temperature of the temperature control object S).

[0085] When the second target temperature SV2 is low, the temperature adjustable range of the thermoelectric component 60 is larger. Therefore, even if the temperature of the fluid F adjusted by the first temperature control device 3 deviates from the second target temperature SV2, the second temperature control device 4 can adjust the fluid F supplied from the first temperature control device 3 to the second target temperature SV2.

[0086] When the second target temperature SV2 is high, the temperature of the fluid F adjusted by the first temperature control device 3 is close to the second target temperature SV2. Therefore, even if the temperature adjustable range of the thermoelectric component 60 is small, the second temperature control device 4 can adjust the fluid F supplied from the first temperature control device 3 to the second target temperature SV2.

[0087] <Effect>

[0088] As described above, according to this embodiment, when the temperature of the temperature control object S is adjusted by the fluid F circulating in the circulation flow path 2, the first temperature control device 3 and the second temperature control device 4 are provided in the circulation flow path 2. Thus, the temperature control system 1 can control the temperature of the fluid F with high accuracy.

[0089] As described above, during the process, the target temperature (second target temperature SV2) of the temperature control object S is sometimes changed. When the target temperature of the temperature control object S is changed, the first temperature control device 3 having a larger temperature adjustable range adjusts the temperature of the fluid F to near the target temperature of the temperature control object S, and the second temperature control device 4 having a higher response speed finely adjusts the temperature of the fluid F and sets it to the target temperature of the temperature control object S. Thus, the temperature of the fluid F supplied to the temperature control object S is controlled to the target temperature of the temperature control object S with high precision. In addition, when the temperature control object S is subjected to external thermal disturbance, the first temperature control device 3 can attenuate the change in the temperature of the fluid F, and the second temperature control device 4 can finely adjust the temperature of the fluid F.

[0090] The first target temperature SV1 is determined based on the second target temperature SV2 and the predetermined value α. Thus, the second temperature regulating device 4 can finely adjust the temperature of the fluid F appropriately.

[0091] [Second embodiment]

[0092] In the following description, the same reference numerals are used for the same or equivalent components as those in the above-described embodiment, and the description thereof will be simplified or omitted.

[0093] Figure 6 : is a block diagram of the temperature control system 1 of the present embodiment. In the present embodiment, a control method for setting the temperature control object S at the second prescribed position P2 between the inlet Ma of the temperature control object S and the inlet Mc of the first temperature control device 3 or the fluid F at the third prescribed position P3 to the second target temperature SV2 is described. The second prescribed position P2 is set at the temperature control object S. The third prescribed position P3 is set between the outlet Mb of the temperature control object S and the inlet Mc of the first temperature control device 3. Below, a control method for setting the fluid F at the third prescribed position P3 to the second target temperature SV2 is described. In addition, the control method for setting the temperature control object S at the second prescribed position P2 to the second target temperature SV2 is also the same.

[0094] like Figure 6 As shown, the temperature control system 1 comprises: a circulation flow path 2 including a temperature control object S; a first temperature control device 3 for supplying a first temperature T to a first portion 2A of the circulation flow path 2; L The fluid F and the first temperature T L High second temperature T Ha second temperature regulating device 4 which adjusts the temperature of the fluid F supplied to the temperature regulating object S in the second portion 2B of the circulation path 2 between the first portion 2A and the temperature regulating object S; a first temperature sensor 61 which detects the temperature of the fluid F supplied from the first portion 2A to the second portion 2B; a second temperature sensor 62C which detects the temperature of the fluid F at a third prescribed position P3 of the circulation path 2 between the temperature regulating object S and the first temperature regulating device 3; a first controller 7 which controls the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F supplied from the first portion 2A to the second portion 2B becomes the first target temperature SV1; and a second controller 8 which controls the second temperature regulating device 4 based on the detection value of the second temperature sensor 62C so that the fluid F becomes the second target temperature SV2 at the third prescribed position P3 of the circulation path 2 between the temperature regulating object S and the first temperature regulating device 3.

[0095] The first controller 7 performs feedback control on the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F flowing out of the first temperature regulating device 3 becomes the first target temperature SV1. That is, the first controller 7 feeds back the detection value of the first temperature sensor 61, that is, the temperature T1, calculates the operation amount MV1 according to the deviation between the temperature T1 and the first target temperature SV1, and controls the first temperature regulating device 3 based on the operation amount MV1.

[0096] The second controller 8 performs feedback control on the second temperature regulating device 4 based on the detection value of the second temperature sensor 62C so that the fluid F flowing out of the second temperature regulating device 4 becomes the second target temperature SV2. That is, the second controller 8 feeds back the detection value of the second temperature sensor 62C, that is, the temperature T2c, calculates the operation amount MV2 according to the deviation between the temperature T2c and the second target temperature SV2, and controls the second temperature regulating device 4 based on the operation amount MV2.

[0097] The temperature of the fluid F controlled by the first controller 7 is the so-called outlet temperature of the first temperature control device 3. In addition, the temperature of the fluid F controlled by the first controller 7 can also be regarded as the so-called inlet temperature of the second temperature control device 4.

[0098] The temperature of the fluid F controlled by the second controller 8 is the so-called outlet temperature of the temperature control object S. In addition, the temperature of the fluid F controlled by the second controller 8 can also be regarded as the so-called inlet temperature of the first temperature control device 3. In addition, when the fluid F at the second predetermined position P2 is set to the second target temperature SV2, the temperature of the fluid F controlled by the second controller 8 is the temperature of the temperature control object S.

[0099] The first target temperature SV1 is determined based on the second target temperature SV2. In the present embodiment, the first target temperature SV1 is determined based on the second target temperature SV2, a specified value α related to the temperature control capability of the second temperature control device 4, and a detection value of the second temperature sensor 62C. The specified value α is the same as the specified value α described in the above embodiment. In the present embodiment, [SV1 = SV2 - α + (SV2 - T2c)].

[0100] As described above, according to the present embodiment, the first target temperature SV1 is determined based on the second target temperature SV2, the specified value α related to the temperature control capability of the second temperature control device 4, and the temperature T2c detected by the second temperature sensor 62C. For example, the temperature T2c of the fluid F flowing out of the temperature control object S may change due to external thermal disturbance. According to the present embodiment, the first target temperature SV1 is determined in consideration of the change in the temperature T2c. Thus, for example, during the process, even if the target temperature of the temperature control object S changes, the temperature control system 1 can control the temperature of the fluid F with high accuracy using the first temperature control device 3 and the second temperature control device 4.

[0101] [Third Embodiment]

[0102] In the following description, the same reference numerals are used for the same or equivalent components as those in the above-described embodiment, and the description thereof will be simplified or omitted.

[0103] Figure 7 1 is a block diagram showing the temperature control system 1 of the present embodiment. In the present embodiment, the control method for setting the fluid F at the third predetermined position P3 set between the outlet Mb of the temperature control object S and the inlet Mc of the first temperature control device 3 to the second target temperature SV2 is also described. In addition, the control method for setting the temperature control object S at the second predetermined position P2 to the second target temperature SV2 is also the same.

[0104] like Figure 7 As shown, the temperature control system 1 includes a circulation flow path 2 including a temperature control target S, a first temperature control device 3 , a second temperature control device 4 , a first temperature sensor 61 , a second temperature sensor 62C, a first controller 7 , and a second controller 8 .

[0105] In this embodiment, the second controller 8 has: a feedback control unit 81, which outputs a control instruction to the second temperature control device 4 based on the detection value of the second temperature sensor 62C; and a feedforward control unit 82, which outputs a control instruction to the second temperature control device 4 based on the external thermal interference drive signal d input to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4.

[0106] The feedback control unit 81 performs feedback control on the second temperature regulating device 4 based on the detection value of the second temperature sensor 62C so that the fluid F flowing out of the second temperature regulating device 4 becomes the second target temperature SV2. That is, the feedback control unit 81 feeds back the detection value of the second temperature sensor 62C, that is, the temperature T2c, and calculates the operation amount MV2a based on the deviation between the temperature T2c and the second target temperature SV2.

[0107] The feedforward control unit 82 performs feedforward control on the second temperature control device 4 based on the external thermal disturbance drive signal d input to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4 so that the fluid F flowing out of the temperature control object S reaches the second target temperature SV2.

[0108] The so-called external thermal interference driving signal d refers to a signal that generates external thermal interference to the temperature control object S. In the case where the temperature control object S is a wafer holder of a plasma processing device, the external thermal interference driving signal d for generating plasma is input to the plasma processing device. By inputting the external thermal interference driving signal d to the plasma processing device, plasma is generated, and the temperature control object S is subjected to external thermal interference of the plasma. The relationship between the external thermal interference driving signal d and the external thermal interference to the temperature control object S is known data derived through experiments or the like.

[0109] The dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4 are derived through experiments or simulations and are stored in the feedforward control unit 82. The feedforward control unit 82 can predict the temperature of the fluid F flowing out of the temperature control object S by inputting the external thermal disturbance driving signal d into the dynamic characteristic model of the temperature control object S. In addition, the feedforward control unit 82 can calculate the operation amount MV2b for setting the temperature of the fluid F flowing out of the temperature control object S to the second target temperature SV2 based on the dynamic characteristic model of the second temperature control device 4. That is, the feedforward control unit 82 can calculate the operation amount MV2b for eliminating the external thermal disturbance to the temperature control object S based on the external thermal disturbance driving signal d input to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4.

[0110] The second controller 8 calculates the operation amount MV2 by adding the operation amount MV2a calculated by the feedback control unit 81 and the operation amount MV2b calculated by the feedforward control unit 82, and controls the second temperature adjustment device 4 based on the operation amount MV2.

[0111] In addition, when the external thermal disturbance driving signal d is zero, the feedforward control unit 82 does not calculate the operation amount MV2 b.

[0112] The first controller 7 performs feedback control on the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F flowing out of the first temperature regulating device 3 becomes the first target temperature SV1. That is, the first controller 7 feeds back the detection value of the first temperature sensor 61, that is, the temperature T1, calculates the operation amount MV1 according to the deviation between the temperature T1 and the first target temperature SV1, and controls the first temperature regulating device 3 based on the operation amount MV1.

[0113] The first target temperature SV1 is determined based on the second target temperature SV2. As in the second embodiment described above, the first target temperature SV1 is determined based on the second target temperature SV2, a predetermined value α related to the temperature control capability of the second temperature control device 4, and a detection value of the second temperature sensor 62C. In the present embodiment, [SV1=SV2-α+(SV2-T2c)] is also established.

[0114] As described above, according to the present embodiment, the second controller 8 includes a feedback control unit 81 and a feedforward control unit 82. The feedforward control unit 82 can control the second temperature control device 4 in consideration of external thermal disturbances to the temperature control object S. Therefore, the temperature control system 1 can control the temperature of the fluid F with high accuracy using the first temperature control device 3 and the second temperature control device 4.

[0115] [Fourth Embodiment]

[0116] In the following description, the same reference numerals are used for the same or equivalent components as those in the above-mentioned embodiment, and the description thereof will be simplified or omitted.

[0117] Figure 8 1 is a block diagram showing the temperature control system 1 of the present embodiment. In the present embodiment, the control method for setting the fluid F at the third predetermined position P3 set between the outlet Mb of the temperature control object S and the inlet Mc of the first temperature control device 3 to the second target temperature SV2 is also described. In addition, the control method for setting the temperature control object S at the second predetermined position P2 to the second target temperature SV2 is also the same.

[0118] like Figure 8 As shown, the temperature control system 1 includes a circulation flow path 2 including a temperature control target S, a first temperature control device 3 , a second temperature control device 4 , a first temperature sensor 61 , a second temperature sensor 62C, a first controller 7 , and a second controller 8 .

[0119] In this embodiment, the second controller 8 has: a feedback control unit 81, which outputs a control instruction to the second temperature control device 4 based on the detection value of the second temperature sensor 62C; and a predictive feedforward control unit 83, which outputs a control instruction to the second temperature control device 4 based on a predetermined external thermal interference driven future signal df input to the temperature control object S and a dynamic characteristic model of the temperature control object S and a dynamic characteristic model of the second temperature control device 4.

[0120] The feedback control unit 81 performs feedback control on the second temperature regulating device 4 based on the detection value of the second temperature sensor 62C so that the fluid F flowing out of the second temperature regulating device 4 becomes the second target temperature SV2. That is, the feedback control unit 81 feeds back the detection value of the second temperature sensor 62C, that is, the temperature T2c, and calculates the operation amount MV2a based on the deviation between the temperature T2c and the second target temperature SV2.

[0121] The predictive feedforward control unit 83 performs feedforward control on the second temperature control device 4 based on the predetermined external thermal disturbance drive future signal df input to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4 so that the fluid F flowing out of the temperature control object S becomes the second target temperature SV2.

[0122] The so-called external thermal interference driving future signal df refers to a predetermined signal for generating external thermal interference to the temperature control object S. In the case where the temperature control object S is a wafer holder of a plasma processing device, the external thermal interference driving signal d for generating plasma is input into the plasma processing device. By inputting the external thermal interference driving signal d into the plasma processing device, plasma is generated, and the temperature control object S is subjected to external thermal interference of the plasma. The relationship between the external thermal interference driving signal d and the external thermal interference to the temperature control object S is known data derived through experiments, etc. In addition, the external thermal interference driving signal d is made as a process condition of the process. The external thermal interference driving future signal df is an external thermal interference driving signal d that is predetermined to be input at a time closer to the future than the time when the external thermal interference driving signal d is actually input into the plasma processing device. That is, when the time when the external thermal interference driving signal d is actually input into the plasma processing device is set to t0, the external thermal interference driving future signal df is an external thermal interference driving signal d that is predetermined to be input at a time t1 that is several steps further in the future than the time t0. The external thermal interference driving future signal df is derived based on the process conditions of the process.

[0123] The feedforward control unit 82 can calculate the operation amount MV2c for eliminating the predetermined external thermal disturbance received by the temperature control object S at the future time t1 based on the predetermined external thermal disturbance driving future signal df input to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4.

[0124] The second controller 8 calculates the operation amount MV2 by adding the operation amount MV2a calculated by the feedback control unit 81 and the operation amount MV2c calculated by the feedforward control unit 82, and controls the second temperature adjustment device 4 based on the operation amount MV2.

[0125] The first controller 7 performs feedback control on the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F flowing out of the first temperature regulating device 3 becomes the first target temperature SV1. That is, the first controller 7 feeds back the detection value of the first temperature sensor 61, that is, the temperature T1, calculates the operation amount MV1 according to the deviation between the temperature T1 and the first target temperature SV1, and controls the first temperature regulating device 3 based on the operation amount MV1.

[0126] The first target temperature SV1 is determined based on the second target temperature SV2. As in the second embodiment described above, the first target temperature SV1 is determined based on the second target temperature SV2, a predetermined value α related to the temperature control capability of the second temperature control device 4, and a detection value of the second temperature sensor 62C. In the present embodiment, [SV1=SV2-α+(SV2-T2c)] is also established.

[0127] As described above, according to the present embodiment, the second controller 8 includes the feedback control unit 81 and the predictive feedforward control unit 83. The predictive feedforward control unit 83 can control the second temperature control device 4 in consideration of the predetermined external thermal disturbance to the temperature control object S. Therefore, the temperature control system 1 can control the temperature of the fluid F with high accuracy using the first temperature control device 3 and the second temperature control device 4.

[0128] In the first to fourth embodiments described above, the predetermined value α is a variable that changes based on the second target temperature SV2. The predetermined value α may be a constant.

[0129] [Fifth Embodiment]

[0130] In the following description, the same reference numerals are used for the same or equivalent components as those in the above-described embodiment, and the description thereof will be simplified or omitted.

[0131] Fig. 9 1 is a block diagram showing a temperature control system 1 of the present embodiment. In the present embodiment, a control method for setting the fluid F at the third predetermined position P3 between the outflow port of the temperature control object S and the inflow port of the first temperature control device 3 to the second target temperature SV2 is also described. In addition, the control method for setting the temperature control object S at the second predetermined position P2 to the second target temperature SV2 is also the same.

[0132] like Fig. 9As shown, the temperature control system 1 includes a circulation flow path 2 including a temperature control target S, a first temperature control device 3 , a second temperature control device 4 , a first temperature sensor 61 , a second temperature sensor 62C, a first controller 7 , and a second controller 8 .

[0133] Similar to the third embodiment, the second controller 8 includes a feedback control unit 81 that outputs a control command to the second temperature control device 4 based on the detection value of the second temperature sensor 62C, and a feedforward control unit 82 that outputs a control command to the second temperature control device 4 based on the external thermal disturbance drive signal d to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4. In addition, the second controller 8 includes a low-pass filter 84.

[0134] The feedback control unit 81 performs feedback control on the second temperature regulating device 4 based on the detection value of the second temperature sensor 62C so that the fluid F flowing out of the second temperature regulating device 4 becomes the second target temperature SV2. That is, the feedback control unit 81 feeds back the detection value of the second temperature sensor 62C, that is, the temperature T2c, and calculates the operation amount MV2a based on the deviation between the temperature T2c and the second target temperature SV2.

[0135] The feedforward control unit 82 performs feedforward control on the second temperature control device 4 based on the external thermal disturbance drive signal d input to the temperature control object S and the dynamic characteristic model of the temperature control object S and the dynamic characteristic model of the second temperature control device 4 so that the fluid F flowing out of the temperature control object S reaches the second target temperature SV2.

[0136] The second controller 8 calculates the operation amount MV2 by adding the operation amount MV2a calculated by the feedback control unit 81 and the operation amount MV2b calculated by the feedforward control unit 82, and controls the second temperature adjustment device 4 based on the operation amount MV2.

[0137] The first controller 7 performs feedback control on the first temperature regulating device 3 based on the detection value of the first temperature sensor 61 so that the fluid F flowing out of the first temperature regulating device 3 becomes the first target temperature SV1. That is, the first controller 7 feeds back the detection value of the first temperature sensor 61, that is, the temperature T1, calculates the operation amount MV1 according to the deviation between the temperature T1 and the first target temperature SV1, and controls the first temperature regulating device 3 based on the operation amount MV1.

[0138] The low pass filter 84 generates a signal dc by cutting off the high frequency component of the external thermal disturbance drive signal d for determining the first target temperature SV1. Even if the external thermal disturbance drive signal d changes suddenly, the low pass filter 84 suppresses the first target temperature SV1 from changing suddenly.

[0139] The first target temperature SV1 is determined based on the second target temperature SV2. In this embodiment, the first target temperature SV1 is determined based on the second target temperature SV2 and the external thermal disturbance drive signal d. In this embodiment, [SV1 = SV2 - dc × β] is obtained. In addition, β is a conversion factor.

[0140] As described above, according to the present embodiment, the first target temperature SV1 is determined based on the second target temperature SV2 and the external thermal interference drive signal d. Depending on the size of the external thermal interference, the temperature control capability of the second temperature control device 4 may be insufficient. In order to use the first temperature control device 3 to compensate for the insufficient temperature control capability of the second temperature control device 4, the external thermal interference drive signal d is used in determining the first target temperature SV1. When the external thermal interference drive signal d becomes larger, the first target temperature SV1 becomes lower. As a result, the first temperature control device 3 can compensate for the insufficient temperature control capability of the second temperature control device 4.

[0141] In addition, the second controller 8 may also be a predictive feedforward control unit 83 as described in the fourth embodiment.

[0142] [Other embodiments]

[0143] In the above embodiment, the first portion 2A to which the fluid F is supplied from the first temperature regulating device 3 is the tank 9 disposed in the circulation flow path 2. The first portion 2A to which the fluid F is supplied from the first temperature regulating device 3 may be a part of the circulation flow path 2.

[0144] Description of Reference Numerals

[0145] 1…temperature control system, 2…circulation flow path, 2A…first part, 2B…second part, 3…first temperature control device, 4…second temperature control device, 5…pump, 6…temperature sensor, 7…first controller, 8…second controller, 9…storage tank, 10L…low temperature control unit, 10H…high temperature control unit, 11L…low temperature flow path, 11H…high temperature flow path, 12L…low temperature overflow flow path, 12H…high temperature overflow flow path, 13…valve system, 14L…low temperature flow control valve, 14H…high temperature flow control valve, 15L…low temperature on-off valve, 15H…high temperature on-off valve, 40…main body, 42…temperature control flow path, 44…heat exchange plate, 45…drive circuit, 50…temperature control unit, 51…housing, 60…thermoelectric component, 61…first temperature sensor, 62…second temperature sensor, 62A…second temperature sensor, 62B…first Second temperature sensor, 62C…second temperature sensor, 63…thermoelectric semiconductor element, 63P…p-type thermoelectric semiconductor element, 63N…n-type thermoelectric semiconductor element, 65…first electrode, 66…second electrode, 81…feedback control unit, 82…feedforward control unit, 83…foreseen feedforward control unit, 84…low-pass filter, d…external thermal interference drive signal, df…external thermal interference drive future signal, F…fluid, Ma…inlet, Mb…outlet, Mc…inlet, Md…outlet, Me…inlet, Mf…outlet, MV1…operation amount, MV2…operation amount, P1…first specified position, P2…second specified position, P3…third specified position, SV1…first target temperature, SV2…second target temperature, S…temperature adjustment object, T1…temperature, T2a…temperature, T2b…temperature, T2c…temperature.

Claims

1. A temperature control system, wherein: have: A circulation flow path, which includes a temperature-adjusted object and is used for fluid circulation; a first temperature regulating device for supplying at least one of a fluid at a first temperature and a fluid at a second temperature higher than the first temperature to a first portion of the circulation flow path to regulate the temperature of the fluid in the first portion; a second temperature control device for adjusting the temperature of a fluid supplied to the temperature control object at a second portion of the circulation flow path between the first portion and the temperature control object; a first temperature sensor that detects a temperature of a fluid supplied from the first portion to the second portion; a second temperature sensor for detecting a temperature of the fluid or the temperature control object at a predetermined position of the circulation flow path between the outflow port of the second portion and the inflow port of the first portion; a first controller that controls the first temperature regulating device based on a detection value of the first temperature sensor so that the fluid supplied from the first portion to the second portion becomes a first target temperature; as well as a second controller that controls the second temperature adjustment device based on the detection value of the second temperature sensor so that the fluid at the specified position becomes a second target temperature; The first target temperature is determined based on the second target temperature.

2. The temperature control system according to claim 1, wherein: The predetermined position is set between the second portion and the temperature control object. The first target temperature is determined based on the second target temperature and a prescribed value associated with a temperature adjustment capability of the second temperature adjustment device.

3. A temperature control system, wherein: have: A circulation flow path, which includes a temperature-adjusted object and is used for fluid circulation; a first temperature regulating device for supplying at least one of a fluid at a first temperature and a fluid at a second temperature higher than the first temperature to a first portion of the circulation flow path to regulate the temperature of the fluid in the first portion; a second temperature control device for adjusting the temperature of a fluid supplied to the temperature control object at a second portion of the circulation flow path between the first portion and the temperature control object; a first temperature sensor that detects a temperature of a fluid supplied from the first portion to the second portion; a second temperature sensor for detecting a temperature of the fluid or the temperature control object at a predetermined position of the circulation flow path between the outflow port of the second portion and the inflow port of the first portion; a first controller that controls the first temperature regulating device based on a detection value of the first temperature sensor so that the fluid supplied from the first portion to the second portion becomes a first target temperature; as well as a second controller that controls the second temperature adjustment device based on the detection value of the second temperature sensor so that the fluid at the specified position becomes a second target temperature; The first target temperature is determined based on the second target temperature, The predetermined position is set between the inlet of the temperature control object and the inlet of the first temperature control device. The first target temperature is determined based on the second target temperature, a predetermined value related to a temperature adjustment capability of the second temperature adjustment device, and a detection value of the second temperature sensor.

4. A temperature control system, wherein: have: A circulation flow path, which includes a temperature-adjusted object and is used for fluid circulation; a first temperature regulating device for supplying at least one of a fluid at a first temperature and a fluid at a second temperature higher than the first temperature to a first portion of the circulation flow path to regulate the temperature of the fluid in the first portion; a second temperature control device for adjusting the temperature of a fluid supplied to the temperature control object at a second portion of the circulation flow path between the first portion and the temperature control object; a first temperature sensor that detects a temperature of a fluid supplied from the first portion to the second portion; a second temperature sensor for detecting a temperature of the fluid or the temperature control object at a predetermined position of the circulation flow path between the outflow port of the second portion and the inflow port of the first portion; a first controller that controls the first temperature regulating device based on a detection value of the first temperature sensor so that the fluid supplied from the first portion to the second portion becomes a first target temperature; as well as a second controller that controls the second temperature adjustment device based on the detection value of the second temperature sensor so that the fluid at the specified position becomes a second target temperature; The first target temperature is determined based on the second target temperature, The predetermined position is set between the inlet of the temperature control object and the inlet of the first temperature control device. The second controller has: a feedback control unit that outputs a control instruction to the second temperature regulating device based on the detection value of the second temperature sensor; and A feedforward control unit outputs a control command to the second temperature control device based on an external thermal disturbance drive signal input to the temperature control object, a dynamic characteristic model of the temperature control object, and a dynamic characteristic model of the second temperature control device.

5. The temperature control system according to claim 4, wherein: The first target temperature is determined based on the second target temperature and the external thermal interference driving signal.

6. The temperature control system according to claim 4, wherein: The first target temperature is determined based on the second target temperature, a predetermined value related to a temperature adjustment capability of the second temperature adjustment device, and a detection value of the second temperature sensor.

7. A temperature control system, wherein: have: A circulation flow path, which includes a temperature-adjusted object and is used for fluid circulation; a first temperature regulating device for supplying at least one of a fluid at a first temperature and a fluid at a second temperature higher than the first temperature to a first portion of the circulation flow path to regulate the temperature of the fluid in the first portion; a second temperature control device for adjusting the temperature of a fluid supplied to the temperature control object at a second portion of the circulation flow path between the first portion and the temperature control object; a first temperature sensor that detects a temperature of a fluid supplied from the first portion to the second portion; a second temperature sensor for detecting a temperature of the fluid or the temperature control object at a predetermined position of the circulation flow path between the outflow port of the second portion and the inflow port of the first portion; a first controller that controls the first temperature regulating device based on a detection value of the first temperature sensor so that the fluid supplied from the first portion to the second portion becomes a first target temperature; as well as a second controller that controls the second temperature adjustment device based on the detection value of the second temperature sensor so that the fluid at the specified position becomes a second target temperature; The first target temperature is determined based on the second target temperature, The predetermined position is set between the inlet of the temperature control object and the inlet of the first temperature control device. The second controller has: a feedback control unit that outputs a control instruction to the second temperature regulating device based on the detection value of the second temperature sensor; and A forward-looking feedforward control unit outputs a control instruction to the second temperature control device based on a predetermined external thermal disturbance drive future signal input to the temperature control object and a dynamic characteristic model of the temperature control object and a dynamic characteristic model of the second temperature control device.

8. The temperature control system according to claim 5, wherein: The first target temperature is determined based on the second target temperature, a predetermined value related to a temperature adjustment capability of the second temperature adjustment device, and a detection value of the second temperature sensor.

9. The temperature control system according to any one of claims 2, 3, 6 and 8, wherein: The predetermined value is set to a larger value as the second target temperature is lower, and is set to a smaller value as the second target temperature is higher.

10. The temperature control system according to any one of claims 1 to 8, wherein: The temperature adjustable range of the first temperature regulating device is larger than the temperature adjustable range of the second temperature regulating device. The response speed of the second temperature adjustment device is higher than the response speed of the first temperature adjustment device.

11. The temperature control system according to any one of claims 1 to 8, wherein: The first temperature regulating device comprises: a low temperature regulating unit storing the fluid at the first temperature; a high temperature temperature regulating unit storing the fluid at the second temperature; a low-temperature flow path through which a fluid supplied from the low-temperature temperature regulating unit to the first portion flows; a high-temperature flow path through which a fluid supplied from the high-temperature temperature regulating unit to the first portion flows; and a valve system that adjusts a flow rate of a fluid flowing through the low-temperature flow path and a flow rate of a fluid flowing through the high-temperature flow path; The first controller controls the valve system.

12. The temperature control system according to any one of claims 1 to 8, wherein: The first portion includes a storage tank disposed in the circulation flow path.

13. The temperature control system according to any one of claims 1 to 8, wherein: The second temperature control device has a thermoelectric component. The second controller controls the thermoelectric assembly.

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