A lifting platform for maintaining the furnace of a semiconductor diffusion furnace

Abstract

The present invention relates to the technical field of lifting platforms, and in particular to a lifting platform for maintaining the furnace of a semiconductor diffusion furnace, comprising a furnace body, a lifting structure and a moving component, a moving component is arranged inside the lower end of the lifting structure, a sliding support plate component is fixedly connected to the upper end of the lifting structure, a pushing component is arranged on the upper end of the sliding support plate component, a clamping component is fixedly connected to one side of the pushing component, a buffer device is fixedly connected to the inner side of the clamping component, and a fixed engaging component is arranged on the inner side of the clamping component. In the present invention, the device can clamp the furnace body according to the diameter of the furnace body, thereby limiting the furnace body to prevent the furnace body from deviating from the device during transportation, and at the same time, when limiting the furnace body, the damage to the furnace body caused by the contact between the device and the furnace body can be reduced, and at the same time, the amplitude of the shaking of the furnace body can be reduced, thereby improving the stability of the furnace body during transportation and protecting the normal use of the furnace body.

Description

Technical Field

[0001] The invention relates to the technical field of lifting platforms, and in particular to a lifting platform for maintaining a furnace of a semiconductor diffusion furnace. Background Art

[0002] Diffusion furnace series equipment is mainly suitable for the calcination of rare metal powders, the diffusion and oxidation of semiconductor materials, and the film coating process of silicon nitride, phosphosilicate glass, borophosphosilicate glass, and polysilicon in the photovoltaic industry. The furnace in the diffusion furnace is the furnace body that heats the semiconductor material when it is diffused. When the furnace is repaired, it needs to be disassembled and transported, and a lifting platform is required for pushing it.

[0003] When the furnace chamber of a diffusion furnace needs to be disassembled for maintenance, multiple people are needed to disassemble it and lift it down from a high platform, and then lift the new furnace chamber to the same height and push it in. This requires a lot of manpower and material resources, takes a long time, and there are great safety hazards in the process. Moreover, the furnace chamber of the diffusion furnace is made of high-temperature resistant fiber material, and the furnace chamber contains resistance wire. When the furnace chamber of the diffusion furnace is transported by a lifting platform, if the road surface is uneven, it will cause bumps to the furnace chamber, which will cause the furnace chamber to collide with the lifting platform, and then damage the furnace chamber and the internal structure of the furnace chamber. Moreover, the existing device supports the furnace chamber by a bracket when transporting the furnace chamber, but the bracket is a fixed structure. The bracket cannot wrap the furnace chamber according to the size of the furnace chamber. The stability is low when the furnace chamber is transported, and the furnace chamber is easily damaged. Therefore, a lifting platform for maintenance of the furnace chamber of a semiconductor diffusion furnace is proposed to address the above problems. Summary of the invention

[0004] The object of the present invention is to provide a lifting platform for maintaining the furnace of a semiconductor diffusion furnace, which can clamp the furnace body according to its diameter, thereby limiting the furnace body and preventing the furnace body from deviating from the device during transportation. At the same time, when limiting the furnace body, it can reduce the damage to the furnace body caused by the contact between the device and the furnace body, and reduce the amplitude of the shaking of the furnace body, thereby improving the stability of the furnace body during transportation and protecting the normal use of the furnace body.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A lifting platform for maintaining the furnace of a semiconductor diffusion furnace comprises a furnace body, a lifting structure and a moving assembly, a moving assembly is arranged inside the lower end of the lifting structure, a sliding support plate assembly is fixedly connected to the upper end of the lifting structure, a pushing assembly is arranged on the upper end of the sliding support plate assembly, a clamping assembly is fixedly connected to one side of the pushing assembly, a buffer device is fixedly connected to the inner side of the clamping assembly, a fixed meshing assembly is arranged on the inner side of the clamping assembly, an oil-passing assembly is arranged on the upper end of the lifting structure, and one side of the buffer device is in contact with the outer side of the furnace body, the lifting structure comprises a bottom support plate, a telescopic empty slide rod is fixedly connected to the upper end of the bottom support plate, an electric telescopic rod is fixedly connected to the upper end of the bottom support plate, an oil pipe groove is arranged on the inner side of the upper end of the bottom support plate, and an inner side of the lower end of the bottom support plate The side is provided with a foot-moving groove, the inner side of the bottom support plate near the lower end of the oil pipe groove is provided with an oil folding groove, the moving component includes a universal wheel, the upper end of the universal wheel is provided with a foot connecting rod, the upper end of the foot connecting rod is fixedly connected to a floating main board, the outer side of the floating main board is fixedly connected to a third sealing ring, the lower end of the floating main board is fixedly connected to a fifth spring, and the upper end of the floating main board is fixedly connected to a fourth spring. The sliding support plate assembly includes a mountain support plate, the inner side of the mountain support plate near the side sliding column rod is provided with a friction-reducing slide groove, the inner side of the friction-reducing slide groove is fixedly connected to the side sliding column rod, the inner side of the upper end of the mountain support plate is provided with a stabilizing transfer groove, the upper end of the mountain support plate is fixedly connected to an arc support block, the upper end of the arc support block is fixedly connected to a semi-rubber ball, the pushing assembly includes a friction-reducing clamping block, the The inner side of the friction-reducing clamp is provided with a column slide groove, and the inner side of the lower end of the friction-reducing clamp is provided with a threaded reserved opening, and a two-way threaded rod is spirally connected to the inner side of the threaded reserved opening, and one side of the two-way threaded rod is fixedly connected to the end of the motor main shaft. The clamping assembly includes a transfer plate, and an arc rotation limit groove is provided on the inner side of one end of the transfer plate close to the arc rotation fixing plate, and the inner side of the arc rotation limit groove is rotatably connected to the arc rotation fixing plate through an axial rotation rod, and the outer side of the arc rotation fixing plate is fixedly connected to a third spring, and a solid punch opening is provided on the inner side of the transfer plate, and a rectangular inner slideway is provided on the inner side of the upper end of the transfer plate, and a spring rod slideway is provided through the inner side of the transfer plate close to the rectangular inner slideway, and the buffer device includes a shock-reducing part, and the shock-reducing part includes an oil shell with a rotation belt, and an oil storage column is provided on the inner side of the oil shell with a rotation belt The cam is provided with a second spring, and the cam is provided with a second spring which is provided on one side of the cam and the second spring is provided with a second spring which is provided on the other side of the cam.The fixing plate is provided with a rectangular groove on the inner side near the movable rectangular slideway, and a rectangular body slider is slidably connected to the inner side of the rectangular groove, and a rectangular sliding hole body is fixedly connected to one side of the rectangular sliding hole body, and a first spring is fixedly connected to one side of the rectangular sliding hole body, and a column rotation hole is provided on the inner side of the rectangular sliding hole body near the column rotation hole. A circle rotation groove is provided, and an arc-shaped rubber wheel is provided on one side of the slow sliding member, and a rotating rod is fixedly connected to the inner side of the arc-shaped rubber wheel, and a gear is fixedly connected to the upper end of the rotating rod. The oil-passing component includes a solid capsule shell, and the solid capsule shell A sac groove is provided on the inner side, one side of the upper end of the sac groove is fixedly connected to the upper end of the oil storage airbag, the inner side of the lower end of the oil storage airbag is fixedly connected to a lower branch pipe, the inner side of the upper end of the oil storage airbag is fixedly connected to an upper branch pipe, the upper end of the upper branch pipe is fixedly connected to a branch pipe, the upper end of the telescopic empty slide rod is fixedly connected to the lower end of the mountain support plate, the outer side of the lower end of the friction reduction clamp block slides inside the friction reduction slide groove, one side of the friction reduction clamp block is fixedly connected to one side of the arc rotation fixed plate, the outer side of the impact reduction part is fixedly connected to the inner side of the solid impact part mouth, and the upper end of the solid sac shell is fixedly connected to the lower end of the mountain support plate.

[0007] Preferably, the number of the telescopic empty slide rods is four, and the shape of the telescopic empty slide rod is two sections of hollow rectangular bodies. The two sections of the telescopic empty slide rod are slidably connected, the inner side of the oil filling pipe groove is connected with the inner side of the oil folding groove, the number of the oil folding grooves is two, and the top view cross-sectional shape of the oil folding groove is "T" shape, the number of the foot moving grooves is four, the inner side of the oil folding groove is connected with the inner side of the foot moving groove, and the shape of the foot moving groove is a cylindrical opening.

[0008] Preferably, the diameter of the universal wheel is larger than the diameter of the foot connecting rod and the foot moving groove, the outer side of the foot connecting rod is slidably connected to the inner side of the lower end of the foot moving groove, the lower end of the fifth spring is fixedly connected to one side of the lower end of the foot moving groove, the outer side of the floating main board slides on the inner side of the foot moving groove, the outer side of the third sealing ring fits with the inner side of the foot moving groove, the upper end of the fourth spring is fixedly connected to one side of the upper end of the foot moving groove, the number of the moving components is four, and hydraulic oil is provided on the upper end of the floating main board and the inner side of the upper end of the foot moving groove.

[0009] Preferably, the right side shape of the mountain support plate is in the shape of a "mountain", the anti-friction chute is in the shape of a rectangular body, the number of the side sliding poles is four, the shape of the side sliding poles is cylindrical, and the inner side of the anti-friction chute is connected to the inner side of the stable transfer groove.

[0010] Preferably, the lower end of the friction-reducing clamp block slides on the inner side of the friction-reducing slide groove through the side sliding column rod, the column sliding body groove is shaped as a cylindrical opening, the threaded reserved opening is shaped as a column opening, the inner side of the threaded reserved opening is provided with a thread, the inner side of the column sliding body groove is fitted with the outer side of the side sliding column rod, there are two friction-reducing clamp blocks, the bidirectional threaded rod is provided with two sections of thread, the two sections of thread of the bidirectional threaded rod are in opposite directions, and the outer side of the motor is fixedly connected to the rear end of the mountain support plate.

[0011] Preferably, the arc rotation limit groove is shaped as an arc-shaped body, the shaft rotation rod is shaped as a cylinder, the shaft rotation rod is fixedly connected to the inner side of the arc rotation limit groove, a cylindrical groove is provided on the inner side of one end of the arc rotation fixing plate, the outer side of the shaft rotation rod is rotatably connected to the inner side of the cylindrical groove of the arc rotation fixing plate, the end of the arc rotation fixing plate close to the arc rotation limit groove is shaped as a semi-hollow cylinder, and the end of the arc rotation fixing plate away from the arc rotation limit groove is shaped as a rectangular body, one end of the third spring is fixedly connected to one side of the transfer plate, the third spring is inclined downward by forty-five degrees with the vertical plane of the vertical transfer plate as the reference, and the third spring is symmetrically fixedly connected to the upper and lower ends of the arc rotation fixing plate with the horizontal arc rotation fixing plate as the center, the number of each group of the third springs is two, the number of the transfer plates is two groups, the number of the transfer plates is two, and the transfer plate below is inclined by forty-five degrees.

[0012] Preferably, the shock-absorbing part is in the shape of a hollow cylinder, the inner side of the oil pipe loading port is connected to the inner side of the oil storage column groove, the outer side of the arc-shaped rubber wheel is provided with a certain curvature, the rotating rod is in the shape of a cylinder, the rotating rod is rotatably connected to the inside of the slow-sliding part, the number of slow-sliding parts in each group is two, and the inner side of the branch pipe is connected to the inner side of the oil storage column groove.

[0013] Preferably, the outer side of the lubricating oil push plate slides inside the oil storage column groove, the outer side of the first sealing ring is fitted with the inner side of the oil storage column groove, and the second spring is fixedly connected to the inner side of the belt oil shell on one side away from the lubricating oil push plate, the inner side of the oil storage column groove is communicated with the inner side of the oil slow flow port, the outer side of the column rod double rods slides inside the column sliding circular mouth, the outer side of the column rod double rods is fitted with the inner side of the second sealing ring, the column sliding circular mouth, the second sealing ring and the column rod double rods are all in several groups, and the column sliding circular mouth, the second sealing ring and the column rod double rods are each in the number of two. The displacement limit baffle is in the shape of a rectangular body, the outer side of the rotating stick rod is connected to the inner side of the circle limiting rotation groove through a limiting rotating circle, the outer side of the rotating stick rod is fitted with the inner side of the column rotating hole, the shape of the matrix slider is a rectangular body, the shape of the matrix groove is opened in a rectangular body, the matrix groove is connected to the movable matrix slideway, and one side of the first spring is fixedly connected to the inner side of the solid plate

[0014] Preferably, the fixed meshing assembly includes a limited slip moment plate, a one-way threaded rod is spirally connected to the inner side of the limited slip moment plate, a hand-turning circle is fixedly connected to one side of the one-way threaded rod, a spring telescopic rod is fixedly connected to one side of the limited slip moment plate, a semi-ring tooth block is fixedly connected to one side of the spring telescopic rod, the limited slip moment plate is slidably connected to the inner side of the inner slideway of the moment body, the limited slip moment plate is in the shape of a rectangular body, the outer side of the one-way threaded rod is rotatably connected to the inner side of the transfer plate, the hand-turning circle protrudes from the outer side of one end of the transfer plate, one side of the semi-ring tooth block is meshed with the outer side of the gear, and the outer side of the spring telescopic rod slides on the inner side of the spring rod slideway.

[0015] Preferably, the outer side of the oil storage airbag moves on the inner side of the bag groove, the outer side of the lower end of the upper branch pipe is fixedly connected to the inner side of the upper end of the bag groove, the outer side of the upper end of the lower branch pipe is fixedly connected to the inner side of the lower end of the bag groove, the inner side of the oil storage airbag is hollow, the inner side of the lower branch pipe is connected with the inner side of the oil filling pipe groove, the inner side of the lower branch pipe, the inner side of the oil storage airbag, the inner side of the upper branch pipe and the inner side of the oil storage column groove are connected, a plurality of branch pipes are arranged on the upper end of the branch pipe, the branch pipes at the upper end of the branch pipe correspond one by one to the buffer device, and the outer side of the upper branch pipe moves on the inner side of the mountain support plate.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. In the present invention, by providing the bottom support plate, the telescopic empty slide rod, the electric telescopic rod and the slide support plate assembly, the device can adjust the height of the slide support plate assembly when maintaining the diffusion furnace, thereby reducing the labor intensity of the staff, improving the maintenance efficiency, and improving the safety factor of the maintenance;

[0018] 2. In the present invention, by providing a motor, a bidirectional threaded rod, a friction-reducing clamp, a sliding support plate assembly, a clamping assembly and a buffer device, when limiting the position of the furnace body, the motor is started to drive the two friction-reducing clamps to approach the furnace body at the same time through the device, so that the buffer device limits the outer side of the furnace body. The device can clamp the furnace body according to the diameter of the furnace body, thereby limiting the position of the furnace body to prevent the furnace body from deviating from the device during transportation. At the same time, when limiting the position of the furnace body, the damage to the furnace body caused by the contact between the device and the furnace body can be reduced;

[0019] 3. In the present invention, by means of the universal wheel, the foot connecting rod, the floating main board, the fourth spring, the fifth spring, the lifting structure, the buffer device and the oil passing assembly, when the furnace body is transported and passes through a bumpy section, the foot connecting rod and the floating main board slide inside the foot moving groove, driving the fourth spring and the fifth spring to deform, and at the same time pushing the hydraulic oil inside the foot moving groove to flow into the oil passing assembly and the buffer device, the device has a certain buffering effect on the furnace body, and at the same time reduces the amplitude of the shaking of the furnace body, improves the stability of the furnace body during transportation, and protects the normal use of the furnace body;

[0020] 4. In the present invention, by providing the slip limiting moment plate, one-way threaded rod, hand turning circle, spring telescopic rod, semi-ring tooth block, gear and rotating rod, when fixing the furnace body, rotating the hand turning circle drives the semi-ring tooth block to move through the device, so that the semi-ring tooth block is engaged with the outer side of the gear. The device can fix the furnace body after clamping to prevent the furnace body from sliding when transporting the furnace body, and at the same time facilitate the removal of the furnace body to improve the transportation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 It is a schematic diagram of the furnace body structure of the present invention;

[0023] Figure 3 This is a schematic diagram of the bottom support plate structure of the present invention;

[0024] Figure 4 This is a schematic diagram of the oil pipe tank structure of the present invention;

[0025] Figure 5 For the present invention Figure 4 A schematic diagram of the structure at A;

[0026] Figure 6 This is a schematic diagram of the foot-moving groove structure of the present invention;

[0027] Figure 7 This is a schematic diagram of the universal wheel structure of the present invention;

[0028] Figure 8 It is a schematic diagram of the structure of the mountain support plate of the present invention;

[0029] Fig. 9 This is a schematic diagram of the arc support block structure of the present invention;

[0030] Fig.10 It is a schematic diagram of the motor structure of the present invention;

[0031] Fig.11 It is a schematic diagram of the structure of the friction reducing clamp block of the present invention;

[0032] Fig.12 For the present invention Fig.11 Schematic diagram of the structure at B;

[0033] Fig.13 This is a schematic diagram of the solid capsule shell structure of the present invention;

[0034] Fig.14 It is a schematic diagram of the transfer plate structure of the present invention;

[0035] Fig.15 This is a schematic diagram of the arc-rotating fixing plate structure of the present invention;

[0036] Fig.16 For the present invention Fig.15 Schematic diagram of the structure at C;

[0037] Fig.17 This is a schematic diagram of the structure of the buffer device of the present invention;

[0038] Fig.18 This is a schematic diagram of the oil pipe port installation structure of the present invention;

[0039] Fig.19This is a schematic diagram of the oil-transfer shell structure of the present invention;

[0040] Fig. 20 This is a schematic diagram of the column smooth round mouth structure of the present invention;

[0041] Fig.21 This is a schematic diagram of the structure of the slow-sliding member of the present invention;

[0042] Fig. 22 It is a schematic diagram of the structure of the slip-limiting moment plate of the present invention;

[0043] Fig.23 For the present invention Fig. 22 Schematic diagram of the structure at D.

[0044] In the figure: 1. furnace body; 2. lifting structure; 21. bottom support plate; 22. telescopic empty slide rod; 23. electric telescopic rod; 24. oil pipe slot; 25. foot-moving slot; 26. oil folding slot; 3. moving assembly; 31. universal wheel; 32. connecting foot rod; 33. fifth spring; 34. floating main board; 35. third sealing ring; 36. fourth spring; 4. sliding support plate assembly; 41. mountain support plate; 42. side sliding column rod; 43. stable transfer slot; 44. reducing Friction slide; 45, arc support block; 46, half rubber ball; 5, push assembly; 51, friction reduction clamp; 52, column slide body groove; 53, threaded reserved opening; 54, two-way threaded rod; 55, motor; 6, clamping assembly; 61, transfer plate; 62, arc rotation limit groove; 63, arc rotation fixed plate; 64, shaft rotation rod; 65, third spring; 66, solid punch opening; 67, inner slideway of the matrix; 68, spring rod slideway; 7, buffer device; 71, shock reduction part; 7101 , belt oil shell; 7102, slow-lubricating oil push plate; 7103, second spring; 7104, column rod double rod; 7105, second sealing ring; 7106, displacement limit baffle; 7107, oil storage column groove; 7108, first sealing ring; 7109, column sliding round mouth; 71010, oil slow flow mouth; 72, oil pipe installation mouth; 73, arc rubber wheel; 74, slow-sliding part; 741, fixed plate; 742, rectangular groove; 743, movable rectangular slideway; 74 4. First spring; 745. Rectangular sliding hole; 746. Rectangular body slider; 747. Column rotating hole; 748. Circle limiting rotating groove; 75. Gear; 76. Rotating rod; 8. Fixed meshing assembly; 81. Limited sliding moment plate; 82. One-way threaded rod; 83. Hand rotating circle; 84. Spring telescopic rod; 85. Semi-ring gear block; 9. Oil passing assembly; 91. Solid capsule shell; 92. Capsule groove; 93. Oil storage airbag; 94. Lower branch pipe; 95. Upper branch pipe; 96. Branch pipe. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] See also Figure 1-23 , the present invention provides a technical solution:

[0047] A lifting platform for furnace maintenance of a semiconductor diffusion furnace comprises a furnace body 1, a lifting structure 2 and a moving component 3, wherein the moving component 3 is arranged inside the lower end of the lifting structure 2, a sliding support plate component 4 is fixedly connected to the upper end of the lifting structure 2, a pushing component 5 is arranged on the upper end of the sliding support plate component 4, a clamping component 6 is fixedly connected to one side of the pushing component 5, a buffer device 7 is fixedly connected to the inner side of the clamping component 6, a fixed engagement component 8 is arranged on the inner side of the clamping component 6, an oil passing component 9 is arranged on the upper end of the lifting structure 2, one side of the buffer device 7 is in contact with the outer side of the furnace body 1, the lifting structure 2 comprises a bottom support plate 21, a telescopic empty slide rod 22 is fixedly connected to the upper end of the bottom support plate 21, an electric telescopic rod 23 is fixedly connected to the upper end of the bottom support plate 21, and an oil pipe groove 24 is arranged on the inner side of the upper end of the bottom support plate 21 A foot-moving groove 25 is provided on the inner side of the lower end of the bottom support plate 21, and an oil-folding groove 26 is provided on the inner side of the bottom support plate 21 near the lower end of the oil pipe groove 24. The moving component 3 includes a universal wheel 31, and a foot connecting rod 32 is provided on the upper end of the universal wheel 31. A floating main board 34 is fixedly connected to the upper end of the foot connecting rod 32. A third sealing ring 35 is fixedly connected to the outer side of the floating main board 34. A fifth spring 33 is fixedly connected to the lower end of the floating main board 34. A fourth spring 36 is fixedly connected to the upper end of the floating main board 34. The sliding support plate assembly 4 includes a mountain support plate 41. A friction-reducing slide groove 44 is provided on the inner side of the mountain support plate 41 near the side sliding column rod 42. The side sliding column rod 42 is fixedly connected to the inner side of the friction-reducing slide groove 44. A stable transfer groove 43 is provided on the inner side of the upper end of the mountain support plate 41. The upper end of the mountain support plate 41 is fixedly connected to an arc The support block 45 has a semi-rubber ball 46 fixedly connected to the upper end of the arc support block 45. The pushing assembly 5 includes a friction-reducing clamp 51, a column slide groove 52 is provided on the inner side of the friction-reducing clamp 51, a threaded reserved opening 53 is provided on the inner side of the lower end of the friction-reducing clamp 51, a bidirectional threaded rod 54 is spirally connected to the inner side of the threaded reserved opening 53, and one side of the bidirectional threaded rod 54 is fixedly connected to the end of the main shaft of the motor 55. The clamping assembly 6 includes a transfer plate 61, an arc rotation limiting groove 62 is provided on the inner side of one end of the transfer plate 61 close to the arc rotation fixing plate 63, and the inner side of the arc rotation limiting groove 62 is rotatably connected to the arc rotation fixing plate 63 through the shaft rotating rod 64, and the outer side of the arc rotation fixing plate 63 is fixedly connected to the third spring 65, a solid punch opening 66 is provided on the inner side of the transfer plate 61, and a rectangular internal slideway 67 is provided on the inner side of the upper end of the transfer plate 61. A spring rod slideway 68 is provided through the inner side of the transfer plate 61 near the inner slideway 67 of the rectangular body, the buffer device 7 includes a shock absorbing component 71, and the shock absorbing component 71 includes a belt oil transfer shell 7101, an oil storage column groove 7107 is provided on the inner side of the belt oil transfer shell 7101, the inner side of the oil storage column groove 7107 is fitted with the outer side of the first sealing ring 7108, a slow lubricating oil push plate 7102 is fixedly connected to the inner side of the first sealing ring 7108, and the outer side of the slow lubricating oil push plate 7102 is slidably connected to the oil storage column groove 7107, a second spring 7103 is provided on one side of the slow lubricating oil push plate 7102, and a column rod double rod 7104 is fixedly connected to the side of the slow lubricating oil push plate 7102 away from the second spring 7103, and a column rod round mouth 7109 is provided on the inner side of the belt oil transfer shell 7101 near one end of the column rod double rod 7104.An oil slow flow port 71010 is provided on the inner side of the slow lubrication oil push plate 7102, a second sealing ring 7105 is fixedly connected to the inner side of the column smooth circular port 7109, a limited displacement baffle 7106 is fixedly connected to one side of the column rod double rod 7104, an oil pipe loading port 72 is provided on the inner side of one end of the shock reducing member 71, a slow sliding member 74 is fixedly connected to one side of the shock reducing member 71, and the slow sliding member 74 includes a fixed plate 741, a movable torque slide 743 is provided on the inner side of the fixed plate 741 away from the shock reducing member 71, a rectangular groove 742 is provided on the inner side of the fixed plate 741 close to the movable torque slide 743, a rectangular body slider 746 is slidably connected to the inner side of the rectangular groove 742, a rectangular sliding hole body 745 is fixedly connected to one side of the rectangular sliding hole body 745, a first spring 744 is fixedly connected to one side of the rectangular sliding hole body 745, a column rotation hole 747 is provided on the inner side of the rectangular sliding hole body 745, and the rectangular sliding hole body 745 is close to the column rotation hole 747. A circle limiting groove 748 is provided on the inner side, a curved rubber wheel 73 is provided on one side of the slow sliding member 74, a rotating rod 76 is fixedly connected to the inner side of the curved rubber wheel 73, a gear 75 is fixedly connected to the upper end of the rotating rod 76, the oil-passing assembly 9 includes a solid capsule shell 91, a capsule groove 92 is provided on the inner side of the solid capsule shell 91, one side of the upper end of the capsule groove 92 is fixedly connected to the upper end of the oil storage airbag 93, a lower branch pipe 94 is fixedly connected to the inner side of the lower end of the oil storage airbag 93, and the oil storage airbag 93 is fixedly connected to the lower branch pipe 94. The upper end of 93 is fixedly connected to the inner side of the upper branch pipe 95, and the upper end of the upper branch pipe 95 is fixedly connected to the branch pipe 96. The upper end of the telescopic empty slide rod 22 is fixedly connected to the lower end of the mountain support plate 41. The lower end of the friction-reducing clamp block 51 slides on the inner side of the friction-reducing slide groove 44. One side of the friction-reducing clamp block 51 is fixedly connected to one side of the arc-rotating fixed plate 63. The outer side of the impact-reducing member 71 is fixedly connected to the inner side of the solid impact member opening 66. The upper end of the solid capsule shell 91 is fixedly connected to the lower end of the mountain support plate 41.

[0048] There are four telescopic empty slide rods 22, and the shape of the telescopic empty slide rod 22 is two sections of hollow rectangular bodies. The two sections of the telescopic empty slide rod 22 are slidably connected. The inner side of the oil pipe groove 24 is connected to the inner side of the oil folding groove 26. There are two oil folding grooves 26. The top view of the oil folding groove 26 is in a "T" shape. There are four foot-moving grooves 25. The inner side of the oil folding groove 26 is connected to the inner side of the foot-moving groove 25. The foot-moving groove 25 is in a cylindrical shape. Through the above arrangement, the height adjustment effect of the mountain support plate 41 can be achieved. The diameter of the universal wheel 31 is larger than the diameter of the connecting foot rod 32 and the foot-moving groove 25. The outer side of the connecting foot rod 32 is slidably connected to the inner side of the lower end of the foot-moving groove 25. The lower end of the fifth spring 33 is fixedly connected to one side of the lower end of the foot-moving groove 25. The floating main board 3 4 slides on the inner side of the foot-moving groove 25, the outer side of the third sealing ring 35 fits with the inner side of the foot-moving groove 25, the upper end of the fourth spring 36 is fixedly connected to one side of the upper end of the foot-moving groove 25, the number of the moving components 3 is four, the upper end of the floating main board 34 and the inner side of the upper end of the foot-moving groove 25 are provided with hydraulic oil, through the above arrangement, it is convenient to move the entire device, and at the same time, it plays a buffering effect on the device when the device is moved, thereby improving the stability of the device, the right side of the mountain support plate 41 is in the shape of a "mountain", the shape of the friction-reducing slide 44 is a rectangular body, the number of the side sliding column rods 42 is four, the shape of the side sliding column rod 42 is cylindrical, the inner side of the friction-reducing slide 44 is connected to the inner side of the stable transfer groove 43, through the above arrangement, it plays a limiting effect on the movement of the friction-reducing clamp 51, and the friction-reducing The lower end of the clamp block 51 slides on the inner side of the friction-reducing slide groove 44 through the side sliding column rod 42. The column sliding body groove 52 is shaped as a cylinder, and the threaded reserved opening 53 is shaped as a column. The inner side of the threaded reserved opening 53 is provided with a thread. The inner side of the column sliding body groove 52 fits the outer side of the side sliding column rod 42. There are two friction-reducing clamp blocks 51. The two-way threaded rod 54 is provided with two sections of thread. The two sections of thread of the two-way threaded rod 54 are in opposite directions. The outer side of the motor 55 is fixedly connected to the rear end of the mountain support plate 41. Through the above arrangement, when the motor 55 is started, the device drives the friction-reducing clamp blocks 51 at both ends to approach or move away at the same time, which has the effect of limiting the furnace body 1 and reducing the friction between the friction-reducing clamp block 51 and the mountain support plate 41 when it moves. The shape of the arc limit groove 62 is The arc body is opened, the shaft rotating rod 64 is in the shape of a cylinder, the shaft rotating rod 64 is fixedly connected to the inner side of the arc rotation limit groove 62, a cylindrical groove is opened on the inner side of one end of the arc rotation fixing plate 63, the outer side of the shaft rotating rod 64 is rotatably connected to the inner side of the cylindrical groove of the arc rotation fixing plate 63, the end of the arc rotation fixing plate 63 close to the arc rotation limit groove 62 is in the shape of a semi-hollow cylinder, and the end of the arc rotation fixing plate 63 away from the arc rotation limit groove 62 is in the shape of a rectangular body, one end of the third spring 65 is fixedly connected to one side of the transfer plate 61, the third spring 65 is tilted downward by forty-five degrees with the vertical transfer plate 61 as the vertical plane reference, the third spring 65 is symmetrically fixedly connected to the upper and lower ends of the arc rotation fixing plate 63 with the horizontal arc rotation fixing plate 63 as the center, the number of each group of third springs 65 is two, and the number of transfer plates 61 is two groups,There are two transfer plates 61 in each group, and the lower transfer plate 61 is inclined at forty-five degrees. The branch pipe 96 is made of hose material and does not hinder the rotation of the transfer plate 61. Through the above arrangement, the transfer plate 61 is limited when it rotates. The lower transfer plate 61 drives the third spring 65 to extend or contract. The third spring 65 corrects the arc-shaped fixed plate 63 when the transfer plate 61 is idle. The impact-reducing part 71 is in the shape of a hollow cylinder. The inner side of the oil pipe installation port 72 is connected to the inner side of the oil storage column groove 7107. The outer side of the arc-shaped rubber wheel 73 is provided with a certain curvature. The rotating rod 76 is in the shape of a cylinder. The rotating rod 76 is rotatably connected to the inside of the slow-sliding part 74. There are two slow-sliding parts 74 in each group. One end of the branch pipe 96 is fixedly connected to the inner side of the oil pipe installation port 72. The inner side of the tube 96 is connected with the inner side of the oil storage column groove 7107. Through the above arrangement, it is convenient to push the transfer plate 61 to move when the shock reducing part 71 is active, thereby achieving the effect of limiting the furnace body 1 according to the diameter of the furnace body 1. The outer side of the slow-lubricating oil push plate 7102 slides on the inner side of the oil storage column groove 7107, and the outer side of the first sealing ring 7108 fits with the inner side of the oil storage column groove 7107. The side of the second spring 7103 away from the slow-lubricating oil push plate 7102 is fixedly connected to the inner side of the oil transfer shell 7101, and the inner side of the oil storage column groove 7107 is connected with the inner side of the oil slow flow port 71010. The outer side of the column rod double rod 7104 slides on the inner side of the column smooth circular mouth 7109, and the outer side of the column rod double rod 7104 fits with the inner side of the second sealing ring 7105. The number of sealing rings 7105 and column rod double rods 7104 are all in several groups, and the number of each group of column sliding round mouth 7109, second sealing ring 7105 and column rod double rod 7104 is two, the displacement limit baffle 7106 is in the shape of a rectangular body, the outer side of the rotating stick rod 76 is connected to the inner side of the circle limit groove 748 through a limited rotating circle, the outer side of the rotating stick rod 76 is fitted with the inner side of the column rotating hole 747, the rectangular body slider 746 is in the shape of a rectangular body, the rectangular groove 742 is in the shape of a rectangular body, the rectangular groove 742 is connected to the movable rectangular slide 743, and one side of the first spring 744 is fixedly connected to the inner side of the fixed plate 741. Through the above arrangement, the furnace body 1 has the effect of buffering, and at the same time, the hydraulic oil flows from the oil slow flow port 71010 to improve the stability of the furnace body 1 The fixed meshing assembly 8 includes a limited slip moment plate 81, a one-way threaded rod 82 is spirally connected to the inner side of the limited slip moment plate 81, a hand-turning circle 83 is fixedly connected to one side of the one-way threaded rod 82, a spring telescopic rod 84 is fixedly connected to one side of the limited slip moment plate 81, and a semi-ring tooth block 85 is fixedly connected to one side of the spring telescopic rod 84. The limited slip moment plate 81 is slidably connected to the inner side of the inner slideway 67 of the main body. The limited slip moment plate 81 is in the shape of a rectangular body, and the outer side of the one-way threaded rod 82 is rotatably connected to the inner side of the transfer plate 61. The hand-turning circle 83 protrudes from the outer side of one end of the transfer plate 61, and one side of the semi-ring tooth block 85 meshes with the outer side of the gear 75. The outer side of the spring telescopic rod 84 slides on the inner side of the spring rod slideway 68. Through the above arrangement, the furnace body 1 can be fixed to prevent the furnace body 1 from being transported.The furnace body 1 is separated from the arc rubber wheel 73, the outer side of the oil storage airbag 93 moves inside the bag groove 92, the outer side of the lower end of the upper branch pipe 95 is fixedly connected to the inner side of the upper end of the bag groove 92, and the outer side of the upper end of the lower branch pipe 94 is fixedly connected to the inner side of the lower end of the bag groove 92. The inner side of the oil storage airbag 93 is hollow, and the inner side of the lower branch pipe 94 is connected to the inner side of the oil filling pipe groove 24. The inner side of the lower branch pipe 94, the inner side of the oil storage airbag 93, and the inner side of the upper branch pipe 95 are connected to the inner side of the oil storage column groove 7107. A plurality of branch pipes are arranged at the upper end of the branch pipe 96, and the branch pipes at the upper end of the branch pipe 96 correspond to the buffer device 7 one by one. The outer side of the upper branch pipe 95 moves inside the mountain support plate 41. Through the above arrangement, the stability of the device and the stability of the furnace body 1 are improved.

[0049] Working process: Embodiment 1: During use of the device, the external power supply is energized to realize adjusting the height of the sliding support plate assembly 4, and the electric telescopic rod 23 is started. The lower end of the electric telescopic rod 23 is fixed to the upper end of the bottom support plate 21, and the upper end of the electric telescopic rod 23 is fixed to the lower end of the mountain support plate 41. The electric telescopic rod 23 is extended to push the mountain support plate 41 to move. The movement of the mountain support plate 41 drives the telescopic empty sliding rod 22 fixedly connected at the lower end to extend. The telescopic empty sliding rod 22 is fixedly connected to the upper ends of the four corners of the bottom support plate 21 to provide support when the mountain support plate 41 moves. When the mountain support plate 41 moves to the lower end close to the furnace body 1, the furnace body 1 is moved to the upper end of the arc support block 45. The semi-rubber ball 46 fixedly connected to the upper end of the arc support block 45 has the effect of buffering the furnace body 1 and protecting the outside of the furnace body 1. At this time, the height adjustment effect of the mountain support plate 41 can be achieved;

[0050] In the second embodiment, when the furnace body 1 is clamped and limited, the motor 55 fixedly connected to the inner side of the rear end of the mountain support plate 41 is started, and the main shaft of the motor 55 rotates to drive the bidirectional threaded rod 54 fixedly connected to the end of the main shaft to rotate. The rotation of the bidirectional threaded rod 54 drives the anti-friction clamp 51 spirally connected on the outer side to move. The outer side of the bidirectional threaded rod 54 is spirally connected to the inner side of the threaded reserved opening 53, and the inner side of the anti-friction clamp 51 slides on the outer side of the side sliding column rod 42 through the column sliding body groove 52, which has the effect of limiting the movement of the anti-friction clamp 51. The lower end of the anti-friction clamp 51 slides on the inner side of the friction reducing groove 44 through the side sliding column rod 42, which reduces the friction between the anti-friction clamp 51 and the mountain support plate 41 when it moves. The movement of the anti-friction clamp 51 drives the arc-rotating fixed plate 63 fixedly connected on one side to move. The arc rotating fixed plate 63 moves, drives the inner rotating connecting shaft rotating rod 64 to move, the shaft rotating rod 64 moves, drives the transfer plate 61 fixedly connected at both ends to move, the transfer plate 61 moves, drives the inner fixedly connected shock absorbing member 71 to move, the shock absorbing member 71 moves, drives the slow sliding member 74 to move. When the outer side of the arc rubber wheel 73 fits with the outer side of the furnace body 1, the arc rubber wheel 73 drives the inner fixedly connected rotating stick rod 76 to move, the rotating stick rod 76 moves, drives the outer rotating connected rectangular sliding hole body 745 to move, the rotating stick rod 76 is connected to the inner side of the circle limiting rotating groove 748 through the limit rotating circle, and at the same time, the outer side of the rotating stick rod 76 fits with the inner side of the column rotating hole 747, and the rectangular sliding hole body 745 is slidably connected to the inner side of the rectangular bar groove 742 through the rectangular body slider 746, which plays a role in the rectangular sliding When the locking cam 730 is in the state of being moved, the locking cam 730 is in the state of being moved, and the locking cam 730 is in the state of being moved. The inner side of the plate 61 is rotatably connected to the outer side of one end of the arc rotation fixing plate 63 through the shaft rotating rod 64. At the same time, the shaft rotating rod 64 fixedly connected to the inner side of the arc rotation limiting groove 62 rotates in the inner groove of one end of the arc rotation fixing plate 63, which has the effect of limiting the rotation of the transfer plate 61. The lower transfer plate 61 drives the third spring 65 to extend or contract. The third spring 65 has the effect of correcting the arc rotation fixing plate 63 when the transfer plate 61 is idle. According to the number of the clamping components 6 and the buffer device 7, and the tilt setting of the transfer plate 61, when the buffer device 7 limits the furnace body 1, the furnace body 1 is lifted up by a distance of one centimeter, so that there is a distance of one centimeter between the furnace body 1 and the arc support block 45. The outer side of the semi-rubber ball 46 is in contact with the outer side of the lower end of the furnace body 1.At this time, the furnace body 1 can be limited.

[0051] In the third embodiment, when the furnace body 1 needs to be fixed, the hand ring 83 is rotated. The rotation of the hand ring 83 drives the one-way threaded rod 82 fixedly connected on one side to rotate. The outer side of the one-way threaded rod 82 is rotatably connected to the inner side of one end of the transfer plate 61, which has the effect of limiting the rotation of the one-way threaded rod 82. The rotation of the one-way threaded rod 82 drives the limited slip moment plate 81 spirally connected on the outer side to move. The slider of the limited slip moment plate 81 is movably connected to the inner side of the slideway 67 in the body, which has the effect of limiting the movement of the limited slip moment plate 81. The movement of the limited slip moment plate 81 drives the spring telescopic rod 84 fixedly connected on one side to move. The outer side of the spring telescopic rod 84 is movable The spring rod slide 68 moves inside the spring rod slide 68, and the spring rod slide 68 also has the effect of storing the spring telescopic rod 84. The movement of the spring telescopic rod 84 drives the semi-ring tooth block 85 fixedly connected on one side to move. When one side of the semi-ring tooth block 85 meshes with the outer side of the gear 75, the spring telescopic rod 84 moves and contracts. Under the action of the spring telescopic rod 84, the semi-ring tooth block 85 keeps meshing with the outer side of the gear 75, thereby limiting the rotation of the rotating rod 76 and the arc-shaped rubber wheel 73. At this time, the furnace body 1 can be fixed to prevent the furnace body 1 from being separated from the arc-shaped rubber wheel 73 when the furnace body 1 is transported.

[0052] In the fourth embodiment, when the furnace body 1 is transported to achieve the effect of protecting the furnace body 1, the bottom support plate 21 is pushed to move, and the movement of the bottom support plate 21 drives the universal wheel 31 at the lower end to move, and the universal wheel 31 rolls on the ground. When encountering a bumpy road section, the universal wheel 31 drives the connecting foot rod 32 fixedly connected to the upper end to move, and the movement of the connecting foot rod 32 drives the floating main board 34 fixedly connected to the upper end to move, and the outer side of the floating main board 34 is fitted with the inner side of the foot groove 25 through the third sealing ring 35, which plays a sealing effect between the floating main board 34 and the bottom support plate 21, preventing liquid The hydraulic oil flows out, and the floating mainboard 34 slides inside the foot-moving groove 25. The floating mainboard 34 drives the fourth spring 36 fixedly connected at the upper end to elastically contract, and the floating mainboard 34 drives the fifth spring 33 fixedly connected at the lower end to extend, or the fourth spring 36 extends and the fifth spring 33 contracts. The fifth spring 33 and the fourth spring 36 play a buffering effect when the universal wheel 31 moves. At the same time, the floating mainboard 34 pushes the hydraulic oil inside the foot-moving groove 25 to flow from the oil-folding groove 26 into the oil-loading pipe groove 24, and then into the lower branch pipe 94 from the oil-loading pipe groove 24. The oil storage airbag 93 is expanded, and the oil storage airbag 93 has the effect of further buffering the moving component 3. At the same time, part of the hydraulic oil in the oil storage airbag 93 flows from the upper branch pipe 95 into the branch pipe 96, flows from the branch pipe 96 into the oil pipe loading port 72, and flows from the oil pipe loading port 72 into the oil storage column groove 7107. Under the impact of the hydraulic oil, the lubricating oil push plate 7102 moves a distance, and at the same time, part of the hydraulic oil flows in the oil slow flow port 71010, which has the effect of buffering the liquid oil. When the furnace body 1 shakes, When the furnace body 1 is in motion, the arc-shaped rubber wheel 73 is squeezed, pushing the displacement limit baffle 7106 to move, and the displacement limit baffle 7106 drives the column double rod 7104 to move, and the column double rod 7104 pushes the slow-lubricating oil push plate 7102 to move. The second spring 7103 fixedly connected to one side of the slow-lubricating oil push plate 7102 has the effect of buffering the furnace body 1. At the same time, the hydraulic oil flows from the oil slow flow port 71010, which can improve the stability of the furnace body 1, thereby achieving the effect of protecting the furnace body 1 during transportation and reducing the probability of damage to the furnace body 1.

[0053] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A lifting platform for maintaining a furnace of a semiconductor diffusion furnace, comprising a furnace body (1), a lifting structure (2) and a moving component (3), characterized in that: A moving assembly (3) is provided inside the lower end of the lifting structure (2); a sliding support plate assembly (4) is fixedly connected to the upper end of the lifting structure (2); a pushing assembly (5) is provided on the upper end of the sliding support plate assembly (4); a clamping assembly (6) is fixedly connected to one side of the pushing assembly (5); a buffer device (7) is fixedly connected to the inner side of the clamping assembly (6); a fixed engagement assembly (8) is provided on the inner side of the clamping assembly (6); an oil passing assembly (9) is provided on the upper end of the lifting structure (2); one side of the buffer device (7) is in contact with the outer side of the furnace body (1); the lifting structure (2) comprises a bottom support plate (21); a telescopic empty slide rod (22) is fixedly connected to the upper end of the bottom support plate (21); The electric telescopic rod (23) is provided with an oil pipe groove (24) on the inner side of the upper end of the bottom support plate (21), a foot groove (25) is provided on the inner side of the lower end of the bottom support plate (21), and an oil folding groove (26) is provided on the inner side of the bottom support plate (21) near the lower end of the oil pipe groove (24). The moving component (3) comprises a universal wheel (31), a foot connecting rod (32) is provided on the upper end of the universal wheel (31), a floating main board (34) is fixedly connected to the upper end of the foot connecting rod (32), a third sealing ring (35) is fixedly connected to the outer side of the floating main board (34), a fifth spring (33) is fixedly connected to the lower end of the floating main board (34), and a fourth spring (36) is fixedly connected to the upper end of the floating main board (34). The sliding support plate component ( 4) comprises a mountain support plate (41), wherein a friction-reducing slide groove (44) is provided on the inner side of the mountain support plate (41) near the side sliding column rod (42), and the side sliding column rod (42) is fixedly connected to the inner side of the friction-reducing slide groove (44), and a stabilizing transfer groove (43) is provided on the inner side of the upper end of the mountain support plate (41), and an arc support block (45) is fixedly connected to the upper end of the mountain support plate (41), and a semi-rubber ball (46) is fixedly connected to the upper end of the arc support block (45), and the pushing assembly (5) comprises a friction-reducing clamping block (51), and a column sliding body groove (52) is provided on the inner side of the friction-reducing clamping block (51), and a threaded reserved opening (53) is provided on the inner side of the lower end of the friction-reducing clamping block (51), and a bidirectional threaded rod (54) is spirally connected to the inner side of the threaded reserved opening (53), and the One side of the bidirectional threaded rod (54) is fixedly connected to the end of the main shaft of the motor (55); the clamping assembly (6) comprises a transfer plate (61); an arc rotation limiting groove (62) is provided on the inner side of one end of the transfer plate (61) close to the arc rotation fixing plate (63); the inner side of the arc rotation limiting groove (62) is rotatably connected to the arc rotation fixing plate (63) via a shaft rotating rod (64); the outer side of the arc rotation fixing plate (63) is fixedly connected to a third spring (65); a solid punching piece opening (66) is provided on the inner side of the transfer plate (61); a rectangular inner slideway (67) is provided on the inner side of the upper end of the transfer plate (61); a spring rod slideway (68) is provided through the inner side of the transfer plate (61) close to the rectangular inner slideway (67); the buffer device (7) comprises a shock absorbing piece (71);The shock-reducing member (71) comprises an oil-switch shell (7101), an oil storage column groove (7107) is provided on the inner side of the oil-switch shell (7101), the inner side of the oil storage column groove (7107) is fitted with the outer side of a first sealing ring (7108), a lubricating oil push plate (7102) is fixedly connected to the inner side of the first sealing ring (7108), the outer side of the lubricating oil push plate (7102) is slidably connected to the oil storage column groove (7107), a second spring (7103) is provided on one side of the lubricating oil push plate (7102), a column rod double rod (7104) is fixedly connected to one side of the lubricating oil push plate (7102) away from the second spring (7103), and a column rod (7104) is provided on the inner side of the oil-switch shell (7101) close to one end of the column rod double rod (7104). The column smooth round mouth (7109) is provided with an oil slow flow mouth (71010) on the inner side of the slow lubrication oil push plate (7102); a second sealing ring (7105) is fixedly connected to the inner side of the column smooth round mouth (7109); one side of the column rod double rod (7104) is fixedly connected to a limited displacement baffle (7106); an oil pipe installation mouth (72) is provided on the inner side of one end of the damping member (71); a slow lubrication member (74) is fixedly connected to one side of the damping member (71); the slow lubrication member (74) comprises a fixed plate (741); a movable torque slideway (743) is provided on the inner side of the fixed plate (741) away from the damping member (71); a rectangular groove (742) is provided on the inner side of the fixed plate (741) close to the movable torque slideway (743); the ... A rectangular body slider (746) is slidably connected to the inner side of the groove (742); a rectangular body slider (746) is fixedly connected to a rectangular sliding hole body (745) on one side; a first spring (744) is fixedly connected to a rectangular sliding hole body (745) on one side; a column rotation hole (747) is provided on the inner side of the rectangular sliding hole body (745); a circle limiting rotation groove (748) is provided on the inner side of the rectangular sliding hole body (745) near the column rotation hole (747); an arc-shaped rubber wheel (73) is provided on one side of the slow sliding member (74); a rotating rod (76) is fixedly connected to the inner side of the arc-shaped rubber wheel (73); a gear (75) is fixedly connected to the upper end of the rotating rod (76); the oil-passing assembly (9) comprises a solid capsule shell (91); a capsule shell (91) is provided on the inner side of the solid capsule shell (91); A groove (92), one side of the upper end of the sac groove (92) is fixedly connected to the upper end of the oil storage airbag (93), the inner side of the lower end of the oil storage airbag (93) is fixedly connected to a lower branch pipe (94), the inner side of the upper end of the oil storage airbag (93) is fixedly connected to an upper branch pipe (95), the upper end of the upper branch pipe (95) is fixedly connected to a branch pipe (96), the upper end of the telescopic empty slide rod (22) is fixedly connected to the lower end of the mountain support plate (41), the outer side of the lower end of the friction reduction clamp (51) slides on the inner side of the friction reduction slide groove (44), one side of the friction reduction clamp (51) is fixedly connected to one side of the arc rotation fixed plate (63), the outer side of the impact reduction member (71) is fixedly connected to the inner side of the impact member opening (66), and the upper end of the solid sac shell (91) is fixedly connected to the lower end of the mountain support plate (41).

2. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The number of the telescopic empty slide rods (22) is four, and the shape of the telescopic empty slide rods (22) is two hollow rectangular bodies. The two hollow rectangular bodies of the telescopic empty slide rods (22) are slidably connected. The inner side of the oil filling pipe groove (24) is connected to the inner side of the oil folding groove (26). The number of the oil folding grooves (26) is two, and the top view of the cross-section of the oil folding groove (26) is a "T" shape. The number of the foot moving grooves (25) is four, and the inner side of the oil folding groove (26) is connected to the inner side of the foot moving groove (25). The shape of the foot moving groove (25) is a cylindrical opening.

3. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The diameter of the universal wheel (31) is larger than the diameters of the foot connecting rod (32) and the foot moving groove (25); the outer side of the foot connecting rod (32) is slidably connected to the inner side of the lower end of the foot moving groove (25); the lower end of the fifth spring (33) is fixedly connected to one side of the lower end of the foot moving groove (25); the outer side of the floating main board (34) slides on the inner side of the foot moving groove (25); the outer side of the third sealing ring (35) is in contact with the inner side of the foot moving groove (25); the upper end of the fourth spring (36) is fixedly connected to one side of the upper end of the foot moving groove (25); the number of the moving components (3) is four; hydraulic oil is provided on the upper end of the floating main board (34) and the inner side of the upper end of the foot moving groove (25).

4. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The right side of the mountain support plate (41) is in the shape of a "mountain" character, the anti-friction chute (44) is in the shape of a rectangular body, the number of the side sliding column rods (42) is four, the side sliding column rods (42) are in the shape of a cylinder, and the inner side of the anti-friction chute (44) is connected to the inner side of the stable transfer groove (43).

5. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The lower end of the friction-reducing clamp (51) slides on the inner side of the friction-reducing slide groove (44) through the side sliding column rod (42); the column sliding body groove (52) is shaped as a cylindrical opening; the threaded reserved opening (53) is shaped as a column opening; the inner side of the threaded reserved opening (53) is provided with threads; the inner side of the column sliding body groove (52) is fitted with the outer side of the side sliding column rod (42); there are two friction-reducing clamps (51); the bidirectional threaded rod (54) is provided with two sections of threads; the two sections of threads of the bidirectional threaded rod (54) are in opposite directions; and the outer side of the motor (55) is fixedly connected to the rear end of the mountain support plate (41).

6. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The arc rotation limit groove (62) is in the shape of an arc-shaped body, the shaft rotation rod (64) is in the shape of a cylinder, the shaft rotation rod (64) is fixedly connected to the inner side of the arc rotation limit groove (62), the inner side of one end of the arc rotation fixing plate (63) is provided with a cylindrical groove, the outer side of the shaft rotation rod (64) is rotatably connected to the inner side of the cylindrical groove of the arc rotation fixing plate (63), the end of the arc rotation fixing plate (63) close to the arc rotation limit groove (62) is in the shape of a semi-hollow cylinder, and the end of the arc rotation fixing plate (63) away from the arc rotation limit groove (62) is in the shape of a rectangular body, One end of the third spring (65) is fixedly connected to one side of the transfer plate (61), and the third spring (65) is tilted downward at forty-five degrees with respect to the vertical plane of the vertical transfer plate (61). The third spring (65) is symmetrically fixedly connected to the upper and lower ends of the arc-shaped rotation fixing plate (63) with the horizontal arc-shaped rotation fixing plate (63) as the center. The number of each group of the third springs (65) is two, and the number of the transfer plates (61) is two. The number of each group of the transfer plates (61) is two, and the number of the transfer plates (61) is two, and the lower transfer plate (61) is tilted at forty-five degrees.

7. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The shock-absorbing member (71) is in the shape of a hollow cylinder, the inner side of the oil pipe installation opening (72) is connected to the inner side of the oil storage column groove (7107), the outer side of the arc-shaped rubber wheel (73) is provided with a certain arc, the rotating rod (76) is in the shape of a cylinder, the rotating rod (76) is rotatably connected to the inside of the slow sliding member (74), the number of each group of the slow sliding members (74) is two, one end of the branch pipe (96) is fixedly connected to the inner side of the oil pipe installation opening (72), and the inner side of the branch pipe (96) is connected to the inner side of the oil storage column groove (7107).

8. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The outer side of the lubricating oil push plate (7102) slides on the inner side of the oil storage column groove (7107), the outer side of the first sealing ring (7108) fits with the inner side of the oil storage column groove (7107), the side of the second spring (7103) away from the lubricating oil push plate (7102) is fixedly connected to the inner side of the oil transfer shell (7101), the inner side of the oil storage column groove (7107) is connected to the inner side of the oil slow flow port (71010), the outer side of the column rod double rod (7104) slides on the inner side of the column smooth circular mouth (7109), the outer side of the column rod double rod (7104) fits with the inner side of the second sealing ring (7105), the column smooth circular mouth (7109), the second sealing ring (7105) and the column rod double rod The number of (7104) is several groups, the number of each group of the column sliding round mouth (7109), the second sealing ring (7105) and the column rod double rod (7104) is two, the displacement limit baffle (7106) is in the shape of a rectangular body, the outer side of the rotating rod (76) is connected to the inner side of the circle limit groove (748) through a limited rotation circle, the outer side of the rotating rod (76) is fitted with the inner side of the column rotation hole (747), the rectangular body slider (746) is in the shape of a rectangular body, the rectangular groove (742) is in the shape of a rectangular body, the rectangular groove (742) is connected to the movable rectangular slideway (743), and one side of the first spring (744) is fixedly connected to the inner side of the fixed plate (741).

9. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The fixed engagement assembly (8) comprises a slip limit plate (81), the inner side of the slip limit plate (81) is spirally connected to a one-way threaded rod (82), one side of the one-way threaded rod (82) is fixedly connected to a hand-turning ring (83), one side of the slip limit plate (81) is fixedly connected to a spring telescopic rod (84), one side of the spring telescopic rod (84) is fixedly connected to a semi-ring tooth block (85), the slip limit plate (81) is slidably connected to the inner side of a rectangular body slideway (67), the slip limit plate (81) is in the shape of a rectangular body, the outer side of the one-way threaded rod (82) is rotatably connected to the inner side of a transfer plate (61), the hand-turning ring (83) protrudes from the outer side of one end of the transfer plate (61), one side of the semi-ring tooth block (85) is meshed with the outer side of a gear (75), and the outer side of the spring telescopic rod (84) slides on the inner side of the spring rod slideway (68).

10. The lifting platform for maintaining the furnace of a semiconductor diffusion furnace according to claim 1, characterized in that: The outer side of the oil storage airbag (93) moves inside the bag groove (92); the outer side of the lower end of the upper branch pipe (95) is fixedly connected to the inner side of the upper end of the bag groove (92); the outer side of the upper end of the lower branch pipe (94) is fixedly connected to the inner side of the lower end of the bag groove (92); the inner side of the oil storage airbag (93) is hollow; the inner side of the lower branch pipe (94) is connected to the inner side of the oil filling pipe groove (24); the inner side of the lower branch pipe (94), the inner side of the oil storage airbag (93), the inner side of the upper branch pipe (95) and the inner side of the oil storage column groove (7107) are connected; a plurality of branch pipes are arranged at the upper end of the branch pipe (96); the branch pipes at the upper end of the branch pipe (96) correspond to the buffer device (7) one by one; the outer side of the upper branch pipe (95) moves inside the mountain support plate (41).

Images