Positioning mechanism and positioning method thereof

Abstract

The invention discloses a positioning mechanism and a positioning method thereof.The positioning mechanism comprises a carrier plate, a first positioning plate, a second positioning plate, a first driving part and a second driving part, and the carrier plate is configured to be used for bearing a to-be-positioned part; the first positioning plate and the second positioning plate are oppositely arranged in the first direction and located on the two sides of the carrier plate respectively. The first driving piece is connected with the first positioning plate, and the first driving piece can drive the first positioning plate to move in the first direction so that the first positioning plate can abut against one side of the to-be-positioned piece in the first direction; the second driving part is connected with the second positioning plate, and the second driving part can drive the second positioning plate to move in the first direction so that the second positioning plate can abut against the other side of the to-be-positioned part in the first direction. According to the positioning mechanism provided by the embodiment of the invention, the first driving piece and the second driving piece can operate at a relatively high speed, so that the positioning time is saved, and the positioning efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of positioning equipment, and more specifically, to a positioning mechanism and a positioning method thereof. Background Art

[0002] Graphite boat mainly refers to a container or boat made of graphite material, which has the characteristics of high temperature resistance, corrosion resistance, and good conductivity.

[0003] Graphite boats use graphite as raw material. In the production process of semiconductor chips, graphite boats are often used as containers for carrying silicon wafers, playing a key role in high-temperature process steps such as diffusion and annealing. Graphite boats can evenly transfer heat to ensure that silicon wafers are evenly heated, thereby improving the quality and consistency of chips. In the manufacturing process of solar panels, graphite boats are used to carry silicon wafers for coating, sintering and other process steps to ensure that the silicon wafers will not be damaged in high-temperature environments, and help form a uniform film layer to improve the conversion efficiency of solar panels.

[0004] In order to ensure that the silicon wafers carried in the graphite boat can be accurately loaded and unloaded, the graphite boat must first be effectively positioned. Therefore, how to accurately and efficiently position the graphite boat is a technical problem that needs to be solved urgently in the industry. Summary of the invention

[0005] One object of the present application is to provide a new technical solution for a positioning mechanism and a positioning method thereof.

[0006] According to a first aspect of the present application, a positioning mechanism is provided, the positioning mechanism comprising:

[0007] A carrier plate, the carrier plate being configured to carry the part to be positioned;

[0008] A first positioning plate and a second positioning plate, wherein the first positioning plate and the second positioning plate are arranged opposite to each other along a first direction and are respectively located on two sides of the carrier plate;

[0009] a first driving member, the first driving member being connected to the first positioning plate, and the first driving member being capable of driving the first positioning plate to move along a first direction so that the first positioning plate abuts against one side of the first positioning member in the first direction;

[0010] A second driving member is connected to the second positioning plate, and the second driving member can drive the second positioning plate to move along the first direction so that the second positioning plate abuts against the other side of the front positioning member in the first direction.

[0011] Optionally, a blocking cylinder is provided at the bottom of the carrier plate, and a working end of the blocking cylinder can be extended or retracted along a third direction;

[0012] The carrier plate is provided with a positioning portion, which includes a plurality of positioning holes arranged at intervals along the second direction and positioning blocks arranged in the positioning holes in a one-to-one correspondence, wherein the positioning blocks are used to cooperate with the working end of the blocking cylinder to abut and stop.

[0013] Optionally, a dimension of the positioning hole along the second direction is longer than a dimension along the first direction.

[0014] Optionally, the positioning mechanism further includes a conveying assembly, wherein the conveying assembly is connected to the carrier plate and can drive the carrier plate to move along the second direction.

[0015] Optionally, two sets of the conveying components are provided, and the two sets of the conveying components are arranged at intervals along the second direction.

[0016] Optionally, the conveying assembly includes a conveying motor and a conveying belt, the conveying motor is connected to the conveying belt and drives the conveying belt to move along the second direction, and the carrier plate is arranged on the conveying belt.

[0017] Optionally, two sets of the positioning parts are provided, and the two sets of the positioning parts are arranged at intervals along the first direction, and the blocking cylinder is provided corresponding to each set of the positioning parts;

[0018] The multiple positioning holes included in one set of the positioning parts have a first spacing along the second direction, and the multiple positioning holes included in the other set of the positioning parts have a second spacing along the second direction, and the first spacing is not equal to the second spacing.

[0019] According to a second aspect of the present application, a positioning method is provided, the positioning method being applied to the positioning mechanism as described in the first aspect, the positioning mechanism comprising a first positioning plate and a second positioning plate arranged opposite to each other along a first direction; the positioning method comprising:

[0020] driving the first positioning plate to abut against one side of the front positioning member;

[0021] The first positioning plate is used as a reference edge for positioning in the first direction, and the second positioning plate is driven to move with a preset torque value and abut against the other side of the part to be positioned, so as to achieve positioning of the part to be positioned in the first direction.

[0022] Optionally, before driving the first positioning plate to abut against one side of the front positioning member, the positioning method further includes:

[0023] The first positioning plate and / or the second positioning plate are driven respectively to move toward the part to be positioned; when the first positioning plate and / or the second positioning plate are close to but not in contact with the part to be positioned, either the first positioning plate or the second positioning plate is controlled to stop moving, while the other continues to move toward the part to be positioned.

[0024] Optionally, the to-be-positioned part is pre-positioned along the second direction at a station before the positioning mechanism, the positioning mechanism further comprises a carrier plate and a blocking cylinder, the carrier plate is provided with positioning holes, and the positioning method further comprises:

[0025] The driving plate moves together with the to-be-positioned member in the second direction, and the working end of the blocking cylinder is controlled to extend in the third direction;

[0026] The working end of the blocking cylinder directly or indirectly contacts the inner wall of any of the positioning holes along the second direction, so that the carrier plate stops moving and the part to be positioned moves into position along the second direction.

[0027] Optionally, the positioning mechanism further includes a main controller and an alarm, and the second driving member and the alarm are both connected to the main controller by signal;

[0028] The positioning method further includes: when the driving torque value of the second driving member exceeds a preset torque value, the main controller controls the alarm to send out an alarm signal.

[0029] The positioning mechanism provided in the embodiment of the present application can achieve the following technical effects:

[0030] In the positioning mechanism provided in the embodiment of the present application, since the graphite boat itself does not need to move in the first direction, that is, the first driving member and the second driving member do not need to directly contact the graphite boat to drive the graphite boat to move, the first driving member and the second driving member can run at a faster speed, thereby saving positioning time and improving positioning efficiency. In addition, the first positioning plate and the second positioning plate respectively abut the graphite boat from both sides in the first direction, thereby providing a more accurate positioning effect for the graphite boat in the first direction.

[0031] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the application and, together with the description, serve to explain the principles of the application.

[0033] Figure 1 Shown is a three-dimensional structural schematic diagram of a positioning mechanism of the present application;

[0034] Figure 2 Shown is a top view structural schematic diagram of a positioning mechanism of the present application;

[0035] Figure 3 The figure shows a partial structural three-dimensional schematic diagram of a positioning mechanism of the present application;

[0036] Figure 4 The figure shows a partial top view of a positioning mechanism of the present application;

[0037] Figure 5 The figure shows the working state of a positioning mechanism of the present application. Figure 1 ;

[0038] Figure 6 The figure shows the working state of a positioning mechanism of the present application. Figure 2 .

[0039] Description of reference numerals:

[0040] 1. Positioning mechanism; 10. Carrier plate; 100. Positioning hole; 101. Positioning block; 11. First positioning plate; 12. Second positioning plate; 13. First driving member; 14. Second driving member; 15. Conveying assembly; 151. Conveying motor; 152. Conveying belt; 16. Blocking cylinder. DETAILED DESCRIPTION

[0041] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application.

[0042] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or uses.

[0043] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0044] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0045] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0046] Reference Figure 1 to Figure 6 As shown, according to an embodiment of the present application, a positioning mechanism 1 is provided, the positioning mechanism 1 comprising a carrier plate 10, a first positioning plate 11 and a second positioning plate 12, the carrier plate 10 being configured to carry a to-be-positioned member; the first positioning plate 11 and the second positioning plate 12 are arranged opposite to each other along a first direction and are respectively located on both sides of the carrier plate 10;

[0047] The first driving member 13 and the second driving member 14 are further included. The first driving member 13 is connected to the first positioning plate 11. The first driving member 13 can drive the first positioning plate 11 to move along a first direction so that the first positioning plate 11 abuts against one side of the first positioning member in the first direction.

[0048] The second driving member 14 is connected to the second positioning plate 12 , and the second driving member 14 can drive the second positioning plate 12 to move along the first direction, so that the second positioning plate 12 abuts against the other side of the front positioning member in the first direction.

[0049] The positioning mechanism provided in the embodiment of the present application can be used to position the part to be positioned in the first direction at least, and the part to be positioned can be, for example, a graphite boat 2; generally, the graphite boat 2 needs to be positioned in both the first direction and the second direction, and the first direction corresponds to the width direction of the graphite boat 2, and the second direction corresponds to the length direction of the graphite boat 2. The graphite boat 2 is supported on the carrier 10, and the graphite boat 2 and the carrier 10 are fixed by friction. The top surface of the end of the carrier 10 is provided with a surface with a high friction coefficient, which cooperates with the bottom surface of the graphite boat 2 to prevent the graphite boat 2 and the carrier 10 from relative displacement.

[0050] In the preceding process before the positioning mechanism provided in the embodiment of the present application, the graphite boat 2 has completed the pre-positioning operation along the second direction; the positioning mechanism provided in the embodiment of the present application mainly focuses on the positioning operation of the graphite boat 2 along the first direction.

[0051] When the positioning mechanism provided in the embodiment of the present application is used to position the graphite boat 2 along the first direction, the first driving member 13 drives the first positioning plate 11 to move close to the graphite boat 2 along the first direction, and the second driving member 14 drives the second positioning plate 12 to move close to the graphite boat 2 along the first direction, so that the first positioning plate 11 abuts against one side of the graphite boat 2 in the first direction, and the second positioning plate 12 abuts against the other side of the front positioning member in the first direction, thereby completing the positioning operation of the graphite boat 2 in the first direction.

[0052] In the above positioning process, since the graphite boat 2 itself does not need to move in the first direction, that is, the first driving member 13 and the second driving member 14 do not need to directly contact the graphite boat 2 to drive the graphite boat 2 to move, the first driving member 13 and the second driving member 14 can run at a faster speed, thereby saving positioning time and improving positioning efficiency. In addition, the first positioning plate 11 and the second positioning plate 12 respectively abut against the graphite boat 2 from both sides in the first direction, thereby providing a more accurate positioning effect for the graphite boat 2 in the first direction.

[0053] Reference Figure 1 As shown, in one embodiment, the first driving member 13 is a cylinder or a servo motor; the second driving member 14 is a cylinder or a servo motor.

[0054] In this specific example, the advantage of using a cylinder as the first driving member 13 and / or the second driving member 14 is that the cylinder has high precision and stability; the advantage of using a servo motor as the first driving member 13 and / or the second driving member 14 is that the torque of the servo motor can be parameterized and the torque adjustment is very convenient.

[0055] Reference Figure 1 As shown, in one embodiment, the first driving member 13 is a cylinder, and the second driving member 14 is a servo motor;

[0056] After the first driving member 13 drives the first positioning plate 11 to abut against one side of the front positioning member, the second driving member 14 drives the second positioning plate 12 to abut against the other side of the front positioning member.

[0057] In this specific example, the cylinder is first used to drive the first positioning plate 11 to abut against one side of the front positioning member (graphite boat 2). The cylinder extends out at a relatively fast speed and quickly drives the first positioning plate 11 to move into position to abut against the graphite boat 2. At this time, the first positioning plate 11 serves as a reference edge for positioning in the first direction; then the servo motor drives the second positioning plate 12 to abut against the other side of the graphite boat 2. The torque of the servo motor can be pre-set as needed, thereby providing accurate positioning for the graphite boat 2 while avoiding applying excessive pressure to the graphite boat 2 and damaging the graphite boat 2.

[0058] Reference Figure 3-4 As shown, in one embodiment, a blocking cylinder 16 is disposed at the bottom of the carrier plate 10, and the working end of the blocking cylinder 16 can be extended or retracted along the third direction;

[0059] The carrier plate 10 is provided with a positioning portion, which includes a plurality of positioning holes 100 arranged at intervals along the second direction and positioning blocks 101 correspondingly arranged in the positioning holes 101, wherein the positioning blocks 101 are used to cooperate with the working end of the blocking cylinder 16 to abut and stop.

[0060] The positioning mechanism further includes a conveying assembly 15, wherein the conveying assembly 15 is connected to the carrier 10 and can drive the carrier 10 to move along the second direction;

[0061] When the working end of the blocking cylinder 16 extends out along the third direction and directly or indirectly abuts against the inner wall of any one of the positioning holes 100 along the second direction, the conveying assembly 15 drives the carrier plate 10 to move into position along the second direction.

[0062] In this specific example, since the graphite boat 2 has completed the pre-positioning operation along the second direction in the previous process, in this embodiment, the conveying assembly 15 is used to drive the carrier plate 10 to move together with the graphite boat 2 along the second direction, and the positioning of the graphite boat 2 in the second direction is finally completed by the stopping effect of the blocking cylinder 16 on the carrier plate 10.

[0063] When the blocking cylinder 16 stops the carrier 10, specifically, the working end of the blocking cylinder 16 extends into the positioning hole 100 opened on the carrier 10, when the conveying assembly 15 drives the carrier 10 to move to the inner wall of the positioning hole 100 along the second direction to directly or indirectly abut against the working end of the blocking cylinder 16, the blocking cylinder 16 plays a stopping role to stop the carrier 10 from moving, thereby completing the positioning of the graphite boat 2 in the second direction.

[0064] The so-called working end of the blocking cylinder 16 directly abuts against the inner wall of the positioning hole 100 along the second direction, that is, the working end of the blocking cylinder 16 directly abuts against the inner wall of the positioning hole 100 without the conversion of other devices; the so-called working end of the blocking cylinder 16 indirectly abuts against the inner wall of the positioning hole 100 along the second direction, that is, other devices can be arranged in the positioning hole 100, and the device contacts the inner wall of the positioning hole 100 along the second direction, and the working end of the blocking cylinder 16 abuts against the device.

[0065] The reason why multiple positioning holes 100 are arranged at intervals along the second direction is that: the graphite boat 2 has multiple rows of accommodating grooves for placing silicon wafers along the second direction, and each positioning hole 100 corresponds to a row of accommodating grooves; for example, the blocking cylinder 16 first cooperates with the first positioning hole 100 to stop, and at this time, the silicon wafers in the first accommodating groove are loaded and unloaded. After the loading and unloading operations of the silicon wafers in the first accommodating groove are completed, the conveying component 15 drives the carrier plate 10 together with the graphite boat 2 to move one grid along the second direction (before moving, the first positioning plate 11 and the second positioning plate 12 are first released to release the graphite boat 2). After the graphite boat 2 moves into position along the second direction, the first positioning plate 11 and the second positioning plate 12 are used to position the graphite boat 2 again along the first direction, and at this time, the blocking cylinder 16 cooperates with the second positioning hole 100 to stop, so as to load and unload the silicon wafers in the second row of accommodating grooves... and so on.

[0066] Reference Figure 3-4 As shown, in one embodiment, the conveying assembly 15 includes a conveying motor 151 and a conveying belt 152 , the conveying motor 151 is connected to the conveying belt 152 and drives the conveying belt 152 to move along the second direction, and the carrier 10 is disposed on the conveying belt 152 .

[0067] In this specific example, the conveying assembly 15 includes a conveying motor 151 and a conveying belt 152 , which has a simple structure, low cost, and can achieve smooth conveyance of the carrier 10 .

[0068] Reference Figure 3-4 As shown, in one embodiment, two sets of the conveying assemblies 15 are provided, and the two sets of the conveying assemblies 15 are arranged at intervals along the second direction.

[0069] In this specific example, two sets of conveying assemblies 15 are arranged at intervals along the second direction, and the two sets of conveying assemblies 15 work independently; in this way, after the carrier 10 leaves the front conveyor belt 152, the next set of carriers can immediately enter the positioning area where the conveyor belt 152 is located; at the same time, the rear conveyor belt 152 can independently transfer the carrier 10 to the next workstation without waiting for the carrier 10 to leave the rear conveyor belt 152, thereby improving work efficiency.

[0070] Reference Figure 1 , Figure 2 As shown, in one embodiment, the positioning portion includes a positioning block 101 , and the positioning blocks 101 are arranged in the positioning holes 100 in a one-to-one correspondence. The positioning blocks 101 are used to abut against the working end of the blocking cylinder 16 .

[0071] In this specific example, a positioning block 101 is provided in the positioning hole 100, and the positioning block 101 abuts against the working end of the blocking cylinder 16 to stop it; this prevents the working end of the blocking cylinder 16 from frequently abutting against the inner wall of the positioning hole 100 and causing wear of the carrier 10. It can also reduce the difficulty of processing the carrier 10, and the positioning block 101 can be used to adjust it to the required size; in addition, the positioning block 101 can be made of a material with higher hardness to extend the service life of the carrier 10.

[0072] For example, in order to achieve a lightweight design of the positioning mechanism, the carrier plate 10 can be made of a lightweight material, such as aluminum alloy; and the positioning block 101 can be made of a material with good wear resistance, such as stainless steel.

[0073] Reference Figure 2 As shown, in one embodiment, the dimension of the positioning hole 100 along the second direction is longer than the dimension along the first direction.

[0074] That is, when the working end of the blocking cylinder 16 extends along the third direction and directly or indirectly abuts against the inner wall of one side of the positioning hole 100 along the second direction, there is a gap between the working end of the blocking cylinder 16 and the inner wall of the other side of the positioning hole 100 along the second direction.

[0075] In this specific example, the size of the positioning hole 100 along the second direction is larger, that is, the positioning hole 100 is not a circular hole, but a long strip hole, so that the positioning hole 100 can reserve time for the working end of the blocking cylinder 16 to rise, that is, the working end of the blocking cylinder 16 rises and enters the positioning hole 100 while the carrier plate 10 and the graphite boat 2 move along the second direction, thereby improving the positioning efficiency.

[0076] Reference Figure 1 , Figure 2 As shown, in one embodiment, two sets of positioning parts are provided, and the two sets of positioning parts are arranged at intervals along the first direction, and the blocking cylinder 16 is provided corresponding to each set of positioning parts;

[0077] The multiple positioning holes 100 included in one set of the positioning parts have a first spacing along the second direction, and the multiple positioning holes 100 included in another set of the positioning parts have a second spacing along the second direction, and the first spacing is not equal to the second spacing.

[0078] In this specific example, the two sets of positioning parts spaced apart along the first direction can be respectively applicable to graphite boats 2 of two different sizes (graphite boats 2 of different sizes are used to accommodate silicon wafers of different sizes), thereby improving the compatibility of the positioning mechanism.

[0079] According to another embodiment of the present application, a positioning method is provided, the positioning method is applied to the positioning mechanism as described above, the positioning mechanism includes a first positioning plate 11 and a second positioning plate 12 arranged opposite to each other along a first direction; the positioning method includes:

[0080] driving the first positioning plate 11 to abut against one side of the front positioning member;

[0081] The first positioning plate 11 is used as a reference edge for positioning in the first direction, and the second positioning plate 12 is driven to move with a preset torque value and abut against the other side of the part to be positioned, so as to achieve positioning of the part to be positioned in the first direction.

[0082] In the positioning method provided in the embodiment of the present application, since the graphite boat 2 itself does not need to move in the first direction, that is, the first driving member 13 and the second driving member 14 do not need to directly contact the graphite boat 2 to drive the graphite boat 2 to move, the first driving member 13 and the second driving member 14 can run at a faster speed, thereby saving positioning time and improving positioning efficiency. In addition, the first positioning plate 11 and the second positioning plate 12 respectively abut against the graphite boat 2 from both sides in the first direction, thereby providing a more accurate positioning effect for the graphite boat 2 in the first direction.

[0083] In one embodiment, before driving the first positioning plate 11 to abut against one side of the front positioning member, the positioning method further includes:

[0084] The first positioning plate 11 and / or the second positioning plate 12 are driven respectively to move toward the part to be positioned; when the first positioning plate 11 and / or the second positioning plate 12 are close to but not in contact with the part to be positioned, either the first positioning plate 11 or the second positioning plate 12 is controlled to stop moving, while the other continues to move toward the part to be positioned.

[0085] In this specific example, for example, first the first driving member 13 and the second driving member 14 act simultaneously, respectively driving the first positioning plate 11 and the second positioning plate 12 to move close to the part to be positioned (graphite boat 2) at the same time; then when it is about to approach the part to be positioned, the second driving member 14 stops driving, and at this time the first driving member 13 continues to drive the first positioning plate 11 until the first positioning plate 11 abuts against one side of the part to be positioned, and at this time the first positioning plate 11 serves as a reference edge for positioning in the first direction; then the second driving member 14 drives the second positioning plate 12 to move close to the part to be positioned again until the second positioning plate 12 abuts against the other side of the part to be positioned, thereby completing the positioning of the part to be positioned in the first direction.

[0086] In one embodiment, the workpiece to be positioned is pre-positioned along the second direction at a station before the positioning mechanism, the positioning mechanism further includes a carrier plate 10 and a blocking cylinder 16, the carrier plate 10 is provided with a positioning hole 100, and the positioning method further includes:

[0087] The carrier plate 10 is driven to move together with the to-be-positioned member along the second direction, and the working end of the blocking cylinder 16 is controlled to extend along the third direction;

[0088] The working end of the blocking cylinder 16 directly or indirectly contacts the inner wall of any positioning hole 100 along the second direction, so that the carrier plate 10 stops moving and the part to be positioned moves into position along the second direction.

[0089] In this specific example, since the graphite boat 2 has completed the pre-positioning operation along the second direction in the previous process, in this embodiment, the conveying assembly 15 is used to drive the carrier plate 10 to move together with the graphite boat 2 along the second direction, and the positioning of the graphite boat 2 in the second direction is finally completed by the stopping effect of the blocking cylinder 16 on the carrier plate 10.

[0090] When the blocking cylinder 16 stops the carrier 10, specifically, the working end of the blocking cylinder 16 extends into the positioning hole 100 opened on the carrier 10, when the conveying assembly 15 drives the carrier 10 to move to the inner wall of the positioning hole 100 along the second direction to directly or indirectly abut against the working end of the blocking cylinder 16, the blocking cylinder 16 plays a stopping role to stop the carrier 10 from moving, thereby completing the positioning of the graphite boat 2 in the second direction.

[0091] The so-called working end of the blocking cylinder 16 directly abuts against the inner wall of the positioning hole 100 along the second direction, that is, the working end of the blocking cylinder 16 directly abuts against the inner wall of the positioning hole 100 without the conversion of other devices; the so-called working end of the blocking cylinder 16 indirectly abuts against the inner wall of the positioning hole 100 along the second direction, that is, other devices can be arranged in the positioning hole 100, and the device contacts the inner wall of the positioning hole 100 along the second direction, and the working end of the blocking cylinder 16 abuts against the device.

[0092] In one embodiment, the positioning mechanism further includes a main controller and an alarm, and the second driving member 14 and the alarm are both connected to the main controller by signal;

[0093] The positioning method further includes: when the driving torque value of the second driving member 14 exceeds a preset torque value, the main controller controls the alarm to send out an alarm signal.

[0094] According to the specific situation of the graphite boat 2, the working torque value of the second driving member 14 is set in advance, and the pre-set working torque value is the preset torque value; for example, when the graphite boat 2 is cleaned after working for a period of time, its dimension in the width direction (i.e., the first direction) becomes thinner, and the preset torque value needs to be readjusted. In this specific example, if the driving torque of the second driving member 14 exceeds the preset torque value, the main controller controls the alarm to send an alarm signal so that the staff can take corresponding measures, thereby reducing the possibility of damage to the graphite boat 2.

[0095] Although some specific embodiments of the present application have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are only for illustration, not for limiting the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. A positioning mechanism, characterized in that: The positioning mechanism comprises: A carrier plate (10), wherein the carrier plate (10) is configured to carry a part to be positioned; A first positioning plate (11) and a second positioning plate (12), wherein the first positioning plate (11) and the second positioning plate (12) are arranged opposite to each other along a first direction and are respectively located on two sides of the carrier plate (10); a first driving member (13), the first driving member (13) being connected to the first positioning plate (11), and the first driving member (13) being capable of driving the first positioning plate (11) to move along a first direction so that the first positioning plate (11) abuts against one side of the first positioning member in the first direction; A second driving member (14), the second driving member (14) is connected to the second positioning plate (12), and the second driving member (14) can drive the second positioning plate (12) to move along the first direction so that the second positioning plate (12) abuts against the other side of the front positioning member in the first direction.

2. The positioning mechanism according to claim 1, characterized in that: A blocking cylinder (16) is provided at the bottom of the carrier plate (10), and a working end of the blocking cylinder (16) can be extended or retracted along a third direction; The carrier plate (10) is provided with a positioning portion, the positioning portion comprising a plurality of positioning holes (100) arranged at intervals along the second direction and positioning blocks (101) arranged in a one-to-one correspondence in the positioning holes (100), wherein the positioning blocks (101) are used to cooperate with the working end of the blocking cylinder (16) to abut and stop.

3. The positioning mechanism according to claim 2, characterized in that: The dimension of the positioning hole (100) along the second direction is longer than the dimension along the first direction.

4. The positioning mechanism according to claim 1, characterized in that: The positioning mechanism further comprises a conveying assembly (15), wherein the conveying assembly (15) is connected to the carrier plate (10) and can drive the carrier plate (10) to move along a second direction.

5. The positioning mechanism according to claim 4, characterized in that: The conveying components (15) are provided in two sets, and the two sets of the conveying components (15) are arranged at intervals along the second direction.

6. The positioning mechanism according to claim 4 or 5, characterized in that: The conveying assembly (15) comprises a conveying motor (151) and a conveying belt (152); the conveying motor (151) is connected to the conveying belt (152) and drives the conveying belt (152) to move along a second direction; and the carrier plate (10) is arranged on the conveying belt (152).

7. The positioning mechanism according to claim 2, characterized in that: The positioning parts are provided in two sets, and the two sets of positioning parts are arranged at intervals along the first direction, and the blocking cylinder (16) is provided corresponding to each set of positioning parts; The multiple positioning holes (100) included in one set of the positioning parts have a first spacing along the second direction, and the multiple positioning holes (100) included in another set of the positioning parts have a second spacing along the second direction, and the first spacing is not equal to the second spacing.

8. A positioning method, the positioning method being applied to the positioning mechanism according to any one of claims 1 to 7, characterized in that: The positioning mechanism comprises a first positioning plate (11) and a second positioning plate (12) arranged opposite to each other along a first direction; the positioning method comprises: The first positioning plate (11) and / or the second positioning plate (12) are driven respectively to move toward the part to be positioned; when the first positioning plate (11) and / or the second positioning plate (12) are close to but not in contact with the part to be positioned, either the first positioning plate (11) or the second positioning plate (12) is controlled to stop moving, while the other continues to move toward the part to be positioned.

9. The positioning method according to claim 8, characterized in that: The positioning method comprises: driving the first positioning plate (11) to abut against one side of the front positioning member; The first positioning plate (11) is used as a reference edge for positioning in the first direction, and the second positioning plate (12) is driven to move at a preset torque value and abut against the other side of the part to be positioned, thereby achieving positioning of the part to be positioned in the first direction.

10. The positioning method according to claim 8, characterized in that: The part to be positioned is pre-positioned along a second direction at a station before the positioning mechanism, the positioning mechanism further comprises a carrier plate (10) and a blocking cylinder (16), the carrier plate (10) is provided with a positioning hole (100), and the positioning method further comprises: The carrier plate (10) is driven to move together with the part to be positioned in a second direction, and the working end of the blocking cylinder (16) is controlled to extend in a third direction; The working end of the blocking cylinder (16) directly or indirectly abuts against the inner wall of any one of the positioning holes (100) along the second direction, so that the carrier plate (10) stops moving and the part to be positioned moves into position along the second direction.

11. The positioning method according to claim 8, characterized in that: The positioning mechanism also includes a main controller and an alarm, and the second driving member (14) and the alarm are both connected to the main controller by signal. The positioning method further comprises: when the driving torque value of the second driving member (14) exceeds a preset torque value, the main controller controls the alarm to send out an alarm signal.

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