Electrostatic chuck installation and removal tool

Abstract

The present invention relates to the field of semiconductor manufacturing technology, and more specifically, to an electrostatic chuck installation and removal tool. The electrostatic chuck installation and removal tool proposed by the present invention comprises: an electrostatic chuck assembly pick-up and placement tool, the electrostatic chuck assembly pick-up and placement tool being used to be fastened and connected with the electrostatic chuck assembly; a number of guide shafts, one end of which is connected to the bottom of the cavity, the electrostatic chuck assembly pick-up and placement tool and the electrostatic chuck assembly enter or take out of the cavity along the guide shafts; a number of fasteners, which are used to fasten the electrostatic chuck assembly pick-up and placement tool with the electrostatic chuck assembly and to fasten the electrostatic chuck assembly with the cavity. The electrostatic chuck installation and removal tool proposed by the present invention can realize the rapid installation and removal of the electrostatic chuck assembly. On the one hand, it is more convenient, safe and stable for the installation and removal of the electrostatic chuck assembly. On the other hand, it can effectively reduce the maintenance man-hours of the electrostatic chuck assembly and improve the maintenance efficiency of the HDP‑CVD equipment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and more specifically, to an electrostatic chuck installation and removal tool. Background Art

[0002] Electrostatic chuck (ESC) is a general term for ultra-clean wafer carriers and gripping and handling equipment suitable for atmospheric or vacuum environments. Electrostatic chuck (ESC) is widely used in various manufacturing tools, such as thin film deposition, plasma etching, photoresist stripping, substrate cleaning, photolithography, ion implantation, etc.

[0003] High-density plasma chemical vapor deposition (HDP-CVD) is a chemical vapor deposition device that uses an inductively coupled plasma (ICP) source and is an increasingly popular plasma deposition device.

[0004] There is also an electrostatic chuck (ESC) component in the HDP-CVD equipment. Figure 1 The schematic diagram of the structure of a typical electrostatic chuck assembly is revealed, such as Figure 1 The electrostatic chuck assembly 1 shown is very difficult to install and remove, takes a long time to replace, and requires tooling to assist in installation and removal to reduce the man-hours for maintaining the ESC assembly.

[0005] Chinese invention CN 200510126277.X discloses an electrostatic chuck installation and removal tool, comprising a fixed support component and an installation moving component installed on the fixed support component, wherein the fixed support component comprises a support plate and four support rods equidistantly installed on the support plate, and the installation moving component comprises an electrostatic chuck mounting frame, and a rotating handle with a screw rod is connected to the center of the electrostatic chuck mounting frame, wherein the screw rod passes through the support plate and is threadedly connected to the support plate. The installation and removal tools of the prior art (including the above invention) generally have the following problems:

[0006] The entire ESC assembly has no reliable force point when loading and removing it. A sealing ring is set between the ESC assembly and the cavity. When the sealing ring is compressed, the ESC assembly and the cavity are adhered together and are difficult to separate;

[0007] The pin hole position and the weight of the entire ESC component need to be aligned. However, in the existing installation and disassembly method, when the ESC component is installed and removed, the corresponding installation surface will be blocked, making it difficult to align the pin hole position and the weight. Summary of the invention

[0008] The purpose of the present invention is to provide an electrostatic chuck installation and removal tool to solve the problem that the electrostatic chuck assembly is difficult to install and remove in the prior art.

[0009] In order to achieve the above object, the present invention provides an electrostatic chuck installation and removal tool, the electrostatic chuck installation and removal tool comprising:

[0010] An electrostatic chuck assembly pick-up and placement tool, wherein the electrostatic chuck assembly pick-up and placement tool is used to be fastened to the electrostatic chuck assembly;

[0011] Several guide shafts, one end of which is connected to the bottom of the cavity, and the electrostatic chuck assembly pick-up and placement tooling and the electrostatic chuck assembly enter or take out of the cavity along the guide shafts;

[0012] Several fasteners are used to fasten the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly and to fasten the electrostatic chuck assembly to the cavity.

[0013] In one embodiment, one end of the guide shaft is provided with a thread, which is matched and connected with the threaded hole inside the cavity.

[0014] In one embodiment, the guide shafts are at least 6 in number and are arranged parallel to each other.

[0015] In one embodiment, the electrostatic chuck assembly pick-and-place tooling includes a tooling plate, a tooling screw, and a handle:

[0016] The tooling screw is installed at the edge of the tooling plate and is used to fasten the electrostatic chuck assembly pick-up and placement tool to the electrostatic chuck assembly;

[0017] The handle is installed on the surface of the working plate and provides an operating point for the electrostatic chuck assembly pick-up and put-in tool when taking out or putting in.

[0018] In one embodiment, the handles are at least two in number and are symmetrically distributed on the surface of the tooling tray.

[0019] In one embodiment, the fastener comprises a fixing screw:

[0020] The fixing screws are used to fasten the tooling plate and the tooling screws and to fasten the electrostatic chuck assembly and the cavity.

[0021] In one embodiment, the electrostatic chuck installation and removal tool further comprises an electrostatic chuck assembly placement table for placing the disassembled electrostatic chuck assembly;

[0022] The electrostatic chuck assembly placement platform includes a bottom base and an upper base;

[0023] The upper base is used to directly support the electrostatic chuck assembly;

[0024] The bottom base is connected to the upper base.

[0025] In one embodiment, the bottom base and the upper base are cylindrical in shape.

[0026] In one embodiment, a through hole is formed on a side wall of the upper base, and the through hole is used to pass a cable of the electrostatic chuck assembly.

[0027] In one embodiment, the material of the upper base and / or the bottom base is polytetrafluoroethylene material.

[0028] In order to achieve the above object, the present invention provides a method for installing an electrostatic chuck assembly, characterized in that the electrostatic chuck installation and removal tool as described in any one of the above items is used, and the steps include:

[0029] Install the guide shaft on the cavity;

[0030] Fixing the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly;

[0031] The electrostatic chuck assembly pick-and-place tooling falls along the guide shaft together with the electrostatic chuck assembly and is placed on the bottom surface of the cavity;

[0032] Take out the guide shaft and the electrostatic chuck assembly pick-and-place tooling, and fix the electrostatic chuck assembly to the cavity.

[0033] In order to achieve the above object, the present invention provides a method for disassembling an electrostatic chuck assembly, characterized in that the electrostatic chuck installation and disassembly tool as described in any one of the above items is used, and the steps include:

[0034] Unfasten the electrostatic chuck assembly from the chamber;

[0035] Install the guide shaft on the cavity;

[0036] Fixing the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly;

[0037] Take the electrostatic chuck assembly picking and placing tooling together with the electrostatic chuck assembly out of the cavity along the guide shaft.

[0038] An electrostatic chuck installation and disassembly tool proposed in the present invention can realize the rapid installation and disassembly of the electrostatic chuck assembly. On the one hand, the installation and disassembly of the electrostatic chuck assembly is more convenient, safe and stable. On the other hand, it effectively reduces the maintenance hours of the electrostatic chuck assembly and improves the maintenance efficiency of the HDP-CVD equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features, wherein:

[0040] Figure 1 A schematic diagram of the structure of a typical electrostatic chuck assembly is revealed;

[0041] Figure 2 A three-dimensional schematic diagram of an electrostatic chuck installation and removal tool according to an embodiment of the present invention is disclosed;

[0042] Figure 3a A three-dimensional schematic diagram of a guide shaft according to an embodiment of the present invention is disclosed;

[0043] Figure 3b A three-dimensional schematic diagram of an electrostatic chuck assembly pick-and-place tooling according to an embodiment of the present invention is disclosed;

[0044] Figure 3c A three-dimensional schematic diagram of an electrostatic chuck assembly placement platform according to an embodiment of the present invention is disclosed;

[0045] Figure 3d A three-dimensional schematic diagram of a fixing screw according to an embodiment of the present invention is disclosed;

[0046] Figure 4a A first schematic diagram of installing a guide shaft according to an embodiment of the present invention is disclosed;

[0047] Figure 4b A second schematic diagram of installing a guide shaft according to an embodiment of the present invention is disclosed;

[0048] Figure 5a A first schematic diagram of installing an electrostatic chuck assembly pick-and-place tooling according to an embodiment of the present invention is disclosed;

[0049] Figure 5b A second schematic diagram of installing an electrostatic chuck assembly pick-and-place tooling according to an embodiment of the present invention is disclosed;

[0050] Figure 6a A first schematic diagram of installing an electrostatic chuck assembly according to an embodiment of the present invention is disclosed;

[0051] Figure 6b A second schematic diagram of installing an electrostatic chuck assembly according to an embodiment of the present invention is disclosed;

[0052] Figure 7 A three-dimensional schematic diagram of a reaction chamber after installation according to an embodiment of the present invention is disclosed;

[0053] Figure 8 A top view of a reaction chamber after installation according to an embodiment of the present invention is disclosed;

[0054] Fig. 9 A cross-sectional view of a reaction chamber after installation according to an embodiment of the present invention is disclosed;

[0055] Fig.10A schematic diagram of placement of an electrostatic chuck assembly after disassembly according to an embodiment of the present invention is disclosed.

[0056] The meanings of the reference numerals in the figures are as follows:

[0057] 1 electrostatic chuck assembly;

[0058] 11 cables;

[0059] 2 guide shafts;

[0060] 3. Electrostatic chuck assembly pick-and-place tooling;

[0061] 31 tooling tray;

[0062] 32 tooling screws;

[0063] 33 handles;

[0064] 4. Electrostatic chuck assembly placement table;

[0065] 41 bottom base;

[0066] 42 upper base;

[0067] 421 grooves;

[0068] 422 through hole;

[0069] 5 fixing screws;

[0070] 6 cavity;

[0071] 61 heavy hammer;

[0072] 62 threaded holes. DETAILED DESCRIPTION

[0073] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

[0074] Figure 2 A three-dimensional schematic diagram of an electrostatic chuck installation and removal tool according to an embodiment of the present invention is disclosed, such as Figure 2 As shown, the present invention proposes an electrostatic chuck installation and removal tool, which includes an electrostatic chuck (ESC) component pick-up and placement tool 3 and an electrostatic chuck component placement table 4:

[0075] The electrostatic chuck assembly pick-up and placement tool 3 is used to be fastened to the electrostatic chuck assembly 1;

[0076] Several guide shafts, one end of which is connected to the bottom of the cavity, and the electrostatic chuck assembly pick-up and placement tooling and the electrostatic chuck assembly enter or take out of the cavity along the guide shafts;

[0077] Several fasteners are used to fasten the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly and to fasten the electrostatic chuck assembly to the cavity.

[0078] Figure 3a A three-dimensional schematic diagram of a guide shaft according to an embodiment of the present invention is disclosed, as shown in FIG. Figure 3a As shown, the number of guide shafts 2 is at least 6, which are arranged parallel to each other.

[0079] One end of each guide shaft 2 is provided with a thread, which matches with the threaded hole 62 inside the cavity 6 and can be connected.

[0080] Obviously, since the function of the guide shaft 2 is to provide guidance, there is no limit on the number of guide shafts 2, and the number can be 1, 2, 3 or even more.

[0081] As a preferred embodiment, Figure 3a The number of guide shafts 2 shown is 6, which is consistent with the number of threaded holes 62 inside the cavity 6.

[0082] Figure 3b A three-dimensional schematic diagram of an electrostatic chuck assembly pick-and-place tooling according to an embodiment of the present invention is disclosed, such as Figure 3b The electrostatic chuck assembly pick-and-place tool 3 shown includes a tool plate 31 , a tool screw 32 and a handle 33 .

[0083] The tooling screws 32 , which are 4 in number, are installed at the four corners of the edge of the tooling plate 31 and are used to fasten the electrostatic chuck assembly pick-and-place tooling 3 to the electrostatic chuck assembly 1 .

[0084] The tooling plate 31 is in a quadrilateral shape with four rounded corners;

[0085] The tooling plate 31 has a circular through hole in the middle.

[0086] The handle 33 provides an operating point for the electrostatic chuck assembly pick-up and placement tool 3 when taking out or putting in.

[0087] Obviously, there is no special requirement for the number of handles 33 , but for ease of operation, preferably, the number of handles 33 is 2 or 4, which are symmetrically distributed on the surface of the tooling tray 31 .

[0088] When the number of the handles 33 is two, the two handles 33 are relatively distributed on two sides of the surface of the tooling tray 31;

[0089] When the number of the handles 33 is four, the four handles 33 are relatively distributed on four sides of the surface of the tooling tray 31 .

[0090] Obviously, there is no special restriction on the shape of the handle 33, and it can be semicircular or semirectangular, etc.

[0091] The bottom surface of the electrostatic chuck assembly 1 has cables (including water pipes and optical fibers), which cannot be placed on a flat surface after being taken out, otherwise the water pipes and optical fibers will be crushed. The electrostatic chuck installation and removal tool proposed by the present invention also includes an electrostatic chuck assembly placement table 4 for placing the disassembled electrostatic chuck assembly 1.

[0092] Figure 3c A three-dimensional schematic diagram of an electrostatic chuck assembly placement platform according to an embodiment of the present invention is disclosed, as shown in FIG. Figure 3c The electrostatic chuck assembly placement platform 4 shown includes a bottom base 41 and an upper base 42 .

[0093] The upper base 42 is used to directly support the electrostatic chuck assembly 1 .

[0094] The bottom base 41 and the upper base 42 are cylindrical in shape to match the shape of the electrostatic chuck assembly 1 .

[0095] When the shape of the electrostatic chuck assembly 1 changes, the shapes of the bottom base 41 and the upper base 42 also need to be adaptively changed.

[0096] As another embodiment, the bottom base 41 may have a different shape from the upper base 42 , and the shape of the upper base 42 matches the shape of the electrostatic chuck assembly 1 .

[0097] like Figure 3c As shown, a through hole 422 is formed on the side wall of the upper base 42, and the through hole 422 is used to pass the cable of the electrostatic chuck assembly 1. The shape of the through hole 422 matches the shape of the cable of the electrostatic chuck assembly 1.

[0098] A groove 421 is formed at the top of the side wall of the upper base 42 to match the shape of the electrostatic chuck assembly 1 .

[0099] In this embodiment, the material of the upper base 42 and / or the bottom base 41 is PTFE (polytetrafluoroethylene) material.

[0100] Polytetrafluoroethylene (PTFE) is a polymer made from tetrafluoroethylene as a monomer. It is white, waxy, translucent, heat-resistant and cold-resistant. It can be used for a long time at -180 to 260°C. It is resistant to acids, alkalis, and various organic solvents.

[0101] Figure 3d A three-dimensional schematic diagram of a fixing screw according to an embodiment of the present invention is disclosed, such as Figure 3dThe fixing screw 5 shown is used to fasten the tooling plate 31 of the electrostatic chuck assembly pick-up and placement tooling 3 and the tooling screw 32 together.

[0102] In this embodiment, the model of the fixing screws 5 is M10, and the number is 4, which matches the number of the tooling screws 32.

[0103] The following describes the installation process of the electrostatic chuck assembly 1 using the electrostatic chuck installation and removal tool.

[0104] Step S1, installing 6 guide shafts on the threaded holes of the cavity.

[0105] Figure 4a and Figure 4b The first and second schematic diagrams of the installation of the guide shaft according to an embodiment of the present invention are respectively disclosed. Figure 4a and Figure 4b As shown, the guide shaft 2 is installed on the threaded hole 62 of the cavity 6.

[0106] Due to the positioning and guiding function of the guide shaft 2, the pin hole position of the entire electrostatic chuck assembly 1 and the weight 31 are more easily and accurately aligned when installed.

[0107] Step S2, fixing the electrostatic chuck assembly pick-and-place tool 3 and the electrostatic chuck assembly 1 together with fixing screws 5.

[0108] Figure 5a and Figure 5b The first and second schematic diagrams of the installation of the electrostatic chuck assembly pick-and-place tooling according to an embodiment of the present invention are respectively disclosed, as shown in FIG. Figure 5a and Figure 5b As shown, the tooling screw 32 of the electrostatic chuck assembly pick-up and placement tooling 3 is fastened and connected to the electrostatic chuck assembly 1 at the bottom;

[0109] After the fixing screw 5 passes through the tooling plate 31 of the electrostatic chuck assembly pick-up and placement tooling 3, it is fixed with the tooling screw 32, thereby achieving the fixation of the electrostatic chuck assembly pick-up and placement tooling 3 and the electrostatic chuck assembly 1.

[0110] Step S3 , the electrostatic chuck assembly pick-up and placement tool 3 and the electrostatic chuck assembly 1 fall along the guide shaft 2 and are placed on the bottom surface of the cavity 6 .

[0111] Figure 6a and Figure 6b The first and second schematic diagrams of the installation of the electrostatic chuck assembly according to an embodiment of the present invention are respectively disclosed. Figure 6a and Figure 6b As shown, the electrostatic chuck assembly pick-up and placement tool 3 and the electrostatic chuck assembly 1 fall along the guide shaft 2 and land in the middle of the bottom area of ​​the cavity 6 surrounded by six guide shafts 2.

[0112] Step S4 , take out the guide shaft 2 and the electrostatic chuck assembly pick-and-place tool 3 , and fix the electrostatic chuck assembly 1 to the cavity 6 .

[0113] Figure 7 , Figure 8 and Fig. 9 The three-dimensional schematic diagram, top view and cross-sectional view of the reaction chamber after installation according to an embodiment of the present invention are disclosed respectively. Figure 7-Figure 9 As shown, the guide shaft 2 is taken out from the threaded hole 62 inside the cavity 6.

[0114] The tooling screw 32 is unscrewed from the bottom and the electrostatic chuck assembly 1 , and the electrostatic chuck assembly pick-and-place tooling 3 is removed from the electrostatic chuck assembly 1 .

[0115] The fixing screw 5 is passed through the electrostatic chuck assembly 1 and fixed to the threaded hole 62 inside the cavity 6, thereby finally fixing the electrostatic chuck assembly 1 to the cavity 6.

[0116] Based on the same principle, the electrostatic chuck assembly 1 can be disassembled using the electrostatic chuck installation and disassembly tool of the present invention, and the steps include:

[0117] Unfix the electrostatic chuck assembly 1 and the cavity 6;

[0118] Install the guide shaft 2 on the cavity 6;

[0119] Fix the electrostatic chuck assembly pick-and-place tool 3 and the electrostatic chuck assembly 1;

[0120] Take out the electrostatic chuck assembly taking and placing tool 3 together with the electrostatic chuck assembly 1 from the cavity 6 along the guide shaft 2;

[0121] The taken-out electrostatic chuck assembly pick-and-place tool 3 and the electrostatic chuck assembly 1 can be placed on the electrostatic chuck assembly placement table 4 .

[0122] Fig.10 A schematic diagram of the placement of the electrostatic chuck assembly after disassembly according to an embodiment of the present invention is disclosed, such as Fig.10 As shown, the electrostatic chuck assembly 1 is placed on the electrostatic chuck assembly placement table 4, and the disassembly process of the electrostatic chuck assembly 1 is finally completed.

[0123] Although the above methods are illustrated and described as a series of actions for simplicity of explanation, it should be understood and appreciated that these methods are not limited by the order of the actions, because according to one or more embodiments, some actions may occur in a different order and / or concurrently with other actions from those illustrated and described herein or not illustrated and described herein but understandable to those skilled in the art.

[0124] An electrostatic chuck installation and disassembly tool proposed in the present invention can realize the rapid installation and disassembly of the electrostatic chuck assembly. On the one hand, the installation and disassembly of the electrostatic chuck assembly is more convenient, safe and stable. On the other hand, it effectively reduces the maintenance hours of the electrostatic chuck assembly and improves the maintenance efficiency of the HDP-CVD equipment.

[0125] In the description of the present invention, it should be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0126] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0127] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more, unless otherwise clearly specified.

[0128] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0129] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. An electrostatic chuck installation and removal tool, characterized in that: The electrostatic chuck installation and removal tool comprises: An electrostatic chuck assembly pick-up and placement tool, wherein the electrostatic chuck assembly pick-up and placement tool is used to be fastened to the electrostatic chuck assembly; Several guide shafts, one end of which is connected to the bottom of the cavity, and the electrostatic chuck assembly pick-up and placement tooling and the electrostatic chuck assembly enter or take out of the cavity along the guide shafts; A plurality of fasteners, used for fastening and connecting the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly and fastening and connecting the electrostatic chuck assembly to the cavity; An electrostatic chuck assembly placement table, wherein the electrostatic chuck assembly placement table is used to place the disassembled electrostatic chuck assembly; The electrostatic chuck assembly placement platform includes a bottom base and an upper base; The upper base is used to directly support the electrostatic chuck assembly; The bottom base is connected to the upper base.

2. The electrostatic chuck installation and removal tool according to claim 1, characterized in that: The guide shaft has a thread at one end, which is matched and connected with the threaded hole inside the cavity.

3. The electrostatic chuck installation and removal tool according to claim 1, characterized in that: The guide shafts are at least 6 in number and are arranged parallel to each other.

4. The electrostatic chuck installation and removal tool according to claim 1, characterized in that: The electrostatic chuck assembly pick-and-place tooling includes a tooling plate, a tooling screw and a handle: The tooling screw is installed at the edge of the tooling plate and is used to fasten the electrostatic chuck assembly pick-up and placement tool to the electrostatic chuck assembly; The handle is installed on the surface of the working plate and provides an operating point for the electrostatic chuck assembly pick-up and put-in tool when taking out or putting in.

5. The electrostatic chuck installation and removal tool according to claim 4, characterized in that: There are at least two handles, which are symmetrically distributed on the surface of the tooling tray.

6. The electrostatic chuck installation and removal tool according to claim 4, characterized in that: The fasteners include fixing screws: The fixing screws are used to fasten the tooling plate and the tooling screws and to fasten the electrostatic chuck assembly and the cavity.

7. The electrostatic chuck installation and removal tool according to claim 1, characterized in that: The bottom base and the upper base are cylindrical in shape.

8. The electrostatic chuck installation and removal tool according to claim 1, characterized in that: A through hole is formed on the side wall of the upper base, and the through hole is used to pass the cable of the electrostatic chuck assembly.

9. The electrostatic chuck installation and removal tool according to claim 1, characterized in that: The material of the upper base and / or the bottom base is polytetrafluoroethylene material.

10. A method for installing an electrostatic chuck assembly, characterized in that: Using the electrostatic chuck installation and removal tool as described in any one of claims 1 to 9, the steps include: Install the guide shaft on the cavity; Fixing the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly; The electrostatic chuck assembly pick-and-place tooling falls along the guide shaft together with the electrostatic chuck assembly and is placed on the bottom surface of the cavity; Take out the guide shaft and the electrostatic chuck assembly pick-and-place tooling, and fix the electrostatic chuck assembly to the cavity.

11. A method for disassembling an electrostatic chuck assembly, characterized in that: Using the electrostatic chuck installation and removal tool as described in any one of claims 1 to 9, the steps include: Unfasten the electrostatic chuck assembly from the chamber; Install the guide shaft on the cavity; Fixing the electrostatic chuck assembly pick-and-place tooling to the electrostatic chuck assembly; Take the electrostatic chuck assembly picking and placing tooling together with the electrostatic chuck assembly out of the cavity along the guide shaft.

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