Filtering device and filtering method for purifying electronic grade hydrofluoric acid

Abstract

The present invention relates to the technical field of hydrofluoric acid filtration, and specifically to a filtering device for purifying electronic-grade hydrofluoric acid, comprising: an upper shell and a lower shell, wherein the upper shell and the lower shell are connected by a plurality of bolts; a filtering mechanism; The present invention also relates to a filtering method for purifying electronic-grade hydrofluoric acid, comprising the following steps: S1, adding hydrofluoric acid liquid into two filter boxes through two liquid inlet pipes, and then driving the motor to rotate clockwise, at which time the first one-way bearing drives the two cams to rotate, and at this time the two first plates slide back and forth, and filter the hydrofluoric acid liquid in the two filter boxes to accelerate the outflow of hydrofluoric acid. The present invention is provided with a filtering mechanism and an adjusting mechanism, which can adjust the distance between the side wall of the triangular plate and the inner wall of a plurality of triangular filter holes, and adjust the size of the filter port during the purification and filtration of hydrofluoric acid, and can adjust the size of the impurities in the hydrofluoric acid liquid accordingly, thereby improving the purification effect of hydrofluoric acid.

Description

Technical Field

[0001] The invention relates to the technical field of hydrofluoric acid filtration, and in particular to a filtration device and a filtration method for purifying electronic-grade hydrofluoric acid. Background Art

[0002] Hydrofluoric acid is an aqueous solution of hydrogen fluoride, a clear, colorless, fuming corrosive liquid with a strong pungent odor. Hydrofluoric acid is a weak acid with extremely strong corrosiveness. It can strongly corrode metals, glass and silicon-containing objects. When purifying hydrofluoric acid, a filtering device is required for filtering.

[0003] At present, the filtration of hydrofluoric acid is mainly to remove the calcium fluoride impurities in the liquid, and it is all filtered through the filter. However, in the actual filtration process, although a push plate is set to push out and clean the calcium fluoride impurities on the filter, during the filtration process, the hydrofluoric acid mainly flows down by gravity, which will cause some calcium fluoride impurities to be stuck in the filter mesh. At this time, when cleaning the calcium fluoride impurities, the calcium fluoride impurities in the filter mesh cannot be cleaned, affecting the subsequent filtration effect. In addition, the current filter apertures are all consistent. If the impurity particles are small, the smaller impurity particles cannot be effectively blocked, affecting the filtration and purification effect of hydrofluoric acid. Summary of the invention

[0004] The purpose of the present invention is to solve the problems existing in the prior art and to propose a filtering device and a filtering method for purifying electronic grade hydrofluoric acid.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A filtering device for purifying electronic grade hydrofluoric acid, comprising:

[0007] An upper shell and a lower shell, wherein the upper shell and the lower shell are connected by a plurality of bolts;

[0008] The filtering mechanism comprises a first annular groove provided in the upper shell body, the inner wall of the first annular groove is sealingly and slidably connected with four arc plates, the side wall of the arc plate is rotatably connected with the filter box through a first rod, the inner wall of the filter box is sealingly and slidably connected with the first plate, the side wall of the first plate away from the arc plate is elastically connected to the side wall of the filter box through a plurality of first springs, a plurality of triangular filter holes are provided on the inner wall of the filter box, the inner wall of the filter box close to the triangular filter holes is slidably connected with an arched plate through a plurality of sliding rods, the lower end of the arched plate is in an arch shape, a plurality of triangular plates corresponding to the plurality of triangular filter holes are fixedly connected to the upper end of the arched plate, the side wall of the arched plate is elastically connected to the side wall of the filter box through a plurality of second springs, and an adjusting mechanism for adjusting the height of the arched plate is provided in the upper shell body.

[0009] Preferably, the adjustment mechanism includes two grooves opened below the inner wall of the upper shell body, a first electric push rod is fixedly connected to the bottom of the groove, a moving block is fixedly connected to the movable end of the first electric push rod, a support column is rotatably connected to the side wall of the moving block, the side wall of the support column is fitted with the lower end of the arched plate close to it, the two grooves are respectively opposite to the two filter boxes with openings facing upwards, and two liquid inlet pipes are fixedly connected to the top of the upper shell body, and the two liquid inlet pipe openings are respectively opposite to the two filter boxes with openings facing upwards.

[0010] Preferably, two second electric push rods are fixedly connected to the bottom of the lower shell, the movable ends of the second electric push rods are fixedly connected to a collecting frame, and a drainage pipe is fixedly connected to the lower inner wall of the lower shell.

[0011] Preferably, the lower end of the inner wall of the upper shell is fixedly connected to a gear ring via two L-shaped rods, the side wall of the filter box away from the first rod is fixedly connected to a gear via a second rod, and the side wall of the gear is meshed with the side wall of the gear ring.

[0012] Preferably, it also includes a driving mechanism, which includes a first one-way bearing and a second one-way bearing. A third rod is rotatably connected to the top of the upper shell body, and the side wall of the third rod is fixedly connected to the inner wall of the first one-way bearing. The outer wall of the first one-way bearing is fixedly connected to two cams, and the side wall of the cam is in contact with the side wall of the first plate.

[0013] Preferably, the third rod side wall is fixedly connected to the inner wall of the second one-way bearing, the outer wall of the second one-way bearing is fixedly connected to four driving rods corresponding to four filter boxes one by one, and a second annular groove is provided on the side wall of the filter box close to the driving rod, and the side wall of the driving rod is in contact with the inner wall of the second annular groove close to it.

[0014] Preferably, the lower end of the cam is rotatably connected to a pressure column, and the pressure column is in contact with the upper surface of the arch plate.

[0015] Preferably, a strip cavity is provided in the arch plate, a cavity connected to the inner wall of the strip cavity is provided in the triangular plate, a jet port connected to the side wall of the triangular plate is provided in the inner wall of the cavity, a one-way valve that only allows gas to flow out of the cavity is installed in the jet port, the side wall of the first rod is connected to the inner wall of the cavity through a first tube, two second tubes corresponding to the two filter boxes with their openings facing downward are fixedly connected to the inner wall of the first annular groove, and the first tube cooperates with the corresponding second tube.

[0016] Preferably, the upper end of the upper shell is fixedly connected to a pump air frame, the inner wall of the pump air frame is sealingly and slidably connected to a second plate, the inner wall of the second plate is connected to the inner walls of the two second tubes through a one-way air outlet pipe, the inner wall of the second plate is fixedly connected to a one-way air intake pipe, the upper end of the upper shell is fixedly connected to a motor through a bracket, a U-shaped column is fixedly connected between the movable end of the motor and the upper end of the third rod, and the side wall of the U-shaped column is rotatably connected to the side wall of the second plate through a connecting plate.

[0017] A filtering method for purifying electronic grade hydrofluoric acid comprises the following steps:

[0018] S1, add hydrofluoric acid liquid into two filter boxes through two liquid inlet pipes, then drive the motor to rotate clockwise, at this time the first one-way bearing drives the two cams to rotate, at this time the two first plates slide back and forth, filter the hydrofluoric acid liquid in the two filter boxes, and accelerate the outflow of hydrofluoric acid;

[0019] S2. At the same time, the two cams rotate so that the two pressure columns intermittently squeeze the two arched plates located above. The two arched plates move up and down to speed up the outflow of impurities in the multiple triangular filter holes on the other two filter boxes.

[0020] S3. When there are a lot of impurities in the two filter boxes in step S1, first adjust the second electric push rod to retract, drive the two impurity collecting frames to move down to the lower shell, and then drive the motor to rotate counterclockwise. At this time, the second one-way bearing drives the four drive rods to rotate ninety degrees. Under the action of four gears and gear rings, the four filter boxes are driven to rotate half a circle. The two filter boxes in step S1 are rotated to be directly above the impurity collecting frames, and the two filter boxes in step S2 are rotated to be directly below the two liquid inlet pipes, and then the above steps are repeated.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] 1. A filtering mechanism and an adjusting mechanism are provided to adjust the distance between the side wall of the triangular plate and the inner wall of the plurality of triangular filter holes, and to adjust the size of the filter port during the purification and filtration of hydrofluoric acid. The adjustment can be made according to the size of impurities in the hydrofluoric acid liquid, thereby improving the purification effect of the hydrofluoric acid and avoiding the problem that the pore size of the filter screen is uniform in the prior art, and if the impurity particles are small, the smaller impurity particles cannot be effectively blocked.

[0023] 2. A pressure column is set. The two arched plates can move up and down under the extrusion of the two pressure columns and the action of multiple second springs, driving multiple triangular plates to move up and down in multiple triangular filter holes. At this time, the impurities in the triangular filter holes can be continuously pushed out, and the impurities in the triangular filter holes can be effectively cleaned, avoiding the current situation where the calcium fluoride impurities in the filter mesh cannot be cleaned when cleaning the calcium fluoride impurities, affecting the subsequent filtering effect.

[0024] 3. Jet ports are provided, and high-speed gas can be ejected from multiple jet ports to speed up the cleaning of impurities in multiple triangular filter holes. At the same time, under the action of airflow, impurities in the filter box can also be blown out for treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic structural diagram of a filtering device for purifying electronic-grade hydrofluoric acid proposed by the present invention;

[0026] Figure 2 for Figure 1 A schematic diagram of a top cross-sectional structure of the first annular groove;

[0027] Figure 3 for Figure 1 A schematic diagram of the structure in a vertical section;

[0028] Figure 4 for Figure 3 A schematic diagram of the structure enlargement at the center A;

[0029] Figure 5 for Figure 4 A schematic diagram of the structure enlarged at B in the middle;

[0030] Figure 6 for Figure 1 A rear view structural diagram of ;

[0031] Figure 7 for Figure 6 A vertical cross-sectional structural schematic diagram of ;

[0032] Figure 8 for Figure 7 A schematic diagram of the structure enlarged at C in the middle;

[0033] Fig. 9 It is a structural schematic diagram of the filtering mechanism in the present invention;

[0034] Fig.10 for Fig. 9 Schematic diagram of the structure viewed from above.

[0035] In the figure: 1, upper housing; 2, lower housing; 3, first annular groove; 4, arc plate; 5, first rod; 6, filter box; 7, first plate; 8, first spring; 9, triangular filter hole; 10, slide rod; 11, arched plate; 12, second spring; 13, triangular plate; 14, L-shaped rod; 15, gear ring; 16, second rod; 17, gear; 18, third rod; 19, first one-way bearing; 20, cam; 21, second one-way bearing; 22, drive rod; 23, The second annular groove; 24, the groove; 25, the first electric push rod; 26, the moving block; 27, the support column; 28, the pressure column; 29, the strip cavity; 30, the cavity; 31, the jet; 32, the first tube; 33, the second tube; 34, the pump air frame; 35, the second plate; 36, the one-way air outlet pipe; 37, the one-way air intake pipe; 38, the motor; 39, the U-shaped column; 40, the connecting plate; 41, the second electric push rod; 42, the collecting frame; 43, the liquid discharge pipe; 44, the liquid inlet pipe. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Reference Figure 1 - Fig.10 A filtering device for purifying electronic-grade hydrofluoric acid comprises an upper shell 1 and a lower shell 2, wherein the upper shell 1 and the lower shell 2 are connected by a plurality of bolts.

[0038] The filtering mechanism includes a first annular groove 3 provided in the upper shell 1, and the inner wall of the first annular groove 3 is sealed and slidably connected with four arc plates 4 (such as Figure 2 As shown in the figure, the side wall of the arc plate 4 is rotatably connected to the filter box 6 through the first rod 5, and the inner wall of the filter box 6 is sealed and slidably connected to the first plate 7. The side wall of the first plate 7 away from the arc plate 4 is elastically connected to the side wall of the filter box 6 through multiple first springs 8. The inner wall of the filter box 6 is provided with multiple triangular filter holes 9 (as shown in the figure). Figure 5 As shown, the inner wall of the filter box 6 near the triangular filter hole 9 is slidably connected to an arched plate 11 through a plurality of sliding rods 10. The lower end of the arched plate 11 is arched, and the upper end of the arched plate 11 is fixedly connected to a plurality of triangular plates 13 (as shown in FIG. 1 ) corresponding to the plurality of triangular filter holes 9 one by one. Figure 5 As shown in the figure, the side wall of the arch plate 11 is elastically connected to the side wall of the filter box 6 through a plurality of second springs 12, and an adjusting mechanism for adjusting the height of the arch plate 11 is provided in the upper shell body 1.

[0039] It should be noted that, during the movement of the first plate 7 toward the arc-shaped plate 4, the farthest moving distance of the first plate 7 is close to the triangular filter hole 9 close to it (eg Figure 4 and Figure 5 As shown), the hydrofluoric acid liquid will not be squeezed from above.

[0040] like Fig. 9 and Fig.10 As shown, the openings of two of the filter boxes 6 face upward, so that the hydrofluoric acid can be purified and filtered, and the openings of the other two filter boxes 6 face downward, so that the impurities after filtration can be removed. In this way, the opening positions of the four filter boxes 6 can be replaced later to continuously purify and filter the hydrofluoric acid.

[0041] The adjustment mechanism includes two grooves 24 (such as Figure 3 As shown in the figure, a first electric push rod 25 is fixedly connected to the bottom of the groove 24, a moving block 26 is fixedly connected to the movable end of the first electric push rod 25, a support column 27 is rotatably connected to the side wall of the moving block 26, and the side wall of the support column 27 fits the lower end of the arch plate 11 close to it, the two grooves 24 are respectively opposite to the two filter boxes 6 with the openings facing upward, and two liquid inlet pipes 44 are fixedly connected to the top of the upper shell body 1, and the pipe openings of the two liquid inlet pipes 44 are respectively opposite to the two filter boxes 6 with the openings facing upward.

[0042] like Figure 3 - Figure 5 As shown, by adjusting the telescopic degree of the first electric push rod 25, the height of the moving block 26 and the support column 27 can be adjusted. Then, the arch plate 11 located below can limit the position of the arch plate 11 under the squeezing of the support column 27 and the elastic force of the multiple second springs 12, and then the position of the multiple triangular plates 13 in the multiple triangular filter holes 9 can be limited, and the distance between the side wall of the triangular plate 13 and the inner wall of the multiple triangular filter holes 9 can be adjusted. The size of the filter port during the purification and filtration of hydrofluoric acid can be adjusted according to the size of impurities in the hydrofluoric acid liquid, thereby improving the purification effect of hydrofluoric acid and avoiding the problem that the filter mesh aperture is consistent in the prior art, and if the impurity particles are small, the smaller impurity particles cannot be effectively blocked.

[0043] Two second electric push rods 41 are fixedly connected to the bottom of the lower shell 2 , and a collecting frame 42 is fixedly connected to the movable end of the second electric push rod 41 . A drainage pipe 43 is fixedly connected to the lower inner wall of the lower shell 2 .

[0044] like Figure 3 and Figure 7 As shown, the two impurity collecting frames 42 are directly opposite to the two filter boxes 6 with their openings facing downwards, and can collect impurities flowing out of the filter boxes 6 at that location.

[0045] like Figure 3 and Figure 4As shown, the lower end of the inner wall of the upper shell 1 is fixedly connected to a gear ring 15 through two L-shaped rods 14, and the side wall of the filter box 6 away from the first rod 5 is fixedly connected to a gear 17 through a second rod 16. The side wall of the gear 17 is meshed with the side wall of the gear ring 15, so that when the four filter boxes 6 rotate ninety degrees along the first annular groove 3 under the action of the four arc plates 4, at this time, under the action of the gear ring 15, the gear 17 will drive the filter box 6 to rotate half a circle through the second rod 16.

[0046] The drive mechanism includes a first one-way bearing 19 and a second one-way bearing 21. The top of the upper shell 1 is rotatably connected to a third rod 18, and the side wall of the third rod 18 is fixedly connected to the inner side wall of the first one-way bearing 19 (such as Figure 3 As shown), the outer side wall of the first one-way bearing 19 is fixedly connected to two cams 20, and the side wall of the cam 20 is in contact with the side wall of the first plate 7.

[0047] The side wall of the third rod 18 is fixedly connected to the inner side wall of the second one-way bearing 21 (such as Figure 4 As shown), the outer side wall of the second one-way bearing 21 is fixedly connected to four driving rods 22 corresponding to the four filter boxes 6, and the side wall of the filter box 6 close to the driving rod 22 is provided with a second annular groove 23, and the side wall of the driving rod 22 is in contact with the inner side wall of the second annular groove 23 close to it.

[0048] like Figure 3 and Figure 4 As shown, when the third rod 18 rotates clockwise, the inner ring of the first one-way bearing 19 drives the outer ring to rotate, and the inner ring of the second one-way bearing 21 does not drive its outer ring to rotate; when the third rod 18 rotates counterclockwise, the inner ring of the first one-way bearing 19 does not drive the outer ring to rotate, and the inner ring of the second one-way bearing 21 drives its outer ring to rotate.

[0049] The lower end of the cam 20 is rotatably connected to a pressure column 28 (such as Figure 8 As shown), the pressure column 28 is fitted with the upper surface of the arch plate 11, as shown Figure 4 , Figure 5 and Figure 8 As shown, during the rotation of the two cams 20, the two pressure columns 28 can intermittently squeeze the two arched plates 11 located above. At this time, the two arched plates 11 can move up and down under the squeezing of the two pressure columns 28 and the action of the multiple second springs 12, driving the multiple triangular plates 13 to move up and down in the multiple triangular filter holes 9. At this time, the impurities in the triangular filter holes 9 can be continuously pushed out, and the impurities in the triangular filter holes 9 can be effectively cleaned, avoiding the current situation where the calcium fluoride impurities in the filter mesh cannot be cleaned when cleaning the calcium fluoride impurities, affecting the subsequent filtering effect.

[0050] The arch plate 11 is provided with a strip-shaped cavity 29 (such as Figure 5As shown in the figure, a cavity 30 connected to the inner wall of the strip cavity 29 is provided in the triangular plate 13, and an air jet 31 connected to the side wall of the triangular plate 13 is provided in the inner wall of the cavity 30. A one-way valve that only allows gas to flow out of the cavity 30 is installed in the air jet 31. The side wall of the first rod 5 is connected to the inner wall of the cavity 30 through a first tube 32. Two second tubes 33 corresponding to the two filter boxes 6 with their openings facing downward are fixedly connected to the inner wall of the first annular groove 3. The first tube 32 cooperates with the corresponding second tube 33 (as shown in the figure). Figure 8 as shown).

[0051] A pump air frame 34 is fixedly connected to the upper end of the upper shell 1, and a second plate 35 is sealingly and slidably connected to the inner wall of the pump air frame 34. The inner wall of the second plate 35 is connected to the inner walls of the two second tubes 33 through a one-way air outlet pipe 36. The inner wall of the second plate 35 is fixedly connected to a one-way air intake pipe 37. A motor 38 is fixedly connected to the upper end of the upper shell 1 through a bracket, and a U-shaped column 39 is fixedly connected between the movable end of the motor 38 and the upper end of the third rod 18. The side wall of the U-shaped column 39 is rotatably connected to the side wall of the second plate 35 through a connecting plate 40.

[0052] The rotation of the motor 38 drives the U-shaped column 39 to rotate, and the U-shaped column 39 drives the second plate 35 to slide back and forth on the inner wall of the air pump frame 34 under the action of the connecting plate 40. At this time, the air pump frame 34 can continuously pump air into the two second tubes 33 through the one-way air intake pipe 37 and the one-way air outlet pipe 36, and then the gas is ejected from the multiple air jets 31 through the first tube 32, the strip cavity 29 and the multiple cavities 30, thereby accelerating the cleaning of impurities in the multiple triangular filter holes 9. At the same time, under the action of the airflow, the impurities in the filter box 6 at this location can also be blown out.

[0053] A filtering method for purifying electronic grade hydrofluoric acid comprises the following steps:

[0054] S1, add hydrofluoric acid liquid into two filter boxes 6 through two liquid inlet pipes 44, then drive the motor 38 to rotate clockwise, at this time the first one-way bearing 19 drives the two cams 20 to rotate, at this time the two first plates 7 slide back and forth, filter the hydrofluoric acid liquid in the two filter boxes 6, and accelerate the outflow of hydrofluoric acid;

[0055] S2, the two cams 20 rotate at the same time so that the two pressure columns 28 intermittently squeeze the two arched plates 11 located above, and the two arched plates 11 move up and down to speed up the outflow of impurities in the multiple triangular filter holes 9 on the other two filter boxes 6;

[0056] S3. When there are many impurities in the two filter boxes 6 in step S1, first adjust the second electric push rod 41 to contract, drive the two impurity collecting frames 42 to move down to the lower shell 2, and then drive the motor 38 to rotate counterclockwise. At this time, the second one-way bearing 21 drives the four drive rods 22 to rotate ninety degrees. Under the action of the four gears 17 and the gear ring 15, the four filter boxes 6 are driven to rotate half a circle, and the two filter boxes 6 in step S1 are rotated to be directly above the impurity collecting frame 42, and the two filter boxes 6 in step S2 are rotated to be directly below the two liquid inlet pipes 44, and then the above steps are repeated.

[0057] When purifying and filtering hydrofluoric acid, the hydrofluoric acid liquid is added into two filter boxes 6 which are far away from each other and whose openings face upward through two liquid inlet pipes 44, and then the motor 38 is driven to rotate clockwise, and then the third rod 18 is driven to rotate clockwise through the U-shaped column 39. At this time, the inner ring of the first one-way bearing 19 drives its outer ring to rotate, and drives the two cams 20 to rotate, so that the two cams 20 intermittently squeeze the two first plates 7, so that the two first plates 7 slide inside the two filter boxes 6 respectively under the squeezing of the cams 20 and the elastic force of the multiple first springs 8, and the hydrofluoric acid liquid entering the filter box 6 is pressed and filtered to accelerate the filtering effect, and the filtered hydrofluoric acid enters the lower shell 2 and flows out through the drain pipe 43;

[0058] During the rotation of the two cams 20, the two pressure columns 28 are driven to intermittently squeeze the two upper arched plates 11, which correspond to the two filter boxes 6 with openings facing downward. At this time, the two arched plates 11 can move up and down under the squeezing of the two pressure columns 28 and the action of the multiple second springs 12, driving the multiple triangular plates 13 to move up and down in the multiple triangular filter holes 9. At this time, the impurities in the triangular filter holes 9 can be continuously pushed out, and the impurities in the triangular filter holes 9 can be effectively cleaned, and the cleaned impurities will fall into the two collecting frames 42;

[0059] The motor 38 rotates to drive the U-shaped column 39 to rotate. The U-shaped column 39 drives the second plate 35 to slide back and forth on the inner wall of the pump frame 34 under the action of the connecting plate 40. At this time, the pump frame 34 can continuously pump air into the two second tubes 33 through the one-way air intake pipe 37 and the one-way air outlet pipe 36. Then the gas is ejected from the multiple air jets 31 through the first tube 32, the strip cavity 29 and the multiple cavities 30, so as to speed up the cleaning of impurities in the multiple triangular filter holes 9. At the same time, under the action of the airflow, the impurities in the filter box 6 at this location can also be blown out for processing;

[0060] When more impurities accumulate in the two filter boxes 6 with their openings facing upward, stop adding hydrofluoric acid into the liquid inlet pipe 44. At this time, adjust the two second electric push rods 41 to contract, drive the two impurity collecting frames 42 to move down into the lower shell 2, and then drive the motor 38 to rotate counterclockwise. At this time, the second one-way bearing 21 drives the four drive rods 22 to rotate ninety degrees, and drives the four filter boxes 6 to rotate ninety degrees. At this time, under the action of the four gears 17 and the gear ring 15, the four filter boxes 6 are driven to rotate half a circle, so that the openings of the two filter boxes 6 with impurities face downward to the two impurity collecting frames 42, and the openings of the two cleaned filter boxes 6 face upward to the two liquid inlet pipes 44. Then adjust the two second electric push rods 41 to extend, so that the two impurity collecting frames 42 are close to the downward openings of the two filter boxes 6, and then repeat the above steps.

[0061] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A filtering device for purifying electronic grade hydrofluoric acid, characterized in that: include: An upper shell (1) and a lower shell (2), wherein the upper shell (1) and the lower shell (2) are connected via a plurality of bolts; The filtering mechanism comprises a first annular groove (3) provided in an upper shell (1), the inner wall of the first annular groove (3) being sealingly and slidably connected to four arc-shaped plates (4), the side wall of the arc-shaped plate (4) being rotatably connected to a filter box (6) via a first rod (5), the inner side wall of the filter box (6) being sealingly and slidably connected to a first plate (7), the side wall of the first plate (7) away from the arc-shaped plate (4) being elastically connected to the side wall of the filter box (6) via a plurality of first springs (8), the inner side wall of the filter box (6) being provided with a plurality of triangular filter holes (9), the inner side wall of the filter box (6) close to the triangular filter holes (9) is slidably connected to an arch plate (11) via a plurality of sliding rods (10), the lower end of the arch plate (11) is arched, the upper end of the arch plate (11) is fixedly connected to a plurality of triangular plates (13) corresponding to the plurality of triangular filter holes (9) one by one, the side wall of the arch plate (11) is elastically connected to the side wall of the filter box (6) via a plurality of second springs (12), and an adjusting mechanism for adjusting the height of the arch plate (11) is provided in the upper shell (1); The lower end of the inner wall of the upper shell (1) is fixedly connected to a gear ring (15) via two L-shaped rods (14); the side wall of the filter box (6) away from the first rod (5) is fixedly connected to a gear (17) via a second rod (16); the side wall of the gear (17) is meshed with the side wall of the gear ring (15); The invention also comprises a driving mechanism, the driving mechanism comprising a first one-way bearing (19) and a second one-way bearing (21); a third rod (18) is rotatably connected to the top of the upper shell (1); a side wall of the third rod (18) is fixedly connected to the inner side wall of the first one-way bearing (19); two cams (20) are fixedly connected to the outer side wall of the first one-way bearing (19); and a side wall of the cam (20) is in contact with a side wall of the first plate (7).

2. A filtering device for purifying electronic grade hydrofluoric acid according to claim 1, characterized in that: The adjustment mechanism comprises two grooves (24) formed below the inner wall of the upper shell (1); a first electric push rod (25) is fixedly connected to the bottom of the groove (24); a movable end of the first electric push rod (25) is fixedly connected to a moving block (26); a side wall of the moving block (26) is rotatably connected to a support column (27); a side wall of the support column (27) is fitted with a lower end of an arched plate (11) adjacent thereto; the two grooves (24) are respectively opposite to two filter boxes (6) with openings facing upwards; two liquid inlet pipes (44) are fixedly connected to the top of the upper shell (1); and the two liquid inlet pipes (44) have their pipe openings respectively opposite to the two filter boxes (6) with openings facing upwards.

3. A filtering device for purifying electronic grade hydrofluoric acid according to claim 2, characterized in that: Two second electric push rods (41) are fixedly connected to the bottom of the lower housing (2); movable ends of the second electric push rods (41) are fixedly connected to a collecting frame (42); and a drainage pipe (43) is fixedly connected to the lower portion of the inner wall of the lower housing (2).

4. The filtering device for purifying electronic grade hydrofluoric acid according to claim 1, characterized in that: The side wall of the third rod (18) is fixedly connected to the inner side wall of the second one-way bearing (21); the outer side wall of the second one-way bearing (21) is fixedly connected to four driving rods (22) corresponding to the four filter boxes (6); a second annular groove (23) is formed on the side wall of the filter box (6) close to the driving rod (22); the side wall of the driving rod (22) is in contact with the inner side wall of the second annular groove (23) close to it.

5. The filtering device for purifying electronic grade hydrofluoric acid according to claim 1, characterized in that: The lower end of the cam (20) is rotatably connected to a pressure column (28), and the pressure column (28) is in contact with the upper surface of the arch plate (11).

6. The filtering device for purifying electronic grade hydrofluoric acid according to claim 3, characterized in that: The arch plate (11) is provided with a strip cavity (29), the triangular plate (13) is provided with a cavity (30) connected to the inner wall of the strip cavity (29), the inner wall of the cavity (30) is provided with an air jet (31) connected to the side wall of the triangular plate (13), a one-way valve for only allowing gas to flow out of the cavity (30) is installed in the air jet (31), the side wall of the first rod (5) is connected to the inner wall of the cavity (30) through a first tube (32), the inner wall of the first annular groove (3) is fixedly connected with two second tubes (33) corresponding to the two filter boxes (6) with openings facing downwards, and the first tube (32) cooperates with the corresponding second tube (33).

7. A filtering device for purifying electronic grade hydrofluoric acid according to claim 6, characterized in that: The upper end of the upper shell (1) is fixedly connected to a pump frame (34), the inner wall of the pump frame (34) is sealingly and slidably connected to a second plate (35), the inner wall of the second plate (35) is connected to the inner walls of the two second tubes (33) via a one-way air outlet pipe (36), the inner wall of the second plate (35) is fixedly connected to a one-way air intake pipe (37), the upper end of the upper shell (1) is fixedly connected to a motor (38) via a bracket, a U-shaped column (39) is fixedly connected between the movable end of the motor (38) and the upper end of the third rod (18), and the side wall of the U-shaped column (39) is rotatably connected to the side wall of the second plate (35) via a connecting plate (40).

8. A filtering method for purifying electronic-grade hydrofluoric acid, comprising a filtering device for purifying electronic-grade hydrofluoric acid as claimed in any one of claims 1 to 7, characterized in that: The following steps are also included: S1, adding hydrofluoric acid liquid into two filter boxes (6) through two liquid inlet pipes (44), then driving the motor (38) to rotate clockwise, at which time the first one-way bearing (19) drives the two cams (20) to rotate, and at this time the two first plates (7) slide back and forth to filter the hydrofluoric acid liquid in the two filter boxes (6) to accelerate the outflow of hydrofluoric acid; S2, the two cams (20) rotate at the same time so that the two pressure columns (28) intermittently squeeze the two arched plates (11) located above, and the two arched plates (11) move up and down, accelerating the outflow of impurities in the multiple triangular filter holes (9) on the other two filter boxes (6); S3. When impurities in the two filter boxes (6) in step S1 need to be cleaned, first adjust the second electric push rod (41) to retract, drive the two impurity collecting frames (42) to move down into the lower housing (2), and then drive the motor (38) to rotate counterclockwise. At this time, the second one-way bearing (21) drives the four drive rods (22) to rotate ninety degrees. Under the action of the four gears (17) and the gear ring (15), the four filter boxes (6) are driven to rotate half a circle, and the two filter boxes (6) in step S1 are rotated to be located directly above the impurity collecting frames (42), and the two filter boxes (6) in step S2 are rotated to be located directly below the two liquid inlet pipes (44), and then the above steps are repeated.

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