A mesh belt type atmosphere oxidation furnace and reoxidation method

Abstract

The present invention relates to a mesh belt type atmosphere oxidation furnace and a reoxidation method, belonging to the technical field of atmosphere furnaces. The invention comprises a heating mechanism, a feeding mechanism, an atmosphere detector, an exhaust mechanism and an air blowing mechanism, wherein the feeding mechanism is installed at the feeding end of the heating mechanism, a plurality of temperature zones connected in sequence are arranged in the heating mechanism, and heat insulation boards are vertically arranged between adjacent temperature zones, a cavity is arranged in the heat insulation board and air inlet grooves are opened on opposite sides of the bottom, the atmosphere detector is used to detect the atmosphere content in each temperature zone, the air blowing mechanism is installed at the feeding end of the heating mechanism and blows air into each temperature zone, the exhaust mechanism is installed on the top surface of the heating mechanism and the exhaust end is connected with the cavity, the exhaust end of the exhaust mechanism is in contact with the pipe wall of the air blowing end of the air blowing mechanism, and the exhaust mechanism discharges the gas in the temperature zone through the air inlet groove, and the present invention solves the problem that the existing MLCC needs to frequently adjust the heating element to control the stability of the temperature in the temperature zone during the sintering process.

Description

Technical Field

[0001] The invention belongs to the technical field of atmosphere furnaces, and in particular relates to a mesh belt type atmosphere oxidation furnace and a reoxidation method. Background Art

[0002] With the improvement of MLCC reliability and integration, MLCC is widely used in the military and civilian electronics industries, and the market size accounts for about 93% of the entire ceramic capacitor. The MLCC process is complex, and the quality of the sintering process determines the performance of the MLCC product. In order to reduce the production cost of MLCC, most civilian MLCCs are currently made of Ni internal electrodes, so they need to be fired in a reducing atmosphere (generally N2+H2+H2O). The sintering process of MLCC is carried out in an atmosphere furnace, and the general sintering temperature is between 1100℃ and 1350℃. Because it is a high-temperature sintering, in order to prevent oxidation, etc., the sintering furnace needs to be filled with nitrogen / hydrogen. The key to sintering is the temperature in the furnace and its uniformity, and it should be carried out in a thermal dynamic balance. The air should flow fully to make the crystal phase of the porcelain grow uniformly and densely.

[0003] Therefore, during the sintering process, it is necessary to continuously blow set gases into different temperature zones in the atmosphere furnace to ensure the sintering quality of the continuously moving MLCC. Since the temperatures of the multiple temperature zones set on the atmosphere furnace rise successively, that is, the temperature difference between two adjacent temperature zones is large, and the temperature of each temperature zone needs to be accurately controlled during the sintering process, and the waste gas generated by sintering needs to be discharged during the sintering process. Therefore, during the sintering process of MLCC, the waste gas generated by sintering will be continuously discharged, and different gases need to be sprayed between the temperature zones to ensure the sintering quality. At the same time, the temperature of each temperature zone needs to be controlled to remain stable. Since there is a difference in the temperature of the two adjacent temperature zones, the gas blown in at the same time will also take away the temperature in the temperature zone. Therefore, this leads to the need to frequently adjust the output power of the heating element to meet the control of the temperature of the temperature zone when controlling the temperature in the temperature zone. Summary of the invention

[0004] In order to solve the above problems existing in the prior art, the present invention provides a mesh belt atmosphere oxidation furnace and a reoxidation method, which solves the problem that the existing MLCC needs to frequently adjust the heating elements to control the temperature stability of the temperature zone during the sintering process.

[0005] The object of the present invention can be achieved through the following technical scheme: a mesh belt atmosphere oxidation furnace, comprising a heating mechanism, a feeding mechanism, an atmosphere detector, an exhaust mechanism and an air blowing mechanism, the feeding mechanism is installed at the feeding end of the heating mechanism, a plurality of temperature zones connected in sequence are arranged in the heating mechanism, and heat insulation boards are vertically arranged between adjacent temperature zones, a cavity is arranged in the heat insulation board and air inlet grooves are opened on opposite sides of the bottom thereof, the atmosphere detector is used to detect the atmosphere content in each temperature zone, the air blowing mechanism controls the amount of atmosphere blown according to the detection result of the atmosphere detector, the air inlet groove is connected with the cavity, the air blowing mechanism is installed at the unloading end of the heating mechanism and blows air into each temperature zone, the exhaust mechanism is installed on the top surface of the heating mechanism and the exhaust end is connected with the cavity, the exhaust end of the exhaust mechanism abuts against the pipe wall of the blowing end of the air blowing mechanism, and the exhaust mechanism discharges the gas in the temperature zone through the air inlet groove.

[0006] As a preferred technical solution of the present invention, both side walls of the insulation board are provided with insulation layers.

[0007] As a preferred technical solution of the present invention, the heating mechanism includes a frame, a work surface, an upper heating element and a lower heating element, the upper heating element and the lower heating element are both provided with a temperature detector and the heating efficiency is adjusted according to the detection result of the temperature detector, the upper heating element is arranged above the work surface, the lower heating element is arranged below the work surface, the upper heating element is arranged in a one-to-one correspondence with each temperature zone, the lower heating element is composed of a plurality of heating zones, and the plurality of heating zones are sequentially connected and arranged below the work surface and are arranged in a one-to-one correspondence with the upper heating element.

[0008] As a preferred technical solution of the present invention, the upper heating element and the lower heating element are evenly divided into three heating zones along the axial direction of the work surface, and the three heating zones are each composed of a plurality of heating wires, and the plurality of heating wires are evenly arranged along the axial direction of the work surface, and the heating efficiency of the plurality of heating wires can be independently controlled according to the temperature detector.

[0009] As a preferred technical solution of the present invention, the blowing mechanism includes an atmosphere controller and an air inlet duct, the atmosphere controller is connected to the air inlet duct, and the air inlet duct is provided with two air outlet ends in each temperature zone, one air outlet end is located at the upper part of the temperature zone and blows air vertically from top to bottom, and the other air outlet end is located below the work surface, and a plurality of air inlet holes are opened on the work surface in the middle of each temperature zone, and the air inlet is connected to the air outlet end of the air inlet duct located below the work surface.

[0010] As a preferred technical solution of the present invention, the exhaust mechanism is provided in plurality, and the plurality of exhaust mechanisms are respectively arranged above each temperature zone and connected to the cavity. The exhaust mechanism includes an exhaust pipe and an air inlet nozzle, the bottom end of the exhaust pipe is connected to the cavity, and the air inlet nozzle is installed at the top end of the exhaust pipe.

[0011] As a preferred technical solution of the present invention, a temperature detection hole is also provided on the top of the exhaust pipe, and the temperature detection hole is located below the air inlet nozzle.

[0012] As a preferred technical solution of the present invention, it also includes a humidifying component, which is installed at the bottom of the unloading end of the rack, and the humidifying component is used to spray the aqueous solution into the set temperature zone.

[0013] As a preferred technical solution of the present invention, the feeding mechanism includes a transmission mesh belt, two isolation curtains and an ultrasonic cleaner. The transmission mesh belt is used to move the product in the heating mechanism at a set speed. The top surface of the transmission mesh belt is located above the work table. The two isolation curtains are respectively located at the feeding end and the unloading end of the heating mechanism. The ultrasonic cleaner is installed below the feeding end of the heating mechanism and is used to clean the transmission mesh belt.

[0014] Based on the above-mentioned mesh belt type atmosphere oxidation furnace, the present invention also proposes a reoxidation method of the mesh belt type atmosphere oxidation furnace, comprising the following steps:

[0015] S1: Obtain product sintering temperature curve;

[0016] S2: Place the product on the feeding mechanism with a mesh plate for cyclic feeding;

[0017] S3: The heating mechanism sets the temperature of each temperature zone according to the product sintering temperature curve and adjusts the temperature of each temperature zone in real time according to the detection result of the temperature detector to make it meet the set value;

[0018] S4: The blowing mechanism blows the set atmosphere vertically onto the product in each temperature zone, and the atmosphere flows to both sides of the product;

[0019] S5: The exhaust mechanism exhausts the air in each temperature zone through the insulation board. The air in each temperature zone enters from the air inlet slot at the bottom of the insulation board to form a wind wall between the insulation boards for heat insulation;

[0020] S6: After sintering is completed, the product is unloaded at the unloading end of the heating mechanism.

[0021] The beneficial effects of the present invention are as follows: the set atmosphere is continuously blown into the temperature zone of the heating mechanism through the blowing mechanism to complete the sintering, and the waste gas generated by the sintering in the temperature zone is discharged through the exhaust mechanism, so that a wind wall is formed at the position of the heat insulation board in the temperature zone to isolate the two adjacent temperature zones, so that the temperature difference between the two adjacent temperature zones can be effectively controlled. At the same time, in the process of the blowing mechanism blowing the atmosphere, the blowing end of the blowing mechanism abuts against the exhaust end of the exhaust mechanism, so that the atmosphere blown in by the blowing mechanism and the gas exhausted by the exhaust mechanism can exchange heat, thereby increasing the temperature of the atmosphere blown in by the blowing mechanism, reducing the temperature fluctuation in the temperature zone caused by the blowing mechanism blowing gas into the temperature zone, thereby affecting the quality of sintering, and solving the problem that the existing MLCC needs to frequently adjust the heating element to control the stability of the temperature in the temperature zone during the sintering process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0023] Figure 1 It is a structural schematic diagram of the present invention;

[0024] Figure 2 is a side cross-sectional view of the present invention;

[0025] Figure 3 It is a partial cross-sectional view of the temperature zone of the present invention;

[0026] Figure 4 It is a side cross-sectional view of the temperature zone of the present invention;

[0027] Figure 5 This is a schematic diagram of the exhaust pipe structure of the present invention;

[0028] Main component symbols

[0029] In the figure: 1. heating mechanism; 11. frame; 12. work surface; 13. upper heating element; 14. lower heating element; 2. feeding mechanism; 21. transmission mesh belt; 22. isolation curtain; 23. ultrasonic cleaner; 3. atmosphere detector; 4. exhaust mechanism; 41. exhaust pipe; 411. temperature detection hole; 42. air inlet nozzle; 5. blowing mechanism; 51. atmosphere controller; 52. air inlet duct; 6. heat insulation board; 61. air inlet groove; 62. cavity; 7. humidification component. DETAILED DESCRIPTION

[0030] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0031] During the manufacturing process of MLCC, it needs to be sintered at high temperature. Sintering can make the chip after debinding become a ceramic body with intact internal electrodes, good density, qualified size, high mechanical strength and excellent electrical properties. It can be divided into two stages: densification stage and reoxidation stage.

[0032] The sintering process is carried out in an atmosphere furnace, and the general sintering temperature is between 1100℃ and 1350℃. Due to the high temperature sintering, in order to prevent oxidation, etc., the sintering furnace needs to be filled with nitrogen / hydrogen. The key to sintering is the temperature and uniformity in the furnace, and it should be carried out in a thermal dynamic balance. The air should flow fully to make the crystal phase of the porcelain grow uniformly and densely.

[0033] In the existing sintering process, since it is necessary to continuously fill the sintering furnace with atmosphere, and the filled atmosphere is equal to cold air compared to the sintering furnace, this will cause the temperature of the sintering furnace to fluctuate. At the same time, since the temperature zones in the sintering furnace are connected, only an insulation curtain is set between the two temperature zones for isolation. However, since the isolation curtain cannot completely separate the two adjacent temperature zones, the temperature in the temperature zone will also be affected by the temperature fluctuations of other temperature zones. This results in more holes in the sintered products and insufficient density, which makes the capacity of the sintered MLCC insufficient and the yield rate reduced.

[0034] Therefore, in order to reduce the temperature fluctuation in the temperature zone and improve the temperature stability of the temperature zone during the sintering process of MLCC, please refer to Figure 1-5 The present embodiment provides a mesh belt type atmosphere oxidation furnace, comprising a heating mechanism 1, a feeding mechanism 2, an atmosphere detector 3, an exhaust mechanism 4 and an air blowing mechanism 5. The feeding mechanism 2 is arranged at the feeding end of the heating mechanism 1 for feeding the product into the heating mechanism 1 and allowing the product to move in the heating mechanism 1. The heating mechanism 1 is provided with temperature zones of different temperatures according to the sintering temperature curve of the sintered product, and a heat insulation board 6 is arranged between the temperature zones. The bottom of the heat insulation board 6 is higher than the top surface of the product. At the same time, a cavity 62 is arranged in the heat insulation board 6, and an air inlet groove 61 is arranged at the bottom thereof. The air inlet groove 61 is communicated with the cavity 62, so that the exhaust mechanism 4 is installed in the heating mechanism The top surface of the structure 1 is connected to the air inlet end of the exhaust mechanism 4 and the cavity 62 is connected. At the same time, the blowing mechanism 5 is installed at the unloading end of the heating mechanism 1 and a blowing end is set in each temperature zone to blow the set atmosphere into the temperature zone. When the blowing mechanism 5 blows the atmosphere into each temperature zone, the blowing end is abutted against the tube wall of the exhaust end of the exhaust mechanism 4, so that the hot gas discharged by the exhaust mechanism 4 can increase the temperature of the gas blown into the blowing mechanism 5 through heat conversion, and reduce the large temperature fluctuation in the temperature zone caused by the large temperature difference between the blown gas and the temperature zone when the blowing mechanism 5 blows into the temperature zone, thereby improving the temperature stability in the temperature zone and improving the quality of the sintered product.

[0035] At the same time, since the exhaust mechanism 4 exhausts the air in each temperature zone through the air inlet groove 61 at the bottom of the insulation board 6, a wind wall will be formed on the left and right sides of the bottom of the insulation board 6 to isolate the adjacent temperature zones. Since the temperature of the air in the temperature zone is not much different from the temperature in the temperature zone, the temperature of the wind wall formed on the left and right sides of the bottom of the insulation board 6 is not much different from the temperature of the corresponding temperature zone. Therefore, in the continuous exhaust process of the exhaust mechanism 4, the two temperature zones can be isolated by the wind wall, so that the high temperature zone in the two adjacent temperature zones will not transfer heat to the low temperature zone and cause a large fluctuation in the temperature of the temperature zone, thereby improving the quality of the sintered product and avoiding the need to frequently control the heating efficiency of each temperature zone in the heating mechanism 1 to ensure that the temperature in the temperature zone is within the set range.

[0036] Since there is a temperature difference between two adjacent temperature zones, and the two temperature zones are isolated by an insulation board 6, in order to improve the insulation effect of the insulation board 6 and reduce the temperature fluctuation in the temperature zone, in this embodiment, the opposite side walls of the insulation board 6 are provided with insulation layers. By providing the insulation layers on the two side walls of the insulation board 6, the temperature in the temperature zone is blocked to prevent the temperature of the high temperature zone from entering the low temperature zone through the insulation board 6, and the gas flowing in the cavity 62 in the insulation board 6 is high temperature gas, which can further prevent the temperature in the high temperature zone from transferring to the low temperature zone and causing temperature fluctuations.

[0037] During the heating process of the heating mechanism 1, each temperature zone needs to be heated independently to meet the sintering temperature curve, and the temperature fluctuation in each temperature zone needs to be reduced. Therefore, in one embodiment, the heating mechanism 1 includes a frame 11, a work surface 12, an upper heating element 13 and a lower heating element 14. During the sintering process, the product is moved above the work surface 12 by the feeding mechanism 2, and the upper heating element 13 and the lower heating element 14 are respectively arranged above and below the work surface 12. The lower heating element 14 is composed of a plurality of heating zones, which are sequentially connected and arranged below the work surface 12 and correspond to the upper heating element 13 one by one. By corresponding the upper and lower heating zones, the heating element can heat the entire temperature zone evenly during the heating process, reduce the temperature fluctuation of the temperature zone, and reduce the influence of the bottom surface temperature of the product on the sintering quality due to the higher top surface temperature. At the same time, temperature detectors are provided on the upper heating element 13 and the lower heating element 14, and the upper heating element 13 and the lower heating element 14 adjust the heating efficiency in real time according to the detection result of the temperature detector, thereby reducing the temperature fluctuation in the temperature zone.

[0038] When the upper heating element 13 and the lower heating element 14 generate heat to increase the temperature of the temperature zone, it is necessary to accurately control the temperature in the temperature zone. During the sintering process, the temperature near the edge of the temperature zone and the temperature of the area between two adjacent temperature zones will be lower than that in the middle, because the area at the edge of the temperature zone will dissipate heat to the outside of the heating mechanism 1, and there is a temperature difference between the two adjacent temperature zones, so the temperature of the area will also be different. Therefore, in order to better increase the temperature in the temperature zone, in one embodiment, the upper heating element 13 and the lower heating element 14 are evenly divided into three heating zones along the axial direction of the work table 12. The three heating zones are all composed of a plurality of heating wires, and the plurality of heating wires are evenly arranged along the axial direction of the work table 12. The heating efficiency of the plurality of heating wires can be independently controlled according to the temperature detector. By accurately regulating the temperature in the temperature zone of each heating wire, the temperature in the temperature zone can be kept uniform, the temperature fluctuation generated in the temperature zone is reduced, and the sintering quality of the product is improved.

[0039] During the sintering process, it is necessary to blow a set atmosphere into the temperature zone to ensure the quality of sintering. Therefore, in order to better control the content of the atmosphere in each temperature zone, in one embodiment, the blowing mechanism 5 includes an atmosphere controller 51 and an air inlet pipe 52. The atmosphere controller 51 is connected to the air inlet pipe 52 and blows gas into the temperature zone through the air inlet pipe 52. At the same time, the air inlet pipe 52 is provided with two outlet ends in each temperature zone. One section is located above the temperature zone and blows air vertically from top to bottom to ensure that the top of the product can be wrapped by the atmosphere during the sintering process. At the same time, the worktable 12 is provided with a plurality of air inlet holes in the middle of each temperature zone, so that the other air outlet section located below the worktable 12 is connected to the air inlet hole, so that the lower part of the product can also be wrapped by the atmosphere, so that the product can be better sintered.

[0040] When the air in the temperature zone is discharged, in order to allow the wind wall formed by the insulation board 6 to better isolate the temperatures of the two adjacent temperature zones, in one embodiment, a plurality of exhaust mechanisms 4 are provided, and the plurality of exhaust mechanisms 4 are respectively arranged above each temperature zone and connected to the cavity 62. The exhaust mechanism 4 includes an exhaust pipe 41 and an air inlet nozzle 42. The bottom end of the exhaust pipe 41 is connected to the cavity 62, and the air inlet nozzle 42 is installed at the top end of the exhaust pipe 41. It is correspondingly arranged in each temperature zone, so as to better discharge the waste gas generated by the sintering in the temperature zone. At the same time, the air inlet nozzle 42 is arranged at the top end of the exhaust pipe 41. Since the temperature of the gas discharged from the exhaust pipe 41 is higher than the temperature in the air, the external air will flow into the exhaust pipe 41 through the air inlet nozzle 42, and then be discharged from the exhaust port of the exhaust pipe 41, thereby increasing the exhaust volume of the exhaust pipe 41 and accelerating the flow speed of the gas in the exhaust pipe 41, so that the pressure of the wind wall formed at the bottom of the insulation board 6 is greater, thereby better isolating the two adjacent temperature zones.

[0041] During the exhaust process through the exhaust pipe 41, heat exchange will be carried out with the intake pipe, and the atmosphere volume and temperature in each temperature zone remain basically stable during the sintering process. Therefore, the temperature of the gas discharged from the exhaust pipe 41 also remains stable. Therefore, in order to better detect the temperature fluctuation in the temperature zone, in one embodiment, a temperature detection hole 411 is further provided at the top of the exhaust pipe 41. The temperature detection hole 411 is located below the intake nozzle 42. Since the gas entering the intake nozzle 42 is external air, and the external air temperature is not stable, in order to reduce the influence of external air when detecting the gas temperature in the exhaust pipe 41, the temperature detection hole 411 is opened below the intake nozzle 42. The temperature fluctuation of the temperature in the exhaust pipe 41 is detected by the temperature detection hole 411, which can reflect the temperature fluctuation in the temperature zone, thereby better controlling the temperature stability in the temperature zone.

[0042] In the process of blowing atmosphere into the temperature zone for sintering, one is to prevent the MLCC from being oxidized during the sintering process, resulting in insufficient density and affecting the capacity of the MLCC. After the high-temperature sintering is completed, oxygen needs to be blown into the temperature zone to supplement the oxygen vacancies generated by the MLCC during the sintering process, which leads to a decrease in capacity. Therefore, during the sintering process, oxygen needs to be blown into a specific temperature zone to complete the sintering. In the process of blowing oxygen, oxygen will react with gas in a high temperature environment, thereby causing the oxygen content to decrease. Therefore, in order to better supplement the blown oxygen content, in one embodiment, the humidifying component 7 is installed at the bottom of the unloading end of the frame 11. The humidifying component 7 is equivalent to spraying an aqueous solution into the set temperature zone. Since the aqueous solution will produce a pyrolysis reaction in a high temperature environment to produce oxygen, and the oxygen content produced by each aqueous solution is fixed, therefore, the humidifying component 7 is used to spray the aqueous solution into the temperature zone to supplement oxygen, thereby improving the sintering quality of the product.

[0043] During the sintering process, the product needs to move stably in each temperature zone at a set speed, and after the atmosphere furnace is started, it cannot be stopped halfway to re-sinter, because the temperature stability in each temperature zone needs to be maintained. Once the engineer adjusts the temperature in each temperature zone, if the machine is stopped halfway, it may cause the temperature of the temperature zone to change, thereby affecting the sintering of subsequent batches of products. Therefore, in order to allow the product to automatically clean the stains on the conveying mesh belt 21 on the feeding mechanism 2 during the sintering process, in one embodiment, the feeding mechanism 2 includes a conveying mesh belt 21, two isolation curtains 22 and an ultrasonic cleaner. The cleaning device 23 and the transmission mesh belt 21 are used to move the product in the heating mechanism 1 at a set speed. The transmission mesh belt 21 completes the movement of the circular mesh belt in the heating mechanism 1 through the driving component, and the top surface of the circular mesh belt is located above the work surface 12, that is, the upper part of the circular mesh belt is located above the work surface 12 from the side view, and the bottom is located below the heating zone. At the same time, the inlet and outlet of the heating mechanism 1 are provided with an isolation curtain 22, and the isolation curtain is used to isolate the external air from the heating mechanism 1 to prevent the external air from entering the heating mechanism 1 and causing the atmosphere content in the temperature zone to change. During the circulation of the circular mesh belt, the mesh belt at the bottom of the heating mechanism 1 will pass through the ultrasonic cleaner 23, and the ultrasonic cleaner 23 will be used to remove the impurities generated by the circular mesh belt during the sintering process, so as to ensure that the height of the installation mesh disk for placing the product will not deviate due to the presence of impurities on the circular mesh belt during the sintering process, thereby affecting the sintering of the product.

[0044] Based on the above-mentioned mesh belt type atmosphere oxidation furnace, the present invention also proposes a reoxidation method of the mesh belt type atmosphere oxidation furnace, comprising the following steps:

[0045] S1: During the sintering process, first obtain the product sintering temperature curve;

[0046] S2: placing the product mesh disk on the feeding mechanism 2 for cyclic feeding, and placing the mesh disks in sequence according to the feeding width of the feeding mechanism 2;

[0047] S3: The heating mechanism 1 sets the temperature of each temperature zone according to the product sintering temperature curve and adjusts the temperature of each temperature zone in real time according to the detection result of the temperature detector so that it meets the set value;

[0048] S4: The blowing mechanism 5 blows the set atmosphere vertically onto the product in each temperature zone, and the atmosphere flows to both sides of the product to wrap the product;

[0049] S5: The exhaust mechanism 4 exhausts the air in each temperature zone through the heat insulation board 6. The air in each temperature zone enters from the air inlet groove 61 at the bottom of the heat insulation board 6, thereby forming a wind wall between the heat insulation boards 6 for heat insulation;

[0050] S6: After sintering is completed, the product is unloaded at the unloading end of the heating mechanism 1. At the same time, continuous loading can be carried out at the loading end during the sintering process of the product. If there is no fault during the sintering process, the heating mechanism 1 will not stop until all products of the same batch have been sintered.

[0051] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A mesh belt atmosphere oxidation furnace, characterized in that: It comprises a heating mechanism, a feeding mechanism, an atmosphere detector, an exhaust mechanism and an air blowing mechanism, wherein the feeding mechanism is installed at the feeding end of the heating mechanism, a plurality of temperature zones connected in sequence are arranged in the heating mechanism, and heat insulation boards are vertically arranged between adjacent temperature zones, a cavity is arranged in the heat insulation board, and air inlet grooves are opened on opposite sides of the bottom thereof, the atmosphere detector is used to detect the atmosphere content in each temperature zone, the air blowing mechanism controls the amount of atmosphere blown according to the detection result of the atmosphere detector, the air inlet groove is connected with the cavity, the air blowing mechanism is installed at the unloading end of the heating mechanism and blows air into each temperature zone, the exhaust mechanism is installed on the top surface of the heating mechanism and the exhaust end is connected with the cavity, the exhaust end of the exhaust mechanism abuts against the pipe wall of the blowing end of the air blowing mechanism, and the exhaust mechanism exhausts the gas in the temperature zone through the air inlet groove; The exhaust mechanism is provided in plurality, and the plurality of exhaust mechanisms are respectively arranged above each temperature zone and communicated with the cavity, and the exhaust mechanism comprises an exhaust pipe and an air inlet nozzle, the bottom end of the exhaust pipe is communicated with the cavity, and the air inlet nozzle is installed at the top end of the exhaust pipe; External air will flow into the exhaust pipe through the air inlet nozzle and then be discharged from the exhaust port of the exhaust pipe, thereby increasing the pressure of the wind wall formed at the bottom of the heat insulation board.

2. A mesh belt type atmosphere oxidation furnace according to claim 1, characterized in that: The opposite side walls of the heat insulation board are both provided with heat insulation layers.

3. The mesh belt type atmosphere oxidation furnace according to claim 1, characterized in that: The heating mechanism includes a frame, a work surface, an upper heating element and a lower heating element. The upper heating element and the lower heating element are both provided with temperature detectors and the heating efficiency is adjusted according to the detection results of the temperature detectors. The upper heating element is arranged above the work surface, and the lower heating element is arranged below the work surface. The upper heating element is arranged in a one-to-one correspondence with each temperature zone, and the lower heating element is composed of a plurality of heating zones, which are sequentially connected and arranged below the work surface and are arranged in a one-to-one correspondence with the upper heating element.

4. A mesh belt type atmosphere oxidation furnace according to claim 3, characterized in that: The upper heating element and the lower heating element are evenly divided into three heating zones along the axis of the work surface. The three heating zones are composed of a number of heating wires. The heating wires are evenly arranged along the axis of the work surface. The heating efficiency of the heating wires can be independently controlled according to the temperature detector.

5. The mesh belt type atmosphere oxidation furnace according to claim 3, characterized in that: The blowing mechanism includes an atmosphere controller and an air inlet pipe, the atmosphere controller is connected to the air inlet pipe, the air inlet pipe is provided with two air outlet ends in each temperature zone, one air outlet end is located at the upper part of the temperature zone and blows air vertically from top to bottom, and the other air outlet end is located below the work table, and a plurality of air inlet holes are opened on the work table in the middle of each temperature zone, and the air inlet is connected to the air outlet end of the air inlet pipe located below the work table.

6. The mesh belt type atmosphere oxidation furnace according to claim 1, characterized in that: The top of the exhaust pipe is also provided with a temperature detection hole, and the temperature detection hole is located below the air inlet nozzle.

7. The mesh belt type atmosphere oxidation furnace according to claim 1, characterized in that: It also includes a humidifying component, which is installed at the bottom of the unloading end of the rack and is used to spray the aqueous solution into the set temperature zone.

8. The mesh belt type atmosphere oxidation furnace according to claim 1, characterized in that: The feeding mechanism includes a transmission mesh belt, two isolation curtains and an ultrasonic cleaner. The transmission mesh belt is used to move the product in the heating mechanism at a set speed. The top surface of the transmission mesh belt is located above the work table. The two isolation curtains are respectively located at the feeding end and the unloading end of the heating mechanism. The ultrasonic cleaner is installed below the feeding end of the heating mechanism and is used to clean the transmission mesh belt.

9. A reoxidation method for a mesh belt type atmosphere oxidation furnace, used in a mesh belt type atmosphere oxidation furnace as claimed in any one of claims 3 to 8, characterized in that: The following steps are involved: S1: Obtain product sintering temperature curve; S2: Place the product on the feeding mechanism with a mesh plate for cyclic feeding; S3: The heating mechanism sets the temperature of each temperature zone according to the product sintering temperature curve and adjusts the temperature of each temperature zone in real time according to the detection result of the temperature detector to make it meet the set value; S4: The blowing mechanism blows the set atmosphere vertically onto the product in each temperature zone, and the atmosphere flows to both sides of the product; S5: The exhaust mechanism exhausts the air in each temperature zone through the insulation board. The air in each temperature zone enters from the air inlet slot at the bottom of the insulation board to form a wind wall between the insulation boards for heat insulation; S6: After sintering is completed, the product is unloaded at the unloading end of the heating mechanism.

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