Layout correction method, storage medium and storage terminal

Abstract

The invention discloses a layout correction method, a storage medium and a storage terminal.The layout correction method comprises the steps that a to-be-corrected layout is provided, and the to-be-corrected layout comprises a plurality of to-be-corrected graphs; obtaining a target to-be-corrected graph based on the plurality of to-be-corrected graphs; obtaining a plurality of environment areas corresponding to the target to-be-corrected graphs, wherein one target to-be-corrected graph is located in one environment area; classifying the plurality of environment areas, wherein the to-be-corrected graphs in the same type of environment areas are the same; and sequentially performing optical proximity effect correction on the target to-be-corrected graphs in the plurality of types of environmental areas. According to the layout correction method, the correction time is shortened.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a layout correction method, a storage medium and a storage terminal. Background Art

[0002] The process of the model-based Optical Proximity Correction (OPC) method is generally to reset the target, insert a sub-resolution auxiliary pattern (SRAF), segment the edge of the target pattern, and offset the segmentation according to the results of the lithography simulation until the simulation results converge.

[0003] The longest time spent in the optical proximity effect correction process is the lithography simulation. As the feature size decreases, the time spent on lithography simulation increases dramatically, resulting in a sharp increase in the time spent on optical proximity effect correction.

[0004] Therefore, shortening the time required for optical proximity effect correction has become an urgent issue to be addressed. Summary of the invention

[0005] The technical problem solved by the present invention is to provide a layout correction method, a storage medium and a storage terminal to shorten the time consumption of optical proximity effect correction.

[0006] In order to solve the above technical problems, the technical solution of the present invention provides a layout correction method, including: providing a layout to be corrected, wherein the layout to be corrected includes a plurality of graphics to be corrected; obtaining a target graphic to be corrected based on the plurality of graphics to be corrected; obtaining a plurality of environmental areas corresponding to the target graphics to be corrected, wherein one target graphic to be corrected is located in one environmental area; classifying the plurality of environmental areas, wherein the graphics to be corrected in the same type of environmental areas are the same; and sequentially performing optical proximity effect correction on the target graphics to be corrected in the plurality of types of environmental areas.

[0007] Optionally, obtaining several environmental areas corresponding to the target graphic to be corrected includes: obtaining a contour frame based on the contour of the target graphic to be corrected, at least two contour lines of the contour of the target graphic to be corrected coincide with the edges of the contour frame; obtaining an environmental area, the contour frame being located within the environmental area.

[0008] Optionally, the center point of the environment area coincides with the center point of the outline frame, and the length of a line from the center point of the environment area to an edge of the environment area is greater than the length of a line from the center point of the outline frame to an edge of the outline frame.

[0009] Optionally, the shape of the environmental area includes a square.

[0010] Optionally, the areas of several environmental areas are the same; the side lengths of several environmental areas are the same.

[0011] Optionally, the shape of the outline frame includes a rectangle.

[0012] Optionally, the environmental area includes a target graphic to be corrected and other graphics to be corrected around the target graphic to be corrected; the graphics to be corrected in the same type of environmental area are the same, including: one or both of rotating the environmental area at a preset angle and mirroring the environmental area, and the graphics to be corrected in the environmental area after one or both of the rotation and mirroring operations overlap.

[0013] Optionally, the preset angle ranges from 0 to 360 degrees.

[0014] Optionally, the graphics to be corrected in the same type of environmental areas are the same, including: the shapes and sizes of the target graphics to be corrected in the same type of environmental areas are the same, the shapes and sizes of other graphics to be corrected around the target graphics to be corrected are the same, and the distances between the target graphics to be corrected and other surrounding graphics to be corrected are the same.

[0015] Optionally, optical proximity effect correction is performed on the target graphics to be corrected in several categories of environmental areas in sequence, including: obtaining the number of environmental areas in each category; sorting the several categories of environmental areas according to the size relationship of the numbers; and optical proximity effect correction is performed on the target graphics to be corrected in each category of environmental areas in order of number from large to small.

[0016] Optionally, optical proximity effect correction is performed on the target graphics to be corrected in each type of environmental area, including: performing optical proximity effect correction on the target graphics to be corrected in an environmental area in a category to obtain a target correction graphic; replacing the target graphics to be corrected in other environmental areas in a category with the target correction graphic, thereby completing the optical proximity effect correction on the target graphics to be corrected in each type of environmental area.

[0017] Optionally, sequentially performing optical proximity effect correction on several types of target graphics to be corrected in the environmental area further includes: performing optical proximity effect correction on other graphics to be corrected around the target graphics to be corrected in the environmental area.

[0018] Optionally, optical proximity effect correction is performed on other graphics to be corrected around the target graphics to be corrected in the environmental area, including: performing optical proximity effect correction on the graphics to be corrected in an environmental area in a category to obtain a corrected graphic; replacing the corrected graphic with the graphics to be corrected in other environmental areas in a category, thereby completing the optical proximity effect correction on the graphics to be corrected in each type of environmental area.

[0019] Optionally, if the number of environmental areas in a category is less than a preset value, there is no need to sort the environmental areas in the category.

[0020] Optionally, the method further includes: performing optical proximity effect correction on the to-be-corrected layout outside several types of environmental areas.

[0021] Correspondingly, the technical solution of the present invention also provides a storage medium on which computer instructions are stored, and the steps of the above method are executed when the computer instructions are executed.

[0022] Correspondingly, the technical solution of the present invention is a storage terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and the processor executes the steps of the above method when executing the computer instructions.

[0023] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0024] The layout correction method of the present invention obtains several environmental areas corresponding to the target graphics to be corrected, one of the target graphics to be corrected is located in one of the environmental areas, and then the several environmental areas are classified. The graphics to be corrected in the same type of environmental areas are the same, and then the optical proximity effect correction is performed on the target graphics to be corrected in the several types of environmental areas in sequence. The correction method classifies the environmental areas, and performs optical proximity effect correction on the target graphics to be corrected in the same type of environmental areas, which can save correction time and improve the efficiency of optical proximity effect correction. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figures 1 to 3 is a schematic flow chart of a layout correction method in an embodiment of the present invention;

[0026] Figures 4 to 7 It is a structural schematic diagram of the graphic correction process in an embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned objects, features and beneficial effects of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0028] Figures 1 to 3 It is a flow chart of the layout correction method in an embodiment of the present invention.

[0029] Please refer to Figure 1 , the layout correction method comprises:

[0030] Step S10: providing a layout to be corrected, wherein the layout to be corrected includes a plurality of graphics to be corrected;

[0031] Step S20: obtaining a target graphic to be corrected based on the plurality of graphics to be corrected;

[0032] Step S30: acquiring a plurality of environmental regions corresponding to the target graphics to be corrected, wherein one target graphics to be corrected is located in one of the environmental regions;

[0033] Step S40: classifying a plurality of environmental areas, wherein the graphics to be corrected in the environmental areas of the same category are the same;

[0034] Step S50: performing optical proximity effect correction on several types of target graphics to be corrected in the environment area in sequence.

[0035] The layout correction method obtains several environmental areas corresponding to the target graphics to be corrected, one of the target graphics to be corrected is located in one of the environmental areas, and then classifies the several environmental areas. The graphics to be corrected in the same type of environmental areas are the same, and then the optical proximity effect correction is performed on the target graphics to be corrected in the several types of environmental areas in sequence. The correction method classifies the environmental areas and performs optical proximity effect correction on the target graphics to be corrected in the same type of environmental areas, which can save correction time and improve the efficiency of optical proximity effect correction.

[0036] Next, please combine Figures 4 to 7 Each step is analyzed and explained. Figures 4 to 7 It is a structural schematic diagram of the graphic correction process in an embodiment of the present invention.

[0037] Please combine Figure 4 Continue to refer Figure 1 , executing step S10: providing a layout 100 to be corrected, wherein the layout 100 to be corrected includes a plurality of graphics 101 to be corrected; executing step S20: acquiring a target graphic 102 to be corrected based on the plurality of graphics 101 to be corrected.

[0038] The to-be-corrected layout 100 is a mask design pattern that has not been corrected for optical proximity effect, and the pattern of the to-be-corrected layout 100 after being corrected for optical proximity effect is a pattern that needs to be transferred to the mask.

[0039] The plurality of graphics to be corrected 101 include many repeated or similar graphics to be corrected. The target graphic to be corrected 102 is one of the plurality of graphics to be corrected 101. When acquiring the target graphic to be corrected 102, the target graphic to be corrected 102 traverses the plurality of graphics to be corrected 101.

[0040] Please combine Figure 5 and Figure 6 Continue to refer Figure 1, executing step S30: acquiring a plurality of environment regions 104 corresponding to the target graphic to be corrected 102 , wherein one target graphic to be corrected 102 is located in one of the environment regions 104 .

[0041] Please refer to Figure 5 and Figure 6 , obtaining a plurality of environmental regions 104 corresponding to the target graphic to be corrected 102, including: obtaining a contour frame 103 according to the contour of the target graphic to be corrected 102, wherein at least two contour lines of the contour lines of the target graphic to be corrected 102 coincide with the edges of the contour frame 103; obtaining the environmental region 104, wherein the contour frame 103 is located within the environmental region 104.

[0042] In this embodiment, the center point of the environment area 104 coincides with the center point of the outline frame 103 , and the length of the line from the center point of the environment area 104 to the edge of the environment area 104 is greater than the length of the line from the center point of the outline frame 103 to the edge of the outline frame 103 .

[0043] In this embodiment, the shape of the outline frame 103 includes a rectangle. The outline frame 103 is a rectangular figure generated based on the outline of the target figure to be corrected 102.

[0044] In this embodiment, the shape of the environment area 104 includes a square, and the side length of the square is greater than the length and width of the outline frame 103 .

[0045] In this embodiment, the distance between the center point of the environment area 104 and the edge of the environment area 104 is less than or equal to 1.5 micrometers. The area of ​​the environment area 104 should not be too large, so as not to affect the subsequent correction effect of the target pattern to be corrected 102.

[0046] The contour frame 103 is located in the environment area 104, that is, the area of ​​the environment area 104 is larger than the area of ​​the area where the contour frame 103 is located. In this embodiment, the environment area 104 includes the target to-be-corrected graphic 102 and other to-be-corrected graphics 101 around the target to-be-corrected graphic 102.

[0047] A plurality of environment regions 104 corresponding to the target graphics to be corrected 102 are obtained, that is, a plurality of graphics to be corrected 101 are traversed and respectively used as target graphics to be corrected, and an environment region 104 corresponding to each target graphics to be corrected is obtained.

[0048] In this embodiment, the areas of the plurality of environment regions 104 are the same; the side lengths of the plurality of environment regions 104 are the same, so as to facilitate the subsequent classification of the plurality of environment regions 104 .

[0049] Please continue to refer to Figure 1 , executing step S40: classifying a plurality of environmental regions 104 , wherein the graphics 101 to be corrected in the environmental regions 104 of the same category are the same.

[0050] In this embodiment, the graphics to be corrected 101 in the same type of environmental area 104 are the same, including: the shapes and sizes of the target graphics to be corrected 102 in the same type of environmental area 104 are the same, the shapes and sizes of other graphics to be corrected 101 around each target graphics to be corrected 102 are the same, and the distances between each target graphics to be corrected 102 and other graphics to be corrected 101 around them are the same.

[0051] In this embodiment, the graphics to be corrected in the same type of environment areas 104 are the same, and also include: one or both of rotating the environment area 104 at a preset angle and mirroring the environment area 104, and the graphics to be corrected 101 in the environment area 104 after one or both of the rotation and mirroring operations overlap.

[0052] That is, the environment area 104 is rotated at a preset angle alone, or the environment area 104 is mirrored alone, or the environment area 104 is rotated at a preset angle and mirrored at the same time.

[0053] In this embodiment, the preset angle ranges from 0 to 360 degrees.

[0054] Preferably, the environment area 104 is rotated by 90 degrees, 180 degrees or 270 degrees.

[0055] The graphics to be corrected 101 in the rotated environment area 104 overlap, including: fixing one environment area 104 and rotating other environment areas 104; performing an XOR operation on the rotated environment area 104 and the fixed environment area 104, and when the output value of the XOR operation is blank, it means that the rotated environment area 104 overlaps with the fixed environment area 104, the graphics to be corrected 101 in the rotated environment area 104 overlaps, and the rotated environment area 104 and the fixed environment area 104 are the same type of environment areas.

[0056] The XOR operation includes: overlapping the rotated environmental area 104 with the fixed environmental area 104, and comparing the difference between the rotated environmental area 104 and the fixed environmental area 104; if there is no difference between the rotated environmental area 104 and the fixed environmental area 104, a blank value is output to determine that the rotated environmental area 104 and the fixed environmental area 104 overlap; otherwise, a difference value is output to determine that the rotated environmental area 104 and the fixed environmental area 104 do not overlap, and the rotated environmental area 104 and the fixed environmental area 104 are different types of environmental areas.

[0057] Please continue to refer to Figure 1 , executing step S50: performing optical proximity effect correction on the target graphics to be corrected 102 in the plurality of types of the environment areas 104 in sequence.

[0058] Please refer to Figure 2 In this embodiment, the optical proximity effect correction is performed on the target graphics to be corrected 102 in the several types of the environment areas 104 in sequence, including:

[0059] Step S501: obtaining the number of environmental regions 104 in each category;

[0060] Step S502: sorting the plurality of types of environmental areas 104 according to the magnitude relationship of the numbers;

[0061] Step S503: performing optical proximity effect correction on the target graphics to be corrected in each type of environment area 104 in descending order of number.

[0062] Execute step S501: obtain the number of environmental areas 104 in each category.

[0063] That is, the number of times a type of environment area 104 is repeated in the layout to be corrected is obtained.

[0064] Execute step S502: sort the multiple types of environmental areas 104 according to the size relationship of the numbers.

[0065] That is, the several types of environmental regions 104 are sorted according to the magnitude relationship of the number of times a type of environmental region 104 is repeated in the to-be-corrected layout.

[0066] In this embodiment, if the number of environmental areas 104 in a category is less than a preset value, there is no need to sort the environmental areas in the category.

[0067] In this embodiment, the range of the preset value is less than 4, that is, if a type of environmental area 104 is repeated less than 4 times in the layout to be corrected, there is no need to sort the environmental areas 104 of the type, that is, the optical proximity effect correction is not performed on the environmental areas 104 of the type according to the category.

[0068] Execute step S503: perform optical proximity effect correction on the target graphics to be corrected in each type of environment area 104 in descending order of number.

[0069] That is, the optical proximity effect correction is performed on a type of environmental area 104 with a greater number of repetitions each time until the optical proximity effect correction is completed on all types of environmental areas 104 .

[0070] Please refer to Figure 3 In this embodiment, the target to-be-corrected graphic 102 in each type of environment area 104 is corrected for optical proximity effect, including:

[0071] Step S5031: performing optical proximity effect correction on a target to-be-corrected graphic 102 in an environment area 104 in a category to obtain a target corrected graphic;

[0072] Step S5032: replacing the target graphics to be corrected 102 in other environmental areas 104 in one category with the target correction graphic, and completing the optical proximity effect correction of the target graphics to be corrected 102 in each type of environmental area 104.

[0073] Please combine Figure 7 Continue to refer Figure 3 , execute step S5031: perform optical proximity effect correction on the target to-be-corrected graphic 102 in an environmental area 104 in a category to obtain a target correction graphic 110; execute step S5032: replace the target to-be-corrected graphic 102 in other environmental areas 104 in a category with the target correction graphic, and complete the optical proximity effect correction on the target to-be-corrected graphic 102 in each type of environmental area 104.

[0074] That is, in the same type of environmental areas 104, optical proximity effect correction is performed on the target graphics to be corrected 102 in only one environmental area 104, and then the target correction graphic 110 is obtained to directly replace the target graphics to be corrected 102 in other environmental areas 104 in the category, thereby saving correction time and improving the efficiency of optical proximity effect correction.

[0075] In this embodiment, optical proximity effect correction is performed on target graphics to be corrected 102 in several types of the environmental areas 104 in sequence, and it also includes: performing optical proximity effect correction on other graphics to be corrected 101 around the target graphics to be corrected 102 in the environmental area 104 to obtain a corrected graphic 111.

[0076] In this embodiment, optical proximity effect correction is performed on other graphics to be corrected 101 around the target graphics to be corrected 102 in the environmental area 104, including: performing optical proximity effect correction on the graphics to be corrected 101 in an environmental area 104 in a category to obtain a corrected graphic 111; replacing the graphics to be corrected 101 in other environmental areas 104 in a category with the corrected graphic 111, and completing the optical proximity effect correction of the graphics to be corrected 101 in each type of environmental area 104.

[0077] The method performs optical proximity effect correction on a target graphic to be corrected 102 in an environment area 104 of a category and other graphics to be corrected 101 around the target graphic to be corrected 102, including: providing a model to be corrected; performing simulated exposure on the environment area 104 according to the model to be corrected to obtain a simulated exposure area; obtaining an edge placement error between the simulated exposure area and a target area, wherein the target area is an area in a target layout corresponding to the environment area 104, and the target layout is a photolithography layout designed to be formed on a wafer surface; cutting the contours of the target graphic to be corrected 102 and other graphics to be corrected 101; moving the contour line segments after cutting according to the edge placement error; continuing to perform simulated exposure on the target graphic to be corrected 102 and other graphics to be corrected 101 after the contour line segments are moved, until the edge placement error is within a preset range, obtaining a target correction graphic 110 corresponding to the target graphic to be corrected 102, and a correction graphic 111 corresponding to the graphic to be corrected 101, and completing the optical proximity effect correction of the environment area 104.

[0078] In this embodiment, the layout correction method further includes: performing optical proximity effect correction on the layout to be corrected outside the several types of environmental regions 104 .

[0079] In this embodiment, the optical proximity effect correction is performed one by one on the target graphics to be corrected 102 corresponding to the number of the environmental regions 104 being less than the preset value.

[0080] Accordingly, an embodiment of the present invention further provides a storage medium on which computer instructions are stored, and the computer instructions are executed as follows when they are executed: Figures 1 to 3 The steps of the method.

[0081] Accordingly, an embodiment of the present invention further provides a storage terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the following is performed: Figures 1 to 3 The steps of the method.

[0082] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A layout correction method, characterized in that: include: Providing a layout to be revised, wherein the layout to be revised includes a plurality of graphics to be revised; Acquire a target graphic to be corrected based on the plurality of graphics to be corrected; Acquire a plurality of environmental regions corresponding to the target graphics to be corrected, wherein one target graphics to be corrected is located in one of the environmental regions; A plurality of environmental areas are classified, and the graphics to be corrected in the same type of environmental areas are the same; and optical proximity effect correction is performed on the target graphics to be corrected in the plurality of types of environmental areas in turn.

2. The layout correction method according to claim 1, characterized in that: Acquiring a plurality of environmental regions corresponding to the target figure to be corrected, comprising: acquiring a contour frame according to the contour of the target figure to be corrected, wherein at least two contour lines of the contour of the target figure to be corrected coincide with the edges of the contour frame; and acquiring an environmental region, wherein the contour frame is located within the environmental region.

3. The layout correction method according to claim 2, characterized in that: The center point of the environment area coincides with the center point of the outline frame, and the length of the line from the center point of the environment area to the edge of the environment area is greater than the length of the line from the center point of the outline frame to the edge of the outline frame.

4. The layout correction method according to claim 3, characterized in that: The shape of the environment area includes a square.

5. The layout correction method according to claim 2, characterized in that: The areas of several of the environmental areas are the same; the side lengths of several of the environmental areas are the same.

6. The layout correction method according to claim 2, characterized in that: The shape of the outline frame includes a rectangle.

7. The layout correction method according to claim 1, characterized in that: The environment area includes the target figure to be corrected and other figures to be corrected around the target figure to be corrected; The graphics to be corrected in the same type of environment areas are the same, including: one or both of rotating the environment area at a preset angle and mirroring the environment area, and the graphics to be corrected in the environment area after one or both of the rotation and mirroring operations overlap.

8. The layout correction method according to claim 7, characterized in that: The preset angle ranges from 0 to 360 degrees.

9. The layout correction method according to claim 7, characterized in that: The graphics to be corrected in the same type of environmental areas are the same, including: the shapes and sizes of the target graphics to be corrected in the same type of environmental areas are the same, the shapes and sizes of other graphics to be corrected around the target graphics to be corrected are the same, and the distances between the target graphics to be corrected and other surrounding graphics to be corrected are the same.

10. The layout correction method according to claim 1, characterized in that: Optical proximity effect correction is sequentially performed on target graphics to be corrected in several types of environmental areas, including: obtaining the number of environmental areas in each type; sorting the several types of environmental areas according to the size relationship of the numbers; and optical proximity effect correction is performed on the target graphics to be corrected in each type of environmental area in descending order of the number.

11. The layout correction method according to claim 10, characterized in that: The optical proximity effect correction is performed on the target graphics to be corrected in each type of environmental area, including: performing optical proximity effect correction on the target graphics to be corrected in one environmental area in one category to obtain a target correction graphic; replacing the target graphics to be corrected in other environmental areas in one category with the target correction graphic to complete the optical proximity effect correction on the target graphics to be corrected in each type of environmental area.

12. The layout correction method according to claim 7, characterized in that: The method sequentially performs optical proximity effect correction on several types of target graphics to be corrected in the environmental area, and further includes: performing optical proximity effect correction on other graphics to be corrected around the target graphics to be corrected in the environmental area.

13. The layout correction method according to claim 12, characterized in that: Optical proximity effect correction is performed on other graphics to be corrected around the target graphics to be corrected in the environmental area, including: performing optical proximity effect correction on the graphics to be corrected in an environmental area of ​​a category to obtain a corrected graphic; replacing the corrected graphic with the graphics to be corrected in other environmental areas of a category, and completing the optical proximity effect correction of the graphics to be corrected in each type of environmental area.

14. The layout correction method according to claim 10, characterized in that: If the number of environmental areas in a category is less than a preset value, there is no need to sort the environmental areas in the category.

15. The layout correction method according to claim 1, characterized in that: Also includes: Optical proximity effect correction is performed on the to-be-corrected layout outside of several types of environmental regions.

16. A storage medium having computer instructions stored thereon, characterized in that: When the computer instructions are executed, the steps of the method according to any one of claims 1 to 15 are executed.

17. A storage terminal, comprising a memory and a processor, wherein the memory stores computer instructions that can be run on the processor, characterized in that: When the processor runs the computer instructions, the steps of the method according to any one of claims 1 to 15 are performed.

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