Laser chip deflection angle detection device and use method thereof

Abstract

The present invention relates to a laser chip deflection angle detection device and a method of using the same, which belongs to the field of semiconductor lasers. A slide rail is provided on a test base for installing a laser tray. The ruler includes a marking paper and a ruler bracket. The marking paper is provided with a marking pattern. The scanning module is used to emit a fan-shaped light beam and irradiate it to the entire row of lasers on the laser tray. When the light beam is irradiated to the laser chip cavity surface, it is reflected and irradiated to the ruler. Whether the deflection angle is qualified is determined by judging whether the light spot falls on the respective marking patterns. The present invention can convert the chip deflection angle into a reflected light beam spot offset. It only needs to observe the light spot offset to quickly confirm whether the chip deflection angle is qualified. The device can quickly and batch detect the chip deflection angle after the laser chip is solidified. It has high efficiency and low cost, and is suitable for use in the production of products with high requirements for laser direction.

Description

Technical Field

[0001] The invention relates to a laser chip deflection angle detection device and a use method thereof, belonging to the technical field of semiconductor lasers. Background Art

[0002] Compared with solid, gas and liquid lasers, semiconductor lasers have the advantages of high efficiency, small size, long life and simple structure. As semiconductor laser technology becomes more mature, its application has gradually broadened, covering many fields such as industrial processing, communication interconnection, sensor measurement, consumer entertainment, etc. In order to give full play to the good directionality of lasers, high requirements are placed on the chip assembly angle during the laser packaging process. Taking the most common TO-type packaging as an example, it is usually necessary for the laser chip cavity surface to be parallel to the TO socket substrate, so as to ensure that the laser lasing direction is perpendicular to the TO socket substrate.

[0003] In the manufacturing process of TO-type packaged lasers, in order to detect whether the laser chip has an angle deviation, common methods include using a three-dimensional measuring instrument to measure the parallelism between the chip cavity surface and the TO tube base, or measuring the beam direction after powering on the package. The above methods can effectively identify abnormal chip angle deviation, but they all need to be tested individually, and the detection efficiency is relatively low, which is not suitable for batch rapid detection; and the latter method can only be tested after the laser main structure is packaged and the internal circuit connection has been established. The process step is placed later, which is not conducive to intercepting defective products in advance and reducing material waste.

[0004] In order to solve the above problems, it is urgent to design a laser chip angle detection device, which can quickly and batchly detect the chip angle after the laser chip is solidified. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a laser chip angle detection device and a method for using the same. The device irradiates the laser cavity surface with an external laser beam to reflect light, and determines whether the laser chip cavity surface angle is within a qualified range based on whether the reflected beam deviates from the center beyond a specific range. The device can also simultaneously complete the angle detection of multiple laser chips, thereby achieving efficient and low-cost defective product screening.

[0006] The technical solution of the present invention is as follows:

[0007] A laser chip deflection angle detection device comprises a test base, a test platform, a scanning module and a ruler, wherein the test platform is erected on the test base, and the test base and the test platform are arranged in parallel;

[0008] The scanning module is located at one end of the test platform, and the ruler is set on the center line of the test platform; a slide rail is set on the test base for mounting the laser tray, and the width of the slide rail is consistent with the width of the laser tray to be tested, so as to ensure that the laser tray can slide in the slide rail along the width direction (front and back) of the test base; a marking line is set on the center line of the test base, and the marking line is parallel to the long side of the test base, and the marking line corresponds to the position of the ruler;

[0009] The alignment line has two functions. One is to check whether the laser beam is deflected due to loose fixation of the scanning module. The other is to serve as a reference for the sliding of the laser tray. During each test, the laser under test is aligned with the alignment line to ensure that the beam is irradiated onto the chip cavity surface.

[0010] The ruler includes a marking paper and a ruler bracket, the marking paper is provided with a marking pattern, the scanning module is provided with a light beam outlet, the scanning module is used to emit a fan-shaped light beam and irradiate the entire row of lasers on the laser tray, when the light beam is irradiated to the cavity surface of the laser chip, it is reflected and irradiated to the ruler, and whether the deflection angle is qualified is determined by judging whether the light spot falls on the respective marking patterns.

[0011] Preferably, the test base is provided with pillars, preferably 4 pillars, which raise the test platform so that the test platform maintains a certain distance from the test base; the test platform is provided with pillar grooves that cooperate with the pillars, and one end of the pillar can be inserted into the pillar groove during installation.

[0012] Preferably, an empty slot A is provided at one end of the test platform for placing a scanning module, and an empty slot B is provided in the center for placing a scale. Both the empty slot A and the empty slot B are through-hole slots, which do not affect the light beam emission and light spot propagation.

[0013] Preferably, two chambers are arranged in the front and back of the scanning module, wherein a laser point module, a reflector and a galvanometer are installed in one chamber, and a driving circuit board is installed in the other chamber for powering the laser point module and the galvanometer; the laser point module is used to emit a collimated laser beam and project it onto the reflector, and the light spot is point-shaped, which is reflected by the reflector and projected onto the galvanometer, and the light beam reflected by the galvanometer is emitted through a beam outlet.

[0014] Preferably, the scanning module is provided with a screw fixing hole, which is fixed in the empty slot A by screws. After installation, the center of the galvanometer and the upper surface of the ruler should be at the same horizontal height. The scanning module is also provided with a power cord port to facilitate the connection of the driving circuit board to the power supply.

[0015] Preferably, the ruler bracket is a rectangular frame, the edge of the calibration paper is pasted on the ruler bracket, the ruler bracket is flush with the edge of the calibration paper, and the ruler bracket is placed in the empty slot B. The main function of the ruler bracket is to provide support for the calibration paper, to facilitate the placement of the calibration paper on the empty slot B of the test platform, to facilitate replacement, and to ensure that the height of the calibration paper is consistent with the center of the galvanometer.

[0016] Preferably, the number of alignment patterns corresponds to the number of lasers in the laser tray, and each laser corresponds to a alignment pattern. The alignment pattern is determined by the distance from the alignment paper to the cavity surface of the laser to be measured, the projection distance from the laser to the center of the galvanometer, and the maximum allowable deflection angle of the laser chip. A alignment pattern for marking the maximum spot deflection range can be drawn for each laser.

[0017] The marking pattern is one or more rectangular lines drawn on the marking paper. The marking pattern is located on the upper surface of the marking paper, and the empty slot B below is a through hole. The scale bracket is also a rectangular frame with a through hole in the middle. When the reflected light beam shines on the lower surface of the marking paper, the light spot formed can pass through the marking paper. At this time, the marking pattern and the light spot can be observed from the upper surface of the marking paper at the same time. The marking paper can be made of ordinary paper.

[0018] Preferably, the marking pattern is determined in the following manner: assuming that the center line of the galvanometer is O, that is, the emission origin of the fan-shaped light beam, the laser cavity surface to be measured is B, the projection of point O on the plane where the cavity surface is located is A, the OA distance is h, the AB distance is d, and OD is the plane where the marking paper is located. When the laser cavity surface is horizontal and has no deflection angle, the light beam propagates along the path of O→B→C. Assuming that the maximum qualified horizontal deflection angle of the laser is θ, when the laser cavity surface has a deflection angle θ, the reflected light beam will produce a deflection of 2θ angle, and the light beam propagates along O→B→C' or O→B→C". Point C' and point C" should be the leftmost and rightmost points of the marking pattern box. The lengths of OC' and OC" are obtained, and the left and right boundaries of the marking pattern can be drawn.

[0019] The calculation method of OC' length is as follows:

[0020]

[0021] Where α is the angle between BC and BD;

[0022] but

[0023] The calculation method of "OC" length is as follows:

[0024]

[0025]

[0026] A method for using the above-mentioned laser chip deflection angle detection device comprises the following steps:

[0027] S1: Determine the position of the reference pattern;

[0028] S2: Install the laser tray on the slide rail of the test base, and place a row of lasers to be tested on the alignment line. The device is started, and the laser point module in the scanning module points to the reflector, which will emit a collimated laser beam with a point-shaped spot. The beam is reflected by the reflector and shines toward the center of the galvanometer. The galvanometer vibrates and deflects. The deflection angle requires that the fan-shaped beam formed by the scanning can cover and illuminate the entire row of lasers to be tested. The single beam is scanned into a fan-shaped surface and emitted from the beam outlet.

[0029] After the fan-shaped beam is emitted from the scanning module, it shines on a row of lasers to be tested in the laser tray of the test base. The cavity surfaces of all the chips in the entire row of lasers are within the beam scanning range. Since only the cavity surface of the chip on the upper surface of the laser is a smooth reflection surface, it can form a mirror reflection, while the other parts are rough reflection surfaces, which can only form diffuse reflection. The light is reflected by the upper surface of the cavity surface of the laser chip and shines on the ruler, forming a reflection spot on the marking paper. Each laser corresponds to a reflection spot.

[0030] S3: If there is no deflection angle on the cavity surface of each laser chip, the reflected light spot should fall exactly on the center of the corresponding calibration pattern; if there is a deflection angle when the laser chip under test is assembled, it will deflect along the laser beam scanning plane, and the reflected light spot will shift; when the reflected light spot falls within the range of the calibration pattern, it indicates that the deflection angle of the laser chip is within the qualified range; when the reflected light spot falls outside the range of the calibration pattern, it indicates that the deflection angle of the laser chip is outside the qualified range;

[0031] S4: Slide the laser tray in the slide rail so that the next row of lasers to be tested are located on the alignment line, and repeat steps S2 to S3 until all laser deflection angles are completely tested.

[0032] Preferably, as long as the specifications of the tray used for the laser being tested remain unchanged and the qualified standards remain unchanged, the same ruler can be used for continuous testing, testing one row of lasers each time. When the specifications or deflection qualified standards of the laser tray change, the calibration pattern needs to be recalibrated before continuing the test.

[0033] The beneficial effects of the present invention are:

[0034] The laser chip deflection angle detection device and use method of the present invention can convert the chip deflection angle into the reflected light beam spot deviation. Only by observing the spot deviation, it is possible to quickly confirm whether the chip deflection angle is qualified. The device can quickly and batchly detect chip deflection angles after the laser chip is solidified. It has high efficiency and low cost, and is suitable for use in the production of products with high requirements for laser direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The drawings in the specification, which constitute a part of the present application, are used to provide further understanding of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute improper limitations on the present application.

[0036] Figure 1 It is a schematic diagram of the overall structure of the laser chip angle detection device of the present invention;

[0037] Figure 2 It is a schematic diagram of the structure of the test base of the present invention;

[0038] Figure 3 It is a schematic diagram of the structure of the test platform of the present invention;

[0039] Figure 4 Schematic diagram of the scanning module structure of the present invention, wherein (a) is a first viewing angle, and (b) is a second viewing angle;

[0040] Figure 5 Schematic diagram of the scale structure of the present invention, wherein (a) is the marking paper, and (b) is the scale bracket;

[0041] Figure 6 A schematic diagram of a light beam propagation path in a scanning module of the present invention;

[0042] Figure 7 is a schematic diagram of the propagation path of the external light beam of the present invention;

[0043] Figure 8 Schematic diagram showing that the reflected light spot in the present invention should fall exactly on the center of the corresponding benchmark pattern;

[0044] Fig. 9 It is a schematic diagram of the calculation process of the benchmark pattern of the present invention;

[0045] In the figure, 1-test base, 2-test base, 3-scanning module, 4-ruler, 5-pillar, 6-slide rail, 7-marking line, 8-empty slot A and empty slot B, 9-groove, 10-screw fixing hole, 11-laser point module, 12-reflector, 13-galvanometer, 14-drive circuit board, 15-beam outlet, 16-power cord outlet, 17-marking paper, 18-ruler bracket, 19-marking pattern, 20-laser tray, 21-reflection spot. DETAILED DESCRIPTION

[0046] In order to enable those skilled in the art to better understand the technical solutions in this specification, the technical solutions in the embodiments of the present invention are clearly and completely described, but not limited to this. Anything not fully described in the present invention shall be based on conventional techniques in the art.

[0047] Example 1

[0048] A laser chip deflection angle detection device, such as Figure 1-3 As shown, it includes a test base 1, a test platform 2, a scanning module 3 and a ruler 4, the test platform 2 is erected on the test base 1, and the test base 1 and the test platform 2 are arranged in parallel;

[0049] The scanning module 3 is located at one end of the test platform, and the scale 4 is set on the center line of the test platform; a slide rail 6 is set on the test base 1 for installing the laser tray 20, and the width of the slide rail is consistent with the width of the laser tray to be tested, ensuring that the laser tray 20 can slide in the slide rail along the width direction (front and back) of the test base; a marking line 7 is set on the center line of the test base 1, and the marking line 7 is parallel to the long side of the test base 1, and the position of the marking line 7 corresponds to the scale 4;

[0050] The marking line 7 has two functions. One is to check whether the laser beam is deflected due to loose fixation of the scanning module. The other is to serve as a reference for the sliding of the laser tray. During each test, the laser under test is aligned with the marking line to ensure that the light beam is irradiated onto the chip cavity surface.

[0051] like Figure 5 As shown, the ruler includes a marking paper 17 and a ruler bracket 18, the marking paper 17 is provided with a marking pattern 19, the scanning module 3 is provided with a beam outlet 15, the scanning module is used to emit a fan-shaped light beam and irradiate it to the entire row of lasers on the laser tray, when the light beam is irradiated to the laser chip cavity surface, it is reflected and irradiated to the ruler, and whether the deflection angle is qualified is determined by judging whether the light spot falls on the respective marking patterns.

[0052] Example 2

[0053] A laser chip angle detection device is as described in Example 1, except that a test base 1 is provided with pillars 5, preferably four pillars, which set up a test platform 2 so that the test platform and the test base are kept at a certain distance; a pillar groove 9 cooperating with the pillar is provided on the test platform 2, and one end of the pillar can be inserted into the pillar groove during installation.

[0054] An empty slot A is provided at one end of the test platform 2 for placing the scanning module 2, and an empty slot B is provided in the center for placing the scale 4. The empty slots A and B are through-hole slots as shown by reference numeral 8, and do not affect the light beam emission and light spot propagation.

[0055] Example 3

[0056] A laser chip deflection angle detection device, as described in Example 2, except that Figure 4As shown, two chambers are arranged in the front and back of the scanning module 3, in which a laser point module 11, a reflector 12 and a galvanometer 13 are installed in one of the chambers, and a driving circuit board 14 is installed in the other chamber for powering the laser point module 11 and the galvanometer 13; the laser point module 11 is used to emit a collimated laser beam and project it to the reflector 12, and the light spot is point-shaped. After being reflected by the reflector, it is projected to the galvanometer, and the light beam reflected by the galvanometer 13 is emitted through the beam outlet 15.

[0057] The scanning module is provided with a screw fixing hole 10, which is fixed in the empty slot A by screws. After installation, the center of the galvanometer and the upper surface of the ruler should be at the same horizontal height. The scanning module is also provided with a power line port 16 to facilitate the connection of the driving circuit board to the power supply.

[0058] Example 4

[0059] A laser chip deflection detection device, as described in Example 3, except that the scale bracket 18 is a rectangular frame, the edge of the calibration paper is pasted on the scale bracket 18, the scale bracket 18 is flush with the edge of the calibration paper 17, and the scale bracket 18 is placed in the empty slot B. The main function of the scale bracket 18 is to provide support for the calibration paper, to facilitate the placement of the calibration paper on the empty slot B of the test platform, to facilitate replacement, and to ensure that the height of the calibration paper is consistent with the center of the galvanometer.

[0060] Example 5

[0061] A laser chip deflection angle detection device, as described in Example 4, except that the number of alignment patterns 19 corresponds to the number of lasers in the laser tray, each laser corresponds to a alignment pattern, the alignment pattern is determined by the distance from the alignment paper to the laser cavity surface to be measured, the distance from the laser to the center projection of the galvanometer, and the maximum allowable deflection angle of the laser chip. A alignment pattern for marking the maximum spot deflection range can be drawn for each laser.

[0062] The marking pattern is one or more rectangular lines drawn on the marking paper. The marking pattern is located on the upper surface of the marking paper, and the empty slot B below is a through hole. The scale bracket is also a rectangular frame with a through hole in the middle. When the reflected light beam shines on the lower surface of the marking paper, the light spot formed can pass through the marking paper. At this time, the marking pattern and the light spot can be observed from the upper surface of the marking paper at the same time. The marking paper can be made of ordinary paper.

[0063] The method for determining the benchmark pattern is as follows: Fig. 9As shown, assuming that the center line of the galvanometer 13 is O, that is, the emission origin of the fan-shaped light beam, the laser cavity surface to be measured is B, the projection of point O on the plane where the cavity surface is located is A, the OA distance is h, the AB distance is d, and OD is the plane where the marking paper is located. When the laser cavity surface is horizontal and has no deflection angle, the light beam propagates along the path of O→B→C. Assuming that the maximum qualified horizontal deflection angle of the laser is θ, when the laser cavity surface has a deflection angle θ, the reflected light beam will produce a deflection of 2θ angle, and the light beam propagates along O→B→C' or O→B→C". Point C' and point C" should be the leftmost and rightmost points of the marking pattern box. The lengths of OC' and OC" are obtained, and the left and right boundaries of the marking pattern can be drawn;

[0064] The calculation method of OC' length is as follows:

[0065]

[0066] Where α is the angle between BC and BD;

[0067] but

[0068] The calculation method of "OC" length is as follows:

[0069]

[0070]

[0071] Example 6

[0072] A method for using a laser chip deflection angle detection device comprises the following steps:

[0073] S1: Determine the position of the reference pattern;

[0074] S2: Install the laser tray 20 on the slide rail 6 of the test base, and place a row of lasers to be tested on the marking line 7. The device is started, and the laser point module 11 in the scanning module 3 points to the reflector 12, and a collimated laser beam is emitted, and the light spot is in a point shape; the beam is reflected by the reflector 12 and shines toward the center of the galvanometer 13; the galvanometer 13 vibrates and deflects, and the deflection angle requires that the fan-shaped beam formed by the scanning can cover and irradiate the entire row of lasers to be tested, and a single beam is scanned into a fan surface and emitted from the beam outlet;

[0075] After the fan-shaped beam is emitted from the scanning module, it shines on a row of lasers to be tested in the laser tray of the test base. The cavity surfaces of all the chips in the entire row of lasers are within the beam scanning range. Since only the cavity surface of the chip on the upper surface of the laser is a smooth reflection surface, it can form a mirror reflection, while the other parts are rough reflection surfaces, which can only form diffuse reflection. The light is reflected by the upper surface of the cavity surface of the laser chip and shines on the ruler, forming a reflection spot on the marking paper. Each laser corresponds to a reflection spot.

[0076] S3: If the cavity surface of each laser chip has no deflection angle, the reflected light spot should fall exactly on the center of the corresponding calibration pattern; if the laser chip under test is assembled with a deflection angle, it will deflect along the laser beam scanning plane, and the reflected light spot will shift (if the laser chip deflects along the laser beam scanning plane, the reflected light spot 21 will be at Figure 8 If the laser chip deflects in the direction perpendicular to the laser beam scanning plane, the reflected light spot will be Figure 8 When the reflected light spot falls within the range of the reference pattern, it indicates that the laser chip deflection angle is within the qualified range; when the reflected light spot falls outside the range of the reference pattern, it indicates that the laser chip deflection angle is outside the qualified range;

[0077] S4: Slide the laser tray in the slide rail 6 so that the next row of lasers to be tested are located on the alignment line, and repeat steps S2 to S3 until all laser deflection angles are completely tested.

[0078] Preferably, as long as the specifications of the tray used for the laser being tested remain unchanged and the qualified standards remain unchanged, the same ruler can be used for continuous testing, testing one row of lasers each time. When the specifications or deflection qualified standards of the laser tray change, the calibration pattern needs to be recalibrated before continuing the test.

[0079] If the laser chip is deflected in a direction perpendicular to the laser beam scanning plane, the maximum allowable deflection angle is θ. In this case, the distances between the upper and lower boundaries of the alignment pattern frame and the center line (the intersection of the plane where the scanning beam fan is located and the plane of the alignment paper is the center line of the alignment pattern, and the projection of the center line on the test base coincides with the alignment line) are both h·tan(2θ).

[0080] Assuming h = 200mm, d = 50mm for a certain laser, and the maximum allowable deflection angle θ = 1°, the left boundary of the laser alignment pattern box is 92.64mm away from the galvanometer, the right boundary is 107.49mm away from the galvanometer, and the upper and lower boundaries are 6.98mm away from the center line. If the reflected light spot exceeds the range of the box, it indicates that the horizontal or vertical deflection angle of the laser has exceeded 1°.

[0081] In addition, in order to prevent the reflected light spot of a bad laser from entering the calibration pattern frame of the non-corresponding laser and affecting the recognition, in actual use, the baffle can be used to block the laser under test in turn to observe whether the reflected light spot disappears in turn, thereby eliminating the interference of severely skewed products.

[0082] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A laser chip deflection angle detection device, characterized in that: It includes a test base, a test platform, a scanning module and a ruler, the test platform is erected on the test base, and the test base and the test platform are arranged in parallel; The scanning module is located at one end of the test platform, and the ruler is set on the center line of the test platform; a slide rail is set on the test base for installing the laser tray, and the laser tray can slide in the slide rail along the width direction of the test base; a marking line is set on the center line of the test base, the marking line is parallel to the long side of the test base, and the marking line corresponds to the position of the ruler; The ruler includes a marking paper and a ruler bracket, the marking paper is provided with a marking pattern, the scanning module is provided with a light beam outlet, the scanning module is used to emit a fan-shaped light beam and irradiate the entire row of lasers on the laser tray, when the light beam irradiates the laser chip cavity surface, it is reflected and irradiates the ruler, and whether the deflection angle is qualified is determined by judging whether the light spot falls on the respective marking pattern; The number of calibration patterns corresponds to the number of lasers in the laser tray. Each laser corresponds to a calibration pattern. The calibration pattern is determined by the distance from the calibration paper to the cavity surface of the laser chip under test, the distance from the laser under test to the center projection of the galvanometer, and the maximum allowable deviation angle of the laser chip.

2. The laser chip deflection angle detection device according to claim 1, characterized in that: The test base is provided with pillars, which support the test platform; and the test platform is provided with pillar grooves which cooperate with the pillars.

3. The laser chip deflection angle detection device according to claim 2, characterized in that: An empty slot A is provided at one end of the test platform for placing a scanning module, and an empty slot B is provided in the center for placing a ruler.

4. The laser chip deflection angle detection device according to claim 3, characterized in that: The scanning module is provided with two chambers at the front and back, wherein a laser point module, a reflector and a galvanometer are installed in one chamber, and a driving circuit board is installed in the other chamber for powering the laser point module and the galvanometer; the laser point module is used to emit a collimated laser beam and project it onto the reflector, and the light spot is point-shaped, which is reflected by the reflector and projected onto the galvanometer, and the light beam reflected by the galvanometer is emitted through a beam outlet.

5. The laser chip deflection angle detection device according to claim 4, characterized in that: The scanning module is provided with a screw fixing hole, and is fixed in the empty slot A by means of screws. After installation, the center of the galvanometer and the upper surface of the ruler should be at the same horizontal height.

6. The laser chip deflection angle detection device according to claim 5, characterized in that: The ruler bracket is a rectangular frame, the edge of the marking paper is pasted on the ruler bracket, and the ruler bracket is placed in the empty slot B.

7. The laser chip deflection angle detection device according to claim 6, characterized in that: The method for determining the calibration pattern is as follows: assuming that the center line of the galvanometer is O, that is, the emission origin of the fan-shaped light beam, the cavity surface of the laser chip to be measured is B, the projection of point O on the plane where the cavity surface is located is A, the OA distance is h, the AB distance is d, and OD is the plane where the calibration paper is located. When the laser chip cavity surface is horizontal and has no deflection angle, the light beam propagates along the path of O→B→C. Assuming that the maximum qualified horizontal deflection angle of the laser is θ, when the laser chip cavity surface has a horizontal deflection angle θ, the reflected light beam will produce a deflection of 2θ angle, and the light beam propagates along O→B→C' or O→B→C''. Point C' and point C'' should be the leftmost and rightmost points of the calibration pattern box. The lengths of OC' and OC'' are obtained, and the left and right boundaries of the calibration pattern can be drawn. The calculation method of OC' length is as follows: OC'=OD+DC', OD=d; ； Where α is the angle between BC and BD; but ; The calculation method of OC'' length is as follows: OC''=OD+DC'', OD=d; ； 。 8. A method for using the laser chip deflection angle detection device according to claim 7, characterized in that: The steps include: S1: Determine the position of the alignment pattern; S2: Install the laser tray on the slide rail of the test base, and place a row of lasers to be tested on the alignment line. The device is started, and the laser point module in the scanning module points to the reflector, which will emit a collimated laser beam with a point-shaped spot. The beam is reflected by the reflector and shines toward the center of the galvanometer. The galvanometer vibrates and deflects, scanning a single beam into a fan shape and emitting it from the beam outlet. After the fan-shaped beam is emitted from the scanning module, it shines on a row of lasers to be tested in the laser tray of the test base. The cavity surfaces of all the chips in the entire row of lasers are within the beam scanning range. The upper surface of the laser chip cavity surface is a smooth reflection surface, forming a mirror reflection, and shining on the ruler, forming a reflection spot on the marking paper. Each laser corresponds to a reflection spot; S3: If there is no deflection angle on the cavity surface of each laser chip, the reflected light spot should fall exactly on the center of the corresponding calibration pattern; if there is a deflection angle when the laser chip under test is assembled, it will deflect along the laser beam scanning plane, and the reflected light spot will shift; when the reflected light spot falls within the range of the calibration pattern, it indicates that the deflection angle of the laser chip is within the qualified range; when the reflected light spot falls outside the range of the calibration pattern, it indicates that the deflection angle of the laser chip is outside the qualified range; S4: Slide the laser tray in the slide rail so that the next row of lasers to be tested are located on the alignment line, and repeat steps S2 to S3 until all laser deflection angles are detected.

9. The method for using the laser chip deflection angle detection device according to claim 8, characterized in that: When the specifications or deflection angle qualification standards of the laser pallet change, the calibration pattern needs to be recalibrated to continue the inspection.

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