A dual-head machine tool for semiconductor material processing

Abstract

This invention discloses a dual-head machine tool for semiconductor material processing, belonging to the technical field of semiconductor material processing equipment. It includes a frame with a cleaning mechanism, comprising: a liquid washing device mounted on the frame; an air washing device mounted on the frame, with the air washing device and liquid washing device arranged opposite each other; and a fixing device mounted on the frame, comprising a first fixing component and a rotating component. The first fixing component can fix one end of a workpiece removed from the clamping mechanism, with the fixed end of the workpiece located on one side of the air washing device, and the portion of the workpiece not clamped by the first fixing component located on the one side of the liquid washing device. When the first fixing component fixes one end of the workpiece, the rotating component can rotate the portion of the workpiece not clamped by the first fixing component to the side of the air washing device. This invention improves upon the problem of incomplete cleaning of the semiconductor material processing surface during semiconductor material processing using dual-head machine tools in the prior art, thereby improving the quality of the finished product.

Description

Technical Field

[0001] This invention relates to a dual-head machine tool for semiconductor material processing, belonging to the technical field of semiconductor material processing equipment. Background Technology

[0002] Currently, most semiconductor materials are processed using dual-head machine tools. When processing semiconductor materials, the two cutting heads of the dual-head machine tool process both sides of the workpiece simultaneously.

[0003] During the machining process of a double-head machine tool, since there are two cutting heads processing semiconductor materials, there are a lot of machining debris on the machining surface of the semiconductor materials. Conventional cleaning and heat dissipation measures on the machine tool have limited capacity to handle the two machining surfaces of the semiconductor materials, which leads to incomplete cleaning. The accumulated debris will affect the subsequent machining accuracy of the double-head machine tool and the quality of the finished product. Therefore, there is an urgent need to propose a new type of double-head machine tool to improve this. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a double-head machine tool for semiconductor material processing, which improves the problem of incomplete cleaning of the semiconductor material processing surface during the processing of semiconductor materials by double-head machine tools in the prior art, thereby improving the quality of the finished product.

[0005] The technical problem to be solved by this invention is achieved by the following technical solution:

[0006] A dual-head machine tool for semiconductor material processing includes a frame with a clamping mechanism and a processing mechanism. The frame also includes a cleaning mechanism, comprising: a liquid washing device mounted on the frame; an air washing device mounted on the frame, the air washing device and the liquid washing device being disposed opposite each other; and a fixing device mounted on the frame, the fixing device including a first fixing component and a rotating component. The first fixing component can fix one end of a workpiece removed from the clamping mechanism, with the fixed end of the workpiece located on one side of the air washing device, and the portion of the workpiece not clamped by the first fixing component located on one side of the liquid washing device. When the first fixing component fixes one end of the workpiece, the rotating component can rotate the portion of the workpiece not clamped by the first fixing component to the side of the air washing device.

[0007] By adopting the above technical solution, the clamping mechanism clamps the workpiece, and then the processing mechanism processes the workpiece. When the debris on the workpiece is difficult to handle, the workpiece is removed and fixed by the first fixing component. After the first fixing component fixes one end of the workpiece, the end of the workpiece fixed by the first fixing component is located on the side of the air washing device, and the part of the workpiece fixed by the first fixing component is located on the side of the liquid washing device. The air washing device and the liquid washing device clean both ends of the workpiece respectively, and the workpiece can be rotated by the rotating component to change its direction so that both ends of the workpiece can be treated by the air washing device and the liquid washing device. This effectively removes debris from the surface of the workpiece, reduces residual debris during workpiece processing, improves processing quality, and further improves the quality of the finished product.

[0008] The present invention is further configured such that: the first fixing component includes a fixed drive source, a fixed seat and a movable seat, the fixed seat is fixed on the frame, the output end of the fixed drive source is connected to the movable seat, and the fixed drive source can drive the movable seat to move closer to the fixed seat to fix the workpiece.

[0009] By adopting the above technical solution, the fixed seat is a fixed part, and the movable seat is driven to move closer to the fixed seat by a fixed drive source so that the workpiece is fixed between the fixed seat and the movable seat.

[0010] The present invention is further configured such that: the rotating assembly includes a rotation drive source, an upper rotating component, and a lower rotating component; the upper rotating component is rotatably connected to the movable seat, and the lower rotating component is rotatably connected to the fixed seat; the output end of the rotation drive source is connected to the lower rotating component; when the movable seat is close to the fixed seat at a certain distance, the workpiece is fixed between the upper rotating component and the lower rotating component, at which time the rotation drive source can drive the lower rotating component to rotate so that it rotates synchronously with the workpiece and the upper rotating component as a whole.

[0011] By adopting the above technical solution, the workpiece is placed between the upper rotating part and the lower rotating part. When the distance between the fixed seat and the movable seat reaches a certain distance, the workpiece is fixed between the upper rotating part and the lower rotating part. At this time, the workpiece, the upper rotating part and the lower rotating part become a whole. The rotation drive source can drive the workpiece to rotate when the workpiece is clamped, so that the positions of the two ends of the workpiece are interchanged, so that both ends of the workpiece can be treated by the air washing device and the liquid washing device.

[0012] The present invention is further configured such that: the fixing device further includes a second fixing component and a linkage component; after the rotating component drives the workpiece to rotate into position, the linkage component drives the second fixing component to fix the part of the workpiece not clamped by the first fixing component; when the second fixing component fixes the workpiece, the fixing drive source drives the movable seat away from the fixed seat by a certain distance, and then the upper rotating component separates from the workpiece.

[0013] By adopting the above technical solution, since the fixed surface of the workpiece is difficult to clean after being clamped by the upper and lower rotating parts, a second fixing component is required. After the rotating component drives the workpiece to rotate into position, the linkage component drives the second fixing component to fix the part of the workpiece that is not clamped by the first fixing component, so that both ends of the workpiece are fixed. At this time, the movable seat is moved away from the fixed seat and leaves the workpiece surface, so that the workpiece can be fixed and the previously inaccessible area can be exposed for cleaning, thereby improving the cleaning effect.

[0014] The invention is further configured such that: the second fixing component includes an upper elastic clamping member and a lower elastic clamping member; the linkage component includes an upper linkage plate, an upper linkage gear, a lower linkage plate, and a lower linkage gear, the upper linkage plate is connected to the upper elastic clamping member, and the lower linkage plate is connected to the lower elastic clamping member; the movable seat has a movable groove, the upper linkage plate is slidably positioned in the movable groove, the upper elastic clamping member abuts against the movable groove under its own elastic action, the upper linkage gear is disposed on the connecting shaft between the upper rotating member and the movable seat, the upper linkage plate has teeth that cooperate with the upper linkage gear, the upper rotating member rotates and drives the upper linkage plate to slide out of the movable groove through the upper linkage gear, so that the upper elastic clamping member... The upper elastic clamping member abuts against the upper surface of the workpiece after leaving the movable groove due to its own elasticity. The fixed seat has a fixed groove, and the lower linkage plate is slidably positioned in the fixed groove. The lower elastic clamping member abuts against the fixed groove due to its own elasticity. The lower linkage gear is disposed on the connecting shaft between the lower rotating member and the fixed seat. The lower linkage plate has teeth that cooperate with the lower linkage gear. The lower rotating member rotates and drives the lower linkage plate to slide out of the fixed groove through the lower linkage gear, so that the lower elastic clamping member leaves the fixed groove. After leaving the fixed groove, the lower elastic clamping member abuts against the lower surface of the workpiece due to its own elasticity, so that the upper elastic clamping member and the lower elastic clamping member clamp the workpiece.

[0015] By adopting the above technical solution and setting the linkage components, the second fixing component can clamp the workpiece without additional power, which has the effect of energy saving and environmental protection, and has higher synchronization. Furthermore, due to the setting of the upper and lower linkage plates and the upper and lower elastic clamping components, the movement process of the second fixing component includes two states: the state of emerging from the movable seat or the fixed seat, and the state of abutting against the surface of the workpiece through its own elasticity, which has the effect of optimizing space and preventing dust.

[0016] The present invention is further configured such that: the workpiece has a reference area, and during the process of the movable seat separating from the workpiece surface and the second fixing component fixing the workpiece, the fixing seat continuously abuts against and covers the reference area.

[0017] By adopting the above technical solution, the reference area on the workpiece is the area that has undergone ordinary cleaning treatment by the double-head machine tool. It serves as a reference area to compare with other areas of the workpiece after being cleaned by the cleaning mechanism, to judge the cleaning effect, and to facilitate comparison and data collection in order to adjust the working parameters of this cleaning structure.

[0018] The present invention is further configured such that: the elastic force of the lower elastic clamping member is greater than the elastic force of the upper elastic clamping member; when the movable seat separates from the workpiece surface and the second fixing component fixes the workpiece, the movable seat continues to move away from the workpiece by a certain distance, and the reference area of ​​the workpiece separates from the fixing seat under the elastic force of the lower elastic clamping member.

[0019] By adopting the above technical solution, when the movable seat separates from the workpiece surface and the second fixing component fixes the workpiece, the movable seat continues to move away from a certain distance. At this time, it is in the state after the comparison is completed, and the comparison area also needs to be cleaned. Since the elastic force of the lower elastic clamping component is greater than the elastic force of the upper elastic clamping component, the comparison area of ​​the workpiece is separated from the fixing seat under the elastic force of the lower elastic clamping component. Therefore, the comparison area is exposed and easy to clean.

[0020] The present invention is further configured such that: the upper rotating member includes a main support portion and side support portions located on both sides of the main support portion, the side support portions on both sides are inclined toward the middle of the main support portion, the surface of the workpiece abuts against the main support portion and is located between the two side support portions so that the workpiece and the upper rotating member remain relatively stationary during the rotation of the workpiece.

[0021] By adopting the above technical solution, the main support part plays a major supporting role, while the side support part plays a synchronous positioning role.

[0022] The beneficial effects of this invention are:

[0023] 1. The clamping mechanism clamps the workpiece, and then the machining mechanism processes the workpiece. When the debris on the workpiece is difficult to remove, the workpiece is removed and fixed by the first fixing component. After the first fixing component fixes one end of the workpiece, the end of the workpiece fixed by the first fixing component is located on the side of the air washing device, and the part of the workpiece fixed by the first fixing component is located on the side of the liquid washing device. The air washing device and the liquid washing device clean both ends of the workpiece respectively, and the workpiece can be rotated by the rotating component to change its direction so that both ends of the workpiece can be treated by the air washing device and the liquid washing device. This effectively removes debris from the surface of the workpiece, reduces residual debris during workpiece processing, improves processing quality, and further improves the quality of the finished product.

[0024] 2. Since the workpiece is clamped by the upper and lower rotating parts, the fixed surface is difficult to clean. Therefore, a second fixing component is required. After the rotating component drives the workpiece to rotate into place, the linkage component drives the second fixing component to fix the part of the workpiece that is not clamped by the first fixing component, so that both ends of the workpiece are fixed. At this time, the movable seat is moved away from the fixed seat and the movable seat leaves the workpiece surface, so that the workpiece can be fixed and the previously inaccessible area can be exposed for cleaning, thus improving the cleaning effect.

[0025] 3. The reference area on the workpiece is the area that has undergone ordinary cleaning treatment by the double-head machine tool. It serves as a reference area to compare with other areas of the workpiece after being cleaned by the cleaning mechanism, to judge the cleaning effect, and to facilitate comparison and data collection in order to adjust the working parameters of this cleaning structure.

[0026] 4. When the movable seat separates from the workpiece surface and the second fixing component fixes the workpiece, the movable seat continues to move away from the workpiece by a certain distance. At this time, the workpiece is in the state after the comparison is completed. The comparison area also needs to be cleaned. Since the elastic force of the lower elastic clamping component is greater than the elastic force of the upper elastic clamping component, the comparison area of ​​the workpiece is separated from the fixed seat under the elastic force of the lower elastic clamping component. Therefore, the comparison area is exposed and easy to clean. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0028] Figure 2 This is a schematic diagram of the cleaning structure according to an embodiment of this application.

[0029] Figure 3 yes Figure 2 Enlarged diagram of point A in the middle.

[0030] Figure 4 This is a side view of the upper rotating member and the lower rotating member according to an embodiment of this application.

[0031] Figure 5 This is a schematic diagram of the workpiece according to an embodiment of this application.

[0032] Figure 6 This is a schematic diagram showing the state in which the first fixing component and the second fixing component simultaneously fix the workpiece according to an embodiment of this application.

[0033] Figure 7 This is a schematic diagram showing the state in which the second fixing component of this application fixes the workpiece, and the movable seat is raised a certain distance so that the upper rotating component leaves the workpiece while the workpiece still abuts against the lower rotating component.

[0034] Figure 8 This is a schematic diagram of the state in which the second fixing component of this application fixes the workpiece, and the movable seat is raised a certain distance so that the upper rotating component and the lower rotating component leave the workpiece at the same time, that is, the state in which the comparison area is exposed.

[0035] In the diagram: 100, frame; 200, workpiece; 300, reference area; 10, fixture; 11, double cutter head; 20, liquid nozzle; 21, liquid pump; 22, liquid tank; 30, base; 31, fan; 40, fixed drive source; 41, fixed seat; 411, fixed groove; 42, movable seat; 421, movable groove; 50, rotation drive source; 51, upper rotating component; 511, main support; 512, side support; 52, lower rotating component; 61, upper elastic clamping component; 611, upper elastic part; 612, upper clamping part; 62, lower elastic clamping component; 621, lower elastic part; 622, lower clamping part; 70, upper linkage plate; 701, upper groove; 71, upper linkage gear; 72, lower linkage plate; 721, lower groove; 73, lower linkage gear. Detailed Implementation

[0036] To facilitate a clear understanding of the technical means, creative features, objectives, and effects of this invention, the invention will be further described below in conjunction with specific figures 1-8.

[0037] A dual-head machine tool for semiconductor material processing includes a frame 100, on which a clamping mechanism and a processing mechanism are provided. The clamping mechanism includes a clamping drive source (not shown in the figure) and a fixture 10. The processing mechanism includes a double cutter head 11 and a processing drive source (not shown in the figure). The clamping drive source drives the fixture 10 to clamp the workpiece 200, and the processing drive source drives the double cutter head 11 to process the workpiece 200. The double cutter head 11 processes the two surfaces of the workpiece 200 to be processed respectively.

[0038] The frame 100 also has a cleaning mechanism, which includes a liquid washing device, an air washing device, and a fixing device. The fixing device fixes the workpiece 200, and the liquid washing device and the air washing device clean the workpiece 200 whose surface is full of debris.

[0039] The liquid washing device is fixedly installed on the frame 100. The liquid washing device includes a liquid outlet nozzle 20, a liquid outlet pump 21, and a liquid outlet tank 22. The liquid outlet tank 22 contains cleaning liquid, which is discharged to the liquid outlet nozzle 20 via the liquid outlet pump 21. The liquid outlet nozzle 20 sprays the cleaning liquid onto one side of the workpiece 200, rinsing it. The air washing device is fixedly installed on the frame 100. The air washing device is positioned opposite the liquid washing device, located on both sides of the workpiece 200, corresponding to the two machined surfaces of the workpiece 200. The air washing device includes a base 30 and a fan 31. The base 30 is fixed to the frame 100, and the fan 31 is mounted on the base 30. The air outlet of the fan 31 faces the other machined surface of the workpiece 200, thereby blowing away debris.

[0040] The fixing device is fixedly installed on the frame 100 and located between the liquid washing device and the air washing device. The fixing device includes a first fixing component and a rotating component. When there is too much debris on the surface of the workpiece 200 and it is difficult to clean, the workpiece 200 is removed from the clamp 10. The first fixing component can fix one end of the workpiece 200 removed from the clamping mechanism. The fixed end of the workpiece 200 (i.e., the end clamped by the first fixing component) is located on the side of the air washing device, and the part of the workpiece 200 not clamped by the first fixing component is located on the side of the liquid washing device. At this time, the liquid washing device and the air washing device clean both ends of the workpiece 200 respectively, and both cover the two processed surfaces of the workpiece 200 at the same time. When the first fixing component fixes one end of the workpiece 200, the rotating component can drive the part of the workpiece 200 not clamped by the first fixing component to rotate to the side of the air washing device, so that the two ends of the workpiece 200 are switched. The entire workpiece 200 can be cleaned by the liquid washing device and the air washing device at the same time, and the cleaning effect is better.

[0041] The first fixing component includes a fixed drive source 40, a fixed seat 41, and a movable seat 42. The fixed seat 41 is fixed on the frame 100 and located below the movable seat 42. The fixed drive source 40 is a telescopic cylinder. The output end of the fixed drive source 40 (i.e., the piston rod of the telescopic cylinder) is connected to the movable seat 42. The fixed drive source 40 can drive the movable seat 42 to move closer to the fixed seat 41 to fix the workpiece 200. Specifically, the movable seat 42 moves vertically up and down. When it moves closer to the fixed seat 41, it fixes the workpiece 200. When it moves away from the movable seat 42, it releases the workpiece 200.

[0042] The rotating assembly includes a rotation drive source 50, an upper rotating component 51, and a lower rotating component 52. The upper rotating component 51 is rotatably connected to the movable seat 42, and the connecting shaft between the upper rotating component 51 and the movable seat 42 for driving rotation is vertically arranged. The lower rotating component 52 is rotatably connected to the fixed seat 41, and the connecting shaft between the lower rotating component 52 and the fixed seat 41 for driving rotation is vertically arranged. The rotation drive source 50 is a drive motor, and the output end of the rotation drive source 50 (i.e., the output shaft of the drive motor) is fixedly connected to the lower rotating component 52. When the movable seat 42 is close to the fixed seat 41 at a certain distance, the workpiece 200 is fixed between the upper rotating component 51 and the lower rotating component 52. The upper rotating component 51 and the lower rotating component 52 are components that directly clamp the workpiece 200. At this time, the upper rotating component 51, the workpiece 200, and the lower rotating component 52 are fixed as a whole. The rotation drive source 50 can drive the lower rotating component 52 to rotate synchronously with the workpiece 200 and the upper rotating component 51. Specifically, the rotation angle of the workpiece 200 is 180°.

[0043] The upper rotating member 51 includes a main support portion 511 and side support portions 512 located on both sides of the main support portion 511. The side support portions 512 are inclined towards the middle of the main support portion 511. The surface of the workpiece 200 abuts against the main support portion 511 and is located between the two side support portions 512 so that the workpiece 200 and the upper rotating member 51 remain relatively stationary during the rotation of the workpiece 200. The lower rotating member 52 and the upper rotating member 51 are mirror images of each other with the workpiece 200 as the mirror plane.

[0044] The fixing device also includes a second fixing component and a linkage component. During the rotation of the workpiece 200 by the rotating component, the second fixing component is driven to operate through the linkage component. After the workpiece 200 is rotated into position by the rotating component, the second fixing component is driven to fix the part of the workpiece 200 that is not clamped by the first fixing component through the linkage component. At this time, both ends of the workpiece 200 are fixed by the first fixing component and the second fixing component, respectively. When the second fixing component fixes the workpiece 200, the fixed drive source 40 drives the movable seat 42 away from the fixed seat 41 by a certain distance, and the upper rotating component 51 separates from the workpiece 200. At this time, the second fixing component can still fix the end of the workpiece 200 away from the first fixing component, while the other end of the workpiece 200 is released by the upper rotating component 51 with a gap, exposing one of the clamped areas of the workpiece 200. At this time, the liquid washing device or the air washing device can clean the exposed part of the workpiece 200.

[0045] The second fixing component includes an upper elastic clamping member 61 and a lower elastic clamping member 62; the upper elastic clamping member 61 and the lower elastic clamping member 62 directly clamp the two opposite sides of the workpiece 200 to form a fixation; the linkage component includes an upper linkage plate 70, an upper linkage gear 71, a lower linkage plate 72 and a lower linkage gear 73, the upper linkage plate 70 and the upper linkage gear 71 cooperate to drive the upper elastic clamping member 61 to run, and the lower linkage plate 72 and the lower linkage gear 73 cooperate to drive the lower elastic clamping member 62 to run.

[0046] The movable seat 42 has a movable groove 421, and the upper linkage plate 70 is slidably positioned in the movable groove 421. The upper linkage plate 70 is connected to the upper elastic clamping member 61. The upper linkage plate 70 has an upper groove 701 for accommodating the upper elastic clamping member 61. Specifically, the upper elastic clamping member 61 includes an upper clamping part 612 and an upper elastic part 611. The upper clamping part 612 is a clamping plate, and the upper elastic part 611 is a spring. The two ends of the upper elastic part 611 are respectively connected to the upper linkage plate 70 (the groove wall of the upper groove 701) and the upper clamping part 612. Under its own elastic action, the upper elastic clamping member 61 abuts against the inner wall of the movable groove 421 and is simultaneously located in the upper groove 701. The upper linkage gear 71 is mounted on the connecting shaft between the upper rotating member 51 and the movable seat 42. The upper linkage gear 71 is located within the movable groove 421. The upper linkage plate 70 has teeth that mesh with the upper linkage gear 71. The upper rotating member 51 rotates and, through the upper linkage gear 71, drives the upper linkage plate 70 to slide outward from the movable groove 421, or to slide inward from the movable groove 421, causing the upper elastic clamping member 61 to leave or enter the movable groove 421. After leaving the movable groove 421, the upper elastic clamping member 61 leaves the upper groove 701 under its own elasticity and moves downward to abut against the upper surface of the workpiece 200. When it is necessary to retract the upper elastic clamping member 61, simply retract the upper elastic part 611 and push the upper clamping part 612 into the upper groove 701 and into the movable groove 421.

[0047] The fixed base 41 has a fixed groove 411, and the lower linkage plate 72 is slidably positioned in the fixed groove 411. The lower linkage plate 72 is connected to the lower elastic clamping member 62. The lower linkage plate 72 has a lower groove 721 for accommodating the lower elastic clamping member 62. Specifically, the lower elastic clamping member 62 includes a lower clamping part 622 and a lower elastic part 621. The lower clamping part 622 is a clamping plate, and the lower elastic part 621 is a spring. The two ends of the lower elastic part 621 are respectively connected to the lower linkage plate 72 (the groove wall of the lower groove 721) and the upper and lower clamping parts 622. The lower elastic clamping member 62 abuts against the inner wall of the fixed groove 411 under its own elastic action and is simultaneously located in the lower groove 721. The lower linkage gear 73 is mounted on the connecting shaft between the lower rotating member 52 and the fixed base 41. The lower linkage gear 73 is located in the fixed groove 411. The lower linkage plate 72 has teeth that mesh with the lower linkage gear 73. The lower rotating member 52 rotates and drives the lower linkage plate 72 to slide out of the fixed groove 411 or inward through the lower linkage gear 73, causing the lower elastic clamping member 62 to leave or enter the fixed groove 411. After leaving the fixed groove 411, the lower clamping part 622 leaves the lower groove 721 under the action of the lower elastic member and moves downward to abut against the lower surface of the workpiece 200. At this time, the upper and lower surfaces of the workpiece 200 are abutted by the lower clamping part 622 and the upper clamping part 612 respectively to form a fixed connection. When it is necessary to retract the lower elastic clamping member 62, simply retract the lower elastic part 621 and push the lower clamping part 622 into the lower groove 721 and into the fixed groove 411.

[0048] And when the second fixing component fixes the workpiece 200, refer to the attached document. Figure 7 After the fixed drive source 40 drives the movable seat 42 away from the fixed seat 41 by a certain distance, the upper rotating part 51 separates from the workpiece 200. At this time, the elastic force generated by the upper elastic clamping part 61 is greater than the reaction force from the lower elastic clamping part 62, and the workpiece 200 is still abutted against the lower rotating part 52.

[0049] Reference Figure 5 The workpiece 200 has a reference area 300. The reference area 300 is a region on the surface of the workpiece 200 that has been cleaned by the ordinary cleaning mechanism on the machine tool when there is a large amount of debris adhering to the surface of the workpiece 200. When the upper rotating member 51 and the lower rotating member 52 fix the workpiece 200, the reference area 300 is covered by the lower rotating member 52. Simultaneously, during the process of the movable seat 42 separating from the surface of the workpiece 200 and the second fixing component fixing the workpiece 200, the fixing seat 41 continuously abuts against and covers the reference area 300, preventing the liquid washing device and the air washing device from cleaning this area. After the liquid washing device and the air washing device have cleaned other areas of the workpiece 200 surface, the elastic force of the lower elastic clamping member 62 is greater than the elastic force of the upper elastic clamping member 61. When the movable seat 42 separates from the surface of the workpiece 200 and the second fixing component still fixes the workpiece 200, specifically, refer to the appendix... Figure 8 When the upper rotating part 51 separates from the surface of the workpiece 200, the movable seat 42 continues to move away from the fixed seat 41 by a certain distance, that is, the movable seat 42 continues to move upward a certain distance. The elastic force of the lower elastic clamping part 62 overcomes the gravity of the workpiece 200 and the gravity and elastic force of the upper elastic clamping part 61. Under the elastic force of the lower elastic clamping part 62, the reference area 300 of the workpiece 200 lifts the workpiece 200, and the workpiece 200 separates from the fixed seat 41. Specifically, the workpiece 200 separates from the lower rotating part 52. At this time, it is possible to observe and judge the cleanliness of the reference area 300 and other areas of the surface of the workpiece 200, so as to adjust the cleaning structure parameters.

[0050] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention, all of which fall within the scope of protection claimed by the present invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dual-head machine tool for semiconductor material processing, comprising a frame (100), wherein the frame (100) has a clamping mechanism and a processing mechanism, characterized in that: The frame (100) also has a cleaning mechanism, the cleaning mechanism including; A liquid washing device is mounted on the frame (100); An air washing device is mounted on the frame (100), and the air washing device is arranged opposite to the liquid washing device; A fixing device is provided on the frame (100). The fixing device includes a first fixing component and a rotating component. The first fixing component can fix one end of the workpiece (200) removed from the clamping mechanism. The fixed end of the workpiece (200) is located on one side of the air washing device, and the part of the workpiece (200) not clamped by the first fixing component is located on one side of the liquid washing device. When the first fixing component fixes one end of the workpiece (200), the rotating component can drive the part of the workpiece (200) not clamped by the first fixing component to rotate to the side of the air washing device. The first fixing component includes a fixed drive source (40), a fixed seat (41), and a movable seat (42). The fixed seat (41) is fixed on the frame (100). The output end of the fixed drive source (40) is connected to the movable seat (42). The fixed drive source (40) can drive the movable seat (42) to move closer to the fixed seat (41) to fix the workpiece (200). The rotating assembly includes a rotation drive source (50), an upper rotating component (51), and a lower rotating component (52). The upper rotating component (51) is rotatably connected to the movable seat (42), and the lower rotating component (52) is rotatably connected to the fixed seat (41). The output end of the rotation drive source (50) is connected to the lower rotating component (52). When the movable seat (42) is close to the fixed seat (41) by a certain distance, the workpiece (200) is fixed between the upper rotating component (51) and the lower rotating component (52). At this time, the rotation drive source (50) can drive the lower rotating component (52) to rotate so that it rotates synchronously with the workpiece (200) and the upper rotating component (51). The fixing device also includes a second fixing component and a linkage component. After the rotating component drives the workpiece (200) to rotate into position, the linkage component drives the second fixing component to fix the part of the workpiece (200) that is not clamped by the first fixing component. When the second fixing component fixes the workpiece (200), the fixing drive source (40) drives the movable seat (42) to move away from the fixed seat (41) by a certain distance, and then the upper rotating component (51) separates from the workpiece (200). The second fixing component includes an upper elastic clamp (61) and a lower elastic clamp (62); The linkage assembly includes an upper linkage plate (70), an upper linkage gear (71), a lower linkage plate (72), and a lower linkage gear (73). The upper linkage plate (70) is connected to the upper elastic clamping member (61), and the lower linkage plate (72) is connected to the lower elastic clamping member (62). The movable seat (42) has a movable groove (421). The upper linkage plate (70) is slidably positioned in the movable groove (421). The upper elastic clamping member (61) abuts against the movable groove (421) under its own elastic action. The upper linkage gear (71) is set on the connecting shaft between the upper rotating member (51) and the movable seat (42). The upper linkage plate (70) has teeth that cooperate with the upper linkage gear (71). The upper rotating member (51) rotates and drives the upper linkage plate (70) to slide out of the movable groove (421) through the upper linkage gear (71), so that the upper elastic clamping member (61) leaves the movable groove (421). After the upper elastic clamping member (61) leaves the movable groove (421), it abuts against the upper surface of the workpiece (200) under its own elastic action. The fixed base (41) has a fixed groove (411). The lower linkage plate (72) is slidably positioned in the fixed groove (411). The lower elastic clamping member (62) abuts against the fixed groove (411) under its own elastic action. The lower linkage gear (73) is set on the connecting shaft between the lower rotating member (52) and the fixed base (41). The lower linkage plate (72) has teeth that cooperate with the lower linkage gear (73). The lower rotating member (52) rotates and drives the lower linkage plate (72) to slide out of the fixed groove (411) through the lower linkage gear (73), so that the lower elastic clamping member (62) leaves the fixed groove (411). After the lower elastic clamping member (62) leaves the fixed groove (411), it abuts against the lower surface of the workpiece (200) under its own elastic action, so that the upper elastic clamping member (61) and the lower elastic clamping member (62) clamp the workpiece (200).

2. The dual-head machine tool for semiconductor material processing according to claim 1, characterized in that: The workpiece (200) has a reference area (300). During the process of the movable seat (42) separating from the surface of the workpiece (200) and the second fixing component fixing the workpiece (200), the fixing seat (41) continuously abuts against and covers the reference area (300).

3. The double-head machine tool for semiconductor material processing according to claim 2, characterized in that: The elastic force of the lower elastic clamping member (62) is greater than that of the upper elastic clamping member (61). When the movable seat (42) separates from the surface of the workpiece (200) and the second fixing component fixes the workpiece (200), the movable seat (42) continues to move away from the workpiece (200) by a certain distance, and the reference area (300) of the workpiece (200) separates from the fixing seat (41) under the elastic force of the lower elastic clamping member (62).

4. The dual-head machine tool for semiconductor material processing according to claim 1, characterized in that: The upper rotating member (51) includes a main support part (511) and side support parts (512) located on both sides of the main support part (511). The side support parts (512) on both sides are inclined towards the middle of the main support part (511). The surface of the workpiece (200) abuts against the main support part (511) and is located between the two side support parts (512) so that the workpiece (200) and the upper rotating member (51) remain relatively stationary during the rotation of the workpiece (200).

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