A magnetic axis detection system and method for molecular pump

Abstract

The present invention provides a magnetic axis detection system and method for a molecular pump, which relates to the technical field of molecular pump magnetic axis detection, and includes a workbench, a synchronization mechanism, an active limiting mechanism and a rotation drive mechanism; the synchronization mechanism includes a mounting frame fixed to the bottom of the workbench, the bottom of the mounting frame is rotatably connected to a rotating plate, the front and rear sides of the bottom of the rotating plate are rotatably connected to connecting rods, two guide rods are laterally arranged on the inner side of the workbench, both ends of the two guide rods are slidably connected to sliding seats, and the surfaces of the four sliding seats are slidably connected to the inner side of the workbench. This scheme finally realizes that in the process of limiting the magnetic axis, the hardness detection mechanism and the horizontal detection mechanism are directly adjusted to the working state, the magnetic axis is driven to rotate by the rotation drive mechanism, and the magnetic axis is detected, thereby effectively improving the detection efficiency of the magnetic axis and reducing the manual participation in the detection process.

Description

Technical Field

[0001] The present invention relates to the technical field of molecular pump magnetic axis detection, and in particular to a magnetic axis detection system and method for a molecular pump. Background Art

[0002] Molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, so that they obtain a directional speed, are compressed, driven to the exhaust port and then pumped away by the front stage. Magnetic bearings are a new type of high-performance bearings. Compared with traditional ball bearings, sliding bearings and oil film bearings, magnetic bearings have no mechanical contact, and the rotor can reach a very high operating speed. It has the advantages of low mechanical wear, low energy consumption, low noise, long life, no lubrication, and no oil pollution. It is particularly suitable for special environments such as high speed, vacuum, and ultra-clean. It can be widely used in mechanical processing, turbomachinery, aerospace, vacuum technology, rotor dynamics characteristics identification and testing, and other fields, and is recognized as a very promising new type of bearing.

[0003] Publication No.: CN220136254U discloses a bearing detection device for detecting level and hardness. The first handle in the blocking structure drives the first screw to rotate to the right through the square frame. The rotating first screw drives the baffle to move to the right, so that the right side of the baffle is tightly pressed against the fixed outer wall of the bearing, and the original plug-in slot form is changed to ensure that the baffle meets all position adjustments, ensure the detection of the bearing detection device, and ensure the normal use of the bearing detection device.

[0004] In the relevant technology, the magnetic bearing is the key technical indicator of the magnetic levitation molecular pump, which can avoid mechanical friction and wear and ensure the stable suspension and rotation of the rotor. Therefore, in the process of production and assembly of the magnetic levitation molecular pump, it is necessary and necessary to conduct random inspections on the magnetic bearings and conduct quality assessments on the magnetic levitation bearings. However, during the use of the above-mentioned detection device, like most of the existing bearing detection devices, it is necessary to manually fix the position of the bearing first, and then gradually detect the bearing one by one. Although this detection device can have a detection effect on the bearing, for bearings that need to be batch-sampled, the detection efficiency of this detection device is undoubtedly relatively low. The detection process takes a long time, and the manual participation is large. It is not convenient to form a limit and detection effect on the bearing in one step, which is not conducive to batch sampling of bearings, thereby affecting the production and assembly efficiency of the molecular pump.

[0005] Therefore, it is necessary to provide a magnetic axis detection system and method for a molecular pump to solve the above technical problems. Summary of the invention

[0006] The present invention provides a magnetic axis detection system and method for a molecular pump, which solves the technical problem that the existing bearing detection device in the related art has low detection efficiency and is not convenient for forming a limiting and detection effect on the bearing in one step.

[0007] In order to solve the above technical problems, the magnetic axis detection system for a molecular pump provided by the present invention comprises a workbench, a synchronization mechanism, an active limit mechanism and a rotation drive mechanism;

[0008] The synchronizing mechanism comprises a mounting bracket fixedly arranged at the bottom of the workbench, the bottom of the mounting bracket is rotatably connected to a rotating plate, the front and rear sides of the bottom of the rotating plate are rotatably connected to connecting rods, two guide rods are laterally arranged on the inner side of the workbench, both ends of the two guide rods are slidably connected to sliding seats, the surfaces of the four sliding seats are slidably connected to the inner side of the workbench, the four sliding seats are grouped in twos, and a mounting seat is fixed on the top of each group of sliding seats, a connecting plate is fixed on the bottom of each group of sliding seats, the separated ends of the two connecting rods are respectively rotatably connected to the bottoms of the two connecting plates, the front and rear sides of the bottom of the workbench are fixed with electric telescopic rods, the right ends of the two electric telescopic rods are fixed with connecting brackets, and the bottoms of the two connecting brackets are fixedly connected to the top of the connecting plate on the right side;

[0009] The active limiting mechanism comprises a rotating shaft rotatably connected to the inner side of the workbench, a rotating disk is fixedly arranged at the top of the rotating shaft, three sliding racks are slidably connected to the inner side of the rotating disk, guide plates are slidably connected to the surfaces of the three sliding racks, the bottom of the guide plate is fixedly connected to the top of the workbench, the inner sides of the three sliding racks are rotatably connected to limiting wheels, a driving gear is fixedly arranged at the bottom end of the rotating shaft and located at the bottom of the workbench, a gear plate is fixedly arranged at the top of the connecting plate on the left side, a passive gear is rotatably connected to the top of the mounting frame, the gear plate is meshed with the passive gear, and the passive gear is meshed with the driving gear;

[0010] Two rotating frames are fixedly arranged on opposite sides of the two mounting seats, the inner sides of the four rotating frames are rotatably connected with driving wheels, and the tops of the four rotating frames are provided with driving motors for driving the driving wheels to rotate.

[0011] Preferably, a slide groove for use with the sliding seat is opened and closed on the inner side of the workbench, and the two mounting seats have different shapes, and a through groove is opened on the inner side of the mounting seat on the right side.

[0012] Preferably, a slide groove for use with the three sliding frames is opened on the inner side of the rotating disk, and a slide groove for use with the three sliding frames is opened on the inner side of the guide disk, and the three sliding frames are distributed in a 120-degree circular array with the rotating axis as the center.

[0013] Preferably, a hardness detection mechanism is fixedly provided on the top of the mounting seat on the left side, and the hardness detection mechanism includes a vertical rod fixedly provided on the top of the mounting seat on the left side, a detection frame is slidably provided on the surface of the vertical rod, a first locking bolt is provided on the front side of the detection frame, two sliding rods are vertically provided on the inner side of the detection frame, and a detection bracket is slidably connected to the surfaces of the two sliding rods, springs are sleeved on the surfaces of the two sliding rods and located at the bottom of the detection bracket, an adjusting rod is fixedly provided on the back side of the detection bracket, and the surface of the adjusting rod is slidably connected to the inner side of the detection bracket, a detection head is provided on the inner side of the detection bracket, and a hardness meter is provided on the left side of the detection bracket.

[0014] Preferably, a horizontal detection mechanism is provided on the inner side of the mounting seat on the right side, and the horizontal detection mechanism includes a threaded screw which is laterally rotatably provided on the inner side of the mounting seat on the right side, a movable bracket is threadedly connected to the surface of the threaded screw, a dial indicator is provided on the inner side of the movable bracket, a second locking bolt is provided on the top of the movable bracket, and a knob is provided on the right end of the threaded screw.

[0015] Preferably, a slide groove used in conjunction with the adjustment rod is provided on the inner side of the detection frame, and the hardness tester is electrically connected to the detection head.

[0016] Preferably, a visual detection mechanism is provided on the front side of the top of the mounting seat on the left side, and the visual detection mechanism includes a protective frame provided on the front side of the top of the mounting seat on the left side, the inner side of the protective frame is rotatably connected with a rotating rod, a rotating gear is fixedly provided at the front end of the rotating rod and located on the front side of the protective frame, a connecting plate is fixedly provided on the surface of the rotating rod and located on the inner side of the protective frame, an industrial camera is fixedly provided on the back side of the connecting plate, a fixed tooth plate is fixedly provided on the top of the workbench, and a protective bracket is fixedly provided on the front side of the protective frame.

[0017] Preferably, a magnetic axis is provided on the top of the workbench and on the outer surface of the guide plate, and supporting legs are fixedly provided on the front and rear sides of the bottom of the workbench.

[0018] A method for detecting a magnetic axis of a molecular pump comprises the following steps:

[0019] S1: Move the entire device to a horizontal surface to ensure the stability of the device, and check the components of the device and the magnetic axis that needs to be tested to ensure that the device can operate normally and the surface of the magnetic axis is clean and free of pollution;

[0020] S2: The magnetic shaft is sleeved on the outside of the guide plate, and a gap is formed between the magnetic shaft and the top of the workbench. Then, two electric telescopic rods are started. The two electric telescopic rods drive the right connecting plate to move to the left under the action of the connecting bracket. The right connecting plate drives the left connecting plate to move to the right through two connecting rods and a rotating plate. Then, the two mounting seats are driven to move to the opposite side under the action of the sliding seat, so that the hardness detection mechanism and the horizontal detection mechanism move inward synchronously, and finally the detection head in the hardness detection mechanism is located at the top of the magnetic shaft, and the detection end of the dial indicator in the horizontal detection mechanism contacts the right side of the magnetic shaft;

[0021] S3: The left connecting plate drives the gear plate to move rightward during the movement, and the movement of the gear plate drives the passive gear and the driving gear to rotate. The rotation of the driving gear drives the rotating disk to rotate through the rotating shaft. The rotation of the rotating disk causes the three sliding frames to slide outward on the inner side of the guide disk until the three limiting wheels contact the inner side of the magnetic shaft and squeeze and limit the inner side of the magnetic shaft, so that the magnetic shaft forms a relatively fixed effect;

[0022] S4: When the synchronization mechanism adjusts the hardness detection mechanism and the horizontal detection mechanism inward to the specified position, the active limit mechanism will actively limit the inner side of the magnetic shaft, and the four sets of rotation drive mechanisms will form an external clamping state for the magnetic shaft, and then the hardness of the magnetic shaft will be detected by the hardness detection mechanism. After the detection, the magnetic shaft is driven by the rotation drive mechanism to rotate intermittently, and the hardness of different points of the magnetic shaft is detected by the hardness detection mechanism using the rotation gap, thereby improving the accuracy of the strength detection data. When the rotation drive mechanism drives the magnetic shaft to rotate intermittently, the horizontality of the magnetic shaft surface can be detected by the dial indicator in the horizontal detection mechanism;

[0023] S5: When the synchronization mechanism adjusts the hardness detection mechanism and the horizontal detection mechanism inward to the specified position, it will drive the visual detection mechanism to move to the right. When the rotating gear in the visual detection mechanism contacts the fixed gear plate, the rotating gear will drive the rotating rod to rotate 90 degrees clockwise, so that the connecting plate drives the industrial camera to separate from the protective frame and make the industrial camera face the magnetic axis. When the rotating drive mechanism drives the magnetic axis to rotate, the outer surface of the magnetic axis can be visually inspected by the industrial camera.

[0024] S6: After the inspection of the magnetic axis is completed, the hardness inspection mechanism, the horizontal inspection mechanism, the active limit mechanism, the rotation drive mechanism and the visual inspection mechanism are restored to their original positions by retracting the two electric telescopic rods, and then the magnetic axis is removed to inspect the next magnetic axis.

[0025] Compared with the related art, the magnetic axis detection system and method for molecular pumps provided by the present invention have the following beneficial effects:

[0026] By controlling the retraction of the electric telescopic rod, the right connecting plate is driven to move to the left. Under the action of the connecting rod and the rotating plate, the left connecting plate will move synchronously. Under the action of the sliding seat and the mounting seat, the hardness detection mechanism and the horizontal detection mechanism will move synchronously toward the magnetic axis and reach the detection position. At the same time, through the movement of the gear plate, the rotating disk will drive the sliding frame to use the limiting wheel to squeeze and limit the inner side of the magnetic axis, and the driving wheel will form a clamping state on the outer side of the magnetic axis, so as to achieve the limit position in one step. During the process of limiting the magnetic axis, the hardness detection mechanism and the horizontal detection mechanism are directly adjusted to the working state, and the magnetic axis is driven to rotate by the rotating drive mechanism to detect the magnetic axis, thereby effectively improving the detection efficiency of the magnetic axis and reducing the manual participation in the detection process, thereby improving the production and assembly efficiency of the molecular pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0028] Figure 1 The best structural diagram provided by the present invention;

[0029] Figure 2 for Figure 1 A schematic diagram of the structure of the bottom view of the workbench shown;

[0030] Figure 3 A schematic diagram of the structure of the synchronization mechanism provided by the present invention;

[0031] Figure 4 for Figure 3 A schematic diagram of the structure of the bottom view of the mounting frame shown;

[0032] Figure 5 A schematic diagram of the structure of the active limiting mechanism provided by the present invention;

[0033] Figure 6 for Figure 5 The structural schematic diagram of the rotating disk shown;

[0034] Figure 7 for Figure 5 A schematic diagram of the structure of the sliding frame shown;

[0035] Figure 8 for Figure 5 The gear plate shown is moving to the right, and the driven gear and the driving gear are used to drive the rotating shaft and the rotating disk to rotate;

[0036] Fig. 9 A schematic diagram of the structure of the hardness detection mechanism and the rotation drive mechanism provided by the present invention;

[0037] Fig.10 for Fig. 9 A schematic structural diagram of a cross-sectional view of the detection frame shown;

[0038] Fig.11 A schematic diagram of the structure of the horizontal detection mechanism and the rotation drive mechanism provided by the present invention;

[0039] Fig.12 This is a schematic diagram of the structure of the visual detection mechanism provided by the present invention.

[0040] Description of Figure Numbers:

[0041] 1. Workbench;

[0042] 2. Synchronous mechanism; 21. Mounting frame; 22. Rotating plate; 23. Connecting rod; 24. Guide rod; 25. Sliding seat; 26. Mounting seat; 27. Connecting plate; 28. Electric telescopic rod; 29. ​​Connecting bracket;

[0043] 3. Active limiting mechanism; 31. Rotating shaft; 32. Rotating plate; 33. Sliding frame; 34. Guide plate; 35. Limiting wheel; 36. Driving gear; 37. Gear plate; 38. Passive gear;

[0044] 4. Rotation drive mechanism; 41. Rotating frame; 42. Driving wheel; 43. Driving motor;

[0045] 5. Hardness testing mechanism; 51. Vertical pole; 52. Testing frame; 53. First locking bolt; 54. Sliding rod; 55. Testing bracket; 56. Spring; 57. Adjusting rod; 58. Testing head; 59. Hardness tester;

[0046] 6. Level detection mechanism; 61. Threaded screw; 62. Moving bracket; 63. Dial indicator; 64. Second locking bolt; 65. Knob;

[0047] 7. Visual inspection mechanism; 71. Protective frame; 72. Rotating rod; 73. Rotating gear; 74. Connecting plate; 75. Industrial camera; 76. Fixed tooth plate; 77. Protective bracket;

[0048] 8. Magnetic axis; 9. Support legs.

[0049] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0050] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0051] The invention provides a magnetic axis detection system and method for a molecular pump.

[0052] First embodiment:

[0053] See also Figures 1 to 9 and Fig.11 , a magnetic axis detection system for a molecular pump, comprising a workbench 1, a synchronization mechanism 2, an active limit mechanism 3 and a rotation drive mechanism 4;

[0054] The synchronization mechanism 2 includes a mounting frame 21 fixed to the bottom of the workbench 1, the bottom of the mounting frame 21 is rotatably connected to a rotating plate 22, the front and rear sides of the bottom of the rotating plate 22 are rotatably connected to connecting rods 23, two guide rods 24 are transversely arranged on the inner side of the workbench 1, both ends of the two guide rods 24 are slidably connected to sliding seats 25, the surfaces of the four sliding seats 25 are slidably connected to the inner side of the workbench 1, the four sliding seats 25 are grouped in pairs, and a mounting seat 26 is fixed on the top of each group of sliding seats 25, and a connecting plate 27 is fixed on the bottom of each group of sliding seats 25, and the separated ends of the two connecting rods 23 are rotatably connected to the bottoms of the two connecting plates 27 respectively, the front and rear sides of the bottom of the workbench 1 are fixed with electric telescopic rods 28, the right ends of the two electric telescopic rods 28 are fixed with connecting brackets 29, and the bottoms of the two connecting brackets 29 are fixedly connected to the top of the connecting plate 27 on the right side;

[0055] Please combine Figure 1 , Figure 3 and Figure 4 : When the two electric telescopic rods 28 retract to the left at the same time, the right connecting plate 27 is driven to move to the left through the connecting bracket 29, and the movement of the connecting plate 27 drives the right connecting rod 23 to move to the left, and causes the rotating plate 22 to rotate. The rotating plate 22 rotates to pull the left connecting rod 23 to the right, thereby driving the left connecting plate 27 to move to the right, and then causing the four sliding seats 25 to slide on the surface of the guide rod 24 to the opposite side, and the movement of the four sliding seats 25 drives the two mounting seats 26 to move to the opposite side, and the movement of the two mounting seats 26 drives the hardness detection mechanism 5 and the horizontal detection mechanism 6 to move to the opposite side, thereby forming a detection state for the magnetic axis 8.

[0056] The active limiting mechanism 3 includes a rotating shaft 31 rotatably connected to the inner side of the workbench 1, a rotating disk 32 is fixedly arranged at the top of the rotating shaft 31, three sliding frames 33 are slidably connected to the inner side of the rotating disk 32, and guide plates 34 are slidably connected to the surfaces of the three sliding frames 33, the bottom of the guide plate 34 is fixedly connected to the top of the workbench 1, and the inner sides of the three sliding frames 33 are all rotatably connected to limiting wheels 35, a driving gear 36 is fixedly arranged at the bottom end of the rotating shaft 31 and located at the bottom of the workbench 1, a gear plate 37 is fixedly arranged at the top of the connecting plate 27 on the left side, a passive gear 38 is rotatably connected to the top of the mounting frame 21, the gear plate 37 is meshed with the passive gear 38, and the passive gear 38 is meshed with the driving gear 36;

[0057] Please combine Figures 5 to 8 : When the connecting plate 27 on the left side moves to the right, the gear plate 37 is driven to move to the right at the same time, and the passive gear 38 is caused to rotate counterclockwise through the movement of the gear plate 37, and the passive gear 38 rotates counterclockwise to drive the driving gear 36 to rotate clockwise, and the driving gear 36 drives the rotating disk 32 to rotate clockwise through the rotating shaft 31, and the three sliding frames 33 are caused to slide outward on the inner side of the guide disk 34 through the clockwise rotation of the rotating disk 32. After the magnetic shaft 8 is sleeved on the outer surface of the guide disk 34, the inner side of the magnetic shaft 8 can be squeezed and limited by the limiting wheel 35 through the movement of the sliding frame 33, so that the center position of the magnetic shaft 8 overlaps with the center positions of the rotating disk 32 and the guide disk 34;

[0058] Two rotating frames 41 are fixedly arranged on opposite sides of the two mounting seats 26, the inner sides of the four rotating frames 41 are rotatably connected with driving wheels 42, and the tops of the four rotating frames 41 are provided with driving motors 43 for driving the driving wheels 42 to rotate;

[0059] Please combine Fig. 9 and Fig.11 : When the hardness detection mechanism 5 and the horizontal detection mechanism 6 are driven to move to the opposite side by the synchronization mechanism 2, the two mounting seats 26 will drive the four rotating frames 41 to move to the opposite side. When the hardness detection mechanism 5 and the horizontal detection mechanism 6 reach the working position, the four driving wheels 42 are just located on the outer surface of the magnetic shaft 8 and form a clamping state for the outer surface of the magnetic shaft 8. When the driving motor 43 is started, the driving motor 43 will drive the four driving wheels 42 to rotate, so that the magnetic shaft 8 rotates clockwise or counterclockwise;

[0060] Preferably, the outer surface of the driving wheel 42 is made of rubber material, which has a certain friction with the surface of the magnetic shaft 8, thereby driving the magnetic shaft 8 to rotate.

[0061] A slide groove for use with the sliding seat 25 is opened and closed on the inner side of the workbench 1. The two mounting seats 26 have different shapes, and a through groove is opened on the inner side of the mounting seat 26 on the right side.

[0062] The inner side of the rotating disk 32 is provided with a slide groove for use with the three sliding frames 33 , and the inner side of the guide disk 34 is provided with a slide groove for use with the three sliding frames 33 . The three sliding frames 33 are distributed in a 120-degree circular array with the rotating shaft 31 as the center.

[0063] In this embodiment, different from the existing bearing detection device, after the magnetic axis 8 is sleeved on the outer surface of the guide disk 34, the electric telescopic rod 28 is controlled to retract to drive the right connecting plate 27 to move to the left, and the connecting plate 27 on the left is moved synchronously under the action of the connecting rod 23 and the rotating plate 22. Under the action of the sliding seat 25 and the mounting seat 26, the hardness detection mechanism 5 and the horizontal detection mechanism 6 are synchronously moved toward the magnetic axis 8 and reach the detection position. At the same time, through the movement of the gear plate 37, the rotating disk 32 drives the sliding frame 33 to use the limiting wheel 35 to squeeze and limit the inner side of the magnetic axis 8, and the driving wheel 42 forms a clamping state on the outer side of the magnetic axis 8, so that it is in place in one step. During the limiting process of the magnetic axis 8, the hardness detection mechanism 5 and the horizontal detection mechanism 6 are directly adjusted to the working state, and the magnetic axis 8 is driven to rotate by the rotating drive mechanism 4 to detect the magnetic axis 8, thereby effectively improving the detection efficiency of the magnetic axis 8 and reducing the manual participation in the detection process, thereby improving the production and assembly efficiency of the molecular pump.

[0064] Second embodiment:

[0065] See also Figures 9 to 11 A hardness detection mechanism 5 is fixedly arranged on the top of the left mounting seat 26, and the hardness detection mechanism 5 includes a vertical rod 51 fixedly arranged on the top of the left mounting seat 26, a detection frame 52 is slidably arranged on the surface of the vertical rod 51, a first locking bolt 53 is arranged on the front side of the detection frame 52, two sliding rods 54 are vertically arranged on the inner side of the detection frame 52, and a detection bracket 55 is slidably connected with the surfaces of the two sliding rods 54, and springs 56 are sleeved on the surfaces of the two sliding rods 54 and located at the bottom of the detection bracket 55, an adjusting rod 57 is fixedly arranged on the back side of the detection bracket 55, and the surface of the adjusting rod 57 is slidably connected with the inner side of the detection bracket 52, a detection head 58 is arranged on the inner side of the detection bracket 55, and a hardness meter 59 is arranged on the left side of the detection bracket 52;

[0066] Please combine Fig. 9 and Fig.10: When the hardness detection mechanism 5 reaches the detection position, the adjustment rod 57 is pressed downward, and the movement of the adjustment rod 57 drives the detection bracket 55 and the detection head 58 to move downward, so that the spring 56 contracts. When the bottom end of the detection head 58 contacts the top of the magnetic shaft 8, the hardness meter 59 will display the hardness of the magnetic shaft 8. After reading the hardness data, the adjustment rod 57 is released, and the two springs 56 are expanded, so that the detection bracket 55 drives the detection head 58 to move upward, so that the bottom end of the detection head 58 cancels the contact with the top of the magnetic shaft 8.

[0067] Preferably, a thread for use with the first locking bolt 53 is provided on the inner side of the detection frame 52. After loosening the first locking bolt 53, the position of the detection frame 52 on the vertical pole 51 can be adjusted, and then the position of the detection frame 52 can be fixed by tightening the first locking bolt 53.

[0068] A level detection mechanism 6 is provided on the inner side of the right side mounting seat 26, and the level detection mechanism 6 includes a threaded screw 61 which is laterally rotatably provided on the inner side of the right side mounting seat 26, a movable bracket 62 is threadedly connected to the surface of the threaded screw 61, a dial indicator 63 is provided on the inner side of the movable bracket 62, a second locking bolt 64 is provided on the top of the movable bracket 62, and a knob 65 is provided on the right end of the threaded screw 61;

[0069] Please combine Fig.11 : By rotating the knob 65, the threaded screw 61 can be driven to rotate, and the rotation of the threaded screw 61 can further adjust the left and right positions of the movable bracket 62. By adjusting the position of the movable bracket 62, the position of the dial indicator 63 can be adjusted, thereby ensuring that after the hardness detection mechanism 5 moves to the working position, the detection end of the dial indicator 63 can contact the surface of the magnetic shaft 8;

[0070] Preferably, a thread that cooperates with the threaded screw 61 is provided on the inner side of the movable bracket 62 , and the movable bracket 62 can be driven to move left and right by the rotation of the threaded screw 61 .

[0071] A slide groove for cooperating with the adjusting rod 57 is provided on the inner side of the detection frame 52 , and the hardness tester 59 is electrically connected to the detection head 58 .

[0072] In this embodiment, when the hardness detection mechanism 5 reaches the working position, the detection bracket 55 and the detection head 58 can be driven to move downward by pressing the adjustment rod 57, and the hardness of the magnetic shaft 8 can be detected by the detection head 58. When the rotating drive mechanism 4 drives the magnetic shaft 8 to rotate intermittently, the surface level of the magnetic shaft 8 can be detected by the dial indicator 63, and the rotation gap of the magnetic shaft 8 can be used to perform irregular multi-point detection on the magnetic shaft 8 through the detection head 58, thereby effectively improving the accuracy of the hardness detection data and shortening the detection time of the magnetic shaft 8, ensuring that the assembled magnetic shaft 8 will not affect the service life of the molecular pump.

[0073] Third embodiment:

[0074] See also Figure 1 and Fig.12 A visual inspection mechanism 7 is provided at the front side of the top of the mounting seat 26 on the left side. The visual inspection mechanism 7 includes a protective frame 71 provided at the front side of the top of the mounting seat 26 on the left side. A rotating rod 72 is rotatably connected to the inner side of the protective frame 71. A rotating gear 73 is fixedly provided at the front end of the rotating rod 72 and located at the front side of the protective frame 71. A connecting plate 74 is fixedly provided on the surface of the rotating rod 72 and located at the inner side of the protective frame 71. An industrial camera 75 is fixedly provided on the back side of the connecting plate 74. A fixed tooth plate 76 is fixedly provided on the top of the workbench 1. A protective bracket 77 is fixedly provided on the front side of the protective frame 71.

[0075] Please combine Fig.12 : When the left mounting seat 26 moves to the right, it will drive the visual inspection mechanism 7 to move to the right at the same time. When the rotating gear 73 contacts the fixed tooth plate 76, the rotating gear 73 will drive the rotating rod 72 to rotate 90 degrees. The rotating rod 72 then drives the industrial camera 75 to rotate through the connecting plate 74, so that the industrial camera 75 is separated from the protective frame 71 and faces the magnetic axis 8. The surface of the magnetic axis 8 can be visually inspected by the industrial camera 75;

[0076] Preferably, there is a certain friction between the rotating rod 72 and the protective frame 71, and the rotating rod 72 cannot be easily rotated in the protective frame 71, and the industrial camera 75 is externally connected to a visual detection device.

[0077] A magnetic shaft 8 is disposed on the top of the workbench 1 and on the outer surface of the guide plate 34 , and support legs 9 are fixedly disposed on the front and rear sides of the bottom of the workbench 1 .

[0078] In this embodiment, when the synchronization mechanism 2 drives the hardness detection mechanism 5 and the horizontal detection mechanism 6 to move to the opposite side to detect the magnetic axis 8, the visual detection mechanism 7 will work synchronously, and through the cooperation of the rotating gear 73 and the fixed tooth plate 76, the industrial camera 75 will be separated from the protective frame 71, and the magnetic axis 8 will be visually inspected to detect whether there are cracks, depressions and other problems on the surface of the magnetic axis 8.

[0079] Please refer to Figures 1 to 12 The working principle of the magnetic axis detection system for molecular pumps provided by the present invention is as follows:

[0080] Step S1, firstly, sleeve the magnetic axis 8 on the outer surface of the guide plate 34, and make a certain gap between the magnetic axis 8 and the workbench 1, then start the two electric telescopic rods 28, and drive the right connecting plate 27 to move to the left through the retraction of the two electric telescopic rods 28, and when the right connecting plate 27 moves, the rotating plate 22 is driven to rotate through the left connecting rod 23, and when the rotating plate 22 rotates, the left connecting rod 23 is pulled to the right, so that the left connecting plate 27 moves to the right, and the movement of the two connecting plates 27 under the action of the sliding seat 25 drives the two mounting seats 26 to move to the opposite side, and the movement of the two mounting seats 26 drives the hardness detection mechanism 5 and the horizontal detection mechanism 6 to move to the opposite side, so that the hardness detection mechanism 5, the horizontal detection mechanism 6 and the rotation drive mechanism 4 reach the working position;

[0081] Step S2, during the movement of the left connecting plate 27, the gear plate 37 is driven to move rightward at the same time, and the movement of the gear plate 37 drives the passive gear 38 to rotate counterclockwise, and the passive gear 38 rotates counterclockwise to drive the driving gear 36 to rotate clockwise, and the driving gear 36 rotates clockwise to drive the rotating disk 32 to rotate clockwise through the rotating shaft 31, and the rotating disk 32 rotates clockwise to move the three sliding frames 33 outward on the inner side of the guide disk 34, so that the inner side of the magnetic shaft 8 is squeezed and limited by the limiting wheel 35;

[0082] Step S3, when the hardness detection mechanism 5 and the horizontal detection mechanism 6 reach the working position, and the rotation drive mechanism 4 and the active limit mechanism 3 form a clamping and fixing state for the magnetic shaft 8, firstly, the detection bracket 55 is moved downward by the adjusting rod 57, and the detection bracket 55 moves downward to drive the bottom end of the detection head 58 to contact with the top of the magnetic shaft 8, and the spring 56 is contracted. After the bottom end of the detection head 58 contacts with the top of the magnetic shaft 8, the hardness data of the magnetic shaft 8 will be displayed in digital form on the hardness meter 59. After the display, release the adjusting rod. 57, through the expansion of the spring 56, the detection bracket 55 drives the detection head 58 to reset, and then the drive motor 43 is started, and the four drive wheels 42 are driven by the drive motor 43 to rotate slowly. The rotation of the drive wheel 42 drives the magnetic shaft 8 to rotate, and the limit wheel 35 is also rotated. When it rotates randomly to a certain position, the drive motor 43 is turned off, and then the detection head 58 is used again to perform hardness detection on the magnetic shaft 8. After repeatedly detecting multiple groups of data, the average value is taken according to the data, thereby improving the accuracy of the hardness detection data of the magnetic shaft 8;

[0083] Step S4, when the driving wheel 42 drives the magnetic shaft 8 to rotate slowly, the detection end of the dial gauge 63 is in contact with the surface of the magnetic shaft 8, and then the horizontality of the surface of the magnetic shaft 8 can be determined by observing the change of the pointer of the dial gauge 63;

[0084] Step S5, when the mounting base 26 moves to the right, it will also drive the visual inspection mechanism 7 to move to the right. When the rotating gear 73 contacts the fixed tooth plate 76, the rotating gear 73 will drive the rotating rod 72 to rotate 90 degrees. The rotating rod 72 then drives the industrial camera 75 to rotate through the connecting plate 74, so that the industrial camera 75 is separated from the protective frame 71 and faces the magnetic axis 8. The magnetic axis 8 is driven to rotate by the driving wheel 42. The industrial camera 75 can be used to perform a comprehensive inspection of the surface of the magnetic axis 8 to detect whether there are defects on the surface of the magnetic axis 8. When the inspection is completed, the electric telescopic rod 28 is started. The active limit mechanism 3, the rotation drive mechanism 4, the hardness detection mechanism 5, the horizontal detection mechanism 6 and the visual detection mechanism 7 are reset by extending the electric telescopic rod 28, and the fixation of the magnetic axis 8 is canceled. Then, the next magnetic axis 8 can be inspected according to the same steps.

[0085] Please refer to Figures 1 to 12 , a magnetic axis detection method for a molecular pump, comprising the following steps:

[0086] S1: Move the entire device to a horizontal ground to ensure the stability of the device, and check the components of the device and the magnetic axis 8 that needs to be tested to ensure that the device can operate normally and the surface of the magnetic axis 8 is clean and free of pollution;

[0087] S2: The magnetic axis 8 is sleeved on the outer side of the guide plate 34, and a gap is formed between the magnetic axis 8 and the top of the workbench 1. Then, the two electric telescopic rods 28 are started. The two electric telescopic rods 28 drive the right connecting plate 27 to move to the left under the action of the connecting bracket 29. The right connecting plate 27 drives the left connecting plate 27 to move to the right through the two connecting rods 23 and the rotating plate 22. Then, the two mounting seats 26 are driven to move to the opposite side under the action of the sliding seat 25, so that the hardness detection mechanism 5 and the horizontal detection mechanism 6 move inward synchronously, and finally the detection head 58 in the hardness detection mechanism 5 is located at the top of the magnetic axis 8, and the detection end of the dial indicator 63 in the horizontal detection mechanism 6 contacts the right side of the magnetic axis 8;

[0088] S3: The left connecting plate 27 drives the gear plate 37 to move rightward during the movement, and the movement of the gear plate 37 drives the passive gear 38 and the driving gear 36 to rotate. The driving gear 36 rotates through the rotating shaft 31 to drive the rotating disk 32 to rotate. The three sliding frames 33 slide outward on the inner side of the guide disk 34 through the rotation of the rotating disk 32, until the three limiting wheels 35 contact the inner side of the magnetic shaft 8, and squeeze and limit the inner side of the magnetic shaft 8, so that the magnetic shaft 8 forms a relatively fixed effect;

[0089] S4: When the synchronization mechanism 2 adjusts the hardness detection mechanism 5 and the horizontal detection mechanism 6 inward to the specified position, the active limit mechanism 3 will actively limit the inner side of the magnetic shaft 8, and the four sets of rotation drive mechanisms 4 will form an external clamping state for the magnetic shaft 8, and then the hardness of the magnetic shaft 8 will be detected by the hardness detection mechanism 5. After the detection, the magnetic shaft 8 is driven to rotate intermittently by the rotation drive mechanism 4, and the hardness of different points of the magnetic shaft 8 is detected by the hardness detection mechanism 5 using the rotation gap, so as to improve the accuracy of the strength detection data. When the rotation drive mechanism 4 drives the magnetic shaft 8 to rotate intermittently, the horizontality of the surface of the magnetic shaft 8 can be detected by the dial indicator 63 in the horizontal detection mechanism 6;

[0090] S5: When the synchronization mechanism 2 adjusts the hardness detection mechanism 5 and the horizontal detection mechanism 6 inward to the specified position, it will drive the visual detection mechanism 7 to move to the right. When the rotating gear 73 in the visual detection mechanism 7 contacts the fixed tooth plate 76, the rotating gear 73 will drive the rotating rod 72 to rotate 90 degrees clockwise, so that the connecting plate 74 drives the industrial camera 75 to separate from the protective frame 71 and make the industrial camera 75 face the magnetic axis 8. When the rotary drive mechanism 4 drives the magnetic axis 8 to rotate, the outer surface of the magnetic axis 8 can be visually inspected by the industrial camera 75.

[0091] S6: After completing the inspection of the magnetic axis 8, the hardness inspection mechanism 5, the horizontal inspection mechanism 6, the active limit mechanism 3, the rotation drive mechanism 4 and the visual inspection mechanism 7 are restored to their original positions by retracting the two electric telescopic rods 28, and then the magnetic axis 8 is removed, and the next magnetic axis 8 can be inspected.

[0092] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A magnetic axis detection system for a molecular pump, characterized in that: It includes a workbench, a synchronization mechanism, an active limit mechanism and a rotation drive mechanism; The synchronizing mechanism comprises a mounting frame fixedly arranged at the bottom of the workbench, the bottom of the mounting frame is rotatably connected with a rotating plate, the front and rear sides of the bottom of the rotating plate are rotatably connected with connecting rods, two guide rods are laterally arranged on the inner side of the workbench, both ends of the two guide rods are slidably connected with sliding seats, the surfaces of the four sliding seats are slidably connected with the inner side of the workbench, the four sliding seats are divided into left and right groups, and the tops of the two groups of sliding seats are fixed with mounting seats, the bottoms of the two groups of sliding seats are fixed with connecting plates, the separated ends of the two connecting rods are respectively rotatably connected with the bottoms of the two connecting plates, the front and rear sides of the bottom of the workbench are fixed with electric telescopic rods, the right ends of the two electric telescopic rods are fixed with connecting brackets, and the bottoms of the two connecting brackets are fixedly connected to the top of the right connecting plate; The active limiting mechanism comprises a rotating shaft rotatably connected to the inner side of the workbench, a rotating disk is fixedly arranged at the top of the rotating shaft, three sliding racks are slidably connected to the inner side of the rotating disk, guide plates are slidably connected to the surfaces of the three sliding racks, the bottom of the guide plate is fixedly connected to the top of the workbench, the inner sides of the three sliding racks are rotatably connected to limiting wheels, a driving gear is fixedly arranged at the bottom end of the rotating shaft and located at the bottom of the workbench, a gear plate is fixedly arranged at the top of the connecting plate on the left side, a passive gear is rotatably connected to the top of the mounting frame, the gear plate is meshed with the passive gear, and the passive gear is meshed with the driving gear; Two rotating frames are fixedly provided on opposite sides of the two mounting seats, the inner sides of the four rotating frames are rotatably connected with driving wheels, and the tops of the four rotating frames are provided with driving motors for driving the driving wheels to rotate.

2. The magnetic axis detection system for a molecular pump according to claim 1, characterized in that: A slide groove for use with the sliding seat is opened and closed on the inner side of the workbench. The two mounting seats have different shapes, and a through groove is opened on the inner side of the mounting seat on the right side.

3. The magnetic axis detection system for a molecular pump according to claim 2, characterized in that: A slide groove for use with the three sliding frames is provided on the inner side of the rotating disk, and a slide groove for use with the three sliding frames is provided on the inner side of the guide disk. The three sliding frames are distributed in a 120-degree circular array with the rotating shaft as the center.

4. The magnetic axis detection system for a molecular pump according to claim 3, characterized in that: A hardness detection mechanism is fixedly provided on the top of the mounting seat on the left side, and the hardness detection mechanism includes a vertical rod fixedly provided on the top of the mounting seat on the left side, a detection frame is slidably provided on the surface of the vertical rod, a first locking bolt is provided on the front side of the detection frame, two sliding rods are vertically provided on the inner side of the detection frame, and a detection bracket is slidably connected to the surfaces of the two sliding rods, springs are sleeved on the surfaces of the two sliding rods and located at the bottom of the detection bracket, an adjusting rod is fixedly provided on the back side of the detection bracket, and the surface of the adjusting rod is slidably connected to the inner side of the detection bracket, a detection head is provided on the inner side of the detection bracket, and a hardness meter is provided on the left side of the detection bracket.

5. The magnetic axis detection system for a molecular pump according to claim 4, characterized in that: A horizontal detection mechanism is arranged on the inner side of the mounting seat on the right side, and the horizontal detection mechanism includes a threaded screw which is arranged on the inner side of the mounting seat on the right side and is rotatable laterally. A movable bracket is threadedly connected to the surface of the threaded screw. A dial indicator is arranged on the inner side of the movable bracket. A second locking bolt is arranged on the top of the movable bracket, and a knob is arranged on the right end of the threaded screw.

6. The magnetic axis detection system for a molecular pump according to claim 5, characterized in that: A slide groove used in conjunction with the adjustment rod is provided on the inner side of the detection frame, and the hardness tester is electrically connected to the detection head.

7. The magnetic axis detection system for a molecular pump according to claim 6, characterized in that: A visual inspection mechanism is arranged on the front side of the top of the mounting seat on the left side, and the visual inspection mechanism includes a protective frame arranged on the front side of the top of the mounting seat on the left side, a rotating rod is rotatably connected to the inner side of the protective frame, a rotating gear is fixedly arranged at the front end of the rotating rod and located on the front side of the protective frame, a connecting plate is fixedly arranged on the surface of the rotating rod and located on the inner side of the protective frame, an industrial camera is fixedly arranged on the back side of the connecting plate, a fixed tooth plate is fixedly arranged on the top of the workbench, and a protective bracket is fixedly arranged on the front side of the protective frame.

8. The magnetic axis detection system for a molecular pump according to claim 7, characterized in that: A magnetic axis is arranged on the top of the workbench and on the outer surface of the guide plate, and supporting legs are fixedly arranged on the front and rear sides of the bottom of the workbench.

9. A method for detecting a magnetic axis of a molecular pump, characterized in that: The magnetic axis detection method is used in the magnetic axis detection system as claimed in claim 8, comprising the following steps: S1: Move the entire device to a horizontal surface to ensure the stability of the device, and check the components of the device and the magnetic axis that needs to be tested to ensure that the device can operate normally and the surface of the magnetic axis is clean and free of pollution; S2: The magnetic shaft is sleeved on the outside of the guide plate, and a gap is formed between the magnetic shaft and the top of the workbench. Then, two electric telescopic rods are started. The two electric telescopic rods drive the right connecting plate to move to the left under the action of the connecting bracket. The right connecting plate drives the left connecting plate to move to the right through two connecting rods and a rotating plate. Then, the two mounting seats are driven to move to the opposite side under the action of the sliding seat, so that the hardness detection mechanism and the horizontal detection mechanism move inward synchronously, and finally the detection head in the hardness detection mechanism is located at the top of the magnetic shaft, and the detection end of the dial indicator in the horizontal detection mechanism contacts the right side of the magnetic shaft; S3: The left connecting plate drives the gear plate to move rightward during the movement, and the movement of the gear plate drives the passive gear and the driving gear to rotate. The rotation of the driving gear drives the rotating disk to rotate through the rotating shaft. The rotation of the rotating disk causes the three sliding frames to slide outward on the inner side of the guide disk until the three limiting wheels contact the inner side of the magnetic shaft and squeeze and limit the inner side of the magnetic shaft, so that the magnetic shaft forms a relatively fixed effect; S4: When the synchronization mechanism adjusts the hardness detection mechanism and the horizontal detection mechanism inward to the specified position, the active limit mechanism will actively limit the inner side of the magnetic shaft, and the four sets of rotation drive mechanisms will form an external clamping state for the magnetic shaft, and then the hardness of the magnetic shaft will be detected by the hardness detection mechanism. After the detection, the magnetic shaft is driven by the rotation drive mechanism to rotate intermittently, and the hardness of different points of the magnetic shaft is detected by the hardness detection mechanism using the rotation gap, thereby improving the accuracy of the strength detection data. When the rotation drive mechanism drives the magnetic shaft to rotate intermittently, the horizontality of the magnetic shaft surface is detected by the dial indicator in the horizontal detection mechanism; S5: When the synchronization mechanism adjusts the hardness detection mechanism and the horizontal detection mechanism inward to the specified position, it will drive the visual detection mechanism to move to the right. When the rotating gear in the visual detection mechanism contacts the fixed gear plate, the rotating gear will drive the rotating rod to rotate 90 degrees clockwise, so that the connecting plate drives the industrial camera to separate from the protective frame and make the industrial camera face the magnetic axis. When the rotating drive mechanism drives the magnetic axis to rotate, the outer surface of the magnetic axis is visually inspected by the industrial camera. S6: After the inspection of the magnetic axis is completed, the hardness inspection mechanism, the horizontal inspection mechanism, the active limit mechanism, the rotation drive mechanism and the visual inspection mechanism are restored to their original positions by retracting the two electric telescopic rods, and then the magnetic axis is removed to inspect the next magnetic axis.

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