A device for testing the quality of copper-clad silicon nitride ceramic materials

Abstract

The invention provides a silicon nitride ceramic material copper coating quality detection device, which relates to the technical field of silicon nitride ceramic materials, and comprises a detection platform and a bracket, wherein a guide groove is arranged on the top of the detection platform, and a push block is movably arranged in the guide groove, and electric telescopic rods are arranged at the middle ends of both sides of the detection platform, and the bracket is arranged at the output end of the electric telescopic rod, and a leveling piece is arranged above one end of the bracket, and a plurality of groups of leveling pieces are equidistantly arranged; the leveling piece comprises a sleeve and an insertion rod, and the insertion rod is movably inserted in the interior of the sleeve; the invention carries a silicon nitride ceramic material plate through the detection platform, pushes the material plate forward through the movement of the push block, enters under the plurality of groups of leveling pieces, squeezes the roller, and moves the insertion rod upward in the sleeve, identifies the scale change on the insertion rod through the infrared probe, and inputs it into the control system for flatness analysis, and when the change fluctuates abnormally, the alarm light at the abnormal position lights up, and the overall detection is more comprehensive, efficient, and avoids omissions.

Description

Technical Field

[0001] The invention relates to the technical field of silicon nitride ceramic materials, and in particular to a device for detecting the quality of copper coating of silicon nitride ceramic materials. Background Art

[0002] Silicon nitride is a group of advanced engineering ceramic plates with high strength, fracture toughness, hardness, wear resistance and good chemical and thermal stability. It is an important structural ceramic material with high hardness, inherent lubricity, wear resistance, high temperature resistance and oxidation resistance. It is used as a high-grade refractory material. Silicon nitride ceramic substrate materials have excellent properties such as high thermal stability, strong oxidation resistance and high product dimensional accuracy. Since silicon nitride is a covalent compound with high bonding strength, it can form an oxide protective film in the air. It also has good chemical stability and will not be oxidized below 1200°C. Silicon nitride ceramic physical properties Si3N4 is a compound based on covalent bonds. The bond has strong directionality. The energy required for the formation and migration of defects in the structure is large, that is, the defect diffusion coefficient is low (disadvantage) and it is difficult to sinter. The covalent bond Si-component is 70% and the ionic bond is 30%. At the same time, since the structure of Si3N4 itself is not dense enough, a small amount of oxide sintering aid needs to be added to improve the performance, and it is densified by liquid phase sintering.

[0003] Silicon nitride ceramic copper-clad laminates are widely used in high-reliability power modules in the future new energy vehicle field because they can weld thicker oxygen-free copper and have higher reliability. Silicon nitride ceramic substrates need to be selected according to IGBT requirements and made into plates using appropriate copper cladding. The quality of the copper cladding is very important, so it is necessary to sample the material for copper cladding flatness and other tests. In the prior art, when testing the surface flatness, a manual method is generally used. The operator moves the degree meter to test the flatness of the entire copper-clad laminate and marks the areas with flatness problems. The overall detection efficiency is low and it is very easy to miss. Therefore, the present invention proposes a silicon nitride ceramic material copper cladding quality detection device to solve the problems existing in the prior art. Summary of the invention

[0004] In view of the above problems, the present invention proposes a device for detecting the quality of copper coating of silicon nitride ceramic materials. The device for detecting the quality of copper coating of silicon nitride ceramic materials has more comprehensive overall detection, high efficiency and avoids omissions.

[0005] To achieve the purpose of the present invention, the present invention is implemented by the following technical scheme: a silicon nitride ceramic material copper coating quality detection device, comprising a detection platform and a bracket, the top of the detection platform is provided with a guide groove, and a push block is movably provided in the guide groove, the middle ends of both sides of the detection platform are provided with electric telescopic rods, the bracket is provided at the output end of the electric telescopic rod, a leveling piece is provided above one end of the bracket, and a plurality of groups of leveling pieces are equidistantly provided;

[0006] The leveling component includes a sleeve and a rod, the rod is movably inserted in the interior of the sleeve, and a spring is connected between the top of the rod and the top of the interior of the sleeve, a roller is rotatably provided at the bottom of the rod, a side piece is provided below one end of the sleeve, and an infrared probe is provided on the side piece, a transparent window is provided at one end of the sleeve, a scale adapted to the infrared probe is provided at one end of the rod, a signal output end of the infrared probe is wirelessly connected to a control system, and the control system is used to analyze the flatness according to changes in the scale, an alarm light is provided above one end of the sleeve, the control system is electrically connected to the alarm light, and a collision measuring part is provided at one end of the testing platform.

[0007] A further improvement is that a magnetic sleeve is provided above one end of the bracket, and a plurality of groups of magnetic sleeves are provided at equal intervals, and the upper end of the sleeve is magnetically adapted to the magnetic sleeve.

[0008] A further improvement is that rollers are rotatably provided at both ends of the interior of the detection platform, and tracks are wound around two groups of the rollers, the lower end of the push block is connected to the tracks, and one group of the rollers is driven to rotate by a first motor.

[0009] A further improvement is that both sides of the top of the detection platform are provided with ribs, and guide rollers are rotatably provided inside the ribs, and a plurality of groups of guide rollers are equidistantly provided.

[0010] A further improvement is that the collision detection part includes a side frame and a slide seat, the side frame is arranged at one end of the detection platform, the slide seat is movably arranged at one end of the side frame, an axis plate is provided at one end of the slide seat, and a winding roller is rotatably provided on the inner side of the axis plate, a connecting line is wound on the winding roller, and a accommodating bucket is provided below the connecting line.

[0011] A further improvement is that the containing bucket is used to contain the counterweight, and a rubber sheet is provided at the bottom of the containing bucket, and an opening and closing door is provided at one side of the containing bucket.

[0012] Further improvements are: a first bevel gear is connected to one side of the winding roller, a mounting plate is provided on one side of one end of the slide, and a second motor is rotatably provided on the inner side of the mounting plate, a second bevel gear is provided at the output end of the second motor, the second bevel gear is adapted to the first bevel gear, a third motor is provided on the top of the mounting plate, and the output end of the third motor is connected to the side of the second motor.

[0013] Further improvements are: a slide groove is provided at one end of the side frame, and a screw rod is rotatably provided inside the slide groove, a fourth motor is provided above one side of the side frame, and the output end of the fourth motor is connected to the screw rod, a drive block is provided at one end of the slide seat, and the drive block extends into the slide groove and is adapted to the screw rod thread.

[0014] A further improvement is that the control system includes a data analysis module, a manual input module and an alarm output module, the manual input module is used to manually input the parameter threshold range of the copper-clad silicon nitride ceramic material currently being detected, and the data analysis module is used to analyze the scale change value recognized by the infrared probe, compare it with the parameter threshold range of the copper-clad silicon nitride ceramic material currently being detected, and determine abnormal fluctuations.

[0015] A further improvement is that the output end of the data analysis module is connected to the alarm output module for outputting the analysis conclusion of the abnormal fluctuation, and the alarm output module controls the alarm light at the designated position to start according to the analysis conclusion.

[0016] The beneficial effects of the present invention are:

[0017] 1. The present invention carries a silicon nitride ceramic material plate on a testing table, pushes the material plate forward by moving a push block, enters under multiple groups of leveling parts, squeezes rollers, and moves the insertion rod upward in the casing. The change in scale on the insertion rod is identified by an infrared probe and input into a control system for flatness analysis. When the change fluctuates abnormally, the alarm light at the abnormal position lights up, making the overall detection more comprehensive and efficient, and avoiding omissions.

[0018] 2. The present invention can disassemble and assemble the leveling component according to the width of the material plate through the magnetic adaptation effect of the upper end of the sleeve and the magnetic sleeve, and is suitable for the detection of material plates with different widths, and has a wide range of applications.

[0019] 3. In the present invention, when the material plate is pushed to the rear, the second motor drives the second bevel gear to rotate, so that the first bevel gear rotates, drives the winding roller to rotate, winds the connecting line, and lifts the containing bucket. Then the third motor drives the second motor to rotate, so that the second bevel gear and the first bevel gear are disengaged. Under the action of gravity, the winding roller rotates to lower the containing bucket and hits the copper coating of the material plate, which is convenient for detecting its anti-collision performance and has diversified functions. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a front view of the present invention;

[0021] Figure 2 It is a schematic diagram of the leveling member of the present invention;

[0022] Figure 3 For the present invention Figure 1 Schematic diagram of the structure at A in the middle;

[0023] Figure 4 It is a schematic diagram of the interior of the detection platform of the present invention;

[0024] Figure 5 It is a schematic diagram of the collision detection part of the present invention.

[0025] Among them: 1. test table; 2. bracket; 3. guide groove; 4. push block; 5. electric telescopic rod; 6. sleeve; 7. plug rod; 8. roller; 9. side plate; 10. infrared probe; 11. transparent window; 12. alarm light; 13. magnetic sleeve; 14. roller; 15. crawler; 16. first motor; 17. rib; 18. guide roller; 19. side frame; 20. slide seat; 21. shaft plate; 22. winding roller; 23. connecting line; 24. containing bucket; 25. rubber; 26. opening and closing door; 27. first bevel gear; 28. mounting plate; 29. ​​second motor; 30. second bevel gear; 31. third motor; 32. slide groove; 33. screw rod; 34. fourth motor. DETAILED DESCRIPTION

[0026] In order to deepen the understanding of the present invention, the present invention will be further described in detail below in conjunction with examples. The examples are only used to explain the present invention and do not constitute a limitation on the protection scope of the present invention.

[0027] Embodiment 1

[0028] according to Figure 1 , 2 As shown in Figures 3, 4 and 5, this embodiment proposes a copper-clad quality inspection device for silicon nitride ceramic materials, comprising an inspection platform 1 and a bracket 2, wherein a guide groove 3 is provided on the top of the inspection platform 1, and a push block 4 is movably provided in the guide groove 3, electric telescopic rods 5 are provided at the middle ends of both sides of the inspection platform 1, the bracket 2 is provided at the output end of the electric telescopic rod 5, and a leveling piece is provided above one end of the bracket 2, and a plurality of groups of leveling pieces are equidistantly provided;

[0029] The leveling component includes a sleeve 6 and a rod 7, the rod 7 is movably inserted in the sleeve 6, and a spring is connected between the top of the rod 7 and the top of the sleeve 6, a roller 8 is rotatably provided at the bottom of the rod 7, a side piece 9 is provided below one end of the sleeve 6, and an infrared probe 10 is provided on the side piece 9, a transparent window 11 is provided at one end of the sleeve 6, a scale adapted to the infrared probe 10 is provided at one end of the rod 7, a signal output end of the infrared probe 10 is wirelessly connected to a control system, and the control system is used to analyze the flatness according to the change of the scale, an alarm light 12 is provided above one end of the sleeve 6, the control system is electrically connected to the alarm light 12, and a collision measuring part is provided at one end of the detection platform 1. When in use, the silicon nitride ceramic material plate is carried by the detection table 1, and the material plate is pushed forward by the push block 4 to enter under the multiple groups of leveling parts, squeezing the roller 8 to make the insertion rod 7 move upward in the sleeve 6, and the scale change on the insertion rod 7 is identified by the infrared probe 10, and input into the control system for flatness analysis. When the change shows abnormal fluctuations, the alarm light 12 at the abnormal position lights up, and the overall detection is more comprehensive.

[0030] A magnetic suction sleeve 13 is provided above one end of the bracket 2, and a plurality of magnetic suction sleeves 13 are provided at equal intervals, and the upper end of the sleeve 6 is magnetically adapted to the magnetic suction sleeve 13. When in use, through the magnetic adaptation of the upper end of the sleeve 6 and the magnetic suction sleeve 13, the leveling piece can be disassembled and assembled according to the width of the material plate, and the detection of material plates of different widths can be adapted, and the application range is wide.

[0031] Rollers 14 are rotatably provided at both ends of the interior of the testing platform 1, and tracks 15 are wound around two groups of the rollers 14. The lower end of the push block 4 is connected to the track 15, and one group of the rollers 14 is driven to rotate by a first motor 16. When in use, the first motor 16 drives the rollers 14 to rotate, drives the track 15 to run, drives the push block 4 to move, and carries the silicon nitride ceramic material plate through the testing platform 1, and pushes the material plate forward by the push block 4 moving out of the guide groove 3.

[0032] Both sides of the top of the test platform 1 are provided with ribs 17, and guide rollers 18 are rotatably provided inside the ribs 17, and multiple groups of guide rollers 18 are equidistantly provided. When in use, the ribs 17 on both sides limit the silicon nitride ceramic material plate to prevent it from falling off the test platform 1, and the guide rollers 18 and the silicon nitride ceramic material plate are in rolling contact to prevent wear.

[0033] The collision detection part includes a side frame 19 and a slide 20. The side frame 19 is arranged at one end of the detection platform 1. The slide 20 is movably arranged at one end of the side frame 19. An axis plate 21 is arranged at one end of the slide 20, and a winding roller 22 is rotatably arranged inside the axis plate 21. A connecting line 23 is wound around the winding roller 22, and a receiving bucket 24 is arranged below the connecting line 23. The receiving bucket 24 is used to accommodate a counterweight, and a rubber 25 is arranged at the bottom of the receiving bucket 24. A door 26 is arranged at one side of the receiving bucket 24. A first bevel gear 27 is connected to one side of the winding roller 22. A mounting plate 28 is arranged at one side of one end of the slide 20, and a second motor 29 is rotatably arranged inside the mounting plate 28. A second bevel gear 30 is arranged at the output end of the second motor 29, and the second bevel gear 30 is matched with the first bevel gear 27. A third motor 31 is arranged at the top of the mounting plate 28, and the output end of the third motor 31 is connected to the side of the second motor 29. During use, when the material plate is pushed to the rear, the second motor 29 drives the second bevel gear 30 to rotate, so that the first bevel gear 27 rotates, drives the winding roller 22 to rotate, winds the connecting line 23, and lifts the containing bucket 24. Then the third motor 31 drives the second motor 29 to rotate, so that the second bevel gear 30 and the first bevel gear 27 are disengaged. Under the action of gravity, the winding roller 22 rotates to lower the containing bucket 24, and hits the copper coating of the material plate, so as to facilitate the detection of its anti-collision performance. The containing bucket 24 contains a counterweight block. The weight of the counterweight block can be adjusted by opening the opening and closing door 26, so as to perform anti-collision detection with different impact forces.

[0034] A slide slot 32 is provided at one end of the side frame 19, and a screw rod 33 is rotatably provided inside the slide slot 32. A fourth motor 34 is provided above one side of the side frame 19, and the output end of the fourth motor 34 is connected to the screw rod 33. A driving block is provided at one end of the slide seat 20, and the driving block extends into the slide slot 32 and is threadedly adapted to the screw rod 33. When in use, the fourth motor 34 drives the screw rod 33 to rotate, and by means of the threaded action with the driving block, the slide seat 20 is driven to move along the slide slot 32, and the position where the receiving bucket 24 hits is changed.

[0035] Embodiment 2

[0036] according to Figure 1 , 2 As shown in Figures 3, 4 and 5, this embodiment proposes a copper-clad quality inspection device for silicon nitride ceramic materials, comprising an inspection platform 1 and a bracket 2, wherein a guide groove 3 is provided on the top of the inspection platform 1, and a push block 4 is movably provided in the guide groove 3, electric telescopic rods 5 are provided at the middle ends of both sides of the inspection platform 1, the bracket 2 is provided at the output end of the electric telescopic rod 5, and a leveling piece is provided above one end of the bracket 2, and a plurality of groups of leveling pieces are equidistantly provided;

[0037] The leveling component includes a sleeve 6 and a rod 7, the rod 7 is movably inserted in the sleeve 6, and a spring is connected between the top of the rod 7 and the top of the sleeve 6, a roller 8 is rotatably provided at the bottom of the rod 7, a side piece 9 is provided below one end of the sleeve 6, and an infrared probe 10 is provided on the side piece 9, a transparent window 11 is provided at one end of the sleeve 6, a scale adapted to the infrared probe 10 is provided at one end of the rod 7, a signal output end of the infrared probe 10 is wirelessly connected to a control system, and the control system is used to analyze the flatness according to the change of the scale, an alarm light 12 is provided above one end of the sleeve 6, the control system is electrically connected to the alarm light 12, and a collision measuring part is provided at one end of the detection platform 1. When in use, the silicon nitride ceramic material plate is carried by the detection table 1, and the material plate is pushed forward by the push block 4 to enter under the multiple groups of leveling parts, squeezing the roller 8 to make the insertion rod 7 move upward in the sleeve 6, and the scale change on the insertion rod 7 is identified by the infrared probe 10, and input into the control system for flatness analysis. When the change shows abnormal fluctuations, the alarm light 12 at the abnormal position lights up, and the overall detection is more comprehensive.

[0038] A magnetic suction sleeve 13 is provided above one end of the bracket 2, and a plurality of magnetic suction sleeves 13 are provided at equal intervals, and the upper end of the sleeve 6 is magnetically adapted to the magnetic suction sleeve 13. When in use, through the magnetic adaptation of the upper end of the sleeve 6 and the magnetic suction sleeve 13, the leveling piece can be disassembled and assembled according to the width of the material plate, and the detection of material plates of different widths can be adapted, and the application range is wide.

[0039] The control system includes a data analysis module, a manual input module and an alarm output module. The manual input module is used to manually input the parameter threshold range of the copper-clad silicon nitride ceramic material currently being detected. The data analysis module is used to analyze the scale change value identified by the infrared probe 10, and compare it with the parameter threshold range of the copper-clad silicon nitride ceramic material currently being detected to determine abnormal fluctuations. The output end of the data analysis module is connected to the alarm output module, which is used to output the analysis conclusion of the abnormal fluctuation. The alarm output module controls the alarm light 12 at the specified position to start according to the analysis conclusion. When in use, the material plate moves forward and enters under the multiple groups of leveling parts, squeezing the roller 8 so that the insertion rod 7 moves upward in the sleeve 6. The scale change on the insertion rod 7 is identified by the infrared probe 10 and input into the control system for flatness analysis. When the change shows abnormal fluctuations, the alarm light 12 at the abnormal position lights up, and the overall detection is more comprehensive.

[0040] The copper-clad quality inspection device for silicon nitride ceramic material carries a silicon nitride ceramic material plate through the inspection table 1, pushes the material plate forward through the push block 4, enters under the multiple groups of leveling parts, squeezes the roller 8, and makes the insertion rod 7 move upward in the sleeve 6. The infrared probe 10 identifies the scale change on the insertion rod 7, and inputs it to the control system for flatness analysis. When the change fluctuates abnormally, the alarm light 12 at the abnormal position lights up, and the overall inspection is more comprehensive and efficient to avoid omissions. And through the magnetic adaptation of the upper end of the sleeve 6 and the magnetic sleeve 13, the leveling parts can be disassembled and assembled according to the width of the material plate, and adapted to the inspection of material plates of different widths, with a wide range of applications. At the same time, when the material plate is pushed to the rear, the second motor 29 drives the second bevel gear 30 to rotate, so that the first bevel gear 27 rotates, drives the winding roller 22 to rotate, winds the connecting line 23, and lifts the containing bucket 24. Then the third motor 31 drives the second motor 29 to rotate, so that the second bevel gear 30 and the first bevel gear 27 are disengaged. Under the action of gravity, the winding roller 22 rotates to lower the containing bucket 24 and hits the copper coating of the material plate, which is convenient for detecting its anti-collision performance and has diversified functions.

[0041] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A device for detecting the quality of copper-clad silicon nitride ceramic materials, comprising a detection platform (1) and a bracket (2), characterized in that: A guide groove (3) is provided on the top of the detection platform (1), and a push block (4) is movably provided in the guide groove (3). Electric telescopic rods (5) are provided at the middle ends of both sides of the detection platform (1). The bracket (2) is provided at the output end of the electric telescopic rod (5). A leveling piece is provided above one end of the bracket (2), and a plurality of groups of leveling pieces are provided at equal intervals. The leveling component comprises a sleeve (6) and an insertion rod (7), wherein the insertion rod (7) is movably inserted into the interior of the sleeve (6), and a spring is connected between the top of the insertion rod (7) and the top of the interior of the sleeve (6), and a roller (8) is rotatably provided at the bottom of the insertion rod (7), a side piece (9) is provided below one end of the sleeve (6), and an infrared probe (10) is provided on the side piece (9), and a transparent window (11) is provided at one end of the sleeve (6), and a scale adapted to the infrared probe (10) is provided at one end of the insertion rod (7), and a signal output end of the infrared probe (10) is wirelessly connected to a control system, and the control system is used to analyze the flatness according to changes in the scale, and an alarm light (12) is provided above one end of the sleeve (6), and the control system is electrically connected to the alarm light (12), and a collision measuring part is provided at one end on the detection platform (1); The collision detection part comprises a side frame (19) and a slide seat (20), wherein the side frame (19) is arranged at one end of the detection platform (1), and the slide seat (20) is movably arranged at one end of the side frame (19), and an axis plate (21) is arranged at one end of the slide seat (20), and a winding roller (22) is rotatably arranged inside the axis plate (21), a connecting line (23) is wound around the winding roller (22), and a receiving bucket (24) is arranged below the connecting line (23), the receiving bucket (24) is used to receive a counterweight, and a rubber sheet (25) is arranged at the bottom of the receiving bucket (24), and the receiving bucket (24) is provided with a rubber sheet (25). A first bevel gear (27) is connected to one side of the winding roller (22); a mounting plate (28) is provided on one side of one end of the slide seat (20); a second motor (29) is rotatably provided inside the mounting plate (28); a second bevel gear (30) is provided at the output end of the second motor (29); the second bevel gear (30) is matched with the first bevel gear (27); a third motor (31) is provided on the top of the mounting plate (28); and the output end of the third motor (31) is connected to the side of the second motor (29).

2. A silicon nitride ceramic material copper coating quality detection device according to claim 1, characterized in that: A magnetic suction sleeve (13) is provided above one end of the bracket (2), and a plurality of groups of magnetic suction sleeves (13) are provided at equal intervals. The upper end of the sleeve (6) is magnetically adapted to the magnetic suction sleeves (13).

3. A silicon nitride ceramic material copper coating quality detection device according to claim 1, characterized in that: Rollers (14) are rotatably provided at both ends of the interior of the detection platform (1), and tracks (15) are wound around two groups of the rollers (14). The lower end of the push block (4) is connected to the track (15), and one group of the rollers (14) is driven to rotate by a first motor (16).

4. A device for detecting copper-clad quality of silicon nitride ceramic material according to claim 3, characterized in that: Both sides of the top of the detection platform (1) are provided with ribs (17), and guide rollers (18) are rotatably provided inside the ribs (17), and a plurality of groups of guide rollers (18) are equidistantly provided.

5. The device for detecting copper-clad quality of silicon nitride ceramic material according to claim 1, characterized in that: A slide groove (32) is provided at one end of the side frame (19), and a screw rod (33) is rotatably provided inside the slide groove (32). A fourth motor (34) is provided above one side of the side frame (19), and an output end of the fourth motor (34) is connected to the screw rod (33). A driving block is provided at one end of the slide seat (20), and the driving block extends into the slide groove (32) and is threadably adapted to the screw rod (33).

6. The device for detecting copper-clad quality of silicon nitride ceramic material according to claim 1, characterized in that: The control system comprises a data analysis module, a manual input module and an alarm output module, the manual input module being used to manually input a parameter threshold range of the copper-clad silicon nitride ceramic material being currently detected, and the data analysis module being used to analyze a scale change value identified by the infrared probe (10), compare it with the parameter threshold range of the copper-clad silicon nitride ceramic material being currently detected, and determine abnormal fluctuations.

7. A device for detecting copper-clad quality of silicon nitride ceramic material according to claim 6, characterized in that: The output end of the data analysis module is connected to the alarm output module for outputting the analysis conclusion of the abnormal fluctuation. The alarm output module controls the alarm light (12) at the designated position to start according to the analysis conclusion.

Images