A cryogenic pump heat purge device for improving air flow stability and thermal uniformity

Abstract

The present invention belongs to the technical field of low-temperature pump heat purge, and specifically relates to a low-temperature pump heat purge device for improving the stability and thermal uniformity of the blowing airflow. It comprises a fan, and a connecting sleeve, a pipeline, and a guide mechanism are sequentially arranged along the air outlet of the fan, and the guide mechanism is connected to the wind receiving mechanism through a fixed sleeve. The pipeline comprises pipeline No. 1, pipeline No. 2 and pipeline No. 3, wherein electric heating devices are arranged inside pipeline No. 1 and pipeline No. 3 to heat the blowing air; a mixing mechanism and a transmission assembly are arranged inside pipeline No. 2, and under the guidance of the transmission assembly, the mixing mechanism mixes the hot air through a continuous rotation motion mode, and cooperates with the guide mechanism to improve the heating uniformity of the blowing airflow.

Description

Technical Field

[0001] The present invention belongs to the technical field of cryopump heat purge, and in particular relates to a cryopump heat purge device for improving the stability and thermal uniformity of blowing air flow. Background Art

[0002] Hot air blower is the first choice for upgrading the heat source of modern industry. It is the best hot air source configuration for automatic machinery such as hot air conveying furnace, drying furnace, oven, packaging machine, etc. The hot air blower consists of three parts: blower, heater, and control circuit, which can realize the regulation of working temperature and air volume. When used in low temperature pumps, it can remove water vapor, impurities and frozen materials in the pump by heating gas and introducing it into the pump body, ensuring the normal operation of the pump and extending its service life.

[0003] Patent CN103291584A discloses a cryopump, a cryopump regeneration method, and a cryopump control device, which are equipped with a small number of temperature sensors configured in a manner that helps shorten the heating time. The cryopump is equipped with a two-stage cooling stage, a cooling stage temperature sensor, and a control unit, which can stop the operation of the refrigerator and stop supplying purge gas when the temperature reaches the target temperature according to the stage temperature sensor, or the control unit continues the heating process when the temperature does not reach the target temperature.

[0004] In the above scheme, the purge valve is connected to the purge gas supply device, and the purge gas is nitrogen; the supply of the purge gas to the cryopump is controlled by the opening and closing of the purge valve. However, in this process, if the airflow of the hot purge device is unstable or the temperature of the airflow is uneven, the purge effect will be affected.

[0005] In view of the problem that the existing hot purge device has poor regulation degree for the stability of the blowing airflow and the uniformity of the airflow temperature, it is necessary to propose a new structure to solve this technical problem. Summary of the invention

[0006] The object of the present invention is to provide a low temperature pump heat purge device, aiming to solve the technical problems of unstable airflow or uneven airflow temperature generated by the heat purge device in the prior art.

[0007] The technical solution adopted by the present invention is:

[0008] A low temperature pump heat purge device for improving the stability and thermal uniformity of blowing air flow, comprising a fan, wherein the air outlet of the fan is connected to a wind receiving mechanism through a connecting sleeve, a pipeline and a guide mechanism in sequence, wherein the pipeline comprises a No. 2 pipeline, wherein a mixing mechanism and a transmission component are arranged inside the No. 2 pipeline;

[0009] The mixing mechanism comprises a rotating shaft and a connecting sleeve arranged along the axial direction of the No. 2 pipeline, wherein the connecting sleeve is slidably arranged outside the rotating shaft and rotates with the rotating shaft; the transmission assembly comprises a gear ring and a transmission block, wherein the outer diameter surface of the gear ring is fixed to the inner wall surface of the No. 2 pipeline, and the transmission block is fixedly connected to the sliding sleeve and rotates with the connecting sleeve;

[0010] A spring is arranged at one end of the connecting sleeve, and the transmission block matches the tooth groove of the gear ring; when the rotating shaft rotates, the transmission block moves in a circle along the gear ring and fluctuates and meshes between the tooth groove and the tooth top of the gear ring.

[0011] Preferably, the rotating shaft is connected to motor No. 1 and rotates under the action of motor No. 1; motor No. 1 is a servo motor.

[0012] Preferably, a control system is also arranged inside the No. 2 pipeline, including a laser dust monitor for detecting dust concentration, a wind speed monitor for detecting airflow intensity, a control center and an electric telescopic sleeve. The electric telescopic sleeve is electrically connected to the control center, and the telescopic end of the electric telescopic sleeve is connected to a spring. The electric telescopic sleeve receives adjustment information from the control center to push the spring and the sliding sleeve to produce secondary telescopic expansion.

[0013] Preferably, the filter screen is arranged on the sliding sleeve in a spiral shape, and a guide plate is further provided on the sliding sleeve, and the guide plate is arranged on the sliding sleeve at a position avoiding the filter screen.

[0014] Preferably, the control center is also connected to the No. 1 motor, a vibration monitor is provided on the filter, and the vibration monitor is connected to the control center.

[0015] Preferably, the pipeline also includes a No. 1 pipeline arranged between the connecting sleeve and the No. 2 pipeline, and a No. 3 pipeline arranged between the No. 2 pipeline and the guide mechanism, and electric heating devices are arranged inside the No. 1 pipeline and the No. 3 pipeline.

[0016] Preferably, the air outlet end of the connecting sleeve is connected to several independent No. 1 pipes at the same time, the other end of the No. 1 pipe is commonly connected to the inlet of the No. 2 pipe, the outlet of the No. 2 pipe is simultaneously connected to several independent No. 3 pipes, and the other end of the No. 3 pipe is commonly connected to a guide mechanism to deliver the blowing airflow from the fan to the wind receiving mechanism.

[0017] Preferably, the electric heating device comprises an electric heating rod arranged along the axial direction of the No. 1 pipeline and the No. 3 pipeline, and a plurality of heat-conducting rods are connected to the electric heating rod, and the heat-conducting rods extend into the internal space of the No. 1 pipeline and the No. 3 pipeline.

[0018] Preferably, the guide mechanism includes a shell, one side of the shell is connected to the air outlet end of the No. 3 pipe, and the other side is provided with an air outlet and connected to a fixed sleeve, and the hot air from the No. 3 pipe passes through the shell and is transported to the wind receiving mechanism through the fixed sleeve.

[0019] Preferably, a flow balancing plate is provided inside the shell, and a plurality of through holes are arranged on the flow balancing plate; the flow balancing plate is also connected to a No. 2 motor, and the No. 2 motor drives the flow balancing plate to rotate, thereby improving the mixing uniformity of the hot air.

[0020] Preferably, a conical guide sleeve is provided corresponding to the air outlet side of the through hole, a central air hole is provided at the top of the guide sleeve, and lateral air holes are provided on the side wall of the guide sleeve.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. When the external wind enters the No. 1 pipe from the connecting sleeve, the air holes are divided into several streams and enter each No. 1 pipe respectively. At this time, the electric heating rods and heat conducting rods in the No. 1 pipe are energized and generate heat, and the airflow is heated by all the electric heating rods and all the heat conducting rods. By diverting the airflow, the heating effect of the external wind is improved.

[0023] 2. All airflows in the No. 1 pipeline converge in the No. 2 pipeline, and a mixing mechanism is provided in the No. 2 pipeline. The mixing mechanism can mix the hot air passing through the No. 2 pipeline by a continuous rotation motion, thereby improving the uniformity of heating by the external wind force; specifically, start the No. 1 motor, the output shaft of the No. 1 motor is fixedly connected to the rotating shaft, so the No. 1 motor drives the rotating shaft to rotate continuously, and the rotating shaft drives the sliding sleeve with which it is slidably connected to rotate synchronously, and the sliding sleeve is spirally provided with a filter screen, and the sliding sleeve drives the filter screen to mix and heat the hot air, and the filter screen can filter impurities in the air; when the sliding sleeve rotates, the sliding sleeve drives the guide plate to rotate at the same time, and the hot air is guided by the guide plate. When the guide plate rotates with the sliding sleeve, the guide plate evenly disperses the hot air in the No. 3 pipeline at different positions.

[0024] 3. A control system is set up in the No. 2 pipeline. By detecting the impurity concentration and airflow size in the airflow, the spring is adaptively adjusted to perform secondary expansion and contraction, thereby adjusting the filtering quality of the filter and the mixing ability of the filter and the guide plate for hot air.

[0025] 4. The airflow in the No. 2 pipeline is divided into several streams and enters all the No. 3 pipelines respectively. The electric heating rods and heat-conducting rods in the No. 3 pipeline generate heat after being energized, and the airflow is heated through all the electric heating rods and all the heat-conducting rods.

[0026] 5. The airflow in the No. 3 pipeline converges and enters the outer shell of the guide mechanism, and the guide mechanism can control the wind speed and wind direction of the hot air; when the hot air enters the outer shell, the hot air is evenly distributed through the flow equalizer and all the guide sleeves.

[0027] 6. Start the No. 2 motor, which drives the equalizing plate to rotate, thereby increasing the equalizing effect on the hot air; adjusting the speed of the No. 2 motor can adjust the equalizing effect of the hot air; the central air hole on the guide sleeve can allow the heat flow to pass forward, and at the same time, the lateral air holes on the guide sleeve allow the air flow to flow to the side, so that the air flow is evenly distributed in the direction parallel to the equalizing plate, thereby improving the mixing uniformity of the air flow. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0029] Figure 2 It is a cross-sectional schematic diagram of the No. 2 pipeline and the shell in the present invention.

[0030] Figure 3 Schematic diagram of the internal structure of pipeline No. 2 in the present invention.

[0031] Figure 4 It is a structural schematic diagram of the transmission component in the present invention.

[0032] Figure 5 It is a schematic diagram of the internal structure of the shell in the present invention.

[0033] Figure 6 It is a schematic diagram of the connection structure between the No. 2 motor and the current equalizing plate in the present invention.

[0034] Figure 7 It is a schematic diagram of the cross-sectional structure of pipeline No. 1 in the present invention.

[0035] In the attached figure: 1. fan; 2. pipeline No. 1; 3. pipeline No. 2; 4. pipeline No. 3; 5. casing; 6. mixing mechanism; 61. motor No. 1; 62. rotating shaft; 63. sliding sleeve; 64. filter; 65. spring; 66. electric telescopic sleeve; 7. guide plate; 8. transmission assembly; 81. gear ring; 82. transmission block; 9. guide mechanism; 91. motor No. 2; 92. flow equalizing plate; 93. guide sleeve; 10. connecting sleeve; 11. electric heating rod; 12. heat conducting rod; 13. fixing sleeve; 14. central air hole; 15. lateral air hole. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0037] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0040] In the present invention, the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0041] The specific implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0042] like Figure 1-Figure 7As shown, a low temperature pump heat purge device provided by the present invention comprises a fan 1, the fan 1 is fixedly connected with a connecting sleeve 10, the connecting sleeve 10 is connected with a plurality of No. 1 pipelines 2, all No. 1 pipelines 2 are commonly connected with a No. 2 pipeline 3, the No. 2 pipeline 3 is connected with all No. 1 pipelines 2, the other end of the No. 2 pipeline 3 away from the No. 1 pipeline 2 is connected with a plurality of No. 3 pipelines 4, the No. 3 pipelines 4 are commonly connected with a shell 5, and the shell 5 is connected with a fixed sleeve 13;

[0043] The second pipe 3 is provided with a mixing mechanism 6, and the mixing mechanism 6 can mix the hot air passing through the second pipe 3 by a continuous rotation motion. The second pipe 3 is provided with a transmission component 8, and the transmission component 8 can drive the mixing mechanism 6 to continuously oscillate;

[0044] The housing 5 is provided with a guide mechanism 9, and the guide mechanism 9 can control the wind speed and wind direction of the hot air;

[0045] The No. 1 pipeline 2 and the No. 3 pipeline 4 are both fixedly provided with electric heating rods 11, and the electric heating rods 11 are fixedly connected with heat conducting rods 12. Specifically, the electric heating rods 11 are arranged along the axial direction of the No. 1 pipeline 2 and the No. 3 pipeline 4, one end of the heat conducting rod 12 is fixed on the electric heating rod 11, and the other end extends to the inner space of the No. 1 pipeline 2 and the No. 3 pipeline 4, so as to contact with the air as much as possible to improve the heating effect.

[0046] In this embodiment, the fixing sleeve 13 is connected to the wind receiving mechanism by bolts, and then the fan 1 is started, and the airflow in the fan 1 passes through the connecting sleeve 10, the No. 1 pipe 2, the No. 2 pipe 3, the No. 3 pipe 4, the housing 5 and the fixing sleeve 13 in sequence and then enters the wind receiving mechanism;

[0047] In this process, when the external wind enters the No. 1 pipe 2 from the connecting sleeve 10, the air holes are divided into several streams and enter each No. 1 pipe 2 respectively. At this time, the electric heating rod 11 and the heat conducting rod 12 in the No. 1 pipe 2 are energized to generate heat, and the airflow is heated by all the electric heating rods 11 and all the heat conducting rods 12. By dividing the airflow, the heating effect of the external wind is improved;

[0048] Afterwards, all the airflows in the No. 1 pipe 2 converge in the No. 2 pipe 3, in which a mixing mechanism 6 is provided, and the mixing mechanism 6 can mix the hot air passing through the No. 2 pipe 3 by a continuous rotation motion, thereby improving the uniformity of the heating of the external wind force;

[0049] The airflow in the No. 2 pipeline 3 is divided into several streams and enters all the No. 3 pipelines 4 respectively. The electric heating rods 11 and the heat conducting rods 12 in the No. 3 pipeline 4 are energized and generate heat, and the airflow is heated by all the electric heating rods 11 and all the heat conducting rods 12;

[0050] The airflow in the third pipe 4 converges and enters the housing 5, and the housing 5 is provided with a guide mechanism 9, which can control the wind speed and wind direction of the hot air;

[0051] Finally, the external wind force enters the wind receiving mechanism through the fixing sleeve 13 .

[0052] In this embodiment, all No. 1 pipelines 2 and all No. 3 pipelines 4 are arranged in a ring shape with the central axis of No. 2 pipeline 3 as the center.

[0053] like Figure 2-4 As shown, a low temperature pump heat purge device for improving the stability and thermal uniformity of the blowing airflow provided by the present invention, the mixing mechanism 6 includes a first motor 61, a rotating shaft 62, a sliding sleeve 63, a filter 64 and a spring 65;

[0054] The inner end surface of the No. 2 pipeline 3 is fixedly connected to a No. 1 motor 61 , the output shaft of the No. 1 motor 61 is fixedly connected to a rotating shaft 62 , the rotating shaft 62 is slidably connected to a sliding sleeve 63 along the length direction, and a filter screen 64 is spirally arranged on the sliding sleeve 63 .

[0055] In this embodiment, the No. 1 motor 61 is started, and the output shaft of the No. 1 motor 61 is fixedly connected to the rotating shaft 62, so the No. 1 motor 61 drives the rotating shaft 62 to rotate continuously, and the rotating shaft 62 drives the sliding sleeve 63 slidably connected thereto to rotate synchronously, and the sliding sleeve 63 is spirally provided with a filter 64, and the sliding sleeve 63 drives the filter 64 to mix and heat the hot air, and the filter 64 can filter impurities in the air.

[0056] The sliding sleeve 63 is fixedly connected with a guide plate 7, and the guide plate 7 is spirally arranged around the sliding sleeve 63. In this embodiment, when the sliding sleeve 63 rotates, the sliding sleeve 63 drives the guide plate 7 to rotate at the same time, and the hot air is guided by the guide plate 7. When the guide plate 7 rotates with the sliding sleeve 63, the guide plate 7 evenly disperses the hot air in the No. 3 pipe 4 at different positions.

[0057] like Figure 4As shown, a low-temperature pump heat purge device for improving the stability and thermal uniformity of the blowing airflow provided by the present invention is provided. A spring 65 is provided between one end of the sliding sleeve 63 and the inner end surface of the No. 2 pipeline 3, and the other end of the sliding sleeve 63 is connected to the transmission assembly 8. The transmission assembly 8 includes a gear ring 81 and a transmission block 82. The gear ring 81 is fixedly connected to the inner wall of the No. 2 pipeline 3, and the outer wall of the sliding sleeve 63 is fixedly connected to the transmission block 82, and the transmission block 82 rotates with the sliding sleeve 63. The gear ring 81 is "engaged" with the transmission block 82. Specifically, the shape of the transmission block 82 matches the tooth groove of the gear ring 81, and the transmission block 82 makes a circular motion along the gear ring 81, and fluctuates and meshes between the tooth groove and the tooth top of the gear ring 81. In this embodiment, when the sliding sleeve 63 rotates, the sliding sleeve 63 drives the transmission block 82 to rotate synchronously. The outer wall of the sliding sleeve 63 is fixedly connected with the transmission block 82, and the gear ring 81 is "engaged" with the transmission block 82. The sliding sleeve 63 drives the transmission block 82 to move circumferentially along the rotating shaft 62. Under the guidance of the gear ring 81, when the transmission block 82 runs to the top of the tooth, the spring 65 is forced to shrink and continue to move. When the transmission block 82 runs to the bottom of the tooth, the spring 65 is restored. In this way, the sliding sleeve 63 makes a circular motion along the gear ring 81 and fluctuates between the tooth groove and the top of the tooth of the gear ring 81. Each time it fluctuates, the sliding sleeve 63 drives the filter screen 64 to vibrate, thereby vibrating the impurities on the filter screen 64 and preventing the impurities from clogging the mesh.

[0058] Furthermore, a control system is also arranged inside the No. 2 pipeline 3, and the control system includes a laser dust monitor for detecting dust concentration, a wind speed monitor for detecting airflow intensity, a control center and an electric telescopic sleeve 66. The electric telescopic sleeve 66 is fixed on the end plate of the No. 2 pipeline, and the telescopic end of the electric telescopic sleeve 66 is connected to the spring 65. The control center includes a processing module for judging and processing the dust concentration value and the airflow velocity value. The electric telescopic sleeve 66 is electrically connected to the control center, and the electric telescopic sleeve 66 receives the adjustment information sent by the control center to push the spring 65 and the sliding sleeve 63 to produce secondary expansion and contraction, thereby adjusting the vibration amplitude and adjusting the cleaning effect of the filter 64.

[0059] In the present invention, the control center may also be provided with a storage module for recording and storing data on the dust concentration monitored by the dust monitor and the airflow velocity monitored by the airflow velocity monitor.

[0060] Furthermore, the control center is also electrically connected to the No. 1 motor 61 to control the rotation speed of the rotating shaft 62. A vibration monitor is set at the filter 64, and the vibration monitor detects the vibration amplitude of the filter 64 and transmits the information to the control center. When the vibration amplitude of the filter 64 is too large, the vibration frequency of the filter 64 can be reduced by adjusting the rotation speed to avoid excessive vibration of the equipment.

[0061] like Figure 5-6As shown, a low temperature pump heat purge device for improving the stability and thermal uniformity of the blowing airflow provided by the present invention is shown, wherein the guide mechanism 9 includes a second motor 91, a flow balancing plate 92 and a guide sleeve 93;

[0062] A flow balancing plate 92 is provided in the housing 5 , and a second motor 91 is fixedly connected to the end surface of the housing 5 . The flow balancing plate 92 is fixedly connected to the output shaft of the second motor 91 , and the flow balancing plate 92 is connected to a plurality of flow guide sleeves 93 .

[0063] In this embodiment, when the hot air enters the housing 5, the hot air is evenly distributed through the flow equalizer 92 and all the guide sleeves 93; the second motor 91 is started, and the second motor 91 drives the flow equalizer 92 to rotate, thereby increasing the equalization effect of the hot air; the rotation speed of the second motor 91 can be adjusted to adjust the equalization effect of the hot air;

[0064] like Figure 5 As shown, a low-temperature pump heat purge device for improving the stability and thermal uniformity of the blowing air flow provided by the present invention is provided. The guide sleeve 93 is conical, and a central air hole 14 is provided at the end of the guide sleeve 93. The side wall of the guide sleeve 93 is provided with a plurality of lateral air holes 15.

[0065] In this embodiment, the heat flow can pass forward through the central air hole 14 on the guide sleeve 93, and the air flow can flow to the side through the lateral air holes 15 on the guide sleeve 93, so that the air flow is evenly distributed in the direction parallel to the flow equalizing plate 92, thereby improving the mixing uniformity of the air flow.

[0066] Working principle of the present invention:

[0067] The fixing sleeve 13 is connected to the wind receiving mechanism by bolts, and then the fan 1 is started. The airflow in the fan 1 passes through the connecting sleeve 10, the No. 1 pipe 2, the No. 2 pipe 3, the No. 3 pipe 4, the outer shell 5 and the fixing sleeve 13 in sequence and then enters the wind receiving mechanism.

[0068] During this process, when external wind enters into pipe No. 1 2 from the connecting sleeve 10, the air holes are divided into several streams and enter into each pipe No. 1 2 respectively. At this time, the electric heating rod 11 and the heat conducting rod 12 in pipe No. 1 2 are energized and generate heat, and the airflow is heated by all the electric heating rods 11 and all the heat conducting rods 12, thereby improving the heating effect of the external wind by diverting the airflow.

[0069] Afterwards, all the airflows in the No. 1 pipeline 2 converge in the No. 2 pipeline 3, and the No. 2 pipeline 3 is provided with a mixing mechanism 6, and the mixing mechanism 6 can mix the hot air passing through the No. 2 pipeline 3 by a continuous rotation movement, so as to improve the uniformity of heating of the external wind force; specifically, the No. 1 motor 61 is started, and the output shaft of the No. 1 motor 61 is fixedly connected with the rotating shaft 62, so the No. 1 motor 61 drives the rotating shaft 62 to rotate continuously, and the rotating shaft 62 drives the sliding sleeve 63 slidably connected thereto to rotate synchronously, and the sliding sleeve 63 is spirally provided with a filter screen 64, and the sliding sleeve 63 drives the filter screen 64 to mix the hot air, and the filter screen 64 can filter impurities in the air; when the sliding sleeve 63 rotates, the sliding sleeve 63 drives the guide plate 7 to rotate at the same time, and the hot air is guided by the guide plate 7, and when the guide plate 7 rotates with the sliding sleeve 63, the guide plate 7 evenly disperses the hot air in the No. 3 pipeline 4 at different positions.

[0070] At the same time, the outer wall of the sliding sleeve 63 is fixedly connected with a transmission block 82. When the sliding sleeve 63 rotates, the sliding sleeve 63 drives the transmission block 82 to rotate synchronously. The shape of the transmission block 82 matches the tooth groove of the gear ring 81. The transmission block 82 makes a circular motion along the gear ring 81 and fluctuates between the tooth groove and the tooth top of the gear ring 81. Under the joint action of the spring 65 and the gear ring 81, the sliding sleeve 63 reciprocates along the axial direction of the rotating shaft 62, and the sliding sleeve 63 drives the filter screen 64 to vibrate, thereby vibrating the impurities on the filter screen 64 and preventing the impurities from clogging the mesh.

[0071] A dust monitor is set in the No. 2 pipeline 3 to monitor the real-time impurity concentration in the airflow, and an airflow velocity monitor is set to monitor the airflow size; if the filter 64 is blocked, its filtering effect will be reduced, the wind force will be blocked, and the uniformity of the airflow will be affected; when the impurity concentration in the No. 2 pipeline 3 is too high or the airflow intensity is large, the control module controls the electric telescopic sleeve 66 to extend, and the electric telescopic sleeve 66 pushes the spring 65 to contract, thereby increasing the vibration force of the filter 64 when it vibrates, and increasing the cleaning effect of the filter 64;

[0072] At the same time, the control module controls the No. 1 motor 61 to increase its speed, and adjusts the rotation direction of the filter 64 so that the wind can clean the surface of the filter 64, and cooperates with the movement of the filter 64 to achieve multi-directional blowing and cleaning of the surface of the filter 64, ensuring dynamic cleaning of the filter 64. When the filter 64 vibrates too much, the No. 1 motor 61 is adjusted to continue to increase its speed to increase the cleaning ability of the airflow on the filter 64, and at the same time, the telescopic sleeve 66 is contracted to reduce the vibration frequency of the filter 64 vibrating and shaking the screen, so as to avoid excessive vibration of the equipment.

[0073] The airflow in the No. 2 pipeline 3 is divided into several streams and enters all the No. 3 pipelines 4 respectively. The electric heating rods 11 and the heat conducting rods 12 in the No. 3 pipeline 4 are energized and generate heat, and the airflow is heated by all the electric heating rods 11 and all the heat conducting rods 12.

[0074] The airflow in the No. 3 pipe 4 converges and enters the outer shell 5, in which a guide mechanism 9 is provided, and the guide mechanism 9 can control the wind speed and wind direction of the hot air; when the hot air enters the outer shell 5, the hot air is evenly distributed through the equalizing plate 92 and all the guide sleeves 93; the No. 2 motor 91 is started, and the No. 2 motor 91 drives the equalizing plate 92 to rotate, thereby increasing the equalizing effect on the hot air; the equalizing effect of the hot air can be adjusted by adjusting the speed of the No. 2 motor 91; the central air hole 14 on the guide sleeve 93 allows the heat flow to pass forward, and the lateral air holes 15 on the guide sleeve 93 allow the air flow to flow to the side end, so that the air flow is evenly distributed in the direction parallel to the equalizing plate 92, thereby improving the mixing uniformity of the air flow. In addition, the air volume passing through per unit time can be adjusted by controlling the rotation of the equalizing plate 92, thereby achieving the effect of adjusting the wind speed. Finally, the external wind enters the wind receiving mechanism through the fixed sleeve 13.

[0075] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and deform the above embodiments within the scope of the present invention.

Claims

1. A cryopump heat purge device for improving the stability and thermal uniformity of blowing air flow, comprising a blower (1), characterized in that: The air outlet of the fan (1) is connected to the wind receiving mechanism via a connecting sleeve (10), a pipeline and a guide mechanism (9) in sequence, the pipeline comprising a No. 2 pipeline (3), and a mixing mechanism (6) and a transmission component are arranged inside the No. 2 pipeline (3); The mixing mechanism (6) comprises a rotating shaft (62) and a sliding sleeve (63) arranged along the axial direction of the second pipe (3); the sliding sleeve (63) is slidably arranged outside the rotating shaft (62) and rotates along with the rotating shaft (62); the transmission assembly (8) comprises a gear ring (81) and a transmission block (82); the outer diameter surface of the gear ring (81) is fixed to the inner wall surface of the second pipe (3); the transmission block (82) is fixedly connected to the sliding sleeve (63) and rotates along with the sliding sleeve (63); A spring (65) is provided at one end of the sliding sleeve (63), and the transmission block (82) matches the tooth groove of the gear ring (81); when the rotating shaft rotates, the transmission block (82) performs a circular motion along the gear ring (81) and fluctuates and meshes between the tooth groove and the tooth top of the gear ring (81); The pipeline further comprises a No. 1 pipeline (2) arranged between the connecting sleeve (10) and the No. 2 pipeline (3), and a No. 3 pipeline (4) arranged between the No. 2 pipeline (3) and the guide mechanism (9), and electric heating devices are arranged inside the No. 1 pipeline (2) and the No. 3 pipeline (4).

2. A cryopump heat purge device for improving the stability and thermal uniformity of the blowing airflow according to claim 1, characterized in that: The rotating shaft (62) is connected to the No. 1 motor (61) and rotates under the action of the No. 1 motor (61); the No. 1 motor (61) is a servo motor.

3. A cryopump heat purge device for improving air flow stability and thermal uniformity as claimed in claim 1, characterized in that: A control system is also arranged inside the second pipeline (3), comprising a laser dust monitor for detecting dust concentration, a wind speed monitor for detecting airflow intensity, a control center and an electric telescopic sleeve (66). The electric telescopic sleeve (66) is electrically connected to the control center, and the telescopic end of the electric telescopic sleeve (66) is connected to a spring (65). The electric telescopic sleeve (66) receives adjustment information from the control center and pushes the spring (65) and the sliding sleeve (63) to generate secondary telescopic expansion.

4. A cryopump heat purge device for improving the stability and thermal uniformity of the blowing airflow as claimed in claim 1, characterized in that: The filter screen (64) is arranged on the sliding sleeve (63) in a spiral shape. A guide plate (7) is also arranged on the sliding sleeve (63). The guide plate (7) is arranged on the sliding sleeve (63) at a position that avoids the filter screen (64).

5. A cryopump heat purge device for improving air flow stability and thermal uniformity as claimed in claim 1, characterized in that: The air outlet ends of the connecting sleeves (10) are respectively and simultaneously connected to a plurality of independent No. 1 pipes (2); the other ends of the No. 1 pipes (2) are commonly connected to the inlet of the No. 2 pipe (3); the outlets of the No. 2 pipes (3) are respectively and simultaneously connected to a plurality of independent No. 3 pipes (4); the other ends of the No. 3 pipes (4) are commonly connected to a guide mechanism (9) to deliver the blowing airflow from the fan (1) to the wind receiving mechanism.

6. A cryopump heat purge device for improving air flow stability and thermal uniformity as claimed in claim 1, characterized in that: The electric heating device comprises an electric heating rod (11) arranged along the axial direction of the No. 1 pipeline (2) and the No. 3 pipeline (4), and a plurality of heat-conducting rods (12) are connected to the electric heating rod (11), and the heat-conducting rods (12) extend into the internal space of the No. 1 pipeline (2) and the No. 3 pipeline (4).

7. A cryopump heat purge device for improving the stability and thermal uniformity of the blowing airflow as claimed in claim 5, characterized in that: The guide mechanism (9) comprises a shell (5), one side of the shell (5) being connected to the air outlet end of the No. 3 pipe (4), and the other side being provided with an air outlet and connected to a fixing sleeve (13), wherein hot air from the No. 3 pipe (4) passes through the shell (5) and is then transported to the air receiving mechanism through the fixing sleeve (13).

8. A cryopump heat purge device for improving the stability and thermal uniformity of the blowing airflow as claimed in claim 7, characterized in that: A flow balancing plate (92) is provided inside the housing (5), and a plurality of through holes are arranged on the flow balancing plate (92); the flow balancing plate (92) is also connected to a second motor (91), and the second motor (91) drives the flow balancing plate (92) to rotate, thereby improving the mixing uniformity of the hot air.

9. A cryopump heat purge device for improving the stability and thermal uniformity of the blowing airflow as claimed in claim 8, characterized in that: A conical guide sleeve (93) is provided corresponding to the air outlet side of the through hole, a central air hole (14) is provided at the top of the guide sleeve (93), and lateral air holes (15) are provided on the side wall of the guide sleeve (93).

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