Vacuum detection device for photoetching machine
By designing a vacuum detection device including a base, a support plate, a hydraulic device and a rubber plate on a lithography machine, the problem of single function of the mask plate limiting tool in the prior art is solved, and the mask plate size is realized Stable limit and vacuum detection reduce detection costs and protect the mask.
Patent Information
- Application Number
- CN202411235560.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-04
- Publication Date
- 2024-12-10
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
The existing lithography machine mask plate limiting tool has a single function, which leads to the need for multiple limiting devices when limiting multiple mask plates, which increases the detection cost.
A vacuum detection device including a base, a support plate, a hydraulic device, an electric slide rail and a rubber plate is designed, and the stable limit and vacuum detection of mask plates of different sizes are achieved through the pressure plate mechanism and the transmission mechanism.
The stable limit and vacuum detection of mask plates of different sizes is achieved, which reduces the detection cost and protects the mask plate through the use of rubber plates to prevent damage.
Smart Images
Figure CN119105243A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of direct writing lithography machine suction cups, and in particular to a vacuum detection device used on a lithography machine. Background Art
[0002] The vacuum detection device plays an important role in the film and plate transfer and various mobile platform parts of the lithography machine; when performing vacuum detection on the mask, the mask is first limited and fixed to ensure its stability during detection.
[0003] The existing tools for fixing the mask have relatively simple functions and poor practical effects. Therefore, when limiting the positions of various mask plates, multiple limiting devices are required, which increases the detection cost. For this reason, we propose a vacuum detection device for use on a lithography machine. Summary of the invention
[0004] The object of the present invention is to provide a vacuum detection device for a photolithography machine, so as to solve the problem in the above background technology that when limiting the positions of various masks, various limiting devices are required, thereby increasing the detection cost.
[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a vacuum detection device for a lithography machine, comprising a base, support plates are fixedly connected to the left and right sides of the top of the base, a mounting plate is fixedly connected between the upper sides of the inner side walls of the support plates, a hydraulic device is fixedly connected to the left and right sides of the bottom of the mounting plate, a connecting plate is fixedly connected between the bottom ends of the hydraulic device, positioning blocks are fixedly connected to the left and right sides of the bottom of the connecting plate, an electric slide rail is fixedly connected between the inner side walls of the positioning blocks, an electric slider is slidably connected to the outer side wall of the electric slide rail, a vacuum detection device is fixedly connected to the bottom of the electric slider, a sliding groove is opened on the top of the base, and a press table is slidably connected to the left and right sides of the inner cavity of the sliding groove.
[0006] Preferably, the left and right side walls of the connecting plate are provided with mounting grooves, and positioning bolts are screwed on the left and right sides of the top of the connecting plate, and the bottom ends of the positioning bolts pass through the connecting plate and extend to the inner cavity of the mounting grooves.
[0007] Preferably, an L-shaped plate is inserted into the inner cavity of the installation groove, the bottom end of the positioning bolt is tightly fitted with the top of the L-shaped plate, and the bottom of the L-shaped plate is fixedly connected with a rubber plate.
[0008] Preferably, an extension plate is fixedly connected to the upper side of the right side wall of the left press platform, an extension groove is opened on the top of the right press platform, and the extension plate is slidably connected to the inner cavity of the extension groove.
[0009] Preferably, a first screw is screwed inside the left press platform, both ends of the first screw penetrate the left press platform and extend to the left and right sides of the left press platform, and the left end of the first screw is rotatably connected to the lower side of the right side wall of the left support plate.
[0010] Preferably, a second screw is screwed inside the press platform on the right side, both ends of the second screw penetrate the press platform on the right side and extend to the left and right sides of the press platform on the right side, the left end of the second screw is fixedly connected to the right end of the first screw, the right end of the second screw penetrates the support plate on the right side and extends to the right side of the support plate on the right side, and the right end of the second screw is fixedly connected to a handle.
[0011] Preferably, the thread directions of the first screw and the second screw are opposite.
[0012] Preferably, a universal wheel is fixedly connected to the top of the base.
[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: the vacuum detection device used on the lithography machine can limit the positions of masks of different sizes through the pressure plate mechanism, the transmission mechanism and the two workbenches, and has sufficient stability, is convenient for vacuum detection thereon, has good practicality and is simple and convenient to operate; the mask can be limited and protected at the same time through the rubber plate; masks of different sizes can be limited, is convenient for vacuum detection thereon, has good practicality, and can also protect the mask to prevent it from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention;
[0015] Figure 2 It is a schematic diagram of the connection of some structures in the vacuum detection device on the photolithography machine of the present invention;
[0016] Figure 3 It is a schematic diagram of the connection between the vacuum detection device and the electric slider in the vacuum detection device on the lithography machine of the present invention.
[0017] In the figure: 100, base; 110, support plate; 111, mounting plate; 112, hydraulic device; 120, connecting plate; 121, positioning block; 122, electric slide rail; 123, electric slider; 124, vacuum detection device; 125, mounting groove; 126, positioning bolt; 127, L-shaped plate; 128, rubber plate; 130, sliding groove; 131, press table; 132, extension plate; 133, extension groove; 140, first screw; 150, second screw; 151, handle; 160, universal wheel. DETAILED DESCRIPTION
[0018] Embodiment 1:
[0019] See also Figure 1-3 The present invention provides a technical solution: a vacuum detection device for a photolithography machine, comprising a base 100, a support plate 110 is fixedly connected to the left and right sides of the top of the base 100, a mounting plate 111 is fixedly connected between the upper sides of the inner side walls of the support plate 110, a hydraulic device 112 is fixedly connected to the left and right sides of the bottom of the mounting plate 111, a connecting plate 120 is fixedly connected between the bottom ends of the hydraulic device 112, a positioning block 121 is fixedly connected to the left and right sides of the bottom of the connecting plate 120, an electric slide rail 122 is fixedly connected between the inner side walls of the positioning block 121, and an electric The outer wall of the slide rail 122 is slidably connected with an electric slider 123, and the bottom of the electric slider 123 is fixedly connected with a vacuum detection device 124. The top of the base 100 is provided with a sliding groove 130, and the inner cavity of the sliding groove 130 is slidably connected with a press table 131 on both sides. The left and right side walls of the connecting plate 120 are provided with mounting grooves 125, and the left and right sides of the top of the connecting plate 120 are screwed with positioning bolts 126. The bottom end of the positioning bolt 126 penetrates the connecting plate 120 and extends to the inner cavity of the mounting groove 125. The inner cavity of the mounting groove 125 is plugged with an L-shaped plate 127, and the positioning bolt 126 is screwed with the positioning bolt 126. The bottom end of the left side press platform 131 is tightly fitted with the top of the L-shaped plate 127, the bottom of the L-shaped plate 127 is fixedly connected with a rubber plate 128, the upper side of the right side wall of the left side press platform 131 is fixedly connected with an extension plate 132, the top of the right side press platform 131 is provided with an extension groove 133, the extension plate 132 is slidably connected to the inner cavity of the extension groove 133, the interior of the left side press platform 131 is screwed with a first screw rod 140, the two ends of the first screw rod 140 pass through the left side press platform 131 and extend to the left and right sides of the left side press platform 131, the left end of the first screw rod 140 is rotatably connected to the right side of the left support plate 110 On the lower side of the side wall, a second screw 150 is screwed inside the right press platform 131, both ends of the second screw 150 pass through the right press platform 131 and extend to the left and right sides of the right press platform 131, the left end of the second screw 150 is fixedly connected to the right end of the first screw 140, the right end of the second screw 150 passes through the right support plate 110 and extends to the right side of the right support plate 110, and the right end of the second screw 150 is fixedly connected to a handle 151, the thread directions of the first screw 140 and the second screw 150 are opposite, and a universal wheel 160 is fixedly connected to the top of the base 100.
[0020] During specific use, when personnel in this technical field need to perform vibration detection on the mask, the staff can manually turn the handle 151, and the rotation of the handle 151 drives the second screw 150 and the first screw 140 to rotate. Since the thread directions of the second screw 150 and the first screw 140 are opposite and the pressing platform 131 cannot rotate under the limit of the sliding groove 130, when the first screw 140 and the second screw 150 are rotated, the two pressing platforms 131 can be moved relative to or oppositely, and the corresponding extension plates 132 slide in the extension groove 133. In this way, the size of the upper surfaces of the two pressing platforms 131 can be controlled, and masks of different sizes can be placed, which has good practicality. After the adjustment is completed, the staff places the mask on the pressing platform 131, and then the staff can move the two The L-shaped plate 127 is used to make the distance between the opposite surfaces of the two L-shaped plates 127 the same as the distance between the opposite back surfaces of the two pressing platforms 131. Then the positioning bolt 126 is rotated to make it tightly against the L-shaped plate 127 to achieve the positioning of the L-shaped plate 127. Then the hydraulic device 112 is started. The output end of the hydraulic device 112 moves downward to drive the connecting plate 120 to move downward. First, the rubber plate 128 is first against the mask and limited to prevent it from moving easily. At this time, the L-shaped plate 127 is buckled on the pressing platform 131 to ensure the stability in the vertical direction during edge pressing. Then the electric slide rail 122 and the vacuum detection device 124 are started. The electric slider 123 slides on the electric slide rail 122 to drive the vacuum detection device 124 to move, so that the surface of the mask can be vacuum detected.
Claims
1. A vacuum detection device for a photolithography machine, characterized in that: The invention comprises a base (100), wherein support plates (110) are fixedly connected to the left and right sides of the top of the base (100), a mounting plate (111) is fixedly connected between the upper sides of the inner side walls of the support plate (110), a hydraulic device (112) is fixedly connected to the left and right sides of the bottom of the mounting plate (111), a connecting plate (120) is fixedly connected between the bottom ends of the hydraulic device (112), a positioning block (121) is fixedly connected to the left and right sides of the bottom of the connecting plate (120), an electric slide rail (122) is fixedly connected between the inner side walls of the positioning block (121), an electric slider (123) is slidably connected to the outer side wall of the electric slide rail (122), a vacuum detection device (124) is fixedly connected to the bottom of the electric slider (123), a sliding groove (130) is opened at the top of the base (100), and a pressing platform (131) is slidably connected to the left and right sides of the inner cavity of the sliding groove (130).
2. A vacuum detection device for a photolithography machine according to claim 1, characterized in that: The left and right side walls of the connecting plate (120) are provided with mounting grooves (125), and the left and right sides of the top of the connecting plate (120) are screwed with positioning bolts (126), and the bottom ends of the positioning bolts (126) pass through the connecting plate (120) and extend to the inner cavity of the mounting groove (125).
3. A vacuum detection device for a photolithography machine according to claim 2, characterized in that: An L-shaped plate (127) is inserted into the inner cavity of the installation groove (125), the bottom end of the positioning bolt (126) is tightly fitted with the top of the L-shaped plate (127), and the bottom of the L-shaped plate (127) is fixedly connected with a rubber plate (128).
4. The vacuum detection device for a photolithography machine according to claim 1, characterized in that: An extension plate (132) is fixedly connected to the upper side of the right side wall of the left pressing platform (131), and an extension groove (133) is opened on the top of the right pressing platform (131), and the extension plate (132) is slidably connected to the inner cavity of the extension groove (133).
5. A vacuum detection device for a photolithography machine according to claim 4, characterized in that: A first screw rod (140) is screwed inside the left-side press platform (131), and both ends of the first screw rod (140) pass through the left-side press platform (131) and extend to the left and right sides of the left-side press platform (131), and the left end of the first screw rod (140) is rotatably connected to the lower side of the right side wall of the left-side support plate (110).
6. A vacuum detection device for a photolithography machine according to claim 5, characterized in that: A second screw rod (150) is screwed inside the right-side press platform (131), and both ends of the second screw rod (150) pass through the right-side press platform (131) and extend to the left and right sides of the right-side press platform (131), the left end of the second screw rod (150) is fixedly connected to the right end of the first screw rod (140), the right end of the second screw rod (150) passes through the right-side support plate (110) and extends to the right side of the right-side support plate (110), and the right end of the second screw rod (150) is fixedly connected to a handle (151).
7. A vacuum detection device for a photolithography machine according to claim 6, characterized in that: The thread directions of the first screw (140) and the second screw (150) are opposite.
8. The vacuum detection device for a photolithography machine according to claim 1, characterized in that: A universal wheel (160) is fixedly connected to the top of the base (100).