Half-piece product processing equipment, passivation production line, solar cell production line and production process

Abstract

The invention relates to the technical field of photovoltaics and semiconductors, in particular to half-piece product processing equipment, a passivation production line, a solar cell production line and a production process, and solves the problem of low production efficiency of the half-piece product processing equipment. The half-piece product processing equipment comprises a piece splitting device, a box forming device, a box carrying device, a reaction furnace and a boat transportation device. The splitting device is used for cutting a to-be-processed product into to-be-processed half-piece products, the box forming device is used for loading the to-be-processed half-piece products into material boxes, and the box carrying device is used for carrying the material boxes loaded with the to-be-processed half-piece products to the boat structure or unloading the material boxes loaded with the processed half-piece products from the boat structure. The reaction furnace is used for coating the half-piece products, and the boat conveying device is used for conveying the boat structure loaded with the half-piece products to be machined to the reaction furnace. According to the half-piece product machining equipment, all the devices are integrated together, automatic machining of half-piece products is achieved, and the production efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic and semiconductor technology, and in particular to a half-cell product processing equipment, a passivation production line, a solar cell production line and a production process. Background Art

[0002] Semiconductor and photovoltaic materials are widely used in electronics, new energy and other industries, and semiconductor and photovoltaic materials usually need to undergo chemical treatment before they can be applied to products. At present, the industry has more diversified demands for the size of semiconductor and photovoltaic materials. Since the raw materials are of standard size, in order to obtain smaller materials, the original standard size materials will be cut. The half-sheet material obtained after cutting the original standard size material will have a cross-section, which will have a negative impact on the performance of the material, so the cross-section needs to be coated and passivated. Atomic layer deposition (ALD) is a coating passivation technology that has been widely used in the processing of semiconductor and photovoltaic materials. The corresponding processing equipment needs to be selected according to specific processing requirements.

[0003] However, at present, the cutting devices, coating devices, etc. for semiconductor and photovoltaic materials are set up independently of each other, and mechanisms such as transport vehicles are needed to realize the flow of materials between the devices. At the same time, the degree of automation of half-cut product processing equipment is low, resulting in low production efficiency of half-cut product processing equipment. Summary of the invention

[0004] In view of this, the embodiments of the present application provide a half-cell product processing equipment, a passivation production line, a solar cell production line and a production process, which solve the problem of low production efficiency of the half-cell product processing equipment.

[0005] In a first aspect, an embodiment of the present application provides a half-sheet product processing device, comprising: a slicing device, configured to cut a whole sheet of product into at least two half-sheet products to be processed; a box-forming device, arranged adjacent to the slicing device, at least one side of the box-forming device being provided with a material box placement space, the material box placement space being configured to accommodate a material box, the box-forming device being configured to load the half-sheet product to be processed into the material box located in the material box placement space; a box-moving device, arranged adjacent to the box-moving device, at least one side of the box-moving device being provided with a boat structure placement space, the boat structure placement space being configured to accommodate a boat structure, the box-moving device being configured to load the half-sheet product to be processed into the material box located in the material box placement space The material box loaded with the half-sheet product to be processed in the material box placement space is moved to the boat structure located in the boat structure placement space, or the material box loaded with the processed half-sheet product is unloaded from the boat structure located in the boat structure placement space; the reaction furnace is configured to coat the half-sheet product; the boat transportation device is arranged between the box moving device and the reaction furnace, and is configured to transport the boat structure loaded with the half-sheet product to be processed to the reaction furnace, so that the reaction furnace coats the half-sheet product carried by the boat structure, or transports the boat structure loaded with the processed half-sheet product out of the reaction furnace.

[0006] In some embodiments, the half-sheet product processing equipment also includes: at least two material box circulation devices, which are arranged adjacent to the box moving device and are spaced apart in the vertical direction, wherein one of the material box circulation devices is configured to transport empty material boxes, and the other material box circulation device is configured to transport material boxes loaded with processed half-sheet products; a lower box device, which is arranged adjacent to the material box circulation device and is configured to transport the empty material boxes from the material box circulation device to the material box placement space; wherein the box moving device is further configured to transport the material boxes loaded with the processed half-sheet products carried by the boat structure from the boat structure to the material box circulation device.

[0007] In some embodiments, there are multiple reaction furnaces; wherein the boat transport device includes: at least one boat pushing device, which is arranged adjacent to the multiple reaction furnaces and is configured to send the boat structure into any one of the reaction furnaces or transport the boat structure out of any one of the reaction furnaces; multiple boat structure cache devices, which are arranged adjacent to the boat pushing device and are configured to cache the boat structure; a boat moving device, which is arranged adjacent to the boat pushing device, the boat structure cache device and the boat structure placement space, and is configured to move the boat structure from the boat structure placement space to the boat structure cache device, and move the boat structure from the boat structure cache device to the boat pushing device, or move the boat structure from the boat pushing device to the boat structure cache device, and move the boat structure from the boat structure cache device to the boat structure placement space.

[0008] In some embodiments, there are multiple boat pushing devices; multiple reaction furnaces are arranged along a first direction, multiple boat pushing devices are arranged along the first direction, multiple boat structure cache devices are arranged along the first direction, the boat structure cache devices, the boat pushing devices and the reaction furnaces are arranged along a second direction, and the second direction intersects with the first direction; and / or, the boat moving device is arranged above the boat structure cache device and the boat pushing device.

[0009] In some embodiments, there are multiple boat push devices, and the multiple boat push devices are arranged along a first direction; multiple reaction furnaces are arranged along the first direction and arranged into multiple layers along the vertical direction, and the boat push device can move along the vertical direction to send the boat structure into any layer of the reaction furnace or transport the boat structure out of any layer of the reaction furnace.

[0010] In some embodiments, the boat moving device includes: a first linear motion mechanism, configured to be able to move along the second direction; a second linear motion mechanism, connected to the first linear motion mechanism, configured to be able to move along the first direction, wherein the second linear motion mechanism can also move along the second direction under the drive of the first linear motion mechanism; a boat grasping mechanism, connected to the second linear motion mechanism, configured to grasp the boat structure, wherein the boat grasping mechanism can move along the first direction and the second direction under the drive of the second linear motion mechanism.

[0011] In some embodiments, the half-sheet product processing equipment also includes: a cleaning device, which is arranged between the splitting device and the box-forming device, and is configured to receive the half-sheet product to be processed on the splitting device and clean the half-sheet product to be processed; wherein the box-forming device is further configured to load the cleaned half-sheet product to be processed into the material box located in the material box placement space.

[0012] In some embodiments, the slicing device includes: at least one material receiving mechanism, configured to receive the whole piece of the product; at least two slicing mechanisms, each of the material receiving mechanism is connected to at least one of the slicing mechanisms, the slicing mechanism is configured to receive the product to be processed conveyed by the material receiving mechanism, and cut the product to be processed into at least two half-pieces of the products to be processed; wherein, the cleaning device includes: at least two cleaning mechanisms, respectively connected to at least two of the slicing mechanisms, configured to receive the half-pieces of the products to be processed on the slicing mechanisms, and clean the half-pieces of the products to be processed; wherein, the boxing device includes: at least two boxing mechanisms, respectively connected to at least two of the cleaning mechanisms, configured to receive the cleaned half-pieces of the products to be processed on the cleaning mechanisms, and load the cleaned half-pieces of the products to be processed into the material box located in the material box placement space.

[0013] In some embodiments, the half-sheet product processing equipment also includes: a material box cache device, which is arranged adjacent to the material box circulation device and is configured to cache the material box loaded with the processed half-sheet product; a unloading device, which is arranged above the material box circulation device and the material box cache device, and is configured to transport the material box loaded with the processed half-sheet product from the material box circulation device to the material box cache device; a product transportation device, which is configured to transport the processed half-sheet product; a sheet guide device, which is arranged adjacent to the unloading device and the product transportation device, and is configured to obtain the processed half-sheet product in the material box carried by the material box cache device, and place the processed half-sheet product on the product transportation device.

[0014] In some embodiments, the half-sheet product processing equipment also includes: an optical inspection device, which is arranged adjacent to the product transportation device, configured to receive the processed half-sheet product conveyed by the product transportation device, and perform optical inspection on the processed half-sheet product; an electroluminescent inspection device, which is arranged adjacent to the optical inspection device, configured to receive the processed half-sheet product after optical inspection, and perform electroluminescent inspection on the processed half-sheet product after optical inspection.

[0015] In some embodiments, the half-wafer product processing equipment also includes: an infrared imaging detection device, which is arranged adjacent to the electroluminescent detection device, configured to receive the processed half-wafer product after electroluminescent detection, and perform infrared imaging detection on the processed half-wafer product after electroluminescent detection.

[0016] In some embodiments, the half-sheet product processing equipment also includes: a sorting device, which is arranged adjacent to the infrared imaging detection device, configured to receive the processed half-sheet products after infrared imaging detection, and sort the processed half-sheet products after infrared imaging detection into multiple grades; multiple unloading devices, which are arranged adjacent to the sorting device, and are respectively configured to receive multiple grades of the half-sheet products.

[0017] In some embodiments, the material box circulation device for transporting the material box loaded with the processed half-sheet product includes: a material box circulation mechanism for transporting the material box loaded with the processed half-sheet product; a first material box steering mechanism, disposed adjacent to the material box circulation mechanism, configured to receive the material box loaded with the processed half-sheet product and rotate the material box in a horizontal plane; wherein the unloading device is further configured to transport the material box loaded with the processed half-sheet product from the first material box steering mechanism to the material box cache device.

[0018] In some embodiments, the box-forming device includes: a box-forming mechanism, which is arranged adjacent to the slice-splitting device and is configured to load the half-sheet product to be processed into the material box located in the material box placement space; a second material box steering mechanism, which is arranged adjacent to the box-forming mechanism and is configured to obtain the material box located in the material box placement space and rotate the material box in a horizontal plane; wherein the box-moving device is further configured to move the material box loaded with the half-sheet product to be processed located in the second material box steering mechanism to the boat structure located in the boat structure placement space.

[0019] In a second aspect, an embodiment of the present application provides a passivation production line, comprising: at least one half-wafer product processing equipment as described in the first aspect; wherein, when the passivation production line comprises a plurality of the half-wafer product processing equipment, the plurality of the half-wafer product processing equipment are arranged in a matrix in a horizontal plane, and / or the plurality of the half-wafer product processing equipment are arranged in a matrix in a vertical plane.

[0020] In a third aspect, an embodiment of the present application provides a solar cell production line, comprising: at least one half-cell product processing device as described in the first aspect.

[0021] In a fourth aspect, an embodiment of the present application provides a solar cell production process, wherein the solar cell production process adopts: at least one half-cell product processing device as described in the first aspect.

[0022] The half-wafer product processing equipment provided in the embodiment of the present application integrates a slicing device, a box forming device, a box moving device, a reaction furnace and a boat transport device, thereby realizing the automated processing of the half-wafer products. There is no need for an Automatic Guided Vehicle (AGV) trolley for circulation and transportation, and the integrated equipment greatly improves space utilization and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0024] Figure 1 Shown is a schematic structural diagram of a half-wafer product processing device provided in one embodiment of the present application.

[0025] Figure 2 It is a schematic diagram of the structure of a boat transport device, a reaction furnace, a vacuum device and a material box circulation device provided in one embodiment of the present application.

[0026] Figure 3 Shown is a side view of a boat transport device, a boat and a reaction furnace provided in one embodiment of the present application.

[0027] Figure 4 Shown is a schematic structural diagram of a boat moving device provided in one embodiment of the present application.

[0028] Figure 5 Shown is a side view of a boat moving device provided in one embodiment of the present application.

[0029] Figure 6 Shown is a schematic structural diagram of a splitting device and a cleaning device provided in one embodiment of the present application.

[0030] Figure 7 Shown is a schematic structural diagram of a cleaning device, a box forming device and a box unloading device provided in one embodiment of the present application.

[0031] Figure 8 Shown is a schematic structural diagram of a box moving device, a material box circulation device and a boat structure provided in one embodiment of the present application.

[0032] Fig. 9 Shown is a schematic structural diagram of a half-wafer product processing device provided in another embodiment of the present application.

[0033] Fig.10Shown is a schematic structural diagram of a material box circulation device, a material box buffer device and a material unloading device, a product transport device and a guide device provided in one embodiment of the present application.

[0034] Fig.11 Shown is a schematic structural diagram of a product transport mechanism, a detection device, a sorting device and a sheet unloading device provided in one embodiment of the present application.

[0035] Fig.12 Shown is a schematic structural diagram of a passivation production line provided in one embodiment of the present application.

[0036] Fig.13 Shown is a schematic structural diagram of a solar cell production line provided in one embodiment of the present application.

[0037] Reference numerals:

[0038] 1. Passivation production line; 10. Half-piece product processing equipment; 100. Slicing device; 110. Material receiving mechanism; 120. Slicing mechanism; 200. Box forming device; 210. Box forming mechanism; 220. Second material box steering mechanism; 300. Box moving device; 400. Reactor; 410. Furnace body; 4101. Reaction chamber; 420. Support structure; 500. Boat transport device; 510. Boat pushing device; 5110. Paddle ; 5120, boat push drive; 520, boat structure buffer device; 530, boat moving device; 5310, first linear motion mechanism; 5320, second linear motion mechanism; 5330, boat grabbing mechanism; 5340, support frame; 600, material box circulation device; 610, material box circulation mechanism; 620, first material box steering mechanism; 700, lower box device; 800, cleaning device; 810, cleaning mechanism; 900, Material box buffer device; 910, material box buffer position; 1000, unloading device; 1100, product transportation device; 1110, product transportation mechanism; 1200, guide device; 1210, guide mechanism; 1300, optical detection device; 1310, optical detection mechanism; 1400, electroluminescent detection device; 1410, electroluminescent detection mechanism; 1500, infrared imaging detection device; 1510, infrared imaging detection mechanism; 1600, sorting device; 1610, sorting mechanism; 1700, unloading device; 1800, material box conveying device; 1900, vacuum device; 2000, rejection device; 101, material box placement space; 102, boat structure placement space; X1, first direction; X2, second direction; 2, product; 21, half-sheet product; 3, material box; 4, boat structure; 11, solar cell production line. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0040] The specific structure of the half-wafer product processing equipment is described below in conjunction with an embodiment.

[0041] Figure 1 FIG. 1 is a schematic diagram of the structure of a half-sheet product processing device provided in an embodiment of the present application. Figure 1 As shown, the half-wafer product processing equipment 10 includes: a wafer splitting device 100 , a box forming device 200 , a box moving device 300 , a reaction furnace 400 and a boat transport device 500 .

[0042] The splitting device 100 is configured to cut the whole product 2 into at least two half-piece products 21 to be processed. The boxing device 200 is arranged adjacent to the splitting device 100, and at least one side of the boxing device 200 is provided with a material box placement space 101, and the material box placement space 101 is configured to accommodate a material box 3. The boxing device 200 is configured to load the half-piece products 21 to be processed into the material box 3 located in the material box placement space 101. The box moving device 300 is arranged adjacent to the boxing device 200, and at least one side of the box moving device 300 is provided with a boat structure placement space 102, and the boat structure placement space 102 is configured to accommodate a boat structure 4. The box moving device 300 is configured to move the material box 3 loaded with the half-piece products 21 to be processed located in the material box placement space 101 to the boat structure 4 located in the boat structure placement space 102, or unload the material box 3 loaded with the processed half-piece products 21 from the boat structure 4 located in the boat structure placement space 102. The reaction furnace 400 is configured to coat the half-wafer products 21. The boat transport device 500 is disposed between the box moving device 300 and the reaction furnace 400, and is configured to transport the boat structure 4 loaded with the half-wafer products 21 to be processed to the reaction furnace 400, so that the reaction furnace 400 coats the half-wafer products 21 carried by the boat structure 4, or transport the boat structure 4 loaded with the processed half-wafer products 21 out of the reaction furnace 400.

[0043] The half-sheet product processing equipment 10 integrates a slicing device 100, a box forming device 200, a box moving device 300, a reaction furnace 400 and a boat transport device 500, thereby realizing the automated processing of the half-sheet product 21. There is no need for AGV carts for circulation and transportation. The integrated equipment greatly improves space utilization and production efficiency.

[0044] Exemplarily, the splitting device 100 uses laser splitting to cut the whole product 2 into at least two half-sheet products 21 to be processed.

[0045] For example, the box forming device 200 may include a mechanical arm, a linear module or other driving structure capable of providing driving force and a grabbing structure connected to the driving structure, and the driving structure drives the grabbing structure to move so that the grabbing structure can grab the half-piece product 21 to be processed and load the half-piece product 21 to be processed into the material box 3 located in the material box placement space 101. For example, the grabbing structure may be a clamping claw, a suction cup or other structure with a grabbing function.

[0046] Exemplarily, the box moving device 300 may include a robotic arm, a linear module or other driving structure capable of providing driving force and a box grabbing structure connected to the driving structure, and the driving structure drives the box grabbing structure to move so that the box grabbing structure can grab the material box 3.

[0047] For example, the product 2 may be a silicon wafer, a solar panel, a glass substrate, etc. For example, the half-wafer product 21 may be a silicon wafer with a cross section, and the cross section of the silicon wafer with a cross section is passivated by coating.

[0048] In some embodiments, the half-sheet product processing equipment 10 further includes at least two material box circulation devices 600 and a lower box device 700. At least two material box circulation devices 600 are arranged adjacent to the box moving device 300 and are arranged at intervals in the vertical direction. One material box circulation device 600 is configured to transport an empty material box 3, and the other material box circulation device 600 is configured to transport a material box 3 loaded with processed half-sheet products 21. The lower box device 700 is arranged adjacent to the material box circulation device 600 and is configured to transport an empty material box 3 from the material box circulation device 600 to the material box placement space 101. The box moving device 300 is further configured to transport the material box 3 loaded with processed half-sheet products 21 carried by the boat structure 4 from the boat structure 4 to the material box circulation device 600.

[0049] Exemplarily, the half-sheet product processing equipment 10 further includes two material box circulation devices 600, which are arranged at intervals in the vertical direction. The two material box circulation devices 600 are used to transport empty material boxes 3 and material boxes 3 loaded with processed half-sheet products 21 respectively.

[0050] The lower box device 700 is used in cooperation with a material box circulation device 600 to transport the empty material box 3 from the material box circulation device 600 to the material box placement space 101, and the half-sheet product 21 to be processed is loaded into the material box 3 located in the material box placement space 101 by the box forming device 200, and the material box 3 loaded with the half-sheet product 21 to be processed located in the material box placement space 101 is transported to the boat structure 4 located in the boat structure placement space 102 by the box moving device 300, thereby realizing the loading process of the half-sheet product 21 to be processed in the boat structure 4.

[0051] The box moving device 300 is used to unload the material box 3 loaded with the processed half-sheet product 21 from the boat structure 4 located in the boat structure placement space 102, and transport it to another material box circulation device 600, thereby realizing the unloading process of the processed half-sheet product 21 in the boat structure 4.

[0052] The above-mentioned devices of the half-sheet product processing equipment 10 cooperate with each other to realize the automated and synchronous loading and unloading process of the half-sheet products 21 in the boat structure 4, thereby further improving the production efficiency of the half-sheet product processing equipment 10.

[0053] Exemplarily, the lower box device 700 may include a robotic arm, a linear module or other driving structure capable of providing driving force and a box grabbing structure connected to the driving structure, and the driving structure drives the box grabbing structure to move so that the box grabbing structure can grab the material box 3.

[0054] Exemplarily, the material box circulation device 600 includes a conveyor belt circulation line, and the material box circulation device 600 extends along the second direction X2.

[0055] In some embodiments, the number of reaction furnaces 400 is multiple, and the boat transport device 500 includes at least one boat pushing device 510, multiple boat structure buffer devices 520, and a boat moving device 530. At least one boat pushing device 510 is disposed adjacent to the reaction furnace 400, and is configured to send the boat structure 4 into any one of the reaction furnaces 400 or to transport the boat structure 4 out of any one of the reaction furnaces 400. Multiple boat structure buffer devices 520 are disposed adjacent to the boat pushing device 510, and are configured to buffer the boat structure 4. The boat moving device 530 is disposed adjacent to the boat pushing device 510, the boat structure buffer device 520, and the material box placement space 101, and is configured to move the boat structure 4 from the boat structure placement space 101 to the boat structure buffer device 520, and move the boat structure 4 from the boat structure buffer device 520 to the boat pushing device 510, or move the boat structure 4 from the boat pushing device 510 to the boat structure buffer device 520, and move the boat structure 4 from the boat structure buffer device 520 to the boat placement space 101.

[0056] For example, Figure 3As shown, the reaction furnace 400 includes a furnace body 410 and a support structure 420. The furnace body 410 has a reaction chamber 4101. The support structure 420 is disposed in the reaction chamber 4101 and is configured to carry the boat structure 4. The boat pushing device 510 includes a paddle 5110 and a boat pushing drive 5120. The paddle 5110 is configured to carry the boat structure 4. The boat pushing drive 5120 is connected to the paddle 5110 to drive the paddle 5110 to transport the boat structure 4 to the support structure 420, and drive the paddle 5110 to exit the reaction chamber 4101. When the reaction furnace 400 processes the half-sheet product 21, the paddle 5110 exits the reaction chamber 4101, which can prevent the process gas from corroding the paddle 5110, thereby increasing the service life of the paddle 5110.

[0057] In some embodiments, Figure 1 and Figure 2 As shown, a plurality of reaction furnaces 400 are arranged along a first direction X1, a plurality of boat pushers 510 are arranged along the first direction X1, a plurality of boat structure buffer devices 520 are arranged along the first direction X1, the boat structure buffer devices 520, the boat pushers 510 and the reaction furnaces 400 are arranged along a second direction X2, and the second direction X2 intersects with the first direction X1.

[0058] In some embodiments, a plurality of boat pushers 510 are arranged along the first direction X1, a plurality of reaction furnaces 400 are arranged along the first direction X1, and are arranged in multiple layers along the vertical direction. The boat pusher 510 can move along the vertical direction to send the boat structure 4 into or out of the reaction furnace 400 of any layer.

[0059] In some embodiments, the boat moving device 530 is disposed above the boat structure buffer device 520 and the boat pushing device 510 .

[0060] The boat structure buffer device 520, the boat pushing device 510 and the reaction furnace 400 are arranged regularly to more reasonably utilize the space, thereby improving the production efficiency of the half-wafer product processing equipment 10 in a limited space.

[0061] In addition, the space in the vertical direction is rationally utilized to shorten the distance between the boat structure buffer device 520 and the boat pushing device 510, and reduce the circulation time of the boat structure 4 between the boat structure buffer device 520 and the boat pushing device 510, thereby further improving the production efficiency of the half-sheet product processing equipment 10.

[0062] In some embodiments, the second direction X2 is perpendicular to the first direction X1, and the second direction X2 and the first direction X1 are both horizontal directions, so that the arrangement of the various devices of the half-sheet product processing equipment 10 is more regular, thereby more reasonably utilizing the space and further improving the production efficiency of the half-sheet product processing equipment 10 in a limited space.

[0063] In some embodiments, the number of boat structure buffer devices 520 is greater than the number of boat pushing devices 510 , and the number of boat pushing devices 510 is greater than the number of boat moving devices 530 .

[0064] In some embodiments, the number of boat structure buffer devices 520 is greater than or equal to four, and the number of boat pusher devices 510 is greater than or equal to three.

[0065] By properly setting the number of each device, the reactor 400 is provided with enough boat structures 4 loaded with half-wafer products 21 to be processed, thereby avoiding the reactor 400 from waiting for the half-wafer products 21 to be processed.

[0066] In other words, the boat moving device 530 has a high boat moving efficiency and can be used in relatively small quantities, while the boat pushing device 510 needs to correspond to each reaction furnace 400 one by one, so the number of the boat pushing device 510 is greater than the number of the boat moving device 530. The boat structure buffer device 520 needs to buffer as many boat structures 4 as possible to provide sufficient boat structures 4 for the boat pushing device 510, so the number of the boat structure buffer devices 520 is greater than the number of the boat pushing devices 510.

[0067] In some embodiments, Figure 4 and Figure 5 As shown, the boat moving device 530 includes a first linear motion mechanism 5310, a second linear motion mechanism 5320 and a boat grabbing mechanism 5330. The first linear motion mechanism 5310 is configured to be able to move along the second direction X2. The second linear motion mechanism 5320 is connected to the first linear motion mechanism 5310 and is configured to be able to move along the first direction X1. Driven by the first linear motion mechanism 5310, the second linear motion mechanism 5320 can also move along the second direction X2. The boat grabbing mechanism 5330 is connected to the second linear motion mechanism 5320 and is configured to grab the boat structure 4. Driven by the second linear motion mechanism 5320, the boat grabbing mechanism 5330 can move along the first direction X1 and the second direction X2.

[0068] The second linear motion mechanism 5320 of the boat moving device 530 can move along the first direction X1, and driven by the first linear motion mechanism 5310, the second linear motion mechanism 5320 can also move along the second direction X2 to achieve bidirectional movement of the second linear motion mechanism 5320, so that the boat grabbing mechanism 5330 can grab the boat structure 4 on the boat structure buffer device 520 and the boat pushing device 510 at different positions. The boat moving device 530 has a simple structure and a simple driving method, which can further simplify the structure of the half-sheet product processing equipment 10.

[0069] Exemplarily, the boat moving device 530 further includes a support frame 5340, which is connected to the first linear motion mechanism 5310 and is configured to support the first linear motion mechanism 5310. Exemplarily, the support frame 5340 can be placed on the ground or hoisted on the roof of a factory building.

[0070] In some embodiments, Figure 1 As shown, the half-sheet product processing equipment 10 further includes a cleaning device 800, which is disposed between the splitting device 100 and the boxing device 200 and is configured to receive the half-sheet product 21 to be processed on the splitting device 100 and clean the half-sheet product 21 to be processed. The boxing device 200 is further configured to load the cleaned half-sheet product 21 to be processed into the material box 3 located in the material box placement space 101.

[0071] The cleaning device 800 is used to clean the half-wafer product 21 to be processed, so as to remove dust on the surface of the half-wafer product 21 .

[0072] Exemplarily, the cleaning device 800 can use an immersion or spray cleaning method to clean the half-wafer product 21 to be processed.

[0073] In some embodiments, Figure 6 As shown, the splitting device 100 includes at least one material receiving mechanism 110 and at least two splitting mechanisms 120, and the material receiving mechanism 110 is configured to receive a whole product 2. Each material receiving mechanism 110 is connected to at least one splitting mechanism 120, and the splitting mechanism 120 is configured to receive the product 2 to be processed conveyed by the material receiving mechanism 110, and cut the product 2 to be processed into at least two half-piece products 21 to be processed. The cleaning device 800 includes at least two cleaning mechanisms 810, and the at least two cleaning mechanisms 810 are respectively connected to the at least two splitting mechanisms 120, and are configured to receive the half-piece products 21 to be processed on the splitting mechanism 120, and clean the half-piece products 21 to be processed.

[0074] like Figure 7 As shown, the box-forming device 200 includes at least two box-forming mechanisms 210, and the at least two box-forming mechanisms 210 are respectively connected to at least two cleaning mechanisms 810, and are configured to receive the cleaned half-sheet products 21 to be processed on the cleaning mechanisms 810, and load the cleaned half-sheet products 21 to be processed into the material box 3 located in the material box placement space 101.

[0075] The production efficiency of the half-sheet product processing equipment 10 is further improved by using a plurality of material receiving mechanisms 110 , a plurality of sheet splitting mechanisms 120 and a plurality of box forming mechanisms 210 .

[0076] For example, Figure 7 and Figure 8As shown, a material box conveying device 1800 is provided on one side of the box forming mechanism 210, and is configured to receive a material box 3 loaded with a half-sheet product 21 to be processed and conveyed by the box forming mechanism 210, and the box moving device 300 is further configured to receive a material box 3 loaded with a half-sheet product 21 to be processed and conveyed by the material box conveying device 1800, and to move the material box 3 loaded with the half-sheet product 21 to be processed to the boat structure 4 located in the boat structure placement space 102. Exemplarily, boat structure placement spaces 102 are provided on both sides of the box moving device 300. Each boat structure placement space 102 can accommodate at least one boat structure 4. Among them, the boat transport device 500 is arranged adjacent to the boat structure placement space 102.

[0077] In some embodiments, Fig. 9 As shown, the half-sheet product processing equipment 10 further includes: a material box buffer device 900, a material unloading device 1000, a product transport device 1100 and a sheet guide device 1200. The material box buffer device 900 is arranged adjacent to the material box circulation device 600, and is configured to buffer the material box 3 loaded with processed half-sheet products 21. The material unloading device 1000 is arranged above the material box circulation device 600 and the material box buffer device 900, and is configured to transport the material box 3 loaded with processed half-sheet products 21 from the material box circulation device 600 to the material box buffer device 900. The product transport device 1100 is configured to transport the processed half-sheet products 21. The sheet guide device 1200 is arranged adjacent to the material unloading device 1000 and the product transport device 1100, and is configured to obtain the processed half-sheet products 21 in the material box 3 carried by the material box buffer device 900, and place the processed half-sheet products 21 on the product transport device 1100. The above-mentioned devices can realize the automated unloading process of the processed half-sheet products 21 loaded in the material box 3, so as to further improve the automation level of the half-sheet product processing equipment 10.

[0078] Exemplarily, the unloading device 1000 may include a robotic arm, a linear module or other driving structure capable of providing driving force, and a box picking structure connected to the driving structure. The driving structure drives the box picking structure to move so that the box picking structure can grab the material box 3 loaded with processed half-sheet products 21 on the material box circulation device 600, and transport the material box 3 loaded with processed half-sheet products 21 from the material box circulation device 600 to the material box cache device 900.

[0079] In some embodiments, Fig. 9As shown, the half-sheet product processing equipment 10 further includes an optical inspection device 1300 and an electroluminescent inspection device 1400. The optical inspection device 1300 is disposed adjacent to the product transport device 1100, and is configured to receive the processed half-sheet product 21 transported by the product transport device 1100, and to perform optical inspection on the processed half-sheet product 21. The electroluminescent inspection device 1400 is disposed adjacent to the optical inspection device 1300, and is configured to receive the processed half-sheet product 21 after optical inspection, and to perform electroluminescent inspection on the processed half-sheet product 21 after optical inspection. Exemplarily, the optical inspection device 1300 may be an automatic optical inspection (AOI) device, a manual optical inspection device, or the like.

[0080] The processed half-wafer product 21 is subjected to automated optical inspection using the optical inspection device 1300 , and the processed half-wafer product 21 is subjected to automated electroluminescent inspection using the electroluminescent inspection device 1400 , so as to further improve the automation level of the half-wafer product processing equipment 10 .

[0081] In some embodiments, Fig. 9 As shown, the half-wafer product processing equipment 10 also includes an infrared imaging detection device 1500, which is arranged adjacent to the electroluminescent detection device 1400 and is configured to receive the processed half-wafer product 21 after electroluminescent detection and perform infrared imaging detection on the processed half-wafer product 21 after electroluminescent detection.

[0082] The infrared imaging detection device 1500 is used to perform automatic infrared imaging detection on the processed half-wafer product 21 to further improve the automation level of the half-wafer product processing equipment 10.

[0083] In some embodiments, Fig. 9 As shown, the half-sheet product processing equipment 10 further includes a sorting device 1600 and a plurality of unloading devices 1700. The sorting device 1600 is disposed adjacent to the infrared imaging detection device 1500 and is configured to receive the processed half-sheet products 21 after infrared imaging detection and sort the processed half-sheet products 21 after infrared imaging detection into a plurality of grades. The plurality of unloading devices 1700 are disposed adjacent to the sorting device 1600 and are respectively configured to receive a plurality of grades of half-sheet products 21.

[0084] The sorting device 1600 is used to automatically sort the processed half-sheet products 21 into multiple grades, and the unloading device 1700 is used to automatically unload the multiple grades of half-sheet products 21, so as to further improve the automation level of the half-sheet product processing equipment 10.

[0085] In some embodiments, Fig. 9 and Fig.10 As shown, the material box buffer device 900 includes at least four material box buffer positions 910, and the at least four material box buffer positions 910 are respectively configured to buffer the material boxes 3 loaded with processed half-sheet products 21. The product transportation device 1100 includes at least two product transportation mechanisms 1110, each of which is arranged adjacent to at least two material box buffer positions 910 and is configured to transport the processed half-sheet products 21. The sheet guide device 1200 includes at least two sheet guide mechanisms 1210, each of which is arranged adjacent to at least two material box buffer positions 910, and the at least two sheet guide mechanisms 1210 are arranged in a one-to-one correspondence with the at least two product transportation mechanisms 1110, and the sheet guide mechanisms 1210 are configured to place the processed half-sheet products 21 in the material boxes 3 of the at least two material box buffer positions 910 on the product transportation mechanisms 1110 corresponding to the sheet guide mechanisms 1210.

[0086] A plurality of material box cache positions 910 of a material box cache device 900 are used to cache a plurality of material boxes 3 loaded with processed half-sheet products 21, and at least two sheet guide mechanisms 1210 and at least two product transport mechanisms 1110 are used to respectively carry and transport the processed half-sheet products 21 in the material boxes 3 of the plurality of material box cache positions 910, so as to further improve the transportation efficiency of the processed half-sheet products 21, thereby further improving the production efficiency of the half-sheet product processing equipment 10.

[0087] The product transport mechanism 1110 includes a conveyor belt flow line.

[0088] The sheet guide mechanism 1210 may include a robotic arm, a linear module or other driving structure capable of providing driving force and a sheet picking structure connected to the driving structure. The driving structure drives the sheet picking structure to move so that the sheet picking structure can grab the processed half-sheet product 21 in the material box 3 of the material box cache position 910.

[0089] Exemplarily, the sheet unloading device 1700 includes a conveyor belt flow line.

[0090] Exemplarily, the half-sheet product processing equipment 10 further includes a rejection device 2000 , which is disposed adjacent to the product transport mechanism 11100 and is configured to carry unqualified processed half-sheet products 21 .

[0091] In some embodiments, the optical inspection device 1300 includes at least two optical inspection mechanisms 1310, which are respectively disposed adjacent to at least two product transport mechanisms 1110, and are configured to receive the processed half-sheet products 21 transported by the product transport mechanisms 1110, and perform optical inspection on the processed half-sheet products 21. The electroluminescent inspection device 1400 includes at least two electroluminescent inspection mechanisms 1410, which are respectively disposed adjacent to at least two optical inspection mechanisms 1310, and are configured to receive the processed half-sheet products 21 after optical inspection, and perform electroluminescent inspection on the processed half-sheet products 21 after optical inspection. The infrared imaging inspection device 1500 includes at least two infrared imaging inspection mechanisms 1510, which are respectively disposed adjacent to at least two optical inspection mechanisms 1310, and are configured to receive the processed half-sheet products 21 after electroluminescent inspection, and perform infrared imaging inspection on the processed half-sheet products 21 after electroluminescent inspection. The sorting device 1600 includes at least two sorting mechanisms 1610, which are respectively arranged adjacent to at least two infrared imaging detection mechanisms 1510, and are configured to receive the processed half-sheet products 21 after infrared imaging detection, and sort the processed half-sheet products 21 after infrared imaging detection into multiple grades. Among them, one sorting mechanism 1610 is arranged adjacent to at least two unloading devices 1700.

[0092] Among them, a product transport mechanism 1110, an optical detection mechanism 1310, an electroluminescent detection mechanism 1410, an infrared imaging detection mechanism 1510, a sorting mechanism 1610 and at least two unloading devices 1700 form a set of product detection, sorting and unloading flow lines. At least two sets of product detection, sorting and unloading flow lines are used to simultaneously detect, sort and unload the processed half-sheet products 21, so as to further improve the production efficiency of the half-sheet product processing equipment 10.

[0093] For example, Fig.11As shown, the optical detection device 1300 includes two optical detection mechanisms 1310 arranged along the first direction X1, the electroluminescent detection device 1400 includes two electroluminescent detection mechanisms 1410 arranged along the first direction X1, the infrared imaging detection device 1500 includes two infrared imaging detection mechanisms 1510 arranged along the first direction X1, the sorting device 1600 includes two sorting mechanisms 1610 arranged along the first direction X1, and four sheet discharging devices 1700 are arranged along the first direction X1. Among them, one sorting mechanism 1610 is arranged adjacent to the two sheet discharging devices 1700. In addition, the optical detection mechanism 1310, the electroluminescent detection mechanism 1410, the infrared imaging detection mechanism 1510, the sorting mechanism 1610 and the sheet discharging device 1700 are arranged along the second direction X2, so that the above mechanisms are arranged regularly, and the space is used more reasonably, thereby improving the production efficiency of the half-sheet product processing equipment 10 in a limited space.

[0094] In some embodiments, Fig.10 As shown, the material box circulation device 600 for transporting the material box 3 loaded with the processed half-sheet products 21 includes a material box circulation mechanism 610 and a first material box steering mechanism 620. The material box circulation mechanism 610 is configured to transport the material box 3 loaded with the processed half-sheet products 21. The first material box steering mechanism 620 is disposed adjacent to the material box circulation mechanism 610, and is configured to receive the material box 3 loaded with the processed half-sheet products 21 and rotate the material box 3 in a horizontal plane. The unloading device 1000 is further configured to transport the material box 3 loaded with the processed half-sheet products 21 from the first material box steering mechanism 620 to the material box buffer device 900.

[0095] The first material box steering mechanism 620 is used to rotate the material box 3 , so that the box moving device 300 can move the material box 3 to the boat structure 4 .

[0096] In some embodiments, Figures 6 to 8 As shown, the box-forming device 200 includes a box-forming mechanism 210 and a second material box steering mechanism 220. The box-forming mechanism 210 is disposed adjacent to the slicing device 100 and is configured to load the half-sheet product 21 to be processed into the material box 3 located in the material box placement space 101. The second material box steering mechanism 220 is disposed adjacent to the box-forming mechanism 210 and is configured to obtain the material box 3 located in the material box placement space 101 and rotate the material box 3 in a horizontal plane. The box-moving device 300 is further configured to move the material box 3 loaded with the half-sheet product 21 to be processed located in the second material box steering mechanism 220 to the boat structure 4 located in the boat structure placement space 102.

[0097] The second material box steering mechanism 220 is used to rotate the material box 3 to facilitate the sheet guiding device 1200 to take sheets from the material box 3 .

[0098] In some embodiments, Figure 2 As shown, the half-wafer product processing equipment 10 also includes a plurality of vacuum pumping devices 1900, which are respectively arranged in one-to-one correspondence with the plurality of reaction furnaces 400, and are configured to extract the gas from the internal space of the reaction furnace 400 so that the pressure of the internal space of the reaction furnace 400 meets the process production requirements. Exemplarily, the plurality of vacuum pumping devices 1900 are arranged on the side of the reaction furnace 400 away from the boat pushing device 510. The plurality of vacuum pumping devices 1900 are arranged along the first direction X1, and the vacuum pumping devices 1900 and the reaction furnace 400 are arranged along the second direction X2. The vacuum pumping devices 1900 and the reaction furnace 400 are arranged regularly to make more reasonable use of the space, thereby improving the passivation efficiency of the half-wafer product processing equipment 10 in a limited space.

[0099] Exemplarily, the working process of the half-sheet product processing equipment 10 is as follows:

[0100] During the process: the receiving mechanism 110 of the slicing device 100 receives the whole product 2 and conveys the whole product 2 to the slicing mechanism 120. The slicing mechanism 120 receives the whole product 2 and cuts the whole product 2 into at least two half-piece products 21 to be processed. The cleaning mechanism 810 receives the half-piece product 21 to be processed and cleans the half-piece product 21 to be processed. The box forming mechanism 210 receives the cleaned half-piece product 21 to be processed and loads the cleaned half-piece product 21 to be processed into the material box 3 located in the material box placement space 101. The box moving device 300 moves the material box 3 loaded with the half-piece product 21 to be processed located in the material box placement space 101 to the boat structure 4 located in the boat structure placement space 102. The boat moving device 530 moves the boat structure 4 carrying the half-sheet product 21 to be processed to the boat structure buffer device 520 and the boat pushing device 510 in sequence. The boat pushing device 510 sends the boat structure 4 carrying the half-sheet product 21 to be processed into the reactor 400, and the reactor 400 processes the half-sheet product 21.

[0101] After the process is completed: the boat pushing device 510 transports the boat structure 4 carrying the processed half-sheet product 21 out of the reaction furnace 400, and the boat moving device 530 moves the boat structure 4 carrying the processed half-sheet product 21 from the boat pushing device 510 to the boat structure buffer device 520. After the processed half-sheet product 21 in the boat structure 4 is cooled, the boat moving device 530 moves the boat structure 4 carrying the processed half-sheet product 21 from the boat structure buffer device 520 to the boat structure placement space 102. The box moving device 300 unloads the material box 3 loaded with the processed half-sheet product 21 in the boat structure 4 from the boat structure 4 and moves it to the material box circulation device 600.

[0102] The material box circulation device 600 transports the material box 3 loaded with the processed half-sheet product 21 to a place near the unloading device 1000, and the unloading device 1000 transports the material box 3 loaded with the processed half-sheet product 21 from the material box circulation device 600 to the material box buffer device 900. The sheet guide device 1200 obtains the processed half-sheet product 21 in the material box 3 carried by the material box buffer device 900, and places the processed half-sheet product 21 on the product transportation device 1100. The product transportation device 1100 transports the processed half-sheet product 21 to the optical detection mechanism 1310, and the optical detection mechanism 1310 performs optical detection on the processed half-sheet product 21. After the optical detection, the processed half-sheet product 21 enters the electroluminescent detection mechanism 1410, and the electroluminescent detection mechanism 1410 performs electroluminescent detection on the processed half-sheet product 21. The processed half-sheet products 21 after the electroluminescence detection enter the infrared imaging detection mechanism 1510, and the infrared imaging detection mechanism 1510 performs infrared imaging detection on the processed half-sheet products 21. The processed half-sheet products 21 after the infrared imaging detection enter the sorting mechanism 1610, and the sorting mechanism 1610 sorts the processed half-sheet products 21 into multiple grades. The processed half-sheet products 21 of different grades enter the unloading device 1700 from the sorting mechanism 1610, and the unloading device 1700 unloads the processed half-sheet products 21.

[0103] In addition, the empty material boxes 3 carried by the material box cache device 900 are sent to the unloading device 1000 by the material box cache device 900, and the unloading device 1000 conveys the empty material boxes 3, and then transports them to a place close to the lower box device 700 by another material box circulation device 600. The lower box device 700 moves the empty material boxes 3 from the material box circulation device 600 to the material box placement space 101 to wait for loading the next batch of half-sheet products 21 to be processed.

[0104] Fig.12 FIG. 1 is a schematic diagram of the structure of a passivation production line provided in one embodiment of the present application. Fig.12 As shown, the passivation production line 1 includes at least one half-wafer product processing device 10 as mentioned in the above embodiment. Wherein, in the case where the passivation production line 1 includes multiple half-wafer product processing devices 10, the multiple half-wafer product processing devices 10 are arranged in a matrix in a horizontal plane, or the multiple half-wafer product processing devices 10 are arranged in a matrix in a vertical plane, or the multiple half-wafer product processing devices 10 are arranged in a matrix in a horizontal plane and a vertical plane.

[0105] Since the passivation production line 1 includes the half-wafer product processing equipment 10, all technical features and technical effects of the passivation production line 1 including the half-wafer product processing equipment 10 are not repeated here.

[0106] Fig.13The figure shows a schematic diagram of the structure of a solar cell production line provided by an embodiment of the present application. Fig.13 As shown, the solar cell production line 11 includes at least one half-cell product processing device 10 as mentioned in the above embodiment.

[0107] Exemplarily, when the solar cell production line 11 includes multiple half-cell product processing equipment 10, the multiple half-cell product processing equipment 10 are arranged in a matrix in a horizontal plane, or the multiple half-cell product processing equipment 10 are arranged in a matrix in a vertical plane, or the multiple half-cell product processing equipment 10 are arranged in a matrix in a horizontal plane and a vertical plane.

[0108] Since the solar cell production line 11 includes the half-cell product processing equipment 10 , the solar cell production line 11 includes all the technical features and technical effects of the half-cell product processing equipment 10 , which will not be described in detail herein.

[0109] An embodiment of the present application provides a solar cell production process, which uses at least one half-cell product processing device 10 as mentioned in the above embodiment.

[0110] In the embodiments of the present application, if not clearly defined, the connection may be in the form of detachable connection by means of bolts and nuts, screws, buckles, magnets, etc. In some connections, if there is no special requirement for detachable connection, non-detachable connection may be performed by means of welding, bonding, etc.

[0111] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0112] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0113] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0114] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0115] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A half-sheet product processing equipment, characterized in that: include: A splitting device, configured to cut a whole piece of product into at least two half pieces of product to be processed; a box-forming device, arranged adjacent to the slicing device, wherein at least one side of the box-forming device is provided with a material box placement space, wherein the material box placement space is configured to accommodate a material box, and the box-forming device is configured to load the half-sheet product to be processed into the material box located in the material box placement space; a box moving device, arranged adjacent to the box forming device, wherein at least one side of the box moving device is provided with a boat structure placement space, wherein the boat structure placement space is configured to accommodate a boat structure, and wherein the box moving device is configured to move the material box loaded with the half-sheet product to be processed located in the material box placement space to the boat structure located in the boat structure placement space, or to unload the material box loaded with the processed half-sheet product from the boat structure located in the boat structure placement space; A reaction furnace, configured to coat the half-wafer product; The boat transport device is arranged between the box moving device and the reaction furnace, and is configured to transport the boat structure loaded with the half-wafer products to be processed to the reaction furnace so that the reaction furnace can coat the half-wafer products carried by the boat structure, or to transport the boat structure loaded with the processed half-wafer products out of the reaction furnace.

2. The half-sheet product processing equipment according to claim 1, characterized in that: Also includes: At least two material box circulation devices are arranged adjacent to the box moving device and spaced apart in the vertical direction, wherein one of the material box circulation devices is configured to transport an empty material box, and the other material box circulation device is configured to transport a material box loaded with the processed half-sheet product; A lower box device, disposed adjacent to the material box circulation device, and configured to carry the empty material box from the material box circulation device to the material box placement space; Wherein, the box moving device is further configured to move the material box loaded with the processed half-sheet product carried by the boat structure from the boat structure to the material box circulation device.

3. The half-sheet product processing equipment according to claim 1, characterized in that: The number of the reaction furnaces is multiple; Wherein, the boat transport device comprises: at least one boat pushing device, disposed adjacent to the plurality of reaction furnaces, and configured to push the boat structure into any one of the reaction furnaces or to transport the boat structure out of any one of the reaction furnaces; a plurality of boat structure caching devices, disposed adjacent to the boat pushing device and configured to cache the boat structure; A boat moving device is arranged adjacent to the boat pushing device, the boat structure cache device and the boat structure placement space, and is configured to move the boat structure from the boat structure placement space to the boat structure cache device, and move the boat structure from the boat structure cache device to the boat pushing device, or move the boat structure from the boat pushing device to the boat structure cache device, and move the boat structure from the boat structure cache device to the boat structure placement space.

4. The half-sheet product processing equipment according to claim 3, characterized in that: The number of the boat pushing devices is multiple; A plurality of the reaction furnaces are arranged along a first direction, a plurality of the boat pushers are arranged along the first direction, a plurality of the boat structure buffer devices are arranged along the first direction, the boat structure buffer devices, the boat pushers and the reaction furnaces are arranged along a second direction, and the second direction intersects the first direction; And / or, the boat moving device is arranged above the boat structure buffer device and the boat pushing device.

5. The half-sheet product processing equipment according to claim 3, characterized in that: There are multiple boat pushing devices, and the multiple boat pushing devices are arranged along a first direction; The plurality of reaction furnaces are arranged along the first direction and arranged in multiple layers along the vertical direction. The boat pushing device can move along the vertical direction to send the boat structure into or out of the reaction furnace at any layer.

6. The half-sheet product processing equipment according to claim 4, characterized in that: The boat moving device comprises: A first linear motion mechanism, configured to be movable along the second direction; a second linear motion mechanism connected to the first linear motion mechanism and configured to be able to move along the first direction, wherein the second linear motion mechanism is driven by the first linear motion mechanism and can also move along the second direction; The boat grabbing mechanism is connected to the second linear motion mechanism and is configured to grab the boat structure, wherein the boat grabbing mechanism is driven by the second linear motion mechanism to move along the first direction and the second direction.

7. The half-sheet product processing equipment according to any one of claims 1 to 6, characterized in that: Also includes: a cleaning device, disposed between the splitting device and the boxing device, configured to receive the half-sheet product to be processed on the splitting device and clean the half-sheet product to be processed; Wherein, the box-forming device is further configured to load the cleaned half-sheet product to be processed into the material box located in the material box placement space.

8. The half-sheet product processing equipment according to claim 7, characterized in that: The splitting device comprises: at least one receiving mechanism, configured to receive a whole piece of the product; At least two splitting mechanisms, each of the receiving mechanisms is connected to at least one of the splitting mechanisms, and the splitting mechanisms are configured to receive the product to be processed conveyed by the receiving mechanisms and cut the product to be processed into at least two half-pieces of the product to be processed; Wherein, the cleaning device comprises: at least two cleaning mechanisms, respectively connected to at least two of the splitting mechanisms, and configured to receive the half-sheet products to be processed on the splitting mechanisms and clean the half-sheet products to be processed; Wherein, the box-forming device comprises: At least two box-forming mechanisms are respectively connected to at least two of the cleaning mechanisms, and are configured to receive the cleaned half-sheet products to be processed on the cleaning mechanisms, and load the cleaned half-sheet products to be processed into the material box located in the material box placement space.

9. The half-sheet product processing equipment according to any one of claims 2 to 6, characterized in that: Also includes: a material box buffer device, disposed adjacent to the material box circulation device, and configured to buffer the material box loaded with the processed half-sheet product; a material unloading device, disposed above the material box circulation device and the material box buffer device, and configured to transport the material box loaded with the processed half-sheet product from the material box circulation device to the material box buffer device; A product transport device configured to transport the processed half-piece product; The sheet guide device is disposed adjacent to the unloading device and the product transport device, and is configured to obtain the processed half-sheet products in the material box carried by the material box buffer device, and place the processed half-sheet products on the product transport device.

10. The half-sheet product processing equipment according to claim 9, characterized in that: Also includes: an optical inspection device, disposed adjacent to the product transport device, configured to receive the processed half-sheet product conveyed by the product transport device and perform optical inspection on the processed half-sheet product; The electroluminescent detection device is disposed adjacent to the optical detection device, and is configured to receive the processed half-wafer product after optical detection, and perform electroluminescent detection on the processed half-wafer product after optical detection.

11. The half-sheet product processing equipment according to claim 10, characterized in that: Also includes: The infrared imaging detection device is disposed adjacent to the electroluminescent detection device, and is configured to receive the processed half-wafer product after the electroluminescent detection, and perform infrared imaging detection on the processed half-wafer product after the electroluminescent detection.

12. The half-sheet product processing equipment according to claim 11, characterized in that: Also includes: A sorting device is disposed adjacent to the infrared imaging detection device and is configured to receive the processed half-sheet products after infrared imaging detection and sort the processed half-sheet products after infrared imaging detection into multiple grades; A plurality of sheet unloading devices are arranged adjacent to the sorting device and are respectively configured to receive the half-sheet products of a plurality of grades.

13. The half-sheet product processing equipment according to claim 9, characterized in that: The material box circulation device for transporting the material box loaded with the processed half-sheet product comprises: A material box circulation mechanism for transporting the material box loaded with the processed half-sheet product; a first material box steering mechanism, disposed adjacent to the material box circulation mechanism, configured to receive the material box loaded with the processed half-sheet product and rotate the material box in a horizontal plane; Wherein, the unloading device is further configured to transport the material box loaded with the processed half-sheet product from the first material box steering mechanism to the material box buffer device.

14. The half-sheet product processing equipment according to any one of claims 1 to 6, characterized in that: The box-forming device comprises: a box-forming mechanism, disposed adjacent to the splitting device, and configured to load the half-sheet product to be processed into the material box located in the material box placement space; A second material box steering mechanism is disposed adjacent to the box forming mechanism and is configured to obtain the material box located in the material box placement space and rotate the material box in a horizontal plane; Wherein, the box moving device is further configured to move the material box loaded with the half-sheet product to be processed located at the second material box turning mechanism to the boat structure located in the boat structure placement space.

15. A passivation production line, characterized in that: include: At least one half-sheet product processing device according to any one of claims 1 to 14; Wherein, when the passivation production line includes a plurality of the half-wafer product processing equipment, the plurality of the half-wafer product processing equipment are arranged in a matrix in a horizontal plane, and / or the plurality of the half-wafer product processing equipment are arranged in a matrix in a vertical plane.

16. A solar cell production line, characterized in that: include: At least one half-sheet product processing device according to any one of claims 1 to 14.

17. A solar cell production process, characterized in that: The solar cell production process adopts: at least one half-cell product processing equipment according to any one of claims 1 to 14.

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