RTD dispatching system and algorithm based on rule engine
Through the RTD dispatch system and algorithm based on the rules engine, the problem of inefficient equipment technology addition in the existing technology is solved, and the automated material handling and production process of semiconductor factories are realized, and the production efficiency and accuracy are improved. Reduces the time for manual intervention and equipment downtime.
Patent Information
- Application Number
- CN202411207357.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2024-12-13
AI Technical Summary
When adding new equipment processes and systems, the existing technology requires manual reintroduction of code and layout, resulting in system fixation and inefficiency, and the inability to effectively support the automated material handling and full-process automation of the production process of semiconductor factories.
Design an RTD dispatch system and algorithm based on rules engine, optimize the dispatch collection to achieve automated dispatch by starting timing tasks, scanning online production equipment, executing filtering and sorting rules, combining MES, PLM and SPC system information, and realize the maximum dispatch of materials. Improve production efficiency.
The production capacity and material parameters of each process equipment are modeled. Through the automatic sorting of the rule engine, the impact of the automated dispatch system on production is minimized, the production efficiency of the factory is improved, and the accuracy and error of feeding are ensured. reduces the time for manual intervention and equipment downtime.
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Figure CN119130038A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of work dispatching systems, and in particular to a RTD work dispatching system and algorithm based on a rule engine. Background Art
[0002] Semiconductor factories usually use MES for material handling. When materials are selected manually, it provides material matching rules, process capability rules, and work-in-process rule control to ensure that the wrong materials are not added, resulting in abnormal production accidents.
[0003] Before the start of the automated handling process, it is necessary to build a process flow for the entire plant equipment process, and match it with the SPC and PLM systems. In the production process of WIP products, the entire process is automatically circulated at the information level. With the help of automated material equipment, the entire process of WIP products can be automatically circulated.
[0004] The existing technology requires manual re-import of new codes and re-layout when adding new equipment processes and other systems, which consumes a lot of time. Therefore, in actual use, the system is fixed and only processes one or several groups of products, which is inefficient.
[0005] Therefore, it is necessary to design an RTD dispatching system and algorithm based on a rule engine to solve the above problems. Summary of the invention
[0006] The purpose of the present invention is to provide a RTD dispatching system and algorithm based on a rule engine to overcome the above-mentioned deficiencies in the current prior art.
[0007] In order to achieve the above object, the present invention adopts the following technical solutions: A RTD dispatching system and algorithm based on a rule engine, comprising the following steps: S1\Start the RTD scheduled task and scan various online production equipment registered in the MES system; S2\ drives the Rule engine to execute the process-related rule items of the filtering rules: product parameters, recipe process capabilities, and process restriction information; S3 / Combined with the WIP list of the MES system, adapt to which equipment can be used for production; S4 / Execute the allocation rules to further optimize and filter the PLM rule information of the equipment maintenance system and the SPC rule information of the quality management system with the lot after filtering rules, and adapt to a more optimized lot set to be fed S5 / Execute sorting rules, equipment group material dispatching rules, weights, and optimal processing condition calculations to adapt to the best material dispatching set Best WIP Lot List; S6 / Receive the equipment production material request forwarded by MES, calculate the Best WIP Lot List, and automatically dispatch the best materials; S7 / Task execution is completed, and the data generated in the above steps is persisted to the database; S8 / Repeatedly execute the scheduled task and periodically calculate the Best WIP Lot List.
[0008] Preferably, before S1, various online production equipment are scanned and registered, and the process flow and process parameters of each production equipment are entered.
[0009] Preferably, when further optimizing the screening, different parameter indicators are set according to the processing techniques of different products and the process parameters of different products, and the set parameter indicators are used to quickly match the corresponding machines and equipment.
[0010] Preferably, in the S2\ driving Rule engine, rule items can be added as needed.
[0011] Preferably, S5 executes the sorting rules, extracts weights or requirements according to product needs and processing characteristics, and then matches the corresponding production equipment according to the weights added later and the product process.
[0012] Preferably, the following calculation method is included: First set the object that needs to be matched by the rule; According to the set object, first extract the weight ratio that the product must meet during the processing; Generate a regular search expression for the corresponding object; Further obtain the corresponding data results according to the rule search expression; The status of the device of the acquired data result and its device data are further acquired, and the optimal matching structure is calculated based on the acquired data.
[0013] The beneficial effects of the present invention are as follows: the technical solution models the production capacity, W material parameters, process flow, and PLM of each process equipment in different categories. Virtualization is performed into rule elements, and the elements are organically sorted and integrated into material dispatching rules through the rule engine; different parameters and values are input into the rules to automatically obtain the results that meet the rules under these parameters; the overall impact of the deployment of the automated dispatching system on production is minimized. Combined with the process engine, rule engine, and scheduling algorithm, the factory production efficiency is maximized. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 A flow chart of an RTD dispatching system based on a rule engine according to the present invention; Figure 2 The system flow of the RTD dispatching system based on the rule engine of the present invention is as follows: DETAILED DESCRIPTION
[0015] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0016] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0017] Reference Figure 1 and Figure 2 , a RTD dispatching system and algorithm based on rule engine, which includes several groups of different machines and equipment for processing products or dispatching, a rule engine system for scheduling and calculating the required mechanical equipment, and an MES system for coordinating various machines and equipment; The integrated system first scans and registers various online production equipment, and the process flow and process parameters of each production equipment are entered; Enter the rule engine and set different parameter indicators according to the processing technology of different products and the process parameters of different products. The set parameter indicators are used to quickly match the corresponding machines and equipment; Matching screening: extract process weights based on product needs and processing technology characteristics, and then match the corresponding production equipment based on the product process according to the weights added later; Further screening: According to the production equipment selected in the previous step, further screening is carried out according to the different equipment status, production conditions, and efficiency planning of different equipment. The specific screening requirements are adjusted according to actual needs, such as the location, failure rate, speed, quantity, and various weight considerations of the equipment for screening; Implementation scheduling, through the above matching and multiple screening, directly select the corresponding system and implement it.
[0018] In order to ensure that the processing of other equipment is not affected during the equipment scheduling process, and to maximize the use of dispatchable equipment to maximize efficiency, the specific matching and screening includes the following calculation methods; First set the object that needs to be matched by the rule; According to the set object, first extract the weight ratio that the product must meet during the processing; Generate a regular search expression for the corresponding object; Further obtain the corresponding data results according to the rule search expression; The status of the device of the acquired data result and its device data are further acquired, and the optimal matching structure is calculated based on the acquired data; Using the HRRN scheduling algorithm, the algorithm parameter calculation response ratio formula is: (device waiting time + Q-Time) / When Q-Time<0, cancel the schedule and recalculate the schedule; It should be noted that due to different rule requirements and weight ratios of devices, you can add screening rules to adapt to different products and maximize the scheduling efficiency between devices.
[0019] Specifically, the following process starts the RTD timing task and scans various online production equipment registered in the MES system.
[0020] Drive the Rule engine to execute the process-related rule items of the filtering rules: product parameters, recipe process capabilities, and process restriction information; Combined with the WIP list of the MES system, it is possible to determine which equipment can be used for production; Execute the allocation rules, further optimize and filter the PLM rule information of the equipment maintenance system, the SPC rule information of the quality management system, and the lot after filtering rules, and adapt to a more optimized set of lots to be fed. Execute sorting rules, equipment group material dispatching rules, weights, and optimal processing condition calculations to adapt to the best material dispatching set Best WIP Lot List; Receive the equipment production material request forwarded by MES, calculate the Best WIP Lot List, and automatically dispatch the best materials; The MCS dispatching system receives the material handling task, calls the AGV to perform the task, transports the lot to the production equipment, and the robot performs the feeding action; After the task is completed, the data generated in the above steps will be persisted to the MySQL database; Repeat the scheduled task and periodically calculate the Best WIP Lot List.
[0021] The system targets each workstation / equipment. For the WIP-related attributes, the Rule Engine calculates the Best WIP lot List for each machine. When the equipment is finished, the Dispatch module selects the lot from the optimal material dispatch result, assigns workers to the machine to carry it, and puts the material into production. Finally, the factory can achieve fully automated production without manual material selection and sending robots to carry and feed materials. This saves the time of equipment downtime waiting for materials and eliminates the mistakes of manual selection of wrong materials. The system monitors the queue and automates the loading and unloading of equipment. Ensure that the production feeding is accurate and 100% guarantee the processing of error-free materials.
[0022] Batch task dispatching and automated operation greatly reduce the labor intensity of on-site workers. After the introduction of RTD automated operation, the number of people is reduced to 2. Only manual inspection and correction of EQP status, processing of equipment alarm messages, and production recovery are required.
[0023] Specific implementation cases are screened by rules. Process Engine, Set the rule object: RuleEntity Obtain object data: heavy doping, SBIR=1, TTV=3, SFQR=0.5 Rule engine expression 1: RuleEntity.Light and heavy mixing == "Heavy mixing" and RuleEntity.SBIR>0.6 and RuleEntity.TTV>2 and RuleEntity.SFOR>0.4 The rule engine returns the following results: 25-1, 25-3, 25-4, 59-1, and the above are the device numbers; At this time, you can get Lots and enter 4 equipment for processing; Algorithm calculates the best match Using HRRN scheduling algorithm Algorithm parameter calculation response ratio formula: (Lots waiting time + Q-Time) / Q-Time When Q-Time < 0, cancel the schedule and recalculate the schedule Weighted path planning algorithm Calculate the optimal machine: machine location distance + machine failure rate + machine production speed + number of lots to be produced; weight consideration (the specific weight is adjusted according to different products and can be added or deleted independently) At this time, the corresponding relationship between a single Lot and a device is obtained Loop through all lots and all machines to get the final matching result, which is the Best Wip Lot List.
[0024] The benefit of the present invention is that the technical solution models the production capacity of each process equipment, W material parameters, process flow, and PLM in different categories. Virtualization is into rule elements, and through the rule engine, the elements are organically sorted and integrated into material dispatching rules; different parameters and values are input into the rules to automatically obtain the results that meet the rules under these parameters; overall, the impact of the deployment of the automated dispatching system on production is minimized. Combined with the process engine, rule engine and scheduling algorithm, the factory production efficiency is maximized.
[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A RTD dispatching system and algorithm based on a rule engine, characterized by: It includes the following steps: S1\Start the RTD scheduled task and scan various online production equipment registered in the MES system; S2\ drives the Rule engine to execute the process-related rule items of the filtering rules: product parameters, recipe process capabilities, and process restriction information; S3 / Combined with the WIP list of the MES system, adapt to which equipment can be used for production; S4 / Execute the allocation rules to further optimize and filter the PLM rule information of the equipment maintenance system and the SPC rule information of the quality management system with the lot after filtering rules, and adapt to a more optimized lot set to be fed S5 / Execute sorting rules, equipment group material dispatching rules, weights, and optimal processing condition calculations to adapt to the best material dispatching set Best WIP Lot List; S6 / Receive the equipment production material request forwarded by MES, calculate the Best WIP Lot List, and automatically dispatch the best materials; S7 / Task execution is completed, and the data generated in the above steps is persisted to the database; S8 / Repeatedly execute the scheduled task and periodically calculate the Best WIP Lot List.
2. According to the rule engine-based RTD dispatching system and algorithm of claim 1, it is characterized by: Before S1, various online production equipment are scanned and registered, and the process flow and process parameters of each production equipment are entered.
3. The RTD dispatching system and algorithm based on rule engine according to claim 1, characterized in that: When further optimizing the screening, different parameter indicators are set according to the processing technology of different products and the process parameters of different products. The set parameter indicators are used to quickly match the corresponding machines and equipment.
4. The RTD dispatching system and algorithm based on rule engine according to claim 1, characterized in that: In S2\Driver Rule Engine, you can add rule items as needed.
5. The RTD dispatching system and algorithm based on rule engine according to claim 1, characterized in that: S5 executes the sorting rules, extracts weights or requirements based on product needs and processing characteristics, and then matches the corresponding production equipment based on the weights added later and the product process.
6. The RTD dispatching system and algorithm based on rule engine according to claim 1, characterized in that: The following calculation methods are included; First set the object that needs to be matched by the rule; According to the set object, first extract the weight ratio that the product must meet during the processing; Generate a regular search expression for the corresponding object; Further obtain the corresponding data results according to the rule search expression; The status of the device of the acquired data result and its device data are further acquired, and the optimal matching structure is calculated based on the acquired data.
