Die splitting jig and method for nanoimprint

Abstract

The mold splitting jig comprises an upper mold plate and a lower mold plate, a rotating shaft is installed on the lower mold plate, the rotating shaft is connected with the lower mold plate through a spring, and the rotating shaft can shift transversely; the upper die plate is rotationally connected with the lower die plate through a rotating shaft, and the upper die plate can turn over with the rotating shaft as the axis. The upper template and the lower template are respectively provided with an adsorption assembly, and the adsorption assemblies are used for adsorbing the imprinting template or the wafer. According to the invention, the mold splitting jig is adopted to separate the imprinting template from the wafer, and during mold splitting, the adsorption assembly is adopted to adsorb the imprinting template and the wafer, so that the wafer is prevented from being damaged. And meanwhile, the transverse force is counteracted by using the spring, the micro-nano structure pattern on the wafer is prevented from being pulled to deform by transverse displacement, and the device is simple in structure, low in cost and suitable for popularization.

Description

Technical Field

[0001] The present invention belongs to the technical field of nanoimprinting, and in particular relates to a mold splitting jig and method for nanoimprinting. Background Art

[0002] With the continuous development and progress of micro-nano processing technology, nanoimprint technology has broken through the difficulties of traditional lithography in reducing feature size. It has the characteristics of high resolution, low cost and high yield, and is widely used in semiconductor manufacturing, MEMS, biochips and other fields involving micro-nano processing.

[0003] The imprinting process mainly includes the following steps: (1) coating an imprinting adhesive on a wafer, (2) using an imprinting template having a micro-nano structure pattern to contact the wafer, (3) curing the imprinting adhesive, and (4) separating the imprinting template from the wafer.

[0004] The existing mold separation method often uses manual mold separation, where the staff directly separates the imprint template and the wafer with their hands or inserts a cone between the two and then separates them. However, it has the following problems:

[0005] First, since the wafer is very thin, it is easy to damage the wafer during the manual separation process, resulting in fragments and reducing product yield.

[0006] Second, the micro-nanostructure pattern between the imprint template and the wafer is easily damaged. Summary of the invention

[0007] In order to solve the above technical problems, the present invention proposes a mold separation fixture and method for nanoimprinting.

[0008] In order to achieve the above object, the technical solution of the present invention is as follows:

[0009] On the one hand, the present invention discloses a mold splitting jig for nanoimprinting, comprising: an upper mold plate and a lower mold plate, a rotating shaft is installed on the lower mold plate, the rotating shaft is connected to the lower mold plate through a spring, and the rotating shaft can be laterally offset;

[0010] The upper template is rotatably connected to the lower template via a rotating shaft, and the upper template can be turned over with the rotating shaft as the axis;

[0011] Adsorption components are respectively arranged on the upper template and the lower template, and the adsorption components are used for adsorbing the imprinting template or the wafer.

[0012] Based on the above technical solution, the following improvements can be made:

[0013] As a preferred solution, two mounting holes arranged opposite to each other are provided on the lower template.

[0014] As a preferred solution, the rotating shaft is inserted into the two mounting holes.

[0015] As a preferred solution, the rotating shaft is connected to the upper template through a plurality of groups of spacing adjustment components, and the spacing adjustment components are used to adjust the original spacing between the upper template and the lower template.

[0016] As a preferred solution, each set of spacing adjustment components includes: a lower fixing seat, an axle pin, an upper fixing seat and a locking member;

[0017] The ring portion of the lower fixed seat is sleeved on the rotating shaft;

[0018] The shaft pin passes through the through hole of the upper fixing seat and is connected with the lower fixing seat;

[0019] The locking piece is used to lock the shaft pin on the upper fixing seat;

[0020] The connecting portion of the upper fixing seat is connected to the upper template.

[0021] As a preferred solution, an opening mechanism is installed on the upper template or the lower template, and the opening mechanism is used to open the upper template and the lower template by a certain gap.

[0022] As a preferred solution, a handle is installed on the upper template or the lower template.

[0023] In addition, in another aspect, the present invention further discloses a mold splitting method for nanoimprinting, which uses any of the above mold splitting devices to perform mold splitting, comprising:

[0024] Step S1: placing the cured imprint template and the wafer together on the lower template, and closing the upper template;

[0025] Step S2: the adsorption components on the upper template and the lower template adsorb the wafer and the imprint template respectively;

[0026] Step S3: When the mold is separated, the spring is used to drive the rotating shaft to shift laterally to offset the lateral displacement deviation of the micro-nano structure pattern between the imprint template and the wafer.

[0027] 9. The mold separation method according to claim 8, characterized in that step S3 comprises:

[0028] Step S3.1: Use the push-open mechanism to slowly push open the upper template and the lower template to a certain gap;

[0029] The spring is used to drive the rotating shaft to shift laterally, thereby offsetting the lateral displacement deviation of the micro-nano structure pattern between the imprint template and the wafer;

[0030] Step S3.2: Open the upper template.

[0031] The present invention discloses a mold splitting jig and method for nanoimprinting, which has the following beneficial effects:

[0032] First, a mold separation jig is used to separate the imprint template from the wafer. During mold separation, an adsorption component is used to adsorb the imprint template and wafer to avoid wafer damage. At the same time, a spring is used to offset the lateral force to prevent the micro-nano structure pattern on the wafer from being deformed by lateral displacement.

[0033] Second, it has a simple structure, low cost and is suitable for promotion. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0035] Figure 1 This is one of the structural schematic diagrams of the mold splitting fixture provided in an embodiment of the present invention.

[0036] Figure 2 The second structural schematic diagram of the mold splitting fixture provided in the embodiment of the present invention.

[0037] Figure 3 A cross-sectional view of a lower mold plate (showing the spring) provided for an embodiment of the present invention.

[0038] Figure 4 A schematic diagram of the structure of a spacing adjustment component provided in an embodiment of the present invention.

[0039] Wherein: 1-upper template, 2-lower template, 21-mounting hole, 3-rotating shaft, 4-spring, 5-imprinting template, 6-wafer, 7-spacing adjustment assembly, 71-lower fixing seat, 72-axis pin, 73-upper fixing seat, 74-locking piece, 8-opening mechanism, 9-handle. DETAILED DESCRIPTION

[0040] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] In addition, the expression of “comprising” an element is an “open” expression, which merely means that corresponding components or steps exist, and should not be interpreted as excluding additional components or steps.

[0043] In order to achieve the purpose of the present invention, in some embodiments of a mold splitting jig and method for nanoimprinting, the mold splitting jig includes: an upper template 1 and a lower template 2, a rotating shaft 3 is installed on the lower template 2, the rotating shaft 3 is connected to the lower template 2 through a spring 4, and the rotating shaft 3 can be laterally offset;

[0044] The upper template 1 is rotatably connected to the lower template 2 via the rotating shaft 3, and the upper template 1 can be turned over with the rotating shaft 3 as the axis;

[0045] Adsorption components (not shown in the figure) are respectively provided on the upper template 1 and the lower template 2 , and the adsorption components are used to adsorb the imprint template 5 or the wafer 6 .

[0046] Wherein: the adsorption component is a vacuum channel arranged on the upper template 1 or the lower template 2 and a vacuum pumping device connected to the true hole channel.

[0047] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, and the difference is that two mounting holes 21 arranged opposite to each other are provided on the lower template 2.

[0048] Furthermore, the rotating shaft 3 is inserted into the two mounting holes 21 .

[0049] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that the rotating shaft 3 is connected to the upper template 1 through two sets of spacing adjustment components 7, and the spacing adjustment components 7 are used to adjust the original spacing between the upper template 1 and the lower template 2.

[0050] Further, each set of spacing adjustment components 7 includes: a lower fixing seat 71, an axle pin 72, an upper fixing seat 73 and a locking member 74;

[0051] The ring portion of the lower fixing seat 71 is sleeved on the rotating shaft 3;

[0052] The shaft pin 72 passes through the through hole of the upper fixing seat 73 and is connected to the lower fixing seat 71;

[0053] The locking member 74 (e.g., locking screw) is used to lock the shaft pin 72 on the upper fixing seat 73;

[0054] The connection portion of the upper fixing seat 73 is connected to the upper template 1 .

[0055] When adjusting, first close the upper mold plate 1 and the lower mold plate 2, then loosen the locking member 74, adjust the position of the shaft pin 72 to a suitable position, and then tighten the locking member 74.

[0056] The spacing adjustment component 7 is used to adjust the original spacing between the upper template 1 and the lower template 2, so that the present invention is applicable to imprint templates and wafers of different thicknesses.

[0057] In order to further optimize the implementation effect of the present invention, in some other embodiments, the other characteristic technologies are the same, the difference is that a push-up mechanism 8 is installed on the upper template 1 or the lower template 2, and the push-up mechanism 8 is used to push the upper template 1 and the lower template 2 open by a certain gap.

[0058] The push-opening mechanism 8 can be, but is not limited to, a micrometer head.

[0059] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, and the difference is that a handle 9 is installed on the upper template 1.

[0060] The staff or the driving mechanism turns over the upper template 1 using the handle 9 .

[0061] In addition, an embodiment of the present invention further discloses a mold splitting method for nanoimprinting, which uses any of the above mold splitting devices to perform mold splitting, including:

[0062] Step S1: placing the cured imprint template 5 and wafer 6 together on the lower template 2, and closing the upper template 1;

[0063] Step S2: the adsorption components on the upper template 1 and the lower template 2 adsorb the wafer 6 and the imprint template 5 respectively;

[0064] Step S3: When the mold is separated, the spring 4 is used to drive the rotating shaft 3 to shift laterally to offset the lateral displacement deviation of the micro-nano structure pattern between the imprint template 5 and the wafer 6.

[0065] Further, step S3 includes:

[0066] Step S3.1: Use the push-open mechanism 8 to slowly push the upper template 1 and the lower template 2 apart by a certain gap;

[0067] The spring 4 is used to drive the rotating shaft 3 to shift laterally, thereby offsetting the lateral displacement deviation of the micro-nano structure pattern between the imprint template 5 and the wafer 6.

[0068] Step S3.2: Open the upper template 1.

[0069] During the flipping process of the upper template 1, a certain displacement will occur with the lower template 2. The micro-nano structure patterns on the imprint template 5 and the wafer 6 are concave-convex structures, which are stuck to each other, and the imprint template 5 and the wafer 6 are not easy to separate.

[0070] The present invention utilizes a push-open mechanism 8 to slowly push open the upper template 1 and the lower template 2. Since the micro-nano structure patterns on the imprint template 5 and the wafer 6 will produce lateral dislocation when they are separated, in order to offset the deformation of the imprinted pattern caused by the dislocation, the present invention adds a spring 4, and utilizes the spring 4 to offset the lateral displacement deviation caused by the mold opening, so that the imprint template 5 and the wafer 6 are easy to separate, and the pattern will not be deformed by the lateral displacement.

[0071] The present invention discloses a mold splitting jig and method for nanoimprinting, which has the following beneficial effects:

[0072] First, a mold separation jig is used to separate the imprint template 5 from the wafer 6. During the mold separation, an adsorption component is used to adsorb the imprint template 5 and the wafer 6 to prevent damage to the wafer 6. At the same time, the spring 4 is used to offset the lateral force to prevent the micro-nano structure pattern on the wafer 6 from being deformed by lateral displacement.

[0073] Second, it has a simple structure, low cost and is suitable for promotion.

[0074] In the description of the present invention, it is necessary to understand that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0075] In the present invention, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0076] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for illustrating the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which shall fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. Parting jig for nanoimprinting, It is characterized in that include: An upper template and a lower template, wherein a rotating shaft is installed on the lower template, the rotating shaft is connected to the lower template via a spring, and the rotating shaft can be laterally offset; The upper template is rotatably connected to the lower template via a rotating shaft, and the upper template can be turned over with the rotating shaft as the axis; Adsorption components are respectively arranged on the upper template and the lower template, and the adsorption components are used for adsorbing the imprinting template or the wafer.

2. The mold splitting jig according to claim 1, It is characterized in that Two mounting holes which are arranged opposite to each other are arranged on the lower template.

3. The mold splitting jig according to claim 2, It is characterized in that The rotating shaft is inserted into the two mounting holes.

4. The mold splitting jig according to claim 1, It is characterized in that The rotating shaft is connected to the upper template through a plurality of groups of spacing adjustment components, and the spacing adjustment components are used to adjust the original spacing between the upper template and the lower template.

5. The mold splitting jig according to claim 4, It is characterized in that Each set of the spacing adjustment components includes: a lower fixing seat, an axle pin, an upper fixing seat and a locking member; The ring portion of the lower fixing seat is sleeved on the rotating shaft; The shaft pin passes through the through hole of the upper fixing seat and is connected to the lower fixing seat; The locking member is used to lock the shaft pin on the upper fixing seat; The connecting portion of the upper fixing seat is connected to the upper template.

6. The mold splitting jig according to claim 1, It is characterized in that A push-up mechanism is installed on the upper template or the lower template, and the push-up mechanism is used to push the upper template and the lower template to open a certain gap.

7. The mold splitting jig according to claim 1, It is characterized in that A handle is installed on the upper template or the lower template.

8. Parting method for nanoimprinting, It is characterized in that Using the mold splitting device according to any one of claims 1 to 7 to perform mold splitting, comprising: Step S1: placing the cured imprint template and the wafer together on the lower template, and closing the upper template; Step S2: the adsorption components on the upper template and the lower template adsorb the wafer and the imprint template respectively; Step S3: When the mold is separated, the spring is used to drive the rotating shaft to shift laterally to offset the lateral displacement deviation of the micro-nano structure pattern between the imprint template and the wafer.

9. The mold separation method according to claim 8, It is characterized in that The step S3 comprises: Step S3.1: Use the push-open mechanism to slowly push open the upper template and the lower template to a certain gap; The spring is used to drive the rotating shaft to shift laterally, thereby offsetting the lateral displacement deviation of the micro-nano structure pattern between the imprint template and the wafer; Step S3.2: Open the upper template.

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