Novel large-size quartz crucible preparation equipment

Abstract

The invention belongs to the technical field of quartz processing, and particularly relates to novel large-size quartz crucible preparation equipment which comprises a heat insulation base and a graphite mold arranged above the heat insulation base. The outer side of the graphite mold is fixedly sleeved with an insulating heat conduction shell, and the outer side wall of the insulating heat conduction shell is fixedly sleeved with a heat insulation shell; the temperature detection unit is arranged on the inner wall of the heat insulation shell; the cooling starting unit is arranged in the heat insulation base, and the cooling starting unit is electrically connected with the temperature detection unit; the heating unit is arranged in the heat insulation base, and a resistance adjusting mechanism is arranged in the cooling starting unit. According to the invention, each area of the quartz crucible can be cooled in sequence based on the temperature of each area of the large-size quartz crucible, and the cooling temperature of each area is automatically regulated and controlled, so that the cooling rate of the quartz crucible is effectively controlled, the influence caused by melting temperature difference is reduced, and the shaping quality of the quartz crucible is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of quartz processing, and in particular relates to a novel large-size quartz crucible preparation device. Background Art

[0002] During the production of single crystal silicon wafers, quartz crucibles are used to hold molten silicon liquid. Quartz crucibles become scrapped after being used once or several times for heating and pulling crystals. Therefore, in the production process of silicon wafers, there is a large demand for quartz crucibles.

[0003] At present, the arc method is a common method for preparing quartz crucibles. High-purity quartz sand and other raw materials are placed in a special crucible mold, and a strong arc is generated by an electrode. The arc is used to melt the quartz raw materials quickly. The centrifugal force generated by the rotation of the mold and the vacuum condition are small. The quartz crucible can be quickly formed with high quality, such as the quartz crucible preparation system disclosed in Patent Publication No. CN219752141U; In the process of preparing quartz crucibles by the arc method, since the energy distribution of the arc is not completely uniform during the discharge process, some areas of the quartz crucible may be heated with a higher intensity, while other areas are not heated enough, resulting in temperature differences. Secondly, when the quartz sand raw materials are placed in the crucible mold, the different particle sizes of the raw materials and poor personnel control may cause uneven distribution of the quartz sand raw materials, which may lead to different heat capacities of the quartz crucible. Areas with thicker raw material accumulation need to absorb more heat to reach the same temperature, which may also cause temperature differences in the quartz crucible. This phenomenon is more obvious in the preparation of large-sized quartz crucibles. After the quartz crucible is heated and melted by telephone, it needs to be cooled. Since the temperature of the cooling medium introduced is the same, uneven thermal shrinkage will occur in the areas with temperature differences, which may cause defects such as cracks in the quartz crucible, affecting the preparation quality of the quartz crucible. Summary of the invention

[0004] The object of the present invention is to provide a novel large-size quartz crucible preparation device in view of the above problems.

[0005] To achieve the above object, the present invention adopts the following technical scheme: a novel large-size quartz crucible preparation device, comprising a heat-insulating base and a graphite mold arranged above the heat-insulating base, and also comprising: An insulating heat-conducting outer shell is fixedly sleeved on the outer side of the graphite mold, and an outer side wall of the insulating heat-conducting outer shell is fixedly sleeved with a heat-insulating outer shell; A temperature detection unit, arranged on the inner wall of the heat-insulating shell; A cooling start unit is arranged inside the heat insulation base, and the cooling start unit is electrically connected to the temperature detection unit; A heating unit is arranged inside the heat-insulating base, and a resistance adjustment mechanism is arranged inside the cooling start unit, and the resistance adjustment mechanism is electrically connected to the heating unit; An oil supply unit is arranged above the heat-insulating base, and the oil supply unit is connected to the heating unit; A driving assembly is provided on the outer side wall of the heat-insulating base, and the driving assembly drives the oil supply unit to move; The centrifugal assembly is arranged on the top of the heat-insulating base and drives the heat-insulating housing to rotate the graphite mold; The controller is fixedly mounted on the outer wall of the heat-insulating base, and the temperature detection unit, the cooling start unit, the heating unit, the driving assembly, and the centrifugal assembly are all electrically connected to the controller.

[0006] Preferably, the temperature detection unit includes a plurality of mounting grooves formed on the inner wall of the heat insulating outer shell, and each mounting groove is evenly distributed on the outside of the heat conductive outer shell, and an outer wall of the heat insulating outer shell is provided with a plug-in groove at a position on one side of each mounting groove, a temperature detector is fixedly plugged into the bottom of the plug-in groove, and one end of the temperature detector extends to the interior of the mounting groove on the same side, and the temperature detector is electrically connected to the controller.

[0007] Preferably, the cooling start unit includes an installation cavity opened on the upper side of the interior of the heat-insulating base, and a plurality of electromagnetic push rods are fixedly installed inside the installation cavity, an insulating block is fixedly installed on the telescopic end of each of the electromagnetic push rods, and a spotlight is fixedly plugged into one end of each of the insulating blocks, a first electric push rod is provided on one side of each of the spotlights, and the first electric push rod is fixed inside the installation cavity, a movable block is fixedly connected to the telescopic end of the first electric push rod, and a photoelectric switch is fixedly plugged into one end of the movable block close to the spotlight on the same side, the spotlight and the photoelectric switch are electrically connected to the controller, and each of the temperature detectors is electrically connected to the corresponding electromagnetic push rod through the controller.

[0008] Preferably, the heating unit includes a plurality of heating oil chambers opened inside the heat-insulating base, and a heater is fixedly installed on the lower side of the interior of each heating oil chamber. A fixed chamber is opened inside the heat-insulating base at a position above the heating oil chamber, and a plurality of heat-resistant oil pumps are fixedly installed inside the fixed chamber, and the suction end of each heat-resistant oil pump is connected to the corresponding heating oil chamber. The controller starts the corresponding heater and heat-resistant oil pump according to the closed electrical signal of the photoelectric switch.

[0009] Preferably, the resistance adjustment mechanism includes a plurality of insulating columns fixedly mounted inside the mounting cavity, and a resistor rod is fixedly mounted at the bottom of each insulating column, a circular hole is opened on the end face of each insulating block, and the circular hole is coaxial with the resistor rod on the same side, a conductive slip ring is fixedly mounted inside the circular hole, and the inner wall of the conductive slip ring is in sliding contact with the resistor rod on the same side, and the conductive slip ring and the resistor rod are electrically connected to the corresponding heater through a controller.

[0010] Preferably, the oil supply unit comprises a plurality of arc plates, and the plurality of arc plates are evenly distributed in a ring shape about the axis of the heat-insulating shell, a plurality of liquid supply cavities are opened inside the arc plates, and the strong wall of each liquid supply cavity is fixedly plugged with a docking tube, the groove wall of each installation groove is fixedly plugged with a liquid inlet pipe corresponding to the docking tube, the groove wall of each installation groove away from the liquid inlet pipe on the same side is opened with a drainage hole, the cavity wall of each liquid supply cavity is fixedly plugged with a liquid supply pipe, and the lower end of each liquid supply pipe is fixedly connected with a stainless steel hose, and the end of each stainless steel hose away from the liquid supply pipe passes through the cavity wall of the fixed cavity and is connected with the liquid outlet end of the corresponding heat-resistant oil pump.

[0011] Preferably, the driving assembly includes a support ring fixedly sleeved on the upper end of the outer side wall of the insulation base, and an outer protective sleeve is fixedly installed on the end face of the support ring, and multiple groups of second electric push rods are fixedly inserted into the side walls of the outer protective sleeve, and the telescopic ends of the second electric push rods in the same group are fixedly connected to the outer side wall of the arc plate on the same side, and the second electric push rods are electrically connected to the controller.

[0012] Preferably, the centrifugal assembly includes a drive motor fixedly mounted on the top of the insulation base, and a rotating disk is provided above the drive motor, the output end of the drive motor is transmission-connected to the rotating disk, the rotating disk is fixedly mounted on the bottom of the insulation shell, and the drive motor is electrically connected to the controller.

[0013] Compared with the existing technology, the advantages of a new large-size quartz crucible preparation equipment are: 1. The quartz crucible can be formed and prepared by the cooperation of the set heat-insulating base, graphite mold, insulating heat-conducting shell, heat-insulating shell, centrifugal assembly and controller, and the temperature detection unit and cooling start unit can be used to detect the temperature of each area of ​​the large-size quartz crucible in real time, and based on the temperature of each area of ​​the quartz crucible, the temperature of each area of ​​the quartz crucible is cooled in a descending order, so that when the quartz crucible is cooled, the temperature difference of each area of ​​the quartz crucible can be reduced, and the uneven shrinkage caused by the temperature difference can be avoided as much as possible, thereby improving the shaping quality of the quartz crucible.

[0014] 2. Through the cooperation of the heating unit and the resistance adjustment mechanism, the cooling temperature of each area can be automatically adjusted based on the temperature detection result of each area of ​​the quartz crucible by the temperature detection unit, so as to avoid excessive temperature difference between the medium and the temperature of each area of ​​the quartz crucible, prevent the quartz crucible from deformation, cracks, etc. due to rapid cooling, and further improve the shaping quality of the quartz crucible.

[0015] 3. By setting up the oil supply unit, the cooling oil of different temperatures output by the heating unit can be transported to the corresponding areas of the quartz crucible respectively, so as to avoid mutual interference in the cooling of each area. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a novel large-size quartz crucible preparation device provided by the present invention; Figure 2 It is a schematic diagram of the internal structure of a heat-insulating shell of a novel large-size quartz crucible preparation device provided by the present invention; Figure 3 The invention provides a novel large-size quartz crucible preparation device. Figure 2 A magnified view of the structure of part A; Figure 4 It is a schematic diagram of the internal structure of a heat-insulating base of a novel large-size quartz crucible preparation device provided by the present invention; Figure 5 The invention provides a novel large-size quartz crucible preparation device. Figure 4 A magnified view of the structure of part B; Figure 6 It is a schematic diagram of the internal structure of a curved plate of a novel large-size quartz crucible preparation device provided by the present invention; Figure 7 The diagram is a distribution diagram of various heating oil chambers of a novel large-size quartz crucible preparation device provided by the present invention.

[0017] In the figure: 1, a heat-insulating base, 2, a graphite mold, 3, an insulating heat-conducting shell, 4, a heat-insulating shell, 5, a temperature detection unit, 51, a mounting slot, 52, a plug-in slot, 53, a temperature detector, 6, a cooling start unit, 61, a mounting cavity, 62, an electromagnetic push rod, 63, an insulating block, 64, a spotlight, 65, a first electric push rod, 66, a movable block, 67, a photoelectric switch, 7, a heating unit, 71, a heating oil cavity, 72, a heater, 73, a fixed cavity, 74, a heat-resistant oil pump, 8, a resistance adjustment mechanism, 81, an insulating column, 82, a resistance rod, 83, a circular hole, 84, a conductive slip ring, 9, an oil supply unit, 91, an arc plate, 92, a liquid supply cavity, 93, a butt joint pipe, 94, a liquid inlet pipe, 95, a liquid discharge hole, 96, a liquid supply pipe, 97, a stainless steel hose, 10, a drive assembly, 101, a support ring, 102, an outer protective sleeve, 103, a second electric push rod, 11, a centrifugal assembly, 111, a drive motor, 112, a rotating disk, and 12, a controller. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0019] like Figure 1-Figure 7 As shown, a novel large-size quartz crucible preparation device comprises a heat-insulating base 1 and a graphite mold 2 arranged above the heat-insulating base 1, an insulating heat-conducting shell 3 is fixedly sleeved on the outside of the graphite mold 2, an outer wall of the insulating heat-conducting shell 3 is fixedly sleeved with a heat-insulating shell 4, a temperature detection unit 5 is arranged on the inner wall of the heat-insulating shell 4, the temperature detection unit 5 comprises a plurality of mounting grooves 51 opened on the inner wall of the heat-insulating shell 4, and each mounting groove 51 is evenly distributed on the outside of the heat-conducting shell, and the outer wall of the heat-insulating shell 4 is located at a position on one side of each mounting groove 51. A plug-in slot 52 is provided on each of the devices, a temperature detector 53 is fixedly plugged into the bottom of the plug-in slot 52, and one end of the temperature detector 53 extends to the inside of the mounting slot 51 on the same side, the temperature detector 53 is electrically connected to the controller 12, and the temperature detector 53 performs temperature detection based on a thermocouple. When one end of the thermocouple is heated, a temperature difference is generated with the other end, thereby generating a thermoelectromotive force. Under the action of the thermoelectromotive force, the current intensity of the connecting circuit changes synchronously. The higher the temperature, the greater the temperature difference between the two ends, the greater the thermoelectromotive force, and the greater the corresponding current intensity.

[0020] The cooling start unit 6 is arranged inside the heat-insulating base 1, and the cooling start unit 6 is electrically connected to the temperature detection unit 5. The cooling start unit 6 includes an installation cavity 61 opened on the upper side of the heat-insulating base 1, and a plurality of electromagnetic push rods 62 are fixedly installed inside the installation cavity 61, and an insulating block 63 is fixedly installed at the telescopic end of each electromagnetic push rod 62, and a spotlight 64 is fixedly plugged at one end of each insulating block 63, and a first electric push rod 65 is provided on one side of each spotlight 64, and the first electric push rod 65 is fixed inside the installation cavity 61, and the telescopic end of the first electric push rod 65 is fixed. A movable block 66 is connected, and a photoelectric switch 67 is fixedly inserted at one end of the movable block 66 close to the spotlight 64 on the same side. The spotlight 64 and the photoelectric switch 67 are both electrically connected to the controller 12. Each temperature detector 53 is electrically connected to the corresponding electromagnetic push rod 62 through the controller 12. After the photoelectric switch 67 is illuminated by the spotlight 64, it can convert the optical signal into an electrical signal and output it to the controller 12. After the electromagnetic component inside the electromagnetic push rod 62 is energized, it can push the permanent magnet to drive the telescopic rod to extend under the effect of like-charge repulsion. These are all existing mature technologies, so they will not be elaborated here.

[0021] The heating unit 7 is arranged inside the insulation base 1, and a resistance regulating mechanism 8 is provided inside the cooling start unit 6, and the resistance regulating mechanism 8 is electrically connected to the heating unit 7. The heating unit 7 includes a plurality of heating oil chambers 71 opened inside the insulation base 1, and a heater 72 is fixedly installed on the lower side of the interior of each heating oil chamber 71. A fixed chamber 73 is opened inside the insulation base 1 at a position above the heating oil chamber 71, and a plurality of heat-resistant oil pumps 74 are fixedly installed inside the fixed chamber 73, and the suction end of each heat-resistant oil pump 74 is connected to the corresponding heating oil chamber 71. The controller 12 starts the corresponding heater 72 and the heat-resistant oil pump 74 according to the closed electrical signal of the photoelectric switch 67, and the side wall of each heating oil chamber 71 is provided with an oil inlet pipe (not shown in the figure) for replenishing oil into each heating oil chamber 71.

[0022] The resistance adjustment mechanism 8 includes a plurality of insulating columns 81 fixedly mounted inside the mounting cavity 61, and a resistor rod 82 is fixedly mounted at the bottom of each insulating column 81, a circular hole 83 is opened on the end face of each insulating block 63, and the circular hole 83 is coaxial with the resistor rod 82 on the same side, a conductive slip ring 84 is fixedly mounted inside the circular hole 83, and the inner wall of the conductive slip ring 84 is in sliding contact with the resistor rod 82 on the same side, the conductive slip ring 84 and the resistor rod 82 are electrically connected to the corresponding heater 72 through the controller 12, and the heating temperature of the heater 72 is related to the contact position between the conductive slip ring 84 and the resistor rod 82.

[0023] The oil supply unit 9 is arranged above the insulation base 1, and the oil supply unit 9 is connected with the heating unit 7. The oil supply unit 9 includes a plurality of arc plates 91, and the plurality of arc plates 91 are evenly distributed in a ring shape about the axis of the insulation shell 4. A plurality of liquid supply cavities 92 are provided inside the arc plates 91, and the strong wall of each liquid supply cavity 92 is fixedly plugged with a docking tube 93, the groove wall of each mounting groove 51 is fixedly plugged with a liquid inlet pipe 94 corresponding to the docking tube 93, and the groove wall of each mounting groove 51 away from the liquid inlet pipe 94 on the same side is provided with a drainage hole 95, the cavity wall of each liquid supply cavity 92 is fixedly plugged with a liquid supply pipe 96, and the lower end of each liquid supply pipe 96 is fixedly connected with a stainless steel hose 97, and the end of each stainless steel hose 97 away from the liquid supply pipe 96 passes through the cavity wall of the fixed cavity 73 and is connected with the liquid outlet end of the corresponding heat-resistant oil pump 74, and the heat-resistant oil pump 74 can withstand temperatures below 700°C.

[0024] The driving component 10 is provided with the outer wall of the heat-insulating base 1, and the driving component 10 drives the oil supply unit 9 to move. The driving component 10 includes a support ring 101 fixedly sleeved on the upper end of the outer wall of the heat-insulating base 1, and an outer protective sleeve 102 is fixedly installed on the end face of the support ring 101. A plurality of groups of second electric push rods 103 are fixedly inserted into the side wall of the outer protective sleeve 102, and the telescopic ends of the second electric push rods 103 in the same group are fixedly connected to the outer wall of the arc plate 91 on the same side. The second electric push rods 103 are electrically connected to the controller 12, and each second electric push rod 103 can push the corresponding arc plate 91 to move a fixed distance, wherein a heat-conducting oil discharge pipe (not shown in the figure) is inserted into the side wall of the outer protective sleeve 102, and the discharge pipe is connected to an external oil recovery pipe. The heat-conducting oil discharged through each mounting groove 51 will flow into the inner part of the outer protective sleeve 102, and finally be discharged into the external oil recovery pipe through the discharge pipe.

[0025] The centrifugal assembly 11 is arranged on the top of the insulation base 1, and drives the insulation shell 4 to drive the graphite mold 2 to rotate. The controller 12 is fixedly installed on the outer wall of the insulation base 1. The temperature detection unit 5, the cooling start unit 6, the heating unit 7, the drive assembly 10, and the centrifugal assembly 11 are all electrically connected to the controller 12. The centrifugal assembly 11 includes a drive motor 111 fixedly installed on the top of the insulation base 1, and a rotating disk 112 is provided above the drive motor 111. The output end of the drive motor 111 is transmission-connected to the rotating disk 112. The rotating disk 112 is fixedly installed on the bottom of the insulation shell 4. The drive motor 111 is electrically connected to the controller 12. The end surface of the insulation base 1 is provided with a support guide rail assembly (not shown in the figure) for supporting the rotating disk 112 to ensure stable rotation of the rotating disk 112.

[0026] The operating principle of the present invention is now described as follows: the weighed high-purity quartz sand powder is poured into the graphite mold 2, and then the driving motor 111 is started through the controller 12. The driving motor 111 drives the heat-insulating housing 4 to drive the graphite mold 2 to rotate through the rotating disk 112. Under the centrifugal force generated by the rotation, the quartz sand powder is manually formed into a crucible shape using a forming rod (the entire device is installed on a bracket with an adjustable angle, which is convenient for manually forming the quartz sand powder and subsequently taking out the shaped quartz crucible), and then the entire device is rotated vertically. shape, and move to the electrode rod (the bottom of the adjustable angle bracket is equipped with a corresponding electric guide rail, which can be easily moved), then the electrode is inserted into the mold cavity of the graphite mold 2, and the countersunk hole is drawn, and then the high temperature generated by the arc discharge causes the quartz sand powder to melt rapidly, so that the melting of the quartz crucible has been completed (the melting process can refer to the quartz crucible preparation system disclosed in patent publication number CN219752141U, and the adjustable angle bracket, electric guide rail, vacuum system, electrode structure, etc. are not shown in the figure), and then the quartz crucible is cooled and shaped; When the cooling and shaping of the quartz crucible is started, the controller 12 controls the driving motor 111 to continue working, and allows the quartz crucible to cool naturally for a certain period of time (the natural cooling time is set according to the specifications of the quartz crucible, usually not less than 30 minutes. During the natural cooling time, the quartz crucible will be initially cooled and shaped, and the molten quartz material in various parts will not flow). After the natural cooling time is over, the controller 12 controls the driving motor 111 to stop working (a proximity switch is provided at the outer protective sleeve 102, and a proximity switch is provided on the outer wall of the heat-insulating shell 4). After the natural cooling time is over, the controller 12 controls the driving motor 111 to drive the trigger on the heat-insulating housing 4 to rotate to the proximity switch and then controls the driving motor 111 to stop working, ensuring that each docking tube 93 can dock with the corresponding proximity switch, and the proximity switch and the trigger are not shown in the figure). Subsequently, the controller 12 controls each second electric push rod 103 to work at a fixed time, and the second electric push rod 103 can push the corresponding arc plate 91 to move a certain distance, so that each docking tube 93 is docked and connected with the corresponding liquid inlet pipe 94; Then, the controller 12 connects the connection circuit with each temperature detector 53 (the detection limit temperature of the temperature detector 53 is about 1800°C). After one end of the temperature detector 53 is heated, the temperature detector 53 generates a thermoelectric potential. The higher the temperature, the greater the thermoelectric potential generated by the temperature detector 53, so that the current in the connection circuit is greater. The controller 12 amplifies the current in the connection circuit of each temperature detector 53 according to a specific ratio and passes it to each electromagnetic push rod 62. After the electromagnetic push rod 62 is passed with current, it will push its own insulating block 63 to move upward. Since the current passed through each electromagnetic push rod 62 is different, each The electromagnetic push rod 62 generates different magnetic thrusts, so the upward movement distances of each insulating block 63 are also different. After the controller 12 starts the electromagnetic push rod 62, the controller 12 will start each first electric push rod 65 and each spotlight 64. Each first electric push rod 65 will drive the movable block 66 on the same side to move downward at a uniform speed. The heights of each movable block 66 are in a consistent state. When the movable block 66 moves to the highest insulating block 63, the light emitted by the spotlight in the insulating block 63 will irradiate the photoelectric switch 67 on the side wall of the movable block 66 on this side. At this time, the photoelectric switch 67 will output an electrical signal to the controller 12 due to the light, and the controller 12 will control the movable block 66 to move downward at a uniform speed. After receiving the electrical signal, the controller 12 will immediately control all the first electric push rods 65 to stop working, and at the same time, control the heat-resistant oil pump 74 corresponding to the photoelectric switch 67 to work, and at the same time, connect the heater 72 corresponding to the photoelectric switch 67 with the corresponding conductive slip ring 84 and the connection circuit of the resistor rod 82. Since the height of the insulating block 63 is relatively high, the contact point of the conductive slip ring 84 and the resistor rod 82 is relatively moved upward, so the length of the connection circuit of the resistor rod 82 connected to the conductive slip ring 84 and the heater 72 becomes smaller. Therefore, the resistance of the connection circuit of the resistor rod 82, the conductive slip ring 84 and the heater 72 is in a relatively small state, and The resistance of the connection loop gradually increases as the conductive slip ring 84 moves downward, and the heater 72 can heat the heat transfer oil in the heating oil chamber 71 on this side, and the heating temperature can reach several hundred degrees Celsius (the temperature is automatically regulated based on the resistance of the connection loop between the conductive slip ring 84, the resistance rod 82 and the heater 72, that is, the higher the temperature of each area of ​​the quartz crucible, the higher the heating temperature of the heater 72 corresponding to the area, which can reduce the temperature difference between the heat transfer oil and the area, avoid cracks and other defects caused by rapid cooling of the area, and make the temperature of the area gradually and evenly drop, and the cooling efficiency is higher than natural cooling); When the heat-resistant oil pump 74 is working, the heat-conducting oil in the heating oil chamber 71 on this side can be pumped out, and enter the installation groove 51 through the stainless steel hose 97, the liquid supply pipe 96, the liquid supply chamber 92, the docking pipe 93 and the liquid inlet pipe 94, and exchange heat with the quartz crucible inside the graphite mold 2 through the insulating heat-conducting shell 3 and the graphite mold 2, so that the temperature of the quartz crucible begins to cool down rapidly, and the cooling oil in the installation groove 51 is discharged through the drain hole 95. As the temperature of the quartz crucible in this area is reduced, the temperature detected by the temperature detector 53 at this area is reduced, so the current of the connection circuit of the temperature detector 53 will also decrease accordingly, so that the current passing into the corresponding electromagnetic push rod 62 will also decrease. At this time, the insulating block 63 will gradually move downward, and when the spotlight 64 on the insulating block 63 is aligned with the corresponding photoelectric After the switch 67 is staggered, the controller 12 cannot receive the closing electrical signal of any photoelectric switch 67. At this time, the controller 12 will control each first electric push rod 65 to resume work, so that each movable block 66 continues to move downward until the controller 12 receives the closing electrical signal of the photoelectric switch 67 again. Then the controller 12 controls to repeat the above steps to cool the corresponding area of ​​the quartz crucible until the temperature of each area of ​​the quartz crucible reaches the same or close to that of the other area. At this time, the height of each insulating block 63 is the same or close to that of the other area, and the photoelectric switch 67 corresponding to each insulating block 63 will generate a closing electrical signal. At this time, each area on the quartz crucible will be cooled synchronously, so that each area of ​​the quartz crucible can be cooled synchronously as much as possible, thereby reducing the temperature difference and avoiding defects such as cracks caused by uneven cooling due to the temperature difference. After each area of ​​the quartz crucible is cooled to a preset temperature (usually below 100°C), the controller 12 will determine that the cooling work of the quartz crucible is completed based on the current intensity generated by each temperature detector 53 (a detection circuit is provided in the controller 12 to detect the current intensity of the connection circuit of each temperature detector 53. The controller 12 will determine that the cooling work is completed only after the current intensity generated by all temperature detectors 53 reaches a threshold range). At this point, the cooling and shaping of the quartz crucible is completed.

[0027] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A novel large-size quartz crucible preparation device, comprising a heat-insulating base (1) and a graphite mold (2) arranged above the heat-insulating base (1), characterized in that: Also includes: An insulating heat-conducting outer shell (3) is fixedly sleeved on the outside of the graphite mold (2), and a heat-insulating outer shell (4) is fixedly sleeved on the outer wall of the insulating heat-conducting outer shell (3); A temperature detection unit (5) is arranged on the inner wall of the heat-insulating outer shell (4); A cooling start unit (6) is arranged inside the heat-insulating base (1), and the cooling start unit (6) is electrically connected to the temperature detection unit (5); A heating unit (7) is arranged inside the heat-insulating base (1); a resistance adjustment mechanism (8) is provided inside the cooling start unit (6), and the resistance adjustment mechanism (8) is electrically connected to the heating unit (7); An oil supply unit (9) is arranged above the heat-insulating base (1), and the oil supply unit (9) is connected to the heating unit (7); A driving component (10) is provided on the outer side wall of the heat-insulating base (1), and the driving component (10) drives the oil supply unit (9) to move; A centrifugal assembly (11) is arranged on the top of the heat-insulating base (1) and drives the heat-insulating housing (4) to rotate the graphite mold (2); The controller (12) is fixedly mounted on the outer wall of the heat-insulating base (1); the temperature detection unit (5), the cooling start unit (6), the heating unit (7), the driving assembly (10), and the centrifugal assembly (11) are all electrically connected to the controller (12).

2. The novel large-size quartz crucible preparation equipment according to claim 1 is characterized in that: The temperature detection unit (5) comprises a plurality of mounting grooves (51) formed on the inner wall of the heat-insulating outer shell (4), and each mounting groove (51) is evenly distributed on the outside of the heat-conducting outer shell; an outer wall of the heat-insulating outer shell (4) is provided with a plug-in groove (52) at a position on one side of each mounting groove (51); a temperature detector (53) is fixedly plugged into the bottom of the plug-in groove (52), and one end of the temperature detector (53) extends into the interior of the mounting groove (51) on the same side; and the temperature detector (53) is electrically connected to the controller (12).

3. The novel large-size quartz crucible preparation device according to claim 2 is characterized in that: The cooling start unit (6) comprises an installation cavity (61) opened on the upper side of the heat insulation base (1), and a plurality of electromagnetic push rods (62) are fixedly installed inside the installation cavity (61), an insulating block (63) is fixedly installed on the telescopic end of each electromagnetic push rod (62), and a spotlight (64) is fixedly plugged into one end of each insulating block (63), a first electric push rod (65) is provided on one side of each spotlight (64), and the first electric push rod (65) is fixed inside the installation cavity (61), a movable block (66) is fixedly connected to the telescopic end of the first electric push rod (65), and a photoelectric switch (67) is fixedly plugged into one end of the movable block (66) close to the spotlight (64) on the same side, the spotlight (64) and the photoelectric switch (67) are both electrically connected to the controller (12), and each temperature detector (53) is electrically connected to the corresponding electromagnetic push rod (62) through the controller (12).

4. The novel large-size quartz crucible preparation device according to claim 3 is characterized in that: The heating unit (7) comprises a plurality of heating oil chambers (71) opened inside the heat-insulating base (1), and a heater (72) is fixedly installed on the lower side of each heating oil chamber (71). A fixed chamber (73) is opened inside the heat-insulating base (1) at a position above the heating oil chamber (71), and a plurality of heat-resistant oil pumps (74) are fixedly installed inside the fixed chamber (73), and a suction end of each heat-resistant oil pump (74) is connected to the corresponding heating oil chamber (71). The controller (12) starts the corresponding heater (72) and heat-resistant oil pump (74) according to the closed electrical signal of the photoelectric switch (67).

5. The novel large-size quartz crucible preparation device according to claim 4 is characterized in that: The resistance adjustment mechanism (8) comprises a plurality of insulating columns (81) fixedly mounted inside the mounting cavity (61), and a resistance rod (82) is fixedly mounted on the bottom of each insulating column (81), and a circular hole (83) is opened on the end surface of each insulating block (63), and the circular hole (83) is coaxial with the resistance rod (82) on the same side, and a conductive slip ring (84) is fixedly mounted inside the circular hole (83), and the inner wall of the conductive slip ring (84) is in sliding contact with the resistance rod (82) on the same side, and the conductive slip ring (84) and the resistance rod (82) are electrically connected to the corresponding heater (72) through a controller (12).

6. A novel large-size quartz crucible preparation device according to claim 4, characterized in that: The oil supply unit (9) comprises a plurality of arc-shaped plates (91), and the plurality of arc-shaped plates (91) are evenly distributed in a ring shape about the axis of the heat-insulating housing (4); a plurality of liquid supply cavities (92) are provided inside the arc-shaped plates (91), and a butt-joint pipe (93) is fixedly plugged into the strong wall of each liquid supply cavity (92); a liquid inlet pipe (94) corresponding to the butt-joint pipe (93) is fixedly plugged into the groove wall of each installation groove (51); a liquid discharge hole (95) is provided in the groove wall of each installation groove (51) away from the liquid inlet pipe (94) on the same side; a liquid supply pipe (96) is fixedly plugged into the cavity wall of each liquid supply cavity (92), and a stainless steel hose (97) is fixedly connected to the lower end of each liquid supply pipe (96); and an end of each stainless steel hose (97) away from the liquid supply pipe (96) passes through the cavity wall of the fixed cavity (73) and is connected to the liquid outlet end of the corresponding heat-resistant oil pump (74).

7. The novel large-size quartz crucible preparation device according to claim 6 is characterized in that: The driving assembly (10) comprises a support ring (101) fixedly sleeved on the upper end of the outer wall of the heat-insulating base (1), and an outer protective sleeve (102) is fixedly mounted on the end surface of the support ring (101), and a plurality of groups of second electric push rods (103) are fixedly plugged into the side wall of the outer protective sleeve (102), and the telescopic ends of the second electric push rods (103) in the same group are fixedly connected to the outer wall of the arc-shaped plate (91) on the same side, and the second electric push rods (103) are electrically connected to the controller (12).

8. The novel large-size quartz crucible preparation device according to claim 1 is characterized in that: The centrifugal assembly (11) comprises a drive motor (111) fixedly mounted on the top of the heat-insulating base (1), and a rotating disk (112) is provided above the drive motor (111); an output end of the drive motor (111) is transmission-connected to the rotating disk (112), the rotating disk (112) is fixedly mounted on the bottom of the heat-insulating housing (4), and the drive motor (111) is electrically connected to a controller (12).

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