A coating cold roller circulation cooling fast-changing baffle and its driving device

Abstract

The present invention discloses a coating cold roller circulation cooling quick-change baffle and its driving device, including a cooling baffle lifting driving device, a cooling cavity device and a quick-change cooling baffle device; the cooling baffle lifting driving device is composed of a linear guide rail, a lifting bracket, an electric cylinder, an electric cylinder fixing seat, a movable joint, a motor, and a reducer. The electric cylinder, the motor, and the reducer are fixedly mounted on the electric cylinder fixing seat. The electric cylinder is fixedly connected to the lifting bracket through a movable joint. The motor drives the electric cylinder to extend or retract through the reducer, and synchronously drives the lifting brackets on both sides to move up and down along the linear guide rail; the cooling cavity device and the quick-change cooling baffle device are fixedly mounted below the lifting bracket. The present invention improves the cooling effect of the coating cooling baffle and improves the coating finished product rate. In addition, a cooling baffle lifting driving device is added, and the cooling baffle is simply and efficiently disassembled and replaced, which reduces maintenance time.

Description

Technical Field

[0001] The invention relates to the field of vacuum coating equipment, and in particular to a coating cold roller circulating cooling quick-change baffle and a driving device thereof. Background Art

[0002] In addition to being used in consumer electronics, integrated circuits, optical optoelectronic components and other fields, vacuum coating equipment can also be used in medical equipment, aerospace, solar energy and other fields. As the country pays more and more attention to environmental protection, the high cost performance and low pollution characteristics of vacuum coating will become the mainstream technology in the surface treatment industry. Vacuum coating technology relies on its environmental protection, energy saving, safety and controllability, and cooperates with the country's sustainable development strategy, and its market coverage is rapidly expanding.

[0003] At present, vacuum coating equipment widely uses evaporation coating, sputtering coating and ion plating to prepare metal films such as copper foil and aluminum foil. The common vacuum coating cooling baffle device has a simple structure and low cooling efficiency. In addition, the position of the cooling baffle is fixed and cannot be changed. The space from the coating cold roller is too small, and it is not easy to disassemble and replace the cooling baffle. Coating equipment often uses arc-shaped baffles to protect both ends of the coating from sputtering to achieve a better winding effect. However, since the baffle is continuously exposed to heat during the evaporation or sputtering process, the temperature of the baffle is significantly higher than that of other positions such as the main roller, and the inconsistent temperature causes the thermal shrinkage effect of the coating under the baffle and the sputtering area to be inconsistent. The temperature rise of the baffle not only affects the winding effect of both ends of the coating, but also greatly reduces the service life of the baffle. Summary of the invention

[0004] In view of the above problems, the present invention provides a coating cold roller circulating cooling quick-change baffle and a driving device thereof.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a coating cold roller circulation cooling quick-change baffle and its driving device, including a cooling baffle lifting driving device, a cooling cavity device and a quick-change cooling baffle device;

[0006] The cooling baffle lifting drive device is composed of a linear guide rail, a lifting bracket, an electric cylinder, an electric cylinder fixing seat, a movable joint, a motor, and a reducer. The electric cylinder, the motor, and the reducer are fixedly installed on the electric cylinder fixing seat. The electric cylinder is fixedly connected to the lifting bracket through a movable joint. The motor drives the electric cylinder to extend or retract through the reducer, and synchronously drives the lifting brackets on both sides to move up and down along the linear guide rail;

[0007] The cooling cavity device and the quick-change cooling baffle device are fixedly installed under the lifting bracket;

[0008] The cooling cavity device is composed of an arc-shaped cavity, a long plate-shaped cavity 1, and a long plate-shaped cavity 2.

[0009] The arc-shaped cavity, the long plate-shaped cavity 1, and the long plate-shaped cavity 2 are respectively processed with cooling water chambers inside, and the long plate-shaped cavity 1 and the long plate-shaped cavity 2 are respectively provided with a water inlet end joint and a water outlet end joint at one end;

[0010] The quick-change cooling baffle device consists of an upper baffle 1, a lower baffle 1, an upper baffle 2, a lower baffle 2, an arc-shaped upper baffle, an arc-shaped lower baffle, a left baffle, and a right baffle. The upper baffle 1, the lower baffle 1, the upper baffle 2, and the lower baffle 2 are respectively fixedly mounted on the upper and lower surfaces of the long plate-shaped cavity 1 and the long plate-shaped cavity 2 by quick-change bolt assemblies. The arc-shaped upper baffle and the arc-shaped lower baffle are fixedly mounted on the upper and lower surfaces of the circular arc cavity. The left baffle and the right baffle are fixedly mounted on the outer surfaces at both ends of the circular arc cavity.

[0011] Furthermore, the long plate-shaped cavity one and the long plate-shaped cavity two are arranged in parallel, and the arc-shaped cavity is provided with two groups respectively arranged at the head and tail ends of the long plate-shaped cavity one and the long plate-shaped cavity two, and the cooling water chamber in the arc-shaped cavity is divided in the middle to form a circulating cooling circuit with the long plate-shaped cavity one and the long plate-shaped cavity two.

[0012] Furthermore, the inner diameter of the cooling water chamber inside the arc-shaped cavity, the long plate-shaped cavity one, and the long plate-shaped cavity two is 16 mm.

[0013] Furthermore, grooves are processed on the surfaces of the arc-shaped cavity, the first long plate-shaped cavity, and the second long plate-shaped cavity, and copper braided belts are welded thereon, so as to increase the heat transfer ratio between the water channel of the cold component cavity and the cooling baffle, thereby improving the cooling efficiency.

[0014] From the above description of the structure of the present invention, it can be seen that compared with the prior art, the present invention has the following advantages:

[0015] The present invention designs an efficient circulating cooling water circuit in the cooling cavity device, and improves the heat transfer efficiency between the quick-change cooling baffle and the cooling cavity through a special structure, so that the cooling effect is good, the internal dirt can be cleaned regularly, and the service life is long;

[0016] The special structural design of the coating quick-change cooling baffle device realizes the rapid cooling of the cooling baffle. At the same time, the deposited film metal is not easy to fall off, ensuring that the vacuum chamber is cleaner, thereby effectively reducing the occurrence of problems such as wrinkling, film breakage, and bubble formation at both ends of the coating caused by continuous overheating of the cooling baffle, and improving the coating yield;

[0017] The design is equipped with a double-sided synchronous cooling baffle lifting drive device. When there is a lot of coated metal attached to the cooling baffle, in order to ensure the cooling effect and the cleanliness of the vacuum chamber, the cooling baffle can be quickly and effectively replaced through the baffle lifting drive device. The large disassembly space and simple structure greatly improve the replacement efficiency and reduce the maintenance time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0020] Figure 2 It is a front view structural schematic diagram of the present invention;

[0021] Figure 3 It is a schematic diagram of the top view structure of the present invention;

[0022] Figure 4 It is a schematic diagram of the AA structure of the present invention.

[0023] 1. Linear guide, 2. Lifting bracket, 3. Electric cylinder, 4. Electric cylinder fixing seat, 5. Movable joint, 6. Motor, 7. Reducer, 8. Arc-shaped cavity, 9. Long plate-shaped cavity 1, 10. Long plate-shaped cavity 2, 11. Water inlet end joint, 12. Water outlet end joint, 13. Upper baffle 1, 14. Upper baffle 2, 15. Lower baffle 1, 16. Lower baffle 2, 17. Arc-shaped upper baffle, 18. Arc-shaped lower baffle, 19. Left baffle, 20. Right baffle, 21. Quick-change bolt assembly, 22. Cooling water chamber. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0025] Example

[0026] refer to Figure 1-Figure 4 , a quick-change baffle for circulating cooling of a coated cold roller and its driving device, comprising a cooling baffle lifting driving device, a cooling cavity device and a quick-change cooling baffle device; the cooling cavity device provides a heat transfer medium for cooling the cold water baffle, and takes away the heat evaporated or splashed onto the cooling baffle through the cooling water circulation loop; the quick-change cooling baffle device is a direct heat source after being shielded by the cold roller during the evaporation or sputtering process, and is used for conducting heat dissipation and adsorbing and depositing coated metals to ensure cooling effect and cleanliness of the vacuum cavity; the cooling baffle lifting driving device can, when the cooling baffle needs to be replaced, allow the entire cooling baffle device to be away from the coated cold roller and descend to a suitable height for manual disassembly and replacement of the baffle to facilitate manual disassembly and assembly.

[0027] The cooling baffle lifting drive device is composed of a linear guide 1, a lifting bracket 2, an electric cylinder 3, an electric cylinder fixing seat 4, a movable joint 5, a motor 6, and a reducer 7. The electric cylinder 3, the motor 6, and the reducer 7 are fixedly mounted on the electric cylinder fixing seat 4. The electric cylinder 3 is fixedly connected to the lifting bracket 2 through the movable joint 5. The motor 6 drives the electric cylinder 3 to extend or retract through the reducer 7, and synchronously drives the lifting brackets 2 on both sides to move up and down along the linear guide 1;

[0028] The cooling cavity device and the quick-change cooling baffle device are fixedly installed below the lifting bracket 2;

[0029] The cooling cavity device is composed of an arc-shaped cavity 8, a long plate-shaped cavity 1 9, and a long plate-shaped cavity 2 10.

[0030] The arc-shaped cavity 8, the long plate-shaped cavity 1 9, and the long plate-shaped cavity 2 10 are respectively processed with cooling water chambers 22, and one end of the long plate-shaped cavity 1 9 and the long plate-shaped cavity 2 10 is respectively provided with a water inlet end joint 11 and a water outlet end joint 12.

[0031] The quick-change cooling baffle device consists of an upper baffle 13, a lower baffle 15, an upper baffle 14, a lower baffle 16, an arc-shaped upper baffle 17, an arc-shaped lower baffle 18, a left baffle 19, and a right baffle 20. The upper baffle 13, the lower baffle 15, the upper baffle 14, and the lower baffle 16 are respectively fixedly mounted on the upper and lower surfaces of the long plate-shaped cavity 1 9 and the long plate-shaped cavity 2 10 through a quick-change bolt assembly 21. The arc-shaped upper baffle 17 and the arc-shaped lower baffle 18 are fixedly mounted on the upper and lower surfaces of the arc-shaped cavity. The left baffle 19 and the right baffle 20 are fixedly mounted on the outer surfaces of both ends of the arc-shaped cavity 8.

[0032] like Figure 3 As shown, the long plate-shaped cavity 1 9 and the long plate-shaped cavity 2 10 are arranged in parallel, and the arc-shaped cavity 8 is provided with two groups respectively arranged at the head and tail ends of the long plate-shaped cavity 1 9 and the long plate-shaped cavity 2 10, and the cooling water chamber in the arc-shaped cavity 8 is divided in the middle to form a circulating cooling circuit with the long plate-shaped cavity 1 9 and the long plate-shaped cavity 2 10. The inner diameter of the cooling water chamber 22 inside the arc-shaped cavity 8, the long plate-shaped cavity 1 9, and the long plate-shaped cavity 2 10 is 16 mm, and the cooling water flows in from the water inlet hose, and flows through the water inlet end joint 11, the long plate-shaped cavity 1 9 (or the long plate-shaped cavity 2 10), the arc-shaped cavity 8, the long plate-shaped cavity 1 9 (or the long plate-shaped cavity 2 10), the arc-shaped cavity 8, the long plate-shaped cavity 1 9 (or the long plate-shaped cavity 2 10), and the water outlet end joint 12 in sequence.

[0033] The arc-shaped cavity 8, the long plate-shaped cavity 1 9 and the long plate-shaped cavity 2 10 are grooved and welded with copper braided belts to increase the heat transfer ratio between the cold part cavity water channel and the cooling baffle, thereby improving the cooling efficiency.

[0034] The present invention is designed with an efficient circulating cooling water circuit in the cooling cavity device, and the heat transfer efficiency between the quick-change cooling baffle and the cooling cavity is improved through a special structure, so the cooling effect is good, the internal dirt can be cleaned regularly, and the service life is long; the special structural design of the coated quick-change cooling baffle device realizes the rapid cooling of the cooling baffle, and at the same time, the deposited film metal is not easy to fall off, so that the vacuum chamber is cleaner, thereby effectively reducing the occurrence of problems such as wrinkling, film breakage, and bubbling at both ends of the coating caused by continuous overheating of the cooling baffle, and improving the coating yield; a double-sided synchronous cooling baffle lifting drive device is designed. When more coated metal is attached to the cooling baffle, in order to ensure the cooling effect and the cleanliness of the vacuum cavity, the cooling baffle can be quickly and effectively replaced through the baffle lifting drive device, the disassembly space is large and the structure is simple, which greatly improves the replacement efficiency and reduces the maintenance time.

[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating cold roller circulation cooling fast-changing baffle and its driving device, characterized in that: It includes a cooling baffle lifting drive device, a cooling cavity device and a quick-change cooling baffle device; The cooling baffle lifting drive device is composed of a linear guide rail, a lifting bracket, an electric cylinder, an electric cylinder fixing seat, a movable joint, a motor, and a reducer. The electric cylinder, the motor, and the reducer are fixedly installed on the electric cylinder fixing seat. The electric cylinder is fixedly connected to the lifting bracket through a movable joint. The motor drives the electric cylinder to extend or retract through the reducer, and synchronously drives the lifting brackets on both sides to move up and down along the linear guide rail; The cooling cavity device and the quick-change cooling baffle device are fixedly installed under the lifting bracket; The cooling cavity device is composed of an arc-shaped cavity, a long plate-shaped cavity 1, and a long plate-shaped cavity 2. The arc-shaped cavity, the long plate-shaped cavity 1, and the long plate-shaped cavity 2 are respectively processed with cooling water chambers inside, and the long plate-shaped cavity 1 and the long plate-shaped cavity 2 are respectively provided with a water inlet end joint and a water outlet end joint at one end; The quick-change cooling baffle device consists of an upper baffle 1, a lower baffle 1, an upper baffle 2, a lower baffle 2, an arc-shaped upper baffle, an arc-shaped lower baffle, a left baffle, and a right baffle. The upper baffle 1, the lower baffle 1, the upper baffle 2, and the lower baffle 2 are respectively fixedly mounted on the upper and lower surfaces of the long plate-shaped cavity 1 and the long plate-shaped cavity 2 by quick-change bolt assemblies. The arc-shaped upper baffle and the arc-shaped lower baffle are fixedly mounted on the upper and lower surfaces of the circular arc cavity. The left baffle and the right baffle are fixedly mounted on the outer surfaces at both ends of the circular arc cavity.

2. According to claim 1, a coating cold roller circulation cooling fast-changing baffle and its driving device are characterized by: The long plate-shaped cavity one and the long plate-shaped cavity two are arranged in parallel, and the arc-shaped cavity has two groups respectively arranged at the head and tail ends of the long plate-shaped cavity one and the long plate-shaped cavity two. The cooling water chamber in the arc-shaped cavity is divided in the middle to form a circulating cooling circuit with the long plate-shaped cavity one and the long plate-shaped cavity two.

3. According to claim 1, a coating cold roller circulation cooling fast-changing baffle and its driving device are characterized by: The inner diameter of the cooling water chamber inside the arc-shaped cavity, the long plate-shaped cavity 1, and the long plate-shaped cavity 2 is 16 mm.

4. According to claim 1, a coating cold roller circulation cooling fast-changing baffle and its driving device are characterized by: Grooves are processed on the surfaces of the arc-shaped cavity, the first long plate-shaped cavity and the second long plate-shaped cavity and copper braided strips are welded thereon.

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