Energy-saving graphite furnace and method for sintering high-purity aluminum nitride powder

By agitating alumina and carbon black with rotating paddles in the graphite furnace, the problems of poor mixing uniformity of raw materials and high nitride temperature in the existing aluminum nitride powder preparation methods are solved, and efficient and energy-saving aluminum nitride powder production is achieved.

CN116358314BActive Publication Date: 2025-05-16FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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Patent Information

Application Number
CN202310355764.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-04-06
Publication Date
2025-05-16
Estimated Expiration
2043-04-06

AI Technical Summary

Technical Problem

The existing aluminum nitride powder preparation methods have problems such as poor mixing uniformity of raw materials, high nitriding temperature, long synthesis time and long carbon removal treatment time, resulting in low production efficiency and high cost.

Method used

The energy-saving graphite furnace is adopted. By setting a rotating paddle in the sintering furnace, agitating alumina and carbon black to increase the reaction area, and the rotating paddle continues to be used in the carbon removal furnace to speed up the reaction rate and reduce the reaction time.

Benefits of technology

By increasing the contact area between reactants and gas, the reaction rate and purity of aluminum nitride powder are significantly improved, production time and energy consumption are reduced, and production efficiency is improved.

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Abstract

The invention relates to an energy-saving graphite furnace and a method for sintering high-purity aluminum nitride powder thereof. Alumina powder and carbon black are firstly put into a supporting sintering box, and then sent into the sintering furnace. After nitrogen is introduced into the sintering furnace, a rotating paddle is rotated while sintering to obtain aluminum nitride powder after sintering. Then the supporting sintering box is sent into a decarbonization furnace and air is introduced. The rotating paddle is rotated while sintering to remove excess carbon black and obtain high-purity aluminum nitride powder. Stirring is performed during sintering to make the reaction more complete and shorten the reaction time. The method adopts an energy-saving graphite furnace to match the method for production, has a simple structure and good processing effect.
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Description

Technical Field

[0001] The invention belongs to the technical field of aluminum nitride manufacturing equipment, and particularly relates to an energy-saving graphite furnace and a method for sintering high-purity aluminum nitride powder. Background Art

[0002] At present, the existing aluminum nitride powder preparation and synthesis mainly include direct nitridation method, carbon thermal reduction method, self-propagating high temperature synthesis method, chemical vapor deposition method, plasma method and Al2O3 powder carbon thermal reduction method. Among them, the two carbon thermal reduction method is to reduce and nitride the mixed powder of aluminum oxide powder and carbon powder in flowing nitrogen at 1400 degrees Celsius-1600 degrees Celsius to generate AlN powder. The main difficulty of this method is that the raw materials of aluminum oxide and carbon are relatively high, the raw materials are difficult to mix evenly, the nitridation temperature is high, the synthesis time is long, and the excess carbon needs to be decarbonized (400 degrees Celsius and 600 degrees Celsius). In order to speed up the time of reduction nitridation reaction and decarbonization treatment, a method and equipment for efficiently producing aluminum nitride powder is needed in the market. In view of this, this scheme was created. Summary of the invention

[0003] In view of the deficiencies in the prior art, the technical problem to be solved by the present invention is to provide an energy-saving graphite furnace and a method for sintering high-purity aluminum nitride powder. When aluminum oxide and carbon black react in the sintering furnace, the rotating paddle will stir the aluminum oxide and carbon black to increase the reaction area and reduce the reaction time.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: an energy-saving graphite furnace, comprising a sintering furnace, a first rotating assembly, a first abutting assembly and a bearing sintering box, wherein the bearing sintering box is provided with a rotating paddle, one end of the rotating paddle extends out of the side wall of the bearing sintering box, and the end of the rotating paddle extending out of the bearing sintering box is provided with a first connecting platform, the side wall of the sintering furnace is formed with a first accommodating hole and a second accommodating hole, the first accommodating hole and the second accommodating hole are arranged opposite to each other, the first accommodating hole faces the first connecting platform, the first rotating assembly is located in the first accommodating hole, and the first abutting assembly is located in the second accommodating hole;

[0005] The first rotating assembly includes a first rotating body and a first pushing body, the first rotating body is used to drive the first connecting platform to rotate, the first pushing body is used to drive the first rotating body to connect with the first connecting platform, and the first abutting assembly includes a second pushing body, and the second pushing body contacts or moves away from the side wall of the supporting sintering box.

[0006] Furthermore, the graphite furnace also includes a decarbonization furnace, a second rotating assembly and a second top assembly. The side wall of the decarbonization furnace is formed with a third accommodating hole and a fourth accommodating hole. The third accommodating hole and the fourth accommodating hole are arranged opposite to each other. The third accommodating hole faces the first connecting platform. The second rotating assembly is located in the third accommodating hole, and the second top assembly is located in the fourth accommodating hole. The structure of the second rotating assembly is the same as that of the first rotating assembly, and the structure of the second top assembly is the same as that of the first top assembly.

[0007] Furthermore, the first rotating body is a first motor, the first pushing body is a first oil cylinder, the output end of the first oil cylinder is fixedly connected to the first motor, and the output end of the first motor is clamped to the first connecting platform.

[0008] Further, the first rotating assembly further includes a first high temperature resistant connecting member, the first high temperature resistant connecting member is a rotating body, the vertical cross section of the first high temperature resistant connecting member is I-shaped, the first high temperature resistant connecting member includes a first connecting portion, a first transition portion and a first clamping portion, and the first transition portion is located between the first connecting portion and the first clamping portion;

[0009] The first connecting portion is fixedly connected to the output end of the first motor, the first clamping portion is a square protrusion, and the first connecting platform is formed with a clamping groove, which is matched with the first clamping portion.

[0010] Furthermore, the second pushing body is a second oil cylinder, and the first abutting assembly also includes a second high temperature resistant connecting member, the second high temperature resistant connecting member includes a second connecting portion, a second transition portion and an abutting top portion, the second transition portion is located between the second connecting portion and the abutting top portion, and the second connecting portion is fixedly connected to the output end of the second pushing body.

[0011] Furthermore, the graphite furnace also includes a first liquid pump and a second liquid pump, a first heat conduction cavity is formed in the side wall of the sintering furnace, the first heat conduction cavity is located in two corresponding side walls of the sintering furnace and in the upper surface of the sintering furnace, a second heat conduction cavity is formed in the side wall of the decarbonization furnace, the second heat conduction cavity is located in two corresponding side walls of the decarbonization furnace and in the upper surface of the decarbonization furnace, the sintering furnace and the decarbonization furnace are spaced apart on the left and right, the first heat conduction cavity and the second heat conduction cavity are filled with heat conduction oil, the first heat conduction cavity and the second heat conduction cavity are connected, the first heat conduction cavity is connected to the output end of the first liquid pump, the second heat conduction cavity is connected to the input end of the second liquid pump, and the input end of the first liquid pump is connected to the output end of the second liquid pump.

[0012] Furthermore, the graphite furnace further includes a first connecting pipe and a second connecting pipe, wherein the first connecting pipe is used to connect the first heat conduction cavity and the second heat conduction cavity, and the second connecting pipe is used to connect the first liquid pump and the second liquid pump.

[0013] Furthermore, a first through hole is formed at the lower inner side of the furnace wall of the sintering furnace, a second through hole is formed at the lower inner side of the furnace wall of the decarbonizing furnace, and the second connecting pipe passes through the first through hole and the second through hole.

[0014] Furthermore, the graphite furnace also includes a third pusher, a fourth pusher and a first conveyor belt, the first conveyor belt is located on the output end side of the sintering furnace, the first conveyor belt is located on the input end side of the decarbonization furnace, the third pusher is used to push the supporting sintering box into or out of the sintering furnace, and the fourth pusher is used to push the supporting sintering box into or out of the decarbonization furnace.

[0015] The method for sintering high-purity aluminum nitride powder comprises the following steps:

[0016] S1: putting alumina powder and carbon black into a supporting sintering box, and then sending them into a sintering furnace. After nitrogen is introduced into the sintering furnace, the paddle is rotated while being fired to obtain aluminum nitride powder after firing;

[0017] S2: The supporting sintering box is sent into the decarbonization furnace and air is introduced. The paddle is rotated while the sintering is performed to remove excess carbon black and obtain high-purity aluminum nitride powder.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present invention provides an energy-saving graphite furnace by setting a first rotating component, so that when a carrying sintering box carrying aluminum oxide powder and carbon black reacts in the sintering furnace, the first rotating body of the first rotating component will drive the rotating paddle in the carrying sintering box to rotate, thereby increasing the contact area between aluminum oxide, carbon black and nitrogen, thereby increasing the reaction rate and reducing the time required for the reaction. The first supporting component is provided to support the carrying sintering box to prevent the first rotating body from pushing the carrying sintering box under the action of the first pushing body, causing the carrying sintering box to shift. The present invention also provides a method for sintering high-purity aluminum nitride powder. When aluminum oxide powder and carbon black react in the sintering furnace, they will be stirred by the rotating paddle. When aluminum nitride and carbon black are decarbonized in the decarbonization furnace, they will also be stirred by the rotating paddle. The contact area between the reactants and the gas is increased by stirring with the rotating paddle, thereby increasing the reaction rate and reducing the time required for the reaction.

[0020] 2. When the supporting sintering box of aluminum nitride powder and carbon black reacts in the decarbonization furnace, the second rotating assembly drives the rotating paddle in the supporting sintering box to rotate, increasing the contact area between carbon black and air, thereby increasing the reaction rate and reducing the time required for the reaction. The second supporting assembly is provided to support the supporting sintering box to prevent the supporting sintering box from shifting under the supporting of the second rotating assembly.

[0021] 3. When the sintering furnace and the decarbonization furnace are working, the first liquid pump and the second liquid pump start working, and the first liquid pump transports heat transfer oil into the first heat transfer cavity. The heat transfer oil that absorbs heat in the first heat transfer cavity moves to the second heat transfer cavity to heat the decarbonization furnace, so that the second heating component in the decarbonization furnace does not need to work at high power to heat the decarbonization furnace. The heat transfer oil flowing out of the second heat transfer cavity flows to the second liquid pump, and the second liquid pump transports the heat transfer oil to the first liquid pump to form a circulation. With the above structure, when the heat transfer oil in the first heat transfer cavity moves to the second heat transfer cavity, the inside of the decarbonization furnace has reached a certain temperature. At this time, the temperature inside the decarbonization furnace is heated by the heating component at a difference from the preset temperature. Compared with the traditional heating of the sintering furnace and the decarbonization furnace, which are heated separately, the efficiency is higher and more energy-saving.

[0022] 4. The first thermal insulation body and the second thermal insulation body are provided to prevent the first rotating body, the first pushing body and the second pushing body from being damaged at high temperatures, and the third thermal insulation body and the fourth thermal insulation body are provided to prevent the second rotating assembly and the second abutting assembly from being damaged at high temperatures. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the top view of the energy-saving graphite furnace of the present invention;

[0024] Figure 2 It is a schematic cross-sectional structure diagram of the energy-saving graphite furnace of the present invention;

[0025] Figure 3 It is a schematic cross-sectional view of the structure of the first rotating assembly after assembly in the present invention;

[0026] Figure 4 It is a schematic cross-sectional view of the structure of the first abutting component after being assembled in the present invention;

[0027] Figure 5 It is a schematic diagram of the three-dimensional structure of the sintering box in the present invention;

[0028] Figure 6 is a schematic diagram of the three-dimensional structure of the first rotating assembly in the present invention;

[0029] Figure 7 It is a schematic diagram of the three-dimensional structure of the first abutting component in the present invention.

[0030] Markings in the figure: 1, sintering furnace; 11, first heat conduction chamber; 111, first liquid pump; 112, first connecting pipe; 12, first air inlet; 13, first air outlet; 2, decarbonization furnace; 21, second heat conduction chamber; 211, second liquid pump; 212, second connecting pipe; 22, second air inlet; 23, second air outlet; 3, first rotating assembly; 31, first motor; 32, first pusher; 33, first high temperature resistant connecting piece; 331, first connecting part; 332, first transition Part; 333, the first clamping part; 34, the first thermal insulation body; 4, the first top-butting assembly; 41, the second pushing body; 42, the second high-temperature resistant connecting piece; 421, the second connecting part; 422, the second transition part; 423, the top part; 43, the second thermal insulation body; 5, the second rotating assembly; 51, the second top-butting assembly; 6, the supporting sintering box; 61, the rotating paddle; 611, the first connecting platform; 6111, the slot; 7, the third pushing body; 8, the fourth pushing body; 9, the first conveyor belt. DETAILED DESCRIPTION

[0031] In order to make the above features and advantages of the present invention more obvious and easy to understand, embodiments are given below with reference to the accompanying drawings for detailed description as follows.

[0032] like Figure 1-7 As shown, this embodiment provides an energy-saving graphite furnace, including a sintering furnace 1, a first rotating assembly 3, a first abutting assembly 4, a supporting sintering box, a decarbonization furnace 2, a second rotating assembly 5, a second abutting assembly 51, a third pushing body 7, a fourth pushing body 8 and a first conveyor belt 9.

[0033] A first heat-conducting cavity 11 and a sintering chamber are formed in the side wall of the sintering furnace 1. The first heat-conducting cavity 11 is located in two corresponding side walls of the sintering furnace 1 and in the upper surface of the sintering furnace 1. The first heat-conducting cavity 11 is filled with heat-conducting oil. The temperature of the sintering chamber is 1400 degrees Celsius-1600 degrees Celsius. In this solution, the temperature of the sintering chamber is 1600 degrees Celsius. The sintering furnace 1 is formed with a first air inlet 12 and a first air outlet 13. The first air inlet 12 is connected to a nitrogen inlet pipe (nitrogen), and the first air outlet 13 is connected to a first tail gas exhaust pipe. The first air inlet 12 and the first air outlet 13 are connected to the sintering chamber. The first air inlet 12 and the first air outlet 13 are not connected to the first heat-conducting cavity 11. The sintering furnace 1 is also formed with a first feed port and a first discharge port. The first feed port is connected to a first switch door, and the first discharge port is connected to a second switch door. A first accommodating hole and a second accommodating hole are formed on the side wall of the sintering furnace 1 . The first accommodating hole and the second accommodating hole are arranged opposite to each other, and the first accommodating hole and the second accommodating hole are not communicated with the first heat conducting cavity 11 .

[0034] The sintering furnace 1 and the decarbonization furnace 2 are arranged at intervals on the left and right. A second heat conduction cavity 21 is formed in the side wall of the decarbonization furnace 2. The second heat conduction cavity 21 is located in the two corresponding side walls of the decarbonization furnace 2 and in the upper surface of the decarbonization furnace 2. The second heat conduction cavity 21 is filled with heat conduction oil. The temperature in the decarbonization furnace 2 is 400 degrees Celsius-600 degrees Celsius. In this solution, the temperature in the decarbonization furnace 2 is 600 degrees Celsius. The decarbonization furnace 2 is formed with a second air inlet 22 and a second air hole. The second air inlet 22 is connected to the air inlet pipe (for air), and the second air outlet 23 is connected to the second tail gas exhaust pipe. The decarbonization furnace 2 is also formed with a second feed port and a second discharge port. The second feed port is connected to the third switch door, and the second discharge port is connected to the fourth switch door. The side wall of the decarbonization furnace 2 is formed with a third accommodating hole and a fourth accommodating hole, and the third accommodating hole and the fourth accommodating hole are arranged opposite to each other.

[0035] The first heat conducting cavity 11 is connected to the output end of the first liquid pump 111, the second heat conducting cavity 21 is connected to the input end of the second liquid pump 211, the input end of the first liquid pump 111 is connected to the output end of the second liquid pump 211, the first connecting pipe 112 is used to connect the first heat conducting cavity 11 and the second heat conducting cavity 21, and the second connecting pipe 212 is used to connect the first liquid pump 111 and the second liquid pump 211.

[0036] Preferably, a first through hole is formed at the lower part of the furnace wall of the sintering furnace 1, and a second through hole is formed at the lower part of the furnace wall of the decarbonization furnace 2. The second connecting pipe 212 passes through the first through hole and the second through hole. Through the above arrangement, when the second liquid pump 211 transports the heat transfer oil back to the first liquid pump 111, heat exchange can be performed again through the sintering furnace 1.

[0037] When the sintering furnace 1 and the decarbonization furnace 2 are in operation, the first liquid pump 111 and the second liquid pump 211 start to work, and the first liquid pump 111 transports heat transfer oil into the first heat transfer chamber 11. The heat transfer oil that absorbs heat in the first heat transfer chamber 11 moves to the second heat transfer chamber 21 to provide heat for the decarbonization furnace 2, so that the second heating component in the decarbonization furnace 2 does not need to work at high power to provide heat for the decarbonization furnace 2. The heat transfer oil flowing out of the second heat transfer chamber 21 flows to the second liquid pump 211, and the second liquid pump 211 transports the heat transfer oil to the first liquid pump 111 to form a circulation.

[0038] A rotating paddle 61 is provided in the supporting sintering box, one end of the rotating paddle 61 extends out of the side wall of the supporting sintering box, and a first connecting platform 611 is provided at the end of the rotating paddle 61 extending out of the supporting sintering box. A card groove 6111 is formed on the end face of the first connecting platform 611, and the vertical cross-section of the card groove 6111 is square. The supporting sintering box body 6 and the rotating paddle 61 are made of industrial high-temperature resistant ceramic material, and the specific material is silicon carbide.

[0039] The first rotating component 3 is located in the first accommodating hole, and the first rotating component 3 includes a first high temperature resistant connecting member 33, a first rotating body and a first pushing body 32. The first rotating body is used to drive the first connecting platform to rotate, and the first pushing body 32 is used to drive the first rotating body to connect with the first connecting platform 611. Specifically, the first high temperature resistant connecting member 33 is a rotating body. The first high temperature resistant connecting member 33 is made of industrial high temperature resistant ceramic material, and the material is silicon carbide. The vertical cross-section of the first high temperature resistant connecting member 33 is I-shaped. The first high temperature resistant connecting member 33 includes a first connecting portion 331, a first transition portion 332 and a first clamping portion 333. The first transition portion 332 is located between the first connecting portion 331 and the first clamping portion 333.

[0040] The first rotating body is the first motor 31, the first pushing body 32 is the first oil cylinder, the output end of the first oil cylinder is fixedly connected to the first motor 31, the first connecting part 331 is fixedly connected to the output end of the first motor 31, the first clamping part 333 is a square protrusion, the first clamping part 333 is adapted to the clamping groove 6111, a first thermal insulation body 34 is formed in the first accommodating hole, the first thermal insulation body 34 is fixedly connected to the first accommodating hole, the first thermal insulation body 34 is formed with a first sliding hole, and the first transition part 332 passes through the first thermal insulation body 34.

[0041] The first push-up assembly 4 is located in the second accommodating hole. The first push-up assembly 4 includes a second pusher 41 and a second high-temperature resistant connecting member 42. The second pusher 41 contacts or is away from the side wall of the supporting sintering box. Specifically, the second high-temperature resistant connecting member 42 includes a second connecting portion 421, a second transition portion 422 and a push-up top portion 423. The second transition portion 422 is located between the second connecting portion 421 and the push-up top portion 423. The second connecting portion 421 is fixedly connected to the output end of the second pusher 41. A second thermal insulation body 43 is formed in the second accommodating hole. The second thermal insulation body 43 is fixedly connected to the second accommodating hole. A second sliding hole is formed in the second thermal insulation body 43. The second transition portion 422 passes through the second thermal insulation body 43. The first thermal insulation body 34 and the second thermal insulation body 43 are provided to prevent the first rotating body, the first pusher 32 and the second pusher 41 from being damaged at high temperatures.

[0042] The second rotating assembly 5 is located in the third accommodating hole, and the second rotating assembly 5 has the same structure as the first rotating assembly 3. A third thermal insulation body is fixedly arranged in the third accommodating hole, and the structure of the third thermal insulation body is the same as the structure of the first thermal insulation body 34. The second abutting assembly 51 is located in the fourth accommodating hole, and the structure of the second abutting assembly 51 is the same as the structure of the first abutting assembly 4. A fourth thermal insulation body is fixedly arranged in the fourth accommodating hole, and the structure of the third thermal insulation body is the same as the structure of the second thermal insulation body 43. The third thermal insulation body and the fourth thermal insulation body are provided to prevent the second rotating assembly 5 and the second abutting assembly 51 from being damaged at high temperatures.

[0043] The third pusher 7 is the third oil cylinder, the fourth pusher 8 is the fourth oil cylinder, the first conveyor belt 9 is located on the first discharge port side of the sintering furnace 1, and the first conveyor belt 9 is located on the second feed port side of the decarbonization furnace 2. The third pusher 7 is used to push the supporting sintering box into or out of the sintering furnace 1, and the fourth pusher 8 is used to push the supporting sintering box into or out of the decarbonization furnace 2.

[0044] The present invention also provides a method for sintering high-purity aluminum nitride powder, comprising the following steps:

[0045] S1: Alumina powder and carbon black are placed in a supporting sintering box, and then sent into a sintering furnace 1. After nitrogen is introduced into the sintering furnace 1, the paddle 61 is rotated while being fired to obtain aluminum nitride powder;

[0046] S2: The supporting sintering box is sent into the decarbonization furnace 2 and air is introduced, and the rotating paddle 61 is rotated while firing to remove excess carbon black and obtain high-purity aluminum nitride powder.

[0047] Step S1 and step S2 are produced using an energy-saving graphite furnace.

[0048] The specific steps of S1 are as follows: alumina powder and carbon black are placed in a supporting sintering box, the first switch door is opened, the third pusher 7 pushes the supporting sintering box into a designated position of the sintering chamber of the sintering furnace 1, the first switch door is closed, the second oil cylinder pushes out the end face of the top portion 423 of the second high temperature resistant connecting piece 42 to fit the side wall of the supporting sintering box, the first oil cylinder pushes out the first clamping portion 333 of the first high temperature resistant connecting piece 33 to clamp into the clamping groove 6111, and then nitrogen is introduced into the sintering furnace 1, the sintering furnace 1 is heated and the temperature is about to reach 1600 degrees Celsius, the first motor 31 starts to rotate, so that alumina, carbon black and nitrogen undergo a reduction nitridation reaction, and the alumina powder becomes aluminum nitride powder during the reaction. Since the first motor 31 drives the stirring paddle to rotate, the alumina and carbon black are fully in contact with the nitrogen for reaction during sintering in the sintering furnace 1, which greatly improves the reaction rate and reduces the reaction time. After the reaction is completed, aluminum nitride powder and unreacted carbon black are obtained.

[0049] The specific steps of S2 are as follows: the second switch door and the third switch door are opened, the third pusher 7 pushes the carrying sintering box onto the first conveyor belt 9, the first conveyor belt 9 transports the carrying sintering box to the second feed port, the fourth pusher 8 pushes the carrying sintering box into the designated position of the decarbonization furnace 2, the second switch door and the third switch door are closed, the working process of the second abutting assembly 51 and the second rotating assembly 5 is the same as the working process of the first abutting assembly and the first rotating assembly 3 in step S1, and will not be repeated here. Since the heat transfer oil in the first heat transfer chamber 11 of the sintering furnace 1 will Move to the second heat conduction chamber 21 of the decarbonization furnace 2, and the temperature required by the decarbonization furnace 2 is lower than the temperature required by the sintering furnace 1. When the heat conduction oil moves to the second heat conduction chamber 21, the inside of the decarbonization furnace 2 has reached a certain temperature. At this time, the temperature difference in the decarbonization furnace 2 from the preset temperature is heated by the heating component. Compared with the traditional sintering furnace 1 and the decarbonization furnace 2, which are heated separately, the efficiency is higher and more energy-saving. After the temperature is reached, air is introduced into the decarbonization furnace 2 to carry the unreacted carbon black in the sintering box to react with the air, and high-purity aluminum nitride powder is obtained after the reaction. The above shows and describes the basic principles and main features of the invention and the advantages of the invention. The technicians in this industry should understand that the invention is not limited by the above embodiments. The above embodiments and descriptions only illustrate the principles of the invention. Without departing from the spirit and scope of the invention, the invention will have various changes and improvements. These changes and improvements fall within the scope of the invention to be protected. The scope of protection of the invention is defined by the attached claims and their equivalents.

Claims

1. Energy-saving graphite furnace, characterized by: The invention comprises a sintering furnace, a first rotating assembly, a first abutting assembly and a bearing sintering box, wherein the bearing sintering box is provided with a rotating paddle, one end of the rotating paddle extends out of the side wall of the bearing sintering box, and the end of the rotating paddle extending out of the bearing sintering box is provided with a first connecting platform, the side wall of the sintering furnace is formed with a first accommodating hole and a second accommodating hole, the first accommodating hole and the second accommodating hole are arranged opposite to each other, the first accommodating hole faces the first connecting platform, the first rotating assembly is located in the first accommodating hole, and the first abutting assembly is located in the second accommodating hole; The first rotating assembly includes a first rotating body and a first pushing body, the first rotating body is used to drive the first connecting platform to rotate, the first pushing body is used to drive the first rotating body to connect with the first connecting platform, and the first abutting assembly includes a second pushing body, the second pushing body contacts or moves away from the side wall of the supporting sintering box; The graphite furnace also includes a decarbonization furnace, a second rotating assembly and a second resisting assembly. The side wall of the decarbonization furnace is formed with a third accommodating hole and a fourth accommodating hole. The third accommodating hole and the fourth accommodating hole are arranged opposite to each other. The third accommodating hole faces the first connecting platform. The second rotating assembly is located in the third accommodating hole. The second resisting assembly is located in the fourth accommodating hole. The structure of the second rotating assembly is the same as that of the first rotating assembly. The structure of the second resisting assembly is the same as that of the first resisting assembly.

2. The energy-saving graphite furnace according to claim 1, characterized in that: The first rotating body is a first motor, the first pushing body is a first oil cylinder, the output end of the first oil cylinder is fixedly connected to the first motor, and the output end of the first motor is clamped to the first connecting platform.

3. The energy-saving graphite furnace according to claim 2, characterized in that: The first rotating assembly further includes a first high temperature resistant connecting member, which is a rotating body, and the vertical cross section of the first high temperature resistant connecting member is I-shaped, and the first high temperature resistant connecting member includes a first connecting portion, a first transition portion and a first clamping portion, and the first transition portion is located between the first connecting portion and the first clamping portion; The first connecting portion is fixedly connected to the output end of the first motor, the first clamping portion is a square protrusion, and the first connecting platform is formed with a clamping groove, which is matched with the first clamping portion.

4. The energy-saving graphite furnace according to claim 1, characterized in that: The second pushing body is a second oil cylinder, and the first abutting assembly also includes a second high temperature resistant connecting piece, which includes a second connecting part, a second transition part and an abutting top part. The second transition part is located between the second connecting part and the abutting top part, and the second connecting part is fixedly connected to the output end of the second pushing body.

5. The energy-saving graphite furnace according to claim 1, characterized in that: The graphite furnace also includes a first liquid pump and a second liquid pump. A first heat-conducting cavity is formed in the side wall of the sintering furnace, and the first heat-conducting cavity is located in two corresponding side walls of the sintering furnace and in the upper surface of the sintering furnace. A second heat-conducting cavity is formed in the side wall of the decarbonization furnace, and the second heat-conducting cavity is located in two corresponding side walls of the decarbonization furnace and in the upper surface of the decarbonization furnace. The sintering furnace and the decarbonization furnace are spaced apart on the left and right. Heat-conducting oil is filled in the first heat-conducting cavity and the second heat-conducting cavity. The first heat-conducting cavity and the second heat-conducting cavity are connected. The first heat-conducting cavity is connected to the output end of the first liquid pump, the second heat-conducting cavity is connected to the input end of the second liquid pump, and the input end of the first liquid pump is connected to the output end of the second liquid pump.

6. The energy-saving graphite furnace according to claim 5, characterized in that: The graphite furnace further includes a first connecting pipe and a second connecting pipe, wherein the first connecting pipe is used to connect the first heat conduction cavity and the second heat conduction cavity, and the second connecting pipe is used to connect the first liquid pump and the second liquid pump.

7. The energy-saving graphite furnace according to claim 6, characterized in that: A first through hole is formed in the lower part of the furnace wall of the sintering furnace, a second through hole is formed in the lower part of the furnace wall of the carbon removal furnace, and the second connecting pipe passes through the first through hole and the second through hole.

8. The energy-saving graphite furnace according to claim 1, characterized in that: The graphite furnace also includes a third pusher, a fourth pusher and a first conveyor belt. The first conveyor belt is located on the output end side of the sintering furnace, and the first conveyor belt is located on the input end side of the decarbonization furnace. The third pusher is used to push the supporting sintering box into or out of the sintering furnace, and the fourth pusher is used to push the supporting sintering box into or out of the decarbonization furnace.

9. A method for sintering high-purity aluminum nitride powder, characterized in that: The energy-saving graphite furnace according to any one of claims 1 to 8 is subjected to the following steps: S1: putting alumina powder and carbon black into a supporting sintering box, and then sending them into a sintering furnace. After nitrogen is introduced into the sintering furnace, the paddle is rotated while being fired to obtain aluminum nitride powder after firing; S2: The supporting sintering box is sent into the decarbonization furnace and air is introduced. The paddle is rotated while the sintering is performed to remove excess carbon black and obtain high-purity aluminum nitride powder.

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