Swing type lifting device and wafer detection equipment

Abstract

The invention discloses a swing type lifting device and wafer detection equipment, and relates to the technical field of printing equipment, and the swing type lifting device is provided with a base, an objective table and a swing type lifting module comprising a rotation driving mechanism, an eccentric swing mechanism and a reversing transmission mechanism. During use, the rotary driving mechanism drives the eccentric swing mechanism to perform eccentric rotary motion, and the eccentric swing mechanism drives the reversing transmission mechanism to drive the objective table to ascend and descend when swinging in a vertical plane. Lifting circulation of the objective table can be completed through one-way rotation of the driving mechanism so as to facilitate feeding and discharging, and position precision loss caused by motor steering is avoided. Meanwhile, the stroke of the objective table completely depends on the eccentric distance of the eccentric wheel, and additional safety devices such as mechanical limiting devices are not needed. The mechanism is clear in principle, simple in structure, low in manufacturing cost, large in load capacity, capable of achieving high lifting motion precision and capable of guaranteeing the stability of the lifting process under the heavy-load working condition.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to a swing-type lifting device and wafer detection equipment. Background Art

[0002] Wafer lifting technology is one of the key technologies in the semiconductor manufacturing process. With the rapid development of integrated circuits, the requirements for the accuracy, stability and reliability of wafer lifting mechanisms are getting higher and higher. Early wafer lifting technology mainly relied on simple mechanical structures, such as levers and sliders. Although these structures can achieve basic lifting functions, they have obvious deficiencies in accuracy and stability. With the advancement of technology, wafer lifting mechanisms have gradually introduced more complex mechanical designs, such as inclined block lifting mechanisms and lead screw rotary drive mechanisms. These designs have improved the performance of the lifting mechanism to a certain extent, but there are still some limitations.

[0003] At present, wafer lifting technology has developed to a stage that includes a variety of complex mechanisms and drive methods. For example, some lifting mechanisms use multiple inclined block lifting mechanisms to offset the horizontal force, thereby preventing the guide mechanism from being subjected to large forces, thereby ensuring the guidance accuracy and movement smoothness of the probe station lifting movement. In addition, some designs use screw drives to achieve wafer lifting. Although the transmission efficiency is high, the vertically placed screw mechanism occupies valuable vertical working space and has problems with poor self-locking and deformation under force. In addition, there are some designs that attempt to achieve wafer lifting and rotation by rotating the lifting platform, but these designs still face the problems of precision loss and affected synchronous belt transmission accuracy in actual applications.

[0004] Although the existing wafer lifting technology meets the needs of industrial applications to a certain extent, the existing wafer lifting mechanism cannot guarantee high-precision lifting movement under large load conditions. Summary of the invention

[0005] The main purpose of the present invention is to propose a swing-type lifting device and a wafer detection device, aiming to solve the technical problem that the wafer lifting mechanism in the prior art cannot ensure high-precision lifting movement under heavy load conditions.

[0006] To achieve the above-mentioned object, in a first aspect, the present invention provides a swing-type lifting device, comprising a base, a loading platform and a swing-type lifting module, wherein the swing-type lifting module comprises: A rotary drive mechanism, wherein the rotary drive mechanism is mounted on the base; an eccentric swing mechanism, wherein the output end of the rotary drive mechanism is eccentrically connected to the eccentric swing mechanism, and the rotary drive mechanism can drive the eccentric swing mechanism to rotate eccentrically so that the eccentric swing mechanism swings in a vertical plane; and A reversing transmission mechanism, wherein the reversing transmission mechanism is movably connected to the eccentric swing mechanism, and the loading platform is installed on the top of the reversing transmission mechanism; The reversing transmission mechanism can cooperate with the eccentric swing mechanism to drive the loading platform to move up and down when the rotary drive mechanism drives the eccentric swing mechanism to swing in the vertical plane.

[0007] In one embodiment, the eccentric swing mechanism comprises: an eccentric wheel, wherein the eccentric hole of the eccentric wheel is connected to the output shaft of the rotary drive mechanism; and A swing seat, wherein a mounting hole is formed near the bottom of the swing seat, the eccentric wheel is mounted in the mounting hole and rotatably cooperates with the hole wall of the mounting hole, and the top of the swing seat is movably connected with the reversing transmission mechanism; The rotary drive mechanism can drive the eccentric wheel to rotate eccentrically so that the swing seat swings in the vertical plane.

[0008] In one embodiment, the reversing transmission mechanism comprises: A connecting rod, the bottom of which is rotatably connected to the top of the swing seat via a latch, and the top of which is connected to the loading platform; and A guide member, the guide member is located above the base and connected to the base, and the guide member is provided with a first guide cylinder for the top of the connecting rod to pass through and to be slidably matched with the connecting rod; The connecting rod can cooperate with the swing seat to drive the loading platform to rise and fall when the rotary drive mechanism drives the eccentric wheel to rotate eccentrically and drives the swing seat to swing in the vertical plane.

[0009] In one embodiment, the reversing transmission mechanism comprises: A slide rail, the slide rail is horizontally mounted on the top of the swing seat; A connecting plate, a slider slidably matched with the slide rail is installed at the bottom of the connecting plate, and the loading platform is installed at the top of the connecting plate; When the rotary drive mechanism drives the eccentric wheel to rotate eccentrically to make the swing seat swing in the vertical plane, the slide rail on the top of the swing seat slidably cooperates with the slider to drive the loading platform to rise and fall through the connecting plate.

[0010] In one embodiment, there are multiple swing-type lifting modules, and the multiple swing-type lifting modules are distributed at intervals along the circumference of the loading platform, and the multiple swing-type lifting modules are distributed relatively to each other, the swing directions of the eccentric swing mechanisms in any two relatively arranged swing-type lifting modules are opposite, and the swing amplitudes of the eccentric swing mechanisms in all the swing-type lifting modules are consistent.

[0011] In one embodiment, the eccentric swing mechanism includes a sun wheel and a moon wheel, the sun wheel is located inside the moon wheel, and the sun wheel and the moon wheel are eccentrically arranged, the sun wheel is fixedly connected to the output shaft of the rotation drive mechanism, the reversing transmission mechanism is formed with a placement hole near the bottom thereof, the moon wheel is installed in the placement hole, and the moon wheel is rotationally matched with the inner wall of the placement hole, and the rotation drive mechanism can drive the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane.

[0012] In one embodiment, the reversing transmission mechanism comprises: A guide plate, the guide plate is located above the base and connected to the base, and a second guide cylinder is provided on the guide plate; A reversing transmission member, wherein the placement hole is formed near the bottom of the reversing transmission member, the top of the reversing transmission member passes through the second guide cylinder and slidably cooperates with the second guide cylinder, the top of the reversing transmission member is equipped with the loading platform, and the reversing transmission member can drive the sun wheel to drive the moon wheel to rotate eccentrically when the rotating drive mechanism drives the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane and drives the loading platform to rise and fall.

[0013] In one embodiment, the rotation drive mechanism comprises: A driving member, the driving member is mounted on the base; a first synchronous wheel, the first synchronous wheel being mounted on the output shaft of the driving member; A second synchronous wheel, wherein the second synchronous wheel is eccentrically connected to the eccentric swing mechanism via a rotating shaft; and A synchronous belt is sleeved on the outer circumference of the first synchronous wheel and the second synchronous wheel, and the driving member can drive the first synchronous wheel to rotate, so as to drive the eccentric swing mechanism to rotate eccentrically through the synchronous belt and the second synchronous wheel, so that the eccentric swing mechanism swings in the vertical plane.

[0014] In one embodiment, an outer diameter of the first synchronous wheel is smaller than an outer diameter of the second synchronous wheel.

[0015] Based on the same technical concept, in a second aspect, the present invention further proposes a wafer inspection device, which uses the swing-type lifting device described in the first aspect, and a wafer is placed on the stage.

[0016] The technical solution of the present invention is to set a base, a loading platform and a swing-type lifting module including a rotary drive mechanism, an eccentric swing mechanism and a reversing transmission mechanism. When in use, the rotary drive mechanism drives the eccentric swing mechanism to perform eccentric rotary motion, and when the eccentric swing mechanism swings in the vertical plane, it drives the reversing transmission mechanism to drive the loading platform to rise and fall. The driving mechanism can complete the loading platform lifting cycle by unidirectional rotation for loading and unloading, avoiding the loss of position accuracy caused by the motor steering. At the same time, the loading platform stroke is completely determined by the eccentricity of the eccentric wheel, and no additional mechanical limiter or other safety devices are required. The mechanism has a clear principle, a simple structure, a low manufacturing cost, a large load capacity, can achieve a high lifting motion accuracy, and can ensure the stability of the lifting process under heavy load conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0018] Figure 1 A schematic structural diagram of an embodiment of a swing type lifting device provided by the present invention; Figure 2 for Figure 1 A schematic diagram of the structure of the enlarged portion A of the example; Figure 3 A schematic structural diagram of another embodiment of the swing type lifting device provided by the present invention; Figure 4 for Figure 3 A schematic diagram of the structure of the enlarged portion B of the example; Figure 5 A schematic structural diagram of another embodiment of the swing type lifting device provided by the present invention; Figure 6 for Figure 5 A schematic diagram of the side structure of the example in FIG. Figure 7 for Figure 6 Schematic diagram of the CC cross-section structure of the example.

[0019] Description of Figure Numbers: 100, base; 200, stage; 300, swing-type lifting module; 310, rotary drive mechanism; 320, eccentric swing mechanism; 330, reversing transmission mechanism; 321, eccentric wheel; 322, swing seat; 323, mounting hole; 331, connecting rod; 332, guide member; 324, slide rail; 325, slider; 333, connecting member; 327, moon wheel; 328, placement hole; 334, guide plate; 335, reversing transmission member; 311, driving member; 312, first synchronous wheel; 313, second synchronous wheel; 314, synchronous belt; 400, wafer; 336, first guide cylinder; 337, second guide cylinder.

[0020] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0023] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0024] The invention provides a swing-type lifting device and wafer detection equipment.

[0025] See also Figures 1 to 7For ease of understanding, the swing-type lifting device includes a base 100, a loading platform 200 and a swing-type lifting module 300, wherein the swing-type lifting module 300 includes a rotary drive mechanism 310, an eccentric swing mechanism 320 and a reversing transmission mechanism 330, the rotary drive mechanism 310 is mounted on the base 100, the output end of the rotary drive mechanism 310 is eccentrically connected to the eccentric swing mechanism 320, the rotary drive mechanism 310 can drive the eccentric swing mechanism 320 to eccentrically rotate so that the eccentric swing mechanism 320 swings in the vertical plane, the reversing transmission mechanism 330 is movably connected to the eccentric swing mechanism 320, and the loading platform 200 is mounted on the top of the reversing transmission mechanism 330; the reversing transmission mechanism 330 can cooperate with the eccentric swing mechanism 320 to drive the loading platform 200 to rise and fall when the rotary drive mechanism 310 drives the eccentric swing mechanism 320 to swing in the vertical plane.

[0026] In this embodiment, by providing a base 100, a stage 200, and a swing-type lifting module 300 including a rotation drive mechanism 310, an eccentric swing mechanism 320, and a reversing transmission mechanism 330, when in use, the rotation drive mechanism 310 drives the eccentric swing mechanism 320 to perform eccentric rotational motion, so that when the eccentric swing mechanism 320 swings in the vertical plane, it drives the reversing transmission mechanism 330 to drive the stage 200 to rise and fall. The mechanism has a clear principle, a simple structure, and a low manufacturing cost.

[0027] It should be particularly and clearly stated that, in the present embodiment, the rotary drive mechanism 310 can complete the stage lifting cycle for loading and unloading by unidirectional rotation, thus avoiding the position accuracy loss caused by the rotation of the rotary drive mechanism 310 in conventional technology.

[0028] It should be noted that in this embodiment, the effective working positions of the stage 200, i.e., the loading and unloading positions and the wafer detection positions, are located at the two extreme positions of its travel. The travel of the stage 200 is completely determined by the eccentricity of the eccentric wheel, and no additional safety devices such as mechanical limiters are required.

[0029] It should be particularly and clearly stated that, in this embodiment, the four-bar mechanism composed of the eccentric swing mechanism and the reversing transmission mechanism has a self-locking condition, and can therefore withstand a larger workload when the stage is in the wafer detection position.

[0030] It should be particularly and clearly stated that, in this embodiment, when the stage is in the wafer inspection position, the transmission mechanism, in addition to providing vertical force to balance the working load, does not generate or only generates a small horizontal force, so as to prevent the guide mechanism from bearing a large load.

[0031] Of course, it should be clearly stated that the swing-type wafer 400 lifting mechanism illustrated in this embodiment is mainly used in the inspection process of the wafer 400 .

[0032] In some specific embodiments, the eccentric swing mechanism 320 includes an eccentric wheel 321 and a swing seat 322. The eccentric hole of the eccentric wheel 321 is connected to the output shaft of the rotary drive mechanism 310. The swing seat 322 is formed with a mounting hole 323 near its bottom. The eccentric wheel 321 is installed in the mounting hole 323 and rotates with the hole wall of the mounting hole 323. The top of the swing seat 322 is movably connected to the reversing transmission mechanism 330. The rotary drive mechanism 310 can drive the eccentric wheel 321 to rotate eccentrically so that the swing seat 322 swings in the vertical plane.

[0033] In this embodiment, the eccentric swing mechanism 320 is configured to include an eccentric wheel 321 and a swing seat 322. When in use, the eccentric wheel 321 is installed at the output end of the rotary drive mechanism 310, and a mounting hole 323 is provided near the bottom of the swing seat 322. The eccentric wheel 321 is installed in the mounting hole 323, and the eccentric wheel 321 is made to rotate in cooperation with the inner wall of the mounting hole 323. The rotary drive mechanism 310 is used to drive the eccentric wheel 321 to rotate eccentrically, so that the present invention can utilize the eccentric rotation of the eccentric wheel 321 to achieve the function of driving the swing seat 322 to swing and lift when in use.

[0034] In some specific embodiments, the reversing transmission mechanism 330 includes: A connecting rod 331, the bottom of which is rotatably connected to the top of the swing seat 322 via a latch; and A guide member 332, the guide member 332 is located above the base 100, and the guide member 332 is connected to the base 100, and a first guide cylinder 336 is provided on the guide member 332 to slide with the connecting rod 331; When the rotary drive mechanism 310 drives the eccentric wheel 321 to rotate eccentrically and drives the swing seat 322 to swing in the vertical plane, the connecting rod 331 can cooperate with the swing seat 322 to drive the loading platform 200 to rise and fall.

[0035] In this embodiment, a connecting rod 331 and a guide member 332 are provided. When in use, the connecting rod 331 is rotatably connected to the top of the swing seat 322 through a latch, and the connecting rod 331 is slidably matched with the first guide cylinder 336 of the guide member 332, so that the stage 200 drives the wafer 400 to move up and down. This can prevent the connecting rod 331 from swinging when following the swing seat 322 to move up and down, effectively solving the defect of the prior art that the swing affects the stability of the wafer 400 when driving the wafer 400 to move up and down.

[0036] It should be particularly and clearly stated that, in this embodiment, the guide member 332 and the base 100 are different parts of the same component, or two parts that are fixedly connected.

[0037] It should be particularly and clearly stated that in this embodiment, the connecting rod 331 and the first guide cylinder 336 of the guide member 332 are slidably matched to achieve the motion guiding function. The motion guiding function can also be achieved by selecting the form of a linear guide rail and a slider slidably matched. The use of multiple sets of guide mechanisms for joint guidance can improve the guidance accuracy.

[0038] In some improved embodiments, the example reversing transmission mechanism 330 may also include a slide rail 324, a slider 325 and a connecting member 333, wherein the slide rail 324 is installed on the top of the swing seat 322, the slider 325 slides with the slide rail 324, the bottom of the connecting member 333 is connected to the slider 325, and the top of the connecting member 333 is connected to the worktable 200; the connecting member 333 can drive the worktable 200 to rise and fall when the rotating drive mechanism 310 drives the eccentric wheel 321 to rotate eccentrically and drives the slider 325 to slide along the slide rail 324 in the vertical plane.

[0039] It should be particularly and clearly stated that, in this embodiment, the sliding cooperation between the slide rail 324 and the slider 325 only transmits force in the vertical direction.

[0040] In an exemplary embodiment, there are multiple swing-type lifting modules 300, and the multiple swing-type lifting modules 300 are distributed at intervals along the circumferential direction, and the multiple swing-type lifting modules 300 are distributed relatively to each other in pairs, and the swing directions of any two relatively arranged swing-type lifting modules 300 are opposite, and all the swing-type lifting modules 300 move synchronously.

[0041] It is understandable that the number of the swing-type lifting modules 300 can be set to multiple. In an exemplary embodiment, the number of the swing-type lifting modules 300 is set to four, and the four swing-type lifting modules 300 are distributed at intervals along the circumference and are distributed opposite to each other in pairs, and any two swing-type lifting modules 300 that are arranged opposite to each other have opposite swing directions, and all the swing-type lifting modules 300 move synchronously.

[0042] It should be particularly and clearly stated that, in this embodiment, the number of the swing-type lifting modules 300 is preferably four or six.

[0043] In this embodiment, by setting the number of swing-type lifting modules 300 to four, when in use, the four swing-type lifting modules 300 are spaced and distributed along the circumference, and are opposite to each other. When specifically driven, any two opposite swing-type lifting modules 300 are made to swing in opposite directions. The synchronous drive of multiple motors can play a role in motion guidance.

[0044] It should be clearly stated that in this embodiment, when the example swing-type lifting modules 300 are configured as four, the four swing-type lifting modules 300 should be distributed at intervals along the circumferential direction, and the four swing-type lifting modules 300 are arranged opposite to each other in pairs. During the lifting operation, the four swing-type lifting modules 300 are driven in a synchronous lifting manner. At the same time, the rotation direction of two swing-type lifting modules 300 in one group of the four swing-type lifting modules 300 is opposite to the rotation direction of the other group of swing-type lifting modules 300, that is, when the eccentric wheels 321 of the two swing-type lifting modules 300 arranged opposite to each other rotate clockwise, the eccentric wheels 321 of the other two swing-type lifting modules 300 rotate counterclockwise. At the same time, when in use, the eccentric wheel 321 is connected to the stage 200 through the sliding cooperation of the slide rail 324 and the slider 325. When the stage 200 carries the wafer 400, the horizontal force generated by the stage 200 can be completely eliminated under the cooperation of the slide rail 324 and the slider 325. Therefore, when the present invention is used, the horizontal force generated by the stage 200 can be completely eliminated, thereby ensuring the stability of the overall structure.

[0045] In addition, in this embodiment, the swing-type lifting module 300 is used to drive the lifting of the stage 200, so that the present invention can drive the eccentric wheel 321 to rotate in one direction when in use, thereby preventing the defects of the stage 200 being slightly deformed, the gap between the stage 200 and the wafer 400, and the precision of the stage 200 being affected due to the steering of the driving mechanism, thereby ensuring the precision of the swing-type wafer 400 lifting mechanism during operation. At the same time, since the stroke of the stage 200 can be directly determined by the eccentricity of the eccentric wheel 321, the present invention can be implemented without the need to set an additional limit device, thereby simplifying the structure and reducing the manufacturing cost.

[0046] In other improved embodiments, the eccentric swing mechanism 320 includes a sun wheel 329 and a moon wheel 327, the sun wheel 329 is located inside the moon wheel 327, and the two rotate in cooperation; the eccentric hole of the sun wheel 329 is fixedly connected to the output shaft of the rotary drive mechanism 310; the reversing transmission mechanism 330 has a placement hole 328 near its bottom, and the moon wheel 327 is installed in the placement hole 328, and the two rotate in cooperation. The rotary drive mechanism 310 can drive the sun wheel 329 to rotate eccentrically, so that the moon wheel 327 swings in the vertical plane.

[0047] In some preferred embodiments, the reversing transmission mechanism 330 includes: The guide plate 334 is located above the base 100, and the two are different parts of the same component, or two parts that are fixedly connected. The guide plate 334 is provided with a second guide cylinder 337; The reversing transmission member 335 has a placement hole 328 near the bottom thereof, the top of the reversing transmission member 335 is fixedly connected to the stage 200, the reversing transmission member 335 is slidably matched with the second guide cylinder 337, and the reversing transmission member 335 can drive the stage 200 to rise and fall when the rotating drive mechanism 310 drives the sun wheel 329 to rotate eccentrically and drives the moon wheel 327 to swing in the vertical plane.

[0048] In this embodiment, the guide plate 334 and the reversing transmission member 335 are provided, the guide plate 334 is connected to the base 100, and a second guide cylinder 337 is provided on the guide plate 334, so that the reversing transmission member 335 and the second guide cylinder 337 are slidably matched, so that when the present invention is implemented, the second guide cylinder 337 can be used to guide the reversing transmission member 335, thereby ensuring the stability of the overall structure.

[0049] It should be noted that, in this embodiment, the reversing transmission member 335 and the second guide cylinder 337 are slidably matched to realize the motion guiding function. The motion guiding function can also be realized in the form of a linear guide rail and a slider slidably matched. The use of multiple sets of guide mechanisms for joint guidance can improve the guidance accuracy.

[0050] In some specific embodiments, the rotation drive mechanism 310 includes: A driving member 311, the driving member 311 is installed on the base 100; A first synchronous wheel 312, the first synchronous wheel 312 is mounted on the output shaft of the driving member 311; A second synchronous wheel 313, the second synchronous wheel 313 is eccentrically connected to the eccentric swing mechanism 320 through a bearing; and The synchronous belt 314 is sleeved on the outer circumference of the first synchronous wheel 312 and the second synchronous wheel 313, and the driving member 311 can drive the second synchronous wheel 313 to rotate through the synchronous belt 314 sleeved on the first synchronous wheel 312, and drive the eccentric swing mechanism 320 to rotate eccentrically, so that the eccentric swing mechanism 320 swings in the vertical plane.

[0051] In this embodiment, by providing a driving member 311, a first synchronous wheel 312, a second synchronous wheel 313 and a synchronous belt 314, the present invention can utilize the driving member 311 to drive the transmission belt through the first synchronous wheel 312 to drive the second synchronous wheel 313 to rotate when in use, so that the overall rotation drive structure can maintain a high stability during the movement. It should be particularly and clearly stated that in this embodiment, the driving member 311 is preferably a driving motor.

[0052] Of course, the connecting shaft connected to the eccentric shaft illustrated in the present embodiment may also be a crankshaft or a crankshaft-like structure. By setting the connecting shaft connected to the eccentric shaft as a crankshaft or a crankshaft-like structure, the present invention can increase the eccentric motion amplitude of the eccentric wheel 321 during the process of driving the eccentric wheel 321 to rotate, thereby allowing the loading platform to have a larger stroke.

[0053] Based on the same technical concept, in a second aspect, the present invention further proposes a wafer inspection device, which uses the swing-type lifting device of the first aspect, and a wafer 400 is placed on the stage 200 .

[0054] The wafer 400 detection device provided by the present application adopts the wafer 400 lifting mechanism in the above embodiment, which can solve the technical problems of the wafer 400 lifting device having a complex system structure and high manufacturing and maintenance costs during operation. Compared with the prior art, the beneficial effects of the wafer 400 detection device provided by the present application are the same as the beneficial effects of the wafer 400 lifting mechanism provided by the above embodiment, and other technical features in the wafer 400 detection device are the same as the features disclosed in the previous embodiment, which will not be repeated here.

[0055] Of course, the wafer 400 lifting device illustrated in the present embodiment is not only used in the wafer 400 detection equipment, but can also be used in the transportation process of the wafer 400 photolithography process. If the wafer 400 lifting device illustrated in the present embodiment is applied to the wafer 400 photolithography process, the wafer 400 lifting device illustrated in the present embodiment can be replaced with the corresponding equipment in the wafer 400 photolithography process, which will not be elaborated here.

[0056] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A swing type lifting device, characterized in that: It includes a base, a loading platform and a swing-type lifting module, wherein the swing-type lifting module includes: A rotary drive mechanism, wherein the rotary drive mechanism is mounted on the base; an eccentric swing mechanism, wherein the output end of the rotary drive mechanism is eccentrically connected to the eccentric swing mechanism, and the rotary drive mechanism can drive the eccentric swing mechanism to rotate eccentrically so that the eccentric swing mechanism swings in a vertical plane; and A reversing transmission mechanism, wherein the reversing transmission mechanism is movably connected to the eccentric swing mechanism, and the loading platform is installed on the top of the reversing transmission mechanism; The reversing transmission mechanism can cooperate with the eccentric swing mechanism to drive the loading platform to move up and down when the rotary drive mechanism drives the eccentric swing mechanism to swing in the vertical plane.

2. The swing type lifting device according to claim 1, characterized in that: The eccentric swing mechanism comprises: an eccentric wheel, wherein the eccentric hole of the eccentric wheel is connected to the output shaft of the rotary drive mechanism; and A swing seat, wherein a mounting hole is formed near the bottom of the swing seat, the eccentric wheel is mounted in the mounting hole and rotatably cooperates with the hole wall of the mounting hole, and the top of the swing seat is movably connected with the reversing transmission mechanism; The rotary drive mechanism can drive the eccentric wheel to rotate eccentrically so that the swing seat swings in the vertical plane.

3. The swing type lifting device according to claim 2, characterized in that: The reversing transmission mechanism comprises: A connecting rod, the bottom of which is rotatably connected to the top of the swing seat via a latch, and the top of which is connected to the loading platform; and A guide member, the guide member is located above the base and connected to the base, and the guide member is provided with a first guide cylinder for the top of the connecting rod to pass through and to be slidably matched with the connecting rod; The connecting rod can cooperate with the swing seat to drive the loading platform to rise and fall when the rotary drive mechanism drives the eccentric wheel to rotate eccentrically and drives the swing seat to swing in the vertical plane.

4. The swing type lifting device according to claim 2, characterized in that: The reversing transmission mechanism comprises: A slide rail, the slide rail is horizontally mounted on the top of the swing seat; A connecting plate, a slider slidably matched with the slide rail is installed at the bottom of the connecting plate, and the loading platform is installed at the top of the connecting plate; When the rotary drive mechanism drives the eccentric wheel to rotate eccentrically to make the swing seat swing in the vertical plane, the slide rail on the top of the swing seat slidably cooperates with the slider to drive the loading platform to rise and fall through the connecting plate.

5. The swing type lifting device according to claim 4, characterized in that: There are multiple swing-type lifting modules, which are spaced apart along the circumference of the loading platform, and are relatively distributed in pairs. The swing directions of the eccentric swing mechanisms in any two relatively arranged swing-type lifting modules are opposite, and the swing amplitudes of the eccentric swing mechanisms in all the swing-type lifting modules are consistent.

6. The swing type lifting device according to claim 1, characterized in that: The eccentric swing mechanism includes a sun wheel and a moon wheel, the sun wheel is located inside the moon wheel, and the sun wheel and the moon wheel are eccentrically arranged, the sun wheel is fixedly connected to the output shaft of the rotation drive mechanism, the reversing transmission mechanism is formed with a placement hole near the bottom thereof, the moon wheel is installed in the placement hole, and the moon wheel is rotationally matched with the inner wall of the placement hole, the rotation drive mechanism can drive the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane.

7. The swing type lifting device according to claim 6, characterized in that: The reversing transmission mechanism comprises: A guide plate, the guide plate is located above the base and connected to the base, and a second guide cylinder is provided on the guide plate; A reversing transmission member, wherein the placement hole is formed near the bottom of the reversing transmission member, the top of the reversing transmission member passes through the second guide cylinder and slidably cooperates with the second guide cylinder, the top of the reversing transmission member is equipped with the loading platform, and the reversing transmission member can drive the sun wheel to drive the moon wheel to rotate eccentrically when the rotating drive mechanism drives the sun wheel to drive the moon wheel to rotate eccentrically, so that the moon wheel swings in the vertical plane and drives the loading platform to rise and fall.

8. The swing type lifting device according to any one of claims 1 to 7, characterized in that: The rotary drive mechanism comprises: A driving member, the driving member is mounted on the base; a first synchronous wheel, the first synchronous wheel being mounted on the output shaft of the driving member; A second synchronous wheel, wherein the second synchronous wheel is eccentrically connected to the eccentric swing mechanism via a rotating shaft; and A synchronous belt is sleeved on the outer circumference of the first synchronous wheel and the second synchronous wheel, and the driving member can drive the first synchronous wheel to rotate, so as to drive the eccentric swing mechanism to rotate eccentrically through the synchronous belt and the second synchronous wheel, so that the eccentric swing mechanism swings in the vertical plane.

9. The swing type lifting device according to claim 8, characterized in that: The outer diameter of the first synchronous wheel is smaller than the outer diameter of the second synchronous wheel.

10. A wafer inspection device, characterized in that: The swing-type lifting device as described in any one of claims 1 to 9 is applied, and a wafer is placed on the stage.

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