Developing apparatus and developing method

Abstract

The application relates to the technical field of display, and discloses a developing device and a developing method. The developing liquid in a first liquid storage tank of a display device is supplied to a first developing tank, a second developing tank and a third developing tank, the developing liquid in a second liquid storage tank is supplied to a fourth developing tank, part of the developing liquid in the first developing tank is directly drained through a first direct drainage pipeline, and the other part is returned to the first liquid storage tank; the developing liquid in the second developing tank and the third developing tank is all returned to the first liquid storage tank; the same amount of developing liquid as that directly drained from the first developing tank is returned to the first liquid storage tank, and the other part is returned to the second liquid storage tank; the third liquid storage tank supplements the developing liquid to the second liquid storage tank; and the fourth liquid storage tank and a pure water supply pipeline supplement and adjust the high-concentration developing liquid stock solution or water according to the concentration, so that it is unnecessary to frequently switch the liquid storage tank, the utilization rate of the developing liquid is improved, the consistency of the developing liquid is ensured, and the uniformity of the same batch of products is improved.

Description

Technical Field

[0001] This invention relates to the field of display technology, and more particularly to a developing apparatus and developing method. Background Technology

[0002] In the display panel manufacturing process, development is a crucial step. Development primarily involves completely dissolving the unexposed photoresist in the developing solution, leaving only the areas exposed by the exposure machine. Currently, the main development method involves pumping the developing solution from a reservoir onto the product surface, where it reacts, and then flowing back into the reservoir. For example, multiple developing tanks are used, with two reservoirs below each (one for use and one as a backup, designated as the first and second reservoirs). During production, the developing solution from the first reservoir is supplied to all developing tanks, sprayed onto the product surface, and then flows back into the first reservoir. During this process, the developing solution is gradually consumed, causing a decrease in the concentration and cleanliness of the developing solution in the first reservoir, thus affecting the process results.

[0003] Currently, the common approach to addressing the issue of gradually decreasing developer concentration and cleanliness involves monitoring the developer conductivity or, after a certain period, switching from the first to the second storage tank, while simultaneously draining the developer from the first tank and adding fresh developer, leaving it in standby mode. However, frequent switching between the first and second storage tanks leads to low developer utilization efficiency. Furthermore, the first and last films from the same batch within the same storage tank exhibit inconsistent development efficiency and poor uniformity due to the different developer concentrations used. Therefore, a new design is urgently needed to improve these issues. Summary of the Invention

[0004] The purpose of this invention is to provide a developing apparatus and developing method to solve the technical problems of frequent switching of storage tanks, low efficiency of developer use, inconsistent developing concentration and efficiency of the same batch of products corresponding to the same storage tank, and poor uniformity.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] The developing apparatus includes a first developing tank, a second developing tank, a third developing tank, and a fourth developing tank arranged sequentially and connected to each other. The first developing tank is connected to a first straight pipeline.

[0007] The developing apparatus further includes:

[0008] A first storage tank is connected to the first developing tank, the second developing tank, and the third developing tank. The first storage tank is configured to supply developing solution to the first developing tank, the second developing tank, and the third developing tank. A portion of the developing solution in the first developing tank flows back to the first storage tank, and the other portion is discharged through the first straight drain pipe. The developing solution in the second developing tank and the third developing tank flows back to the first storage tank.

[0009] The second storage tank is connected to the fourth developing tank. The second storage tank is configured to supply developing solution to the fourth developing tank. A portion of the developing solution in the fourth developing tank flows back to the second storage tank, and another portion flows back to the first storage tank. The flow rate of the developing solution flowing back to the first storage tank is the same as the flow rate of the developing tank discharged through the first straight drain pipe.

[0010] A third storage tank, connected to the second storage tank, is configured as a buffer tank to supply developing solution to the second storage tank; and

[0011] The fourth storage tank and the pure water supply pipeline are connected to the first storage tank, the second storage tank and the third storage tank. The fourth storage tank is configured as a high-concentration storage tank to cooperate with the pure water supply pipeline to adjust the developer concentration of the first storage tank, the second storage tank and the third storage tank.

[0012] As a preferred embodiment of the developing apparatus, a conductivity meter is provided in each of the first, second, third, and fourth liquid storage tanks, and each conductivity meter is electrically connected to a corresponding pump in the first, second, third, and fourth liquid storage tanks.

[0013] As a preferred embodiment of the developing apparatus, a liquid level sensor is provided in the second storage tank. The liquid level sensor is electrically connected to the pump of the third storage tank. When the liquid level of the developing solution in the second storage tank is lower than a preset value, the pump of the third storage tank is activated to supply developing solution to the second storage tank.

[0014] As a preferred embodiment of the developing apparatus, at least two sets of bipolar filters are provided on the developing solution supply pipeline of the first storage tank, and the two sets of bipolar filters are switchably connected to the developing solution supply pipeline of the first storage tank.

[0015] At least one set of bipolar filters is provided on the developer supply pipeline of the second storage tank.

[0016] As a preferred embodiment of the developing apparatus, the bipolar filter includes:

[0017] The first-stage filter is configured to filter out photoresist mixed in the developer; and

[0018] A second-stage filter is connected in series with the first-stage filter and is configured to filter out fine particles or impurities in the developer.

[0019] As a preferred embodiment of the developing apparatus, the length of the first developing tank is greater than the length of the fourth developing tank, and the lengths of the second developing tank and the third developing tank are equal to or less than the length of the first developing tank and greater than the length of the fourth developing tank.

[0020] As a preferred embodiment of the developing apparatus, both the first developing tank and the fourth developing tank include an isolation zone and a developing zone. The isolation zone of the first developing tank is the inlet end of the product, and the isolation zone of the fourth developing tank is the outlet end of the product. Both the second developing tank and the third developing tank include the developing zone.

[0021] An air curtain is provided in the isolation zone, with the air curtains located at the inlet and outlet respectively, and the air curtains are configured to isolate the developing solution;

[0022] The developing zone is equipped with a developing nozzle and a washing tank nozzle. The developing nozzle extends along the product transport direction and is equipped with several nozzles that are perpendicular to the transport direction. The washing tank nozzle is connected to the pure water supply pipeline.

[0023] As a preferred embodiment of the developing apparatus, the developing nozzle is equipped with a oscillating motor, which is configured to drive the developing nozzle to oscillate back and forth in a direction perpendicular to the transmission direction.

[0024] As a preferred embodiment of the developing apparatus, a movable baffle located on the bottom plate of the tank is further provided in the developing interval of the first developing tank and the fourth developing tank. The movable baffle is configured to divide the tank into a direct discharge zone and a recirculation zone to control the direct discharge volume and the recirculation volume.

[0025] A developing method, applied to the developing apparatus described above, includes the following steps:

[0026] The developer in the first storage tank is supplied to the first developing tank, the second developing tank and the third developing tank, and the developer in the second storage tank is supplied to the fourth developing tank;

[0027] After the developer is sprayed onto the product surface, part of the developer in the first developing tank is directly discharged through the first direct discharge pipe, and the other part flows back to the first storage tank. All the developer in the second developing tank flows back to the first storage tank. All the developer in the third developing tank flows back to the first storage tank. The same amount of developer in the fourth developing tank as that directly discharged from the first developing tank flows back to the first storage tank, and the other part flows back to the second storage tank.

[0028] The third storage tank replenishes the developing solution to the second storage tank;

[0029] The fourth storage tank and the pure water supply pipeline are replenished and adjusted using high-concentration developer stock solution or water according to the concentration of the first, second, and third storage tanks.

[0030] The beneficial effects of this invention are:

[0031] The present invention provides a developing apparatus in which developing solution is supplied from a first storage tank to a first developing tank, a second developing tank, and a third developing tank; a second storage tank supplies developing solution to a fourth developing tank; a portion of the developing solution in the first developing tank is directly discharged through a first direct discharge pipe, and the other portion flows back to the first storage tank; all the developing solution in the second and third developing tanks flows back to the first storage tank; and the amount of developing solution in the fourth developing tank that is equal to the amount directly discharged from the first developing tank flows back to the first storage tank to maintain the volume balance of the developing solution in the first storage tank. The other portion flows back to the second storage tank, so the developing solution in the second storage tank is in a state of gradual decrease. When it drops to a preset level, the developing solution in the third storage tank is supplied to the second storage tank by a pump to replenish it. Compared to switching back and forth between two sets of storage tanks and directly discharging the used developer, this invention divides the developing tank into four sections according to the product's transport sequence. The product sequentially enters the first, second, third, and fourth developing tanks. The developer in the second and third developing tanks, where the concentration doesn't change significantly, is directly returned to the first storage tank for reuse. A portion of the developer in the first developing tank, where the concentration changes, is directly discharged, while the remainder is returned to the first storage tank. The developer in the fourth developing tank, where the concentration changes minimally, replenishes the first storage tank, making up for the developer discharged directly from the first developing tank. Furthermore, the fourth developing tank is consistently supplied and replenished by the second storage tank, ensuring a consistent developer concentration and providing compensatory development. This significantly improves developer utilization efficiency, saves resources, and reduces costs. In addition, the high-concentration developer in the fourth storage tank and the pure water in the pure water supply pipeline are supplied to the first, second, and third storage tanks as needed to adjust the concentration of the developer, so as to ensure that the developer concentration of the first and last films of the same batch of products is consistent, thereby improving the consistency and uniformity of development and resulting in better finished product quality.

[0032] The present invention provides a developing method that improves the efficiency of developer use, saves resources, reduces costs, ensures that the developer concentration of the first and last films in the same batch of products is consistent, improves the consistency and uniformity of development, and results in better finished product quality. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the developing apparatus provided in an embodiment of the present invention;

[0034] Figure 2 This is a schematic diagram of the structure of the first developing tank provided in an embodiment of the present invention.

[0035] In the picture:

[0036] 1. First developing tank; 11. First straight-line pipeline; 12. Two-stage filter; 121. First-stage filter; 122. Second-stage filter; 2. Second developing tank; 3. Third developing tank; 4. Fourth developing tank; 5. First storage tank; 6. Second storage tank; 7. Third storage tank; 8. Fourth storage tank; 9. Pure water supply pipeline; 10. Isolation zone; 101. Air curtain; 15. Developing zone; 151. Developing nozzle; 152. Washing tank nozzle; 13. Conductivity meter; 14. Liquid level sensor. Detailed Implementation

[0037] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0038] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0041] Currently, a common approach to addressing the issue of gradually decreasing developer concentration and cleanliness is to monitor the developer conductivity or, after a certain period, switch from the first to the second storage tank, simultaneously draining the developer from the first tank and adding new developer, leaving it in standby mode. However, frequent switching between the first and second storage tanks leads to lower developer utilization efficiency. Furthermore, the first and last films from the same batch within the same storage tank may exhibit inconsistent development efficiency and poor uniformity due to the different developer concentrations used.

[0042] To solve the above problems, combined with Figure 1 and Figure 2 As shown, this embodiment provides a developing apparatus, which includes a first developing tank 1, a second developing tank 2, a third developing tank 3, and a fourth developing tank 4 arranged sequentially along the product transport direction. The length of the first developing tank 1 is greater than the length of the fourth developing tank 4, and the lengths of the second developing tank 2 and the third developing tank 3 are equal to or less than the length of the first developing tank 1 and greater than the length of the fourth developing tank 4. The first developing tank 1 is connected to the second developing tank 2, the second developing tank 2 is connected to the third developing tank 3, and the third developing tank 3 is connected to the fourth developing tank 4. The first developing tank 1 is connected to a first straight-line pipeline 11. The developing apparatus also includes a first storage tank 5, a second storage tank 6, a third storage tank 7, a fourth storage tank 8, and a pure water supply pipeline 9.

[0043] Specifically, the first storage tank 5 is connected to the first developing tank 1, the second developing tank 2, and the third developing tank 3, and is used to supply developing solution to the first developing tank 1, the second developing tank 2, and the third developing tank 3. The second storage tank 6 is connected to the fourth developing tank 4, and is used to supply developing solution to the fourth developing tank 4. When the developing solution is sprayed onto the product surface, according to the product's transport, the concentration change of the developing solution in the first developing tank 1 gradually decreases compared to the concentration change of the developing solution in the fourth developing tank 4. A portion of the developing solution in the first developing tank 1, where the concentration change is significant, is returned to the first storage tank 5, and the other portion is discharged through the first direct drain pipe 11. The developing solution in the second developing tank 2 and the third developing tank 3, where the concentration change is not significant, is returned to the first storage tank 5. The developing solution in the fourth developing tank 4, where the concentration change is very small, is also returned to the first storage tank 5. A portion of the developer flows back into the second storage tank 6, and another portion flows back into the first storage tank 5. The flow rate back into the first storage tank 5 is the same as the flow rate discharged from the first developing tank 1 through the first direct drain pipe 11, in order to maintain the volume balance of the developer in the first storage tank 5. The third storage tank 7 is connected to the second storage tank 6 and is configured as a buffer tank to supply developer to the second storage tank 6. Since part of the developer in the fourth developing tank 4 is used to replenish the first storage tank 5, when the developer in the fourth developing tank 4 flows back into the second storage tank 6, causing the developer in the second storage tank 6 to drop to the preset level, the developer in the third storage tank 7 is pumped to replenish the second storage tank 6, ensuring the concentration of the developer in the fourth developing tank 4. This can play a role in compensating for the development, thereby greatly improving the efficiency of developer use, saving resources, and reducing costs.

[0044] Furthermore, the fourth storage tank 8 and the pure water supply line 9 are connected to the first storage tank 5, the second storage tank 6, and the third storage tank 7. The fourth storage tank 8 serves as a high-concentration storage tank to coordinate with the pure water supply line 9 in adjusting the developer concentration in the first storage tank 5, the second storage tank 6, and the third storage tank 7. By supplying the high-concentration developer in the fourth storage tank 8 and the pure water from the pure water supply line 9 to the first storage tank 5, the second storage tank 6, and the third storage tank 7 as needed, the developer concentration can be adjusted to ensure that the developer concentration of the first and last films in the same batch of products remains consistent, improving the consistency and uniformity of development and resulting in better finished product quality.

[0045] Among them, such as Figure 1As shown, a liquid level sensor 14 is installed in the second liquid storage tank 6. The liquid level sensor 14 is electrically connected to the pump of the third liquid storage tank 7. When the liquid level of the developer in the second liquid storage tank 6 is lower than the preset value, the pump of the third liquid storage tank 7 is started to supply the developer to the second liquid storage tank 6, ensuring that the developer in the second liquid storage tank 6 is always in a sufficient state, so that the second liquid storage tank 6 can supply the developer to the fourth developing tank 4 in a timely manner, which has good timeliness and high degree of automation.

[0046] Preferably, each of the first storage tank 5, the second storage tank 6, the third storage tank 7, and the fourth storage tank 8 is equipped with a conductivity meter 13, and each conductivity meter 13 is electrically connected to a corresponding pump in the first storage tank 5, the second storage tank 6, the third storage tank 7, and the fourth storage tank 8. The conductivity meters 13 monitor the developer concentration in each storage tank in real time. When the conductivity deviates, high-concentration developer stock solution or pure water can be extracted from the fourth storage tank 8 or the pure water supply pipeline 9 to correct the deviation, further improving the consistency of the developer concentration in each storage tank.

[0047] In this embodiment, in order to ensure that the developer returned to the first storage tank 5 and the second storage tank 6 can meet the requirements for reuse, such as... Figure 1 As shown, at least two sets of bipolar filters 12 are installed on the developer supply pipeline of the first storage tank 5. The two sets of bipolar filters 12 are switchably connected to the developer supply pipeline of the first storage tank 5. At least one set of bipolar filters 12 is installed on the developer supply pipeline of the second storage tank 6. Specifically, the bipolar filter 12 includes a first-stage filter 121 and a second-stage filter 122. The second-stage filter 122 is connected in series with the first-stage filter 121. The first-stage filter 121 has a higher filtration accuracy, while the second-stage filter 122 has a lower filtration accuracy. The developer first passes through the first-stage filter 121 to filter out the photoresist mixed in the developer, and then passes through the second-stage filter 122 to filter out fine particles or impurities in the developer. For example, if multiple sets of bipolar filters 12 are installed on the same pipeline, when the pressure difference between the pressure gauges before and after one set of bipolar filters 12 exceeds a set value, the other set of bipolar filters 12 is automatically switched for use. Of course, the number of bipolar filter groups 12 can be set according to the specific situation. In this embodiment, the number is not specifically limited. It can be one group, two groups, three groups or even more groups.

[0048] Specifically, such as Figure 1 and Figure 2As shown, both the first developing tank 1 and the fourth developing tank 4 include an isolation zone 10 and a developing zone 15. The isolation zone 10 of the first developing tank 1 is the product inlet, and the isolation zone 10 of the fourth developing tank 4 is the product outlet. In order to isolate the developer or the developer gas in the developing tank and avoid affecting the preceding or subsequent processes, an air curtain 101 is provided in the isolation zone 10. The air curtain 101 includes an upper air curtain and a lower air curtain arranged vertically. The product enters the isolation zone 10 of the first developing tank 1 or exits the isolation zone 10 of the fourth developing tank 4 through the gap between the upper and lower air curtains.

[0049] Among them, such as Figure 2 As shown, the developing zone 15 is equipped with developing nozzles 151 and washing tank nozzles 152. Each developing tank's developing nozzle 151 is connected to a corresponding developing solution supply line. Two sets of developing nozzles 151 are arranged vertically, with their axial direction extending along the product transport direction. Each developing nozzle 151 has several nozzles perpendicular to the transport direction, all spraying developing solution towards the product to evenly coat its surface. To ensure the nozzles can align with different product specifications and to make the spraying process more uniform, a oscillating motor (not shown) is installed on the developing nozzle 151. This oscillating motor is configured to drive the developing nozzle 151 to reciprocate in a direction perpendicular to the transport direction.

[0050] Furthermore, the washing nozzle 152 is connected to the pure water supply pipeline 9. The washing nozzle 152 sprays water to clean the inside of the developing tank, cleaning and removing residual developing solution inside the tank / walls / corners. A manual ball valve and an automatic ball valve are installed at the supply end of the pure water supply pipeline 9 connected to the washing nozzle 152 for control. When no product passes through and the developing solution has flowed back to each storage tank, the washing nozzle 152 automatically opens, and the cleaned liquid can be discharged directly through the washing direct discharge pipeline connected to each developing tank.

[0051] Furthermore, a movable baffle located on the bottom plate of the tank is provided within the developing zone 15 of the first developing tank 1 and the fourth developing tank 4. Driven by the driving mechanism, the movable baffle moves linearly in either the forward or reverse direction along the product transport direction. The movable baffle divides the tank into a direct discharge zone and a recirculation zone. By adjusting the movement of the movable baffle, the size of the direct discharge zone and the recirculation zone can be adjusted to control the direct discharge and recirculation rates of the first developing tank 1, as well as the recirculation rates from the fourth developing tank 4 to the first storage tank 5 and to the second storage tank 6. Thus, the flow rate can be adjusted by changing the position of the movable baffle. The structure is simple and the operation is convenient. For example, the driving mechanism can be a linear motor or a worm gear mechanism, etc.

[0052] Furthermore, this embodiment also provides a developing method, which is applied to the developing apparatus described above, and specifically includes the following steps:

[0053] S1: The developer in the first storage tank 5 is supplied to the first developing tank 1, the second developing tank 2 and the third developing tank 3, and the developer in the second storage tank 6 is supplied to the fourth developing tank 4.

[0054] Most of the photoresist has already been developed in the first developing tank 1, the second developing tank 2, and the third developing tank 3. When it passes through the fourth developing tank 4, it is compensated by the new developer supplied to the fourth developing tank 4 by the second storage tank 6, which can ensure better consistency of the development effect between the first and last films of the same batch.

[0055] S2: After the developer is sprayed onto the product surface, part of the developer in the first developing tank 1 is directly discharged through the first direct drain pipe 11, and the other part flows back to the first storage tank 5. All the developer in the second developing tank 2 flows back to the first storage tank 5. All the developer in the third developing tank 3 flows back to the first storage tank 5. The same amount of developer in the fourth developing tank 4 as that directly discharged from the first developing tank 1 flows back to the first storage tank 5, and the other part flows back to the second storage tank 6.

[0056] S3: The third storage tank 7 replenishes the developing solution to the second storage tank 6.

[0057] The developer solution at the front-middle position of the first developing tank 1 is directly discharged after processing, reducing the impact on the concentration of the developer solution in the first storage tank 5. The developer solution lost by direct discharge is compensated by the return flow of the fourth developing tank 4, and the developer solution lost in the second storage tank 6 is compensated by the third storage tank 7. In this way, only a small portion of the developer solution is discharged, and most of the developer solution is reused after being filtered by the bipolar filter 12, which improves the efficiency of developer solution use, saves resources, and reduces costs.

[0058] S4: The fourth storage tank 8 and the pure water supply pipeline 9 are replenished and adjusted using high-concentration developer stock solution or water according to the concentration of the first storage tank 5, the second storage tank 6 and the third storage tank 7.

[0059] During the process, the concentration of the first storage tank 5, the second storage tank 6, and the third storage tank 7 is monitored in real time by a conductivity meter 13. In case of abnormality, the concentration is adjusted by the high-concentration developer stock solution in the fourth storage tank 8 or the water in the pure water supply pipeline 9. This further ensures that the developer concentration of the first and last films of the same batch of products is consistent, improving the consistency and uniformity of development and resulting in better finished product quality.

[0060] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A developing apparatus, characterized in that, It includes a first developing tank (1), a second developing tank (2), a third developing tank (3) and a fourth developing tank (4) arranged in sequence and connected to each other. The first developing tank (1) is connected to a first straight pipeline (11). The developing apparatus further includes: The first storage tank (5) is connected to the first developing tank (1), the second developing tank (2) and the third developing tank (3). The first storage tank (5) is configured to supply developing solution to the first developing tank (1), the second developing tank (2) and the third developing tank (3). Part of the developing solution in the first developing tank (1) flows back to the first storage tank (5), and the other part is discharged through the first straight drain pipe (11). The developing solution in the second developing tank (2) and the third developing tank (3) flows back to the first storage tank (5). The second storage tank (6) is connected to the fourth developing tank (4). The second storage tank (6) is configured to supply developing solution to the fourth developing tank (4). A portion of the developing solution in the fourth developing tank (4) flows back to the second storage tank (6), and another portion flows back to the first storage tank (5). The flow rate flowing back to the first storage tank (5) is the same as the flow rate discharged from the first developing tank (1) through the first direct discharge pipe (11). A third storage tank (7) is connected to the second storage tank (6), and the third storage tank (7) is configured as a buffer tank to supply developing solution to the second storage tank (6); and The fourth storage tank (8) and the pure water supply pipeline (9) are connected to the first storage tank (5), the second storage tank (6) and the third storage tank (7). The fourth storage tank (8) is configured as a high-concentration storage tank to cooperate with the pure water supply pipeline (9) to adjust the developer concentration of the first storage tank (5), the second storage tank (6) and the third storage tank (7). The first developing tank (1) and the fourth developing tank (4) both include an isolation zone (10) and a developing zone (15). The isolation zone (10) of the first developing tank (1) is the inlet end of the product, and the isolation zone (10) of the fourth developing tank (4) is the outlet end of the product. The second developing tank (2) and the third developing tank (3) both include the developing zone (15). An air curtain (101) is provided in the isolation zone (10), and the air curtain (101) is respectively located at the inlet and outlet. The air curtain (101) is configured to isolate the developing solution. The developing zone (15) is provided with a developing nozzle (151) and a washing tank nozzle (152). The developing nozzle (151) extends along the product transport direction. The developing nozzle (151) is provided with a number of nozzles arranged perpendicular to the transport direction. The washing tank nozzle (152) is connected to the pure water supply pipeline (9). The first developing tank (1) and the fourth developing tank (4) are further provided with a movable baffle located on the bottom plate of the tank body in the developing interval (15). The movable baffle is configured to divide the tank body into a direct discharge area and a recirculation area to control the direct discharge volume and the recirculation volume.

2. The developing apparatus according to claim 1, characterized in that, Conductivity meters (13) are provided in the first liquid storage tank (5), the second liquid storage tank (6), the third liquid storage tank (7) and the fourth liquid storage tank (8), and each conductivity meter (13) is electrically connected to a pump corresponding to the first liquid storage tank (5), the second liquid storage tank (6), the third liquid storage tank (7) and the fourth liquid storage tank (8).

3. The developing apparatus according to claim 1, characterized in that, A liquid level sensor (14) is installed in the second liquid storage tank (6). The liquid level sensor (14) is electrically connected to the pump of the third liquid storage tank (7). When the liquid level of the developer in the second liquid storage tank (6) is lower than the preset value, the pump of the third liquid storage tank (7) is started to supply the developer to the second liquid storage tank (6).

4. The developing apparatus according to claim 1, characterized in that, At least two sets of bipolar filters (12) are provided on the developer supply pipeline of the first storage tank (5), and the two sets of bipolar filters (12) are switchably connected to the developer supply pipeline of the first storage tank (5). At least one set of bipolar filters (12) is provided on the developer supply pipeline of the second storage tank (6).

5. The developing apparatus according to claim 4, characterized in that, The bipolar filter (12) includes: The first-stage filter (121) is configured to filter out photoresist mixed in the developer; and The second-stage filter (122) is connected in series with the first-stage filter (121) and is configured to filter fine particles or impurities in the developer.

6. The developing apparatus according to any one of claims 1 to 5, characterized in that, The length of the first developing tank (1) is greater than the length of the fourth developing tank (4), and the lengths of the second developing tank (2) and the third developing tank (3) are equal to or less than the length of the first developing tank (1) and greater than the length of the fourth developing tank (4).

7. The developing apparatus according to claim 1, characterized in that, The developing nozzle (151) is equipped with a swing motor, which is configured to drive the developing nozzle (151) to reciprocate in a direction perpendicular to the transmission direction.

8. A developing method, characterized in that, Applied to the developing apparatus according to any one of claims 1 to 7, and comprising the following steps: The developer in the first storage tank (5) is supplied to the first developing tank (1), the second developing tank (2) and the third developing tank (3), and the developer in the second storage tank (6) is supplied to the fourth developing tank (4). After the developer is sprayed onto the product surface, part of the developer in the first developing tank (1) is directly discharged through the first direct discharge pipe (11), and the other part flows back to the first storage tank (5). All the developer in the second developing tank (2) flows back to the first storage tank (5). All the developer in the third developing tank (3) flows back to the first storage tank (5). The same amount of developer in the fourth developing tank (4) that is directly discharged from the first developing tank (1) flows back to the first storage tank (5), and the other part flows back to the second storage tank (6). The third storage tank (7) replenishes the developing solution to the second storage tank (6); The fourth storage tank (8) and the pure water supply pipeline (9) are replenished and adjusted using high-concentration developer stock solution or water according to the concentration of the first storage tank (5), the second storage tank (6) and the third storage tank (7).

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