Cooling circulation device and vacuum pump cooling system

Abstract

The invention belongs to the technical field of cooling circulation, and particularly relates to a cooling circulation device and a vacuum pump cooling system. The cooling circulation device comprises a cooling container used for storing a fluid medium, a liquid storage structure arranged above the cooling container, a first pipeline communicating with the cooling container and a to-be-cooled part, a second pipeline communicating with the to-be-cooled part and the liquid storage structure, and a driving pump used for driving the fluid medium to flow from the cooling container to the to-be-cooled part through the first pipeline. The fluid medium flows from the to-be-cooled part to the liquid storage structure, the fluid medium is used for exchanging heat with the to-be-cooled part, the liquid storage structure is provided with a containing cavity communicated with the first pipeline, the liquid storage structure is provided with a plurality of liquid outlets which are communicated with the containing cavity and face an opening of the cooling container, and the fluid medium flowing out of the liquid outlets falls into the cooling container under the action of gravity. According to the invention, the cyclic utilization of the fluid medium can be realized and the cooling efficiency of the fluid medium can be improved.

Description

Technical Field

[0001] The invention belongs to the technical field of cooling circulation, and in particular relates to a cooling circulation device and a vacuum pump cooling system. Background Art

[0002] The water ring vacuum pump is a kind of equipment used to manufacture and maintain high vacuum. It has a wide range of applications and can remove various gases containing water vapor, flammable, explosive, small amounts of dust, and small amounts of liquid. It mainly uses water as the working medium and has the advantages of low maintenance costs and the ability to work in harsh environments. The impeller of the water ring vacuum pump rotates once, and the blade space inhales and exhausts air once. There are many small cavities in the water ring vacuum pump that work continuously, so the pump body continuously sucks and delivers gas, generating a lot of heat during work. Therefore, during the operation of the water ring vacuum pump, it is necessary to continuously add cold water to the pump body to cool the unit.

[0003] However, when the existing water ring vacuum pump is working, the cooling water flows through the pump body and is directly discharged, the water utilization rate is low, the cooling water cannot be automatically circulated and reused, resulting in water waste, and the cooling water cannot be effectively cooled, resulting in excessively high temperature of the cooling water. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a cooling circulation device and a vacuum pump cooling system, aiming to solve the problem of how to achieve the recycling of fluid medium and how to improve the cooling efficiency of the fluid medium.

[0005] To achieve the above purpose, the technical solution adopted in this application is:

[0006] In a first aspect, a cooling circulation device is provided, comprising a cooling container for storing a fluid medium, a liquid storage structure arranged above the cooling container, a first pipe connecting the cooling container and a part to be cooled, a second pipe connecting the part to be cooled and the liquid storage structure, and a driving pump, wherein the driving pump is used to drive the fluid medium to flow from the cooling container to the part to be cooled through the first pipe, and from the part to be cooled to the liquid storage structure, the fluid medium is used to exchange heat with the part to be cooled, the liquid storage structure has a accommodating cavity connected to the first pipe, and the liquid storage structure is provided with a plurality of liquid outlets connected to the accommodating cavity and opening toward the cooling container, and the fluid medium flowing out from the plurality of liquid outlets falls into the cooling container under the action of gravity.

[0007] In some embodiments, the cooling circulation device further includes a supporting structure, and the supporting structure is used to support the liquid storage structure so that there is a height difference between the liquid storage structure and the cooling container along a preset direction.

[0008] In some embodiments, the support structure includes a plurality of support rods extending along the preset direction, the two ends of the support rods are respectively connected to the liquid storage structure and the cooling container, and the plurality of support rods are arranged around the opening of the cooling container.

[0009] In some embodiments, the support structure is a hollow structure having a cavity inside, the axis of the cavity is parallel to the preset direction, and two ends of the cavity are respectively connected to the liquid outlet and the opening of the cooling container.

[0010] In some embodiments, the cavity includes a receiving section and a flow section that are interconnected, the receiving section is connected to the liquid outlet, and the flow section is connected to the opening of the cooling container, the supporting structure includes a first inner wall surrounding the receiving section, and the supporting structure also includes a second inner wall surrounding the flow section, the first inner wall is gradually expanded along the direction of the cooling container pointing to the liquid storage structure, and the second inner wall is straight along the direction of the cooling container pointing to the liquid storage structure.

[0011] In some embodiments, a filter is disposed in the accommodating cavity, the filter cover is disposed on the liquid outlet, and the filter sheet is used to filter impurities in the fluid medium.

[0012] In some embodiments, the first pipe includes a return pipe connected to the part to be cooled and an outlet pipe connected to the return pipe, the outlet pipe extends perpendicular to the preset direction and there is a height difference between the outlet pipe and the liquid storage structure along the preset direction, the opening of the accommodating cavity faces the outlet pipe, and a through hole is provided on the side of the outlet pipe facing the liquid storage structure, and the fluid medium flowing out of the through hole falls into the accommodating cavity under the action of gravity.

[0013] In some embodiments, a cooling component is connected between the return pipe and the outlet pipe, and the cooling component is used to cool the fluid medium in the first pipe.

[0014] In some embodiments, a water inlet pipeline is provided on the side wall of the cooling container, and the water inlet pipeline is used to replenish fluid medium into the cooling container to adjust the liquid level in the cooling container.

[0015] In a second aspect, a vacuum pump cooling system is provided, which includes the above-mentioned cooling circulation device.

[0016] The cooling circulation device provided in the present application connects a cooling container, a liquid storage structure, and a part to be cooled into a whole through a first pipe and a second pipe. The fluid medium flows from the cooling container to the part to be cooled, and flows to the liquid storage structure and the cooling container after cooling the part to be cooled, so that the temperature can be reduced and the part to be cooled can be used again to cool the part to be cooled, thereby realizing the recycling of the fluid medium. When the fluid medium flows from the liquid storage structure to the cooling container, the temperature can be reduced by utilizing the drop between the liquid storage structure and the cooling container. Moreover, the fluid medium flows out from multiple liquid outlets to form multiple thin water columns, which have a larger contact area with the air, thereby making the heat exchange with the air faster, thereby improving the cooling efficiency of the fluid medium. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or exemplary technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall structure of a cooling cycle device provided in one embodiment of the present application;

[0019] Figure 2 yes Figure 1 Schematic diagram of some structures;

[0020] Figure 3 is a schematic diagram of the overall structure of a cooling cycle device provided by another embodiment of the present application;

[0021] Figure 4 It is a schematic diagram of the overall structure of the vacuum pump cooling system provided in an embodiment of the present application.

[0022] Among them, the reference numerals in the figure are:

[0023] 10. Cooling container; 20. Liquid storage structure; 21. Accommodating cavity; 22. Liquid outlet; 30. First pipeline; 40. Second pipeline; 41. Return pipeline; 42. Outlet pipeline; 421. Through hole; 50. Driving pump; 60. Support structure; 61. Support rod; 62. Cavity; 621. Receiving section; 622. Flow section; 63. First inner wall; 64. Second inner wall; 70. Filter element; 80. Cooling assembly; 200. Part to be cooled; 300. Vacuum gas storage tank; 400. Fluid medium. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0028] See also Figures 1 to 4The embodiment of the present application provides a cooling circulation device, including a cooling container 10 for storing a fluid medium 400, a liquid storage structure 20 arranged above the cooling container 10, a first pipe 30 for conveying the fluid medium 400 from the cooling container 10 to a part to be cooled 200, a second pipe 40 for conveying the fluid medium 400 from the part to be cooled 200 to the liquid storage structure 20, and a driving pump 50. The driving pump 50 is used to drive the fluid medium 400 to flow from the cooling container 10 to the part to be cooled 200 through the first pipe 30, and from the part to be cooled 200 to the liquid storage structure 20. The fluid medium 400 is used to exchange heat with the part to be cooled 200. The liquid storage structure 20 has a receiving cavity 21 connected to the first pipe 30. The liquid storage structure 20 is provided with a plurality of liquid outlets 22 connected to the receiving cavity 21 and opening toward the cooling container 10. The fluid medium 400 flowing out of the liquid outlet 22 falls into the cooling container 10 under the action of gravity.

[0029] It should be noted that the embodiment of the present application does not impose any special restrictions on the form of the fluid medium 400, which is generally water. The cold water flowing in from the first pipe 30 takes away the heat of the part to be cooled 200, and the temperature of the cold water after the heat exchange increases. The hot water after the heat exchange flows out from the second pipe 40. The outflowing hot water can be cooled and turned into cold water during the process of passing through the liquid storage structure 20 and the cooling container 10, and is transported to the part to be cooled 200 again. This cycle takes out the heat in the part to be cooled 200, so as to achieve the purpose of cooling the part to be cooled 200.

[0030] The first pipe 30 and the second pipe 40 both refer to pipes for conveying fluids, and can be pipes of various materials, such as hard pipes (such as metal pipes) or soft pipes. The first pipe 30 and the second pipe 40 are not limited to a single pipe body, and can include one or more pipe bodies, which can be specifically arranged as needed. The first pipe 30 can be directly connected to the water inlet of the part to be cooled 200, or it can be indirectly connected to the water outlet of the part to be cooled 200 through one or more other intermediate pipes. Similarly, the second pipe 40 can be directly connected to the water outlet of the part to be cooled 200, or it can be indirectly connected to the water outlet of the cooling device through one or more intermediate pipes.

[0031] The driving pump 50 refers to a pump that can provide driving force for the flow of fluid, and may be, for example, a water pump, a circulation pump, a pneumatic pump, a gear pump, a peristaltic pump, etc., but is not limited thereto.

[0032] The cooling circulation device provided in the present application connects the cooling container 10, the liquid storage structure 20, and the part to be cooled 200 as a whole through the first pipe 30 and the second pipe 40. The fluid medium 400 flows from the cooling container 10 to the part to be cooled 200, and flows to the liquid storage structure 20 and the cooling container 10 after cooling the part to be cooled 200, so that it can be cooled and used again to cool the part to be cooled 200, thereby realizing the recycling of the fluid medium 400. Moreover, when the fluid medium 400 flows from the liquid storage structure 20 to the cooling container 10, it can be cooled by utilizing the drop between the liquid storage structure 20 and the cooling container 10, and the fluid medium 400 flows out from multiple liquid outlets 22 to form multiple thin water columns, which have a larger contact area with the air, thereby making the heat exchange with the air faster, thereby improving the cooling efficiency of the fluid medium 400.

[0033] It can be understood that the part to be cooled 200 in the embodiment of the present application can be a water ring vacuum pump. Since the pump body of the water ring vacuum pump continuously pumps, a large amount of heat will be generated during operation. Therefore, during the operation of the water ring vacuum pump, cold water needs to be continuously added to the pump body to achieve the effect of cooling the unit.

[0034] Of course, in other possible embodiments, the component to be cooled 200 may also be other structures, such as a grinding spindle motor, etc., that is, the cooling circulation device of the present application may be applied to a grinding spindle circulation system.

[0035] In some embodiments, the cooling circulation device further includes a support structure 60, and the support structure 60 is used to support the liquid storage structure 20, so that there is a height difference between the liquid storage structure 20 and the cooling container 10 along a preset direction a.

[0036] In one possible embodiment, the support structure 60 includes a plurality of support rods 61 extending along a preset direction a, the two ends of the support rods 61 are respectively connected to the liquid storage structure 20 and the cooling container 10, and the plurality of support rods 61 are arranged around the opening of the cooling container 10.

[0037] Multiple support rods 61 can be respectively connected to the openings of the cooling container 10. By setting up multiple support rods 61, the support of the liquid storage structure 20 can be made more stable, and the support rods 61 are slender rod-shaped structures, so they will not occupy too much lateral space. Multiple support rods 61 can be connected to the edge of the liquid storage structure 20, so that the liquid storage structure 20 can open a larger number of liquid outlets 22 without being interfered by the support rods 61, thereby further improving the cooling effect on the fluid medium 400.

[0038] In another possible embodiment, the support structure 60 is a hollow structure having a cavity 62 therein, and the top wall of the support structure 60 is used to abut against the bottom wall of the liquid storage structure 20 , thereby being able to support the liquid storage structure 20 upward.

[0039] Furthermore, the axis of the cavity 62 is parallel to the preset direction a, and the two ends of the cavity 62 are respectively connected to the liquid outlet 22 and the opening of the cooling container 10, so that the fluid medium 400 flowing out of the liquid outlet 22 can pass through the cavity 62 and fall into the cooling container 10, and the cavity 62 guides the flow of the fluid medium 400.

[0040] In some embodiments, the cavity 62 includes a receiving section 621 and a flow section 622 that are interconnected. The receiving section 621 is connected to the liquid outlet 22 , and the flow section 622 is connected to the opening of the cooling container 10 . The receiving section 621 can receive the fluid medium 400 from the liquid outlet 22 .

[0041] Furthermore, the support structure 60 includes a first inner wall 63 that surrounds and forms a receiving section 621, and the support structure 60 also includes a second inner wall 64 that surrounds and forms a flow section 622. The first inner wall 63 is gradually expanded along the direction of the cooling container 10 pointing to the liquid storage structure 20, and the second inner wall 64 is straightly arranged along the direction of the cooling container 10 pointing to the liquid storage structure 20.

[0042] It can be understood that the first inner wall 63 is gradually expanded along the direction from the cooling container 10 to the liquid storage structure 20, that is, the inner diameter of the receiving section 621 gradually increases along the direction from the cooling container 10 to the liquid storage structure 20, and the receiving section 621 is in a shape of "wide at the top and narrow at the bottom". Since the receiving section 621 faces the liquid outlet 22 of the liquid storage structure 20, the inner diameter of the receiving section 621 gradually increases along the direction from the cooling container 10 to the liquid storage structure 20, so that the liquid storage structure 20 can open more liquid outlets 22 without being blocked by the support structure 60, thereby further improving the cooling effect on the fluid medium 400, and after the fluid medium 400 flowing out of the liquid outlet 22 falls on the first inner wall 63, it can flow downward along the inclined first inner wall 63 and finally fall into the cooling container 10.

[0043] It can be understood that the length of the receiving section 621 along the preset direction a is greater than the length of the flow section 622 along the preset direction a. The longer length of the receiving section 621 along the preset direction a can increase the falling stroke of the fluid medium 400, thereby further improving the cooling effect of the fluid medium 400; while the shorter length of the flow section 622 along the preset direction a can enable the fluid medium 400 to flow quickly to the cooling container 10 after falling.

[0044] In some embodiments, a filter element 70 is disposed in the accommodating cavity 21, and the filter element 70 is covered on the liquid outlet 22. The filter plate is used to filter impurities in the fluid medium 400 to prevent the increase of impurities in the fluid medium 400 due to repeated use, thereby improving the purity of the fluid medium 400, ensuring the quality of the fluid medium 400, thereby improving the utilization rate of the fluid medium 400 and helping to save costs.

[0045] It is understandable that the filter element 70 may be a sheet-like sponge structure, and one or more filter elements 70 may be provided. When multiple filter elements 70 are provided, the multiple filter elements 70 may be stacked to improve the filtering effect.

[0046] In some embodiments, the second pipe 40 includes a return pipe 41 connected to the cooling member 200 and an outlet pipe 42 connected to the return pipe 41. The outlet pipe 42 extends along a vertical preset direction a and there is a height difference between the outlet pipe 42 and the liquid storage structure 20 along the preset direction a. The opening of the accommodating cavity 21 faces the outlet pipe 42. The outlet pipe 42 is provided with a through hole 421 on the side facing the liquid storage structure 20. The fluid medium 400 flowing out of the multiple through holes 421 falls into the accommodating cavity 21 under the action of gravity. The fluid medium 400 flows out of the multiple through holes 421 to form multiple thin water columns. The surface area of ​​the multiple thin water columns is relatively large, and the contact area with the air is larger, so that the heat exchange with the air is more rapid, thereby making the fluid medium 400 cool down faster.

[0047] In some embodiments, a cooling component 80 is connected between the return pipe 41 and the outlet pipe 42 , and the cooling component 80 is used to cool the fluid medium 400 in the second pipe 40 .

[0048] Specifically, the cooling component 80 may include a cooling fan and a condenser. The temperature of the fluid medium 400 increases after flowing through the part to be cooled 200, and then the fluid medium 400 is passed into the condenser. The cooling fan sends air to the condenser to take away the heat on the condenser, thereby reducing the temperature of the fluid medium 400 and cooling the fluid medium 400.

[0049] In some embodiments, the side wall of the cooling container 10 is provided with an adjusting pipeline, which is used to add the fluid medium 400 to the cooling container 10, or to lead out the fluid medium 400 in the cooling container 10, so as to adjust the liquid level in the cooling container 10. It can be understood that when the liquid level in the cooling container 10 is high, the fluid medium 400 in the cooling container 10 can be led out through the adjusting pipeline, so that the liquid level is lowered; when the liquid level in the cooling container 10 is low, the fluid medium 400 can be added to the cooling container 10 through the adjusting pipeline, so that the liquid level is raised.

[0050] The present application also proposes a vacuum pump cooling system, which includes a cooling circulation device. The specific structure of the cooling circulation device refers to the above embodiment. Since the automotive glass strip production line adopts all the technical solutions of all the above embodiments, it also has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here.

[0051] Furthermore, the vacuum pump cooling system includes a vacuum pump, and the vacuum pump is the part to be cooled 200 in the embodiment of the present application. In some embodiments, the vacuum pump cooling system also includes a vacuum gas storage tank 300, which is connected to the vacuum pump. The vacuum gas storage tank 300 is used to balance the pressure difference between the vacuum pump and the extracted object to improve the stability of the system. Specifically, when the vacuum pump extracts the gas in the container, a gas shock wave will be generated due to heat release or gas compression of the extracted object. Too much gas being directly extracted will cause a greater burden on the vacuum pump and may even damage the vacuum pump. After adding the vacuum gas storage tank 300, this shock can be smoothly alleviated, thereby protecting the vacuum pump.

[0052] In summary, the cooling circulation device provided in the present application connects the cooling container 10, the liquid storage structure 20, and the part to be cooled 200 as a whole through the first pipe 30 and the second pipe 40. The fluid medium 400 flows from the cooling container 10 to the part to be cooled 200, and flows to the liquid storage structure 20 and the cooling container 10 after cooling the part to be cooled 200, so that it can be cooled and used again to cool the part to be cooled 200, thereby realizing the recycling of the fluid medium 400. Moreover, when the fluid medium 400 flows from the liquid storage structure 20 to the cooling container 10, it can be cooled by utilizing the drop between the liquid storage structure 20 and the cooling container 10, and the fluid medium 400 flows out from multiple liquid outlets 22 to form multiple thin water columns, which have a larger contact area with the air, thereby making the heat exchange with the air faster, thereby improving the cooling efficiency of the fluid medium 400.

[0053] The above are only optional embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A cooling circulation device, Features: The invention comprises a cooling container (10) for storing a fluid medium (400), a liquid storage structure (20) arranged above the cooling container (10), a first pipe (30) connecting the cooling container (10) and a part to be cooled (200), a second pipe (40) connecting the part to be cooled (200) and the liquid storage structure (20), and a driving pump (50), wherein the driving pump (50) is used to drive the fluid medium (400) to flow from the cooling container (10) through the first pipe (30) to the part to be cooled (200), and The fluid medium (400) flows from the part to be cooled (200) to the liquid storage structure (20), and is used to exchange heat with the part to be cooled (200). The liquid storage structure (20) has a receiving chamber (21) connected to the first pipe (30), and the liquid storage structure (20) is provided with a plurality of liquid outlets (22) connected to the receiving chamber (21) and opening toward the cooling container (10). The fluid medium (400) flowing out of the plurality of liquid outlets (22) falls into the cooling container (10) under the action of gravity.

2. The cooling cycle device according to claim 1, Features: The cooling circulation device further comprises a supporting structure (60), wherein the supporting structure (60) is used to support the liquid storage structure (20) so that there is a height difference between the liquid storage structure (20) and the cooling container (10) along a preset direction.

3. The cooling cycle device according to claim 2, Features: The support structure (60) comprises a plurality of support rods (61) extending along the preset direction, the two ends of the support rods (61) being respectively connected to the liquid storage structure (20) and the cooling container (10), and the plurality of support rods (61) being arranged around the opening of the cooling container (10).

4. The cooling cycle device according to claim 2, Features: The support structure (60) is a hollow structure having a cavity (62) inside, the axis of the cavity (62) is parallel to the preset direction, and the two ends of the cavity (62) are respectively connected to the liquid outlet (22) and the opening of the cooling container (10).

5. The cooling cycle device according to claim 4, Features: The cavity (62) includes a receiving section (621) and a flow section (622) which are interconnected, the receiving section (621) is connected to the liquid outlet (22), and the flow section (622) is connected to the opening of the cooling container (10), the support structure (60) includes a first inner wall (63) surrounding the receiving section (621), and the support structure (60) also includes a second inner wall (64) surrounding the flow section (622), the first inner wall (63) is gradually expanded along the direction from the cooling container (10) to the liquid storage structure (20), and the second inner wall (64) is straight along the direction from the cooling container (10) to the liquid storage structure (20).

6. The cooling cycle device according to claim 1, Features: A filter element (70) is disposed in the accommodating cavity (21), the filter element (70) is covered on the liquid outlet (22), and the filter element (70) is used to filter impurities in the fluid medium (400).

7. The cooling cycle device according to any one of claims 2 to 6, Features: The second pipe (40) comprises a return pipe (41) connected to the part to be cooled (200) and an outlet pipe (42) connected to the return pipe (41); the outlet pipe (42) extends perpendicular to the preset direction and there is a height difference between the outlet pipe (42) and the liquid storage structure (20) along the preset direction; the opening of the accommodating cavity (21) faces the outlet pipe (42); a plurality of through holes (421) are formed on the side of the outlet pipe (42) facing the liquid storage structure (20); the fluid medium (400) flowing out of the plurality of through holes (421) falls into the accommodating cavity (21) under the action of gravity.

8. The cooling cycle device according to claim 7, Features: A cooling component (80) is connected between the return water pipe (41) and the outlet water pipe (42), and the cooling component (80) is used to cool the fluid medium (400) in the second pipe (40).

9. The cooling cycle device according to any one of claims 2 to 6, Features: The side wall of the cooling container (10) is provided with a regulating pipeline, which is used to replenish the fluid medium (400) into the cooling container (10), or to lead out the fluid medium (400) in the cooling container (10) to adjust the liquid level in the cooling container (10).

10. A vacuum pump cooling system, Features: The invention comprises a cooling cycle device as claimed in any one of claims 1 to 9.

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