An exhaust system

Abstract

The present invention provides an exhaust system, which cooperates with wafer processing equipment. A glue spreading device is provided in the exhaust system, and the exhaust system comprises: an exhaust bracket, the exhaust bracket is provided with an opening, and the glue spreading device is separated from the exhaust bracket through the opening; an exhaust column; a hinge device, one end of the hinge device is fixedly connected to the exhaust column, and the other end of the hinge device is fixedly connected to the exhaust bracket, and the hinge device drives the exhaust column to switch between a first state and a second state, wherein the first state is that the exhaust column blocks at least part of the opening, and the second state is that the exhaust column avoids the opening, the exhaust column and the exhaust bracket are connected to each other by the hinge device, and the exhaust bracket can be flipped to a side away from the exhaust bracket, so that the hinge device drives the exhaust column to switch between the first state and the second state, and in the second state, it is convenient to take out the glue spreading device inside the exhaust system, avoid position interference between the exhaust column and the glue spreading device, and improve the convenience of operation.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer processing, and in particular to an exhaust system. Background Art

[0002] The exhaust system is provided with an exhaust column and a glue spreading device inside to facilitate wafer processing. However, during the actual construction process, there is a problem: when taking out the glue spreading device, the exhaust column and the glue spreading device interfere with each other, making it inconvenient to take out the glue spreading device. Therefore, an exhaust system with a flippable exhaust column is provided to avoid positional interference between the exhaust column and the glue spreading device and facilitate the removal of the glue spreading device. Summary of the invention

[0003] Therefore, the present invention provides an exhaust system, in which the exhaust column can be turned over to facilitate taking out the glue-distributing device.

[0004] To solve the above problems, the present invention provides an exhaust system, which cooperates with wafer processing equipment. A glue spreading device is provided in the exhaust system, and the exhaust system comprises: an exhaust bracket, the exhaust bracket is provided with an opening, and the glue spreading device is separated from the exhaust bracket through the opening; an exhaust column; a hinge device, one end of the hinge device is fixedly connected to the exhaust column, and the other end of the hinge device is fixedly connected to the exhaust bracket, and the hinge device drives the exhaust column to switch between a first state and a second state, wherein the first state is that the exhaust column blocks at least part of the opening, and the second state is that the exhaust column avoids the opening.

[0005] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the exhaust column and the exhaust bracket are connected to each other by a hinge device, and the exhaust bracket can be flipped to the side away from the exhaust bracket, so that the hinge device drives the exhaust column to switch between the first state and the second state. In the second state, it is convenient to remove the glue spreading device inside the exhaust system, avoiding position interference between the exhaust column and the glue spreading device, and improving the convenience of operation.

[0006] Furthermore, the hinge device includes: a first flip member; a second flip member; and a rotation axis, and the first flip member and the second flip member are connected via the rotation axis.

[0007] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the first flip member and the second flip member are rotatably connected through a rotating shaft, so that the first flip member and the second flip member can rotate with the rotating shaft as the rotation center, thereby driving the exhaust column to rotate to the side away from the exhaust bracket, thereby taking out the glue leveling device, the first flip member and the second flip member are connected through the rotating shaft, the structure is relatively simple, and it is more convenient to disassemble and install.

[0008] Furthermore, the hinge device also includes: a first connecting member, one side of the first connecting member is fixedly connected to the first flip member, and the other side of the first connecting member is fixedly connected to the exhaust column.

[0009] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the exhaust column and the first flip piece are connected via a first connecting piece, so that the first flip piece can drive the exhaust column to flip, and at the same time the first connecting piece increases the stability of the connection between the exhaust column and the first flip piece, thereby preventing the exhaust column from falling off due to deformation of the first flip piece during the flipping process.

[0010] Furthermore, the hinge device also includes: a second connecting member, one side of the second connecting member is fixedly connected to the second flip member, and the other side of the second connecting member is fixedly connected to the exhaust bracket.

[0011] Compared with the prior art, the technical effect achieved by adopting this technical solution is that the exhaust bracket and the second flip member are fixedly connected via the second connecting member, thereby increasing the stability of the fixed connection.

[0012] Furthermore, the hinge device also includes: a first abutment member, which is fixedly connected to the first connecting member; a second abutment member, which is fixedly connected to the second connecting member, wherein after the exhaust column is flipped to the side away from the exhaust bracket, the first abutment member and the second abutment member abut against each other.

[0013] Compared with the prior art, the technical effect achieved by adopting this technical solution is that the first abutment member and the second abutment member abut against each other, thereby increasing the stability of the exhaust column, improving the safety of the exhaust system when in use, and avoiding pinching injuries.

[0014] Furthermore, the hinge device also includes: a locking member, which is fixedly connected to the first abutment member; wherein the locking member is provided with a locking hole and a fixing pin, and the second abutment member is provided with a matching hole, and when the first abutment member and the second abutment member abut against each other, the locking hole and the matching hole match each other, so that the fixing pin passes through the locking hole and the matching hole.

[0015] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the locking member is provided with a locking hole, and the second abutting member is provided with a matching hole. When the first abutting member and the second abutting member abut against each other, the locking hole and the matching hole match each other, and the fixing pin passes through the locking hole and the matching hole, thereby limiting the movement of the exhaust column, avoiding the exhaust column from rebounding, and increasing the safety of the exhaust system when in use.

[0016] Furthermore, the exhaust column includes: an exhaust interface, the exhaust interface is arranged on the exhaust column, an exhaust channel is arranged in the exhaust column, and the exhaust interface is connected with the exhaust channel so that the gas can be discharged through the exhaust interface.

[0017] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: an exhaust interface is provided on the exhaust column, the exhaust interface is used to connect the air pipe, and the exhaust interface is connected to the exhaust channel, so that the gas in the exhaust channel flows into the air pipe.

[0018] Furthermore, a pipe is provided in the exhaust column, and the pipe is a hollow structure to form an exhaust passage.

[0019] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: a pipeline is provided in the exhaust column, and the internal space of the pipeline forms an exhaust channel, so that during the cleaning and maintenance process, the pipeline can be directly disassembled to clean and maintain the exhaust channel, and the operation is more convenient. At the same time, the exhaust column has a sleeve structure, which makes the exhaust pressure at the exhaust interface more uniform.

[0020] Furthermore, the exhaust column includes: a first column member and a second column member, and the first column member and the second column member are detachably connected.

[0021] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the exhaust column includes a first column member and a second column member, the first column member and the second column member are detachably connected and surround the pipeline, which is convenient for staff to disassemble and clean during maintenance and cleaning, making cleaning more convenient.

[0022] Furthermore, the exhaust column also includes: a visual window, which is arranged on the outside of the exhaust column.

[0023] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: a visual window is provided on the exhaust column, which is convenient for the staff to observe the dirt inside the exhaust column so as to clean it in time.

[0024] After adopting the technical solution of the present invention, the following technical effects can be achieved:

[0025] (1) The exhaust column and the exhaust bracket are connected to each other through a hinge device, and the exhaust bracket can be flipped to the side away from the exhaust bracket, so that the hinge device drives the exhaust column to switch between the first state and the second state. In the second state, it is convenient to remove the glue-spreading device inside the exhaust system, avoiding position interference between the exhaust column and the glue-spreading device, thereby improving the convenience of operation;

[0026] (2) The first flip member and the second flip member are rotatably connected via a rotating shaft, so that the first flip member and the second flip member can rotate around the rotating shaft as the rotation center, thereby driving the exhaust column to rotate to a side away from the exhaust bracket, so as to remove the glue-distributing device. The first flip member and the second flip member are connected via the rotating shaft, and the structure is relatively simple, and it is relatively convenient to disassemble and install.

[0027] (3) The exhaust column and the first flip member are connected via the first connecting member, so that the first flip member can drive the exhaust column to flip. At the same time, the first connecting member increases the stability of the connection between the exhaust column and the first flip member, thereby preventing the first flip member from being deformed and falling off during the flipping process. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the structure of an exhaust system provided by an embodiment of the present invention;

[0029] Figure 2 for Figure 1 Enlarged view of area A in the middle;

[0030] Figure 3 It is a structural schematic diagram of the exhaust system from the second perspective;

[0031] Figure 4 for Figure 3 Enlarged view of middle area B;

[0032] Figure 5 is a structural schematic diagram of a hinge device;

[0033] Figure 6 is a schematic structural diagram of a second abutting member;

[0034] Figure 7 It is a structural schematic diagram of the exhaust column;

[0035] Figure 8 for Figure 1 Cross-sectional view along the AA direction.

[0036] Description of reference numerals:

[0037] 100: exhaust system; 110: exhaust bracket; 110a: opening; 120: exhaust column; 120a: first column member; 120b: second column member; 121: exhaust interface; 122: exhaust channel; 123: pipeline; 124: visual window; 130: hinge device; 131: first flip member; 132: second flip member; 133: rotating shaft; 135: first connecting member; 136: second connecting member; 137: first abutting member; 138: second abutting member; 138a: matching hole; 138b: fixing pin; 139: locking member; 139a: locking hole. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] As attached Figure 1 As shown, the present invention provides an exhaust system 100, which cooperates with wafer processing equipment. The exhaust system 100 is provided with a glue spreading device, and the exhaust system 100 includes: an exhaust bracket 110, an exhaust column 120 and a hinge device 130. The exhaust bracket 110 is provided with an opening 110a, and the glue spreading device is separated from the exhaust system 100 through the opening 110a; one end of the hinge device 130 is fixedly connected to the exhaust column 120, and the other end of the hinge device 130 is fixedly connected to the exhaust bracket 110, and the hinge device 130 can drive the exhaust column 120 to switch between a first state and a second state; wherein, the first state is that the exhaust column 120 blocks at least part of the opening 110a, and the second state is that the exhaust column 120 avoids the opening 110a.

[0040] For example, as shown in the attached Figure 1 As shown, the exhaust system 100 includes: an exhaust bracket 110, an exhaust column 120 and a hinge device 130. The hinge device 130 is arranged between the exhaust bracket 110 and the exhaust column 120. The hinge device 130 can drive the exhaust column 120 to switch between a first state and a second state. When taking out the glue spreading device, the hinge device 130 drives the exhaust column 120 to switch to the second state, and the exhaust column 120 avoids the opening 110a, thereby facilitating the staff to take out the glue spreading device and preventing the glue spreading device and the exhaust column 120 from interfering with each other in position during the movement.

[0041] For example, the hinge device 130 includes: a first flip member 131 , a second flip member 132 and a rotation shaft 133 , and the first flip member 131 and the second flip member 132 are connected via the rotation shaft 133 .

[0042] For example, as shown in the attached Figure 4 As shown, the hinge device 130 includes: a first flip member 131, a second flip member 132, as shown in the attached Figure 5 As shown, the first flip member 131 and the second flip member 132 are connected by the rotating shaft 133, so that the first flip member 131 and the second flip member 132 can rotate with the rotating shaft 133 as the rotation center, thereby driving the exhaust column 120 to rotate to the side away from the exhaust bracket 110, so as to take out the glue spreading device. The first flip member 131 and the second flip member 132 are connected by the rotating shaft 133, the structure is relatively simple, and it is convenient to disassemble and install.

[0043] For example, the hinge device 130 further includes: a first connecting member 135 , one side of the first connecting member 135 is fixedly connected to the first flip member 131 , and the other side of the first connecting member 135 is fixedly connected to the exhaust column 120 .

[0044] For example, as shown in the attached Figure 4As shown, one side of the first connecting member 135 is fixedly connected to the first flip member 131. Figure 2 As shown, the other side of the first connecting member 135 is fixedly connected to the exhaust column 120, and the first flip member 131 can drive the exhaust column 120 to switch between the first state and the second state. In addition, the first connecting member 135 increases the stability of the connection between the exhaust column 120 and the first flip member 131 to avoid deformation of the first flip member 131 during the flipping process, which may cause the exhaust column 120 to fall off.

[0045] Specifically, the hinge device 130 further includes: a second connecting member 136 , one side of the second connecting member 136 is fixedly connected to the second flip member 132 , and the other side of the second connecting member 136 is fixedly connected to the exhaust bracket 110 .

[0046] Specifically, as attached Figure 4 As shown, attached Figure 4 Yes Figure 3 In the enlarged view of the middle area B, one side of the first connecting member 135 is fixedly connected to the first flip member 131, and the other side of the second connecting member 136 is fixedly connected to the exhaust bracket 110, thereby increasing the stability among the first connecting member 135, the first flip member 131 and the exhaust bracket 110.

[0047] Specifically, the hinge device 130 also includes: a first abutment member 137 and a second abutment member 138, the first abutment member 137 is fixedly connected to the first connecting member 135, and the second abutment member 138 is fixedly connected to the second connecting member 136; wherein, when the exhaust column 120 is in the first state, the first abutment member 137 and the second abutment member 138 abut against each other.

[0048] Specifically, as attached Figure 2 As shown, the first abutment member 137 is fixedly connected to the first connecting member 135, and the second abutment member 138 is fixedly connected to the second connecting member 136. The first abutment member 137 and the second abutment member 138 abut against each other, which increases the stability of the exhaust column 120 and improves the safety of the exhaust system 100 when in use to avoid pinching.

[0049] For example, the hinge device 130 also includes: a locking member 139, which is fixedly connected to the first abutment member 137; wherein the locking member 139 is provided with a locking hole 139a, and the second abutment member 138 is provided with a matching hole 138a and a fixing pin 138b, and when the first abutment member 137 and the second abutment member 138 abut against each other, the locking hole 139a and the matching hole 138a match with each other, so that the fixing pin 138b passes through the locking hole 139a and the matching hole 138a.

[0050] For example, see the attached Figure 2 As shown, the locking member 139 is provided with a locking hole 139a. Figure 6 As shown, the second abutment member 138 is provided with a matching hole 138a. When the first abutment member 137 and the second abutment member 138 abut against each other, the locking hole 139a and the matching hole 138a match with each other, and the fixing pin 138b passes through the locking hole 139a and the matching hole 138a, thereby limiting the movement of the exhaust column 120 and preventing the exhaust column 120 from rebounding, thereby increasing the safety of the exhaust system 100 when in use.

[0051] In addition, when the exhaust column 120 switches to the first state, the exhaust column 120 is prevented from rebounding, and the flipping of the exhaust column 120 is limited by the fixing pin 138b, thereby avoiding the exhaust column 120 from flipping during the use of the exhaust system 100, thereby improving the stability of the exhaust system 100.

[0052] Specifically, the exhaust column 120 includes: an exhaust interface 121, which is arranged on the exhaust column 120; wherein, an exhaust channel 122 is arranged in the exhaust column 120, and the exhaust interface 121 is connected to the exhaust channel 122 so that the gas can be discharged through the exhaust interface 121.

[0053] Specifically, as attached Figure 2 As shown, the exhaust column 120 is provided with an exhaust interface 121, and there are multiple exhaust interfaces 121. The exhaust interface 121 is used to connect the air pipe. The exhaust interface 121 is connected to the exhaust channel 122, so that the gas in the exhaust channel 122 flows into the air pipe.

[0054] For example, a pipe 123 is provided in the exhaust column 120 , and the pipe 123 is a hollow structure to form an exhaust passage 122 .

[0055] For example, see the attached Figure 8 As shown, a pipe 123 is provided in the exhaust column 120, and the internal space of the pipe 123 forms an exhaust channel 122, so that during the cleaning and maintenance process, the pipe 123 can be directly disassembled to clean and maintain the exhaust channel 122, which makes the operation more convenient. At the same time, the exhaust column 120 has a sleeve structure, which makes the exhaust pressure at the exhaust interface 121 more uniform.

[0056] Specifically, the exhaust column 120 further includes: a first column member 120a and a second column member 120b, and the first column member 120a and the second column member 120b are detachably connected.

[0057] Specifically, as attached Figure 7 As shown, the exhaust column 120 includes: a first column member 120a and a second column member 120b. The first column member 120a and the second column member 120b are detachably connected and surround the pipeline 123. During maintenance and cleaning, it is easy for the staff to disassemble and clean them, making cleaning more convenient.

[0058] For example, the exhaust column 120 further includes a visual window 124 , which is disposed on the outer side of the exhaust column 120 .

[0059] For example, as shown in the attached Figure 1 As shown, a visual window 124 is provided on the exhaust column 120 to facilitate the staff to observe the dirt inside the exhaust column 120 so as to clean it in time.

[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An exhaust system, characterized in that: The exhaust system (100) cooperates with wafer processing equipment, a glue spreading device is provided in the exhaust system (100), and the exhaust system (100) comprises: An exhaust bracket (110), the exhaust bracket (110) being provided with an opening (110a), and the glue-splitting device is separated from the exhaust bracket (110) through the opening (110a); An exhaust column (120); the exhaust column (120) comprises: an exhaust interface (121), the exhaust interface (121) being arranged on the exhaust column (120); wherein an exhaust channel (122) is arranged inside the exhaust column (120), the exhaust interface (121) being in communication with the exhaust channel (122) so that gas can be discharged through the exhaust interface (121); a pipeline (123) is arranged inside the exhaust column (120), the pipeline (123) being a hollow structure so as to form the exhaust channel (122); a hinge device (130), one end of the hinge device (130) being fixedly connected to the exhaust column (120), and the other end of the hinge device (130) being fixedly connected to the exhaust bracket (110), and the hinge device (130) being capable of driving the exhaust column (120) to switch between a first state and a second state; The first state is that the exhaust column (120) blocks at least a portion of the opening (110a), and the second state is that the exhaust column (120) avoids the opening (110a).

2. The exhaust system according to claim 1, characterized in that: The hinge device (130) comprises: A first turning member (131); A second turning member (132); A rotating shaft (133), wherein the first flip member (131) and the second flip member (132) are connected via the rotating shaft (133).

3. The exhaust system according to claim 2, characterized in that: The hinge device (130) further includes: A first connecting member (135), one side of the first connecting member (135) is fixedly connected to the first flip member (131), and the other side of the first connecting member (135) is fixedly connected to the exhaust column (120).

4. The exhaust system according to claim 3, characterized in that: The hinge device (130) further includes: A second connecting member (136), wherein one side of the second connecting member (136) is fixedly connected to the second flip member (132), and the other side of the second connecting member (136) is fixedly connected to the exhaust bracket (110).

5. The exhaust system according to claim 4, characterized in that: The hinge device (130) further includes: A first abutting member (137), wherein the first abutting member (137) is fixedly connected to the first connecting member (135); a second abutting member (138), wherein the second abutting member (138) is fixedly connected to the second connecting member (136); Wherein, when the exhaust column (120) is in the first state, the first abutment member (137) and the second abutment member (138) abut against each other.

6. The exhaust system according to claim 5, characterized in that: The hinge device (130) further includes: A locking member (139), wherein the locking member (139) is fixedly connected to the first abutting member (137); The locking member (139) is provided with a locking hole (139a), and the second abutting member (138) is provided with a matching hole (138a) and a fixing pin (138b); when the first abutting member (137) and the second abutting member (138) abut against each other, the locking hole (139a) and the matching hole (138a) match each other, so that the fixing pin (138b) passes through the locking hole (139a) and the matching hole (138a).

7. The exhaust system according to claim 1, characterized in that: The exhaust column (120) further comprises: A first column member (120a) and a second column member (120b), wherein the first column member (120a) and the second column member (120b) are detachably connected.

8. The exhaust system according to claim 7, characterized in that: The exhaust column (120) further comprises: A visible window (124), wherein the visible window (124) is arranged on the outside of the exhaust column (120).

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