An intermittent advancing structure for wafer and substrate welding packaging

Abstract

The present invention discloses an intermittent propulsion structure for wafer and substrate welding packaging, comprising a support base, a heating module arranged on the support base, the heating module is used to heat the upper end surface substrate; a driving module and a toggle module, the driving module is connected to the toggle module, the toggle module is located above the heating module, the driving module drives the toggle module to reciprocate in the horizontal and vertical directions, so that the toggle module toggle the substrate on the heating module to move intermittently. The driving module drives the toggle module to push the substrate on the heating module, which reduces the pulling of the substrate during the movement of the substrate, thereby solving the problem of wear on the surface of the substrate during the movement of the substrate.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to an intermittent propulsion structure for wafer and substrate welding packaging. Background Art

[0002] Surface Mount Technology (SMT) is the most popular technology and process in the electronic assembly industry. It can mount leadless or short-lead surface mount components on the surface of a substrate (Printed Circuit Board, PCB) or other substrates.

[0003] Specifically, the wafer is usually pasted on the substrate through a glue dispensing structure, and then the wafer and the substrate are welded and fixed by transferring the tin wire through a soldering structure to complete the work of bonding. In the process of bonding, a retractable structure is usually set at both ends of the fixing device so that the substrate can be moved, which is convenient for the glue dispensing structure and the soldering structure to bond different positions of different substrates in turn. However, the retractable structure at both ends is generally driven by a pulling structure in the process of driving the substrate to move, which is easy to cause wear and damage to the surface of the substrate.

[0004] Therefore, it is necessary to propose an intermittent advancement structure for wafer and substrate welding packaging to improve the above problems. Summary of the invention

[0005] In order to overcome the shortcomings of the existing technology, the present invention provides an intermittent propulsion structure for wafer and substrate welding packaging, which solves the problem of abrasion of the substrate surface during its movement.

[0006] The technical solution of the present invention is as follows:

[0007] An intermittent propulsion structure for wafer and substrate welding packaging, comprising a support base and a heating module arranged on the support base, wherein the heating module is used to heat the upper end surface substrate;

[0008] A driving module and a toggling module, wherein the driving module is connected to the toggling module, the toggling module is located above the heating module, and the driving module drives the toggling module to reciprocate in the horizontal and vertical directions, so that the toggling module toggles the substrate on the heating module to move intermittently.

[0009] In one possible implementation, the driving module includes a lifting driving member connected to the bracket base, a lifting output block and a first slide rail, the output end of the lifting driving member is connected to the lifting output block, the lifting output block is connected to the first slide rail, and the lifting driving member drives the lifting output block to perform lifting and reciprocating motion along the first slide rail.

[0010] In a possible implementation, the driving module further includes a transmission rod, a first shifting transmission rod and a plurality of rotating seats, each of which is sleeved on the transmission rod, and the rotating seats are connected to the bracket base;

[0011] The lifting output block is provided with a transmission end head, and the lifting of the transmission end head drives one end of the first toggle transmission rod to lift, and the other end of the first toggle transmission rod drives the transmission rod to rotate relative to the rotating seat.

[0012] In one possible implementation, the driving module also includes a plurality of second toggle transmission rods mounted on the transmission rod, the second toggle transmission rods and the first toggle transmission rods are respectively arranged on both sides of the transmission rod, the gravity on one side of the second toggle transmission rod is greater than that on one side of the first toggle transmission rod, and the second toggle transmission rod performs lifting and reciprocating motion at one end away from the transmission rod.

[0013] In a possible implementation, the toggle module includes a toggle slide seat connected to the bracket base, a toggle slide sleeve sleeved on the toggle slide seat, and a toggle member connected to the toggle slide sleeve, and the toggle slide sleeve is provided with a linkage terminal;

[0014] The end of the second toggle transmission rod away from the transmission rod drives the linkage end head to rise, so that the linkage end head drives the toggle sliding sleeve and the toggle member to rise relative to the toggle sliding seat.

[0015] In a possible implementation, the toggle member includes a synchronization rod, a transverse sliding sleeve and a toggle unit which are all sleeved on the synchronization rod, the transverse sliding sleeve is slidably connected to the toggle slide seat, and the toggle sliding sleeve drives the transverse sliding sleeve, the synchronization rod and the wave unit to rise.

[0016] In a possible implementation, the toggle module further includes an elastic descending auxiliary component, one end of which is connected to the bracket base, and the other end of which is connected to the toggle sleeve, and the descending auxiliary component is used to increase the descending speed of the toggle component.

[0017] In a possible implementation, the heating module includes a heating plate, and a toggle groove matched with the toggle module is provided on the heating plate, and the toggle groove is used to provide a toggle rotation space for the toggle module.

[0018] In one possible implementation, the heating module also includes an I-shaped groove plate located below the heating plate, and a heat conduction unit block and a heating unit group located on the upper and lower end surfaces of the I-shaped groove plate, respectively, the heating unit group is connected to the heat conduction unit block through a pipeline, and the heat conduction unit block transfers heat to the heating plate.

[0019] In a possible implementation, the heating unit group includes a heating module and a heating jacket, the heating jacket is connected to the I-shaped slot plate, the heating module is located between the heating jacket and the I-shaped slot plate, and the heating jacket is connected to the heat transfer unit block pipeline.

[0020] The present invention according to the above scheme has the beneficial effect of providing an intermittent propulsion structure for wafer and substrate welding packaging, comprising a supporting base, and a heating module, a driving module and a toggle module arranged above the supporting base, and the output end of the toggle module is arranged above the heating module, wherein the driving module drives the toggle module to perform horizontal and vertical reciprocating motions, so that the output end of the toggle module toggle the substrate above the heating module, and then intermittently propels the substrate. Compared with directly pulling and releasing the substrate through a retracting mechanism, the present invention can avoid pulling and releasing the substrate and reduce damage to the substrate when moving it. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the present invention;

[0022] Figure 2 Schematic diagram of the structure of the drive module in this embodiment;

[0023] Figure 3 Schematic diagram of the structure of the toggle module in this embodiment;

[0024] Figure 4 For this embodiment Figure 1 Enlarged view of the middle part A;

[0025] Figure 5 It is a cross-sectional view of the present invention.

[0026] In the figure:

[0027] 10. Bracket base; 20. Heating module; 21. Heating plate; 211. Toggle groove; 22. I-shaped groove plate; 23. Heat conduction unit block; 24. Heating unit group; 241. Heating module; 242. Heating sleeve; 30. Driving module; 31. Lifting driving member; 32. Lifting output block; 321. Transmission end; 33. First slide rail; 34. Transmission rod; 35. First toggle transmission rod; 36. Rotating seat; 37. Second toggle transmission rod; 40. Toggle module; 41. Toggle slide; 42. Toggle slide sleeve; 421. Linkage end; 43. Toggle member; 431. Synchronous rod; 432. Transverse slide sleeve; 433. Toggle unit; 44. Lowering auxiliary parts. DETAILED DESCRIPTION

[0028] The present invention is further described below in conjunction with the accompanying drawings and embodiments:

[0029] It should be noted that the present invention is applied to crystal bonding equipment. Specifically, the fixing equipment includes an equipment bracket, a glue dispensing structure, a soldering structure and a retractable structure. Among them, the present invention is arranged on the equipment bracket, and is mainly used to push the substrate to move, which is equivalent to the moving track of the substrate. Specifically, the glue dispensing structure and the soldering structure are arranged in sequence on the basic moving path. The glue dispensing structure is used to stick the wafer on the substrate, and the soldering structure is used to weld and fix the wafer and the substrate through tin wire. In addition, the retractable structure is respectively arranged at both ends of the substrate moving path, and the retractable structure is used to place and roll the substrate.

[0030] like Figures 1 to 5 As shown, the present invention discloses an intermittent propulsion structure for wafer and substrate welding packaging, including a support base 10, a heating module 20, a driving module 30 and a toggle module 40, wherein the heating module 20, the driving module 30 and the toggle module 40 are all located above the support base 10, and the heating module 20, the driving module 30 and the toggle module 40 are respectively connected to the support base 10. In addition, the heating template is used to heat the substrate on the upper end surface, wherein the toggle module 40 is located above the heating module 20, and the driving module 30 is connected to the toggle module 40. The driving module 30 drives the toggle module 40 to reciprocate in the horizontal and vertical directions, so that the toggle module 40 toggle the substrate on the heating module 20 for intermittent movement.

[0031] In this embodiment, the driving module 30 is arranged on one side of the bracket base 10, and an L-shaped mounting position is provided on the other side of the bracket base 10. The heating module 20 is arranged in the mounting position. The toggle module 40 is located in the middle of the bracket base 10, and the output end of the toggle module 40 is located above the heating module 20. The driving module 30 transmits the output end of the toggle module 40 to intermittently toggle the substrate on the heating module 20. Compared with the fixed device that moves the substrate by pulling and releasing the retractable structure at both ends, the present invention moves the substrate by toggling, which can reduce the pulling of the substrate and thereby avoid damage to the substrate.

[0032] It needs to be explained that a reeling mechanism is provided at one end of the heating module 20, and a reeling mechanism is provided at the other end. Specifically, when the toggle module 40 intermittently pushes the substrate on the heating plate 21 through the toggle action, the reeling mechanism and the reeling mechanism both cooperate with the toggle module 40 to move the substrate. In addition, the toggle frequency of the substrate by the output end of the toggle module 40 corresponds to the glue dispensing structure and the solid crystal structure. Specifically, when the output end of the toggle module 40 toggles the substrate, the glue dispensing structure and the fixed structure leave the substrate. When the output end of the toggle module 40 is separated from the substrate, the glue dispensing structure and the fixed structure respectively bond the wafer to the substrate and solder the wafer and the substrate. Compared with the prior art that pulls and releases the substrate through the retractable structure, the present invention uses the structural setting of the driving module 30 and the toggle module 40 to intermittently push the substrate on the heating module 20 through the toggle method, thereby reducing the pulling on the substrate and reducing the damage to the substrate.

[0033] For further reference, Figure 1-2 and Figure 4 The driving module 30 includes a lifting driving member 31 connected to the bracket base 10, a lifting output block 32 and a first slide rail 33. The output end of the lifting driving member 31 is connected to the lifting output block 32, and the lifting output block 32 is connected to the first slide rail 33. The lifting driving member 31 drives the lifting output block 32 to perform lifting and reciprocating motion along the first slide rail 33.

[0034] In this embodiment, the lifting drive member 31 includes a lifting fixing sleeve connected to the bracket base 10, the lifting fixing sleeve is bolted and fixed to the bracket base 10, a telescopic cylinder is installed in the lifting fixing sleeve, and the output end of the telescopic cylinder moves in the vertical direction, wherein the first slide rail 33 is arranged along the vertical direction, and the first slide rail 33 is screwed and fixed to the lifting fixing sleeve, the lifting output block 32 is screwed and fixed to the telescopic cylinder, and the lifting output block 32 is slidably connected to the first slide rail 33, and the lifting sliding block can be lifted and lowered in the vertical direction along the first slide rail 33 by driving the lifting cylinder.

[0035] For further reference, Figure 1-2 and Figure 4The driving module 30 also includes a transmission rod 34, a first toggle transmission rod 35 and a plurality of rotating seats 36 mounted on the transmission rod 34, the rotating seat 36 is connected to the bracket base 10, and in addition, a transmission end 321 is provided on the lifting output block 32, and the lifting and lowering of the transmission end 321 drives one end of the first toggle transmission rod 35 to lift and lower, and the other end of the first toggle transmission rod 35 drives the transmission rod 34 to rotate relative to the rotating seat 36.

[0036] In this embodiment, the direction of the transmission rod 34 is parallel to the moving direction of the substrate, and two rotating seats 36 are sleeved on the transmission rod 34. The transmission rod 34 is arranged through the rotating seat 36 and is rotatably connected through a bearing, wherein one end of the first toggle transmission rod 35 is provided with a retractable mounting through hole, the transmission rod 34 is arranged through the mounting through hole, and the mounting through hole is retracted by screwing a screw so that the transmission rod 34 is fixedly connected to the rotating seat 36. In addition, the other end of the first toggle transmission rod 35 is adapted to the transmission end head 321, and the lifting and lowering of the lifting output block 32 drives the transmission end head 321 to lift and abut against the other end of the first toggle transmission rod 35 to descend, and under the drive of the first toggle transmission rod 35, the transmission rod 34 rotates relative to the rotating seat 36.

[0037] It needs to be explained that an in-place sensor is provided on the lifting fixing sleeve, and a sensing plate compatible with the in-place sensor is provided on the lifting output block 32, wherein the in-place sensor determines the rising and falling heights of the lifting output block 32 by detecting the sensing plate, so the lifting amplitude of the lifting output block 32 can be adjusted by adjusting the position of the sensing plate on the lifting output block 32, thereby changing the rotation angle of the transmission rod 34.

[0038] For further reference, Figure 1-2 and Figure 4 The driving module 30 also includes a plurality of second toggle transmission rods 37 sleeved on the transmission rod 34. The second toggle transmission rods 37 and the first toggle transmission rods 35 are respectively arranged on both sides of the transmission rod 34. The gravity on one side of the second toggle transmission rod 37 is greater than that on one side of the first toggle transmission rod 35. The second toggle transmission rod 37 moves up and down reciprocatingly at one end away from the transmission rod 34.

[0039] In the present embodiment, the driving module 30 also includes three second toggle transmission rods 37. Specifically, the second toggle transmission rod 37 and the first toggle transmission rod 35 are connected to the transmission rod 34 in the same manner. The connection structure between the second toggle transmission rod 37 and the transmission rod 34 will not be described in detail below. Specifically, the two second toggle transmission rods 37 and the transmission rod 34 are arranged on one side close to the heating module 20, and the first toggle transmission rod 35 is arranged on the other side of the transmission rod 34 away from the heating module 20. When the lifting sliding block descends, the transmission end 321 presses down the first toggle transmission rod 35 to descend, and the transmission rod 34 rotates to drive the second toggle transmission rod 37 to rise. When the lifting sliding block rises and the transmission end 321 rises and leaves the first toggle transmission rod 35, under the action of gravity, the second toggle transmission rod 37 descends and drives the transmission rod 34 to rotate in the opposite direction, so that the first toggle transmission rod 35 rises and resets.

[0040] It needs to be explained that the mounting through holes of the first toggle transmission rod 35 and the second toggle transmission rod 37 are both provided with socket thread grooves, and the socket joints with the first toggle transmission rod 35 and the second toggle transmission rod 37 on the transmission rod 34 are both provided with socket threads that are compatible with the socket thread grooves, so that the lifting amplitude and frequency of the second toggle transmission rod 37 away from the other end of the transmission rod 34 can be changed by adjusting the angle between the first toggle transmission rod 35 and the second toggle transmission rod 37.

[0041] For further reference, Figure 1 , Figure 3 and Figure 4 The toggle module 40 includes a toggle slide 41 connected to the bracket base 10, a toggle sleeve 42 mounted on the toggle slide 41, and a toggle member 43 connected to the toggle sleeve 42. The toggle sleeve 42 is provided with a linkage end 421. In addition, the end of the second toggle transmission rod 37 away from the transmission rod 34 drives the linkage end 421 to rise, so that the linkage end 421 drives the toggle sleeve 42 and the toggle member 43 to rise relative to the toggle slide 41.

[0042] In this embodiment, the toggle slide 41 is located on the upper end surface of the bracket base 10 and is bolted and fixed to the bracket base 10. In addition, a second slide rail is provided on the toggle slide 41 in the vertical direction, and the toggle slide sleeve 42 is sleeved on the second slide rail, and the toggle slide sleeve 42 slides in the vertical direction along the second slide rail, wherein the outer side surface of the toggle slide sleeve 42 is provided with a linkage end 421, and the linkage end 421 is located above the second toggle transmission rod 37 away from one end of the first toggle transmission rod 35, so that when the second toggle transmission rod 37 performs a lifting and reciprocating motion and abuts against the linkage end 421, the linkage end 421 is lifted and drives the toggle slide sleeve 42 to rise, and when the second toggle transmission rod 37 is separated from the linkage end 421, under the action of gravity, the toggle slide sleeve 42 automatically descends and resets, so that the toggle slide sleeve 42 performs a lifting and reciprocating motion in the vertical direction.

[0043] For further reference, Figure 1 , Figure 3 and Figure 4 The toggle member 43 also includes a synchronization rod 431, a transverse sliding sleeve 432 and a toggle unit 433, which are all sleeved on the synchronization rod 431. The transverse sliding sleeve 432 is slidably connected to the toggle slide seat 41, and the toggle sliding sleeve 42 drives the transverse sliding sleeve 432, the synchronization rod 431 and the toggle unit 433 to rise.

[0044] In this embodiment, the direction of the synchronization rod 431 is arranged parallel to the direction of the transmission rod 34. The toggle member 43 includes three transverse sliding sleeves 432 slidably connected to the toggle slide seat 41 corresponding to the second toggle transmission rod 37, and also includes seven toggle units 433. The seven toggle units 433 are fixed on the synchronization rod 431 by screw clamping. Specifically, the transverse sliding sleeve 432 can be a bearing, and the transverse sliding sleeve 432 is slidably connected to the synchronization rod 431, so that the synchronization rod 431 can move in the horizontal direction. In addition, when the toggle sliding sleeve 42 rises and drives the transverse sliding sleeve 432 to rise, the synchronization rod 431 and the toggle unit 433 are driven to rise synchronously. Conversely, under the action of gravity, the toggle sliding sleeve 42 drives the transverse sliding sleeve 432 to descend, and then the synchronization rod 431 and the toggle unit 433 descend, so that the lifting and lowering of the toggle unit 433 can be controlled. It should be explained that the driving module 30 also includes a The transverse driving member, the transverse sliding seat and the transverse sliding rail are at one end of the step rod 431, wherein the transverse sliding seat is fixed to the bracket base 10 by bolt connection, the transverse sliding rail is slidably connected to the transverse sliding seat, the transverse sliding rail is fixed to the transverse driving member by screws, and the synchronization rod 431 can drive the transverse driving member and the transverse sliding seat to slide in the vertical direction relative to the transverse sliding seat. In addition, the transverse driving member can be a telescopic cylinder, which drives the transverse driving member to drive the synchronization rod 431 to move in the horizontal direction, and drives the toggle unit 433 to move in the vertical and horizontal directions simultaneously under the lifting and lowering of the toggle sliding sleeve 42, so that the toggle end of the toggle unit 433 can toggle the substrate on the heating module 20 to realize intermittent toggle motion, and then promote the movement of the substrate through intermittent wave motion. Compared with directly driving the retractable structure to pull and release the two ends of the substrate, the substrate promotion method of the present invention can reduce damage to the substrate.

[0045] It needs to be explained that the reference Figure 1 , Figure 3 and Figure 4A friction block is provided at one end of the first toggle transmission rod 35 away from the transmission rod 34, and a friction block is also provided at one end of the second toggle transmission rod 37 away from the transmission rod 34. The friction block is made of wear-resistant plastic material. The friction block and the toggle transmission rod are both connected and fixed with screws. The structural setting of the friction block can reduce the wear of the linkage end 421 or the transmission end 321. At the same time, the friction block and the toggle transmission rod can be disassembled and replaced. Compared with directly replacing the toggle transmission rod or the end structure, replacing the friction block is more convenient and has lower maintenance costs.

[0046] For further reference, Figure 1 , Figure 3 and Figure 4 The toggle module 40 also includes an elastic descending auxiliary component 44 , one end of which is screwed to the bracket base 10 , and the other end is connected to the toggle sliding sleeve 42 . The descending auxiliary component 44 is used to increase the descending speed of the toggle component 43 .

[0047] In this embodiment, the lowering auxiliary component 44 can be a telescopic spring. When the toggle slide 42 rises, the lowering auxiliary component 44 is stretched to store energy. When the toggle slide 42 descends under the action of gravity, the lowering auxiliary component 44 is reset to release energy. Therefore, the lowering auxiliary component 44 can increase the lowering speed of the toggle component 43, specifically, the lowering speed of the toggle unit 433 can be increased.

[0048] For further reference, Figure 1 , Figure 4 and Figure 5 The heating module 20 includes a heating plate 21 , and a toggle groove 211 adapted to the toggle module 40 is provided on the heating plate 21 , and the toggle groove 211 is used to provide a rotation space for the toggle module 40 .

[0049] In this embodiment, the substrate moves on the upper end surface of the heating plate 21. Specifically, the upper end surface of the heating plate 21 is provided with a toggle groove 211 corresponding to the toggle unit 433. When the synchronization rod 431 drives the toggle unit 433 to move in the vertical and horizontal directions, the movement trajectory of the toggle end of the toggle unit 433 that contacts the substrate is in an arc shape, thereby toggling the substrate to move. In the process of toggling the substrate, a certain pressure and friction force need to be generated on the substrate. In order to reduce the damage to the surface of the substrate caused by the pressure generated by the heating plate 21 and the toggle end, the toggle groove 211 can be used to prevent the heating plate 21 from directly contacting the toggle end. At the same time, by making the descending depth of the toggle end lower than the heating plate 21, a friction force that can toggle the substrate is generated between the toggle end and the substrate. Therefore, the structural setting of the toggle groove 211 can reduce the damage to the substrate to a certain extent.

[0050] For further reference, Figure 1 , Figure 4 and Figure 5The heating module 20 also includes an I-shaped groove plate 22 located below the heating plate 21, and a heat conduction unit block 23 and a heating unit group 24 located on the upper end surface and the lower end surface of the I-shaped groove plate 22 respectively. The heating unit group 24 is connected to the heat conduction unit block 23 through a pipeline, and the heat conduction unit block 23 conducts heat to the heating plate 21.

[0051] In this embodiment, the cross section of the I-shaped slot plate 22 is I-shaped, and two mounting grooves are formed on the upper end surface and the lower end surface, respectively, wherein the heat conduction unit block 23 is installed in the mounting groove of the upper end surface of the I-shaped slot plate 22, and the heating unit group 24 is installed in the mounting groove of the lower end surface, and the heating unit group 24 and the heat conduction unit block 23 are both externally connected to the water vapor transport structure. Specifically, the heating unit group 24 is connected to both the output end and the input end of the water vapor transport mechanism, and the heat conduction unit block 23 is also connected to both the output end and the input end of the water vapor transport mechanism. Further The water vapor of the water vapor transport mechanism enters the heating unit group 24 from the input end, so that the heating unit group 24 heats it with water vapor. After the heating is completed, it enters the water vapor transport mechanism from the input end, and is transported to the heat conduction unit block 23 from the other output end of the water vapor transport mechanism. The guide channel of the heat conduction unit block 23 makes the water vapor contact with the heating plate 21, so that the heat of the water vapor is transferred to the heating plate 21. Finally, the water vapor after the heat conduction is completed enters the water vapor transport mechanism from the other input end, and the above heat conduction process is repeated to realize the heating of the heating plate 21.

[0052] Specifically, in this embodiment, the heating plate 21 is divided into 7 temperature zones according to the temperature requirements, and includes 7 heating unit groups 24 arranged corresponding to the 7 temperature zones. In actual operation, the heating temperatures of the 7 heating unit groups 24 can be controlled separately as needed, thereby facilitating preheating, welding, cooling and other processes at the same position of the substrate.

[0053] For further reference, Figure 1 , Figure 4 and Figure 5 The heating unit group 24 includes a heating module 241 and a heating sleeve 242. The heating sleeve 242 is connected to the I-shaped slot plate 22. The heating module 241 is located between the heating sleeve 242 and the I-shaped slot plate 22 bracket. The heating sleeve 242 is connected to the heat conduction unit block 23 through a pipeline.

[0054] In this embodiment, the heating sleeve 242 is fixed to the lower end surface mounting groove of the I-shaped slot plate 22 by screws, so that the heating module 241 is installed in the lower mounting groove of the I-shaped slot plate 22. Through the structural setting of the heating module 241, the temperature of the water vapor entering the heat conduction unit block 23 is controlled, thereby realizing the temperature control of the heating plate 21.

[0055] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

[0056] The above is an exemplary description of the present invention in conjunction with the accompanying drawings. It is obvious that the implementation of the present invention is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. An intermittent propulsion structure for wafer and substrate welding packaging, comprising a support base, characterized in that: It also includes a heating module disposed on the support base, and the heating module is used to heat the upper end surface substrate; A driving module and a toggling module, wherein the driving module is connected to the toggling module, the toggling module is located above the heating module, and the driving module drives the toggling module to reciprocate in the horizontal and vertical directions, so that the toggling module toggles the substrate on the heating module to move intermittently; The driving module includes a lifting driving member connected to the bracket base, a lifting output block and a first slide rail, the output end of the lifting driving member is connected to the lifting output block, the lifting output block is connected to the first slide rail, and the lifting driving member drives the lifting output block to perform lifting and reciprocating motion along the first slide rail; The driving module also includes a transmission rod, a first shifting transmission rod and a plurality of rotating seats, each of which is sleeved on the transmission rod, and the rotating seats are connected to the bracket base; The lifting output block is provided with a transmission end head, and the lifting of the transmission end head drives one end of the first toggle transmission rod to lift, and the other end of the first toggle transmission rod drives the transmission rod to rotate relative to the rotating seat; The driving module also includes a plurality of second toggle transmission rods sleeved on the transmission rod, the second toggle transmission rod and the first toggle transmission rod are respectively arranged on both sides of the transmission rod, the gravity of one side of the second toggle transmission rod is greater than that of one side of the first toggle transmission rod, and the second toggle transmission rod performs lifting and reciprocating motion at one end away from the transmission rod; when the lifting output block descends, the transmission end head presses down the first toggle transmission rod to descend, and the transmission rod rotates to drive the second toggle transmission rod to rise, and when the lifting output block rises and the transmission end head rises and leaves the first toggle transmission rod under the action of gravity, the second toggle transmission rod descends to drive the transmission rod to rotate in the opposite direction, so that the first toggle transmission rod rises and resets; The toggle module comprises a toggle slide seat connected to the bracket base, a toggle slide sleeve sleeved on the toggle slide seat, and a toggle member connected to the toggle slide sleeve, wherein the toggle slide sleeve is provided with a linkage terminal; The end of the second toggle transmission rod away from the transmission rod drives the linkage end head to rise, so that the linkage end head drives the toggle sliding sleeve and the toggle member to rise relative to the toggle sliding seat; The toggle member includes a synchronous rod, a transverse sliding sleeve and a toggle unit, each of which is sleeved on the synchronous rod. The transverse sliding sleeve is slidably connected to the toggle slide seat, so that the synchronous rod can move in the horizontal direction; the toggle sliding sleeve drives the transverse sliding sleeve, the synchronous rod and the wave unit to rise; when the toggle sliding sleeve rises and drives the transverse sliding sleeve to rise, the synchronous rod and the toggle unit are driven to rise synchronously, and vice versa, under the action of gravity, the toggle sliding sleeve drives the transverse sliding sleeve to descend, and then the synchronous rod and the toggle unit descend, so that the lifting and lowering of the toggle unit can be controlled; The toggle module also includes an elastic descending auxiliary component, one end of which is connected to the bracket base, and the other end is connected to the toggle sliding sleeve, and the descending auxiliary component is used to increase the descending speed of the toggle component; The driving module also includes a transverse driving member, a transverse sliding seat and a transverse sliding rail arranged at one end of the synchronization rod, wherein the transverse sliding seat is fixed to the bracket base by bolts, the transverse sliding rail is slidably connected to the transverse sliding seat, the transverse sliding rail is fixed to the transverse driving member by screws, and the synchronization rod can drive the transverse driving member and the transverse sliding seat to slide in the vertical direction relative to the transverse sliding seat, and the transverse driving member can drive the synchronization rod to move in the horizontal direction, so that the toggle end of the toggle unit can toggle the substrate on the heating module to realize intermittent toggle motion.

2. The intermittent advancing structure for wafer and substrate welding packaging according to claim 1, characterized in that: The heating module comprises a heating plate, on which a toggle groove adapted to the toggle module is arranged, and the toggle groove is used to provide a toggle rotation space for the toggle module.

3. The intermittent advancing structure for wafer and substrate welding packaging according to claim 2, characterized in that: The heating module also includes an I-shaped groove plate located below the heating plate, and a heat conduction unit block and a heating unit group located on the upper and lower end surfaces of the I-shaped groove plate, respectively. The heating unit group is connected to the heat conduction unit block through a pipeline, and the heat conduction unit block transfers heat to the heating plate.

4. The intermittent advancing structure for wafer and substrate welding packaging according to claim 3, characterized in that: The heating unit group includes a heating module and a heating jacket, wherein the heating jacket is connected to the I-shaped slot plate, the heating module is located between the heating jacket and the I-shaped slot plate, and the heating jacket is connected to the heat conduction unit block pipeline.

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