Turnover device and wafer detection system

Abstract

The invention provides a turnover device and a wafer detection system.The turnover device comprises a rack mechanism, a rotating mechanism and a connecting mechanism, the rack mechanism comprises a first supporting frame, a connecting frame and a second supporting frame which are connected in the length direction, the first supporting frame is a cubic frame, and the rotating mechanism is arranged in the length direction; one end of the rotating mechanism is arranged on the first supporting frame, the other end of the rotating mechanism is arranged on the second supporting frame, the connecting mechanism comprises a first connecting assembly and a second connecting assembly which are arranged at intervals, the first connecting assembly and the second connecting assembly are connected with the rotating mechanism and the testing machine respectively, and the rotating mechanism can drive the connecting mechanism to rotate relative to the rack mechanism. When the testing machine is arranged on the probe station, the connecting mechanism extends in the height direction, the distance between the testing machine and the rotating mechanism in the width direction can be reduced, then the torque applied by the testing machine to the connecting mechanism is reduced, the problem that the connecting mechanism is fractured due to the fact that the connecting mechanism bears large torque is avoided, and the testing machine is beneficial to bearing weight increase of the connecting mechanism.

Description

Technical Field

[0001] The present application relates to the technical field of wafer detection systems, and in particular to a flipping device and a wafer detection system. Background Art

[0002] When performing wafer inspection, the tester needs to be flipped over and placed on top of the probe station and docked with the probe station. As wafer chips become smaller and smaller and functional circuits become more complex, the size and weight of the tester continue to increase. How to effectively flip the heavier tester over the probe station has become a technical problem that needs to be solved. Summary of the invention

[0003] The purpose of the present application is to provide a flipping device and a wafer inspection system to solve the technical problem of how to effectively flip a heavy test machine to the top of a probe station.

[0004] In a first aspect, the present application provides a flipping device, which is used to flip a test machine onto a probe table, and the flipping device includes: A frame mechanism, the frame mechanism comprising a first support frame, a second support frame and a connecting frame respectively connecting the first support frame and the second support frame, the first support frame and the second support frame are arranged at intervals along the length direction, and the first support frame is a cubic frame; A rotating mechanism, wherein the rotating mechanism is arranged along the length direction, one end of the rotating mechanism is arranged on the first supporting frame, and the other end of the rotating mechanism is arranged on the second supporting frame; and A connecting mechanism, the connecting mechanism comprising a first connecting component and a second connecting component arranged at intervals, the first connecting component respectively connecting the rotating mechanism and the testing machine, and the second connecting component respectively connecting the rotating mechanism and the testing machine: The rotating mechanism can rotate relative to the frame mechanism and drive the connecting mechanism to rotate relative to the frame mechanism. When the test machine is placed on the probe table, the first connecting component and the second connecting component of the connecting mechanism extend in the height direction.

[0005] In the flipping device provided by the present application, the first support frame and the second support frame are respectively used to bear the two ends of the rotating mechanism, the first support frame is a cubic frame, which can improve the overall structural stability of the first support frame, the first support frame and the second support frame of the frame mechanism are fixedly connected by a connecting frame, so that the first support frame and the second support frame form an integrated structure through the connecting frame, which can improve the stability of the frame mechanism, and the two ends of the rotating mechanism are respectively arranged on the first support frame and the second support frame, and the stability of the first support frame and the second support frame is relatively high, which is convenient for the rotating mechanism to flip the heavier test machine and flip it onto the probe station. When the test machine is arranged on the probe station, the first connecting component and the second connecting component of the connecting mechanism extend in the height direction, which can reduce the distance between the test machine and the rotating mechanism in the width direction, thereby reducing the torque applied by the test machine to the first connecting component and the second connecting component, which can avoid problems such as the connection mechanism breaking when bearing a large torque, which is beneficial to the test machine with increased weight bearing capacity of the connection mechanism.

[0006] Wherein, the first connecting assembly includes a first connecting side plate and a first corner block, the first connecting side plate is connected to the rotating mechanism, the first corner block is arranged on a side of the first connecting side plate away from the rotating mechanism, the first corner block includes a first connecting portion and a second connecting portion connected and perpendicular to each other, the first connecting portion is connected to the first connecting side plate, and the second connecting portion is connected to the testing machine; The second connecting component includes a second connecting side plate and a second corner block, the second connecting side plate is connected to the rotating mechanism, the second corner block is arranged on the side of the second connecting side plate away from the rotating mechanism, the second corner block includes a third connecting part and a fourth connecting part that are connected and perpendicular to each other, the third connecting part is connected to the second connecting side plate, and the fourth connecting part is connected to the testing machine.

[0007] Wherein, the rotating mechanism includes a rotating motor, a reduction assembly and a rotating shaft assembly connected in sequence, the rotating motor drives the rotating shaft assembly to rotate through the reduction assembly, the reduction assembly includes a first reducer and a second reducer connected to each other, the first reducer is connected to the rotating motor, and the second reducer is connected to the rotating shaft assembly, the reduction assembly also includes a reducer seat, a first support block and a second support block, the reducer seat is fixed on the first support frame, and the reducer seat is surrounded by at least part of the outer periphery of the second reducer and is fixedly connected to the second reducer, the first support block and the second support block are arranged on the side of the reducer seat away from the rotating shaft assembly, and the first support block and the second support block are respectively arranged at both ends of the reducer seat, the first support block includes a first support portion and a second support portion connected and perpendicular to each other, the first support portion is connected to the first support frame, and the second support portion is connected to the reducer seat, the second support block includes a third support portion and a fourth support portion connected and perpendicular to each other, the third support portion is connected to the first support frame, and the fourth support portion is connected to the reducer seat.

[0008] In which, the rotating shaft assembly also includes a first flange, a shaft body and a second flange, the outer periphery of the first flange is fixedly connected to the reduction assembly and the shaft body, the axis of the first flange is provided with a first through hole axially passing through, the first through hole is used to pass through the shaft body, a first matching portion is provided on the first through hole, an end of the shaft body close to the first flange is provided with a second matching portion, the first matching portion and the second matching portion cooperate to limit the shaft body, one of the first matching portion and the second matching portion is a groove, and the other is a protrusion; the axis of the second flange is provided with a second through hole axially passing through, the second through hole is used to pass through the shaft body, the second through hole is provided with a third matching portion, and an end of the shaft body close to the second flange is provided with a fourth matching portion, the third matching portion and the fourth matching portion cooperate to limit the shaft body, one of the third matching portion and the fourth matching portion is a groove, and the other is a protrusion.

[0009] Wherein, the first flange includes a first body and a first protrusion, the first body is fixedly connected to the first connecting side plate, the first protrusion is arranged on the side of the first body away from the deceleration assembly; the first connecting side plate is provided with a first through slot, the first protrusion is arranged in the first through slot and at least partially abuts against the slot wall of the first through slot to limit the first connecting side plate from rotating relative to the shaft assembly, and the first protrusion can be slidably connected with the first through slot in a direction perpendicular to the rotation axis of the first connecting side plate; The second flange includes a second body and a second protrusion, the second body is fixedly connected to the second connecting side plate, and the second protrusion is arranged on the side of the second body away from the reduction assembly; a second through groove is provided on the second connecting side plate, and the second protrusion is arranged in the second through groove and at least partially abuts against the groove wall of the second through groove to limit the rotation of the second connecting side plate relative to the rotating shaft assembly, and the second protrusion can be slidably connected to the second through groove in a direction perpendicular to the rotation axis of the second connecting side plate.

[0010] Wherein, the frame mechanism further includes a first mounting plate and a second mounting plate, the first mounting plate and the second mounting plate are parallel to the placement surface of the flip device, the first mounting plate is arranged between the first support frame and the reducer seat, and the second mounting plate is arranged on the second support frame; The flipping device further comprises a bearing seat, which is arranged on the second mounting plate, and the bearing seat is arranged around one end of the shaft body and is used to limit the shaft body; A first limit pin is provided on the side of the second flange facing away from the first flange, and a first limit block and a second limit block relatively spaced apart are provided on the second mounting plate. The first limit block and the second limit block are used to abut against the first limit pin to limit the rotation angle of the rotating shaft assembly.

[0011] Among them, the flipping device also includes a sensor component and a controller component. The sensor component is arranged on the second mounting plate, and the controller component is electrically connected to the sensor component. An induction component is provided at the end of the shaft away from the rotating motor. The induction component is used to rotate with the shaft. The induction component and the sensor component cooperate to output the position signal of the shaft to the controller component.

[0012] The sensor assembly includes a sensor base, a first sensor, a second sensor, and a third sensor. The sensor base includes a first base, a second base, and a third base. The second base and the third base are arranged at both ends of the first base and extend along the height direction. The first sensor is arranged on the first base, the second sensor is arranged on the second base, and the third sensor is arranged on the third base. When the induction element is arranged corresponding to the first sensor, the flipping device is in an initial state, and the testing machine and the probe station are arranged along the width direction; When the induction element is arranged corresponding to the third sensor, the flip device is in a testing state, the testing machine is arranged on the probe table, and the testing machine and the probe table are arranged along the height direction.

[0013] The sensor assembly includes a sensor base, a first sensor, a second sensor, and a third sensor. The sensor base includes a first base, a second base, and a third base. The second base and the third base are arranged at both ends of the first base and extend along the height direction. The first sensor is arranged on the first base, the second sensor is arranged on the second base, and the third sensor is arranged on the third base. When the flipping device is in an initial state or a test state, the sensing member is higher than the first sensor and the third sensor, the flipping path of the flipping device includes an acceleration interval and a deceleration interval, the path of the sensing member passing through the first sensor corresponds to one of the acceleration interval and the deceleration interval, and the path of the sensing member passing through the third sensor corresponds to the other of the acceleration interval and the deceleration interval.

[0014] Wherein, the first connecting side plate is provided with a plurality of first waist-shaped holes, when the test machine is arranged on the probe table, the first waist-shaped holes extend along the height direction, the first flange is provided with a plurality of first fixing holes, a plurality of first fixing members pass through the first waist-shaped holes and are fixed in the first fixing holes, and the first connecting side plate can move along the height direction relative to the first flange; The second connecting side plate is provided with a plurality of second waist-shaped holes. When the testing machine is placed on the probe table, the second waist-shaped holes extend along the height direction. The second flange is provided with a plurality of second fixing holes. A plurality of second fixing members pass through the second waist-shaped holes and are fixed in the second fixing holes. The second connecting side plate can move along the height direction relative to the second flange.

[0015] Wherein, the first connection assembly further includes a first adjusting member and a second adjusting member, the first adjusting member passes through a through hole on the first connection side plate and is threadedly connected to the first protrusion, the second adjusting member passes through a threaded hole on the first connection side plate and abuts against the first protrusion, the first adjusting member is used to provide a first force to the first protrusion, and the second adjusting member is used to provide a second force to the second protrusion, and the first force and the second force are in opposite directions; The second connecting assembly also includes a third adjusting member and a fourth adjusting member, the third adjusting member passes through the through hole on the second connecting side plate and is threadedly connected to the second protrusion, the fourth adjusting member passes through the threaded hole on the second connecting side plate and abuts against the second protrusion, the third adjusting member is used to provide a third force to the second protrusion, and the fourth adjusting member is used to provide a fourth force to the second protrusion, and the directions of the third force and the fourth force are opposite.

[0016] Among them, the flipping device also includes a first pad, a second pad, a first leveling assembly, and a second leveling assembly. The first pad is arranged on the first corner block and is respectively connected to the first connecting part and the second connecting part. The second pad is arranged on the second corner block and is respectively connected to the third connecting part and the fourth connecting part. The first leveling assembly is arranged on the side of the first pad away from the testing machine, and the second leveling assembly is arranged on the side of the second pad away from the testing machine. The first leveling assembly is used to drive the first pad, the first connecting part and the testing machine to move relative to the first connecting side plate in the width direction. The second leveling assembly is used to drive the second pad, the second connecting part and the testing machine to move relative to the second connecting side plate in the width direction. The first leveling assembly and the second leveling assembly are used to adjust the horizontality of the testing machine along the width direction.

[0017] In a second aspect, the present application provides a wafer inspection system, which includes a probe station, a tester and the flipping device, wherein the probe station is fixedly connected to one side of the flipping device via a connecting plate, and the tester is installed on the connecting mechanism.

[0018] Among them, the wafer detection system also includes a fixing mechanism and a snap-fit ​​mechanism, the fixing mechanism is arranged on the side of the test machine away from the connecting mechanism, and the snap-fit ​​mechanism is arranged on the probe table or on a frame adjacent to the flipping device. When the flipping device flips the test machine to above the probe table, the fixing mechanism and the snap-fit ​​mechanism cooperate to limit the test machine.

[0019] Wherein, the fixing mechanism also includes a first fixing structure, and the buckling mechanism also includes a fixing base and a first bearing member, the first bearing member is arranged on the fixing base, and the first bearing member is provided with a first bearing groove, and the first bearing groove is used to abut and limit the first fixing structure.

[0020] Wherein, the snap-fit ​​mechanism further includes a fourth sensor, which is disposed on the first bearing member and passes through the first bearing groove, and is used for detecting the first fixing structure and sending a detection signal.

[0021] In which, the snap-fit ​​mechanism also includes a first fixed seat and a first snap-fit ​​component, the first fixed seat and the first supporting component are arranged along the width direction, one end of the first snap-fit ​​component is rotatably connected to the first fixed seat, and a first snap-fit ​​groove is provided at one end of the first snap-fit ​​component close to the first fixed seat, and the first snap-fit ​​component can be rotated relative to the first fixed seat so that the first snap-fit ​​groove can accommodate the first fixed structure to limit the first fixed structure and the testing machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Figure 1 It is a structural schematic diagram of a wafer inspection system provided in an embodiment of the present application; Figure 2 It is a structural schematic diagram of a flipping device and a testing machine provided in an embodiment of the present application; Figure 3 It is a structural schematic diagram of a flip device provided in an embodiment of the present application, which is arranged on the frame mechanism; Figure 4 It is a structural schematic diagram of a portion of a connecting mechanism connected to a testing machine provided in an embodiment of the present application; Figure 5 This is a schematic diagram of a flip device provided in an embodiment of the present application. Figure 1 ; Figure 6 It is a structural schematic diagram of a rotating shaft assembly provided in an embodiment of the present application; Figure 7 This is a schematic diagram of a flip device provided in an embodiment of the present application. Figure 2 ; Figure 8 It is a structural schematic diagram of a flipping device including a sensor component provided in an embodiment of the present application; Fig. 9 It is a bottom schematic diagram of a flipping device and a testing machine provided in an embodiment of the present application; Fig.10 It is a structural schematic diagram of a connecting part of a connecting mechanism and a rotating mechanism provided in an embodiment of the present application; Fig.11 It is a structural schematic diagram of a flipping device provided in an embodiment of the present application, including a first cushion block and a second cushion block; Fig.12 It is a structural schematic diagram of a fixing mechanism provided in an embodiment of the present application provided on a testing machine; Fig.13 It is a structural schematic diagram of a buckling mechanism provided in an embodiment of the present application; Fig.14 It is a structural schematic diagram of a fixing mechanism and a buckling mechanism provided in an embodiment of the present application.

[0023] Description of labels: Wafer inspection system 1000, flip device 100, frame mechanism 10, first support frame 11, second support frame 12, connecting frame 13, first mounting plate 14, second mounting plate 15, first limit block 151, second limit block 152, rotating mechanism 20, rotating motor 21, reduction assembly 22, first reducer 221, second reducer 222, reducer seat 223, first support block 224, second support block 225, rotating shaft assembly 23, first flange 231, first matching portion 2311, first Main body 2312, first protrusion 2313, shaft 232, second matching portion 2321, second flange 233, induction member 234, first limit pin 235, connecting mechanism 30, first connecting assembly 31, first connecting side plate 311, first through groove 3111, first waist-shaped hole 3112, first corner block 312, first connecting portion 312a, second connecting portion 312b, first adjusting member 313, second adjusting member 314, second connecting assembly 32, second connecting side plate 321, second through groove 3211 , second waist-shaped hole 3212, second corner block 322, third connection part 322a, fourth connection part 322b, sensor assembly 40, sensor base 41, first sensor 42, second sensor 43, third sensor 44, first cushion block 51, second cushion block 52, first leveling assembly 53, first leveling block 531, first leveling member 532, second leveling member 533, second leveling assembly 54, second leveling block 541, third leveling member 542, fourth leveling member 543, third leveling assembly 55 , fixing mechanism 60, mounting member 61, first fixing structure 62, second fixing structure 63, buckling mechanism 70, base 71, first supporting member 72, first supporting groove 721, second supporting member 73, second supporting groove 731, photoelectric detector 74, first fixing seat 75, first buckling member 76, first buckling groove 761, second fixing seat 77, second buckling member 78, second buckling groove 781, cylinder seat 791, cylinder member 792, linkage member 793, testing machine 200, probe station 300. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] It should be noted that the terms "first", "second", etc. in the specification and claims of this application and the above drawings are used to distinguish different objects rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0026] In this specification, for the sake of convenience, the words and phrases indicating the orientation or positional relationship such as "middle", "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like are used to illustrate the positional relationship of the constituent elements with reference to the drawings. This is only for the convenience of describing this specification and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. The positional relationship of the constituent elements is appropriately changed according to the orientation of the constituent elements being described. Therefore, it is not limited to the words and phrases described in the specification, and can be appropriately replaced according to the circumstances.

[0027] In this specification, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate, or the internal communication of two elements. For ordinary technicians in this field, the meanings of the above terms in this disclosure can be understood according to the circumstances.

[0028] When performing wafer inspection, the tester needs to be placed above the probe station and docked with the probe station. As the size of wafer chips becomes smaller and smaller and the functional circuits become more and more complex, the size and weight of the tester continue to increase. How to effectively flip the heavier tester over the probe station has become a technical problem that needs to be solved.

[0029] Please refer to Figures 1 to 3 The present application provides a flipping device 100 to solve the technical problem of how to effectively flip a heavy test machine to the top of a probe station.

[0030] The flipping device 100 is used to flip the test machine 200 onto the probe station 300, and the flipping device 100 includes a frame mechanism 10, a rotating mechanism 20 and a connecting mechanism 30. The frame mechanism 10 includes a first support frame 11, a second support frame 12 and a connecting frame 13 respectively connecting the first support frame 11 and the second support frame 12, wherein the first support frame 11 and the second support frame 12 are arranged at intervals along the length direction L, and the first support frame 11 is a cubic frame. The rotating mechanism 20 is arranged along the length direction L, and one end of the rotating mechanism 20 is arranged on the first support frame 11, and the other end is arranged on the second support frame 12. The connecting mechanism 30 includes a first connecting component 31 and a second connecting component 32 arranged at intervals, wherein the first connecting component 31 respectively connects the rotating mechanism 20 and the test machine 200, and the second connecting component 32 respectively connects the rotating mechanism 20 and the test machine 200.

[0031] Among them, the rotating mechanism 20 can rotate relative to the frame mechanism 10 and drive the connecting mechanism 30 to rotate relative to the frame mechanism 10. When the testing machine 200 is arranged on the probe station 300, the first connecting component 31 and the second connecting component 32 of the connecting mechanism 30 extend along the height direction H.

[0032] The frame mechanism 10 includes the first support frame 11 and the second support frame 12, and the first support frame 11 and the second support frame 12 are respectively used to support the two ends of the rotating mechanism 20. The first support frame 11 is a cubic frame, which can improve the overall structural stability of the first support frame 11. One end of the rotating mechanism 20 is arranged on the first support frame 11, which can prevent the rotating mechanism 20 on the first support frame 11 from shaking or other unstable phenomena when the rotating mechanism 20 drives the connecting mechanism 30 and the test machine 200 to flip, so as to improve the stability of the flipping device 100 flipping the test machine 200. The other end of the rotating mechanism 20 is arranged on the second support frame 12, which can prevent the rotating mechanism 20 on the second support frame 12 from shaking or other unstable phenomena when the rotating mechanism 20 drives the connecting mechanism 30 and the test machine 200 to flip, so as to improve the stability of the flipping device 100 flipping the test machine 200. Furthermore, the first support frame 11 and the second support frame 12 are fixedly connected via the connecting frame 13 , so that the first support frame 11 and the second support frame 12 form an integrated structure via the connecting frame 13 , thereby improving the stability of the frame mechanism 10 .

[0033] Both ends of the rotating mechanism 20 are respectively arranged on the first support frame 11 and the second support frame 12 , and the first support frame 11 and the second support frame 12 have high stability, which facilitates the rotating mechanism 20 to flip the heavier test machine 200 and flip it onto the probe station 300 .

[0034] The connecting mechanism 30 includes the first connecting component 31 and the second connecting component 32 which are spaced apart from each other. The first connecting component 31 and the second connecting component 32 are used to connect the rotating mechanism 20 and the testing machine 200 respectively. The first connecting component 31 and the second connecting component 32 are respectively arranged at the two ends of the rotating mechanism 20 and the testing machine 200 to improve the connection stability between the rotating mechanism 20 and the testing machine 200.

[0035] It should be noted that, in this embodiment, the connecting mechanism 30 includes a first position and a second position. When the connecting mechanism 30 is in the first position, the test machine 200 and the probe station 300 are arranged along the width direction W. At this time, it is convenient to perform maintenance and other operations on the test machine 200, and the flip device 100 is in an initial state. When the connecting mechanism 30 is in the second position, the test machine 200 is arranged on the probe station 300, and the test machine 200 and the probe station 300 are arranged along the height direction H. At this time, the test machine 200 can be docked with the probe station 300, and the flip device 100 is in a testing state.

[0036] When the test machine 200 is arranged on the probe station 300, in other words, when the connecting mechanism 30 is in the second position, the first connecting component 31 and the second connecting component 32 of the connecting mechanism 30 extend along the height direction H, and the test machine 200 is fixed to one end of the first connecting component 31 and the second connecting component 32 away from the rotating mechanism 20. The first connecting component 31 and the second connecting component 32 of the connecting mechanism 30 extend along the height direction H, which can reduce the distance between the test machine 200 and the rotating mechanism 20 along the width direction W, thereby reducing the torque applied by the test machine 200 to the first connecting component 31 and the second connecting component 32, and can avoid problems such as the connection mechanism 30 breaking due to a large torque, which is beneficial to the test machine 200 with an increased load-bearing weight of the connection mechanism 30.

[0037] In the flipping device 100 provided in the present application, the first support frame 11 and the second support frame 12 are respectively used to support the two ends of the rotating mechanism 20, and the first support frame 11 is a cubic frame, which can improve the overall structural stability of the first support frame 11, and the first support frame 11 and the second support frame 12 of the frame mechanism 10 are fixedly connected by the connecting frame 13, so that the first support frame 11 and the second support frame 12 form an integrated structure through the connecting frame 13, which can improve the stability of the frame mechanism 10, and the two ends of the rotating mechanism 20 are respectively arranged on the first support frame 11 and the second support frame 12, and the first support frame 11 and the second support frame 12 have high stability, which is convenient for the rotating mechanism 20 to flip the heavier test machine 200 and flip it onto the probe station 300. When the test machine 200 is arranged on the probe station 300, the first connecting component 31 and the second connecting component 32 of the connecting mechanism 30 extend along the height direction H, which can reduce the distance between the test machine 200 and the rotating mechanism 20 along the width direction W, thereby reducing the torque applied by the test machine 200 to the first connecting component 31 and the second connecting component 32, and can avoid problems such as the connection mechanism 30 breaking due to a large torque, which is beneficial to the test machine 200 with an increased load-bearing weight of the connection mechanism 30.

[0038] Please refer to Figure 3 to Figure 4 In one embodiment, the first connecting component 31 includes a first connecting side plate 311 and a first corner block 312, the first connecting side plate 311 is connected to the rotating mechanism 20, the first corner block 312 is arranged on the side of the first connecting side plate 311 away from the rotating mechanism 20, the first corner block 312 includes a first connecting portion 312a and a second connecting portion 312b that are connected and perpendicular to each other, the first connecting portion 312a is connected to the first connecting side plate 311, and the second connecting portion 312b is connected to the testing machine 200.

[0039] The first connecting component 31 includes the first connecting side plate 311 and the first corner block 312. The first connecting side plate 311 includes an aluminum alloy machined part. The first corner block 312 includes an aluminum alloy machined part. The first connecting component 31 is composed of aluminum alloy machined parts, which can improve the structural stability of the first connecting component 31.

[0040] The second connecting component 32 includes a second connecting side plate 321 and a second corner block 322. The second connecting side plate 321 is connected to the rotating mechanism 20. The second corner block 322 is arranged on the side of the second connecting side plate 321 away from the rotating mechanism 20. The second corner block 322 includes a third connecting part 322a and a fourth connecting part 322b that are connected and perpendicular to each other. The third connecting part 322a is connected to the second connecting side plate 321, and the fourth connecting part 322b is connected to the testing machine 200.

[0041] The second connecting component 32 includes the second connecting side plate 321 and the second corner block 322. The second connecting side plate 321 includes an aluminum alloy machined part, and the second corner block 322 includes an aluminum alloy machined part. The second connecting component 32 is composed of aluminum alloy machined parts, which can improve the structural stability of the second connecting component 32.

[0042] Specifically, the testing machine 200 has a connecting surface for connecting the connecting mechanism 30, the first connecting side plate 311 is perpendicular to the connecting surface, and the second connecting side plate 321 is perpendicular to the connecting surface. This can reduce the probability of bending of the first connecting side plate 311 and the second connecting side plate 321 when the testing machine 200 is flipped, thereby improving the load-bearing performance of the connecting mechanism 30 when flipping.

[0043] Please refer to Figures 1 to 5 In one embodiment, the rotating mechanism 20 includes a rotating motor 21, a reduction assembly 22 and a rotating shaft assembly 23 connected in sequence. The rotating motor 21 drives the rotating shaft assembly 23 to rotate through the reduction assembly 22. The reduction assembly 22 includes a first reducer 221 and a second reducer 222 connected to each other. The first reducer 221 is connected to the rotating motor 21, and the second reducer 222 is connected to the rotating shaft assembly 23.

[0044] Optionally, in this embodiment, the first reducer 221 and the second reducer 222 are planetary reducers. In other embodiments, the first reducer 221 or the second reducer 222 may also be a worm gear reduction structure, which is not limited in this application. The reduction assembly 22 is composed of the first reducer 221 and the second reducer 222. In this embodiment, the reduction ratio of the reduction assembly 22 is 1200, which can reduce the rotation speed of the rotating mechanism 20 and the moving speed of the test machine 200, and improve the stability and safety of the flipping device 100 when flipping the heavier test machine 200.

[0045] The deceleration assembly 22 further includes a deceleration machine seat 223, a first support block 224 and a second support block 225. The deceleration machine seat 223 is fixed on the first support frame 11, and the deceleration machine seat 223 surrounds at least part of the outer periphery of the second deceleration machine 222 and is fixedly connected to the second deceleration machine 222. The first support block 224 and the second support block 225 are arranged on the side of the deceleration machine seat 223 away from the shaft assembly 23, and the first support block 224 and the second support block 225 are respectively arranged at both ends of the deceleration machine seat 223. The first support block 224 and the second support block 225 are respectively arranged at both ends of the deceleration machine seat 223. The second support block 225 is connected to the reducer seat 223 and the first support frame 11 respectively, and the first support block 224 and the second support block 225 are used to fix the reducer seat 223, and fix the reducer seat 223 to the first support frame 11, so that the second reducer 222 is fixed to the first support frame 11, and the first reducer 221 and the second reducer 222 are fixedly connected, so that the reduction assembly 22 is fixed to the first support frame 11, and then one end of the rotating mechanism 20 is fixed to the first support frame 11. The rotating mechanism 20 is fixed to the first support frame 11 through the reducer seat 223, the first support block 224 and the second support block 225, which is conducive to improving the stability of the rotating mechanism 20 fixed to the first support frame 11, and improving the stability of the rotating mechanism 20 when driving the heavy weight of the testing machine 200 to flip.

[0046] Furthermore, the first support block 224 includes a first support portion and a second support portion that are connected and perpendicular to each other, the first support portion is connected to the first support frame 11, and the second support portion is connected to the reducer seat 223. In this embodiment, the first support portion and the second support portion are threadedly connected and fixed to the first support frame 11 and the reducer seat 223 by screws, and this application does not impose any restrictions on this.

[0047] The second support block 225 includes a third support portion and a fourth support portion that are connected and perpendicular to each other, the third support portion is connected to the first support frame 11, and the fourth support portion is connected to the reducer base 223. In this embodiment, the third support portion and the fourth support portion are threadedly connected and fixed to the first support frame 11 and the reducer base 223 by screws, and this application does not impose any restrictions on this.

[0048] Please refer to Figures 1 to 10In one embodiment, the rotating shaft assembly 23 further includes a first flange 231, a shaft body 232 and a second flange 233. The outer periphery of the first flange 231 is fixedly connected to the reduction assembly 22 and the shaft body 232. The axis of the first flange 231 is provided with a first through hole axially passing through. The first through hole is used to pass the shaft body 232. A first matching portion 2311 is provided on the first through hole. A second matching portion 2321 is provided at one end of the shaft body 232 close to the first flange 231. The first matching portion 2311 and the second matching portion 2321 cooperate to limit the shaft body 232. One of the first matching portion 2311 and the second matching portion 2321 is a groove, and the other is a protrusion.

[0049] The first flange 231 can effectively transmit the torque generated by the reduction assembly 22 to the shaft body 232, thereby driving the shaft body 232 to rotate and driving the connection mechanism 30 and the testing machine 200 to rotate. The first flange 231 can ensure the concentricity between the reduction assembly 22 and the shaft body 232, and reduce the vibration and noise generated during the rotation of the shaft assembly 23. Furthermore, the first flange 231 is connected to the reduction assembly 22, and the outer ring of the first flange 231 is provided with a through hole for threaded connection with the reduction assembly 22, which can increase the connection area with the reduction assembly 22, which is conducive to improving the stability and structural rigidity of the rotation of the shaft body 232 and the entire shaft assembly 23.

[0050] Further, the first flange 231 includes a first body 2312 and a first protrusion 2313, the first body 2312 is fixedly connected to the first connecting side plate 311, and the first protrusion 2313 is arranged on the side of the first body 2312 away from the reduction assembly 22; the first connecting side plate 311 is provided with a first through groove 3111, and the first protrusion 2313 is arranged in the first through groove 3111 and at least partially abuts against the groove wall of the first through groove 3111 to limit the first connecting side plate 311 from rotating relative to the rotating shaft assembly 23, and the torque of the rotating motor 21 is sequentially transmitted to the shaft body 232 via the first reducer 221, the second reducer 222, the first body 2312, and the first protrusion 2313, and the first protrusion 2313 of the first flange 231 can be used to synchronously drive the first connecting side plate 311 and one end of the testing machine 200 to rotate.

[0051] The axis of the second flange 233 is provided with a second through hole axially passing through, the second through hole is used to pass the shaft body 232, the second through hole is provided with a third matching portion, and the shaft body 232 is provided with a fourth matching portion at one end close to the second flange 233, the third matching portion and the fourth matching portion cooperate to limit the shaft body 232, one of the third matching portion and the fourth matching portion is a groove, and the other is a protrusion.

[0052] Furthermore, the second flange 233 includes a second body and a second protrusion, the second body is fixedly connected to the second connecting side plate 321, and the second protrusion is arranged on the side of the second body away from the reduction assembly 22; a second through groove is provided on the second connecting side plate 321, and the second protrusion is arranged in the second through groove and at least partially abuts against the groove wall of the second through groove to limit the second connecting side plate 321 from rotating relative to the rotating shaft assembly 23, and the torque of the rotating motor 21 is transmitted to the second body in sequence through the first reducer 221, the second reducer 222, the first body 2312, the first protrusion 2313, the shaft 232, and the second protrusion, and the second protrusion of the second flange 233 can be used to synchronously drive the second connecting side plate 321 and the other end of the testing machine 200 to rotate.

[0053] In one embodiment, the frame mechanism 10 further includes a first mounting plate 14 and a second mounting plate 15, the first mounting plate 14 and the second mounting plate 15 are parallel to the placement surface of the flip device 100, and the first mounting plate 14 is arranged between the first support frame 11 and the reducer seat 223. In this embodiment, the first mounting plate 14 is first fixed to the first support frame 11, and then the reducer seat 223 is fixed to the first mounting plate 14, so as to realize the fixing of the reducer seat 223 to the first support frame 11. The first mounting plate 14 includes an aluminum alloy machined part, which can improve the support performance and structural rigidity of the frame mechanism 10, and improve the installation stability of the rotating mechanism 20 close to one end of the first support frame 11.

[0054] The second mounting plate 15 is disposed on the second support frame 12 . The flipping device 100 further includes a bearing seat. The bearing seat is disposed on the second mounting plate 15 . The bearing seat is disposed around one end of the shaft body 232 and is used to limit the shaft body 232 .

[0055] In this embodiment, the second mounting plate 15 is first fixed to the second support frame 12, and then the bearing seat is fixed to the second mounting plate 15, so as to realize the fixing of the bearing seat to the second support frame 12. The second mounting plate 15 includes an aluminum alloy machined part, which can improve the supporting performance and structural rigidity of the frame mechanism 10, and improve the installation stability of the rotating mechanism 20 close to the second support frame 12.

[0056] In one embodiment, a first limit pin 235 is provided on the side of the second flange 233 facing away from the first flange 231, and a first limit block 151 and a second limit block 152 which are relatively spaced apart are provided on the second mounting plate 15, and the first limit block 151 and the second limit block 152 are used to abut against the first limit pin 235 to limit the rotation angle of the rotating shaft assembly 23.

[0057] The second body of the second flange 233 is fixedly connected to the second connecting side plate 321. Specifically, when the connecting mechanism 30 is in the first position, that is, when the flip device 100 is in the initial state, the test machine 200 and the probe station 300 are arranged along the width direction W, and the first limit block 151 and the first limit pin 235 just abut; when the connecting mechanism 30 is in the second position, that is, when the flip device 100 is in the test state, the test machine 200 and the probe station 300 are arranged along the height direction H, and the first limit block 151 and the first limit pin 235 just abut. It should be noted that in this embodiment, the rotation angle of the rotating shaft assembly 23 is 180°. In other embodiments, the user can also adjust the height of the first limit block 151 and the second limit block 152, or adjust the size of the first limit pin 235, and then adjust the rotation angle of the rotating shaft assembly 23. This application does not limit this.

[0058] Please refer to Figures 1 to 8 In one embodiment, the flipping device 100 further includes a sensor component 40 and a controller component. The sensor component 40 is disposed on the second mounting plate 15. The controller component is electrically connected to the sensor component 40. An induction member 234 is disposed at one end of the shaft 232 away from the rotating motor 21. The induction member 234 is used to rotate with the shaft 232. The induction member 234 and the sensor component 40 cooperate to output a position signal of the shaft 232 to the controller component. The controller component can be used to control the working condition of the rotating motor 21 according to the position signal of the shaft 232.

[0059] Specifically, the sensor assembly 40 includes a sensor base 41, a first sensor 42, a second sensor 43, and a third sensor 44. The sensor base 41 includes a first base, a second base and a third base. The second base and the third base are arranged at both ends of the first base and extend along the height direction H. The first sensor 42 is arranged on the first base, the second sensor 43 is arranged on the second base, and the third sensor 44 is arranged on the third base.

[0060] In one embodiment, when the sensing element 234 is arranged corresponding to the first sensor 42 , the flipping device 100 is in an initial state, and the testing machine 200 and the probe station 300 are arranged along the width direction W.

[0061] When the induction element 234 is arranged corresponding to the third sensor 44 , the flipping device 100 is in a testing state, the testing machine 200 is arranged on the probe station 300 , and the testing machine 200 and the probe station 300 are arranged along the height direction H.

[0062] It should be noted that when the sensing element 234 is set corresponding to the first sensor 42, the first sensor 42 outputs a first sensing signal to the controller component. The controller component outputs a status signal that the flip device 100 is in an initial state to the interactive interface based on the first sensing signal, so as to prompt the user that the flip device 100 is in an initial state at this time, and the test machine 200 can be maintained and operated. After the controller component controls the rotating motor 21 to drive the rotating shaft component 23 to rotate, when the sensing element 234 follows the shaft 232 to rotate to the second sensor 43, the second sensor 43 outputs a second sensing signal to the control component. The controller component can be used to control the rotating motor 21 to decelerate according to the second sensing signal, so as to reduce the rotation speed of the rotating mechanism 20, thereby reducing the moving speed of the connecting mechanism 30 and the test machine 200, so as to prevent the test machine 200 from damaging the probe station 300 or causing other safety accidents due to the high moving speed. When the sensing element 234 follows the shaft 232 to rotate to the third sensor 44, the third sensor 44 outputs a third sensing signal to the control component. The controller component can be used to control the rotating motor 21 to stop working according to the third sensing signal, so that the rotating shaft component 23 stops rotating, and further stops the testing machine 200 from moving, so as to prevent the testing machine 200 from damaging the probe station 300 or causing other safety accidents due to the high moving speed.

[0063] In another embodiment, when the flipping device 100 is in an initial state or a test state, the sensing element 234 is higher than the first sensor 42 and the third sensor 44, and the flipping path of the flipping device 100 includes an acceleration interval and a deceleration interval. The path of the sensing element 234 passing through the first sensor 42 corresponds to one of the acceleration interval and the deceleration interval, and the path of the sensing element 234 passing through the third sensor 44 corresponds to the other of the acceleration interval and the deceleration interval.

[0064] The path of the induction member 234 passing through the first sensor 42 corresponds to one of the acceleration section and the deceleration section. In other words, when the induction member 234 passes through the first sensor 42, the flipping path of the folding device is in the acceleration section or the deceleration section, that is, the rotating motor 21, the rotating shaft assembly 23 and the testing machine 200 are in an acceleration state or a deceleration state. The path of the induction member 234 passing through the third sensor 44 corresponds to the other of the acceleration section and the deceleration section. In other words, when the induction member 234 passes through the third sensor 44, the flipping path of the folding device is in the acceleration section or the deceleration section, that is, the rotating motor 21, the rotating shaft assembly 23 and the testing machine 200 are in an acceleration state or a deceleration state.

[0065] It should be noted that, in this embodiment, the width of the sensing element 234 is relatively large. When the sensing element 234 corresponds to the first sensor 42, the time when the first sensor 42 detects the sensing element 234 is the time of one of the acceleration state or the deceleration state. When the sensing element 234 corresponds to the third sensor 44, the time when the first sensor 42 detects the sensing element 234 is the time of the other of the acceleration state or the deceleration state.

[0066] Specifically, the flipping device 100 flips from the initial state to the test state. When the flipping device 100 is in the initial state, the induction member 234 corresponds to the first sensor 42, and the first sensor 42 outputs a first sensor signal to the controller component. The controller component controls the rotation motor 21 to accelerate according to the first sensor signal, so that the shaft assembly 23 and the test machine 200 are in an accelerated rotation state; when the induction member 234 passes through the first sensor 42, and the induction member 234 is located between the first sensor 42 and the second sensor 43 When the sensing element 234 moves to the position corresponding to the third sensor 44, the third sensor 44 outputs a third sensing signal to the controller component, and the controller component controls the rotating motor 21 to decelerate according to the third sensing signal, so that the rotating shaft assembly 23 and the test machine 200 are in a decelerated rotation state, thereby preventing the test machine 200 from damaging the probe station 300 or causing other safety accidents due to the high moving speed.

[0067] Optionally, in other embodiments, when the sensing element 234 passes through the second sensor 43, the second sensor 43 outputs the second sensor 43 signal to the controller component, and the controller component controls the rotating motor 21 to rotate at a uniform speed according to the second sensor 43 signal, so that the rotating shaft assembly 23 and the testing machine 200 are in a uniform rotation state. This application does not impose any restrictions on this.

[0068] Please refer to Figures 1 to 10 In one embodiment, the first protrusion 2313 of the first flange 231 can be slidably connected to the first through groove 3111 along a direction perpendicular to the rotation axis of the first connecting side plate 311, and the second protrusion can be slidably connected to the second through groove along a direction perpendicular to the rotation axis of the second connecting side plate 321.

[0069] In one embodiment, a plurality of first waist-shaped holes 3112 are provided on the first connecting side plate 311. When the testing machine 200 is arranged on the probe station 300, the first waist-shaped holes 3112 extend along the height direction H. A plurality of first fixing holes are provided on the first flange 231. A plurality of first fixing members pass through the first waist-shaped holes 3112 and are fixed in the first fixing holes. The first connecting side plate 311 can move along the height direction H relative to the first flange 231.

[0070] The first connecting side plate 311 can move along the height direction H relative to the first flange 231 and the rotating shaft assembly 23, thereby driving the end of the testing machine 200 close to the first connecting side plate 311 to move along the height direction H, and the first fixing part can also move in the first waist-shaped hole 3112 and be fixedly connected to the first fixing hole, so that the user can adjust the height of the end of the testing machine 200 close to the first connecting side plate 311 to improve the overall levelness of the testing machine 200.

[0071] The second connecting side plate 321 is provided with a plurality of second waist-shaped holes. When the testing machine 200 is arranged on the probe station 300, the second waist-shaped holes extend along the height direction H. The second flange 233 is provided with a plurality of second fixing holes. A plurality of second fixing members pass through the second waist-shaped holes and are fixed in the second fixing holes. The second connecting side plate 321 can move along the height direction H relative to the second flange 233.

[0072] The second connecting side plate 321 can move along the height direction H relative to the first flange 231 and the rotating shaft assembly 23, thereby driving the end of the testing machine 200 close to the second connecting side plate 321 to move along the height direction H, and the second fixing part can also move in the second waist-shaped hole and be fixedly connected to the second fixing hole, so that the user can adjust the height of the end of the testing machine 200 close to the second connecting side plate 321 to improve the overall levelness of the testing machine 200.

[0073] Please refer to Figures 1 to 11 In one embodiment, the first connecting component 31 also includes a first adjusting member 313 and a second adjusting member 314, the first adjusting member 313 passes through the through hole on the first connecting side plate 311 and is threadedly connected to the first protrusion 2313, the second adjusting member 314 passes through the threaded hole on the first connecting side plate 311 and abuts against the first protrusion 2313, the first adjusting member 313 is used to provide a first force to the first protrusion 2313, the second adjusting member 314 is used to provide a second force to the second protrusion, and the directions of the first force and the second force are opposite.

[0074] The first adjusting member 313 passes through the through hole on the first connecting side plate 311 and is threadedly connected to the first protrusion 2313. In this embodiment, the first adjusting member 313 is a locking screw, the screw head of the first adjusting member 313 abuts the first connecting side plate 311, the screw rod of the first adjusting member 313 is threadedly connected to the first protrusion 2313, and the first adjusting member 313 can rotate relative to the first protrusion 2313 to drive the first connecting assembly 31 to move upward along the height direction H, thereby driving the testing machine 200 to move upward along the height direction H. Optionally, in this embodiment, the number of the first adjusting members 313 is 2, and the two first adjusting members 313 are arranged at intervals. In other embodiments, the number of the first adjusting members 313 can also be 1, 3, 4, or more than 4, and the present application does not limit this.

[0075] The second adjusting member 314 passes through the threaded hole on the first connecting side plate 311 and abuts against the first protrusion 2313. In this embodiment, the second adjusting member 314 is a top screw structure. The screw head of the second adjusting member 314 is spaced from the first connecting side plate 311. The outer periphery of the screw rod of the second adjusting member 314 is threadedly connected to the first connecting side plate 311, and the screw rod of the second adjusting member 314 abuts against the first protrusion 2313. The second adjusting member 314 can rotate relative to the first protrusion 2313 to drive the first connecting assembly 31 to move downward along the height direction H, thereby driving the test machine 200 to move upward along the height direction H. The moving direction of the test machine 200 driven by the second adjusting member 314 is opposite to the moving direction of the test machine 200 driven by the first leveling member 532, so as to realize the movement adjustment of the test machine 200 in the upper and lower directions of the height direction H, thereby adjusting the horizontality of the test machine 200 along the length direction L. Optionally, in this embodiment, the number of the second adjusting members 314 is 2, and the two second adjusting members 314 are arranged at intervals. In other embodiments, the number of the second adjusting members 314 can also be 1, 3, 4, or more than 4, and the present application does not impose any restrictions on this.

[0076] The second connecting component 32 also includes a third adjusting member and a fourth adjusting member. The third adjusting member passes through the through hole on the second connecting side plate 321 and is threadedly connected to the second protrusion. The fourth adjusting member passes through the threaded hole on the second connecting side plate 321 and abuts against the second protrusion. The third adjusting member is used to provide a third force to the second protrusion, and the fourth adjusting member is used to provide a fourth force to the second protrusion. The directions of the third force and the fourth force are opposite.

[0077] The third adjusting member passes through the through hole on the second connecting side plate 321 and is threadedly connected to the second protrusion. In this embodiment, the third adjusting member is a locking screw, the screw head of the third adjusting member abuts the second connecting side plate 321, the screw rod of the third adjusting member is threadedly connected to the second protrusion, and the third adjusting member can rotate relative to the second protrusion to drive the second connecting assembly 32 to move upward along the height direction H, thereby driving the testing machine 200 to move upward along the height direction H. Optionally, in this embodiment, the number of the third adjusting members is 2, and the 2 third adjusting members are arranged at intervals. In other embodiments, the number of the third adjusting members can also be 1, 3, 4, or more than 4, and this application does not limit this.

[0078] The fourth adjusting member passes through the threaded hole on the second connecting side plate 321 and abuts against the second protrusion. In this embodiment, the fourth adjusting member is a top screw structure. The screw head of the fourth adjusting member is spaced from the second connecting side plate 321. The outer periphery of the screw rod of the fourth adjusting member is threadedly connected to the second connecting side plate 321, and the screw rod of the fourth adjusting member abuts against the second protrusion. The fourth adjusting member can rotate relative to the second protrusion to drive the second connecting assembly 32 to move downward along the height direction H, thereby driving the test machine 200 to move upward along the height direction H. The moving direction of the test machine 200 driven by the fourth adjusting member is opposite to the moving direction of the test machine 200 driven by the first leveling member 532, so as to realize the movement adjustment of the test machine 200 in the upper and lower directions of the height direction H, thereby adjusting the horizontality of the test machine 200 along the length direction L. Optionally, in this embodiment, the number of the fourth adjusting members is 2, and the 2 fourth adjusting members are arranged at intervals. In other embodiments, the number of the fourth adjusting members can also be 1, 3, 4, or more than 4, and this application does not impose any restrictions on this.

[0079] Among them, the first adjustment member 313, the second adjustment member 314, the third adjustment member, and the fourth adjustment member respectively adjust the height of the two ends of the testing machine 200, which can further improve the adjustment efficiency of the horizontality of the testing machine 200 along the length direction L.

[0080] In one embodiment, the flipping device 100 further includes a first cushion block 51, a second cushion block 52, a first leveling assembly 53, and a second leveling assembly 54. The first leveling assembly 53 and the second leveling assembly 54 are both arranged along the width direction W with the test machine 200, and the first leveling assembly 53 and the second leveling assembly 54 are used to adjust the horizontality of the test machine 200 along the width direction W.

[0081] The first cushion block 51 is disposed on the first corner block 312 and is respectively connected to the first connection portion 312a and the second connection portion 312b. The second cushion block 52 is disposed on the second corner block 322 and is respectively connected to the third connection portion 322a and the fourth connection portion 322b.

[0082] The first leveling component 53 is arranged on the side of the first cushion block 51 away from the testing machine 200, and the second leveling component 54 is arranged on the side of the second cushion block 52 away from the testing machine 200. The first leveling component 53 is used to drive the first cushion block 51, the first connecting part 312a and the testing machine 200 to move relative to the first connecting side plate 311 along the width direction W.

[0083] The first leveling assembly 53 includes the first leveling block 531, the first leveling member 532, and the second leveling member 533. The first leveling block 531 is fixed on the first connecting side plate 311 and is arranged on the side of the first cushion block 51 away from the testing machine 200. The first leveling member 532 passes through the through hole on the first leveling block 531 and is threadedly connected to the first cushion block 51. The second leveling member 533 passes through the threaded hole on the first leveling block 531 and abuts against the first cushion block 51.

[0084] Further, specifically, the first leveling member 532 passes through the through hole on the first leveling block 531 and is threadedly connected to the first cushion block 51. In this embodiment, the first leveling member 532 is a locking screw, the screw head of the first leveling member 532 abuts against the first leveling block 531, the screw rod of the first leveling member 532 is threadedly connected to the first cushion block 51, and the first leveling member 532 can rotate relative to the first cushion block 51 to drive the first cushion block 51 and the second connecting portion 312b to move in a direction close to the first leveling block 531, thereby driving the test machine 200 to move in the width direction W. Optionally, in this embodiment, the number of the first leveling members 532 is 2, and the two first leveling members 532 are arranged at intervals. In other embodiments, the number of the first leveling members 532 can also be 1, 3, 4, or more than 4, and the present application does not limit this.

[0085] The second leveling member 533 passes through the threaded hole on the first leveling block 531 and abuts against the first cushion block 51. In the present embodiment, the second leveling member 533 is a top screw structure, the screw head of the second leveling member 533 is spaced from the first leveling block 531, the outer periphery of the screw rod of the second leveling member 533 is threadedly connected to the first leveling block 531, and the screw rod of the second leveling member 533 abuts against the first cushion block 51, the second leveling member 533 can rotate relative to the first cushion block 51 to drive the first cushion block 51 and the second connecting portion 312b to move in a direction away from the first leveling block 531, thereby driving the test machine 200 to move along the width direction W, wherein the movement direction of the test machine 200 driven by the second leveling member 533 is opposite to the movement direction of the test machine 200 driven by the first leveling member 532, so as to realize the movement adjustment of the test machine 200 in both positive and negative directions along the width direction W, thereby adjusting the horizontality of the test machine 200 along the width direction W.

[0086] The second leveling assembly 54 is used to drive the second pad 52, the second connecting portion 312b and the testing machine 200 to move along the width direction W relative to the second connecting side plate 321, and the first leveling assembly 53 and the second leveling assembly 54 are used to adjust the horizontality of the testing machine 200 along the width direction W.

[0087] The second leveling assembly 54 also includes the second leveling block 541, the third leveling member 542, and the fourth leveling member 543. The second leveling block 541 is fixed on the second connecting side plate 321 and is arranged on the side of the second cushion block 52 away from the testing machine 200. The third leveling member 542 passes through the through hole on the second leveling block 541 and is threadedly connected to the second cushion block 52. The fourth leveling member 543 passes through the threaded hole on the second leveling block 541 and abuts against the second cushion block 52.

[0088] Further, specifically, the third leveling member 542 passes through the through hole on the second leveling block 541 and is threadedly connected to the second cushion block 52. In this embodiment, the third leveling member 542 is a locking screw, the screw head of the third leveling member 542 abuts the second leveling block 541, the screw rod of the third leveling member 542 is threadedly connected to the second cushion block 52, and the third leveling member 542 can rotate relative to the second cushion block 52 to drive the second cushion block 52 and the fourth connecting portion 322b to move in a direction close to the second leveling block 541, thereby driving the test machine 200 to move in the width direction W. Optionally, in this embodiment, the number of the third leveling members 542 is 2, and the two third leveling members 542 are arranged at intervals. In other embodiments, the number of the third leveling members 542 can also be 1, 3, 4, or more than 4, and the present application does not limit this.

[0089] The fourth leveling member 543 passes through the threaded hole on the second leveling block 541 and abuts against the second cushion block 52. In this embodiment, the fourth leveling member 543 is a top screw structure. The screw head of the fourth leveling member 543 is spaced from the second leveling block 541. The outer periphery of the screw rod of the fourth leveling member 543 is threadedly connected to the second leveling block 541, and the screw rod of the fourth leveling member 543 abuts against the second cushion block 52. The fourth leveling member 543 can rotate relative to the second cushion block 52 to drive The second pad block 52 and the fourth connecting part 322b move in a direction away from the second leveling block 541, thereby driving the testing machine 200 to move along the width direction W, wherein the moving direction of the testing machine 200 driven by the fourth leveling member 543 is opposite to the moving direction of the testing machine 200 driven by the third leveling member 542, so as to realize the movement adjustment of the testing machine 200 in both positive and negative directions along the width direction W, thereby adjusting the horizontality of the testing machine 200 along the width direction W.

[0090] The first connecting component 31 also includes the first cushion block 51, which has larger dimensions along the length direction L and the width direction W, so as to facilitate setting threaded holes for threaded connection between the first leveling member 532 and the first leveling member 532, thereby avoiding setting longer threaded holes in the first connecting portion 312a and the second connecting portion 312b.

[0091] The second connecting assembly 32 also includes the second cushion block 52. The first cushion block 51 is larger in size along the length direction L and the width direction W, which is convenient for setting threaded holes for threaded connection of the third leveling member 542, thereby avoiding setting a longer threaded hole in the fourth connecting portion 322b.

[0092] In one embodiment, the flipping device 100 also includes a third leveling component 55, and the third leveling component 55 and the first connecting component 31 or the second connecting component 32 are arranged in sequence along the length direction L. The third leveling component 55 drives the testing machine 200 to move relative to the connecting mechanism 30 along the length direction L, and adjusts the horizontality of the testing machine 200 along the length direction L.

[0093] It should be noted that the structures of the third leveling component 55 and the first leveling component 53 and the second leveling component 54 are similar, and only the setting positions are different. The present application does not impose any limitation on this and it should not be understood as a limitation on the present application.

[0094] Please refer to Figure 1 The present application also provides a wafer inspection system 1000, which includes a probe station 300, a test machine 200 and the flip device 100. The probe station 300 is fixedly connected to one side of the flip device 100 through a connecting plate, and the test machine 200 is installed on the connecting mechanism 30.

[0095] Please refer to Figure 1 In one embodiment, the wafer inspection system 1000 also includes a fixing mechanism 60 and a snap-fit ​​mechanism 70, wherein the fixing mechanism 60 is disposed on a side of the test machine 200 away from the connecting mechanism 30, and the snap-fit ​​mechanism 70 is disposed on the probe station 300 or on a rack adjacent to the flipping device 100. When the flipping device 100 flips the test machine 200 to above the probe station 300, the fixing mechanism 60 and the snap-fit ​​mechanism 70 cooperate to limit the test machine 200.

[0096] Please refer to Figure 1 , Figure 12 to Figure 14 , Fig.12 is a structural schematic diagram of a fixing mechanism provided in an embodiment of the present application provided on a testing machine, Fig.13 is a structural schematic diagram of a buckling mechanism provided in an embodiment of the present application, Fig.14 It is a structural schematic diagram of a fixing mechanism and a buckling mechanism provided in an embodiment of the present application.

[0097] In one embodiment, the fixing mechanism 60 further includes a connected mounting member 61 and a first fixing structure 62, wherein the mounting member 61 is fixed to the testing machine 200, and the first fixing structure 62 is fixed to the mounting member 61. The buckling mechanism 70 further includes a fixing base 71 and a first bearing member 72, wherein the first bearing member 72 is disposed on the fixing base 71, and a first bearing groove 721 is disposed on the first bearing member 72, and the first bearing groove 721 is used to abut and limit the first fixing structure 62.

[0098] In one embodiment, the fixing mechanism 60 further includes a second fixing structure 63 , the second fixing structure 63 is fixed on the mounting member 61 , and the second fixing structure 63 and the first fixing structure 62 are spaced apart at two ends of the mounting member 61 .

[0099] The snap-fitting mechanism 70 also includes a second supporting member 73, which is disposed on the fixed base 71 and is spaced apart from the first supporting member 72 at both ends of the fixed base 71. The second supporting member 73 is provided with a second supporting groove 731, and the second supporting groove 731 is used to abut and limit the second fixed structure 63 to limit the testing machine 200.

[0100] The fixing mechanism 60 includes a first fixing structure 62 and a second fixing structure 63 that are spaced apart, and the snap-fitting mechanism 70 includes the first supporting member 72 and the second supporting member 73 that are spaced apart, and the first supporting member 72 abuts against and limits the first fixing structure 62, and the second supporting member 73 abuts against and limits the second fixing structure 63, so that both ends of the fixing mechanism 60 abut against and limit the snap-fitting mechanism 70, thereby improving the abutment and fixation stability of the fixing mechanism 60 and the snap-fitting mechanism 70, so as to improve the fixing stability of the testing machine 200.

[0101] The snap-fitting mechanism 70 also includes an electrically connected photoelectric detector 74 and a controller. The photoelectric detector 74 is disposed on the first supporting member 72. The photoelectric detector 74 penetrates the first supporting groove 721 and emits detection light toward the first supporting groove 721. The photoelectric detector 74 is used to detect the first fixed structure 62 and generate a detection signal to the controller. The controller is used to control the testing machine 200 to stop moving according to the detection signal.

[0102] Specifically, the flipping device 100 drives the test machine 200 to flip until the first fixed structure 62 in the fixing mechanism 60 on the test machine 200 abuts against the first bearing groove 721, and the photoelectric detector 74 detects the first fixed structure 62 and generates a corresponding detection signal to the controller, and the controller is used to control the flipping device 100 to stop flipping the test machine 200 according to the detection signal, thereby controlling the test machine 200 to stop moving.

[0103] It should be noted that, in one embodiment, the photodetector 74 may also be arranged on the second supporting member 73, and the photodetector 74 passes through the second supporting groove 731 and emits detection light toward the second supporting groove 731, and the photodetector 74 is used to detect the second fixed structure 63 and generate a detection signal to the controller, and the controller is used to control the test machine 200 to stop moving according to the detection signal, and the present application does not impose any restrictions on this.

[0104] In one embodiment, the snap-fitting mechanism 70 also includes a first fixed seat 75 and a first snap-fitting member 76. The first fixed seat 75 and the first supporting member 72 are arranged along the width direction W. One end of the first snap-fitting member 76 is rotatably connected to the first fixed seat 75. The first snap-fitting member 76 is provided with a first snap-fitting groove 761 at one end close to the first fixed seat 75. The first snap-fitting member 76 can be rotated relative to the first fixed seat 75 so that the first snap-fitting groove 761 can accommodate the first fixed structure 62 to limit the first fixed structure 62 and the testing machine 200.

[0105] The snap-fitting mechanism 70 also includes a second fixed seat 77 and a second snap-fitting member 78. The second fixed seat 77 and the second supporting member 73 are arranged along the width direction W. One end of the second snap-fitting member 78 is rotatably connected to the second fixed seat 77. The second snap-fitting member 78 is provided with a second snap-fitting groove 781 at one end close to the second fixed seat 77. The second snap-fitting member 78 can be rotated relative to the second fixed seat 77 so that the second snap-fitting groove 781 can accommodate the second fixed structure 63 to limit the second fixed structure 63 and the testing machine 200.

[0106] Specifically, when the flipping device 100 flips the test machine 200 to the top of the probe station 300, the first buckle 76 can rotate around the first fixing seat 75 so that the first buckle groove 761 accommodates the first fixing structure 62, restricts the first fixing structure 62 from being separated from the first bearing groove 721, and further limits the first fixing structure 62; the second buckle 78 can rotate around the second fixing seat 77 so that the second buckle groove 781 accommodates the second fixing structure 63, restricts the second fixing structure 63 from being separated from the second bearing groove 731, and further limits the second fixing structure 63, thereby locking the test machine 200 above the probe station 300, further improving the stability of the test machine 200 disposed above the probe station 300. As shown in the figure, the fixing mechanism 60 and the buckle mechanism 70 are in a mutually locked state, the first fixing structure 62 is disposed in the first buckle groove 761, and the second fixing structure 63 is disposed in the second buckle groove 781.

[0107] When the test machine 200 needs to be separated from the probe station 300, the first fastening member 76 can rotate around the first fixing seat 75 so that the first fixing structure 62 is not located in the first fastening groove 761. Similarly, the second fastening member 78 can rotate around the second fixing seat 77 so that the second fixing structure 63 is not located in the second fastening groove 781, so that the fixing mechanism 60 can be separated from the fastening mechanism 70. Fig.14 shown.

[0108] The snap-fitting mechanism 70 also includes a cylinder seat 791 and a cylinder component 792. The cylinder seat 791 is arranged on the fixed base and is spaced apart from the first fixed seat 75. One end of the cylinder component 792 is rotatably connected to the cylinder seat 791, and the other end is rotatably connected to the end of the first snap-fitting component 76 away from the first fixed seat 75. The cylinder component 792 is used to drive the first snap-fitting component 76 to move away from the end of the first fixed seat 75 so that the first snap-fitting component 76 rotates around the first fixed seat 75.

[0109] The fastening mechanism 70 further includes a linkage member 793 , which rotatably connects the first fastening member 76 and the second fastening member 78 . The first fastening member 76 drives the second fastening member 78 to rotate synchronously through the linkage member 793 .

[0110] While the cylinder member 792 drives the first fastening member 76 to rotate around the first fixing seat 75, it can also drive the second fastening member 78 to rotate synchronously around the second fixing seat 77 through the connecting member 793, so as to achieve synchronous locking or synchronous release of the first fixing structure 62 and the second fixing structure 63, thereby improving the locking and matching efficiency of the fastening mechanism 70 and the fixing mechanism 60.

[0111] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0112] The above is part of the implementation methods of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications are also considered to be within the scope of protection of the present application.

Claims

1. A turning device, characterized in that: Used to flip the test machine onto the probe table, the flipping device includes: A frame mechanism, the frame mechanism comprising a first support frame, a second support frame and a connecting frame respectively connecting the first support frame and the second support frame, the first support frame and the second support frame are arranged at intervals along the length direction, and the first support frame is a cubic frame; A rotating mechanism, wherein the rotating mechanism is arranged along the length direction, one end of the rotating mechanism is arranged on the first supporting frame, and the other end of the rotating mechanism is arranged on the second supporting frame; and A connecting mechanism, the connecting mechanism comprising a first connecting component and a second connecting component arranged at intervals, the first connecting component respectively connecting the rotating mechanism and the testing machine, and the second connecting component respectively connecting the rotating mechanism and the testing machine: The rotating mechanism can rotate relative to the frame mechanism and drive the connecting mechanism to rotate relative to the frame mechanism. When the test machine is placed on the probe table, the first connecting component and the second connecting component of the connecting mechanism extend in the height direction.

2. The turning device according to claim 1, characterized in that: The first connecting assembly includes a first connecting side plate and a first corner block, the first connecting side plate is connected to the rotating mechanism, the first corner block is arranged on a side of the first connecting side plate away from the rotating mechanism, the first corner block includes a first connecting portion and a second connecting portion connected and perpendicular to each other, the first connecting portion is connected to the first connecting side plate, and the second connecting portion is connected to the testing machine; The second connecting component includes a second connecting side plate and a second corner block, the second connecting side plate is connected to the rotating mechanism, the second corner block is arranged on the side of the second connecting side plate away from the rotating mechanism, the second corner block includes a third connecting part and a fourth connecting part that are connected and perpendicular to each other, the third connecting part is connected to the second connecting side plate, and the fourth connecting part is connected to the testing machine.

3. The turning device according to claim 2, characterized in that: The rotating mechanism includes a rotating motor, a reduction assembly and a rotating shaft assembly connected in sequence, the rotating motor drives the rotating shaft assembly to rotate through the reduction assembly, the reduction assembly includes a first reducer and a second reducer connected to each other, the first reducer is connected to the rotating motor, and the second reducer is connected to the rotating shaft assembly, the reduction assembly also includes a reducer seat, a first support block and a second support block, the reducer seat is fixed on the first support frame, and the reducer seat is surrounded by at least part of the outer periphery of the second reducer and is fixedly connected to the second reducer, the first support block and the second support block are arranged on the side of the reducer seat away from the rotating shaft assembly, and the first support block and the second support block are respectively arranged at both ends of the reducer seat, the first support block includes a first support portion and a second support portion that are connected and perpendicular to each other, the first support portion is connected to the first support frame, and the second support portion is connected to the reducer seat, the second support block includes a third support portion and a fourth support portion that are connected and perpendicular to each other, the third support portion is connected to the first support frame, and the fourth support portion is connected to the reducer seat.

4. The turning device according to claim 3, characterized in that: The rotating shaft assembly also includes a first flange, a shaft body and a second flange, the outer periphery of the first flange is fixedly connected to the reduction assembly and the shaft body, the axis of the first flange is provided with a first through hole axially passing through, the first through hole is used to pass through the shaft body, a first matching portion is provided on the first through hole, an end of the shaft body close to the first flange is provided with a second matching portion, the first matching portion and the second matching portion cooperate to limit the shaft body, one of the first matching portion and the second matching portion is a groove, and the other is a protrusion; the axis of the second flange is provided with a second through hole axially passing through, the second through hole is used to pass through the shaft body, the second through hole is provided with a third matching portion, and an end of the shaft body close to the second flange is provided with a fourth matching portion, the third matching portion and the fourth matching portion cooperate to limit the shaft body, one of the third matching portion and the fourth matching portion is a groove, and the other is a protrusion.

5. The turning device according to claim 4, characterized in that: The first flange includes a first body and a first protrusion, the first body is fixedly connected to the first connecting side plate, the first protrusion is arranged on a side of the first body away from the reduction assembly; the first connecting side plate is provided with a first through slot, the first protrusion is arranged in the first through slot and at least partially abuts against a slot wall of the first through slot to limit the first connecting side plate from rotating relative to the shaft assembly, and the first protrusion can be slidably connected to the first through slot in a direction perpendicular to the rotation axis of the first connecting side plate; The second flange includes a second body and a second protrusion, the second body is fixedly connected to the second connecting side plate, and the second protrusion is arranged on the side of the second body away from the reduction assembly; a second through groove is provided on the second connecting side plate, and the second protrusion is arranged in the second through groove and at least partially abuts against the groove wall of the second through groove to limit the rotation of the second connecting side plate relative to the rotating shaft assembly, and the second protrusion can be slidably connected to the second through groove in a direction perpendicular to the rotation axis of the second connecting side plate.

6. The turning device according to claim 4, characterized in that: The frame mechanism further includes a first mounting plate and a second mounting plate, wherein the first mounting plate and the second mounting plate are parallel to the placement surface of the flip device, the first mounting plate is arranged between the first support frame and the reducer seat, and the second mounting plate is arranged on the second support frame; The flipping device further comprises a bearing seat, which is arranged on the second mounting plate, and the bearing seat is arranged around one end of the shaft body and is used to limit the shaft body; A first limit pin is provided on the side of the second flange facing away from the first flange, and a first limit block and a second limit block relatively spaced apart are provided on the second mounting plate. The first limit block and the second limit block are used to abut against the first limit pin to limit the rotation angle of the rotating shaft assembly.

7. The turning device according to claim 6, characterized in that: The flipping device also includes a sensor component and a controller component. The sensor component is arranged on the second mounting plate. The controller component is electrically connected to the sensor component. An induction component is provided at one end of the shaft away from the rotating motor. The induction component is used to rotate with the shaft. The induction component and the sensor component cooperate to output a position signal of the shaft to the controller component.

8. The turning device according to claim 7, characterized in that: The sensor assembly includes a sensor base, a first sensor, a second sensor, and a third sensor. The sensor base includes a first base, a second base, and a third base. The second base and the third base are arranged at two ends of the first base and extend along the height direction. The first sensor is arranged on the first base, the second sensor is arranged on the second base, and the third sensor is arranged on the third base. When the induction element is arranged corresponding to the first sensor, the flipping device is in an initial state, and the testing machine and the probe station are arranged along the width direction; When the induction element is arranged corresponding to the third sensor, the flip device is in a testing state, the testing machine is arranged on the probe table, and the testing machine and the probe table are arranged along the height direction.

9. The turning device according to claim 7, characterized in that: The sensor assembly includes a sensor base, a first sensor, a second sensor, and a third sensor. The sensor base includes a first base, a second base, and a third base. The second base and the third base are arranged at two ends of the first base and extend along the height direction. The first sensor is arranged on the first base, the second sensor is arranged on the second base, and the third sensor is arranged on the third base. When the flipping device is in an initial state or a test state, the sensing member is higher than the first sensor and the third sensor, the flipping path of the flipping device includes an acceleration interval and a deceleration interval, the path of the sensing member passing through the first sensor corresponds to one of the acceleration interval and the deceleration interval, and the path of the sensing member passing through the third sensor corresponds to the other of the acceleration interval and the deceleration interval.

10. The turning device according to claim 4, characterized in that: The first connecting side plate is provided with a plurality of first waist-shaped holes, and when the test machine is arranged on the probe table, the first waist-shaped holes extend along the height direction, the first flange is provided with a plurality of first fixing holes, a plurality of first fixing members pass through the first waist-shaped holes and are fixed in the first fixing holes, and the first connecting side plate can move along the height direction relative to the first flange; The second connecting side plate is provided with a plurality of second waist-shaped holes. When the testing machine is placed on the probe table, the second waist-shaped holes extend along the height direction. The second flange is provided with a plurality of second fixing holes. A plurality of second fixing members pass through the second waist-shaped holes and are fixed in the second fixing holes. The second connecting side plate can move along the height direction relative to the second flange.

11. The turning device according to claim 5, characterized in that: The first connection assembly further includes a first adjusting member and a second adjusting member, the first adjusting member passes through a through hole on the first connection side plate and is threadedly connected to the first protrusion, the second adjusting member passes through a threaded hole on the first connection side plate and abuts against the first protrusion, the first adjusting member is used to provide a first force to the first protrusion, and the second adjusting member is used to provide a second force to the second protrusion, and the first force and the second force are in opposite directions; The second connecting assembly also includes a third adjusting member and a fourth adjusting member, the third adjusting member passes through the through hole on the second connecting side plate and is threadedly connected to the second protrusion, the fourth adjusting member passes through the threaded hole on the second connecting side plate and abuts against the second protrusion, the third adjusting member is used to provide a third force to the second protrusion, and the fourth adjusting member is used to provide a fourth force to the second protrusion, and the directions of the third force and the fourth force are opposite.

12. The turning device according to claim 2, characterized in that: The flipping device also includes a first pad, a second pad, a first leveling assembly, and a second leveling assembly. The first pad is arranged on the first corner block and is respectively connected to the first connection part and the second connection part. The second pad is arranged on the second corner block and is respectively connected to the third connection part and the fourth connection part. The first leveling assembly is arranged on the side of the first pad away from the testing machine. The second leveling assembly is arranged on the side of the second pad away from the testing machine. The first leveling assembly is used to drive the first pad, the first connection part and the testing machine to move relative to the first connecting side plate in the width direction. The second leveling assembly is used to drive the second pad, the second connection part and the testing machine to move relative to the second connecting side plate in the width direction. The first leveling assembly and the second leveling assembly are used to adjust the horizontality of the testing machine along the width direction.

13. A wafer inspection system, characterized in that: The wafer inspection system includes a probe station, a test machine and the flipping device according to any one of claims 1 to 12, wherein the probe station is fixedly connected to one side of the flipping device via a connecting plate, and the test machine is installed on the connecting mechanism.

14. The wafer inspection system according to claim 13, characterized in that: The wafer inspection system also includes a fixing mechanism and a snap-fit ​​mechanism. The fixing mechanism is arranged on a side of the test machine away from the connecting mechanism, and the snap-fit ​​mechanism is arranged on the probe table or on a frame adjacent to the flipping device. When the flipping device flips the test machine above the probe table, the fixing mechanism and the snap-fit ​​mechanism cooperate to limit the test machine.

15. The wafer inspection system according to claim 14, characterized in that: The fixing mechanism further includes a first fixing structure, and the buckling mechanism further includes a fixing base and a first bearing member, wherein the first bearing member is arranged on the fixing base, and a first bearing groove is provided on the first bearing member, and the first bearing groove is used to abut and limit the first fixing structure.

16. The wafer inspection system according to claim 15, characterized in that: The snap-fitting mechanism also includes an electrically connected photoelectric detector and a controller, wherein the photoelectric detector is disposed on the first supporting member, and the photoelectric detector penetrates the first supporting groove and emits detection light toward the first supporting groove, and the photoelectric detector is used to detect the first fixed structure and generate a detection signal to the controller, and the controller is used to control the testing machine to stop moving according to the detection signal.

17. The wafer inspection system according to claim 16, characterized in that: The snap-fitting mechanism also includes a first fixing seat and a first snap-fitting member. The first fixing seat and the first supporting member are arranged along the width direction. One end of the first snap-fitting member is rotatably connected to the first fixing seat. An end of the first snap-fitting member close to the first fixing seat is provided with a first snap-fitting groove. The first snap-fitting member can be rotated relative to the first fixing seat so that the first snap-fitting groove can accommodate the first fixing structure to limit the first fixing structure and the testing machine.

18. The wafer inspection system according to claim 17, characterized in that: The snap-fitting mechanism also includes a cylinder seat and a cylinder member, wherein the cylinder seat is arranged on the fixed base and is spaced apart from the first fixed seat, one end of the cylinder member is rotatably connected to the cylinder seat, and the other end is rotatably connected to an end of the first snap-fitting member away from the first fixed seat, and the cylinder member is used to drive the end of the first snap-fitting member away from the first fixed seat to move so that the first snap-fitting member rotates around the first fixed seat.

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