Vapor deposition furnace for antimony purification processing and use method thereof

Abstract

The invention relates to the technical field of vapor deposition furnaces, in particular to an antimony purification processing vapor deposition furnace and a using method thereof.The antimony purification processing vapor deposition furnace comprises a furnace body, the furnace body is provided with a through hole penetrating left and right, the interior of the through hole is slidably connected with a material storage pipe, one side of the furnace body is fixedly provided with a sliding rail, and one side of the furnace body is slidably connected with a heat dissipation box along the sliding rail; the cooling device has the beneficial effects that the fan is started to carry out air cooling on the material storage pipe, meanwhile, the water pump is started, water in the water tank is pumped out by the first water pipe and then enters the cooling pipe through the second water pipe, the cooling pipe is cooled, the cooling pipe is cooled, and the cooling effect is improved. And then the water is sprayed to the surface of the material storage pipe through the atomizing nozzle after passing through the cooling pipe, so that the material storage pipe can be subjected to water cooling and rapid heat dissipation, and the heat dissipation effect is improved to the maximum extent through two cooling and heat dissipation means of air cooling and water cooling.

Description

Technical Field

[0001] The invention relates to the technical field of vapor deposition furnaces, and in particular to an antimony purification and processing vapor deposition furnace and a use method thereof. Background Art

[0002] Antimony, with the element symbol Sb and atomic number 51, is a metalloid with metallic luster. In nature, it mainly exists in the sulfide mineral stibnite (Sb2S3). With the development of high-tech, the use of high-purity metals is becoming more and more extensive. 4N, 5N, and 6N metallic antimony have been widely used and have high economic value. They are mainly used to manufacture low-melting-point alloys, semiconductor optoelectronic components, antimony compounds, etc.

[0003] Chemical vapor deposition has been widely used to purify substances, develop new crystals, and deposit various single crystal, polycrystalline or glassy inorganic thin film materials. It mainly includes: 1) forming volatile substances; 2) transferring the above substances to the deposition area; 3) producing chemical reactions on solids and producing solid substances.

[0004] In the prior art, high-purity Sb purification also uses a vapor deposition furnace for impurity separation and purification. However, as in the Chinese patent application number CN216378392U, the heat dissipation component includes a heat dissipation fan and a serpentine copper tube. The heat dissipation fan is fixedly arranged at the right end of the furnace body, and the serpentine copper tube is fixedly arranged at the right end of the furnace body, and the serpentine copper tube is located below the heat dissipation fan. After the storage tube moves to the right out of the through hole, the heat dissipation fan is started, and the heat dissipation fan blows the gas below upward to dissipate the gas to the storage tube; the serpentine copper tube is connected to an external liquid injection device. When the heat dissipation fan is working, the external liquid injection device injects coolant into the serpentine copper tube, so that the gas below the heat dissipation fan is cooled, and finally the cooled gas is sucked and blown to the storage tube by the heat dissipation fan, so that the storage tube dissipates heat faster. The deposition furnace mainly achieves heat dissipation through a fan, but the heat dissipation effect of this method is poor. Based on this shortcoming, a vapor deposition furnace with good heat dissipation effect is proposed. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that the deposition furnace in the prior art mainly achieves heat dissipation through a fan, which has a poor heat dissipation effect, and to propose an antimony purification and processing vapor deposition furnace and a method of using the same.

[0006] In order to achieve the above-mentioned objectives, the present invention adopts the following technical scheme: an antimony purification processing vapor deposition furnace and a method of using the same, comprising: a furnace body, the furnace body is provided with a through hole running through it on the left and right, a storage tube is slidably connected inside the through hole, a slide rail is fixed on one side of the furnace body, and a heat sink is slidably connected to one side of the furnace body along the slide rail, a heat sink is provided with a heat dissipation mechanism inside the heat sink, the heat dissipation mechanism comprises a notch at the top of the heat sink, a fan is provided inside the notch, the fan is installed inside the notch through a disassembly and assembly unit, the disassembly and assembly unit comprises a support plate fixed on the top of the fan, a pad is fixed inside the notch, a square groove is penetrated by the pad, a square column is fixed on the bottom of the support plate, a limiting rod is fixed on the top of the pad and a hollow disk is provided, the hollow disk is penetrated by an arc groove, and the limiting rod penetrates the arc groove to provide rotational support force for the hollow disk.

[0007] As a further solution of the present invention, the disassembly and assembly unit includes a first spring fixed on the top of the pad, one end of the first spring is fixedly connected to the outside of the hollow disk, a pull rope is fixed to the outside of the hollow disk, and one end of the pull rope extends to the outside of the heat sink.

[0008] As a further solution of the present invention, a curved groove is provided on the inner side of the hollow disk, a sliding groove is provided on the top of the pad, a slider is slidably connected inside the sliding groove, a second spring is fixed to one end of the sliding groove, and one end of the second spring is fixedly connected to the slider, an insert block is fixed to the top of the slider, and slots matching the insert block are provided on the four sides of the square column.

[0009] As a further solution of the present invention, a water pump and a cooling pipe are installed on the top of the inner cavity of the heat sink, a water tank is fixed to the bottom of the heat sink, a water receiving bucket is provided on the top of the water tank, a filter is provided inside the water tank, the water pump is provided with a first water pipe and a second water pipe, the bottom of the first water pipe is located inside the water tank, one end of the second water pipe is connected to the cooling pipe, and an atomizing nozzle is installed at the bottom of the cooling pipe.

[0010] As a further solution of the present invention, three support blocks are arranged inside the heat dissipation box, and the tops of the three support blocks are arc-shaped.

[0011] As a further solution of the present invention, one end of the storage tube is sealed with a tube cover, the tube cover is provided with a vent pipe, the vent pipe is provided with a hose, the vent pipe is connected to the inside of the storage tube, and the hose is connected to an external ventilation device.

[0012] As a further solution of the present invention, a through groove is provided on one side of the heat dissipation box close to the through hole, and the diameter of the through groove is larger than the diameter of the storage tube.

[0013] As a further solution of the present invention, a control panel is provided on the front of the furnace body, and the control panel is provided with operation buttons.

[0014] The method of using the vapor deposition furnace is as follows:

[0015] S1: Manually hold the push rod to push against the storage tube at the position of the through hole, and then a part of the storage tube is pushed out, and then the pushed part enters the inside of the heat sink from the through slot, and a part of the storage tube is located on the top of the support block, and the support block provides support for the storage tube.

[0016] S2: Pull the drawstring outside the heat sink and the drawstring is tightened. Figure 6 As shown, after the pull rope is tightened, the arc groove moves outside the limit rod and the hollow disk rotates at this time, and the pressure on the plug block disappears. Then the support plate is placed inside the slot, and the square column is inserted into the square slot. Then the pull rope is released and the hollow disk rotates in the opposite direction. The first spring can provide power for the reset of the hollow disk, and the curved groove re-presses the plug block. At this time, the slider moves in the slide groove to provide support force for the plug block to move, and the second spring is stretched at this time. Then the four plug blocks are moved at the same time and inserted into the slots on the four sides of the square column. This is conducive to fixing the square column in the square slot, and then installing the fan inside the slot.

[0017] S3: After the fan has been used for a period of time, dust will accumulate on the blades. At this time, the pull cord is pulled again, and the pressure of the curved groove on the plug disappears. At this time, the stretched second spring is reset and the plug moves in the opposite direction to leave the slot, and then the square column can leave the square slot. The disassembly unit is provided to facilitate the installation of the fan and to quickly remove it when dust needs to be cleaned. Compared with traditional bolt fixing, the present invention realizes the installation and disassembly of the fan by pulling the pull cord, which is simple, fast and convenient.

[0018] S4: Start the fan to air-cool the storage tube, and start the water pump at the same time. The water in the water tank is pumped out by the first water pipe, and then enters the interior of the cooling tube through the second water pipe, and then is sprayed onto the surface of the storage tube by the atomizing nozzle after passing through the cooling tube, so that the storage tube can be quickly cooled by water cooling. Since the storage tube is placed inside the furnace body, the surface of the storage tube will be attached with impurities from the furnace body. When spraying water, the impurities fall and mix with water to form waste water. The waste water passes through the water receiving bucket and then the filter net to filter the incoming water. The water after filtering out the impurities returns to the water tank, which is convenient for realizing the recycling of water. The heat dissipation effect is maximized by the two cooling and heat dissipation methods of air cooling and water cooling.

[0019] The invention proposes a vapor deposition furnace for purification of antimony and a method for using the same, which has the following beneficial effects: the fan is started to air-cool the storage tube, and the water pump is started at the same time, and then the water in the water tank is pumped out by the first water pipe, and then enters the interior of the cooling tube through the second water pipe, and then is sprayed onto the surface of the storage tube by the atomizing nozzle after passing through the cooling tube, so that the storage tube can be water-cooled to quickly dissipate heat and cool down. After the furnace body and related equipment are turned on, the furnace body heats and vaporizes high-purity antimony, and deposits it in the storage tube inside the heat dissipation box, so as to complete the purification of high-purity antimony to obtain ultra-high-purity antimony. Since the storage tube is placed inside the furnace body, the surface of the storage tube will be stained with impurities from the furnace body. When spraying water, the impurities fall and mix with water to form waste water. The waste water is filtered through the water receiving bucket and then the filter net to filter the incoming water. The water filtered out of the impurities returns to the water tank, which is convenient for realizing the recycling of water. The heat dissipation effect is maximized by the two cooling and heat dissipation means of air cooling and water cooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the appearance structure proposed by the present invention;

[0021] Figure 2 This is a schematic diagram of the split structure of the furnace body and the heat dissipation box proposed by the present invention;

[0022] Figure 3 This is a schematic diagram of the heat dissipation box structure proposed by the present invention;

[0023] Figure 4 This is a schematic diagram of the internal structure of the heat dissipation box proposed by the present invention;

[0024] Figure 5 The present invention proposes Figure 4 Schematic diagram of partial enlarged structure;

[0025] Figure 6 This is a schematic diagram of the top structure of the pad proposed in the present invention.

[0026] In the figure: 1. furnace body; 2. through hole; 3. material storage tube; 4. slide rail; 5. heat sink; 6. notch; 7. fan; 8. support plate; 9. pad; 10. square groove; 11. square column; 12. limit rod; 13. hollow disk; 14. arc groove; 16. first spring; 17. pull rope; 18. bent groove; 19. slide groove; 20. slider; 21. second spring; 22. plug block; 23. through groove; 31. water pump; 32. cooling pipe; 33. water tank; 34. water receiving bucket; 35. filter screen; 36. first water pipe; 37. second water pipe; 38. atomizing nozzle; 39. support block. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The following is an explanation of its embodiments based on the overall structure of the present invention.

[0029] like Figure 1-4 The present invention provides an antimony purification processing vapor deposition furnace, comprising: a furnace body 1, a control panel is arranged on the front of the furnace body 1, the control panel is provided with operation buttons, the furnace body 1 is provided with a through hole 2 running through left and right, a storage tube 3 is slidably connected inside the through hole 2; a slide rail 4 is fixed to one side of the furnace body 1, and a heat sink 5 is slidably connected to one side of the furnace body 1 along the slide rail 4, a heat sink 5 is provided inside the heat sink 5, the heat sink mechanism includes a slot 6 on the top of the heat sink 5, a fan 7 is provided inside the slot 6, and the fan 7 is installed inside the slot 6 through a disassembly unit.

[0030] Three support blocks 39 are arranged inside the heat dissipation box 5, and the tops of the three support blocks 39 are arc-shaped; a through groove 23 is arranged on one side of the heat dissipation box 5 close to the through hole 2, and the diameter of the through groove 23 is larger than the diameter of the storage tube 3. One end of the storage tube 3 is sealed and connected with a tube cover, and the tube cover is opened to put high-purity antimony into the storage tube 3. The tube cover is provided with a vent pipe and the vent pipe is provided with a hose, the vent pipe is connected with the inside of the storage tube 3, and the hose is connected with an external ventilation device. The storage tube 3 is heated and deposited inside the furnace body 1, and the other part of the storage tube 3 is located on the top of the support block 39, and the support block 39 provides support for the storage tube 3. After the furnace body and related equipment are turned on, the furnace body heats and vaporizes the high-purity antimony, and deposits it in the storage tube 3 inside the heat dissipation box 5, thereby completing the purification process of the high-purity antimony to obtain ultra-high-purity antimony.

[0031] like Figure 5 As shown, the disassembly and assembly unit includes a support plate 8 fixed on the top of the fan 7, a pad 9 fixed inside the slot 6, a square slot 10 passing through the pad 9, a square column 11 fixed at the bottom of the support plate 8, the square column 11 is fixed in the square slot 10, and the fan 7 is installed inside the slot 6.

[0032] like Figure 6 As shown, one end of a first spring 16 is fixed to the top of the pad 9, and the other end of the first spring 16 is fixedly connected to the outside of the hollow disk 13. A pull rope 17 is fixed to the outside of the hollow disk 13, and one end of the pull rope 17 extends to the outside of the heat sink 5.

[0033] A limit rod 12 is fixed on the top of the pad 9 and a hollow disk 13 is provided. The hollow disk 13 is penetrated by an arc groove 14. The limit rod 12 penetrates the arc groove 14 to provide a rotation support force for the hollow disk 13. A curved groove 18 is provided on the inner side of the hollow disk 13, and a slide groove 19 is provided on the top of the pad 9. A slider 20 is slidably connected inside the slide groove 19; a second spring 21 is fixed at one end of the slide groove 19, and one end of the second spring 21 is fixedly connected to the slider 20. An insert block 22 is fixed on the top of the slider 20, and each insert block 22 corresponds to a curved groove 18. The four sides of the square column 11 are provided with slots that match the insert blocks 22.

[0034] It should be noted that the pull rope 17 is pulled from the outside of the heat sink 5 and then the pull rope 17 is tightened. After the pull rope 17 is tightened, the arc groove 14 moves outside the limit rod 12 and the hollow disk 13 rotates at this time, and the pressure on the plug block 22 disappears. Then the support plate 8 is placed inside the slot 6, and then the square column 11 is inserted into the inside of the square slot 10. Then the pull rope 17 is released and the hollow disk 13 rotates in the opposite direction. The first spring 16 can provide power for the reset of the hollow disk 13, and the curved groove 18 re-presses the plug block 22. At this time, the slider 20 moves in the slide groove 19 to provide support force for the movement of the plug block 22, and the second spring 21 is stretched at this time, and then the four plug blocks 22 are moved at the same time and inserted into the slots on the four sides of the square column 11. This is conducive to fixing the square column 11 in the square slot 10, and then installing the fan 7 inside the slot 6.

[0035] After the fan 7 has been used for a period of time, dust will accumulate on the blades. At this time, the pull cord 17 is pulled again, and the pressure of the curved groove 18 on the plug block 22 disappears. At this time, the stretched second spring 21 is reset and moves the plug block 22 in the opposite direction to leave the slot, and then the square column 11 can leave the square slot 10. The disassembly unit is provided to facilitate the installation of the fan 7 and to quickly remove it when dust needs to be cleaned. Compared with the traditional bolt fixing, the present invention realizes the installation and disassembly of the fan 7 by pulling the pull cord 17, which is simple, fast and convenient.

[0036] In addition, a water pump 31 and a cooling pipe 32 are installed at the top of the inner cavity of the heat dissipation box 5, a water tank 33 is fixed at the bottom of the heat dissipation box 5, a water receiving bucket 34 is arranged on the top of the water tank 33, a filter screen 35 is arranged inside the water tank 33, a first water pipe 36 and a second water pipe 37 are connected to the water inlet and outlet of the water pump 31 respectively, the bottom of the first water pipe 36 is located inside the water tank 33, one end of the second water pipe 37 is connected to the cooling pipe 32, and an atomizing nozzle 38 is installed at the bottom of the cooling pipe 32.

[0037] Specifically, the fan 7 air-cools the storage pipe 3, and at the same time, the water pump 31 is started, and then the water in the water tank 33 is pumped out by the first water pipe 36, and then enters the interior of the cooling pipe 32 through the second water pipe 37, and then is sprayed onto the surface of the storage pipe 3 by the atomizing nozzle 38 after passing through the cooling pipe 32, so that the storage pipe 3 can be water-cooled to quickly dissipate heat and cool down. Since the storage pipe 3 is placed inside the furnace body 1, the surface of the storage pipe 3 will be attached with impurities from the furnace body 1. When spraying water, the impurities fall and mix with water to form waste water. The waste water passes through the water receiving bucket 34 and then the filter net 35 to filter the incoming water. The water after filtering out the impurities returns to the water tank 33, which is convenient for realizing the recycling of water. The heat dissipation effect is maximized by the two cooling and heat dissipation methods of air cooling and water cooling.

[0038] The present invention also provides a method for using the vapor deposition furnace as follows:

[0039] S1: Manually hold the push rod to push against the storage tube at the position of the through hole, and then a part of the storage tube is pushed out, and then the pushed part enters the inside of the heat sink from the through slot. A part of the storage tube is located on the top of the support block, and the support block provides support for the storage tube. After the furnace body and related equipment are turned on, the furnace body heats and vaporizes the high-purity antimony, and deposits it in the storage tube inside the heat sink.

[0040] S2: Pull the drawstring outside the heat sink and the drawstring is tightened. Figure 6 As shown, after the pull rope is tightened, the arc groove moves outside the limit rod and the hollow disk rotates at this time, and the pressure on the plug block disappears. Then the support plate is placed inside the slot, and the square column is inserted into the square slot. Then the pull rope is released and the hollow disk rotates in the opposite direction. The first spring can provide power for the reset of the hollow disk, and the curved groove re-presses the plug block. At this time, the slider moves in the slide groove to provide support force for the plug block to move, and the second spring is stretched at this time. Then the four plug blocks are moved at the same time and inserted into the slots on the four sides of the square column. This is conducive to fixing the square column in the square slot, and then installing the fan inside the slot.

[0041] S3: After the fan has been used for a period of time, dust will accumulate on the blades. At this time, the pull cord is pulled again, and the pressure of the curved groove on the plug disappears. At this time, the stretched second spring is reset and the plug moves in the opposite direction to leave the slot, and then the square column can leave the square slot. The disassembly unit is provided to facilitate the installation of the fan and to quickly remove it when dust needs to be cleaned. Compared with traditional bolt fixing, the present invention realizes the installation and disassembly of the fan by pulling the pull cord, which is simple, fast and convenient.

[0042] S4: Start the fan to air-cool the storage tube, and start the water pump at the same time. The water in the water tank is pumped out by the first water pipe, and then enters the interior of the cooling tube through the second water pipe, and then is sprayed onto the surface of the storage tube by the atomizing nozzle after passing through the cooling tube, so that the storage tube can be quickly cooled by water cooling. Since the storage tube is placed inside the furnace body, the surface of the storage tube will be attached with impurities from the furnace body. When spraying water, the impurities fall and mix with water to form waste water. The waste water passes through the water receiving bucket and then the filter net to filter the incoming water. The water after filtering out the impurities returns to the water tank, which is convenient for realizing the recycling of water. The heat dissipation effect is maximized by the two cooling and heat dissipation methods of air cooling and water cooling.

[0043] Working principle: open the tube cover and put high-purity antimony into the interior of the storage tube 3. The tube cover is provided with a vent pipe and the vent pipe is provided with a hose. The vent pipe is connected to the interior of the storage tube 3, and the hose is connected to the external ventilation equipment. The storage tube 3 is heated and deposited inside the furnace body 1. When it is necessary to take the material after deposition, the heat sink 5 is pushed to move the heat sink 5 along the slide rail 4 until the through groove 23 at one end of the heat sink 5 is in the same straight line as the through hole 2, and the movement of the heat sink 5 is stopped. Then, the push rod is manually held to press against the storage tube 3 at the position of the through hole 2, and then a part of the storage tube 3 is pushed out, and then the pushed out part enters the interior of the heat sink 5 from the through groove 23. A part of the storage tube 3 is located on the top of the support block 39, and the support block 39 provides support for the storage tube 3. After the furnace body and related equipment are turned on, the furnace body heats and vaporizes the high-purity antimony, and deposits it in the storage tube 3 inside the heat sink 5, thereby completing the purification process of the high-purity antimony to obtain ultra-high purity antimony.

[0044] Before the heat dissipation box 5 dissipates heat to the storage tube 3, the fan 7 needs to be installed inside the slot 6 through the disassembly unit, specifically, the pull rope 17 is pulled outside the heat dissipation box 5 and then the pull rope 17 is tightened. Figure 6 As shown, after the pull rope 17 is tightened, the arc groove 14 moves outside the limit rod 12 and the hollow disk 13 rotates at this time, and the pressure on the plug block 22 disappears. Then the support plate 8 is placed inside the notch 6, and then the square column 11 is inserted into the square groove 10, and then the pull rope 17 is loosened. At this time, the hollow disk 13 rotates in the opposite direction, and the first spring 16 can provide power for the reset of the hollow disk 13, and the curved groove 18 re-presses the plug block 22. At this time, the slider 20 moves in the slide groove 19 to provide support force for the movement of the plug block 22, and the second spring 21 is stretched at this time, and then the four plug blocks 22 move simultaneously and are inserted into the slots on the four sides of the square column 11. This is conducive to fixing the square column 11 in the square groove 10, and then installing the fan 7 inside the notch 6. After the fan 7 has been used for a period of time, the fan blades will accumulate dust. At this time, the pull rope 17 is pulled again, and then the pressure of the curved groove 18 on the plug block 22 disappears. At this time, the stretched second spring 21 is reset and the plug block 22 moves in the opposite direction and leaves the slot. Then the square column 11 can leave the square groove 10. The disassembly unit is provided to facilitate the installation of the fan 7 and to quickly remove it when dust needs to be cleaned. Compared with the traditional bolt fixing, the present invention realizes the installation and disassembly of the fan 7 by pulling the pull rope 17, which is simple, fast and convenient.

[0045] The fan 7 is started to air-cool the storage pipe 3, and the water pump 31 is started at the same time. Then the water in the water tank 33 is pumped out by the first water pipe 36, and then enters the interior of the cooling pipe 32 through the second water pipe 37, and then is sprayed onto the surface of the storage pipe 3 by the atomizing nozzle 38 after passing through the cooling pipe 32, so that the storage pipe 3 can be quickly cooled by water cooling. Since the storage pipe 3 is placed inside the furnace body 1, the surface of the storage pipe 3 will be attached with impurities from the furnace body 1. When spraying water, the impurities fall and mix with water to form waste water. The waste water is filtered through the water receiving bucket 34 and then the filter net 35. The water after filtering out the impurities returns to the water tank 33, which is convenient for realizing the recycling of water. The heat dissipation effect is maximized by the two cooling and heat dissipation methods of air cooling and water cooling.

[0046] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An antimony purification and processing vapor deposition furnace and a method of using the same, comprising: A furnace body (1), characterized in that: the furnace body (1) is provided with a through hole (2) running through the left and right sides, a material storage tube (3) is slidably connected inside the through hole (2), a slide rail (4) is fixed on one side of the furnace body (1), and a heat dissipation box (5) is slidably connected on one side of the furnace body (1) along the slide rail (4), a heat dissipation mechanism is arranged inside the heat dissipation box (5), the heat dissipation mechanism includes a notch (6) at the top of the heat dissipation box (5), a fan (7) is arranged inside the notch (6), the fan (7) is installed inside the notch (6) through a disassembly unit, the disassembly unit includes a support plate (8) fixed on the top of the fan (7), a pad (9) is fixed inside the notch (6), and a square groove (10) is arranged through the pad (9).

2. The antimony purification and processing vapor deposition furnace and the method of using the same according to claim 1, characterized in that: A square column (11) is fixed at the bottom of the support plate (8), a limiting rod (12) is fixed at the top of the pad (9) and a hollow disk (13) is provided, and an arc groove (14) passes through the hollow disk (13).

3. The antimony purification and processing vapor deposition furnace and the method of using the same according to claim 1, characterized in that: The disassembly and assembly unit comprises a first spring (16) fixed on the top of the pad (9), one end of the first spring (16) is fixedly connected to the outside of the hollow disk (13), a pull rope (17) is fixed to the outside of the hollow disk (13), and one end of the pull rope (17) extends to the outside of the heat sink (5).

4. The antimony purification and processing vapor deposition furnace and the method of using the same according to claim 3, characterized in that: A curved groove (18) is provided on the inner side of the hollow disk (13), a sliding groove (19) is provided on the top of the pad (9), a sliding block (20) is slidably connected inside the sliding groove (19), a second spring (21) is fixed to one end of the sliding groove (19), and one end of the second spring (21) is fixedly connected to the sliding block (20), and an insert block (22) is fixed to the top of the sliding block (20).

5. The antimony purification vapor deposition furnace and the method of using the same according to claim 1, characterized in that: A water pump (31) and a cooling pipe (32) are installed at the top of the inner cavity of the heat dissipation box (5); a water tank (33) is fixed at the bottom of the heat dissipation box (5); a water receiving bucket (34) is arranged at the top of the water tank (33); a filter screen (35) is arranged inside the water tank (33); the water pump (31) is provided with a first water pipe (36) and a second water pipe (37); the bottom of the first water pipe (36) is located inside the water tank (33); one end of the second water pipe (37) is connected to the cooling pipe (32); and an atomizing nozzle (38) is installed at the bottom of the cooling pipe (32).

6. The antimony purification and processing vapor deposition furnace and the method of using the same according to claim 1, characterized in that: Three support blocks (39) are arranged inside the heat dissipation box (5), and the tops of the three support blocks (39) are arc-shaped.

7. The antimony purification vapor deposition furnace and the method of using the same according to claim 1, characterized in that: A through groove (23) is provided on one side of the heat dissipation box (5) close to the through hole (2), and the diameter of the through groove (23) is greater than the diameter of the storage tube (3).

8. The antimony purification vapor deposition furnace and the method of using the same according to claim 1, characterized in that: The front of the furnace body (1) is provided with a control panel, and the control panel is provided with operating buttons.

9. The method for using the antimony purification vapor deposition furnace according to claim 1 is as follows: S1: Manually hold the push rod to push against the storage tube at the position of the through hole, and then a part of the storage tube is pushed out, and then the pushed part enters the inside of the heat sink from the through slot, and a part of the storage tube is located on the top of the support block, and the support block provides support for the storage tube. S2: Pull the pull rope outside the heat sink and then the pull rope is tightened as shown in Figure 6. After the pull rope is tightened, the arc groove moves outside the limit rod and the hollow disk rotates at this time, and the pressure on the plug block disappears. Then put the support plate into the slot, and then insert the square column into the square slot. Then release the pull rope and the hollow disk rotates in the opposite direction. The first spring can provide power for the reset of the hollow disk, and the curved groove re-presses the plug block. At this time, the slider moves in the slide groove to provide support for the movement of the plug block, and the second spring is stretched at this time. Then the four plug blocks move at the same time and are inserted into the slots on the four sides of the square column. This is conducive to fixing the square column in the square slot, and then installing the fan inside the slot. S3: After the fan has been used for a period of time, dust will accumulate on the blades. At this time, the pull cord is pulled again, and the pressure of the curved groove on the plug disappears. At this time, the stretched second spring is reset and the plug moves in the opposite direction to leave the slot, and then the square column can leave the square slot. The disassembly unit is provided to facilitate the installation of the fan and to quickly remove it when dust needs to be cleaned. Compared with traditional bolt fixing, the present invention realizes the installation and disassembly of the fan by pulling the pull cord, which is simple, fast and convenient. S4: Start the fan to air-cool the storage tube, and start the water pump at the same time. The water in the water tank is pumped out by the first water pipe, and then enters the interior of the cooling tube through the second water pipe, and then is sprayed onto the surface of the storage tube by the atomizing nozzle after passing through the cooling tube, so that the storage tube can be quickly cooled by water cooling. Since the storage tube is placed inside the furnace body, the surface of the storage tube will be attached with impurities from the furnace body. When spraying water, the impurities fall and mix with water to form waste water. The waste water passes through the water receiving bucket and then the filter net to filter the incoming water. The water after filtering out the impurities returns to the water tank, which is convenient for realizing the recycling of water. The heat dissipation effect is maximized by the two cooling and heat dissipation methods of air cooling and water cooling.

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