Graphite boat electrode introduction device and electrode introduction control method for PECVD equipment

Abstract

The present invention discloses a graphite boat electrode introduction device for PECVD equipment and an electrode introduction control method, comprising: a driving element, a support base, a fixed seat, a sliding assembly and an electrode rod, one side of the support base is connected to the furnace tail flange of the PECVD equipment, the other side of the support base is provided with a driving element, the output end of the driving element is connected to the fixed seat, the support base is provided with a sliding assembly, the lower part of the fixed seat is connected to the sliding assembly, the upper part of the fixed seat is connected to the electrode rod, the electrode rod passes through the furnace tail flange and extends into the reaction chamber; under the drive of the driving element, the fixed seat and the sliding assembly drive the electrode rod to move back and forth in a straight line to realize the electrode rod being inserted into or out of the electrode hole of the graphite boat. The present invention has the advantages of compact structure, small size and convenient assembly and disassembly, and in the process of electrode introduction, the electrode rod only moves in a straight line without a downward pressing action, is not easy to deform, and also avoids the loss of the graphite boat caused by the impact of the electrode rod and the graphite boat.

Description

Technical Field

[0001] The present invention mainly relates to the technical field of semiconductor processing, and in particular to a graphite boat electrode introduction device for PECVD equipment and an electrode introduction control method. Background Art

[0002] In PECVD equipment, the problem of power supply at the tail of the graphite boat is a key issue that affects the stability of the equipment and the coating effect. The existing power supply method at the tail of the graphite boat is to fix the electrode rod and insert it by pushing the boat. The pushing boat and the graphite boat are the only moving parts. The electrode rod is fixed on the tail flange and aligned with the electrode hole of the graphite boat in the upper position of the pushing boat movement. The pushing boat carries the graphite boat and moves horizontally in the upper position to insert the electrode rod, and then the pushing boat moves downward to place the graphite boat on the support rod to complete the power supply connection action.

[0003] In the existing power-inducing method, the power for connecting the electrode rod and the graphite boat comes from the push boat servo motor. The push boat and the graphite boat as a whole are a mechanism with relatively large mass and inertia, and the large inertia makes the response to regulation relatively slow. In order to avoid overshoot as much as possible, the speed is reduced when the electrode hole of the graphite boat is close to the electrode head. This can reduce the impact force of the graphite boat and the electrode rod. However, the setting of the deceleration buffer distance leads to a longer movement time, which affects the production capacity, and this method cannot completely avoid the impact. In actual use, the graphite boat is often damaged by the electrode rod. Furthermore, the position where the electrode rod is inserted into the graphite boat is the upper position of the push boat. When the push boat brings the graphite boat to the support rod, the electrode rod will be pressed down to a certain extent by the graphite boat. After long-term use, the overall position of the electrode head will shift downward, increasing the position deviation between the electrode rod electrode head and the electrode hole of the graphite boat, thereby causing a collision with the boat or a stuck paddle. The schematic diagram of the push boat movement of the existing power-inducing method is shown in the following figure. Figure 1 shown. Summary of the invention

[0004] The technical problem to be solved by the present invention is: in view of the problem that the electrode rod and the graphite boat are easily impacted during the existing power introduction process, a graphite boat electrode introduction device and an electrode introduction control method for PECVD equipment are provided which have a compact structure, a small size and are easy to disassemble and assemble.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] A graphite boat electrode introduction device for PECVD equipment comprises: a driving element, a support base, a fixed seat, a sliding assembly and an electrode rod, wherein one side of the supporting base is connected to the furnace tail flange of the PECVD equipment, and the other side of the supporting base is provided with a driving element, and the output end of the driving element is connected to the fixed seat; the sliding assembly comprises a slider and a linear guide rail, wherein the linear guide rail is arranged on the supporting base, and the slider is slidably arranged on the linear guide rail, the lower part of the fixed seat is connected and fixed to the slider, and the upper part of the fixed seat is connected to the electrode rod, and the electrode rod passes through the furnace tail flange and extends into the reaction chamber; under the drive of the driving element, the fixed seat and the slider drive the electrode rod to move back and forth in a straight line along the linear guide rail, so as to realize the insertion or separation of the electrode rod into or out of the electrode hole of the graphite boat.

[0007] As a further improvement of the present invention, the electrode introduction device also includes a bellows, which is nested in the outer periphery of the electrode rod, one end of the bellows is connected to the fixing seat, and the other end of the bellows is connected to the electrode introduction hole on the furnace tail flange.

[0008] As a further improvement of the present invention, a limit block is provided on the linear guide rail to limit the displacement of the slider.

[0009] As a further improvement of the present invention, the driving element is a motor or a cylinder or a hydraulic cylinder or an electric push rod.

[0010] As a general technical concept, the present invention also provides an electrode introduction control method based on the above-mentioned graphite boat electrode introduction device of the PECVD equipment, comprising the following steps:

[0011] Step S1, connecting the driving element to an external control system, setting a torque sensor connected to the external control system on the driving element, and setting a position sensor connected to the external control system in the electrode hole of the graphite boat;

[0012] Step S2, after the graphite boat is placed in the reaction chamber of the PECVD equipment, the control system controls the driving element to drive the electrode rod to move;

[0013] Step S3, using a torque sensor to detect the torque value output by the driving element, and transmitting it to the control system, and the control system determines the state of movement of the electrode rod;

[0014] Step S4: Using a position sensor to detect the state of the electrode rod inserted into the electrode hole, and transmitting the state to the control system, the control system determines the state of the electrode rod inserted.

[0015] As a further improvement of the present invention, in step S3, if the torque value output by the driving element is greater than a preset value, the control system alarms; if the torque value output by the driving element is within a preset range, the electrode rod continues to move forward.

[0016] As a further improvement of the present invention, in step S4, if the position sensor in the electrode hole does not detect the electrode rod, the control system alarms; if the position sensor detects the electrode rod, the control system determines whether the position occupied by the electrode rod in the electrode hole reaches a preset value.

[0017] As a further improvement of the present invention, if the deviation between the actual position value of the electrode rod in the electrode hole and the preset value is less than ±10%, the control system prompts that the electrode rod insertion is completed; if the deviation between the actual position value of the electrode rod in the electrode hole and the preset value is greater than ±10%, the control system alarms.

[0018] As a further improvement of the present invention, when the electrode rod is inserted and the coating process in the PECVD device is completed, the torque value output by the driving element is stored in the database to form a normal torque data interval for the operation of the driving element.

[0019] Compared with the prior art, the advantages of the present invention are:

[0020] 1. The PECVD equipment graphite boat electrode introduction device of the present invention is achieved by connecting and fixing the side of the support base with the furnace tail flange of the PECVD equipment, and arranging a driving element on the other side of the support base, and also arranging a sliding assembly on the support base, connecting the output end of the driving element with the fixed seat, and then connecting the fixed seat with the sliding assembly and the electrode rod, so that the installation and fixation of the electrode introduction device is realized; when the graphite boat is placed in the reaction chamber of the PECVD equipment, under the drive of the driving element, the fixed seat and the sliding assembly drive the electrode rod to move back and forth in a straight line in the reaction chamber of the PECVD equipment, so that the electrode rod is inserted into or out of the electrode hole of the graphite boat; during the insertion of the electrode rod, the graphite boat and the boat push rod are both in a stationary state, and after the electrode head of the electrode rod is inserted into the electrode hole of the graphite boat, the boat push rod withdraws from the reaction chamber to complete the electrode introduction action. As the only moving part, the electrode rod has a small mass and inertia, and has a small impact on the graphite boat, thereby ensuring the safety of the graphite boat, and the electrode rod only has a linear motion in the horizontal direction, without a downward pressure action, and is not easy to deform, thereby reducing the risk of position change of the electrode rod.

[0021] 2. The electrode introduction control method of the PECVD equipment of the present invention monitors the process of electrode rod insertion in real time by setting a torque sensor and a position sensor, and transmits the data to the control system. The control system makes corresponding early warnings and judgments based on the torque and in-place signals, thereby improving the efficiency of electrode introduction and ensuring the safety of the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a simplified diagram of the push boat motion in the existing electric power introduction method;

[0023] Figure 2It is a schematic diagram of the structural principle of a graphite boat electrode introduction device for a PECVD device in a specific embodiment of the present invention;

[0024] Figure 3 A schematic diagram of the push boat motion in the electric-drawing mode in a specific embodiment of the present invention;

[0025] Figure 4 It is a schematic diagram of the structural principle in which the electrode rod is not inserted into the graphite boat in a specific embodiment of the present invention;

[0026] Figure 5 It is a schematic diagram of the structural principle of inserting the electrode rod into the graphite boat in a specific embodiment of the present invention;

[0027] Figure 6 It is a schematic diagram of the process of introducing a graphite boat electrode into a PECVD device in a specific embodiment of the present invention;

[0028] Legend: 1. Driving element; 2. Support base; 3. Fixed seat; 4. Slider; 5. Linear guide; 6. Limit block; 7. Bellows; 8. Electrode rod; 9. Clamp; 100. Furnace tail flange; 101. Electrode introduction hole; 200. Graphite boat; 201. Electrode hole; 300. Boat push rod. DETAILED DESCRIPTION

[0029] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0030] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0031] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0032] Example 1

[0033] like Figure 2As shown, the graphite boat electrode introduction device of the PECVD equipment of the present invention comprises: a driving element 1, a support base 2, a fixed seat 3, a sliding assembly and an electrode rod 8. One side of the support base 2 is connected to the furnace tail flange 100 of the PECVD equipment, and the other side of the support base 2 is provided with a driving element 1, the output end of the driving element 1 is connected to the fixed seat 3, and a sliding assembly is provided on the support base 2, the lower part of the fixed seat 3 is connected to the sliding assembly, and the upper part of the fixed seat 3 is connected to the electrode rod 8, and the electrode rod 8 passes through the furnace tail flange 100 and extends into the reaction chamber. Driven by the driving element 1, the fixed seat 3 and the sliding assembly drive the electrode rod 8 to move back and forth in a straight line, so as to realize the insertion or separation of the electrode rod 8 into the electrode hole 201 of the graphite boat 200.

[0034] In this embodiment, the side of the support base 2 is connected and fixed to the furnace tail flange 100 of the PECVD device, and a driving element 1 is set on the other side of the support base 2, and a sliding assembly is also set on the support base 2, the output end of the driving element 1 is connected to the fixed seat 3, and then the fixed seat 3 is connected to the sliding assembly and the electrode rod 8, so that the installation and fixation of the electrode introduction device is realized. When the graphite boat is placed in the reaction chamber of the PECVD device, under the drive of the driving element 1, the fixed seat 3 and the sliding assembly drive the electrode rod 8 to move back and forth in a straight line in the reaction chamber of the PECVD device, that is, the electrode rod 8 is inserted into or out of the electrode hole 201 of the graphite boat 200, which is simple and convenient. During the insertion of the electrode rod 8, the graphite boat 200 and the boat pushing rod 300 are both in a stationary state. After the electrode head of the electrode rod 8 is inserted into the electrode hole 201 of the graphite boat 200, the boat pushing rod 300 withdraws from the reaction chamber to complete the electrode introduction action. As the only moving component, the electrode rod 8 has a small mass and inertia, and has a small impact on the graphite boat, thereby ensuring the safety of the graphite boat. In addition, the electrode rod 8 only has a horizontal linear motion, without a downward pressing action, and is not easy to deform, thereby reducing the risk of position change of the electrode rod 8.

[0035] like Figure 2 As shown, in this embodiment, the electrode introduction device also includes a bellows 7, which is nested in the outer periphery of the electrode rod 8, one end of the bellows 7 is connected to the fixing seat 3 through a clamp 9, and the other end of the bellows 7 is connected to the electrode introduction hole 101 on the furnace tail flange 100 through the clamp 9. By sleeve-arranging the bellows 7 on the outer periphery of the electrode rod 8, the electrode rod 8 outside the furnace tail flange 100 is in a relatively closed space, ensuring the safety of the electrode rod 8. At the same time, the bellows 7 has a certain telescopic function, which also ensures the smooth movement of the electrode rod 8.

[0036] like Figure 2As shown, in this embodiment, the sliding assembly includes a slider 4 and a linear guide 5. The linear guide 5 is arranged on the support base 2, the slider 4 is slidably arranged on the linear guide 5, and the lower part of the fixed seat 3 is connected and fixed to the slider 4. Under the drive of the driving element 1, the fixed seat 3 and the slider 4 drive the electrode rod 8 to move back and forth linearly along the linear guide 5.

[0037] Furthermore, a limit block 6 is provided on the linear guide rail 5 to limit the displacement of the slider 4 to prevent the electrode rod 8 from being displaced too much and hitting the graphite boat 200 .

[0038] In this embodiment, the driving element 1 is a motor. In other embodiments, the driving element 1 may also be a pneumatic cylinder, an oil cylinder, or an electric push rod, as long as it can drive the electrode rod 8 to move smoothly.

[0039] In this embodiment, Figure 4 As shown, after the boat push rod 300 drives the graphite boat 200 into the reaction chamber, the motor drives the fixing seat 3 to drive the electrode rod 8 to insert into the electrode hole 201 of the graphite boat 200. At this time, the graphite boat 200 and the boat push rod 300 are both in a stationary state, and the position repeatability is better. Figure 5 As shown, after the electrode tip of the electrode rod 8 is inserted into the electrode hole 201 of the graphite boat 200, the boat push rod 300 is withdrawn from the reaction chamber to complete the electrode introduction action. Figure 3 As shown, since the push boat does not have a slow movement at a buffer position, the overall movement time is shortened, which is beneficial to improving the production efficiency of the PECVD equipment.

[0040] Example 2

[0041] like Figure 6 As shown, the present invention provides an electrode introduction control method of the graphite boat electrode introduction device of the PECVD equipment based on Example 1, comprising the following steps:

[0042] Step S1, connecting the driving element 1 to an external control system, setting a torque sensor connected to the external control system on the driving element 1, setting a position sensor connected to the external control system in the electrode hole 201 of the graphite boat 200; using the control system to control the driving element 1 to automatically operate. Specifically, the control system can adopt a PLC control system, which is simple to operate and accurate in control.

[0043] Step S2: After the push boat drives the graphite boat 200 to land in the reaction chamber of the PECVD equipment, the control system controls the driving element 1 to drive the electrode rod 8 to move.

[0044] Step S3: Use the torque sensor to detect the torque value output by the driving element 1 and transmit it to the control system, and the control system determines the movement state of the electrode rod 8.

[0045] Step S4: Use the position sensor to detect the state of the electrode rod 8 inserted into the electrode hole 201 and transmit the state to the control system, which determines the state of the electrode rod 8 inserted.

[0046] In step S3 of this embodiment, if the torque value output by the driving element 1 is greater than a preset value, the control system alarms to indicate the risk of collision with the boat. If the torque value output by the driving element 1 is within a preset range, the electrode rod 8 continues to move forward.

[0047] In step S4 of this embodiment, if the position sensor in the electrode hole 201 does not detect the electrode rod 8, the control system alarms, indicating that the driving element 1 is abnormal; if the position sensor detects the electrode rod 8, the control system determines whether the position occupied by the electrode rod 8 in the electrode hole 201 reaches the preset value. Specifically, if the deviation between the actual position value occupied by the electrode rod 8 in the electrode hole 201 and the preset value is less than ±10%, the control system prompts that the insertion of the electrode rod 8 is completed; if the deviation between the actual position value occupied by the electrode rod 8 in the electrode hole 201 and the preset value is greater than ±10%, the control system alarms.

[0048] Furthermore, if the actual position value occupied by the electrode rod 8 in the electrode hole 201 is less than 90% of the preset value, it indicates that the electrode head of the electrode rod 8 is not inserted into place; if the actual position value occupied by the electrode rod 8 in the electrode hole 201 is greater than 110% of the preset value, it is considered that the electrode head needs to be replaced, or the position of the electrode rod 8 is deviated and needs to be adjusted.

[0049] When the electrode rod 8 is inserted and the coating process in the PECVD equipment is successfully completed, the torque value output by the driving element 1 is stored in the database to form a normal torque data interval for the operation of the driving element 1, providing a data packet for subsequent abnormal judgment and gradually forming a reasonable judgment basis.

[0050] When the process is finished and the electrode rod 8 needs to be removed from the graphite boat 200 , the driving element 1 operates in the reverse direction to pull the electrode rod 8 backward.

[0051] In this embodiment, a torque sensor and a position sensor are provided to monitor the insertion process of the electrode rod 8 in real time, and the data is transmitted to the control system. The control system makes corresponding early warnings and judgments based on the torque and in-position signals, thereby improving the efficiency of electrode introduction and ensuring the safety of the graphite boat.

[0052] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A graphite boat electrode introduction device for PECVD equipment, characterized in that: include: A driving element (1), a supporting base (2), a fixing base (3), a sliding assembly and an electrode rod (8), wherein one side of the supporting base (2) is connected to a furnace tail flange (100) of a PECVD device, and the other side of the supporting base (2) is provided with a driving element (1), and the output end of the driving element (1) is connected to the fixing base (3); the sliding assembly comprises a slider (4) and a linear guide rail (5), wherein the linear guide rail (5) is arranged on the supporting base (2), and the slider (4) is slidably arranged on the linear guide rail (5), the lower part of the fixing base (3) is connected and fixed to the slider (4), and the upper part of the fixing base (3) is connected to the electrode rod (8), and the electrode rod (8) passes through the furnace tail flange (100) and extends into the reaction chamber; under the drive of the driving element (1), the fixing base (3) and the slider (4) drive the electrode rod (8) to move back and forth along the linear guide rail (5) in a straight line, so as to enable the electrode rod (8) to be inserted into or separated from the electrode hole (201) of the graphite boat (200); The electrode introduction control method comprises the following steps: Step S1, connecting the driving element (1) to an external control system, arranging a torque sensor connected to the external control system on the driving element (1), and arranging a position sensor connected to the external control system in the electrode hole (201) of the graphite boat (200); Step S2: After the graphite boat (200) is placed in the reaction chamber of the PECVD device, the control system controls the driving element (1) to drive the electrode rod (8) to move; Step S3, using a torque sensor to detect the torque value output by the driving element (1), and transmitting the value to a control system, and the control system determines the movement state of the electrode rod (8); Step S4: using a position sensor to detect the state of the electrode rod (8) being inserted into the electrode hole (201), and transmitting the state to the control system, so that the control system determines the state of the electrode rod (8) being inserted.

2. The graphite boat electrode introduction device for PECVD equipment according to claim 1, characterized in that: The electrode introduction device further comprises a bellows (7), wherein the bellows (7) is nested in the outer circumference of the electrode rod (8), one end of the bellows (7) is connected to the fixing seat (3), and the other end of the bellows (7) is connected to the electrode introduction hole (101) on the furnace tail flange (100).

3. The graphite boat electrode introduction device for PECVD equipment according to claim 1, characterized in that: The linear guide rail (5) is provided with a limit block (6) for limiting the displacement of the slide block (4).

4. The graphite boat electrode introduction device for PECVD equipment according to any one of claims 1 to 3, characterized in that: The driving element (1) is a motor, a pneumatic cylinder, a hydraulic cylinder or an electric push rod.

5. An electrode introduction control method for a graphite boat electrode introduction device of a PECVD device according to any one of claims 1 to 4, characterized in that: The following steps are involved: Step S1, connecting the driving element (1) to an external control system, arranging a torque sensor connected to the external control system on the driving element (1), and arranging a position sensor connected to the external control system in the electrode hole (201) of the graphite boat (200); Step S2: After the graphite boat (200) is placed in the reaction chamber of the PECVD device, the control system controls the driving element (1) to drive the electrode rod (8) to move; Step S3, using a torque sensor to detect the torque value output by the driving element (1), and transmitting the value to a control system, and the control system determines the movement state of the electrode rod (8); Step S4: using a position sensor to detect the state of the electrode rod (8) being inserted into the electrode hole (201), and transmitting the state to the control system, so that the control system determines the state of the electrode rod (8) being inserted.

6. The electrode introduction control method according to claim 5, characterized in that: In step S3, if the torque value output by the driving element (1) is greater than a preset value, the control system issues an alarm; if the torque value output by the driving element (1) is within a preset range, the electrode rod (8) continues to move forward.

7. The electrode introduction control method according to claim 5, characterized in that: In step S4, if the position sensor in the electrode hole (201) does not detect the electrode rod (8), the control system issues an alarm; if the position sensor detects the electrode rod (8), the control system determines whether the position occupied by the electrode rod (8) in the electrode hole (201) reaches a preset value.

8. The electrode introduction control method according to claim 7, characterized in that: If the deviation between the actual position value of the electrode rod (8) in the electrode hole (201) and the preset value is less than ±10%, the control system prompts that the insertion of the electrode rod (8) is complete; if the deviation between the actual position value of the electrode rod (8) in the electrode hole (201) and the preset value is greater than ±10%, the control system issues an alarm.

9. The electrode introduction control method according to claim 8, characterized in that: When the electrode rod (8) is inserted and the coating process in the PECVD device is completed, the torque value output by the drive element (1) is stored in a database to form a normal torque data interval for the operation of the drive element (1).

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