A high vacuum equipment internal material sample limiter and use method

Abstract

The present invention relates to a material sample limiter inside a high vacuum device and a method of using the same, and belongs to the technical field of high vacuum devices, including a high vacuum device box, a material conveying box, a door frame, a vacuum pump unit, a storage bracket, and a sample limiter tray, wherein the high vacuum device box, the door frame, and the material conveying box are connected in sequence. In the present invention, a material conveying chamber is provided to separate the external environment and the high vacuum device, and when materials are replenished and conveyed, the material conveying chamber is isolated from the high vacuum device, so that the staff can replenish or take materials and prevent the environment of the high vacuum device from being destroyed, and when materials are conveyed, the outer wall environment can be isolated, and air can be extracted to create a vacuum environment, so that the vacuum environment of the high vacuum device and the material conveying chamber is unified, so that material loading can be performed without destroying the vacuum environment, and corresponding sample conveying and limiting structures are provided, so that samples or devices of different sizes can be stably entered and exited.

Description

Technical Field

[0001] The invention relates to the technical field of high vacuum equipment, and in particular to a material sample limiter inside high vacuum equipment and a use method thereof. Background Art

[0002] Vacuum equipment is a device that generates, improves and maintains vacuum, including vacuum application equipment and vacuum acquisition equipment. A high vacuum environment is often required during experiments and processing to reduce experimental errors and production quality. In experimental physics, ultra-high vacuum can ensure good thermal insulation conditions to achieve extremely low temperatures. In testing, ultra-high vacuum can keep the sample surface clean and free from contamination by specific atmosphere atoms, and can detect the physical properties of the sample surface. At the same time, the ultra-high vacuum environment can reduce the scattering of gas molecules on electrons, ions and other particles, ensuring that the experiment is carried out under ideal conditions. High vacuum equipment is equipment used to provide a vacuum environment.

[0003] In order to ensure the vacuum environment, the sealing of the existing high vacuum equipment needs to be ensured when it is used. However, such a device structure needs to break the internal vacuum environment when materials need to be supplemented. After a group of materials are processed through experiments, the vacuum environment needs to be released and the equipment needs to be opened for loading and unloading. When another group of experiments and manufacturing are carried out, a vacuum pump needs to be used to extract air again to create a vacuum environment, which wastes experimental time. In order to be able to supplement materials during the experiment or transfer materials without destroying the vacuum environment, a material limiter for internal materials of high vacuum equipment and a method of use are proposed. A material conveying chamber is provided to separate the external environment and the high vacuum equipment. When conveying materials during material replenishment, the material conveying chamber is isolated from the high vacuum equipment, so that the staff can replenish materials or take materials and prevent the environment of the high vacuum equipment from being destroyed. When conveying materials, the outer wall environment can be isolated, and air can be extracted to create a vacuum environment, so that the vacuum environment of the high vacuum equipment and the material conveying chamber is unified, so that loading can be carried out without destroying the vacuum environment. Corresponding sample conveying and limiting structures are provided, so that samples or equipment of different sizes can be stably entered and exited. Summary of the invention

[0004] The present invention provides a material sample limiter inside a high vacuum device and a method for using the same, which solves the problems raised by the above-mentioned prior art, so that the high vacuum device can replenish materials during an experiment or transfer materials without destroying the vacuum environment, thereby maintaining the vacuum environment for subsequent experiments.

[0005] The solution of the present invention to solve the above technical problems is as follows: a high vacuum equipment internal material sample limiter and a use method, comprising a high vacuum equipment box, a material conveying box, a door frame, a vacuum pump unit, a storage bracket, and a sample limiter tray, the high vacuum equipment box, the door frame and the material conveying box are connected in sequence, the vacuum pump unit is connected to the high vacuum equipment box and the material conveying box respectively, the high vacuum equipment box is equipped with a manipulator, a loading rack, and a material test bench, the inner wall of the loading rack is fixedly installed with a No. 1 brake stepper motor, the No. 1 brake stepper motor is fixedly connected with a ball screw, the outer wall of the ball screw is threadedly connected with a screw nut, both sides of the screw nut are fixedly connected with a load-bearing slider, the top of the load-bearing slider is fixedly connected with a support frame, the support frame is fixedly installed with an electromagnet, The storage bracket is fixedly connected with an iron block and a movable base frame, and the bottom of the movable base frame is evenly rotatably connected with a movable pulley. A plurality of sample limiting trays are provided, and the plurality of sample limiting trays can be installed on the top of the storage bracket and the material laboratory table by screws. A No. 2 brake stepper motor is fixedly installed on the inner wall of the sample limiting tray, and the No. 2 brake stepper motor is fixedly connected with a bidirectional lead screw. Adjustment nuts are threadedly connected on both sides of the outer wall of the bidirectional lead screw, and limit sliders are fixedly connected on both sides of the adjustment nut. Limit rods are fixedly connected on both sides of the inner wall of the sample limiting tray, and a material clamp is fixedly connected on the top of the door frame. A hydraulic cylinder is fixedly connected to the hydraulic cylinder, and a sealing plate is fixedly connected to the high vacuum equipment box and the material conveying box are both provided with sealing doors;

[0006] The method of use includes the following steps:

[0007] S1: Open the sealed door of the high vacuum equipment box to load the materials on the sample limit tray on the top of the material laboratory table. The No. 2 brake stepper motor in the sample limit tray rotates the bidirectional lead screw to drive the limit sliders on both sides to slide on the outer wall of the limit rod through the adjusting nut, so that the material clamps on both sides can move to one side to clamp the materials, so that the experimental material samples can be clamped and limited on the top of the material laboratory table for easy access. Close the sealed door of the high vacuum equipment box, start the hydraulic cylinder to extend, and drive the sealing plate to block the door frame. The air in the high vacuum equipment box can be extracted by the vacuum pump unit to create a high vacuum environment, and the staff can perform experimental operations on the internal materials through the manipulator;

[0008] S2: When it is necessary to take out the material in the high vacuum equipment box, the material is moved to the sample limiting tray on the top of the storage bracket by the manipulator and clamped and limited by the material clamp, and then the vacuum pump unit is started to extract the air in the material conveying box, so that the material conveying box and the high vacuum equipment box can be in the same high vacuum environment, the hydraulic cylinder is started to drive the door frame to open, and the No. 1 brake stepper motor is started to rotate the ball screw, which can drive the load-bearing sliders on both sides to slide on the outer wall of the load-bearing rod through the screw nut. The electromagnet of the load-bearing rod is magnetically connected with the iron block of the storage bracket, so that the support frame can drive the storage bracket on the top of the mobile chassis to move. After the storage bracket is moved into the material conveying box, the magnetic connection between the electromagnet and the iron block is released, and the No. 1 brake stepper motor is reversed to drive the support frame to reset and return to the high vacuum equipment box, and the hydraulic cylinder is started to drive the sealing plate to seal the door frame, and the vacuum environment of the material conveying box is released. The sealed door of the material conveying box can be opened to take out the material without affecting the vacuum environment in the high vacuum equipment box;

[0009] S3: When it is necessary to replenish the experimental sample materials, open the sealed door of the material conveying box, load the experimental sample materials on the sample limit tray on the top of the storage bracket, start the vacuum pump unit to extract the air in the material conveying box to create a high vacuum environment consistent with the high vacuum equipment box, open the sealing plate, start the No. 1 brake stepper motor to make the electromagnet of the support frame contact with the iron block of the storage bracket and connect them magnetically, so that the support frame can drive the storage bracket to move into the high vacuum equipment box, close the hydraulic cylinder, and the material is transported to the high vacuum equipment box, and can be taken and operated by the robot without affecting the vacuum environment in the high vacuum equipment box.

[0010] Based on the above technical solution, the present invention can also be improved as follows.

[0011] Furthermore, a plurality of the sample-limiting trays can be installed on the top of the storage bracket and the material laboratory table by screws, and the staff can set a plurality of groups of sample-limiting trays to load the experimental sample materials according to the experimental weight and the quantity of experimental materials.

[0012] Furthermore, load-bearing rods are fixedly connected to both sides of the inner wall of the loading rack, and the load-bearing slider is provided with sliding holes corresponding to the load-bearing rods. The inner wall of the sliding hole is slidably connected to the load-bearing rod, so that the load-bearing slider can slide smoothly on the inner wall of the loading rack.

[0013] Furthermore, the limit sliding block is provided with a limit hole corresponding to the limit rod, the inner wall of the limit hole is slidably connected to the limit rod, and the limit rod can limit the limit sliding block and bear the load.

[0014] Furthermore, two movable base frames are provided, and multiple groups of movable pulleys are provided at the bottom of the two movable base frames, which can prevent the storage bracket from shaking greatly when passing through the door frame.

[0015] Furthermore, the robot is provided with two manipulators which are separately placed on both sides of the inner wall of the high vacuum equipment box.

[0016] The beneficial effects of the present invention are as follows: the present invention provides a high vacuum equipment internal material sample limiter and a method of use, which has the following advantages:

[0017] 1. The No. 2 brake stepper motor in the sample limiting tray rotates the bidirectional lead screw to drive the material claws on both sides to clamp the material, so that the experimental material samples can be clamped and limited on the top of the material test bench for easy access. Close the sealed door of the high vacuum equipment box, start the hydraulic cylinder to extend, and drive the sealing plate to block the door frame. The air in the high vacuum equipment box can be extracted through the vacuum pump unit to create a high vacuum environment. The staff can perform experimental operations on the internal materials through the manipulator. Such a material limiting structure can effectively prevent the movement of experimental sample materials during the experiment;

[0018] 2. Move the material to the sample tray on the top of the storage bracket by the manipulator and clamp it with the material clamp, then start the vacuum pump unit to extract the air in the material conveying box, so that the material conveying box and the high vacuum equipment box can be in the same high vacuum environment, start the hydraulic cylinder to drive the door frame to open, start the No. 1 brake stepper motor to rotate the ball screw to drive the storage bracket on the top of the mobile chassis to move, and move the storage bracket into the material conveying box. Release the magnetic connection between the electromagnet and the iron block, and reverse the No. 1 brake stepper motor to drive the support frame to reset and return to the high vacuum equipment box. Start the hydraulic cylinder to drive the sealing plate to seal the door frame, release the vacuum environment of the material conveying box, and open the sealed door of the material conveying box to take out the material without affecting the vacuum environment in the high vacuum equipment box.

[0019] 3. Open the sealed door of the material conveying box, load the experimental sample materials on the sample tray on the top of the storage bracket, start the vacuum pump unit to extract the air in the material conveying box to create a high vacuum environment consistent with the high vacuum equipment box, open the sealing plate, start the No. 1 brake stepper motor to contact the electromagnet of the support frame with the iron block of the storage bracket and connect them magnetically, so that the support frame can drive the storage bracket to move into the high vacuum equipment box, close the hydraulic cylinder, and the material is transported to the high vacuum equipment box. It can be taken and operated by the manipulator without affecting the vacuum environment in the high vacuum equipment box;

[0020] 4. Such a high vacuum equipment has an internal material limiter with a material conveying chamber that can be used to separate the external environment and the high vacuum equipment. When the material is replenished and transported, the material conveying chamber is isolated from the high vacuum equipment, so that the staff can replenish or take the material and prevent the high vacuum equipment environment from being destroyed. When the material is transported, the outer wall environment can be isolated, and air can be extracted to create a vacuum environment, so that the vacuum environment of the high vacuum equipment and the material conveying chamber is unified, so that loading can be carried out without destroying the vacuum environment. Corresponding sample conveying and limiting structures are provided, so that samples or equipment of different sizes can be stably entered and exited.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. The specific implementation of the present invention is given in detail by the following embodiments and their accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0023] Figure 1 A schematic diagram of the structure of a material sample limiter inside a high vacuum device and a method of using the same provided by one embodiment of the present invention;

[0024] Figure 2 A schematic diagram of the structure of a material conveying box discharge state in a material sample limiter inside a high vacuum device and a method for using the same provided by an embodiment of the present invention;

[0025] Figure 3 A front view of a material sample limiter inside a high vacuum device and a method of using the same provided by one embodiment of the present invention;

[0026] Figure 4 A schematic diagram of the structure of a support frame in a material sample limiter for a high vacuum device and a method for using the same provided by an embodiment of the present invention;

[0027] Figure 5 A schematic diagram of the structure of a movable pulley in a material sample limiter and a method for using the same provided in an embodiment of the present invention;

[0028] Figure 6 A schematic structural diagram of a movable pulley in a material sample limiter inside a high vacuum device and a method for using the same provided by an embodiment of the present invention.

[0029] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0030] 1. High vacuum equipment box; 2. Material conveying box; 3. Door frame; 4. Vacuum pump unit; 5. Manipulator; 6. Loading rack; 7. Material test bench; 8. No. 1 brake stepper motor; 9. Ball screw; 10. Screw nut; 11. Load-bearing slider; 12. Load-bearing rod; 13. Support frame; 14. Electromagnet; 15. Storage bracket; 16. Iron block; 17. Mobile base frame; 18. Mobile pulley; 19. Sample limit tray; 20. No. 2 brake stepper motor; 21. Bidirectional screw; 22. Adjustment nut; 23. Limit slider; 24. Limit rod; 25. Material clamp; 26. Hydraulic cylinder; 27. Sealing plate; 28. Sealing door. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-6 The principles and features of the present invention are described, and the examples are only used to explain the present invention and are not used to limit the scope of the present invention. In the following paragraphs, the present invention is described in more detail by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer according to the following description and claims. It should be noted that the drawings are all in a very simplified form and are not in precise proportions, and are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention.

[0032] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0034] like Figure 1-6As shown, the present invention provides a high vacuum equipment internal material sample limiter and a use method, including a high vacuum equipment box 1, a material conveying box 2, a door frame 3, a vacuum pump unit 4, a storage bracket 15, and a sample limiting tray 19. The high vacuum equipment box 1, the door frame 3 and the material conveying box 2 are connected in sequence, and the vacuum pump unit 4 is connected to the high vacuum equipment box 1 and the material conveying box 2 respectively. The high vacuum equipment box 1 is equipped with a manipulator 5, a loading rack 6, and a material test bench 7. The inner wall of the loading rack 6 is fixedly installed with a No. 1 brake stepper motor 8, and the No. 1 brake stepper motor 8 is fixedly connected with a ball screw 9. The outer wall of the ball screw 9 is threadedly connected with a screw nut 10, and both sides of the screw nut 10 are fixedly connected with a load-bearing slider 11, and the top of the load-bearing slider 11 is fixedly connected with a support frame 13, and the support frame 13 is fixedly installed with an electromagnet 14. The storage bracket 15 is fixedly connected to An iron block 16 and a movable base frame 17 are connected, and a movable pulley 18 is evenly rotated at the bottom of the movable base frame 17. A plurality of sample limiting trays 19 are provided, and the plurality of sample limiting trays 19 can be installed on the top of the storage bracket 15 and the material laboratory table 7 by screws. A No. 2 brake stepper motor 20 is fixedly installed on the inner wall of the sample limiting tray 19, and the No. 2 brake stepper motor 20 is fixedly connected with a bidirectional lead screw 21. Adjusting nuts 22 are threadedly connected on both sides of the outer wall of the bidirectional lead screw 21, and limiting sliders 23 are fixedly connected on both sides of the adjusting nut 22. Limiting rods 24 are fixedly connected on both sides of the inner wall of the sample limiting tray 19, and a material clamp 25 is fixedly connected to the top of the limit slider 23. A hydraulic cylinder 26 is fixedly connected to the top of the door frame 3, and a sealing plate 27 is fixedly connected to the hydraulic cylinder 26. The high vacuum equipment box 1 and the material conveying box 2 are both provided with sealing doors 28.

[0035] Preferably, a plurality of limited sample trays 19 can be installed on the top of the storage bracket 15 and the material test bench 7 by screws, and the staff can set a plurality of groups of limited sample trays 19 to load the experimental sample materials according to the experimental weight and the quantity of experimental materials.

[0036] Preferably, load-bearing rods 12 are fixedly connected to both sides of the inner wall of the loading rack 6, and the load-bearing slider 11 is provided with sliding holes corresponding to the load-bearing rods 12. The inner wall of the sliding hole is slidably connected to the load-bearing rods 12, so that the load-bearing slider 11 can slide smoothly on the inner wall of the loading rack 6.

[0037] Preferably, the limiting slide block 23 is provided with a limiting hole corresponding to the limiting rod 24 , the inner wall of the limiting hole is slidably connected to the limiting rod 24 , and the limiting rod 24 can limit the limiting slide block 23 and bear the load.

[0038] Preferably, two movable base frames 17 are provided, and multiple groups of movable pulleys 18 are provided at the bottom of the two movable base frames 17 to prevent the storage bracket 15 from shaking greatly when passing through the door frame 3.

[0039] Preferably, two manipulators 5 are provided and are disposed on both sides of the inner wall of the high vacuum equipment box 1 .

[0040] The specific working principle and use method of the present invention are:

[0041] S1: Open the sealed door 28 of the high vacuum equipment box 1 to load the material on the sample limiting tray 19 on the top of the material laboratory table 7. The No. 2 brake stepper motor 20 in the sample limiting tray 19 rotates the bidirectional lead screw 21 to drive the limiting sliders 23 on both sides to slide on the outer wall of the limiting rod 24 through the adjusting nut 22, so that the material clamps 25 on both sides can move to one side to clamp the material, so that the experimental material samples can be clamped and limited on the top of the material laboratory table 7 for easy access. Close the sealed door 28 of the high vacuum equipment box 1, start the hydraulic cylinder 26 to extend, and drive the sealing plate 27 to block the door frame 3. The air in the high vacuum equipment box 1 can be extracted by the vacuum pump unit 4 to create a high vacuum environment, and the staff can perform experimental operations on the internal materials through the manipulator 5;

[0042] S2: When it is necessary to take out the material in the high vacuum equipment box 1, the manipulator 5 moves the material to the sample limiting tray 19 on the top of the storage bracket 15 and clamps and limits the material through the material clamping claws 25, then starts the vacuum pump unit 4 to extract the air in the material conveying box 2, so that the material conveying box 2 and the high vacuum equipment box 1 can be in the same high vacuum environment, starts the hydraulic cylinder 26 to drive the door frame 3 to open, starts the No. 1 brake stepper motor 8 to rotate the ball screw 9, and can drive the load-bearing sliders 11 on both sides to slide on the outer wall of the load-bearing rod 12 through the screw nut 10, and the electromagnet 14 of the load-bearing rod 12 The support frame 13 is magnetically connected to the iron block 16 of the storage bracket 15, so that the storage bracket 15 on the top of the movable bottom frame 17 can be driven to move. After the storage bracket 15 is moved into the material conveying box 2, the magnetic connection between the electromagnet 14 and the iron block 16 is released, and the No. 1 brake stepper motor 8 is reversed to drive the support frame 13 to reset and return to the high vacuum equipment box 1, and the hydraulic cylinder 26 is started to drive the sealing plate 27 to seal the door frame 3, and the vacuum environment of the material conveying box 2 is released. The sealing door 28 of the material conveying box 2 can be opened to take out the material without affecting the vacuum environment in the high vacuum equipment box 1;

[0043] S3: When it is necessary to replenish the experimental sample materials, open the sealing door 28 of the material conveying box 2, load the experimental sample materials on the sample limiting tray 19 on the top of the storage bracket 15, start the vacuum pump unit 4 to extract the air in the material conveying box 2 to create a high vacuum environment consistent with the high vacuum equipment box 1, open the sealing plate 27, start the No. 1 brake stepper motor 8 to make the electromagnet 14 of the support frame 13 contact and magnetically connect the iron block 16 of the storage bracket 15, so that the support frame 13 can drive the storage bracket 15 to move into the high vacuum equipment box 1, close the hydraulic cylinder 26, and the material is transported to the high vacuum equipment box 1, and can be taken and operated by the manipulator 5 without affecting the vacuum environment in the high vacuum equipment box 1.

[0044] It should be noted that, in this document, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Contents not described in detail in this specification belong to the prior art known to professionals in the field.

[0045] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any ordinary technician in the industry can smoothly implement the present invention as shown in the drawings and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the present invention using the technical content disclosed above are all equivalent embodiments of the present invention. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the technical solution of the present invention.

Claims

1. A method for using a material sample limiter inside a high vacuum device, the material sample limiter inside the high vacuum device comprising a high vacuum device box (1), a material conveying box (2), a door frame (3), a vacuum pump unit (4), a storage bracket (15), and a sample limiter tray (19), Features: The high vacuum equipment box (1), the door frame (3) and the material conveying box (2) are connected in sequence; the vacuum pump unit (4) is connected to the high vacuum equipment box (1) and the material conveying box (2) respectively; the high vacuum equipment box (1) is equipped with a manipulator (5), a loading rack (6) and a material test bench (7); a No. 1 brake stepping motor (8) is fixedly installed on the inner wall of the loading rack (6); the No. 1 brake stepping motor (8) is fixedly connected to a ball screw (9); the outer wall of the ball screw (9) is threadedly connected to a screw nut (10); the screw Both sides of the nut (10) are fixedly connected to a load-bearing slider (11), the top of the load-bearing slider (11) is fixedly connected to a support frame (13), the support frame (13) is fixedly installed with an electromagnet (14), the storage bracket (15) is fixedly connected to an iron block (16) and a movable base frame (17), the bottom of the movable base frame (17) is evenly rotatably connected to a movable pulley (18), a plurality of sample limiting trays (19) are provided, and a No. 2 brake stepping motor (20) is fixedly installed on the inner wall of the sample limiting tray (19), and the No. 2 brake stepping motor (20) The motor (20) is fixedly connected to a bidirectional lead screw (21), and both sides of the outer wall of the bidirectional lead screw (21) are threadedly connected to adjusting nuts (22), and both sides of the adjusting nuts (22) are fixedly connected to limit sliders (23), and both sides of the inner wall of the sample limiting tray (19) are fixedly connected to limit rods (24), and the top of the limit slider (23) is fixedly connected to a material clamp (25), and the top of the door frame (3) is fixedly connected to a hydraulic cylinder (26), and the hydraulic cylinder (26) is fixedly connected to a sealing plate (27), and the high vacuum equipment box (1) and the material conveying box (2) are both provided with a sealing door (28); both sides of the inner wall of the loading rack (6) are fixedly connected with a load-bearing rod (12); the load-bearing slider (11) is provided with a sliding hole corresponding to the load-bearing rod (12), and the inner wall of the sliding hole is slidably connected to the load-bearing rod (12); the limit slider (23) is provided with a limit hole corresponding to the limit rod (24), and the inner wall of the limit hole is slidably connected to the limit rod (24); two movable base frames (17) are provided, and a plurality of movable pulleys (18) are provided at the bottom of the two movable base frames (17); The method of use includes the following steps: S1: Open the sealed door (28) of the high vacuum equipment box (1) and load the material onto the sample limiting tray (19) at the top of the material test bench (7). The second brake stepper motor (20) in the sample limiting tray (19) rotates the bidirectional lead screw (21) to drive the limit sliders (23) on both sides to slide on the outer wall of the limit rod (24) through the adjustment nut (22), so that the material clamps (25) on both sides move to the opposite side to clamp the material, so that the experimental material sample is clamped and limited at the top of the material test bench (7) for easy access. Close the sealed door (28) of the high vacuum equipment box (1), start the hydraulic cylinder (26) to extend, and drive the sealing plate (27) to block the door frame (3). The air in the high vacuum equipment box (1) is extracted by the vacuum pump unit (4) to create a high vacuum environment. The staff then uses the manipulator (5) to perform experimental operations on the internal materials. S2: When it is necessary to take out the material in the high vacuum equipment box (1), the manipulator (5) moves the material to the sample limiting tray (19) on the top of the storage bracket (15) and clamps and limits the material through the material clamping claw (25), then starts the vacuum pump unit (4) to extract the air in the material conveying box (2), so that the material conveying box (2) and the high vacuum equipment box (1) are in the same high vacuum environment, starts the hydraulic cylinder (26) to drive the door frame (3) to open, starts the No. 1 brake stepper motor (8) to rotate the ball screw (9) through the screw nut (10) to drive the load-bearing sliders (11) on both sides to slide on the outer wall of the load-bearing rod (12), and the electromagnet (14) of the load-bearing rod (12) and The iron block (16) of the storage bracket (15) is magnetically connected, so that the support frame (13) drives the storage bracket (15) on the top of the movable bottom frame (17) to move. After the storage bracket (15) is moved into the material conveying box (2), the magnetic connection between the electromagnet (14) and the iron block (16) is released, and the No. 1 brake stepper motor (8) is reversed to drive the support frame (13) to reset and return to the high vacuum equipment box (1), and the hydraulic cylinder (26) is started to drive the sealing plate (27) to seal the door frame (3), thereby releasing the vacuum environment of the material conveying box (2), and opening the sealing door (28) of the material conveying box (2) to take out the material without affecting the vacuum environment in the high vacuum equipment box (1); S3: When it is necessary to replenish the experimental sample materials, the sealing door (28) of the material conveying box (2) is opened, and the experimental sample materials are loaded on the sample limiting tray (19) on the top of the storage bracket (15). The vacuum pump unit (4) is started to extract the air in the material conveying box (2) to create a high vacuum environment consistent with the high vacuum equipment box (1), the sealing plate (27) is opened, and the No. 1 brake stepper motor (8) is started to make the electromagnet (14) of the support frame (13) contact and magnetically connect with the iron block (16) of the storage bracket (15), so that the support frame (13) drives the storage bracket (15) to move into the high vacuum equipment box (1), and the hydraulic cylinder (26) is closed, and the materials are transported to the high vacuum equipment box (1), and the manipulator (5) is used to take and operate, and the vacuum environment in the high vacuum equipment box (1) will not be affected.

2. A method for using a material limiter inside a high vacuum device according to claim 1, It is characterized in that A plurality of the sample limiting trays (19) are mounted on the top of the storage bracket (15) and the material test bench (7) by means of screws.

3. A method for using a material limiter inside a high vacuum device according to claim 1, It is characterized in that The robot arm (5) is provided with two separate locations on both sides of the inner wall of the high vacuum equipment box (1).

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