A high concentration ozone water generator for PCB process cleaning

Abstract

The present invention relates to the technical field of ozone water preparation, and specifically discloses a high-concentration ozone water generating device for PCB process cleaning, including a dissolution box and an ozone generator, wherein a coil for conveying water is arranged in the dissolution box, and the two ends of the coil are respectively arranged to penetrate the side wall of the dissolution box, and the end of the coil close to the dissolution box is connected to an ejector through a flange, and a regulating component for regulating the water pressure in the coil is arranged on the side of the dissolution box away from the ozone generator, and an ozone delivery pipe is arranged in the dissolution box, and a regulating component for regulating the ozone flow rate is arranged between the ozone delivery pipe and the ozone generator, and multiple groups of drainage components are arranged between the ozone delivery pipe and the coil. The present invention has a multi-point equal-rate conveying structure for ozone, a linear regulating function for water pressure, and a linear automatic regulating structure for ozone delivery rate, thereby improving the ozone dissolution efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of ozone water preparation, and in particular to a high-concentration ozone water generating device for PCB process cleaning. Background Art

[0002] During the PCB process cleaning, since traditional organic solvents such as CFC-113 have a destructive effect on the atmospheric ozone layer and have been banned, the use of ozone water is an environmentally friendly choice. Ozone water is generated by converting oxygen into ozone through an ozone generator and then dissolving ozone in water. The ozone generator mainly uses corona discharge to decompose and recombine oxygen molecules in air or oxygen to generate ozone through a high-frequency and high-voltage electric field. In the process of ozone and water dissolution, the dissolution efficiency of ozone is related to water temperature, water pressure and ozone intake rate.

[0003] There are three methods for producing ozone water at present: the first is the mixed ozone dosing method, the second is the ozone dosing method using an ejector in the water tank, and the third is the mixed dosing method using aeration stones. The first mixed ozone dosing method is mainly composed of an ozone generator, a gas-liquid mixing pump and a reaction tank. It is characterized by simple maintenance, easy design and operation of large-scale equipment. However, its design disadvantages are large size, long time required for unit ozone water concentration, and high cost. The third method is the ozone aeration stone mixed dosing method, which mainly includes an ozone generator, a water tank and aeration stones. This method is simple and crude, inefficient, and produces low ozone concentration. The second method is generally used.

[0004] At present, the ozone water generating device adopts the method of circulating ozone in the water tank. During use, ozone is generally added at a single point at the water inlet, resulting in the problem that the ozone solubility is not high enough and the dissolution efficiency is not high enough. In addition, the water pressure is generally adjusted by the water supply pump body, resulting in insufficient water pressure adjustment accuracy and insufficient ozone dissolution efficiency. Summary of the invention

[0005] In order to solve the above problems existing in the prior art, the present invention provides a high-concentration ozone water generating device for PCB process cleaning, which can overcome the technical problems.

[0006] The purpose of the present invention can be achieved through the following technical solutions:

[0007] A high-concentration ozone water generating device for PCB process cleaning, comprising a dissolution box and an ozone generator, wherein a coil for conveying water is arranged in the dissolution box, and both ends of the coil are respectively arranged to penetrate the side wall of the dissolution box, and an end of the coil close to the dissolution box is connected to an ejector through a flange, and a regulating component for regulating the water pressure in the coil is arranged on the side of the dissolution box away from the ozone generator, an ozone delivery pipe is arranged in the dissolution box, and the ozone delivery pipe is located below the coil, and a regulating component for regulating the ozone flow rate is arranged between the ozone delivery pipe and the ozone generator, and multiple groups of drainage components are arranged between the ozone delivery pipe and the coil, and a cold air introduction pipe is arranged on the side of the dissolution box away from the ozone generator, and the cold air introduction pipe is used to connect to a refrigeration device;

[0008] The regulating assembly comprises a regulating box, the regulating box is fixedly mounted on a side of the dissolution box away from the ozone generator, a drain pipe is arranged on the side of the regulating box away from the dissolution box, a pressure sensor is arranged on the side wall of the regulating box, limit rails are fixedly mounted on the inner walls on both sides facing each other, a support frame is fixedly mounted between the two limit rails, two water stop plates are slidably mounted between the two limit rails, the two water stop plates are respectively attached to the two sides of the support frame, and a driving assembly for driving the two water stop plates to slide in opposite directions is arranged in the regulating box;

[0009] The drainage assembly includes a support tube, a drainage tube and a diffuser, the support tube is fixedly installed on the top wall of the ozone delivery pipe, the drainage tube passes through and is fixedly installed on the top wall of the support tube, the diffuser is fixedly installed on the side wall of the coil, a connecting pipe is fixedly sleeved between the drainage tube and the diffuser, an air inlet tube is passed through and fixedly installed on the bottom wall of the drainage tube, a plurality of flow limiting ports are arranged on the side wall of the air inlet tube, a flow limiting assembly for limiting the flow rate of ozone is arranged in the support tube, an ozone generator generates ozone, and the ozone enters the ozone delivery pipe through the drainage tube, and the ozone in the ozone delivery pipe flows to the plurality of support tubes and drainage tubes respectively, the drainage tube slides upward under the action of the internal and external pressure difference, the spring is compressed, the air inlet tube extends downward into the drainage tube, the ozone enters the coil from the plurality of drainage assemblies, is transported at multiple points at equal rates, the ozone is dissolved in the coil to form ozone water, and is discharged from the drain pipe of the regulating box, so that a multi-point equal rate transport structure for ozone is provided, thereby improving the ozone dissolution efficiency.

[0010] Preferably, the end of the ozone delivery pipe away from the ozone generator is closed, and the ozone delivery pipe is fixedly sleeved with two support plates, and the support plates are fixedly connected to the bottom wall of the dissolution box.

[0011] Preferably, the regulating component comprises a drainage tube, both ends of which are fixedly connected to the ozone exhaust pipe and the ozone delivery pipe respectively, an air pump is provided on the side wall of the drainage tube, and a solenoid valve is provided on the side wall of the drainage tube.

[0012] Preferably, the support frame is arranged parallel to the radial direction of the coil outlet. The support frame is in the shape of a Chinese character 'Ri' (日). Rubber layers are provided on the sides of the water stop plates that are in contact with the support frame. The height of the water stop plates is half of the height of the support frame.

[0013] Preferably, the driving assembly includes two screws. Support blocks are fixedly installed at the central positions on the sides of the two water stop plates that are away from each other. The screws pass through and are rotatably installed in the adjustment box. The screws are threadedly connected to the adjacent support blocks. First gears are installed at the tops of the screws. A U-shaped frame is fixedly installed at the top of the adjustment box. Two rotating shafts are rotatably installed in the U-shaped frame. Second gears are fixedly sleeved on the rotating shafts. The two second gears are meshed with each other. The second gears are meshed with the adjacent first gears. A servo motor is arranged at the top of the U-shaped frame. The output shaft of the servo motor is fixedly connected to the adjacent rotating shaft through a coupling.

[0014] Preferably, two bushings are respectively arranged through the top and bottom of the adjustment box. The bushings are rotatably connected to the adjacent screws.

[0015] Preferably, the flow-limiting assembly includes an annular plate. The annular plate is slidably sleeved in the support cylinder. A flow-limiting cylinder is fixedly installed on the inner wall of the annular plate. The flow-limiting cylinder is slidably sleeved with the air inlet cylinder. A rubber layer is provided on the outer wall of the air inlet cylinder. A spring is installed between the top of the annular plate and the top wall of the support cylinder. A first stop ring and a second stop ring are fixedly installed on the inner wall of the support cylinder. The first stop ring and the second stop ring are located on both sides of the annular plate.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. By providing a dissolution tank, a coil, an ozone delivery pipe, and multiple groups of drainage components, the beneficial effect that can be obtained is that after the water flow passes through the ejector and then enters the coil of the ozone water generating device, the ozone generator generates ozone. The ozone enters the ozone delivery pipe through the drainage pipe. The ozone in the ozone delivery pipe flows to multiple support cylinders and drainage cylinders respectively. The drainage cylinders slide upward under the action of the internal and external pressure difference, the spring is compressed, the air inlet cylinder extends downward into the drainage cylinder, and the ozone enters the coil from the flow-limiting orifice, the air inlet cylinder, the connecting pipe, and the diffuser in the drainage cylinder, and is transported at a constant rate at multiple points. The ozone dissolves in the coil to form ozone water, which is discharged through the drain pipe of the adjustment box. It has a structure for transporting ozone at a constant rate at multiple points, improving the ozone dissolution efficiency.

[0018] 2. By setting up an adjustment component for adjusting the water pressure in the coil, the beneficial effect that can be obtained is that the servo motor drives the adjacent rotating shaft to rotate, driving the two second gears to mesh and transmit, and the two first gears are respectively meshed and transmitted with the adjacent second gears, driving the two screws to rotate in the opposite direction, driving the two water stop plates to slide in the opposite direction, and cooperating with the pressure sensor to linearly adjust the water pressure. The pressure sensor monitors the water pressure in the adjustment box and uploads the signal to the PLC controller, and then feeds back to the servo motor to adjust the discharge rate and water pressure of the ozone water in the coil. The higher the water pressure, the higher the solubility of ozone. It has the function of linearly adjusting the water pressure, which improves the solubility of ozone and the concentration of ozone water.

[0019] 3. By setting a flow limiting component, the beneficial effect that can be obtained is that the ozone in the ozone delivery pipe flows to multiple support cylinders and drainage cylinders respectively, the drainage cylinder slides upward due to the internal and external pressure difference, the spring is compressed, the air inlet cylinder extends downward into the drainage cylinder, and the ozone enters the coil from the flow limiting port, air inlet port, connecting pipe and diffuser in the drainage cylinder, and is transported at multiple points at equal rates. The second stop ring limits the highest position of the ring plate and the maximum area of ​​the flow limiting port in the drainage cylinder, which has a linear automatic adjustment structure for the ozone delivery rate and improves the ozone supply effect.

[0020] 4. By setting up a cold air inlet pipe, a beneficial effect can be obtained that refrigeration equipment, such as a refrigerator, sends cold air of a preset temperature into the dissolution box through the cold air inlet pipe, adjusts the temperature in the dissolution box, and increases the solubility of ozone in water. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a structural diagram of the installation of the coil in the present invention;

[0024] Figure 3 is a cross-sectional view of the regulating box in the present invention;

[0025] Figure 4 An exploded view of the drive assembly of the present invention;

[0026] Figure 5 This is a diagram of the installation structure of the support tube and the diffuser in the present invention;

[0027] Figure 6 The figure is a structural diagram of the installation of the flow limiting cylinder and the air intake cylinder in the present invention;

[0028] Figure 7 It is a cross-sectional view of the support tube in the present invention.

[0029] Description of reference numerals:

[0030] In the figure: 1, dissolution box; 11, cold air inlet pipe; 2, ozone generator; 21, ozone exhaust pipe; 3, coil; 31, ejector; 32, regulating box; 33, drain pipe; 34, pressure sensor; 35, limit rail; 36, support frame; 37, water stop plate; 4, ozone delivery pipe; 41, support plate; 42, drainage pipe; 43, air pump; 44, solenoid valve; 51, support block; 52, screw; 53, bushing; 54, first gear; 55, U-shaped frame; 56, rotating shaft; 57, second gear; 58, servo motor; 61, support cylinder; 62, drainage cylinder; 63, diffuser; 64, connecting pipe; 65, air inlet cylinder; 66, flow limiting port; 71, ring plate; 72, flow limiting cylinder; 73, spring; 74, first stop ring; 75, second stop ring. DETAILED DESCRIPTION

[0031] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are clearly and completely described below in combination with the accompanying drawings and preferred embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In the description of the present application, it should be understood that the orientation or position relationship indicated by "inside", "outside", etc. is based on the orientation or position described in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, a specific orientation structure and operation, and therefore cannot be understood as a limitation on the present application.

[0033] Reference Figure 1 and Figure 2, is a high-concentration ozone water generating device for PCB process cleaning disclosed by the present invention, comprising a dissolution box 1 and an ozone generator 2, a coil 3 for conveying water is arranged in the dissolution box 1, both ends of the coil 3 are respectively penetrated with the side wall of the dissolution box 1, and have a drainage function, an ejector 31 is connected to the end of the coil 3 close to the dissolution box 1 through a flange, an ozone delivery pipe 4 is arranged in the dissolution box 1, the ozone delivery pipe 4 is located below the coil 3, and the end of the ozone delivery pipe 4 away from the ozone generator 2 is closed, two support plates 41 are fixedly sleeved on the ozone delivery pipe 4, the support plate 41 is fixedly connected to the bottom wall of the dissolution box 1, and has a supporting function, a regulating component for adjusting the ozone flow rate is arranged between the ozone delivery pipe 4 and the ozone generator 2, and the regulating component includes a drainage pipe 42, and both ends of the drainage pipe 42 are respectively connected to the ozone exhaust The tube 21 and the ozone delivery pipe 4 are fixedly connected, and an air pump 43 is arranged on the side wall of the drainage pipe 42, which has the function of pumping ozone. An electromagnetic valve 44 is arranged on the side wall of the drainage pipe 42, which has the function of quickly opening and closing. A cold air inlet pipe 11 is arranged on the side of the dissolution box 1 away from the ozone generator 2. The cold air inlet pipe 11 is used to connect the refrigeration equipment. The water flows through the ejector 31 and then enters the coil 3 of the ozone water generating device. The ozone generator 2 generates ozone, and the ozone enters the ozone delivery pipe 4 through the drainage pipe 42. The refrigeration equipment, such as a refrigerator, delivers cold air of a preset temperature into the dissolution box 1 through the cold air inlet pipe 11, adjusts the temperature in the dissolution box 1, and increases the solubility of ozone in water. The material of the coil 3 is not particularly limited as long as it meets the anti-ozone performance and thermal conductivity. For example, alumina ceramics can be listed, but it is not limited to these.

[0034] Reference Figure 2-Figure 4, on the side of the dissolution tank 1 far from the ozone generator 2, an adjustment assembly for adjusting the water pressure in the coil 3 is provided. The adjustment assembly includes an adjustment box 32, which is fixedly installed on the side of the dissolution tank 1 far from the ozone generator 2 and has a supporting function. On the side of the adjustment box 32 far from the dissolution tank 1, a drain pipe 33 is provided, which has a drainage function. On the side wall of the adjustment box 32, a pressure sensor 34 is provided for monitoring the water pressure. Outside the dissolution tank 1, a PLC controller is provided. The pressure sensor 34 is connected to the input end of the PLC controller. On the inner walls of the opposite sides of the adjustment box 32, limiting rails 35 are fixedly installed. Between the two limiting rails 35, a support frame 36 is fixedly installed. The support frame 36 is arranged parallel to the radial direction of the outlet of the coil 3. The support frame 36 is arranged in a "day" shape and has a supporting function. Between the two limiting rails 35, two water stop plates 37 are slidably installed. The two water stop plates 37 are respectively attached to both sides of the support frame 36 and have a current-limiting function. Rubber layers are provided on the sides of the water stop plates 37 that are attached to the support frame 36. The height of the water stop plates 37 is half of the height of the support frame 36. In the adjustment box 32, a driving assembly for driving the two water stop plates 37 to slide in opposite directions is provided. The driving assembly includes two screw rods 52. At the central positions of the sides of the two water stop plates 37 away from each other, support blocks 51 are fixedly installed. The screw rods 52 penetrate and are rotatably installed in the adjustment box 32. The screw rods 52 are threadedly connected to the adjacent support blocks 51. At the top and bottom of the adjustment box 32, two sleeve bushes 53 are respectively penetrated. The sleeve bushes 53 are rotatably connected to the adjacent screw rods 52. At the top of the screw rods 52, first gears 54 are installed. At the top of the adjustment box 32, a U-shaped frame 55 is fixedly installed. In the U-shaped frame 55, two rotating shafts 56 are rotatably installed. The rotating shafts 56 are fixedly sleeved with second gears 57. The two second gears 57 are meshed with each other. The second gears 57 are meshed with the adjacent first gears 54. At the top of the U-shaped frame 55, a servo motor 58 is provided. The output shaft of the servo motor 58 is fixedly connected to the adjacent rotating shaft 56 through a coupling. The servo motor 58 is connected to the output end of the PLC controller. The servo motor 58 drives the adjacent rotating shaft 56 to rotate, driving the two second gears 57 to mesh and drive. The two first gears 54 are respectively meshed with the adjacent second gears 57 to drive, driving the two screw rods 52 to rotate in opposite directions, driving the two water stop plates 37 to slide in opposite directions, and cooperating with the pressure sensor 34 to adjust the discharge rate of the ozone water in the coil 3 and adjust the water pressure.

[0035] Refer to Figure 5-Figure 7, a plurality of drainage components are arranged between the ozone delivery pipe 4 and the coil 3, and the drainage components include a support tube 61, a drainage tube 62 and a diffuser 63, the support tube 61 is fixedly installed on the top wall of the ozone delivery pipe 4, the support tube 61 is communicated with the ozone delivery pipe 4, and has a drainage function, the drainage tube 62 is passed through and fixedly installed on the top wall of the support tube 61, and has a drainage function, the diffuser 63 is fixedly installed on the side wall of the coil 3, and has a drainage function, a connecting pipe 64 is fixedly sleeved between the drainage tube 62 and the diffuser 63, and has a drainage function, an air inlet tube 65 is passed through and fixedly installed on the bottom wall of the drainage tube 62, and a plurality of flow limiting ports 66 are arranged on the side wall of the air inlet tube 65, and have a drainage function, a flow limiting component for limiting the ozone flow rate is arranged in the support tube 61, and the flow limiting component includes a ring plate 71, and the ring plate 71 is slidably sleeved in the support tube 61, and has a supporting function, and the ring plate 7 1 is fixedly installed with a limiting cylinder 72, which is slidably sleeved with the air inlet cylinder 65, and a rubber layer is arranged on the outer wall of the air inlet cylinder 65. A spring 73 is installed between the top of the ring plate 71 and the top wall of the support cylinder 61, and a first stop ring 74 and a second stop ring 75 are fixedly installed on the inner wall of the support cylinder 61. The first stop ring 74 and the second stop ring 75 are located on both sides of the ring plate 71. The ozone in the ozone delivery pipe 4 flows to multiple support cylinders 61 and the drainage cylinder 62 respectively. The drainage cylinder 62 slides upward under the action of the internal and external pressure difference, and the spring 73 is compressed. The air inlet cylinder 65 extends downward into the drainage cylinder 62, and the ozone enters the coil 3 from the limiting port 66, the air inlet cylinder 65, the connecting pipe 64 and the diffuser 63 in the drainage cylinder 62, and is transported at multiple points at equal rates. The second stop ring 75 limits the highest position of the ring plate 71 and limits the maximum area of ​​the limiting port 66 in the drainage cylinder 62.

[0036] The working principle and use process of the present invention are as follows: the water flows through the ejector 31 and then enters the coil 3 of the ozone water generating device, the ozone generator 2 generates ozone, and the ozone enters the ozone delivery pipe 4 through the drainage pipe 42, and the refrigeration equipment, such as a refrigerator, sends cold air of a preset temperature into the dissolution box 1 through the cold air introduction pipe 11, adjusts the temperature in the dissolution box 1, and increases the solubility of ozone in water, the servo motor 58 drives the adjacent rotating shaft 56 to rotate, drives the two second gears 57 to mesh and drive, and the two first gears 54 are respectively meshed and driven with the adjacent second gears 57, driving the two screws 52 rotates in the opposite direction, driving the two water stop plates 37 to slide in the opposite direction, and cooperates with the pressure sensor 34 to adjust the discharge rate and water pressure of oxygen water in the coil 3. The ozone in the ozone delivery pipe 4 flows to the multiple support cylinders 61 and the drainage cylinder 62 respectively. The drainage cylinder 62 slides upward due to the internal and external pressure difference, the spring 73 is compressed, and the air intake cylinder 65 extends downward into the drainage cylinder 62. The ozone enters the coil 3 from the flow restriction port 66, the air intake cylinder 65, the connecting pipe 64 and the diffuser 63 in the drainage cylinder 62, and is transported at multiple points at an equal rate. The ozone dissolves in the coil 3 to form ozone water, which is discharged from the drain pipe 33 of the regulating box 32.

[0037] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A high-concentration ozone water generating device for PCB process cleaning, comprising a dissolution box (1) and an ozone generator (2), Features: The dissolution box (1) is provided with a coil (3) for conveying water, and the two ends of the coil (3) are respectively arranged to penetrate the side wall of the dissolution box (1), and the end of the coil (3) close to the dissolution box (1) is connected to an ejector (31) through a flange, and a regulating component for regulating the water pressure in the coil (3) is provided on the side of the dissolution box (1) away from the ozone generator (2), and an ozone delivery pipe (4) is provided in the dissolution box (1), and the ozone delivery pipe (4) is located below the coil (3), and a regulating component for regulating the ozone flow rate is provided between the ozone delivery pipe (4) and the ozone generator (2), and a plurality of drainage components are provided between the ozone delivery pipe (4) and the coil (3), and a cold air introduction pipe (11) is provided on the side of the dissolution box (1) away from the ozone generator (2), and the cold air introduction pipe (11) is used to connect to a refrigeration device; The regulating assembly comprises a regulating box (32), the regulating box (32) being fixedly mounted on a side of the dissolution box (1) away from the ozone generator (2), a drain pipe (33) being provided on the side of the regulating box (32) away from the dissolution box (1), a pressure sensor (34) being provided on the side wall of the regulating box (32), limit rails (35) being fixedly mounted on the inner walls on both sides facing each other, a support frame (36) being fixedly mounted between the two limit rails (35), two water stop plates (37) being slidably mounted between the two limit rails (35), the two water stop plates (37) being respectively attached to the two sides of the support frame (36), and a driving assembly for driving the two water stop plates (37) to slide in opposite directions being provided in the regulating box (32); The regulating component comprises a drainage tube (42), the two ends of the drainage tube (42) being fixedly connected to the ozone discharge tube (21) and the ozone delivery tube (4) respectively, an air pump (43) being provided on the side wall of the drainage tube (42), and a solenoid valve (44) being provided on the side wall of the drainage tube (42); The driving assembly comprises two screw rods (52), a support block (51) is fixedly installed at the center position of the side away from each other of the two water stop plates (37), the screw rod (52) penetrates and is rotatably installed in the adjustment box (32), the screw rod (52) is threadedly connected to the adjacent support block (51), a first gear (54) is installed at the top of the screw rod (52), a U-shaped frame (55) is fixedly installed at the top of the adjustment box (32), two rotating shafts (56) are rotatably installed in the U-shaped frame (55), a second gear (57) is fixedly sleeved on the rotating shaft (56), the two second gears (57) are meshed, the second gear (57) is meshed with the adjacent first gear (54), a servo motor (58) is arranged at the top of the U-shaped frame (55), and the output shaft of the servo motor (58) is fixedly connected to the adjacent rotating shaft (56) through a coupling; The drainage component includes a support cylinder (61), a drainage cylinder (62) and a diffuser (63). The support cylinder (61) is fixedly installed on the top wall of the ozone delivery pipe (4). The drainage cylinder (62) penetrates and is fixedly installed on the top wall of the support cylinder (61). The diffuser (63) is fixedly installed on the side wall of the coil pipe (3). A connecting pipe (64) is fixedly sleeved between the drainage cylinder (62) and the diffuser (63). The bottom wall of the drainage cylinder (62) penetrates and is fixedly installed with an intake cylinder (65). A plurality of flow-limiting ports (66) are arranged on the side wall of the intake cylinder (65). A flow-limiting component for limiting the ozone flow rate is arranged in the support cylinder (61). The flow-limiting component includes an annular plate (71). The annular plate (71) is slidably sleeved in the support cylinder (61). A flow-limiting cylinder (72) is fixedly installed on the inner wall of the annular plate (71). The flow-limiting cylinder (72) is slidably sleeved with the intake cylinder (65). A rubber layer is arranged on the outer wall of the intake cylinder (65). A spring (73) is installed between the top end of the annular plate (71) and the top wall of the support cylinder (61). A first stop ring (74) and a second stop ring (75) are fixedly installed on the inner wall of the support cylinder (61). The first stop ring (74) and the second stop ring (75) are located on both sides of the annular plate (71).

2. A high-concentration ozone water generating device for PCB process cleaning according to claim 1, characterized in that: One end of the ozone delivery pipe (4) away from the ozone generator (2) is closed. Two support plates (41) are fixedly sleeved on the ozone delivery pipe (4). The support plates (41) are fixedly connected to the bottom wall of the dissolution tank (1).

3. A high-concentration ozone water generating device for PCB process cleaning according to claim 1, characterized in that: The support frame (36) is arranged parallel to the radial direction of the outlet of the coil pipe (3). The support frame (36) is arranged in an "8" shape. Rubber layers are arranged on the sides of the water stop plate (37) that are in contact with the support frame (36). The height of the water stop plate (37) is one-half of the height of the support frame (36).

4. A high-concentration ozone water generating device for PCB process cleaning according to claim 1, characterized in that: Two sleeve bushes (53) penetrate through the top end and the bottom end of the adjustment box (32). The sleeve bushes (53) are rotatably connected to the adjacent screw rods (52).

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