A substrate box storage device

Abstract

The present invention relates to the technical field of substrate processing equipment, and specifically to a substrate box storage device, including a placement rack, which can rotate around its central axis and has a plurality of substrate box storage positions arranged around the central axis; an air supply assembly, which includes an air inlet disk and an air outlet disk that are connected and rotated around the central axis and arranged up and down, an annular ventilation groove is formed between the air inlet disk and the air outlet disk, and the air inlet disk and the air outlet disk are respectively provided with air inlet and air outlet channels connected to the annular ventilation groove, and the air outlet disk is connected to the placement rack; a support rod assembly, the support rod assembly includes a base and a connecting member located above the base, the connecting member has a rod body portion connected to the base for rotation prevention and a pressing portion connected to the upper end of the rod body portion, and the pressing portion presses against the air inlet disk. The substrate box storage device of the present invention is convenient for a robot to take and place substrate boxes, and can press the air inlet disk against the air outlet disk by gravity so as to provide gas with stable pressure for the substrate box on the rotating placement rack.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate processing equipment, and in particular to a substrate box storage device. Background Art

[0002] During the processing of substrates, they need to go through multiple steps and hundreds of processes. In one step, the substrates are stored in substrate boxes, such as reticle stockers. In order to facilitate transportation and storage, the substrate boxes usually need to be stored in a storage device.

[0003] Most traditional storage devices use a square frame structure, which occupies a large space. In this case, the robot for handling needs to move not only horizontally but also vertically, and the running distance is relatively long, which reduces the handling efficiency of the robot. At the same time, when storing substrates, it is necessary to prevent them from coming into contact with the external environment and being oxidized. Therefore, it is necessary to fill the substrate box with inert gas to exclude air and prevent the substrate from being gradually oxidized by air during storage. How to save the storage space of the storage device, improve the handling efficiency of the robot, and provide the substrate box with gas with stable pressure is a technical problem to be solved. Summary of the invention

[0004] In order to overcome the above-mentioned shortcomings, the purpose of the present invention is to provide a substrate box storage device. The substrate box storage device of the present application can rotate the substrate box to the vicinity of a robot, so as to facilitate the robot to take and place the substrate box, and can press the air inlet plate onto the air outlet plate through gravity to provide gas with stable pressure for the substrate box on the rotating placement rack.

[0005] In order to achieve the above purpose, the technical solution adopted by the present invention is: a substrate box storage device, including a storage device, the storage device including:

[0006] A placement rack, which can rotate around its central axis and has a plurality of substrate box storage positions arranged around the central axis;

[0007] An air supply assembly includes an air inlet plate and an air outlet plate which are connected and rotated around a central axis and are arranged up and down, an annular ventilation groove is formed between the air inlet plate and the air outlet plate, and the air inlet plate and the air outlet plate are respectively provided with air inlet and air outlet channels which are connected with the annular ventilation groove, the air outlet plate is connected with the placement rack, and the air outlet channel passes the gas of the air source into the substrate box through the air outlet pipe;

[0008] The support rod assembly comprises a base and a connecting piece located above the base, wherein the connecting piece comprises a rod body portion connected to the base for rotation prevention and a pressing portion connected to the upper end of the rod body portion, and the pressing portion presses against the air intake disc.

[0009] The beneficial effects of the present invention are:

[0010] The present application allows the placement rack to rotate around its central axis, so that the substrate box can be moved to the vicinity of the robot so that the robot can carry the substrate box.

[0011] By forming an annular ventilation groove between the air inlet plate and the air outlet plate, the air inlet plate and the air outlet plate are respectively provided with an air inlet channel and an air outlet channel connected to the annular ventilation groove, when the placement frame drives the air outlet plate to rotate relative to the air inlet plate, the air inlet pipe connected to the air inlet channel and the air outlet pipe connected to the air outlet channel can be prevented from rotating and interfering with each other;

[0012] By placing the gas outlet plate below the gas inlet plate and pressing the pressing part against the gas inlet plate, it is possible to prevent the gas from the pressurized gas source from expanding the gas outlet plate and the gas inlet plate and causing a loose seal between the two, thereby providing gas with stable pressure for the substrate box on the rotating placement rack.

[0013] In one embodiment, there are multiple placement racks, air supply assemblies and connecting parts, each of which corresponds to the other one to the other. The multiple placement racks are distributed from the inside to the outside in the radial direction around the support rod assembly. At least one material removal notch is provided on the outer placement racks other than the innermost placement rack. A connecting rack for connecting the air supply assembly is provided at the upper end of the outer placement rack. The multiple air supply assemblies are arranged at intervals along the central axis, and the base and the multiple connecting parts are sequentially anti-rotatably plugged in the direction of the central axis.

[0014] In one embodiment, the base and the plurality of pressing parts adjacent to the rod body are provided with slots for the rod body to be inserted downward from their upper end surfaces, and there is a gap between each slot and one end of the rod body inserted into the slot.

[0015] In one embodiment, at least one of the plurality of gaps is filled with an elastic member, and the elastic member can enable the gravity of a portion of the connecting member to press the air inlet plate and the air outlet plate through the pressing portion.

[0016] In one embodiment, each of the multiple placement racks has multiple layers of storage positions arrayed along the central axis direction, the lower end of the innermost placement rack has a bottom plate, and the air outlet plate of the air supply assembly corresponding to the innermost placement rack is connected to the bottom plate.

[0017] In one embodiment, each placement rack includes a top plate and a bottom plate, and a plurality of support plates for carrying substrate boxes are evenly distributed between the top plate and the bottom plate in the vertical direction. The top plate, the bottom plate and the support plates are parallel to each other and are all annular. Adjacent support plates, between the support plate and the top plate, and between the support plate and the bottom plate are connected by a plurality of vertically arranged connecting plates. The plurality of connecting plates extend radially along the support plate and are distributed in a circular array on the support plate. Two adjacent connecting plates and the support plate define a storage position.

[0018] In one embodiment, the air inlet disk also includes an annular boss extending downward along its lower end surface and embedded in the upper end of the air outlet disk. The air inlet disk is pressed against the air outlet disk by a bearing between the annular boss and the air outlet disk. There is a gap between the air inlet disk and the air outlet disk in the direction of the central axis, and seals are provided between the air inlet disk and the air outlet disk on both sides of the annular ventilation groove.

[0019] In one embodiment, the bearing is a rolling bearing that provides axial and radial support, the upper end surface of the outer ring of the rolling bearing is higher than the upper end surface of the inner ring, and the air intake plate abuts against the upper end surface of the outer ring of the rolling bearing.

[0020] In one embodiment, the rolling bearing is an angular contact bearing, the locking mouth of the angular contact bearing is located at the lower end of the outer ring raceway of the angular contact bearing, the angular contact bearing is provided with a sealing ring, the sealing ring is arranged between the bearing inner ring and the bearing outer ring at the lower end of the angular contact bearing, the sealing ring and the sealing member, the bearing cavity wall of the angular contact bearing, the air inlet plate and the air outlet plate together form a closed chamber.

[0021] In one embodiment, a groove closed around the rotation direction of the angular contact bearing is provided between the outer circumferential surface of the bearing outer ring of the angular contact bearing and the inner circumferential surface of the annular boss, and / or between the inner circumferential surface of the bearing inner ring of the angular contact bearing and the outer circumferential surface of the air outlet plate, and the groove accommodates an elastic seal.

[0022] In one embodiment, the pressing portion abuts against the upper end surface of the air intake disk and presses the air intake disk downward, and the pressing portion is provided with at least one through hole for the air intake pipe to pass downward.

[0023] In one embodiment, the substrate box storage device further includes a manipulator, which includes a lifting assembly and a manipulator body. The manipulator body is fixed to the lifting assembly and is lifted and lowered by the lifting assembly. The manipulator body is used to carry the substrate boxes on the placement rack. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of an embodiment of the present invention.

[0025] Figure 2 FIG. 1 is a top view of an embodiment of the present invention.

[0026] Figure 3 for Figure 1 Schematic diagram of the connection status of the central air supply assembly, support rod assembly and connecting frame.

[0027] Figure 4 for Figure 3 sectional view of .

[0028] Figure 5 for Figure 4 Enlarged view of point A in the middle.

[0029] Figure 6for Figure 1 Schematic diagram of the three-dimensional structure of the air supply component.

[0030] Figure 7 for Figure 6 A cross-sectional view of the air supply assembly.

[0031] Figure 8 for Figure 7 A partial enlarged view at point B.

[0032] Fig. 9 for Figure 4 Schematic diagram of the three-dimensional structure of the connecting part.

[0033] Fig.10 for Figure 4 Schematic diagram of the three-dimensional structure of the middle base.

[0034] Fig.11 for Figure 1 Schematic diagram of the structure of the rotary drive assembly.

[0035] Fig.12 It is a schematic diagram of the structure of a placement rack in one embodiment of the present invention.

[0036] Fig.13 for Fig.12 Schematic diagram of the state where the substrate box is placed on the pallet.

[0037] The reference numerals are described as follows:

[0038] 1. Fixed plate;

[0039] 2. Support rod assembly;

[0040] 21, base; 211, reinforcing plate; 212, connecting rod; 22, connecting piece; 221, rod body; 2211, key; 222, pressing part; 2221, slot; 2222, through hole;

[0041] 22a, first connecting member; 22b, second connecting member; 22c, third connecting member;

[0042] 3. Place the rack;

[0043] 31. Top plate; 32. Bottom plate; 33. Connecting plate; 34. Material taking notch; 35. Support plate;

[0044] 3a, inner rack; 31a, top plate of inner rack; 32a, bottom plate of inner rack; 3b, middle rack; 31b, top plate of middle rack; 32b, bottom plate of middle rack; 3c, outer rack; 31c, top plate of outer rack; 32c, bottom plate of outer rack;

[0045] 4. Rotation drive assembly;

[0046] 41. first turntable bearing; 411. first inner ring; 412. first middle ring; 413. first outer ring; 414. first rolling element; 42. second turntable bearing; 43. first drive; 44. second drive; 45. third drive;

[0047] 5. Air supply components;

[0048] 51. air inlet plate; 511. air inlet passage; 512. air inlet joint; 513. annular boss; 52. air outlet plate; 521. air outlet passage; 522. air outlet joint; 53. annular vent groove; 54. sealing element; 55. vertical passage; 56. angular contact bearing; 5601. bearing cavity wall; 561. bearing inner ring; 5611. inner ring upper end face; 562. bearing outer ring; 5621. outer ring upper end face; 5622. lock; 563. rolling ball; 564. sealing ring; 57. elastic sealing element;

[0049] 5a, first air supply assembly; 5b, second air supply assembly; 5c, third air supply assembly;

[0050] 6. Connecting frame;

[0051] 6a, first connecting frame; 61a, first connecting plate; 62a, first vertical plate;

[0052] 6b, second connecting frame; 61b, second connecting plate; 62b, second vertical plate;

[0053] 7. Substrate box;

[0054] 8. Robotic arm;

[0055] 81. Lifting assembly; 82. Manipulator body. DETAILED DESCRIPTION

[0056] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0057] like Figures 1 to 13 FIG. 1 is an embodiment of a substrate box storage device of the present application.

[0058] See attached Figure 1 and Figure 2 As shown, a substrate box storage device of this embodiment includes a storage device and a robot 8 on one side of the storage device. The storage device is used to carry the substrate box 7, and the robot 8 is used to carry the substrate box 7 on the storage device.

[0059] The storage device includes a placement rack 3, an air supply assembly 5 and a support rod assembly 2.

[0060] The placement rack 3 is in a circular ring or arc shape, and is rotatable around a vertical center axis of the placement rack 3 . The placement rack 3 is provided with a plurality of storage locations for storing substrate boxes 7 arranged around the center axis.

[0061] The placement rack 3 can be driven to rotate by the turntable bearing. After the placement rack 3 rotates, the substrate box 7 on the placement rack 3 can be rotated to a position close to the robot 8, thereby facilitating the robot 8 to carry the substrate box 7.

[0062] like Figure 6 and Figure 7 As shown, the air supply assembly 5 includes an air inlet disk 51 and an air outlet disk 52 located below the air inlet disk 51, the air inlet disk 51 and the air outlet disk 52 are rotatably connected around a central axis, and annular grooves are respectively provided on the opposite surfaces of the air inlet disk 51 and the air outlet disk 52, the two annular grooves are butted against each other and define an annular ventilation groove 53, the air inlet disk 51 is provided with an air inlet channel 511 connected to the annular ventilation groove 53, the air inlet channel 511 is connected to an air source through an air inlet pipe, the air outlet disk 52 is connected to the placement rack 3, the air outlet disk 52 is provided with an air outlet channel 521 connected to the annular ventilation groove 53, the air outlet channel 521 passes the gas of the air source into the substrate box 7 through the air outlet pipe.

[0063] The gas of the gas source is a protective gas for the substrate, for example, nitrogen gas to prevent oxidation of the substrate. The gas of the gas source can enter the substrate box 7 through the air inlet pipe and through the air inlet channel 511, the annular vent groove 53, the air outlet channel 521 and the air outlet pipe. The substrate is installed in the substrate box 7, and the substrate can be protected by the gas entering the substrate box 7.

[0064] The air outlet disk 52 is rotatably connected to the air inlet disk 51. When the air outlet disk 52 rotates with the rotation of the placement rack, the air inlet disk 51 can be stationary relative to the air outlet disk 52. When the air inlet disk 51 and the air outlet disk 52 rotate relative to each other, the gas enters the annular ventilation groove 53 formed by the air inlet disk 51 and the air outlet disk 52 through the stationary air inlet pipe and the air inlet channel 511 on the air inlet disk 51. After passing through the annular ventilation groove 53, the gas enters the rotating air outlet channel 521, the air outlet pipe and the substrate box 7. Although the air inlet pipe and the air outlet pipe rotate relative to each other, the air inlet pipe is stationary relative to the air inlet disk 51, and the air outlet pipe is also stationary relative to the air outlet disk 52 and the substrate box 7. Therefore, the air supply assembly 5 can realize the rotation of air to the substrate box 7, avoiding the air inlet pipe and the air outlet pipe from interfering with each other during rotation.

[0065] The support rod assembly 2 includes a base 21 and a connecting member 22 located above the base 21 . The connecting member 22 has a rod body 221 and a clamping portion 222 connected to the upper end of the rod body 221 . The rod body 221 is non-rotatably connected to the base 21 , and the clamping portion 222 presses against the air intake disk 51 .

[0066] The air inlet disk 51 is connected to the base 21 through the pressing portion 222 of the connecting member 22 and the rod body portion 221 of the connecting member 22 to prevent the air inlet disk 51 from rotating with the rotation of the air outlet disk 52, so that the air inlet disk 51 can be made stationary.

[0067] The pressing portion 222 of the connecting member 22 is pressed against the air inlet disk 51, and the air outlet disk 52 is located below the air inlet disk 51, so that the air inlet disk 51 is subjected to the gravity of the connecting member 22, and the air inlet disk 51 can be pressed against the air outlet disk 52. In this way, it is possible to prevent the pressurized gas source gas from expanding the air outlet disk 52 and the air inlet disk 51 and causing the two to be loosely sealed, which will result in the gas source gas being unable to effectively enter the substrate box 7, and the substrates in the substrate box 7 being unable to be effectively protected by the gas source gas.

[0068] The base 21 is provided with a slot 2221 for the rod body 221 of the connector 22 to be inserted into. There is a gap between the slot 2221 and the end of the rod body 221 inserted into the slot 2221 , so that the gravity of the connector 22 can be pressed against the air outlet disk 52 through the air inlet disk 51 .

[0069] It is understandable that the gap between the slot 2221 of the base 21 and the end of the rod body 221 can be filled with elastic parts such as rubber and springs, and the elastic parts are elastically deformed to transfer part of the gravity of the connecting part 22 to the base 21, and the other part of the gravity of the connecting part 22 presses the air inlet disk 51 and the air outlet disk 52. The stiffness of the elastic part can be adjusted by changing the structural shape of the rubber, changing the diameter of the spring, etc., and then adjusting the magnitude of the gravity of the connecting part 22 transferred to the air inlet disk 51.

[0070] In one embodiment, the placement racks 3, the air supply components 5 and the connecting parts 22 are all in one-to-one correspondence. The multiple placement racks 3 are distributed from the inside to the outside around the support rod component 2 in a direction perpendicular to the central axis. The outer placement racks 3 other than the innermost placement rack 3 are provided with at least one material extraction notch 34. The upper ends of the outer placement racks 3 are provided with connecting racks 6 for connecting the air supply components 5. The multiple air supply components 5 are arranged at intervals along the central axis, and the base 21 and the multiple connecting parts 22 are sequentially anti-rotatably plugged in the direction of the central axis.

[0071] like Figures 1 to 5 As shown, there are three placement racks 3, air supply components 5 and connecting parts 22. The three placement racks 3 are respectively an inner placement rack 3a, a middle placement rack 3b and an outer placement rack 3c from the inside to the outside. Each placement rack 3 can rotate relatively around the central axis. The middle placement rack 3b and the outer placement rack 3c are both provided with a material removal notch 34.

[0072] When it is necessary to take or place the substrate box 7 on the inner layer placing rack 3a, the material taking notch 34 of the middle placing rack 3b and the material taking notch 34 of the outer layer placing rack 3c are both rotated to the position where the inner layer placing rack 3a needs to take or place the substrate box 7, and the manipulator 8 extends into the two material taking notches 34 to take or place the substrate box 7 on the inner layer placing rack 3a. Similarly, when it is necessary to take or place the substrate box 7 on the middle placing rack 3b, the material taking notch 34 of the outer layer placing rack 3c can be rotated to the position where the middle placing rack 3b needs to take or place the substrate box 7, and the manipulator 8 extends into the material taking notch 34 of the outer layer placing rack 3c to take or place the substrate box 7 on the middle placing rack 3b.

[0073] like Figure 3 Shown and Figure 4 As shown, the outer layer placing frame 3c is provided with a first connecting frame 6a, and the middle placing frame 3b is provided with a second connecting frame 6b. The first connecting frame 6a and the second connecting frame 6b both have a connecting plate located above the inner layer placing frame 3a, and the first connecting plate 61a of the first connecting frame 6a is spaced above the second connecting plate 61b of the second connecting frame 6b. The number of air supply components 5 corresponds to the number of placement racks 3. The three air supply components 5 are, from top to bottom, the first air supply component 5a, the second air supply component 5b and the third air supply component 5c. The air outlet plate 52 of the first air supply component 5a is connected to the first connecting plate 61a, and the first air supply component 5a supplies air to the substrate box 7 of the outer placement rack 3c. The air outlet plate 52 of the second air supply component 5b is connected to the second connecting plate 61b, and the second air supply component 5b supplies air to the substrate box 7 of the middle placement rack 3b. The air outlet plate 52 of the third air supply component 5c is connected to the inner placement rack 3a, and the third air supply component 5c supplies air to the substrate box 7 of the inner placement rack 3a.

[0074] The first connecting plate 61a and the second connecting plate 61b are both located at the upper end of each placement rack, and the periphery of the first connecting plate 61a is provided with a first vertical plate 62a extending downward, and the first vertical plate 62a and the first connecting plate 61a form a cavity for accommodating the second connecting plate 61b and the second air supply assembly 5b. In this way, the second connecting plate 61b and the second air supply assembly 5b can be arranged below the first connecting plate 61a and the first air supply assembly 5a, and when the outer layer placement rack 3c rotates relative to the middle layer placement rack 3b, the first connecting plate 61a and the first air supply assembly 5a will not interfere with the rotation of the second connecting plate 61b and the second air supply assembly 5b.

[0075] In this embodiment, because there are three air supply components 5, there are also three connecting members 22, which are, from top to bottom, a first connecting member 22a, a second connecting member 22b and a third connecting member 22c.

[0076] See attached Fig. 9As shown, each connecting member 22 includes a rod body 221 and a pressing portion 222 fixed to the end of the rod body 221, the pressing portion 222 presses against the air inlet plate 51, and the base 21 and a plurality of pressing portions 222 adjacent to the rod body 221 are provided with slots 2221 for inserting the rod body 221 downward from the upper end surface. Figure 5 As shown, when the rod body 221 of a connecting member 22 is inserted into the slot 2221 below it, a gap is left between the rod body 221 and the bottom of the slot 2221. In this way, the connecting member 22 can use its own gravity to provide a downward force for the air intake plate 51 (the direction of the force is shown in the attached figure). Figure 5 hollow arrow in the figure).

[0077] The annular structures of different placement racks 3 are coaxially arranged, and the storage device of this structure makes full use of the storage space and has high space utilization. At the same time, multiple placement racks 3 can rotate separately. When each placement rack 3 of the multiple placement racks 3 rotates relatively independently, multiple gas supply components 5 corresponding to the multiple placement racks 3 can supply protective gas to the substrate boxes 7 on each placement rack 3. When a placement rack 3 rotates to the working area of ​​the manipulator 8, the manipulator 8 only needs to move up and down to carry the substrate box 7. While the manipulator 8 moves up and down, another placement rack 3 can rotate at the same time to get close to the pick-up and placement position of the manipulator 8, which greatly reduces the operating time of the manipulator 8 and improves the handling efficiency of the substrate box 7.

[0078] It is understandable that the number of the placement racks 3 may be one, two or four, and the number of the placement racks 3 may be set according to actual needs.

[0079] Furthermore, at least one of the multiple gaps is filled with an elastic member, which can be elastically deformed to transfer a portion of the gravity of the connecting member 22 to the connecting member 22 under the base 21, and another portion of the gravity of the connecting member 22 presses the air inlet plate 51 and the air outlet plate 52 through the clamping part 222.

[0080] This embodiment does not limit the type of elastic member, for example, the elastic member can be rubber or a spring. The elastic member is filled between the slot and the lower end of the rod body 221 of the connector. The elastic member is elastically deformed by a part of the gravity of the connector 22, and the part of the gravity is transferred to the connector or base below the elastic member. Another part of the gravity of the connector 22 above the elastic member is transferred to the air inlet disk 51 through the pressing portion 222, and then the air inlet disk 51 can press the air outlet disk 52 with appropriate force. In this way, the air inlet disk 51 can be prevented from being subjected to excessive force and damaging the air supply assembly 5.

[0081] In one embodiment, each of the multiple placement racks 3 has multiple layers of storage positions arrayed along the central axis direction, the lower end of the innermost placement rack 3 has a bottom plate 32a, and the air outlet plate 52 of the air supply assembly 5 corresponding to the innermost placement rack 3 is connected to the bottom plate 32a.

[0082] like Figure 1 and Fig.12 As shown, the inner layer rack 3a, the middle layer rack 3b and the outer layer rack 3c have multiple storage locations in the up and down directions. Figure 4 The lower end of the inner layer rack 3a is provided with a base plate 32a, and the air outlet disc 52 of the third air supply assembly 5c is connected to the base plate 32a of the inner layer rack. Connecting the air outlet disc 52 of the third air supply assembly 5c to the base plate 32a can reduce the center of gravity height of the equipment, improve the stability during rotation, and shorten the length of the air inlet pipe.

[0083] In one embodiment, see the attached Figure 1 and Fig.12 As shown, each placement rack 3 includes a top plate 31 and a bottom plate 32, and a plurality of support plates 35 for carrying substrate boxes 7 are evenly distributed between the top plate 31 and the bottom plate 32 in the vertical direction. The top plate 31, the bottom plate 32 and the support plates 35 are parallel to each other and are all annular. Adjacent support plates 35, between the support plate 35 and the top plate 31, and between the support plate 35 and the bottom plate 32 are connected by a plurality of vertically arranged connecting plates 33. The plurality of connecting plates 33 extend radially along the support plate 35 and are distributed in a circular array on the support plate 35. Two adjacent connecting plates 33 and the support plate 35 define a storage position.

[0084] The top plate 31c of the outer layer placing rack, the top plate 31b of the middle layer placing rack and the top plate 31a of the inner layer placing rack are all located at the upper end of each placing rack, the first connecting frame 6a is connected to the top plate 31c of the outer layer placing rack, the second connecting frame 6b is connected to the top plate 31b of the middle layer placing rack, and the periphery of the second connecting plate 61b is provided with a second vertical plate 62b extending downward, and the second vertical plate 62b is connected to the top plate 31b of the middle placing rack. The second connecting plate 61b and the second air supply assembly 5b on the second connecting plate 61b can be located above the top plate 31a of the inner layer placing rack through the second vertical plate 62b to avoid interference between the second air supply assembly 5b and the top plate of the inner layer placing rack 3a.

[0085] The plurality of connecting plates 33 connect the support plate 35, the top plate 31 and the bottom plate 32 into a whole, so that the placement rack 3 becomes an integral part, and the placement rack 3 as an integral part can be supported and driven by the rotation drive assembly 4 to rotate synchronously. The plurality of connecting plates 33 are distributed in the circumferential direction and extend in the radial direction of the support plate 35 to improve the stability of the placement rack 3 during rotation. By evenly distributing the plurality of support plates 35 in the vertical direction and connecting them with the plurality of connecting plates 33, it is possible to avoid instability and large deflection deformation of the connecting plates 33 when they are under pressure, thereby affecting the structural strength of the placement rack 3.

[0086] The connecting plate 33 can also fix the air outlet pipe. Since each layer of the multi-layer supporting plates 35 of the placement rack 3 is provided with a substrate box 7, the air supply assembly 5 needs to be connected to the substrate box 7 of each layer through the air outlet pipe, which requires the air outlet pipe to extend in the up and down directions, and the air outlet pipe extending up and down is connected to the connecting plate 33. When the air outlet pipe rotates with the placement rack 3, it can be avoided that the air outlet pipe is affected by the centrifugal force, so that the connection between the air outlet pipe and the air outlet plate 52 is subjected to a large force, thereby affecting the air tightness of the air outlet pipe connection.

[0087] The air supply assembly 5 may be connected to a plurality of air outlet pipes, which correspond one-to-one to the plurality of storage positions on the placement rack 3 in the circumferential direction. Each air outlet pipe extends in the up and down direction. An air outlet pipe branch connected to the substrate box 7 is provided at each layer of the support plate 35 .

[0088] See attached Fig.13 As shown, the position of the support plate 35 corresponding to the storage position is provided with an air supply port, and the air supply port supplies air to the substrate box 7 placed on the storage position. The lower end surface of the support plate 35 is provided with an air pipe interface connected to the air supply port, and the outlet pipe branch is connected to the air pipe interface through the air supply port to supply air to the substrate box 7.

[0089] In one embodiment, the air inlet disk 51 also includes an annular boss extending downward along its lower end surface, the upper end portion of the air outlet disk 52 is embedded in the annular boss 513, and a bearing is also provided between the annular boss and the air outlet disk 52. The air inlet disk 51 is pressed against the air outlet disk 52 through the bearing, and there is a gap between the air inlet disk 51 and the air outlet disk 52 in the direction of the central axis, and seals are provided between the air inlet disk 51 and the air outlet disk 52 on both sides of the annular ventilation groove 53.

[0090] The air inlet disc 51 is pressed against the air outlet disc 52 by a bearing, and there is a gap between the air inlet disc 51 and the air outlet disc 52 in the direction of the central axis, which can avoid direct contact between the air inlet disc 51 and the air outlet disc 52, and no large friction force and abnormal noise caused by friction will be generated when the air inlet disc 51 and the air outlet disc 52 rotate relative to each other. By providing a sealing member located on both sides of the annular vent groove 53 between the air inlet disc 51 and the air outlet disc 52, it can be avoided that the annular vent groove 53 leaks at the gap between the air inlet disc 51 and the air outlet disc 52.

[0091] The sealing member may be an O-type sealing ring or a Y-type sealing ring, and the present embodiment does not limit the type of the sealing member. When the air inlet plate 51 and the air outlet plate 52 are assembled, the sealing member is squeezed to deform and produce a sealing effect.

[0092] Furthermore, the bearing is a rolling bearing that provides axial support and radial support. The upper end face 5621 of the outer ring of the rolling bearing is higher than the upper end face 5611 of the inner ring. The air intake plate 51 abuts against the upper end face 5621 of the outer ring of the rolling bearing so that the air intake plate 51 uses the gravity thereon to provide axial preload for the rolling bearing.

[0093] The rolling bearings for axial support and radial support may be tapered roller bearings, deep groove ball bearings, or angular contact bearings. The present embodiment does not limit the specific types of rolling bearings. The rolling bearing has an inner ring, an outer ring, and rolling elements. The inner ring of the rolling bearing is sleeved on the outer circumference of the outlet plate 52. The lower end surface of the inner ring of the rolling bearing stops at the shoulder of the outlet plate 52. The upper end surface of the outer ring of the rolling bearing is higher than the upper end surface of the inner ring. When the inlet plate 51 presses the outlet plate 52 downward, the upper end surface of the outer ring of the rolling bearing will abut against the inlet plate 51, and the outer circumference of the outer ring will be connected to the inner circumference of the annular boss 513. In this way, the rolling bearing can avoid contact between the air inlet disk 51 and the air outlet disk 52 in the axial and radial directions, thereby avoiding friction and abnormal noise caused by direct contact between the air inlet disk 51 and the air outlet disk 52 in the axial and radial directions. At the same time, the gravity of the connecting part 22 is transmitted to the rolling bearing through the air inlet disk 51, and provides an axial preload for the rolling bearing. The axial preload can avoid unstable operation when the rolling body rotates on the raceway of the inner ring and the outer ring of the rolling bearing.

[0094] Furthermore, the rolling bearing is an angular contact bearing 56, the locking mouth 5622 of the angular contact bearing is located at the lower end of the bearing outer ring raceway of the angular contact bearing, the angular contact bearing 56 is provided with a sealing ring 564, the sealing ring 564 is arranged between the bearing inner ring 561 and the bearing outer ring 562 at the lower end of the angular contact bearing 56, the sealing ring 564 and the sealing element 54, the bearing cavity wall 5601 of the angular contact bearing, the air inlet plate 51 and the air outlet plate 52 together form a closed chamber.

[0095] There are processing and installation errors in the placement frame 3, the support rod assembly 2, the inner circumference of the annular boss 513 and the outer circumference of the air outlet plate 52. These errors may cause an angle between the axis of the inner circumference of the annular boss 513 and the axis of the outer circumference of the air outlet plate 52. By setting the rolling bearing as an angular contact bearing 56, the angular contact bearing 56 allows its bearing inner ring 561 and the bearing outer ring 562 to deflect at a certain angle in the vertical and rotational axis directions. When the angular contact bearing 56 is installed between the inner circumference of the annular boss 513 and the outer circumference of the air outlet plate 52, the angular contact bearing 56 allows a certain angle between the axis of the inner circumference of the annular boss 513 and the axis of the outer circumference of the air outlet plate 52, thereby avoiding the air inlet plate 51 and the air outlet plate 52 from getting stuck.

[0096] By locating the locking opening 5622 of the angular contact bearing at the lower end of the raceway of the outer ring of the angular contact bearing, when the air inlet plate 51 transmits the gravity of the connecting member 22 to the air outlet plate 52 through the angular contact bearing 56, the outer ring 562 of the angular contact bearing is pressed against the inner ring 561 of the angular contact bearing through the rolling balls. At this time, the rolling balls 563 do not contact the locking opening 5622 below the outer ring 562 of the angular contact bearing. The rolling balls 563 are pressed by the raceway on the lower side of the inner ring 561 of the angular contact bearing and the outer ring 562 of the bearing. The ball 563 is wrapped and in close contact with the raceway on the side of the angular contact bearing, and the contact area between the ball 563 and the raceway of the inner ring 561 and the outer ring 562 of the angular contact bearing is relatively large. Since the ball 563 is pressed (axially preloaded) by the raceway of the inner ring 561 and the outer ring 562 of the angular contact bearing, the ball 563 will not bounce and collide with the raceway of the inner ring 561 and the outer ring 562 of the angular contact bearing when rolling, and cause pitting of the raceway of the inner ring 561 and the outer ring 562 of the bearing. At the same time, it can prevent the ball 563 of the angular contact bearing from escaping from the locking mouth of the outer ring 562 of the bearing, causing the inner ring 561 and the outer ring 562 of the angular contact bearing to separate.

[0097] By arranging the sealing ring 564 between the bearing inner ring 561 and the bearing outer ring 562 at the lower end of the angular contact bearing, the sealing ring 564, the sealing component 54, the bearing cavity wall 5601 of the angular contact bearing, the air inlet plate 51 and the air outlet plate 52 together form a closed chamber, which can prevent external impurities from entering the bearing cavity and affecting the operation of the angular contact bearing 56; at the same time, the sealing ring 564 and the sealing component 54 together form two seals on the outside of the annular ventilation groove 53, and the two seals can improve the sealing performance of the air supply component 5.

[0098] Since the seal 54 is located between the air inlet plate 51 and the air outlet plate 52, the seal 54 can not only seal the air inlet plate 51 and the air outlet plate 52, but also seal the upper end surface of the angular contact bearing 56. When the angular contact bearing 56 is in operation, it is only subjected to the friction force of the seal ring 564 at the lower end, so the friction force of the angular contact bearing 56 is small, and overheating due to friction can be avoided during operation.

[0099] Furthermore, a groove closed along the circumference of the bearing outer ring 562 is provided between the outer circumferential surface of the bearing outer ring 562 of the angular contact bearing and the inner circumferential surface of the annular boss 513, and / or between the inner circumferential surface of the bearing inner ring 561 of the angular contact bearing and the outer circumferential surface of the air outlet plate 52, and the groove accommodates an elastic seal 57.

[0100] The substrate box 7 on the placement rack 3 may not be evenly distributed on the placement rack 3 after being taken and placed. The placement rack 3 may generate an unbalanced load during rotation. The unbalanced load causes vibration and causes creep between the outer circumference of the bearing outer ring 562 of the angular contact bearing and the inner circumference of the annular boss 513, as well as between the inner circumference of the bearing inner ring 561 of the angular contact bearing and the outer circumference of the air outlet plate 52. This not only makes the angular contact bearing 56 prone to wear and damage, but also generates wear particles and pollutes the substrate box storage equipment with cleanliness requirements.

[0101] A groove is provided on the outer circumference of the bearing outer ring 562 of the angular contact bearing or the inner circumference of the annular boss 513, and an elastic seal 57 is installed in the groove and elastically deforms with the outer circumference of the bearing outer ring 562 of the angular contact bearing and the inner circumference of the annular boss 513. In this way, the elastic seal 57 pre-tightens the bearing outer ring 562 of the angular contact bearing and the annular boss 513, thereby avoiding creep between the outer circumference of the bearing outer ring 562 of the angular contact bearing and the inner circumference of the annular boss 513 and contamination caused by creep.

[0102] A groove is provided on the inner circumference of the bearing inner ring 561 of the angular contact bearing or the outer circumference of the air outlet plate 52, and an elastic seal 57 is installed in the groove and elastically deforms with the inner circumference of the bearing inner ring 561 of the angular contact bearing and the outer circumference of the air outlet plate 52. In this way, the elastic seal 57 pre-tightens the bearing inner ring 561 of the angular contact bearing and the air outlet plate 52, thereby avoiding creep between the inner circumference of the bearing inner ring 561 of the angular contact bearing and the outer circumference of the air outlet plate 52 and contamination caused by creep.

[0103] In addition, there may be gaps at the fitting locations between the angular contact bearing 56 and the air inlet disk 51 and / or the air outlet disk 52 that may cause gas leakage due to processing errors. The elastic seal 57 elastically deforms with the outer circumferential surface of the bearing outer ring 562 of the angular contact bearing and the inner circumferential surface of the annular boss 513, and / or the inner circumferential surface of the bearing inner ring 561 of the angular contact bearing and the outer circumferential surface of the air outlet disk 52, thereby sealing the gaps at the fitting locations and thereby increasing the sealing performance of the air supply assembly 5.

[0104] The elastic seal 57 is annular. In this embodiment, the cross-sectional shape and material of the elastic seal 57 are not limited. For example, the cross-sectional shape of the elastic seal 57 can be circular or triangular, and can be made of elastically deformable materials such as rubber or synthetic resin.

[0105] In one embodiment, the pressing portion 222 abuts against the upper end surface of the air intake disk 51 and presses the air intake disk 51 downward, and the pressing portion 222 is provided with at least one through hole 2222 for the air intake pipe to pass downward.

[0106] See attached Figure 7The air inlet plate 51 and the air outlet plate 52 are provided with a vertical channel 55 along the axis, the support rod assembly 2 passes through the vertical channel 55, and the air inlet pipe passes through the through hole 2222 on the pressing part 222 and the vertical channel 55 to communicate with the air source. Thus, the air inlet pipe can avoid being damaged by contact with the rotating placement rack.

[0107] The air intake pipe is limited near the strut assembly 2 and can be fixed on the air intake pipe by a tie rope. Alternatively, the tie rope may not be provided and the air intake pipe can be vertically distributed and close to the strut assembly 2 by utilizing its own gravity.

[0108] In one embodiment, the air inlet channel 511 is vertically arranged, and the air inlet channel 511 is parallel to the axis of the air inlet disk 51. The air inlet channel 511 is threadedly connected with an air inlet connector 512 which is in communication with the air inlet connector 512. The air inlet connector 512 is a right-angle connector. The air inlet pipe is connected to the air inlet connector 512 and passes downward from the vertical channel 55. The air outlet channel 521 is L-shaped, including a vertical portion directly in communication with the annular ventilation groove 53 and a horizontal portion extending radially. The air outlet disk 52 is fixed with an air outlet connector 522 located at the end of the horizontal portion. The air outlet connector 522 is threadedly connected to the air outlet channel 521 and directly connected to the air outlet pipe. The air outlet connector 522 is a straight-through connector, which extends radially and is evenly distributed along the circumference of the air outlet disk 52, so as to facilitate air supply to the placement rack 3 of the annular structure.

[0109] In one embodiment, the rod body 221 is a polygon, such as a square tube or a triangular tube, and the slot 2221 and the rod body 221 match in shape, and are also square tubes or triangular tubes. When the rod body 221 is inserted into the slot 2221, the rod body 221 cannot rotate in the slot 2221 due to the shape limitation.

[0110] In one embodiment, see the attached Fig. 9 As shown, the rod body 221 is cylindrical, and the slot 2221 is also cylindrical. In order to prevent the rod body 221 from rotating, the portion of the rod body 221 inserted into the slot 2221 is further provided with a key 2211, and the slot 2221 is connected with a key 2211 slot for the key 2211 to be inserted. Because the key 2211 and the key 2211 slot cooperate, the rod body 221 can be prevented from rotating in the slot 2221. However, no matter what the shape of the rod body 221 is, the lower end of the rod body 221 can be inserted into the slot 2221 and a gap is left to the bottom of the slot 2221.

[0111] In one embodiment, different connecting members 22 have the same shape, but the length of the rod body 221 can be set according to actual needs.

[0112] In one embodiment, the connector 22 is an integral part, and the pressing part 222 and the rod body 221 are integrally processed. The connector 22 can also be a split structure, and the pressing part 222 and the rod body 221 are processed separately and connected by locking bolts.

[0113] See attached Fig.10 As shown, the base 21 includes a reinforcing plate 211 and a connecting rod 212 fixed on the reinforcing plate 211, and a slot 2221 is provided on the connecting rod 212. The reinforcing plate 211 is fixed on the fixing plate 1, and the contact area between the reinforcing plate 211 and the fixing plate 1 is large, which increases the stability of the base 21 when it is fixed on the fixing plate 1.

[0114] In one embodiment, the rotary drive assembly 4 includes one or more first turntable bearings 41, and the first turntable bearing 41 includes a first inner ring 411, a first middle ring 412, and a first outer ring 413 arranged from the inside to the outside. The first inner ring 411 and the first middle ring 412 and the first middle ring 412 and the first outer ring 413 are connected by a first rolling body 414. The first middle ring 412 is supported by a support plate. The first inner ring 411 and the first outer ring 413 can rotate relative to the first middle ring 412. The inner side of the first inner ring 411 A first inner transmission tooth is provided which is closed along the circumference of the first inner ring 411, and a first outer transmission tooth is provided which is closed along the circumference of the first outer ring 413. The first inner ring 411 is rotated by meshing the first inner transmission tooth with the gear on the first drive 43, and the first outer ring 413 is rotated by meshing the first outer transmission tooth with the gear on the second drive 44. The first inner ring 411 and the first outer ring 413 in the first turntable bearing 41 are respectively connected to two adjacent placement racks 3 among the multiple placement racks 3. In this way, the two adjacent placement racks 3 can rotate relatively compactly in the radial direction.

[0115] In one embodiment, when the number of the multiple placement racks 3 is an odd number, the rotation drive assembly 4 also includes a second turntable bearing 42, the second turntable bearing 42 includes a stop ring and a rotating ring arranged from the inside to the outside, the stop ring and the rotating ring are connected by a second rolling body, the stop ring and the rotating ring can rotate relative to each other, one of the multiple placement racks 3 is connected to the rotating ring, the rotating ring is provided with a third transmission tooth closed along the edge of the rotating ring, the rotating ring and the placement rack are driven to rotate by the third drive 45 through the third transmission tooth.

[0116] It is understandable that the rotary drive assembly 4 may also only include a plurality of second turntable bearings 42 , and the plurality of second turntable bearings 42 are connected to the plurality of placement racks 3 in a one-to-one correspondence.

[0117] The robot 8 includes a lifting assembly 81 and a robot body 82. The robot body 82 is fixed on the lifting assembly 81 and is lifted and lowered by the lifting assembly 81. The robot body is used to carry the substrate box on the placement rack.

[0118] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A substrate box storage device, comprising a storage device, characterized in that: The storage device comprises: A placement rack, the placement rack can rotate around its central axis, and a plurality of substrate box storage positions are arranged around the central axis; An air supply assembly, comprising an air inlet plate and an air outlet plate which are rotatably connected around the central axis and arranged up and down, an annular vent groove is formed between the air inlet plate and the air outlet plate, the air inlet plate and the air outlet plate are respectively provided with an air inlet and an air outlet channel which are connected with the annular vent groove, the air outlet plate is connected with the placement rack, and the air outlet channel passes the gas from the air source into the substrate box through the air outlet pipe; A support rod assembly, the support rod assembly includes a base and a connecting piece located above the base, the connecting piece has a rod body portion connected to the base for rotation prevention and a clamping portion connected to the upper end of the rod body portion, the air inlet disk and the air outlet disk are provided with a vertical channel along the axis for the support rod assembly to pass through, the clamping portion presses against the air inlet disk so that the air inlet disk is subjected to the gravity of the connecting piece.

2. The substrate box storage device according to claim 1, characterized in that: The placement racks, the air supply components and the connecting pieces are all in a one-to-one correspondence. The multiple placement racks are distributed from the inside to the outside around the support rod component in the radial direction. The outer layer of the placement racks other than the innermost placement rack is provided with at least one material removal notch. The upper end of the outer layer of the placement rack is provided with a connecting rack for connecting the air supply component. The multiple air supply components are arranged at intervals along the direction of the central axis, and the base and the multiple connecting pieces are sequentially anti-rotatably plugged in the direction of the central axis.

3. The substrate box storage device according to claim 2, characterized in that: The base and the plurality of pressing parts adjacent to the rod body are provided with slots for inserting the rod body downward from their upper end surfaces, and there is a gap between each slot and one end of the rod body inserted into the slot.

4. The substrate box storage device according to claim 3, characterized in that: At least one of the plurality of gaps is filled with an elastic member, and the elastic member can enable the gravity of a portion of the connecting member to press the air inlet disk and the air outlet disk through the pressing portion.

5. The substrate box storage device according to claim 2, characterized in that: Each of the plurality of placement racks has multiple layers of storage locations arrayed along the central axis direction, the lower end of the innermost placement rack has a bottom plate, and the air outlet plate of the air supply assembly corresponding to the innermost placement rack is connected to the bottom plate.

6. The substrate box storage device according to claim 5, characterized in that: Each of the placement racks includes a top plate and a bottom plate, and a plurality of support plates for carrying the substrate boxes are evenly distributed between the top plate and the bottom plate in the vertical direction. The top plate, the bottom plate and the support plates are parallel to each other and are all annular. Adjacent support plates, the support plate and the top plate, and the support plate and the bottom plate are connected by a plurality of vertically arranged connecting plates. The plurality of connecting plates extend radially along the support plate and are distributed in a circular array on the support plate. Two adjacent connecting plates and the support plate define a storage position.

7. The substrate box storage device according to any one of claims 1 to 6, characterized in that: The air inlet disk also includes an annular boss extending downward along its lower end surface and for the upper end of the air outlet disk to be embedded in. The air inlet disk is pressed against the air outlet disk through a bearing between the annular boss and the air outlet disk. A gap is provided between the air inlet disk and the air outlet disk in the direction of the central axis. A seal is provided between the air inlet disk and the air outlet disk on both sides of the annular ventilation groove.

8. The substrate box storage device according to claim 7, characterized in that: The bearing is a rolling bearing that provides axial and radial support. The upper end surface of the outer ring of the rolling bearing is higher than the upper end surface of the inner ring. The air intake plate abuts against the upper end surface of the outer ring of the rolling bearing.

9. The substrate box storage device according to claim 8, characterized in that: The rolling bearing is an angular contact bearing, the locking mouth of the angular contact bearing is located at the lower end of the bearing outer ring raceway of the angular contact bearing, the angular contact bearing is provided with a sealing ring, the sealing ring is arranged between the bearing inner ring and the bearing outer ring at the lower end of the angular contact bearing, the sealing ring and the sealing element, the bearing cavity wall of the angular contact bearing, the air inlet plate and the air outlet plate together form a closed chamber.

10. The substrate box storage device according to claim 9, characterized in that: A groove closed around the rotation direction of the angular contact bearing is provided between the outer circumferential surface of the bearing outer ring of the angular contact bearing and the inner circumferential surface of the annular boss, and / or between the inner circumferential surface of the bearing inner ring of the angular contact bearing and the outer circumferential surface of the air outlet plate, and the groove accommodates an elastic seal.

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