A Molecular Pump Fault-Free Operation Testing Device and Method Based on MTBF

Abstract

A fault-free operation test device and method for a molecular pump based on MTBF, belonging to the technical field of molecular pumps. A fault-free operation test device for a molecular pump based on MTBF includes: a molecular pump, a fore pump, a gas path structure, a host computer, and a buzzer. In this solution, multiple fore pumps are connected to multiple molecular pumps through a gas path structure, thereby improving the utilization rate of the fore pumps and avoiding the problem that the experimental process of the molecular pump is affected after a fore pump fails. In this solution, the molecular pump is connected to the host computer through an external control cable. The experimental data of each molecular pump can be monitored by the host computer and the buzzer at all times. When a certain molecular pump fails, the host computer directly shuts down the faulty molecular pump through the external control cable, thereby ensuring the normal progress of the experimental process to the greatest extent. In addition, monitoring by the host computer can also reduce labor costs and accurately record the fault time point of the molecular pump.

Description

Technical Field

[0001] The present invention relates to the technical field of molecular pumps, and particularly relates to a molecular pump fault-free operation testing device and method based on MTBF. Background Art

[0002] A molecular pump is a device used to create and maintain a vacuum environment. It removes gas molecules through physical or chemical reactions to achieve a high vacuum or ultra-high vacuum level. Molecular pumps are required to have stable working performance and long service life. The stability of molecular pumps will directly affect the accuracy and repeatability of experiments and production processes.

[0003] MTBF (Mean Time Between Failures) testing is an important indicator for evaluating the reliability of molecular pumps, and it can provide quantitative data on how often a failure occurs on average during the normal operation of the device. For users, the results of this test can help them understand the stability and durability of molecular pumps under expected usage conditions, so as to perform predictive maintenance and reduce unexpected downtime.

[0004] When the current molecular pump conducts MTBF fault-free operation testing, it requires a large amount of equipment cost and labor cost, specifically as follows: 1. Each molecular pump needs to be equipped with a fore pump and a control power module to assist in the testing. The required accessory equipment is numerous, and it occupies a large space during testing. The one-to-one matching of the fore pump and the molecular pump will cause waste, and at the same time, it will lead to a large amount of noise and vibration in the testing environment. 2. The configured fore pump and control power module are both factors causing faults in the molecular pump during the testing stage. For example, if the fore pump fails, the molecular pump will also be forced to stop running, and the same is true for the control power module. 3. When the molecular pump conducts MTBF fault-free operation testing, 20 molecular pumps run continuously without stopping for 45 days. For 45 days, the operating parameters (such as current, voltage, temperature, etc.) need to be recorded manually. Usually, the shorter the recording interval, the better. Therefore, this method requires a huge amount of labor cost. It requires manual round-the-clock monitoring for data recording and cannot directly lock the accurate time point of the molecular pump failure. 4. When the molecular pump conducts MTBF fault-free operation testing, its operating parameters may affect the experimental results due to changes in environmental temperature and humidity. 5. During the MTBF fault-free operation testing of the molecular pump, if a fore pump fails, it is impossible to replace the fore pump while the molecular pump is running normally.

[0005] In summary, there is an urgent need for a set of devices and methods for the MTBF fault-free operation testing of molecular pumps. Summary of the Invention

[0006] Therefore, the technical problem to be solved by the present invention is to overcome the defect of unstable experimental period in the prior art, and thus provide a molecular pump fault-free operation testing device and method based on MTBF.

[0007] To solve the above problems, the present invention provides a fault-free operation test device for a molecular pump based on MTBF, including:

[0008] Molecular pumps, with several; the molecular pumps are arranged in a constant temperature box; the temperature and humidity in the constant temperature box are constant.

[0009] Pre-stage pumps, at least two, the pre-stage pumps are adapted to be connected to the molecular pumps; each of the pre-stage pumps provides a vacuum environment for at least one of the molecular pumps.

[0010] An air path structure is arranged between the molecular pump and the pre-stage pump; the molecular pump and the pre-stage pump are connected through the air path structure.

[0011] An upper computer is connected in parallel with several of the molecular pumps through an external control cable; the upper computer is adapted to detect and record the working data of the molecular pumps.

[0012] A buzzer is adapted to be connected to the upper computer; the state of the buzzer corresponds to the state of the molecular pump; the buzzer includes a working state and an alarm state; when the molecular pump is working normally, the buzzer is in the working state; when the molecular pump fails, the buzzer is in the alarm state.

[0013] As a preferred solution, it further includes:

[0014] A first control valve is arranged between the pre-stage pump and the air path structure; the number of the first control valves corresponds to the number of the pre-stage pumps, and by setting the first control valve, the on-off relationship between the pre-stage pump and the air path structure can be controlled.

[0015] As a preferred solution, it further includes:

[0016] A second control valve is arranged between the molecular pump and the air path structure; the number of the second control valves corresponds to the number of the molecular pumps, and by setting the second control valve, the on-off relationship between the molecular pump and the air path structure can be controlled.

[0017] As a preferred solution, it further includes:

[0018] A first connection structure is arranged between the first control valve and the air path structure; the first connection structure is used to connect the air path structure and the pre-stage pump.

[0019] As a preferred solution, it further includes:

[0020] A second connection structure is arranged between the second control valve and the molecular pump; the second connection structure is used to connect the air path structure and the molecular pump.

[0021] As a preferred solution, the first connection structure includes:

[0022] A first connection pipeline, one end of which is connected to the first control valve, and the other end is connected to the gas path structure;

[0023] A first clamp, arranged at one end of the first connection pipeline close to the first control valve; the first connection pipeline is hermetically connected to the first control valve through the first clamp.

[0024] As a preferred solution, the second connection structure includes:

[0025] A second connection pipeline, one end of which is connected to the second control valve, and the other end is connected to the gas path structure;

[0026] A second clamp, arranged at one end of the second connection pipeline close to the second control valve; the second connection pipeline is hermetically connected to the second control valve through the second clamp.

[0027] To solve the above problems, the present invention provides a method for testing the fault-free operation of a molecular pump based on MTBF, including the above-mentioned device for testing the fault-free operation of a molecular pump based on MTBF; it further includes steps:

[0028] S1. Preparation stage; turn on the external control power supply, start the upper computer and input corresponding information into the upper computer;

[0029] S2. Detection stage; start the fore pump and the molecular pump, the upper computer starts to detect the working data of the molecular pump, and the buzzer is in the working state;

[0030] S3. When a fault occurs in the molecular pump, the buzzer is in the alarm state, and at the same time the upper computer automatically saves the data and the fault time; when the number of faults of the molecular pump is less than or equal to the first set value, repeat step S2; when the number of faults of the molecular pump is greater than or equal to the second set value, the upper computer terminates the experiment, records the relevant data and prompts that the experiment fails; when no fault occurs in all the molecular pumps and after reaching the predetermined detection time, the upper computer terminates the experiment, records the relevant data and prompts that the experiment is successful.

[0031] As a preferred solution, in step S3, when an abnormality occurs in a certain molecular pump, the corresponding second control valve can be controlled to isolate the molecular pump with the abnormality, so as to avoid affecting the overall experimental process.

[0032] As a preferred solution, when an abnormality occurs in the fore pump, the corresponding first control valve can be controlled to isolate the fore pump with the abnormality, so as to avoid the abnormality of the fore pump from affecting the experimental process of the molecular pump.

[0033] The technical solution of the present invention has the following advantages:

[0034] 1. A fault - free operation test device for a molecular pump based on MTBF provided by the present invention includes: a molecular pump, a backing pump, a gas path structure, a host computer, and a buzzer. There are several molecular pumps, and there are at least two backing pumps. Each backing pump provides a vacuum environment for at least one molecular pump. In this solution, multiple backing pumps and multiple molecular pumps are connected through a gas path structure, which improves the utilization rate of the backing pumps and can avoid the problem that the experimental process of the molecular pump is affected after a backing pump fails. In this solution, the molecular pump is connected to the host computer through an external control cable. The experimental data of each molecular pump can be monitored by the host computer and the buzzer at all times. When a certain molecular pump fails, the host computer directly closes the faulty molecular pump through the external control cable, so as to ensure the normal progress of the experimental process to the greatest extent. And through the monitoring of the host computer, the labor cost can be reduced, and the fault time point of the molecular pump can be accurately recorded.

[0035] 2. A fault - free operation test device for a molecular pump based on MTBF provided by the present invention further includes a first control valve. The first control valve is arranged between the backing pump and the gas path structure. By setting the first control valve, the on - off relationship between the backing pump and the gas path structure can be controlled. When a certain backing pump fails, the faulty backing pump can be isolated through the corresponding first control valve, and then it is convenient to repair or replace the faulty backing pump. The entire experimental process will not be forced to terminate due to the failure of a certain backing pump, and the problem that the entire experimental process is affected by the failure of the backing pump is avoided to the greatest extent.

[0036] 3. A fault - free operation test device for a molecular pump based on MTBF provided by the present invention further includes a second control valve. The second control valve is arranged between the molecular pump and the gas path structure. By setting the second control valve, the on - off relationship between the molecular pump and the gas path structure can be controlled. When a certain molecular pump fails, in order to avoid affecting the entire experiment, by controlling the second control valve, the faulty molecular pump is isolated, ensuring the normal progress of the experiments of the remaining molecular pumps.

[0037] 4. A method for testing the fault - free operation of a molecular pump based on MTBF provided by the present invention includes the following steps: S1. Preparation stage: Turn on the external control power supply, start the upper computer and input corresponding information into the upper computer; S2. Detection stage: Start the backing pump and the molecular pump, and the upper computer starts to detect the working data of the molecular pump, and the buzzer is in the working state; S3. When a fault occurs in the molecular pump, the buzzer is in the alarm state, and at the same time, the upper computer automatically saves the data and the fault time. When the number of faults is less than or equal to the first set value, repeat step S2; when the number of faults is greater than or equal to the second set value, the upper computer terminates the experiment, records the relevant data and prompts that the experiment fails; when no fault occurs in the molecular pump and after reaching the predetermined detection time, the upper computer terminates the experiment, records the relevant data and prompts that the experiment is successful. In this solution, through the upper computer and the buzzer, the experimental data of each molecular pump can be monitored at all times. When a certain molecular pump fails, the upper computer directly closes the faulty molecular pump through the external control cable, thus ensuring the normal progress of the experimental process to the greatest extent. Moreover, through the monitoring of the upper computer, the labor cost can be reduced, and the fault time point of the molecular pump can be accurately recorded. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0039] Figure 1 It is a schematic diagram of the overall structure of a device for testing the fault - free operation of a molecular pump based on MTBF provided by the present invention.

[0040] Figure 2 It is a second - perspective schematic diagram of a device for testing the fault - free operation of a molecular pump based on MTBF provided by the present invention.

[0041] Figure 3 It is a flowchart of a method for testing the fault - free operation of a molecular pump based on MTBF provided by the present invention.

[0042] DESCRIPTION OF THE REFERENCE NUMERALS:

[0043] 1. Constant - temperature box; 2. First control valve; 3. First clamp; 4. Backing pump; 5. First connecting pipeline; 6. Molecular pump; 7. Second control valve; 8. Second clamp; 9. Second connecting pipeline; 10. Gas - path structure; 11. Test bench; 12. Movable wheel; 13. Upper computer; 14. Buzzer; 15. External control cable; 16. External control switch. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0044] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0045] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0046] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0048] Embodiment 1

[0049] As Figure 1 shown, a fault-free operation test device for a molecular pump 6 based on MTBF includes a molecular pump 6, a fore pump 4, a gas path structure 10, a host computer 13, and a buzzer 14, where there are several molecular pumps 6; the molecular pump 6 is arranged in a constant temperature box 1; the temperature and humidity in the constant temperature box 1 are constant; there are at least two fore pumps 4, and the fore pump 4 is adapted to be connected to the molecular pump 6; each fore pump 4 provides a vacuum environment for at least one molecular pump 6; the gas path structure 10 is arranged between the molecular pump 6 and the fore pump 4; the molecular pump 6 and the fore pump 4 are connected through the gas path structure 10. The host computer 13 is connected in parallel with several molecular pumps 6 through an external control cable 15; the host computer 13 is adapted to detect and record the working data of the molecular pump 6; the buzzer 14 is adapted to be connected to the host computer 13; the state of the buzzer 14 corresponds to the state of the molecular pump 6; the buzzer 14 includes a working state and an alarm state; when the molecular pump 6 is working normally, the buzzer 14 is in the working state; when the molecular pump 6 fails, the buzzer 14 is in the alarm state.

[0050] Each of the fore pumps 4 provides a vacuum environment for at least one of the molecular pumps 6. In this solution, by connecting multiple fore pumps 4 and multiple molecular pumps 6 through the gas path structure 10, the utilization rate of the fore pumps 4 is improved, and the problem that the experimental process of the molecular pumps 6 is affected after a failure of the fore pumps 4 can be avoided. In this solution, the molecular pumps 6 are connected to the host computer 13 through an external control cable. The experimental data of each molecular pump 6 can be monitored by the host computer 13 and the buzzer 14 at all times. When a certain molecular pump 6 fails, the host computer 13 directly closes the faulty molecular pump 6 through the external control cable, so as to ensure the normal progress of the experimental process to the greatest extent. And through the monitoring of the host computer 13, the labor cost can also be reduced, and the failure time point of the molecular pump 6 can be accurately recorded.

[0051] It should be noted that by using one fore pump 4 to work for multiple molecular pumps 6, the utilization rate of the fore pump 4 can be improved, the equipment usage cost can be reduced, and the vibration and noise of the experimental environment can also be reduced.

[0052] It should be noted that the temperature and humidity inside the constant temperature box 1 can be set according to the experimental requirements, so as to avoid the influence of the change of environmental temperature and humidity on the experimental results when the molecular pump 6 is performing the MTBF fault-free operation test. Further, in order to reduce the cost of the constant temperature box 1, the volume of the constant temperature box 1 should be appropriately reduced. In this embodiment, the volume of the constant temperature box 1 is two cubic meters. Its specific dimensions can also be customized according to the specific number of molecular pumps 6 and experimental needs. Since the volume of the constant temperature box 1 is small in this solution and ordinary operators cannot enter, a test bench 11 is also provided. The molecular pump 6 and the gas path structure 10 are fixedly arranged on the test bench. And in order to ensure the moving effect of the test bench 11, moving wheels 12 are installed at the bottom of the test bench 11, and the molecular pump 6 and the gas path structure 10 are moved into the constant temperature box 1 along with the test bench 11 by pushing and pulling.

[0053] It should be noted that an external control switch 16 is also provided on the external control cable 15, and the external control switch 16 is arranged outside the constant temperature box 1, which is convenient for controlling the operation of the molecular pump 6. If the host computer 13 encounters a failure and cannot control the molecular pump 6, controlling the external control switch 16 can also control the operating state of the molecular pump 6.

[0054] It should be noted that the MTBF test of the molecular pump requires a relatively large test cost, including equipment cost and time cost. The equipment cost is mainly for building the MTBF test platform. When a single molecular pump 6 operates, in addition to itself, it also requires a power control module, a TD module, and a backing pump 4. The time cost mainly refers to the need for manual registration of the performance index parameters of the molecular pump 6 during the test. The registration interval is at most 1 hour, which means that at least 12 registrations are required in 24 hours, and the requirement for the mean time between failures is: MTBF≥5000h. Of course, the test time can also be reduced by increasing the number of molecular pump 6 tests. For example, according to Clause 4.2 of GJB 899A, the test plan is formulated as follows: the lower limit of MTBF inspection θ1 = 5000h; the nominal values of decision risks α = β = 20%, and the actual values α ’ = 17.5%, β ’ = 19.7%. The discrimination ratio d = 3.0; the test time is 4.3 times the value of θ1 = 21500h; the decision failure number: reject if the number of failures ≥ 3, and accept if the number of failures ≤ 2. That is, at most 20 first-batch developed molecular pump 6 products can be selected as samples for simultaneous MTBF failure-free operation tests, and the operation time can be shortened to 21500h (the average test time per unit is 1075h / 45 days). During the test, if the number of failures ≥ 3, it means the test fails; if the number of failures ≤ 2, the test passes.

[0055] When the molecular pump 6 conducts the MTBF failure-free operation test, as mentioned above, 20 molecular pumps 6 operate without stopping for 45 days. During these 45 days, manual recording of their operating parameters (such as current, voltage, temperature, etc.) is required. Usually, the shorter the recording interval, the better. Therefore, this method incurs a huge labor cost, requires 24-hour continuous manual monitoring for data recording, and cannot directly lock the exact time point of the molecular pump 6 failure.

[0056] As Figure 2 shown. Further, it also includes a first control valve 2, which is arranged between the backing pump 4 and the gas path structure 10; the number of the first control valves 2 corresponds to the number of the backing pumps 4. By setting the first control valve 2, the on-off relationship between the backing pump 4 and the gas path structure 10 can be controlled.

[0057] It should be noted that in this embodiment, the first control valve 2 is specifically a KF25 vacuum butterfly valve. When a certain backing pump 4 fails, the faulty backing pump 4 can be isolated through the corresponding first control valve 2, and then it is convenient to repair or replace the faulty backing pump 4. The entire experimental process will not be forced to terminate due to the failure of a certain backing pump 4, maximizing the avoidance of the problem that the failure of the backing pump 4 affects the entire experimental process.

[0058] It should be noted that in this solution, the specific number of the fore-pumps 4 is six, and the number of the fore-pumps 4 can be increased or decreased according to the experimental requirements; during the test, four of the first control valves 2 are in the open state, and the other two first control valves 2 are in the closed state, that is, four fore-pumps 4 are working, and the other two fore-pumps 4 are in standby. When one of the working fore-pumps 4 fails, the corresponding first control valve 2 is closed, thereby isolating the faulty fore-pump 4 by using the first control valve 2, and ensuring that the overall experimental process will not be affected. And one of the first control valves 2 connected to the standby fore-pump 4 is opened, thus achieving rapid repair.

[0059] Furthermore, it further includes a second control valve 7, and the second control valve 7 is arranged between the molecular pump 6 and the gas path structure 10; the number of the second control valves 7 is correspondingly set according to the number of the molecular pumps 6, and by setting the second control valve 7, the on-off relationship between the molecular pump 6 and the gas path structure 10 can be controlled.

[0060] It should be noted that in this embodiment, the second control valve 7 is specifically a KF16 vacuum butterfly valve. When a certain molecular pump 6 fails, in order to avoid affecting the entire experiment, by controlling the second control valve 7, the faulty molecular pump 6 is isolated, ensuring the normal progress of the experiment of the remaining molecular pumps 6 and not affecting the overall experimental process.

[0061] It should be noted that in this embodiment, the specific number of the molecular pumps 6 is ten, and they are evenly distributed on both sides of the gas path structure 10, and the number of the molecular pumps 6 can be appropriately increased or decreased according to the experimental requirements.

[0062] Furthermore, it further includes a first connection structure, and the first connection structure is arranged between the first control valve 2 and the gas path structure 10; the first connection structure is used to connect the gas path structure 10 and the fore-pump 4. By setting the first connection structure, the connection between the fore-pump 4 and the gas path structure 10 is achieved.

[0063] Specifically, the first connection structure includes a first connection pipeline 5 and a first clamp 3. One end of the first connection pipeline 5 is connected to the first control valve 2, and the other end is connected to the gas path structure 10; the first clamp 3 is arranged at one end of the first connection pipeline 5 close to the first control valve 2; the first connection pipeline 5 is hermetically connected to the first control valve 2 through the first clamp 3.

[0064] It should be noted that the first connection pipeline 5 is specifically a KF25 bellows. The corrugated shape of the bellows gives it good flexibility, and it can be bent and twisted within a certain range to adapt to various complex pipeline layouts. In addition, the bellows also has characteristics such as good high temperature resistance, corrosion resistance, and high strength, and can operate stably for a long time in a harsh working environment.

[0065] Further, it further includes a second connection structure, which is arranged between the second control valve 7 and the molecular pump 6; the second connection structure is used to connect the gas path structure 10 and the molecular pump 6.

[0066] Specifically, the second connection structure includes a second connection pipeline 9 and a second clamp 8. One end of the second connection pipeline 9 is connected to the second control valve 7, and the other end is connected to the gas path structure 10; the second clamp 8 is arranged at one end of the second connection pipeline 9 close to the second control valve 7; the second connection pipeline 9 is hermetically connected to the second control valve 7 through the second clamp 8.

[0067] It should be noted that the second connection pipeline 9 is specifically a KF16 bellows.

[0068] Embodiment 2

[0069] As Figure 3 shown, a method for testing the fault-free operation of a molecular pump 6 based on MTBF includes the testing device for the fault-free operation of a molecular pump 6 based on MTBF in Embodiment 1, and further includes the steps: S1. Preparation stage; turn on the external control power supply, start the upper computer 13 and input corresponding information into the upper computer 13; S2. Detection stage; start the fore pump 4 and the molecular pump 6, and the upper computer 13 starts to detect the working data of the molecular pump 6, and the buzzer 14 is in the working state; S3. When a fault occurs in the molecular pump 6, the buzzer 14 is in the alarm state, and at the same time the upper computer 13 will automatically save the data and the fault time; when the number of faults of the molecular pump 6 is less than or equal to the first set value, repeat step S2; when the number of faults of the molecular pump 6 is greater than or equal to the second set value, the upper computer 13 terminates the experiment, records the relevant data and prompts the experiment to fail; when no fault occurs in all the molecular pumps 6 and the predetermined detection time is reached, the upper computer 13 terminates the experiment, records the relevant data and prompts the experiment to succeed. In this solution, the experimental data of each molecular pump 6 can be monitored by the upper computer 13 and the buzzer 14 at all times. When a certain molecular pump 6 fails, the upper computer 13 directly closes the faulty molecular pump 6 through the external control cable, so as to ensure the normal progress of the experimental process to the greatest extent, and the monitoring by the upper computer 13 can also reduce the labor cost and accurately record the fault time point of the molecular pump 6.

[0070] It should be noted that the molecular pump 6 is connected in parallel with the external control cable 15. The external control cable 15 communicates with the host computer 13, and records test data at intervals according to the settings. The allowable number of faults can be set. For example, if the allowable number of faults is set to 2, when the third fault occurs, the host computer 13 automatically saves the recorded data, prompts that the test fails, and exits the operation. The communication control of the molecular pump 6 by the host computer 13 can avoid the faults of the molecular pump 6 in the test stage that may be caused by the control power module, and can directly record the accurate time point of the faults of the molecular pump 6, as well as the operating state parameters (current, voltage, temperature, speed) of the molecular pump 6 at the moment of the fault, effectively reducing the labor cost and improving the accuracy of data recording.

[0071] It should be noted that in step S1, the input information includes the model of the molecular pump 6, the allowable number of faults, and the parameters to be recorded, usually speed, voltage, current, temperature, etc.

[0072] It should be noted that the green light of the buzzer 14 is on in the working state, and the red light is on when the buzzer 14 is in the alarm state. After the host computer 13 automatically records the data, and when the number of faults of the molecular pump 6 is less than or equal to the first set value, the yellow light of the buzzer 14 flashes, and it re-enters the working state.

[0073] In this embodiment, the first set value is 2, the second set value is 3, and both the first set value and the second set value can be set according to the actual experimental requirements.

[0074] Furthermore, in step S3, when an abnormality occurs in a certain molecular pump 6, the corresponding second control valve 7 can be controlled to isolate the abnormal molecular pump 6 to avoid affecting the overall experimental process.

[0075] Furthermore, when an abnormality occurs in the current stage pump 4, the corresponding first control valve 2 can be controlled to isolate the abnormal current stage pump 4 to avoid the abnormal current stage pump 4 affecting the experimental process of the molecular pump 6.

[0076] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or alterations can be made based on the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or alterations derived therefrom are still within the protection scope of the present invention.

Claims

1. A molecular pump trouble-free operation test device based on MTBF, characterized in that: include: There are a plurality of molecular pumps (6); the molecular pumps (6) are arranged in a constant temperature box (1); the constant temperature and humidity in the constant temperature box (1); There are at least two fore-stage pumps (4), and the fore-stage pumps (4) are suitable for communicating with the molecular pumps (6); each fore-stage pump (4) provides a vacuum environment for at least one molecular pump (6); An air path structure (10) is provided between the molecular pump (6) and the front-stage pump (4); the molecular pump (6) and the front-stage pump (4) are in communication via the air path structure (10); A host computer (13) is connected in parallel with the plurality of molecular pumps (6) via an external control cable (15); the host computer (13) is suitable for detecting and recording the working data of the molecular pumps (6); A buzzer (14) is suitable for being connected to the host computer (13); the state of the buzzer (14) corresponds to the state of the molecular pump (6); the buzzer (14) includes a working state and an alarm state; when the molecular pump (6) is working normally, the buzzer (14) is in the working state; when the molecular pump (6) fails, the buzzer (14) is in the alarm state.

2. The molecular pump trouble-free operation test device based on MTBF according to claim 1, characterized in that: Also includes: A first control valve (2) is arranged between the front-stage pump (4) and the gas path structure (10); the number of the first control valves (2) is arranged corresponding to the number of the front-stage pumps (4), and the on-off relationship between the front-stage pump (4) and the gas path structure (10) can be controlled by setting the first control valve (2).

3. The molecular pump trouble-free operation test device based on MTBF according to claim 1, characterized in that: Also includes: The second control valve (7) is arranged between the molecular pump (6) and the gas path structure (10); the number of the second control valves (7) is arranged corresponding to the number of the molecular pumps (6), and the on-off relationship between the molecular pump (6) and the gas path structure (10) can be controlled by setting the second control valve (7).

4. The molecular pump trouble-free operation test device based on MTBF according to claim 2, characterized in that: Also includes: a first connecting structure, provided between the first control valve (2) and the gas path structure (10); The first connecting structure is used to connect the gas path structure (10) and the front pump (4).

5. The molecular pump trouble-free operation test device based on MTBF according to claim 3, characterized in that: Also includes: a second connecting structure, provided between the second control valve (7) and the molecular pump (6); The second connecting structure is used to connect the gas path structure (10) and the molecular pump (6).

6. The molecular pump trouble-free operation test device based on MTBF according to claim 4, characterized in that: The first connection structure includes: a first connecting pipeline (5), one end of which is in communication with the first control valve (2) and the other end of which is in communication with the gas path structure (10); A first clamp (3) is provided at one end of the first connecting pipeline (5) close to the first control valve (2); the first connecting pipeline (5) is sealedly connected to the first control valve (2) via the first clamp (3).

7. The molecular pump trouble-free operation test device based on MTBF according to claim 5, characterized in that: The second connection structure includes: a second connecting pipeline (9), one end of which is in communication with the second control valve (7) and the other end of which is in communication with the gas path structure (10); A second clamp (8) is provided at one end of the second connecting pipeline (9) close to the second control valve (7); the second connecting pipeline (9) is sealedly connected to the second control valve (7) via the second clamp (8).

8. A molecular pump trouble-free operation test method based on MTBF, characterized in that: The device comprises a molecular pump (6) trouble-free operation test device based on MTBF according to any one of claims 1 to 7; and further comprises the steps of: S1, preparation stage: turn on the external control power supply, start the host computer (13) and input the corresponding information into the host computer (13); S2, detection stage; start the fore pump (4) and the molecular pump (6), the host computer (13) starts to detect the working data of the molecular pump (6), and the buzzer (14) is in working state; S3. When a molecular pump (6) fails, the buzzer (14) is in an alarm state, and the host computer (13) automatically saves the data and the failure time; when the number of failures of the molecular pump (6) is less than or equal to the first set value, step S2 is repeated; when the number of failures of the molecular pump (6) is greater than or equal to the second set value, the host computer (13) terminates the experiment, records the relevant data, and prompts that the experiment has failed; when all molecular pumps (6) do not fail and the predetermined detection time is reached, the host computer (13) terminates the experiment, records the relevant data, and prompts that the experiment has succeeded.

9. The molecular pump trouble-free operation test method based on MTBF according to claim 8, characterized in that: In step S3, when a molecular pump (6) is abnormal, the corresponding second control valve (7) can be controlled to isolate the abnormal molecular pump (6) to avoid affecting the overall experimental process.

10. The molecular pump trouble-free operation test method based on MTBF according to claim 8, characterized in that: When an abnormality occurs in the front stage pump (4), the corresponding first control valve (2) can be controlled to isolate the abnormal front stage pump (4), thereby preventing the abnormality of the front stage pump (4) from affecting the experimental process of the molecular pump (6).

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