Substrate processing apparatus and method of driving substrate processing apparatus

Abstract

Disclosed are a substrate processing apparatus and a method of driving the same, which automatically cut off power supplied to a main circuit breaker and a branch circuit breaker when an operator inspects a processing chamber or a power supply system. The substrate processing apparatus for processing a substrate includes: a process processing module including a load used in a process of processing a substrate; a branch circuit breaker mounted on the periphery of the process processing module and electrically connected to the load; a main circuit breaker electrically connected to the branch circuit breaker and supplying power to the branch circuit breaker; and a distribution board in which the branch circuit breaker is mounted and which includes a distribution board door in which the main circuit breaker cuts off power when the distribution board door is opened.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2023-0076662 filed in the Korean Intellectual Property Office on June 15, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present invention relates to a substrate processing apparatus and a method of driving the substrate processing apparatus, and to a substrate processing apparatus for processing a substrate and a method for driving the substrate processing apparatus. Background Art

[0004] In semiconductor manufacturing, substrate processing facilities are used for various processes such as cleaning, etching, deposition, exposure, development, thermal processing, and liquid processing.

[0005] In the process of conveying, heating, etching, cooling and liquid processing of substrates, these substrate processing facilities are driven by supplying power to loads of drive units such as motors, pumps, heaters, coolers and plasma generators. Branch circuit breakers installed in each of the processing chambers cut off power or supply power to the loads.

[0006] In this case, the branch circuit breaker receives power from a main circuit breaker electrically connected to a main power line and distributes the received power to the respective loads.

[0007] On the other hand, when the operator checks the processing chamber or checks the power supply system, the operator may disconnect the branch circuit breaker, and in this case, even if the branch circuit breaker is switched to a closed state, the branch circuit breaker is electrically connected to the main circuit breaker so that the input terminal remains in a live wire state.

[0008] Therefore, when an operator wants to inspect the process chamber or check the power system, even if he / she switches the branch circuit breaker to a closed state and continues to perform the task, the electrical connection to the main circuit breaker is still live, exposing the operator to the risk of electric shock.

[0009] In particular, due to confusion or unfamiliarity with the task, the operator may continue to perform the task while disconnecting a circuit breaker not related to the task among several branch circuit breakers. This puts the operator in a dangerous situation that may lead to an electric shock accident.

[0010] Furthermore, there is an unexpected risk of electric shock when an operator disconnects the main circuit breaker and continues to work with the power supply in an inactive state while another worker turns on the main circuit breaker to activate the main circuit breaker. Summary of the invention

[0011] In order to solve the above problems, the present invention provides a substrate processing apparatus and a method of driving the substrate processing apparatus, which automatically cut off power supplied to a main circuit breaker and a branch circuit breaker when an operator checks a processing chamber or a power supply system.

[0012] To solve the above problems, the present invention also provides a substrate processing apparatus and a method of driving the substrate processing apparatus, which prevent power supplied to a main circuit breaker and a branch circuit breaker from being switched to an active state when an operator checks a processing chamber or a power supply system.

[0013] The objects of the present invention are not limited thereto, and other objects not mentioned will be clearly understood from the following description by those skilled in the art.

[0014] An exemplary embodiment of the present invention provides a substrate processing device for processing a substrate, comprising: a process processing module, which includes a load used in a process for processing a substrate; a branch circuit breaker, which is installed at the periphery of the process processing module and is electrically connected to the load; a main circuit breaker, which is electrically connected to the branch circuit breaker and supplies power to the branch circuit breaker; and a distribution board, in which the branch circuit breaker is installed and includes a distribution board door, wherein when the distribution board door is opened, the main circuit breaker cuts off the power.

[0015] According to an exemplary embodiment, the substrate processing equipment may further include: a door opening / closing detection unit, which is installed on the periphery of the distribution board door and switches to a first contact when the distribution board door is opened and switches to a second contact when the distribution board door is closed; and a shunt unit, which is electrically connected to the door opening / closing detection unit and does not disconnect the main circuit breaker to allow the main circuit breaker to switch to an off state when the door opening / closing detection unit is at the first contact, and allows the main circuit breaker to switch to an on state when the door opening / closing detection unit is at the second contact.

[0016] According to an exemplary embodiment, the door opening / closing detection unit may be formed of at least one of a magnetic sensor, a relay switch, and an object detection sensor.

[0017] According to an exemplary embodiment, the door opening / closing detection unit can electrically connect one end of the internal contact to the input terminal of the branch circuit breaker and the other end of the internal contact to the shunt unit, the first contact can be in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is energized, and the second contact can be in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is de-energized.

[0018] According to an exemplary embodiment, the main circuit breaker may include an internal relay for energizing or de-energizing an internal contact, and the internal relay may be de-energized by the shunt unit.

[0019] According to an exemplary embodiment, when the main circuit breaker is switched to an open state by the shunt unit, the main circuit breaker may maintain an open state until the door opening / closing detection unit is switched to the second contact point.

[0020] According to an exemplary embodiment, the shunt unit may include a relay or a switch element.

[0021] According to an exemplary embodiment, the switchboard door may be pivotably or slidably mounted in the opening area of ​​the switchboard.

[0022] According to an exemplary embodiment, the process processing module may include a plurality of processing chambers arranged adjacent to each other, the branch circuit breaker may include a plurality of branch circuit breakers, and the plurality of branch circuit breakers may be electrically connected to the plurality of processing chambers, respectively, to supply power to or cut off power to each of the plurality of processing chambers.

[0023] According to an exemplary embodiment, the process processing module may further include a buffer unit and a transfer chamber disposed adjacent to each other, and each of a plurality of branch circuit breakers may be electrically connected to the buffer unit and the transfer chamber to supply or cut off power to each of the buffer unit and the transfer chamber.

[0024] According to an exemplary embodiment, the power distribution panel may be disposed adjacent to the process module, and the main circuit breaker may be disposed spaced apart from the process module.

[0025] According to an exemplary embodiment, the switchboard may be disposed in a fab together with the process module, and the main circuit breaker may be disposed in a sub-fab.

[0026] According to an exemplary embodiment, the sub operation area and the operation area may be disposed on different layers.

[0027] According to an exemplary embodiment, the main circuit breaker may be formed of an earth leakage breaker (ELB) or a molded case circuit breaker (MCCB), and the branch circuit breaker may be formed of an ELB or a MCCB.

[0028] According to an exemplary embodiment, the main circuit breaker may not be provided in the switchboard.

[0029] Another exemplary embodiment of the present invention provides a method for driving a substrate processing device for processing a substrate, the method comprising: a power supply operation, wherein a door opening / closing detection unit detects a closed state of a distribution board door and switches to a second contact, and the second contact causes a shunt unit not to turn off a main circuit breaker so as to supply power from the main circuit breaker to a branch circuit breaker; a process processing operation, wherein each of the process processing modules receives power from a branch circuit breaker to process a substrate; and a power-off operation, wherein the door opening / closing detection unit detects an open state of a distribution board door and switches to a first contact, and the shunt unit turns off the main circuit breaker to cut off power supplied from the main circuit breaker to the branch circuit breaker.

[0030] According to an exemplary embodiment, the method may further include a power-on operation in which the door opening / closing detection unit detects a closed state of the switchboard door and switches to a second contact, and the shunt unit does not disconnect the main circuit breaker.

[0031] According to an exemplary embodiment, the main circuit breaker may not be provided in the switchboard.

[0032] According to an exemplary embodiment, the door opening / closing detection unit can electrically connect one end of the internal contact to the input terminal of the branch circuit breaker and the other end of the internal contact to the shunt unit, the first contact can be in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is energized, and the second contact can be in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is de-energized.

[0033] Yet another exemplary embodiment of the present invention provides a substrate processing apparatus for processing a substrate, the substrate processing apparatus comprising: a process processing module installed in an operation area and comprising a process chamber, a buffer unit and a transfer chamber, the transfer chamber having a load used in a process of processing the substrate; a branch circuit breaker installed in the operation area, formed of an earth leakage circuit breaker (ELB) or a molded case circuit breaker (MCCB), installed on the periphery of the process processing module, and comprising a plurality of branch circuit breakers, each of the plurality of branch circuit breakers being electrically connected to each of the loads in the process chamber, the buffer unit and the transfer chamber; a main circuit breaker installed in a sub-operation area formed on a different layer from the operation area, formed of an ELB or an MCCB, comprising an internal relay for energizing or de-energizing an internal contact, electrically connected to the branch circuit breaker, and supplying power to the branch circuit breaker; a distribution board installed in the operation area, installed on the periphery of the process processing module, comprising a mounted branch circuit breaker, and comprising a pivotable or slidable distribution board a door; a door opening / closing detection unit installed in an operating area, formed by at least one of a magnetic sensor, a relay switch and an object detection sensor, installed on the periphery of the switchboard door, and switched to a first contact when the switchboard door is opened and switched to a second contact when the switchboard door is closed; and a shunt unit installed in a sub-operating area, including a relay or a switch element, electrically connected to the door opening / closing detection unit, and not disconnecting the main circuit breaker to allow the main circuit breaker to switch to an off state when the door opening / closing detection unit is at the first contact, and to allow the main circuit breaker to switch to an on state when the door opening / closing detection unit is at the second contact, wherein one end of an internal contact of the door opening / closing detection unit is electrically connected to an input terminal of a branch circuit breaker and the other end of the internal contact is electrically connected to the shunt unit, the first contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is energized, and the second contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is de-energized.

[0034] According to the present invention, when an operator checks a process chamber or a power supply system, power supplied to a main circuit breaker and a branch circuit breaker can be automatically cut off.

[0035] According to the present invention, when an operator checks a process chamber or a power supply system, it is possible to prevent power supplied to a main circuit breaker and a branch circuit breaker from being switched to an active state.

[0036] The effects of the present invention are not limited to the above-mentioned effects, and those skilled in the art can clearly understand unmentioned effects from the present specification and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1is a front view schematically showing a substrate processing apparatus according to an exemplary embodiment of the present invention.

[0038] Figure 2 It is schematically shown Figure 1 A top plan view of the interior of a substrate processing apparatus is shown.

[0039] Figure 3 It is schematically shown Figure 2 A longitudinal cross-sectional view of a substrate processing apparatus is shown.

[0040] Figure 4 is schematically shown in Figure 1 A front view of the switchboard and the electrical connections shown with the door of the switchboard open.

[0041] Figure 5 It is schematically shown Figure 4 Electrical wiring diagram showing the electrical connections of the main circuit breaker and branch circuit breakers.

[0042] Figure 6 is a flow chart of a method of operating a substrate processing apparatus according to the present invention. DETAILED DESCRIPTION

[0043] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. Exemplary embodiments are provided so that the present disclosure will be thorough and will fully convey the scope to those skilled in the art. Many specific details, such as examples of specific components, devices, and methods, are set forth to provide a thorough understanding of the embodiments of the present disclosure. It will be apparent to those skilled in the art that specific details need not be employed, that exemplary embodiments may be embodied in many different forms, and that neither should be construed as limiting the scope of the present disclosure. In some exemplary embodiments, well-known processes, well-known device structures, and well-known techniques are not described in detail.

[0044] The terms used herein are only used for the purpose of describing specific exemplary embodiments and are not restrictive. As used herein, unless the context clearly indicates otherwise, when the quantity is not specified, "described" may also be intended to include plural forms. The terms "include / comprise" and "have" are inclusive, and therefore specify the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups thereof. Unless specifically identified as an execution order, the method steps, processes and operations described herein should not be interpreted as necessarily requiring them to be performed in the specific order discussed or described. It should also be understood that additional or alternative steps may be adopted.

[0045] When an element or layer is referred to as being "on," "engaged," "connected," or "coupled" to another element or layer, it may be directly "on," "engaged," "connected," or "coupled" to the other element or layer, or there may be intermediate elements or layers. Conversely, when an element is referred to as being "directly on," "directly engaged to," "directly connected to," or "directly coupled to" another element or layer, there may be no intermediate elements or layers. Other words used to describe the relationship between elements should be interpreted in a similar manner (e.g., "between" versus "directly between," "adjacent" versus "directly adjacent," etc.). As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0046] Although the terms first, second, third, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer and / or section from another region, layer or section. Unless the context clearly indicates, the terms such as "first", "second" and other numerical terms used herein do not imply sequence or order. Therefore, without departing from the teaching of the exemplary embodiment, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section.

[0047] To facilitate description of the relationship of one element or feature to another element or feature as shown in the figures, spatially relative terms such as "inside", "outside", "below", "below", "below", "above", and "above" may be used herein. In addition to the orientations described in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the accompanying drawings is flipped, elements described as being "below" or "below" other elements or features will be oriented "above" the other elements or features. Therefore, the exemplary term "below" can cover both above and below orientations. The device can be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0048] When the terms "same" or "equivalent" are used in the description of exemplary embodiments, it should be understood that some imprecision may exist. Therefore, when one element or value is referred to as being the same as another element or value, it should be understood that the element or value is the same as the other element or value within a manufacturing or operating tolerance range (e.g., ±10%).

[0049] When the term "about" or "substantially" is used in conjunction with a numerical value, it is understood that the relevant numerical value includes a manufacturing or operating tolerance (e.g., ±10%) around the numerical value. In addition, when the words "generally" and "substantially" are used in conjunction with geometric shapes, it is understood that the accuracy of the geometric shape is not required, but the latitude of the shape is within the scope of the present disclosure.

[0050] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present example embodiments belong. It should also be understood that terms (including those defined in commonly used dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless explicitly defined in this article.

[0051] Figure 1 is a front view schematically showing a substrate processing apparatus according to an exemplary embodiment of the present invention. Figure 2 It is schematically shown Figure 1 A top plan view of the interior of a substrate processing apparatus is shown. Figure 3 It is schematically shown Figure 2 A longitudinal cross-sectional view of a substrate processing apparatus is shown. Figure 4 is schematically shown in Figure 1 A front view of the switchboard and the electrical connections shown with the door of the switchboard open. Figure 5 It is schematically shown Figure 4 Electrical wiring diagram showing the electrical connections of the main circuit breaker and branch circuit breakers.

[0052] refer to Figures 1 to 5 , the substrate processing apparatus 1 includes an indexing module 10 and a process processing module 20, and the indexing module 10 includes a loading port 120 and a transfer frame 140. The loading port 120, the transfer frame 140, and the process processing module 20 are arranged in a continuous row. Hereinafter, the direction in which the loading port 120, the transfer frame 140, and the process processing module 20 are arranged is referred to as a first direction 12, a direction perpendicular to the first direction 12 when viewed from above is referred to as a second direction 14, and a direction perpendicular to a plane including the first direction 12 and the second direction 14 is referred to as a third direction 16.

[0053] The carrier 18 containing the substrate W is placed on the load port 120. A plurality of load ports 120 are provided and arranged in a row in the second direction 14. Figure 1In the figure, it is shown that four load ports 120 are provided. However, the number of the load ports 120 may be increased or decreased according to conditions such as the processing efficiency and the occupied space of the process processing module 20. A slot (not shown) for supporting the edge of the substrate is formed in the carrier 18. A plurality of slots are provided in the third direction 16, and the substrates are positioned to be stacked within the carrier while being spaced apart from each other in the third direction 16. As the carrier 18, a front opening pod (FOUP) may be used.

[0054] The process treatment module 20 may include a buffer unit 20, a transfer chamber 240, and process chambers 260 and 280. The transfer chamber 240 is arranged so that its longitudinal direction is parallel to the first direction 12. The process chambers 260 and 280 are arranged on opposite sides of the transfer chamber 240 in the second direction 14. The process chamber 260 may be arranged symmetrically with respect to the transfer chamber 240. Some of the process chambers 260 and 280 are arranged along the longitudinal direction of the transfer chamber 240. In addition, some of the process chambers 260 and 280 are arranged to be stacked on top of each other. That is, the process chamber 240 may be arranged in an Ax B array (A and B are natural numbers equal to or greater than 1) on opposite sides of the transfer chamber 240. Here, "A" is the number of process chambers 260 and 280 arranged in a row along the first direction 12, and "B" is the number of process chambers 260 and 280 arranged in a row along the third direction 16. When four or six processing chambers 260 are provided on each side of the opposite sides of the transfer chamber 240, the processing chambers 260 and 280 may be provided in a 2×2 or 3×2 array. The number of processing chambers 260 and 280 may be increased or decreased. Different from the above, the processing chamber 260 may be provided only to one side of the transfer chamber 240. In addition, the processing chambers 260 and 280 may be provided as a single layer on one side and the opposite side of the transfer chamber 240. In addition, the processing chambers 260 and 280 may be provided in various arrangements different from the above. In addition, the loads of the units for transferring or processing substrates are electrically connected to the branch circuit breakers 706, respectively, so that each of the buffer unit 220, the transfer chamber 240, and the processing chambers 260 and 280 is powered.

[0055] The processing chambers 260 and 280 of the present exemplary embodiment may be classified as including a cleaning chamber and a drying chamber. In this case, the cleaning chamber may be a substrate processing device for cleaning a substrate (which will be described below), and the drying chamber may be a substrate processing device for drying a substrate.

[0056] The buffer unit 220 is disposed between the transfer frame 140 and the transfer chamber 240. The buffer unit 220 may provide a space for the substrate W to stay before the substrate W is transferred between the transfer chamber 240 and the transfer frame 140. A slot (not shown) is provided in the buffer unit 220, on which the substrate W is placed, and the slots (not shown) are provided in plural to be spaced apart from each other in the third direction 16. In the buffer unit 220, a side facing the transfer frame 140 and a side facing the transfer chamber 240 are each opened.

[0057] The transfer frame 140 transfers the substrate W between the carrier 18 disposed on the loading port 120 and the buffer unit 220. The transfer frame 140 is provided with an indexing track 142 and an indexing robot 144. The indexing track 142 is provided so that its longitudinal direction is parallel to the second direction 14. The indexing robot 144 is mounted on the indexing track 142 and moves linearly in the second direction 14 along the indexing track 142. The indexing robot 144 includes a base 144a, a main body 144b and an indexing arm 144c. The base 144a is installed to be movable along the indexing track 142. The main body 144b is coupled to the base 144a. The main body 144b is arranged to be movable on the base 144a in the third direction 16. In addition, the main body 144b is arranged to be rotatable on the base 144a. The indexing arm 144c is coupled to the main body 144b and is arranged to be movable forward and backward relative to the main body 144b. The plurality of indexing arms 144c are configured to be driven individually. The indexing arms 144c are configured to be stacked in a state where they are spaced apart from each other in the third direction 16. When transferring the substrate W from the process treatment module 20 to the carrier 18, a portion of the indexing arms 144c may be used, and when transferring the substrate W from the carrier 130 to the process treatment module 20, another portion of the plurality of indexing arms 144c may be used. This can prevent particles generated from the substrate W before the process treatment from being attached to the substrate W after the process treatment during the process of loading and unloading the substrate W by the indexing robot 144.

[0058] The transfer chamber 240 transfers the substrate W between the buffer unit 220 and the processing chamber 260. A guide rail 242 and a main robot 244 are provided to the transfer chamber 240. The guide rail 242 is arranged so that its longitudinal direction is parallel to the first direction 12. The main robot 244 is mounted on the guide rail 242 and moves linearly along the first direction 12 on the guide rail 242. The main robot 244 includes a base 244a, a main body 244b and a main arm 244c. The base 244a is installed to be movable along the guide rail 242. The main body 244b is connected to the base 244a. The main body 244b is arranged to be movable along the third direction 16 on the base 244a. In addition, the main body 244b is arranged to be rotatable on the base 244a. The main arm 244c is connected to the main body 244b and is arranged to be movable forward and backward relative to the main body 244b.

[0059] In addition, the processing chamber 260 is provided with a substrate processing apparatus 300. In the present exemplary embodiment, a case in which the substrate processing apparatus 300 performs a liquid processing process on a substrate will be described as an example. The liquid processing process may also include a process of cleaning the substrate.

[0060] In one example, the substrate processing apparatus 300 further includes a chamber 310, a processing container 320, a spin head 340, an elevating unit 360, a liquid discharge unit 400, a gas flow forming unit 500, a liquid supply unit 600, and a controller. The chamber 310 provides a processing space 312 in which a process of processing a substrate W is performed.

[0061] The processing container 320 is located in the processing space 312 and is arranged in the shape of a cup with an open top. When viewed from above, the processing container 320 is positioned to overlap with the exhaust pipe. The processing container 320 includes an internal collection container 322 and an external collection container 326. Each of the collection containers 322 and 326 collects a processing liquid different from the processing liquid used in the process. The internal collection container 322 is arranged in an annular ring shape around the rotating head 340, and the external collection container 326 is arranged in an annular ring shape around the internal collection container 322. The internal space 322a of the internal collection container 322 and the space 326a between the external collection container 326 and the internal collection container 322 are used as inlets for the processing liquid to flow into the internal collection container 322 and the external collection container 326, respectively. The collection lines 322b and 326b are connected to the bottom surfaces of the collection containers 322 and 326, respectively, to extend vertically in a downward direction. Each of the collecting lines 322b and 326b serves as a drain pipe to drain the treatment liquid that has been introduced through the corresponding collecting containers 322 and 326. The drained treatment liquid may be reused by an external treatment liquid regeneration system (not shown).

[0062] The spin head 340 is provided as a support unit for supporting and rotating the substrate W. The spin head 340 is provided in the processing container 320. In the process, the spin head 340 supports the substrate W and rotates the substrate W. The spin head 340 includes a chuck body 342, a support pin 344, a chuck pin 346 and a support shaft 348. When viewed from above, the chuck body 342 has a top surface arranged in a substantially circular shape. The support shaft 348, which can be rotated by a motor 349, is fixedly coupled to the bottom surface of the chuck body 342. A plurality of support pins 344 are provided. The support pins 344 are arranged to be spaced at predetermined intervals on the edge of the upper surface of the chuck body 342 and protrude upward from the chuck body 342. The support pins 334 are arranged in combination with each other to have an overall annular ring shape. The support pins 344 support the edge of the rear surface of the substrate W so that the substrate W is spaced at a predetermined distance from the upper surface of the spin chuck 342. A plurality of chuck pins 346 are provided. The chuck pin 346 is arranged to be farther from the center of the chuck body 342 than the support pin 344. The chuck pin 346 is arranged to protrude upward from the chuck body 342. The chuck pin 346 supports the side portion of the substrate W so that when the spin head 340 rotates, the substrate W does not move laterally from the normal position. The chuck pin 346 is arranged to move linearly between the standby position and the support position along the radial direction of the chuck body 342. The standby position is a position farther from the center of the chuck body 342 relative to the support position. When the substrate W is loaded to the spin head 340 or unloaded therefrom, the chuck pin 346 is positioned at the standby position, and when a process is performed on the substrate W, the chuck pin 346 is positioned at the support position. In the support position, the chuck pin 346 contacts the side portion of the substrate W. In this case, the spin head 340 can be electrically connected to the branch circuit breaker 706 to receive power.

[0063] The lifting unit 360 adjusts the relative height between the processing container 320 and the spin head 340. The lifting unit 360 moves the processing container 320 linearly in the vertical direction. As the processing container 320 moves in the vertical direction, the relative height of the processing container 320 relative to the spin head 340 changes. The lifting unit 360 includes a bracket 360, a moving shaft 362, and a driver 364. The bracket 362 is fixedly mounted on the outer wall of the processing container 320, and the moving shaft 364 that moves in the vertical direction by the driver 366 is fixedly coupled to the bracket 364. The processing container 320 is lowered so that when the substrate W is placed on or lifted from the spin head 340, the spin head 340 protrudes above the top of the processing container 320. In addition, when the processing is in progress, the height of the processing container 320 is adjusted so that the processing liquid is introduced into the predetermined collection container 326 according to the type of the processing liquid supplied to the substrate W. In this case, the lifting unit 360 can be electrically connected to the branch circuit breaker 706 to receive power.

[0064] Different from the above description, the elevating unit 360 may move the spin head 340 in a vertical direction instead of the process container 320 .

[0065] The liquid discharge unit 400 supplies various types of liquids to the substrate W. The liquid discharge unit 400 also includes a plurality of nozzles 410 to 430. Each nozzle is moved to a processing position and a standby position by a nozzle position driver 440. The processing position is defined herein as a position where the nozzles 410 to 430 are able to discharge liquid onto the substrate W located within the processing container 320, and the standby position is defined as a position where the nozzles 410 to 430 wait outside the processing position. According to an example, the process position may be a position where the nozzles 410 to 430 can supply liquid to the center of the substrate W. For example, when viewed from above, the nozzles 410 to 430 may be linearly or axially movable to move between the processing position and the standby position. The processing liquid discharged from the liquid discharge unit 400 to the substrate W may be a liquefied processing liquid. In addition, in the standby position, the collecting pipe 450 may be disposed below the third nozzle 430. When the third nozzle 430 discharges the processing liquid for cleaning, the collecting pipe 450 collects the processing liquid. In addition, the liquid discharge unit 400 may expose the liquid by a pump. Additionally, the liquid discharge unit 400 may receive power through the driver 440 and the pump electrically connected to the branch circuit breaker 706 .

[0066] The plurality of nozzles 410 to 430 discharge different types of liquids. The treatment fluid discharged from the nozzles 410 to 430 may include at least one of chemicals, a rinse solution, and a drying fluid. Figure 2 In an exemplary embodiment of the present invention, the first nozzle 410 may be a nozzle for discharging chemicals. The second nozzle 420 may be a nozzle for discharging a rinsing solution. The third nozzle 430 may be a nozzle for discharging a drying fluid. For example, the chemical may be a liquid capable of etching a film formed on the substrate W or removing particles remaining on the substrate W. The chemical may be a liquid having a strong acid or strong base property. The chemical may include sulfuric acid, hydrofluoric acid, or ammonia. The rinsing liquid may be a liquid capable of rinsing the chemicals remaining on the substrate W. For example, the rinsing solution may be pure water. The drying fluid may be provided as a liquid capable of replacing the rinsing liquid remaining on the substrate W. The drying fluid may be a liquid having a lower surface tension than the rinsing liquid. The drying fluid may be an organic solvent. The drying fluid may be isopropyl alcohol (IPA). The third nozzle 430 may be connected to a liquid supply unit 600 to be described later.

[0067] The airflow forming unit 500 forms a downward airflow in the processing space 312. The airflow forming unit 500 supplies the airflow from the upper portion of the chamber 310 and exhausts the airflow from the lower portion of the chamber 310. The airflow forming unit 500 further includes an airflow supply unit 520 and an exhaust unit 540. The airflow supply unit 520 and the exhaust unit 540 are positioned to face each other in the vertical direction.

[0068] The airflow supply unit 520 supplies gas in a downward direction. The gas supplied from the airflow supply unit 520 can be air from which impurities have been removed. The airflow supply unit 520 also includes a fan 522, an airflow supply line 524, a supply valve 528, and a filter 526. The fan 522 is installed on the top plate surface of the chamber 310. When viewed from above, the fan 522 is positioned to face the processing container. The fan 522 can be positioned to provide air to the substrate W located in the processing container. The airflow supply line 524 is connected to the fan 522 to supply air to the fan 522. The supply valve 528 is installed in the airflow supply line 524 to adjust the amount of air supplied. The filter 526 is installed in the airflow supply line 524 to filter the air. For example, the filter 526 can remove particles and moisture contained in the air.

[0069] The exhaust unit 540 exhausts the processing space 312. The exhaust unit 540 also includes an exhaust pipe 542, a decompression member 546, and an exhaust valve 548. The exhaust pipe 542 is installed on the bottom surface of the chamber 310 and is provided as a pipeline for exhausting the processing space 312. The exhaust pipe 542 is positioned so that the exhaust port faces upward. The exhaust pipe 542 is positioned so that the exhaust port is communicated with the inside of the processing container. That is, the top of the exhaust pipe 542 is located in the processing container. Therefore, the downward airflow formed in the processing container is discharged through the exhaust pipe 542.

[0070] The decompression member 546 reduces the pressure of the exhaust pipe 542. Negative pressure is formed in the exhaust pipe 542 by the decompression member 546, which exhausts the processing container. The exhaust valve 548 is installed in the exhaust pipe 542 and opens and closes the exhaust port of the exhaust pipe 542. The exhaust valve 548 adjusts the exhaust amount.

[0071] The liquid supply unit 600 supplies the treatment liquid to at least one of the plurality of nozzles 410 to 430. The liquid supply unit 600 may heat the treatment liquid. In addition, the liquid supply unit 600 may store the treatment liquid.

[0072] The controller may include a central computing unit. In addition, the controller controls the spin head 340, the lifting unit 360, the liquid discharge unit 400, the air flow forming unit 500, and the liquid supply unit 600 according to an internally set algorithm to process the substrate W according to a scheme. The controller also receives power from the branch circuit breaker 706 for operation.

[0073] In the present exemplary embodiment, a case in which the substrate processing apparatus 300 is applied to a liquid processing process is described as an example, but the substrate processing apparatus 300 may be applied to facilities of a cleaning process, an etching process, a deposition process, a developing process, a heat treatment process, and the like.

[0074] The substrate processing apparatus 300 may further include a switchboard 701 , a power distribution board 702 , a door opening / closing detecting portion 703 , a main circuit breaker 704 , a shunt unit 705 , and a branch circuit breaker 706 .

[0075] The switchboard 701 is schematically formed into a box shape. The switchboard 701 can be spaced apart from the process processing module 20. In addition, the switchboard 701 can be arranged on a layer different from the layer where the process processing module 20 is located. For example, the process processing module 20 can be installed in the operation area (fab), and the switchboard 701 can be installed in the sub-operation area as the lower layer of the operation area. In addition, the switchboard 701 can have an opening area, and the front of the box is opened in the opening area. In this case, the switchboard 701 can also include a switchboard door 701a installed in the opening area. The switchboard door 701a can rotate or slide in the switchboard 701 to open or close the opening area of ​​the switchboard 701. Although the exemplary switchboard 701 is configured to protrude from the top of the process processing module 20, it is certainly understandable that the switchboard 701 can be implemented in various modifications, such as a flat type that is horizontal to the top surface of the process processing module 20. The switchboard 701 can be internally installed with a main circuit breaker 704. Here, since the switchboard 701 corresponds to a power supply path that may be consumed by the entire process processing module 20, the switchboard 701 may be configured at a position as far away from the operator's working path as possible due to the risk of electric shock accidents.

[0076] The distribution board 702 is schematically formed into a box shape. The distribution board 702 can be arranged above or beside the process processing module 20. In addition, the distribution board 702 can be formed in multiple. In this case, multiple distribution boards 702 can supply power to the processing chambers 260 and 280 respectively. The distribution board 702 has an opening area in a part of the box, and can also include a distribution board door 702a formed in the opening area. The distribution board door 702a can rotate or slide in the opening area of ​​the distribution board 702 to open and close the opening area of ​​the distribution board 702. In addition, the distribution board door 702a can open and close the opening area of ​​the distribution board 702 by detaching and separating from the distribution board 702. In addition, the branch circuit breaker 706 is installed on the distribution board 702. In addition, on the inner side of the distribution board 702, the load line 702B electrically connected to the load can be electrically connected to the output terminal of the branch circuit breaker 706. In addition, a bus bar 702c electrically connected to an input terminal of each of the branch circuit breakers 706 is installed on the distribution board 702. The bus bar 702c is electrically connected to the main circuit breaker 704 through a power line 702d, and when power is supplied from the main circuit breaker 704, power is distributed and supplied to each of the branch circuit breakers 706. In this case, the main circuit breaker 704 is not provided in the distribution board 702, but is provided in a sub-operation area, so that the main administrator manages the control authority to supply and cut off the entire power system. Therefore, a worker who checks the distribution board 702 is prevented from accidentally cutting off the power of other facilities that are not being checked.

[0077] The door opening / closing detection unit 703 is installed on the inner side of the distribution board 702, and it contacts the distribution board door 702a of the distribution board 702. The door opening / closing detection unit 703 is electrically connected to the bus bar 702c, which is the input terminal of the branch circuit breaker 706, through the signal connection line 703a, and the other end of the internal contact is electrically connected to the shunt unit 705 through the signal connection line 703a. In this case, the door opening / closing detection unit 703 forms a second contact when the distribution board door 702a is closed, and switches to a first contact when the distribution board door 702a is opened. Here, the first contact corresponds to the electrical connection between the input terminal of the branch circuit breaker 706 and the shunt unit 705 in the short-circuit state, and the second contact corresponds to the electrical connection between the input terminal of the branch circuit breaker 706 and the shunt unit 705 in the power-on state. Such a door opening / closing detection unit 703 may be formed by a magnetic sensor installed in the distribution board door 702a and the opening area to switch to the second contact when the magnetic force is detected and to switch to the first contact when the magnetic force is not detected, depending on whether the magnetic force is detected. The door opening / closing detection unit 703 may also be formed by a relay switch that switches to the first contact when in contact with the distribution board door 702a and switches to the second contact when not in contact with the distribution board door 702a. However, the present invention does not limit the door opening / closing detection unit 703 to a magnetic sensor and a relay switch, and may of course be any form that directly contacts the distribution board door 702a or detects an object and switches from the first contact to the second contact, such as a push-button switch or an object detection sensor.

[0078] The main circuit breaker 704 can be arranged in the switchboard 701. The main circuit breaker 704 can be formed by an earth leakage circuit breaker (ELB) or a molded case circuit breaker (MCCB). In addition, the main circuit breaker 704 can be a three-phase or two-phase circuit breaker. In addition, the main circuit breaker 704 is electrically connected to the main power line. The main power line is electrically connected to the main circuit breaker 704 installed in each of the switchboards 701 to supply power all the time. In addition, the main circuit breaker 704 is electrically connected to each of the branch circuit breakers 706 through a power line 702d. Here, in the case where the main circuit breaker 704 is installed in the sub-operating area and the branch circuit breaker 706 is installed in the operating area, the power line 702d can be deployed to have an extension across the sub-operating area and the operating area. Here, the main circuit breaker 704 is placed in a place that is not easily accessible to workers while being protected by the switchboard 701, such as a sub-operating area. Therefore, since the operator cannot manipulate the main circuit breaker 704, the operator can ensure that the substrate processing process is interrupted by the operator's manipulation, and the risk of electric shock accidents is reduced. In addition, the main circuit breaker 704 supplies power to the branch circuit breaker 706 in the on state when the internal contact is energized, and cuts off the power supplied to the branch circuit breaker 706 in the off state when the internal contact is de-energized. In addition, the main circuit breaker 704 is provided with an internal relay that energizes or closes the contact, and the internal relay can switch the state of the contact to the energized or de-energized state according to the state of the shunt unit 705, which will be described below.

[0079] The shunt unit 705 controls the state of the internal contacts of the main circuit breaker 704 to be powered on or off according to the open or closed state of the distribution board door 702a. The shunt unit 705 can be configured to include a relay or a switch element. The shunt unit 705 is electrically connected to the door opening / closing detection unit 703. In this case, when the door opening / closing detection unit 703 is in a first contact state, the shunt unit 705 disconnects the main circuit breaker 704, thereby switching the power supply state of the main circuit breaker 704 to a cut-off state. Then, the main circuit breaker 704 switches the internal contacts to a short-circuit state, thereby cutting off the power flowing to the branch circuit breaker 706. On the contrary, the shunt unit 705 releases the function of blocking the main circuit breaker 704, so that when the door opening / closing detection unit 703 is in a second contact state, the main circuit breaker 704 can be switched to the on state at any time.

[0080] A branch circuit breaker 706, in which the input terminal is electrically connected to the branch point of the busbar 702C, receives power from the main circuit breaker 704. In addition, the branch circuit breaker 706 can be formed by an earth leakage circuit breaker (ELB) or a molded case circuit breaker (MCCB). In addition, the branch circuit breaker 706 can be a three-phase or two-phase circuit breaker. In addition, the branch circuit breaker 706 is electrically connected to each of the loads configured in the substrate processing equipment 300 through a branch power line. The load configured in the substrate processing equipment 300 may include a power-consuming component installed in each of the processing chambers 260 and 280, such as a motor or a pump. The branch circuit breaker 706 supplies power to the load side when the internal contact is energized, and cuts off the power supplied to the load side when the internal contact is de-energized. In addition, the branch circuit breaker 706 can allow the operator to manipulate the joystick to switch the internal contact to an energized or de-energized state.

[0081] Hereinafter, a method of driving a substrate processing apparatus according to the present invention as described above will be described.

[0082] Figure 6 is a flow chart of a method of operating a substrate processing apparatus according to the present invention.

[0083] Further references Figure 6 , the method of driving a substrate processing apparatus according to the present invention includes a power supply operation S10, a process operation S20, a power-off operation S30, and a power-on operation S40.

[0084] First, in the power supply operation S10, the door opening / closing detection unit 703 detects the closed state of the switchboard door 702a and switches to the second contact. The shunt unit 705 then becomes inactive and does not disconnect the main circuit breaker 704, and the main circuit breaker 704 supplies power to the branch circuit breaker 706.

[0085] Next, in the process processing operation S20, each of the process processing modules receives power from the branch circuit breaker 706 to process the substrate W. More specifically, in the process processing operation S20, the index robot 144 loads the substrate W received at the load port 120 to the buffer unit 220, and loads the substrate W received at the buffer unit 220 into the corresponding processing chambers 260 and 280 through the main robot 244 in the transfer chamber 240, and processes the substrate W. In this case, each of the loads (index robot 144 and main robot 244) is electrically connected to each of the branch circuit breakers 706 to receive power. Next, in the process treatment operation S20, chemicals are discharged from the first nozzle 410 onto the substrate W loaded into the process chambers 260 and 280 to remove metal impurities, organic matter or particles, etc., remaining on the substrate W, pure water DIW is discharged onto the substrate W through the second nozzle 420 to remove chemicals remaining on the substrate W, and a drying fluid is supplied onto the substrate W through the third nozzle 430 to replace the rinsing liquid remaining on the substrate W with the drying fluid. In this case, the load drivers 366 and 440, the liquid discharge unit 400, and the lifting unit 360 receive power from the branch circuit breaker 706.

[0086] Next, when the operator opens the switchboard door 702a to inspect the substrate processing equipment 300, a power-off operation S30 occurs. Therefore, in the power-off operation S30, the door opening / closing detection unit 703 detects the open state of the switchboard door 702a and switches to the first contact to drive the shunt unit 705. The driven shunt unit 705 then switches the main circuit breaker 704 to the disconnected state, thereby cutting off the power supplied from the main circuit breaker 704 to the branch circuit breaker 706. Therefore, the busbar 702c of the switchboard 702 and the input and output terminals of the branch circuit breaker 706 and the electrical wiring of the load are not supplied with power. In other words, at the moment when the operator opens the switchboard door 702a, all power in the switchboard 702 is cut off. Therefore, the worker will not suffer from electric shock when working on the switchboard 702 and all the power systems below during the inspection. Furthermore, in the power-off operation S30, even when the main circuit breaker 704 is accidentally switched to the on state by another worker, the shunt unit 705 maintains the main circuit breaker 704 in the off state to prevent an electric shock accident.

[0087] Next, when the operator completes the inspection of the substrate processing apparatus 300, the power-on operation S40 is continued. Therefore, in the power-on operation S40, when the operator closes the distribution board door 702a, the door opening detection unit 703 switches to the second contact, the shunt unit 705 switches to the inactive state, and the blocking state of the main circuit breaker 704 is released by the shunt unit 705. After completing the inspection, the worker moves to the location where the distribution board 701 is located, and switches the joystick or the on / off switch of the main circuit breaker 704 installed on the distribution board 701 to the on state, and the main circuit breaker 704 re-supplies power to the branch circuit breaker 706.

[0088] Next, after the power-on operation S40 , the aforementioned power supply operation S10 and the process treatment operation S20 are performed again to process the substrate W. As shown in FIG.

[0089] As described above, the present invention has been described with reference to specific issues, such as specific components, limited exemplary embodiments and drawings, but these are only provided to help general understanding of the present invention, and the present invention is not limited to the aforementioned exemplary embodiments, and those skilled in the art will understand from the description that various changes and modifications can be made.

[0090] Therefore, the spirit of the present invention should not be limited to the described exemplary embodiments, and it can be said that not only the claims described later but also all modifications equivalent to the claims belong to the scope of the present invention.

Claims

1. A substrate processing device for processing a substrate, the substrate processing device include: a process handling module including a load used in a process of processing a substrate; a branch circuit breaker mounted on the periphery of the process module and electrically connected to the load; a main circuit breaker electrically connected to the branch circuit breakers and providing power to the branch circuit breakers; and a distribution panel in which the branch circuit breaker is installed and the distribution panel includes a distribution panel door, When the switchboard door is opened, the main circuit breaker cuts off the power.

2. The substrate processing apparatus according to claim 1, further comprising: include: a door opening / closing detection unit which is installed at the periphery of the switchboard door and switches to a first contact when the switchboard door is opened and switches to a second contact when the switchboard door is closed; as well as A shunt unit which is electrically connected to the door opening / closing detection unit and does not disconnect the main circuit breaker to allow the main circuit breaker to switch to an off state when the door opening / closing detection unit is at the first contact, and to allow the main circuit breaker to switch to an on state when the door opening / closing detection unit is at the second contact. 3 . The substrate processing apparatus according to claim 2 , wherein the door opening / closing detection unit is formed of at least one of a magnetic sensor, a relay switch, and an object detection sensor.

4. The substrate processing apparatus according to claim 2, wherein one end of an internal contact of the door opening / closing detection unit is electrically connected to an input terminal of the branch circuit breaker, and the other end of the internal contact is electrically connected to the shunt unit, The first contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is energized, and The second contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is disconnected. 5 . The substrate processing apparatus according to claim 2 , wherein the main circuit breaker comprises an internal relay for energizing or de-energizing an internal contact, and the internal relay is de-energized by the shunt unit. 6 . The substrate processing apparatus according to claim 5 , wherein when the main circuit breaker is switched to an open state by the shunt unit, the main circuit breaker maintains an open state until the door opening / closing detection unit is switched to the second contact point. 7 . The substrate processing apparatus according to claim 2 , wherein the current dividing unit comprises a relay or a switch element. 8 . The substrate processing apparatus according to claim 1 , wherein the switchboard door is pivotably or slidably installed in an opening area of ​​the switchboard.

9. The substrate processing apparatus according to claim 1, wherein the process treatment module comprises a plurality of processing chambers, the plurality of processing chambers being arranged adjacent to each other, The branch circuit breaker includes a plurality of branch circuit breakers, and The plurality of branch circuit breakers are electrically connected to the plurality of processing chambers, respectively, to supply power to or cut off power to each of the plurality of processing chambers.

10. The substrate processing apparatus according to claim 9, wherein the process treatment module further comprises a buffer unit and a transfer chamber disposed adjacent to each other, and Each of the plurality of branch circuit breakers is electrically connected to the buffer unit and the transfer chamber to supply or cut off power to each of the buffer unit and the transfer chamber.

11. The substrate processing apparatus according to claim 1, wherein the power distribution board is disposed adjacent to the process module, and The main circuit breaker is disposed spaced apart from the process module.

12. The substrate processing apparatus according to claim 11, wherein the power distribution board is disposed in an operation area together with the process processing module, and The main circuit breaker is arranged in the sub-operation area. 13 . The substrate processing apparatus according to claim 12 , wherein the sub-operation area and the operation area are disposed on different layers.

14. The substrate processing apparatus according to claim 1, wherein the main circuit breaker is formed of a residual current circuit breaker or a molded case circuit breaker, and The branch circuit breaker is composed of a leakage circuit breaker or a molded case circuit breaker. 15 . The substrate processing apparatus according to claim 1 , wherein the main circuit breaker is not provided in the power distribution board.

16. A method for driving a substrate processing device for processing a substrate, the method include: a power supply operation, wherein a door opening / closing detection unit detects a closed state of a switchboard door and switches to a second contact, and the second contact causes a shunt unit not to turn off the main circuit breaker so as to supply power from the main circuit breaker to a branch circuit breaker; a process handling operation, wherein each of the process handling modules receives power from the branch circuit breaker to process a substrate; and A power-off operation in which the door opening / closing detection unit detects an open state of the distribution board door and switches to a first contact, and the shunt unit turns off the main circuit breaker to cut off power supplied from the main circuit breaker to the branch circuit breaker.

17. The method according to claim 16, further comprising: include: A power-on operation in which the door opening / closing detection unit detects the closed state of the switchboard door and switches to the second contact point, and the shunt unit does not disconnect the main circuit breaker.

18. The method of claim 16, wherein the main circuit breaker is not disposed in the switchboard.

19. The method according to claim 16, wherein one end of an internal contact of the door opening / closing detection unit is electrically connected to an input terminal of the branch circuit breaker, and the other end of the internal contact is electrically connected to the shunt unit, The first contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is energized, and The second contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is disconnected.

20. A substrate processing device for processing a substrate, the substrate processing device include: a process handling module installed in the operation area and including a processing chamber, a buffer unit, and a transfer chamber having a load used in a process of processing a substrate; a branch circuit breaker installed in the operation area, formed of a residual current circuit breaker or a molded case circuit breaker, installed at the periphery of the process treatment module, and comprising a plurality of branch circuit breakers, each of the plurality of branch circuit breakers being electrically connected to each of the loads in the treatment chamber, the buffer unit, and the transfer chamber; a main circuit breaker installed in a sub-operating area formed on a different layer from the operating area, formed of a residual current circuit breaker or a molded case circuit breaker, including an internal relay for energizing or de-energizing an internal contact, electrically connected to the branch circuit breaker, and supplying power to the branch circuit breaker; a switchboard mounted within the operating area, mounted on the periphery of the process module, including the branch circuit breakers mounted thereon, and including a pivotable or slidable switchboard door; a door opening / closing detection unit installed in the operation area, formed of at least one of a magnetic sensor, a relay switch, and an object detection sensor, installed on the periphery of the switchboard door, and switched to a first contact when the switchboard door is opened and switched to a second contact when the switchboard door is closed; and a shunt unit installed in the sub-operation area, including a relay or a switch element, electrically connected to the door opening / closing detection unit, and not disconnecting the main circuit breaker to allow the main circuit breaker to switch to an off state when the door opening / closing detection unit is at the first contact, and to allow the main circuit breaker to switch to an on state when the door opening / closing detection unit is at the second contact, wherein one end of the internal contact of the door opening / closing detection unit is electrically connected to the input terminal of the branch circuit breaker, and the other end of the internal contact is electrically connected to the shunt unit, The first contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is energized, and The second contact is in a state where the electrical connection between the input terminal of the branch circuit breaker and the shunt unit is disconnected.

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