Semi-automatic furnace tube loading and unloading equipment

Abstract

Semi-automatic furnace tube loading and unloading equipment relates to the technical field of lifting transmission. Comprising a vehicle, a coarse lifting power mechanism arranged on the vehicle, a lifting base driven by the coarse lifting power mechanism to ascend and descend, a fine adjustment lifting mechanism arranged on the lifting base, a lifting table driven by the fine adjustment lifting mechanism to ascend and descend, a left-right fine adjustment moving mechanism arranged on the lifting table and an angle fine adjustment rotating mechanism arranged on the lifting table. The horizontal moving table is driven by the left-right fine adjustment moving mechanism and the angle fine adjustment rotating mechanism, the guide rail is arranged on the horizontal moving table, the sliding frame is arranged on the guide rail in a sliding mode, and the V-shaped roller set is arranged on the sliding frame. Compared with the prior art, the device has the advantages of being labor-saving in operation, high in efficiency and capable of preventing an operator from being hurt.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor automated robots, and in particular to semi-automatic disassembly and assembly equipment for furnace tubes. Background Art

[0002] Most of the existing chemical deposition furnaces (CVD) and diffusion furnaces in the semiconductor and photovoltaic industries use quartz glass furnace tubes. After a period of use, the inner wall of the glass furnace tube will be chemically contaminated by the reaction gas in the furnace tube, and the reaction temperature changes will cause cracks in the glass furnace tube. Therefore, the furnace tubes in the chemical deposition furnace (CVD) and diffusion furnace need to be frequently disassembled and replaced. The existing technology is to replace and disassemble the quartz glass furnace tube manually. Due to the long size and heavy weight of the furnace tube and the high replacement position, 6-8 workers are required to lift and disassemble the furnace tube, which is time-consuming, labor-intensive and inefficient. Moreover, when the quartz glass furnace tube is manually disassembled and transported, the cracked furnace tube will be easily broken, which will cause a hidden danger to the life safety of the loading and unloading workers. In addition, the furnace body used to load the furnace tube also needs to be repaired and replaced, and the repair and replacement process also needs to be disassembled and removed from the base. This work of the existing technology is also manually lifted up and down, which not only consumes a lot of manpower, but also has low efficiency and is difficult to repair and replace. Summary of the invention

[0003] The purpose of the present invention is to provide a semi-automatic furnace tube loading and unloading equipment which saves manpower, saves labor in operation, has high efficiency and can prevent harm to the operator.

[0004] The semi-automatic loading and unloading equipment of the furnace tube of the present invention is realized as follows: it includes a vehicle, a lifting power mechanism arranged on the vehicle, a front-rear moving mechanism driven by the lifting power mechanism, a left-right fine-adjusting moving mechanism driven by the front-rear moving mechanism, an angle fine-adjusting rotating mechanism with a rotating table driven by the left-right fine-adjusting moving mechanism, and a V-shaped roller group arranged on the rotating table.

[0005] When in use, the furnace tube is placed on the V-shaped roller set on the rotating table, and then the furnace tube is transported to the furnace tube installation entrance of the chemical deposition furnace (CVD) or the diffusion furnace by a vehicle, and the front and rear moving mechanism is raised by the lifting power mechanism to lift the furnace tube to the furnace tube installation entrance, so that the furnace tube and the furnace tube installation entrance are on the same precise horizontal line, and the left and right fine-tuning moving mechanism is used to adjust the left and right positions of the horizontal moving table so that the furnace tube is facing the furnace tube installation entrance, and the angle of the rotating table is adjusted by the angle fine-tuning rotating mechanism so that the axis of the furnace tube coincides with the axis of the furnace tube installation entrance, so that it can be manually pushed into the furnace along the axis by the V-shaped roller set.

[0006] Preferably, several support frames are arranged on both sides of the rotating table, and the support frames include a pair of vertical plates arranged relatively parallel, and a connecting block connected between the two vertical plates, the connecting block is placed on the rotating table surface, and the top of the vertical plate is provided with a V-shaped recess matching the bottom foot of the furnace body, and the top of the vertical plate is higher than the V-shaped roller group. When the furnace body is placed on the support frame, the furnace body will not touch the V-shaped roller group. A pair of through grooves matching the pair of vertical plates is provided on the rotating table. When the support frame is inverted on the pair of through grooves, the vertical plates are inserted into the through grooves and the connecting block is against the rotating table, the highest point of the support frame is not higher than the V-shaped roller group to ensure that the furnace tube moves under the guidance of the V-shaped roller group.

[0007] During use, when the furnace tube needs to be installed or extracted, the support frame is inverted on a pair of through slots so that the support frame does not affect the transmission of the furnace tube. When the furnace body needs to be transported, the support frame is placed upright on the rotating table so that the furnace body can be transported smoothly.

[0008] Preferably, the plurality of support frames are divided into two rows and symmetrically arranged on both sides of the rotating table surface. The two rows of support frames symmetrically arranged on both sides of the rotating table surface ensure stable support of the furnace body.

[0009] Preferably, the connection block is in the shape of a square bar, and two screws are screwed on the square bar connection block, and a through hole is provided on the rotating platform matching the screws. When in use, the screw is inserted into the through hole to position the support frame on the rotating platform, so that the posture of the support frame is stable, thereby ensuring the stability of the support. By using the screw, by inserting the screws on both sides of the connection block, the support frame can be placed and positioned in two forms according to the use requirements, so as to adapt to the transmission of different components. By using the square bar connection block, no matter which form is positive or negative, the support frame can be close to the rotating platform, ensuring the stability of the support frame placed on the rotating platform.

[0010] Preferably, the forward and backward moving mechanism includes a longitudinal track arranged on the lifting base of the lifting power mechanism, a longitudinal slider slidably arranged on the longitudinal track, the left and right moving base of the left and right fine-tuning moving mechanism is fixed on the longitudinal slider, the left and right fine-tuning moving mechanism includes a left and right moving base, a transverse track arranged on the left and right moving base, and a transverse slider slidably arranged on the transverse track, the rotating base of the angle fine-tuning rotating mechanism is fixed on the transverse slider, and the angle fine-tuning rotating mechanism includes a rotating base, a rotating shaft fixed in the middle of the rotating base, a rotating table rotatably arranged on the rotating shaft, and a plurality of rollers arranged under the rotating table, and the plurality of rollers are arranged around the rotating shaft.

[0011] When in use, the left and right and angular positions of the rotating table are adjusted manually so that the axis of the furnace tube coincides with the axis of the furnace tube installation entrance, so that it can be accurately pushed into the furnace along the axis by manual use of a V-shaped roller group; if the furnace body is to be installed, the left and right fine-tuning moving mechanism, the angle fine-tuning rotating mechanism and the furnace body on the rotating table are manually pushed into the furnace frame, and the moving positioning mechanism on the furnace frame is used to continue to convey the furnace body to the installation position of the furnace frame, thereby completing the installation of the furnace body; when disassembling the furnace body, the rotating table is extended into the furnace body receiving position of the furnace frame, and the furnace body is sent to the supporting frame on the rotating table through the moving positioning mechanism on the furnace frame.

[0012] Preferably, the angle fine-tuning rotation mechanism on the adjustment platform includes a rotating shaft driven by a hand wheel, a flexible shaft or a retractable universal coupling driven by the rotating shaft, a gearbox connecting the power input shaft and the flexible shaft, an output shaft of the gearbox perpendicular to the power input shaft is connected to the bottom surface of the rotating table, and more than three universal rollers are arranged between the horizontal moving table surrounding the output shaft and the rotating table.

[0013] During operation, the rotating shaft is driven to rotate by the hand wheel, and the rotating shaft drives the flexible shaft or the retractable universal coupling to rotate, so that the output shaft of the gearbox drives the rotating table to rotate, so that the angle fine-tuning rotating mechanism can adjust the angle of the rotating table, and the universal roller supports the rotating table stably on the horizontal moving table. The flexible shaft or the retractable universal coupling is adopted. In this way, even if the movement of the left and right fine-tuning moving mechanism causes a slight change in the distance between the rotating shaft and the input shaft of the gearbox, it will not affect the operation of the angle fine-tuning rotating mechanism.

[0014] Preferably, a vehicle positioning mechanism is provided, which includes a seat with a bayonet fixed at a position just below the furnace tube installation entrance of the chemical vapor deposition furnace or the diffusion furnace, and a positioning roller matched with the bayonet and provided at the front end of the vehicle.

[0015] When in use, the car is pushed in front of the seat so that the positioning roller is embedded in the bayonet, and then the brake mechanism of the car is started, so that the car will be positioned and cannot move. At the same time, under the action of the seat with the bayonet, the car will not roll over.

[0016] Preferably, a vehicle fixing frame is provided, which includes two sleeves fixed transversely at the front and rear ends of the vehicle, movable rods passing through the left and right ends of the sleeves, and a support rod with a support base connected to the movable rod, and the support rod can be adjusted up and down and fixed on the movable rod.

[0017] During use, when the vehicle needs to be stably positioned, the movable rod is moved out of the sleeve, and then the support rod is lowered so that the support base is against the ground, and then the position of the support rod is fixed. Since there are four support rods unfolded and supported on the ground, a stable four-point support is formed, thereby ensuring that the turntable to be transported is stably positioned, thereby ensuring that the furnace tube or furnace body is smoothly extracted or transported.

[0018] Compared with the prior art, the present invention has the advantages of saving manpower, saving operation effort, high efficiency and preventing harm to the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of a semi-automatic furnace tube loading and unloading device according to Embodiment 1 of the present invention; Figure 2 An exploded view of the semi-automatic loading and unloading device for furnace tubes of the present invention; Figure 3 for Figure 2 Another angle of view; Figure 4 This is a schematic structural diagram of a furnace tube semi-automatic loading and unloading device according to Embodiment 2 of the present invention; Figure 5 is a structural schematic diagram of the support frame; Figure 6 for Figure 4 Another visual diagram of the structure of the semi-automatic loading and unloading equipment for furnace tubes; Figure 7 A schematic diagram of the structure of a furnace body supported by a support frame.

[0020] Description of the reference numerals: A-chemical vapor deposition furnace; B-furnace tube; C-furnace body; D-lifting power mechanism; 1-brake mechanism; 2-car; 3- Rough lifting power mechanism; 4-lifting base; 5-fine-adjusting lifting mechanism; 501-first hand wheel; 502-main gearbox; 503-first gearbox; 504-second gearbox; 6-lifting platform; 7-left and right fine-adjusting moving mechanism; 701-second hand wheel; 702-first gearbox; 703-left and right moving base; 704-lateral track; 705-lateral slider; 8-angle fine-adjusting rotating mechanism; 801-third hand wheel; 802-rotating shaft; 803-flexible shaft or retractable universal coupling; 804-second gearbox; 805-output shaft; 806-rotating base; 807-rotating shaft; 808-roller; 9-track; 10-horizontal moving platform; 11-rotating platform; 12-positioning structure; 13-pipe rack car; 14-V-shaped roller group; 1401-bottom roller; 1402-side roller; 15-universal wheel; 16-movable railing; 17-universal roller; 18-car positioning mechanism; 1801-bayonet; 1802-seat; 1803-positioning roller; 1804-lock; 19-furnace tube installation entrance; 20-support frame; 2001-vertical plate; 2002-connecting block; 2003-screw; 2004-V-shaped notch; 21-groove; 22-perforation; 23-foot; 24-forward and backward moving mechanism; 2401-longitudinal track; 2402-longitudinal slider; 25-car fixing frame; 2501-sleeve; 2502-movable rod; 2503-support base; 2504-support rod; 26-roller brake rod; 27-anti-left and right movement latch; 28-anti-forward and backward movement latch. DETAILED DESCRIPTION

[0021] The semi-automatic loading and unloading equipment for furnace tubes of the present invention is now described in further detail in conjunction with the accompanying drawings and embodiments: Example 1: Figure 1 , 2 As shown in FIG. 3 , the semi-automatic loading and unloading equipment for furnace tubes of the present invention comprises a vehicle 2 with a brake mechanism 1, a lifting power mechanism D arranged on the vehicle 2, a front-rear moving mechanism 24 driven by the lifting power mechanism D, a left-right fine-adjusting moving mechanism 7 driven by the front-rear moving mechanism 24, an angle fine-adjusting rotating mechanism 8 with a rotating platform 11 driven by the left-right fine-adjusting moving mechanism 7, and a V-shaped roller wheel group 14 arranged on the rotating platform 11; The lifting power mechanism D includes a rough lifting power mechanism 3 arranged on the vehicle 2 (a scissor-type electric power lifting mechanism can be used so as to enable rapid lifting), a lifting base 4 driven to lift by the rough lifting power mechanism 3, a fine-adjustment lifting mechanism 5 arranged on the lifting base 4 (including a first hand wheel 501, a first hand wheel 501, a main gearbox 502, a pair of first gearboxes 503, and a pair of second gearboxes 504, the first hand wheel 501, the main gearbox 502, a pair of first gearboxes 503, and a pair of second gearboxes 504 are linked through a transmission shaft to drive the screw rods perpendicular to the pair of first gearboxes 503 and the pair of second gearboxes 504 to rotate synchronously, and the screw rod drives the lifting platform 6 to lift through a nut fixed on the lifting platform 6), a lifting platform 6 driven to lift by the fine-adjustment lifting mechanism 5, and a left and right fine-adjustment moving mechanism 7 (including a second hand wheel 701, a first gearbox 702, The screw rod, nut, the second hand wheel 701 is connected with the first gearbox 702 through the rotating shaft, the output shaft of the first gearbox 702 drives the screw rod to rotate, and the screw rod drives the horizontal moving platform 10 to move horizontally through the nut fixed on the horizontal moving platform 8) is arranged on the lifting platform 6, the angle fine-tuning rotating mechanism 8 is arranged on the lifting platform 6, and a horizontal moving platform 10 driven by the left and right fine-tuning moving mechanism 7 and moving along the track 9 on the lifting platform 6 is arranged, and a rotating platform 11 is arranged on the horizontal moving platform 10 and driven by the angle fine-tuning rotating mechanism 8. A positioning structure 12 is arranged on the rotating platform 11, and a pipe rack car 13 positioned by the positioning structure 12 is arranged on the rotating platform 11, and a V-shaped roller group 14 (including a plurality of bottom rollers 1401 arranged horizontally and parallelly and rotatably arranged on the movable frame 13, and a plurality of pairs of side rollers 1402 arranged in a V shape and rotatably arranged on both sides of the bottom roller 1401) is arranged on the pipe rack car 13.

[0022] Preferably, universal wheels 15 are provided at the bottom of the movable frame 13 so as to smoothly push the pipe rack vehicle 13 loaded with furnace pipes B to the side of the vehicle 2 , so that the transporter can move the pipe rack vehicle 13 loaded with furnace pipes B onto the horizontal moving platform 10 nearby.

[0023] Preferably, movable railings 16 are provided at both ends of the pipe rack cart 13. When the pipe rack cart 13 loaded with furnace tubes B is transported, the movable railings 16 can be lowered to block both ends of the furnace tubes B to prevent the furnace tubes B from sliding out of the pipe rack cart 13. When the furnace tubes B need to be pushed into the chemical vapor deposition furnace A, the movable railings 16 can be opened.

[0024] Preferably, if Figure 2 , 3As shown, the angle fine-tuning rotation mechanism 8 includes a rotating shaft 802 driven to rotate by a third hand wheel 801, a flexible shaft or a retractable universal coupling 803 driven by the rotating shaft 802, a second gearbox 804 connecting the power input shaft and the flexible shaft or the retractable universal coupling 803, an output shaft 805 of the second gearbox 804 perpendicular to the power input shaft rotates through the horizontal moving table 10 and is fixed to the bottom surface of the rotating table 11, and more than three universal rollers 17 are arranged between the horizontal moving table 10 and the rotating table 11 around the output shaft 805.

[0025] Preferably, a vehicle positioning mechanism 18 is provided, which includes a seat 1802 with a bayonet 1801 fixed at a position directly below the furnace tube installation entrance 19 of the chemical vapor deposition furnace A, and a positioning roller 1803 matched with the bayonet 1801 and arranged at the front end of the vehicle 2.

[0026] A lock 1804 is provided on the bayonet 1801 so as to lock the positioning roller 1803 in the bayonet 1801 .

[0027] When in use, the furnace tube B is placed on the V-shaped roller set 14, and then the furnace tube B is sent to the furnace tube installation entrance 19 of the chemical vapor deposition furnace A by the car 2, and the lifting base 4 is raised by the rough lifting power mechanism 3 to make the furnace tube B rise to the vicinity of the furnace tube installation entrance 19, and then the lifting platform 6 is adjusted by the fine-tuning lifting mechanism 5 to make the furnace tube B and the furnace tube installation entrance 19 are on the same precise horizontal line, and the left and right fine-tuning moving mechanism 7 is used to adjust the left and right positions of the horizontal moving platform 10 so that the furnace tube B is facing the furnace tube installation entrance 19, and the angle of the rotating platform 11 is adjusted by the angle fine-tuning rotating mechanism 8 so that the axis of the furnace tube B coincides with the axis of the furnace tube installation entrance 19. In this way, the furnace tube B can be manually pushed into the furnace tube installation place of the chemical vapor deposition furnace A along the furnace tube installation entrance 19, and the V-shaped roller set 14 is used to make the furnace tube B move smoothly and accurately in a straight line along the axis.

[0028] Example 2: Figure 4 , 5As shown, this embodiment is based on the embodiment 1, and several support frames 20 are arranged on both sides of the rotating table 11. The support frames 20 include a pair of vertical plates 2001 arranged relatively parallel, and a connecting block 2002 connected between the two vertical plates 2001. The connecting block 2002 is placed on the table top of the rotating table 11. The top of the vertical plate 2001 is provided with a V-shaped recess 2004 matching the bottom foot 23 of the furnace body C. The top of the vertical plate 2001 is higher than the V-shaped roller group 14. When the furnace body C is placed on the support frame 20, the furnace body C will not touch the V-shaped roller group 14. A pair of through grooves 21 matching the pair of vertical plates 2001 are provided on the rotating table 11. When the support frame 20 is inverted on the pair of through grooves 21, the vertical plate 2001 is inserted into the through grooves 21 and the connecting block 2002 is against the rotating table 11, the highest point of the support frame 20 is not higher than the V-shaped roller group 14, so as to ensure that the furnace tube B moves under the guidance of the V-shaped roller group 14.

[0029] Preferably, the plurality of support frames 20 are divided into two rows and symmetrically arranged on both sides of the surface of the rotating table 11 .

[0030] Preferably, the connecting block 2002 is in a square bar shape, two screw rods 2003 are screwed onto the square bar connecting block 2002 , and a through hole 22 is provided on the rotating platform 11 matching the screw rods 2003 .

[0031] During use, when the furnace tube B needs to be installed or extracted, the support frame 20 is inverted on a pair of through grooves 21 so that the support frame 20 does not affect the transmission of the furnace tube B. When the furnace body C needs to be transported, the support frame 20 is placed upright on the table top of the rotating table 11, and the feet 23 on both sides of the bottom of the furnace body C can be positioned on the V-shaped notch 2004 so that the furnace body C can be smoothly transported.

[0032] The screw 2003 is inserted into the through hole 22 to position the support frame 20 on the rotating table 11, so that the posture of the support frame 20 is stable, thereby ensuring the stability of the support. By using the screw 2003 and connecting the screw 2003 on both sides of the connecting block 2002, the support frame 20 can be placed and positioned in two forms according to the requirements of use to adapt to the transmission of different components. By using the square bar connecting block 2002, no matter which form it is, the support frame 20 can be close to the rotating table 11, ensuring the stability of the support frame 20 placed on the rotating table 11.

[0033] Preferably, the front-rear moving mechanism 24 includes a longitudinal track 2401 arranged on the lifting base 4 of the lifting power mechanism D (a scissor-type electric power lifting mechanism can be used, which can not only perform rapid lifting and lowering, but also perform fine-tuning lifting and lowering by inching), and a longitudinal slider 2402 slidably arranged on the longitudinal track 2401; the left-right moving base 703 of the left-right fine-tuning moving mechanism 7 is fixed on the longitudinal slider 2402; the left-right fine-tuning moving mechanism 7 includes a left-right moving base 703, a transverse track 704 arranged on the left-right moving base 703, and a transverse slider 705 slidably arranged on the transverse track 704; the rotating base 806 of the angle fine-tuning rotating mechanism 8 is fixed on the transverse slider 705; the angle fine-tuning rotating mechanism 8 includes a rotating base 806, a rotating shaft 807 fixed in the middle of the rotating base 806, a rotating table 11 rotatably arranged on the rotating shaft 807, and a plurality of rollers 808 arranged below the rotating table 11, and the plurality of rollers 808 are arranged around the rotating shaft 807.

[0034] Preferably, a vehicle fixing frame 25 is provided, and the vehicle fixing frame 25 includes two square sleeves 2501 respectively fixed laterally at the front and rear ends of the vehicle 2, a square movable rod 2502 connected to the left and right ends of the square sleeves 2501, and a support rod 2504 with a support base 2503 connected to the square movable rod 2502. The support rod 2504 is fixed to the movable rod 2502 by adjusting it up and down through a nut screwed on the support rod 2504.

[0035] Preferably, a roller brake rod 26 connected to the side plate of the rotating table 11 is provided on the rotating table 11. The roller brake rod 26 rests on the V-shaped roller group 14 (such as by threaded feeding), so that the V-shaped roller group 14 cannot rotate and acts as a brake to prevent the furnace tube B from moving along the V-shaped roller group 14 by itself.

[0036] Preferably, an anti-rotation latch (not shown in the figure) is provided, which is inserted between the floating plate of the rotating platform 11 and the floating plate of the rotating base 806 , to prevent the rotating platform 11 from rotating freely during the operation of the vehicle 2 .

[0037] Preferably, an anti-left-right movement latch 27 is provided, which is inserted between the floating plate of the left-right movable base 703 and the floating plate of the rotating base 806, so as to prevent the rotating base 806 from freely moving left-right during the operation of the vehicle 2.

[0038] Preferably, an anti-forward and backward movement latch 28 is provided, which is inserted between the floating plate of the left-right movable base 703 and the floating plate of the lifting base 4, so as to prevent the left-right movable base 703 from freely moving forward and backward during the operation of the vehicle 2.

Claims

1. A semi-automatic loading and unloading equipment for furnace tubes, characterized in that: The utility model comprises a vehicle, a lifting power mechanism arranged on the vehicle, a front-rear moving mechanism driven by the lifting power mechanism, a left-right fine-adjusting moving mechanism driven by the front-rear moving mechanism, an angle fine-adjusting rotating mechanism with a rotating platform driven by the left-right fine-adjusting moving mechanism, and a V-shaped roller wheel group arranged on the rotating platform.

2. The semi-automatic loading and unloading equipment for furnace tubes according to claim 1, characterized in that: Several support frames are arranged on both sides of the rotating table. The support frames include a pair of vertical plates arranged relatively parallel to each other, and a connecting block connected between the two vertical plates. The connecting block is placed on the rotating table surface. A V-shaped notch matching the bottom foot of the furnace body is arranged on the top of the vertical plate. The top of the vertical plate is higher than the V-shaped roller group. When the furnace body is placed on the support frame, the furnace body will not touch the V-shaped roller group. A pair of through grooves matching the pair of vertical plates is arranged on the rotating table. When the support frame is inverted on the pair of through grooves, the vertical plate is inserted into the through grooves and the connecting block is against the rotating table, the highest point of the support frame is not higher than the V-shaped roller group to ensure that the furnace tube moves under the guidance of the V-shaped roller group.

3. The semi-automatic loading and unloading equipment for furnace tubes according to claim 2, characterized in that: Several support frames are divided into two rows and symmetrically arranged on two sides of the rotating table surface.

4. The semi-automatic loading and unloading equipment for furnace tubes according to claim 3, characterized in that: The connecting block is in a square bar shape, two screw rods are screwed on the square bar connecting block, and a through hole is arranged on the rotating table matched with the screw rods.

5. The semi-automatic loading and unloading equipment for furnace tubes according to claim 1, 2, 3 or 4, characterized in that: The forward and backward moving mechanism includes a longitudinal track arranged on the lifting base of the lifting power mechanism, a longitudinal slider slidably arranged on the longitudinal track, the left and right moving base of the left and right fine-tuning moving mechanism is fixed on the longitudinal slider, the left and right fine-tuning moving mechanism includes a left and right moving base, a transverse track arranged on the left and right moving base, and a transverse slider slidably arranged on the transverse track, the rotating base of the angle fine-tuning rotating mechanism is fixed on the transverse slider, and the angle fine-tuning rotating mechanism includes a rotating base, a rotating shaft fixed in the middle of the rotating base, a rotating table rotatably arranged on the rotating shaft, and a plurality of rollers arranged under the rotating table, and the plurality of rollers are arranged around the rotating shaft.

6. The semi-automatic loading and unloading equipment for furnace tubes according to claim 1, 2, 3 or 4, characterized in that: A vehicle fixing frame is provided, which comprises two sleeves respectively fixed transversely at the front and rear ends of the vehicle, movable rods passing through the left and right ends of the sleeves, and a support rod with a support base connected to the movable rod. The support rod can be adjusted up and down and fixed on the movable rod.

7. The semi-automatic loading and unloading equipment for furnace tubes according to claim 5, characterized in that: A vehicle fixing frame is provided, which comprises two sleeves respectively fixed transversely at the front and rear ends of the vehicle, movable rods passing through the left and right ends of the sleeves, and a support rod with a support base connected to the movable rod. The support rod can be adjusted up and down and fixed on the movable rod.

8. The semi-automatic loading and unloading equipment for furnace tubes according to claim 1, 2, 3, 4 or 7, characterized in that: A roller brake rod connected to the side plate of the rotating table is arranged on the rotating table, an anti-rotation pin inserted between the floating plate floating out of the rotating table and the floating plate of the rotating base is arranged, an anti-left and right movement pin inserted between the floating plate floating out of the left and right movable base and the floating plate of the rotating base is arranged, and an anti-forward and backward movement pin inserted between the floating plate floating out of the left and right movable base and the floating plate of the lifting base is arranged.

9. The semi-automatic loading and unloading equipment for furnace tubes according to claim 5, characterized in that: A roller brake rod connected to the side plate of the rotating table is arranged on the rotating table, an anti-rotation pin inserted between the floating plate floating out of the rotating table and the floating plate of the rotating base is arranged, an anti-left and right movement pin inserted between the floating plate floating out of the left and right movable base and the floating plate of the rotating base is arranged, and an anti-forward and backward movement pin inserted between the floating plate floating out of the left and right movable base and the floating plate of the lifting base is arranged.

10. The semi-automatic loading and unloading equipment for furnace tubes according to claim 6, characterized in that: A roller brake rod connected to the side plate of the rotating table is arranged on the rotating table, an anti-rotation pin inserted between the floating plate floating out of the rotating table and the floating plate of the rotating base is arranged, an anti-left and right movement pin inserted between the floating plate floating out of the left and right movable base and the floating plate of the rotating base is arranged, and an anti-forward and backward movement pin inserted between the floating plate floating out of the left and right movable base and the floating plate of the lifting base is arranged.

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