Drying equipment and drying method for polyimide film production

Abstract

The invention relates to the technical field of drying equipment, and discloses drying equipment and a drying method for polyimide film production. The drying equipment comprises a device body, an air inlet pipeline, a detection mechanism and an air outlet pipeline; the air inlet pipeline and the air outlet pipeline are connected through a detection mechanism, a sealing bin door is movably installed on the front face of the device body, and a drying bin is formed in the device body. In the working process, pressure change caused by water vapor content change in drying air can be detected in real time through the detection mechanism, and transmission is driven according to the pressure change to adjust the position of the water vapor absorption rod; the contact area between the water vapor absorption rod and the drying air is adjusted by adjusting the position of the water vapor absorption rod, the balance of the water vapor content in the drying air is kept, and cracks, caused by the water vapor content, of the polyimide film in the drying process are prevented.

Description

Technical Field

[0001] The invention relates to the technical field of drying equipment, in particular to drying equipment and a drying method for producing polyimide films. Background Art

[0002] Drying generally involves evaporating the water in the product into water vapor through high temperature, thereby reducing the water content in the product. Drying equipment is widely used in various industries.

[0003] Chinese patent CN105398206B discloses a drying device, which divides the heating chamber into two upper and lower chambers by providing a partition plate. The upper chamber is provided with an air inlet, and the lower chamber is provided with an air outlet. The exhaust gas discharged through the air outlet preheats the air entering the air inlet, thereby reducing heat loss and improving drying efficiency.

[0004] In the above patents and the prior art, it is difficult to adjust the water vapor content in the drying chamber in real time when the drying equipment is drying the polyimide film. The polyimide film will produce a certain amount of water vapor during the drying process. When the water vapor content in the drying chamber is too high, the drying efficiency will be reduced. When the water vapor content in the drying chamber is too low, the drying process will be uncontrollable and cracks and wrinkles will appear in the polyimide film. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a drying device and a drying method for producing a polyimide film.

[0006] A drying device and a drying method for producing polyimide film, comprising a device body, an air inlet duct, a detection mechanism and an air outlet duct, wherein the inside of the device body is respectively provided with an air inlet duct and an air outlet duct, the air inlet duct and the air outlet duct are connected via a detection mechanism, a sealed compartment door is movably installed on the front of the device body, a drying compartment is provided inside the device body, a control panel is fixedly installed on the front of the device body, a circulating fan is installed inside the air inlet duct, one end of the device body is connected with a dehumidification mechanism, a transmission mechanism is installed outside the detection mechanism, an air inlet is fixedly connected to the outside of the air inlet duct, and an air outlet is fixedly connected to the outside of the air outlet duct; The air intake duct is provided with three ports, one port of the air intake duct is connected to the air inlet, one port of the air intake duct is connected to the dehumidification mechanism, and one port of the air intake duct is connected to the detection mechanism; One side of the detection mechanism is connected to the interior of the drying bin through an air inlet pipe and an air inlet, and the other side of the detection mechanism is connected to the interior of the drying bin through an air outlet pipe and an air outlet; The circulation fan can drive the dry air inside the drying chamber to enter the air inlet duct from the air inlet, and then return to the drying chamber through the detection mechanism, the air outlet duct and the air outlet. The dehumidification mechanism can absorb part of the water vapor in the dry air entering the air inlet duct. The detection mechanism can drive the transmission mechanism to adjust the efficiency of the dehumidification mechanism in absorbing water vapor according to the water vapor content in the entering dry air.

[0007] Preferably, the dehumidification mechanism comprises a dehumidification shell, the outside of the dehumidification shell is fixedly connected to a port of the air inlet pipe, a hydraulic rod is fixedly installed on the inner side wall of the dehumidification shell, the movable end of the hydraulic rod is rotatably connected to the upper rotating shaft, a sleeve rotating rod is movably installed inside the dehumidification shell, a middle connecting sleeve is fixedly installed outside the sleeve rotating rod, a lower rotating shaft is slidably installed at the bottom of the middle connecting sleeve, and a water vapor absorption rod is rotatably connected to the outside of the lower rotating shaft; The top of the middle connecting sleeve is slidably connected to the upper rotating shaft, and the bottom of the middle connecting sleeve is slidably connected to the lower rotating shaft.

[0008] Preferably, one end of the water vapor absorption rod is connected to the movable end of the hydraulic rod through the lower rotating shaft, the middle connecting sleeve and the upper rotating shaft, and the other end of the water vapor absorption rod passes through the dehumidification shell and extends into the interior of the air inlet pipe; The bottom of the dehumidification shell is a circular structure, and the outside of the water vapor absorption rod is in contact with the bottom of the dehumidification shell.

[0009] Preferably, the front and rear sides of the middle connecting sleeve are movably installed inside the dehumidifier shell through a sleeve rotating rod, and sliding grooves are provided on the front and rear sides of the dehumidifier shell. Both ends of the sleeve rotating rod pass through the sliding grooves on the dehumidifier shell, and the sleeve rotating rod on the rear side of the middle connecting sleeve is movably connected to the transmission mechanism.

[0010] Preferably, the detection mechanism comprises a buffer chamber, one side of the buffer chamber is provided with an air inlet connection port, the other side of the buffer chamber is provided with an air outlet connection port, a detection cylinder is fixedly installed on the top of the buffer chamber, a detection piston is slidably installed inside the detection cylinder, a telescopic sleeve is fixedly connected to the top of the detection piston, a detection spring is fixedly installed on the top of the telescopic sleeve, and a detection connecting rod is slidably installed inside the telescopic sleeve; The two sides of the buffer chamber are respectively connected with the air inlet pipe and the air outlet pipe through the air inlet connecting port and the air outlet connecting port.

[0011] Preferably, one end of the detection connecting rod is slidably mounted inside the telescopic sleeve, the other end of the detection connecting rod is fixedly connected to the device body, one end of the detection spring is fixedly connected to the top of the telescopic sleeve, and the other end of the detection spring is fixedly connected to the fixed end of the detection connecting rod; The outside of the detection piston fits with the inside of the detection cylinder, the top of the detection piston is slidably connected with the detection connecting rod through a telescopic sleeve, and a transmission mechanism is installed on the outside of the telescopic sleeve.

[0012] Preferably, the transmission mechanism includes a transmission connecting seat and a limit turntable, the transmission connecting seat is fixedly mounted on the outside of the telescopic sleeve, the limit turntable is fixedly connected to one end of the sleeve rotating rod extending out of the dehumidification housing, a transmission connecting rod is fixedly mounted on the top of the transmission connecting seat, a sliding mounting bin is fixedly mounted on the top of the transmission connecting seat, a buffer spring is fixedly mounted inside the sliding mounting bin, a transmission connecting block is fixedly connected to the top of the buffer spring, the top of the transmission connecting block is fixedly connected to the limit housing, a limit sliding groove is provided inside the limit housing, a translation limit plate is slidably mounted inside the limit housing, a transmission block is fixedly mounted on one side of the translation limit plate, a rotation limit block is fixedly mounted on the side of the limit turntable, and a translation limit block is fixedly mounted on the outside of the limit turntable; The exteriors of the transmission connection seat and the limiting shell are both in contact with the exterior of the dehumidification shell.

[0013] Preferably, the top of the transmission connection seat is transmission-connected to the transmission block outside the translation limit plate through a transmission connection rod, and there is a movable space at the connection between the transmission connection rod and the transmission block; The top of the transmission connection seat is movably connected to the limit housing through a buffer spring and a transmission connection block, and the transmission connection block is slidably installed inside the sliding installation bin through the buffer spring.

[0014] Preferably, the translation limit plate is slidably mounted inside the limit housing through a transmission block, the transmission block outside the translation limit plate passes through a limit slide groove on the limit housing and is transmission-connected to the transmission connecting rod, and the side where the translation limit plate and the translation limit block are clamped is a stepped structure; The top and bottom of the limit turntable are planar structures and are slidably connected to the inside of the limit shell. The top of the limit shell is provided with an arc-shaped protrusion, and the limit turntable is clamped with the arc-shaped protrusion on the top of the limit shell through a rotating limit clamping block on the side.

[0015] Compared with the prior art, the present invention provides a drying device and a drying method for polyimide film production, which have the following beneficial effects: 1. This type of drying equipment can detect the pressure change caused by the change of water vapor content in the drying air in real time through the detection mechanism during operation, and drive the transmission to adjust the position of the water vapor absorption rod according to the pressure change. By adjusting the position of the water vapor absorption rod, the contact area between the water vapor absorption rod and the drying air is adjusted to maintain the balance of the water vapor content in the drying air, thereby preventing cracks in the polyimide film during the drying process due to too low water vapor content.

[0016] 2. In this type of drying equipment, the two-way movement of the water vapor absorption rod during the drying process is driven by the contraction of the hydraulic rod, and the movement mode is controlled by the detection mechanism and the limit mechanism. The hydraulic rod always remains in a contracted state during the drying process. After the detection mechanism detects the change in water vapor content, it can directly drive the water vapor absorption rod to move, thereby quickly adjusting the water vapor content in the drying air.

[0017] 3. This type of drying equipment can drive the limit shell and the translation limit plate to move up and down when the water vapor content in the drying air changes. The limit shell can limit the movement mode of the limit turntable, and the translation limit plate and the translation limit block can limit the movement distance of the limit turntable. The limit shell and the rotation limit block can limit the rotation angle of the limit turntable, so that the movement distance of the water vapor absorption rod can be accurately adjusted to prevent the imbalance of water vapor content in the drying air. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional structural schematic diagram of a drying device of the present invention; Figure 2 The internal structure of a drying device of the present invention is shown in FIG. Figure 1 ; Figure 3 The internal structure of a drying device of the present invention is shown in FIG. Figure 2 ; Figure 4 It is a three-dimensional structural schematic diagram of an air inlet duct and an air outlet duct of a drying device of the present invention; Figure 5 It is a schematic cross-sectional structure diagram of an air inlet duct and an air outlet duct of a drying device of the present invention; Figure 6 It is a schematic diagram of the internal structure of a detection mechanism of a drying device of the present invention; Figure 7 This is a schematic diagram of the internal structure of a dehumidification mechanism of a drying device of the present invention; Figure 8 The internal structure of the transmission mechanism of a drying device of the present invention is shown in FIG. Figure 1 ; Fig. 9It is a schematic diagram of the exploded structure of a transmission mechanism of a drying device of the present invention; Fig.10 The internal structure of the transmission mechanism of a drying device of the present invention is shown in FIG. Figure 2 .

[0019] In the figure: 1. device body; 2. sealed door; 3. drying chamber; 4. control panel; 5. air inlet duct; 6. circulating fan; 7. dehumidification mechanism; 71. dehumidification shell; 72. hydraulic rod; 73. upper shaft; 74. middle connecting sleeve; 75. sleeve rotating rod; 76. lower shaft; 77. water vapor absorption rod; 8. detection mechanism; 81. mitigation chamber; 82. air inlet connection port; 83. air outlet connection port; 84. detection cylinder; 85. detection piston; 86 , telescopic sleeve; 87, detection spring; 88, detection connecting rod; 9, transmission mechanism; 91, transmission connecting seat; 92, transmission connecting rod; 93, sliding mounting bin; 94, buffer spring; 95, transmission connecting block; 96, limit housing; 97, limit slide groove; 98, translation limit plate; 99, transmission card block; 910, limit turntable; 911, rotation limit card block; 912, translation limit card block; 10, air outlet pipe; 11, air inlet; 12, air outlet. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] As introduced in the background technology, there are deficiencies in the prior art. In order to solve the above technical problems, the present application proposes a drying device and a drying method for polyimide film production.

[0022] Example 1: Please refer to Figure 1 - Fig.10 A drying device comprises a device body 1, an air inlet duct 5, a detection mechanism 8 and an air outlet duct 10, wherein the air inlet duct 5 and the air outlet duct 10 are respectively installed inside the device body 1, and the air inlet duct 5 and the air outlet duct 10 are connected through the detection mechanism 8, a sealed compartment door 2 is movably installed on the front of the device body 1, a drying compartment 3 is opened inside the device body 1, a control panel 4 is fixedly installed on the front of the device body 1, a circulating fan 6 is installed inside the air inlet duct 5, a dehumidification mechanism 7 is connected to one end of the device body 1, a transmission mechanism 9 is installed outside the detection mechanism 8, an air inlet 11 is fixedly connected to the outside of the air inlet duct 5, and an air outlet 12 is fixedly connected to the outside of the air outlet duct 10; The air intake duct 5 is provided with three ports, one port of the air intake duct 5 is connected to the air inlet 11, one port of the air intake duct 5 is connected to the dehumidification mechanism 7, and one port of the air intake duct 5 is connected to the detection mechanism 8; One side of the detection mechanism 8 is connected to the interior of the drying chamber 3 through the air inlet duct 5 and the air inlet 11, and the other side of the detection mechanism 8 is connected to the interior of the drying chamber 3 through the air outlet duct 10 and the air outlet 12; The circulation fan 6 can drive the dry air inside the drying chamber 3 to enter the air inlet duct 5 from the air inlet 11, and then return to the drying chamber 3 through the detection mechanism 8, the air outlet duct 10 and the air outlet 12. The dehumidification mechanism 7 can absorb part of the water vapor in the dry air entering the air inlet duct 5. The detection mechanism 8 can drive the transmission mechanism 9 to adjust the efficiency of the dehumidification mechanism 7 in absorbing water vapor according to the water vapor content in the entering dry air.

[0023] When working, first spray the prepared polyimide solution on the flat surface of the substrate, then place the substrate inside the drying chamber 3, and close the sealed chamber door 2 to start drying the polyimide film. During the drying process, the circulating fan 6 can drive the dry air inside the drying chamber 3 to enter the air inlet duct 5 from the air inlet 11, and then pass through the detection mechanism 8 and the air outlet duct 10 and return to the drying chamber 3 from the air outlet 12. During the drying process, the moisture in the polyimide solution gradually evaporates, and the water vapor content in the air in the drying chamber 3 gradually increases. The dehumidification mechanism 7 at the air intake duct 5 can absorb part of the water vapor in the air to reduce the water vapor content in the dry air. When the dry air passes through the detection mechanism 8, the detection mechanism 8 can detect the change of water vapor in the dry air and adjust the dehumidification mechanism 7 through the transmission mechanism 9 to adjust the absorption efficiency of the dehumidification mechanism 7 on the water vapor in the air, thereby achieving a balanced and stable water vapor content inside the drying bin 3, which can prevent the dry air water vapor content from being too low to cause cracks in the polyimide film, and can also prevent the dry air water vapor content from being too high to affect the drying efficiency.

[0024] Embodiment 2: The difference from the above embodiment is that, please refer to Figure 5 - Figure 7 The dehumidification mechanism 7 includes a dehumidification housing 71, the outside of which is fixedly connected to a port of the air inlet pipe 5, a hydraulic rod 72 is fixedly installed on the inner side wall of the dehumidification housing 71, and the movable end of the hydraulic rod 72 is rotatably connected to an upper rotating shaft 73, a sleeve rotating rod 75 is movably installed inside the dehumidification housing 71, a middle connecting sleeve 74 is fixedly installed outside the sleeve rotating rod 75, a lower rotating shaft 76 is slidably installed at the bottom of the middle connecting sleeve 74, and a water vapor absorption rod 77 is rotatably connected to the outside of the lower rotating shaft 76; The top of the middle connecting sleeve 74 is slidably connected to the upper rotating shaft 73 , and the bottom of the middle connecting sleeve 74 is slidably connected to the lower rotating shaft 76 .

[0025] One end of the water vapor absorption rod 77 is connected to the movable end of the hydraulic rod 72 through the lower rotating shaft 76, the middle connecting sleeve 74 and the upper rotating shaft 73, and the other end of the water vapor absorption rod 77 passes through the dehumidification housing 71 and extends into the interior of the air inlet pipe 5; The bottom of the dehumidification shell 71 is a circular structure, and the outside of the water vapor absorption rod 77 is in contact with the bottom of the dehumidification shell 71.

[0026] The front and rear sides of the middle connecting sleeve 74 are movably installed inside the dehumidifier shell 71 through the sleeve rotating rod 75. The front and rear sides of the dehumidifier shell 71 are provided with sliding grooves. Both ends of the sleeve rotating rod 75 pass through the sliding grooves on the dehumidifier shell 71. The sleeve rotating rod 75 on the rear side of the middle connecting sleeve 74 is movably connected to the transmission mechanism 9.

[0027] During operation, when dry air passes through the air inlet duct 5, the water vapor absorption rod 77 can contact the dry air and absorb the water vapor in the dry air. When the hydraulic rod 72 is shortened, the upper rotating shaft 73, the middle connecting sleeve 74 and the lower rotating shaft 76 can drive the water vapor absorption rod 77 to slide inside the dehumidification shell 71. When the water vapor absorption rod 77 slides inside the dehumidification shell 71, the contact area between the water vapor absorption rod 77 and the dry air in the air inlet duct 5 can be adjusted, thereby adjusting the absorption efficiency of the water vapor absorption rod 77 on the water vapor in the dry air. During operation, the movement of the sleeve rotating rod 75 is restricted by the transmission mechanism 9. When the sleeve rotating rod 75 can move horizontally, the hydraulic rod 72 is shortened and drives the water vapor absorption rod 77 to move from the initial position to the inside of the air intake duct 5 through the upper rotating shaft 73, the middle connecting sleeve 74, and the lower rotating shaft 76. When the sleeve rotating rod 75 can rotate, the hydraulic rod 72 is shortened and drives the middle connecting sleeve 74 to rotate through the upper rotating shaft 73. When the middle connecting sleeve 74 rotates, the water vapor absorption rod 77 is driven to move from the initial position to the direction away from the air intake duct 5 through the lower rotating shaft 76. After drying is completed, the water vapor absorption rod 77 can be returned to the initial position by extending the hydraulic rod 72, so that the water vapor absorption rod 77 can be extended and retracted through the unidirectional contraction of the hydraulic rod 72, thereby adjusting the absorption efficiency of the water vapor absorption rod 77 to the water vapor in the drying air.

[0028] Embodiment 3: The difference from the above embodiment is that, please refer to Figure 4 - Figure 8The detection mechanism 8 includes a buffer chamber 81, an air inlet connection port 82 is provided on one side of the buffer chamber 81, an air outlet connection port 83 is provided on the other side of the buffer chamber 81, a detection cylinder 84 is fixedly installed on the top of the buffer chamber 81, a detection piston 85 is slidably installed inside the detection cylinder 84, a telescopic sleeve 86 is fixedly connected to the top of the detection piston 85, a detection spring 87 is fixedly installed on the top of the telescopic sleeve 86, and a detection connecting rod 88 is slidably installed inside the telescopic sleeve 86; The two sides of the buffer chamber 81 are connected to the air inlet pipe 5 and the air outlet pipe 10 through the air inlet connection port 82 and the air outlet connection port 83 respectively.

[0029] One end of the detection connecting rod 88 is slidably mounted inside the telescopic sleeve 86, the other end of the detection connecting rod 88 is fixedly connected to the device body 1, one end of the detection spring 87 is fixedly connected to the top of the telescopic sleeve 86, and the other end of the detection spring 87 is fixedly connected to the fixed end of the detection connecting rod 88; The outside of the detection piston 85 fits with the inside of the detection tube 84 , and the top of the detection piston 85 is slidably connected to the detection connecting rod 88 via a telescopic sleeve 86 , and a transmission mechanism 9 is installed on the outside of the telescopic sleeve 86 .

[0030] During operation, the dry air enters the buffer chamber 81 from the air inlet connection port 82. When the water vapor in the dry air increases, the space where the dry air is located remains unchanged, resulting in an increase in the pressure inside the buffer chamber 81. When the pressure inside the buffer chamber 81 increases, it can drive the detection piston 85 to move upward from the initial position in the detection cylinder 84. When the detection piston 85 moves, it can drive the telescopic sleeve 86 to move synchronously and cause the detection spring 87 to contract. When the water vapor absorption rod 77 absorbs water vapor at a speed greater than the water vapor generated by drying, the pressure inside the buffer chamber 81 decreases, and the detection activity The plug 85 moves downward from the initial position inside the detection cylinder 84 and drives the position of the telescopic sleeve 86 to drop. When the telescopic sleeve 86 moves up and down, it can drive the transmission connecting seat 91 to move synchronously, and limit the moving range of the water vapor absorption rod 77 through the transmission mechanism 9. After the drying is completed, the pressure inside the mitigation chamber 81 returns, and the detection piston 85 returns to the initial position. The water vapor content in the drying air can be detected in real time through the detection piston 85, and the dehumidification mechanism 7 is limited through the transmission mechanism 9, thereby ensuring the stability of the water vapor content in the drying air during the drying process.

[0031] Embodiment 4: The difference from the above embodiment is that, please refer to Figure 4 - Fig.10The transmission mechanism 9 includes a transmission connection seat 91 and a limit turntable 910. The transmission connection seat 91 is fixedly installed on the outside of the telescopic sleeve 86. The limit turntable 910 is fixedly connected to one end of the sleeve rotating rod 75 extending out of the dehumidification housing 71. A transmission connection rod 92 is fixedly installed on the top of the transmission connection seat 91. A sliding installation bin 93 is fixedly installed on the top of the transmission connection seat 91. A buffer spring 94 is fixedly installed inside the sliding installation bin 93. A transmission connection block 95 is fixedly connected to the top of the buffer spring 94. The top of the transmission connection block 95 is fixedly connected to a limit housing 96. A limit slide groove 97 is provided inside the limit housing 96. A translation limit plate 98 is slidably installed inside the limit housing 96. A transmission block 99 is fixedly installed on one side of the translation limit plate 98. A rotation limit block 911 is fixedly installed on the side of the limit turntable 910. A translation limit block 912 is fixedly installed on the outside of the limit turntable 910. The exterior of the transmission connection seat 91 and the limiting shell 96 are both in contact with the exterior of the dehumidification shell 71 .

[0032] The top of the transmission connection seat 91 is transmission-connected to the transmission block 99 outside the translation limit plate 98 through the transmission connection rod 92, and there is a movable space at the connection between the transmission connection rod 92 and the transmission block 99; The top of the transmission connection seat 91 is movably connected to the limiting housing 96 through a buffer spring 94 and a transmission connection block 95 , and the transmission connection block 95 is slidably installed inside the sliding installation bin 93 through the buffer spring 94 .

[0033] The translation limit plate 98 is slidably installed inside the limit housing 96 through the transmission block 99. The transmission block 99 outside the translation limit plate 98 passes through the limit slide groove 97 on the limit housing 96 and is transmission-connected to the transmission connecting rod 92. The side where the translation limit plate 98 is clamped with the translation limit block 912 is a stepped structure. The top and bottom of the limit turntable 910 are planar structures and are slidably connected to the inside of the limit shell 96. A circular arc protrusion is provided on the top of the limit shell 96. The limit turntable 910 is clamped with the circular arc protrusion on the top of the limit shell 96 through a rotating limit clamping block 911 on the side.

[0034] When the water vapor content in the drying air increases, the telescopic sleeve 86 can drive the transmission connection seat 91 to move upward when it moves upward. When the transmission connection seat 91 moves upward, it can drive the limit shell 96 to move upward from the initial position through the transmission connection block 95. When the limit shell 96 moves upward, the bottom inside the limit shell 96 contacts the bottom of the limit turntable 910, so that the limit turntable 910 can only move horizontally. When the telescopic sleeve 86 drives the transmission connection seat 91 to move downward, it drives the limit shell 96 to move downward from the initial position. The circular contour on the top of the limit shell 96 contacts the limit turntable 910, so that the limit turntable 910 can only rotate. During the drying process, the hydraulic rod 72 always remains in a retracted state. When the limit turntable 910 can move horizontally, the hydraulic rod 72 contracts and drives the limit turntable 910 to move horizontally, thereby driving the water vapor absorption rod 77 to move into the air intake pipe 5, and when the limit turntable 910 moves horizontally, it is clamped with the translation limit plate 98 through the translation limit clamping block 912. When the position of the telescopic sleeve 86 gradually rises, it can be connected with the transmission card block 99 through the transmission connecting rod 92 and drive the translation limit plate 98 to rise, so that the higher the water vapor content in the dry air, the higher the position of the telescopic sleeve 86 rises, and the rising height of the translation limit plate 98 will also be higher. The greater the moving range of the limit turntable 910 when the translation limit plate 98 rises, the larger the contact area between the water vapor absorption rod 77 and the dry air is, and the higher the water vapor absorption efficiency is. When the limit turntable 910 can only rotate, the contraction of the hydraulic rod 72 can drive the middle connecting sleeve 74 to rotate and drive the limit turntable 910 to rotate. When the middle connecting sleeve 74 rotates, it can drive the water vapor absorption rod 77 to move away from the air intake pipe 5, and after the limit turntable 910 rotates a certain angle, the rotating limit card block 911 is connected with the limit housing 96 to prevent the limit turntable 910 from continuing to rotate, thereby preventing the water vapor absorption rod 77 from moving too much and causing leakage at the connection with the air intake pipe 5.

[0035] Embodiment 5: A drying device and a drying method for producing a polyimide film, using a drying device as described in Embodiment 1, comprising the following steps: When working, first put the sprayed substrate into the drying chamber 3; Then close the sealed door 2 and start drying the polyimide film inside; The circulation fan 6 can drive the drying air to enter the detection mechanism 8 from the air inlet duct 5 and then enter the interior of the drying chamber 3 from the air outlet duct 10; The dehumidification mechanism 7 can absorb water vapor in the dry air entering the air inlet duct 5; The detection mechanism 8 can drive the transmission mechanism 9 to adjust the water vapor absorption efficiency of the dehumidification mechanism 7 in real time according to the change of the water vapor content in the dry air.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A drying device, comprising a device body, an air inlet duct, a detection mechanism and an air outlet duct, wherein the air inlet duct and the air outlet duct are respectively installed inside the device body, and the air inlet duct and the air outlet duct are connected through the detection mechanism, characterized in that: A sealed door is movably installed on the front of the device body, a drying chamber is opened inside the device body, a control panel is fixedly installed on the front of the device body, a circulating fan is installed inside the air inlet duct, a dehumidification mechanism is connected to one end of the device body, a transmission mechanism is installed outside the detection mechanism, an air inlet is fixedly connected to the outside of the air inlet duct, and an air outlet is fixedly connected to the outside of the air outlet duct; The air intake duct is provided with three ports, one port of the air intake duct is connected to the air inlet, one port of the air intake duct is connected to the dehumidification mechanism, and one port of the air intake duct is connected to the detection mechanism; One side of the detection mechanism is connected to the interior of the drying bin through an air inlet pipe and an air inlet, and the other side of the detection mechanism is connected to the interior of the drying bin through an air outlet pipe and an air outlet; The circulation fan can drive the dry air inside the drying chamber to enter the air inlet duct from the air inlet, and then return to the drying chamber through the detection mechanism, the air outlet duct and the air outlet. The dehumidification mechanism can absorb part of the water vapor in the dry air entering the air inlet duct. The detection mechanism can drive the transmission mechanism to adjust the efficiency of the dehumidification mechanism in absorbing water vapor according to the water vapor content in the entering dry air.

2. A drying device according to claim 1, characterized in that: The dehumidification mechanism comprises a dehumidification shell, the outside of the dehumidification shell is fixedly connected to a port of the air inlet pipe, a hydraulic rod is fixedly installed on the inner side wall of the dehumidification shell, the movable end of the hydraulic rod is rotatably connected to the upper rotating shaft, a sleeve rotating rod is movably installed inside the dehumidification shell, a middle connecting sleeve is fixedly installed outside the sleeve rotating rod, a lower rotating shaft is slidably installed at the bottom of the middle connecting sleeve, and a water vapor absorption rod is rotatably connected to the outside of the lower rotating shaft; The top of the middle connecting sleeve is slidably connected to the upper rotating shaft, and the bottom of the middle connecting sleeve is slidably connected to the lower rotating shaft.

3. A drying device according to claim 2, characterized in that: One end of the water vapor absorption rod is connected to the movable end of the hydraulic rod through the lower rotating shaft, the middle connecting sleeve and the upper rotating shaft, and the other end of the water vapor absorption rod passes through the dehumidification shell and extends into the interior of the air inlet pipe; The bottom of the dehumidification shell is a circular structure, and the outside of the water vapor absorption rod is in contact with the bottom of the dehumidification shell.

4. A drying device according to claim 3, characterized in that: The front and rear sides of the middle connecting sleeve are movably installed inside the dehumidifier shell through a sleeve rotating rod. The front and rear sides of the dehumidifier shell are provided with sliding grooves. Both ends of the sleeve rotating rod pass through the sliding grooves on the dehumidifier shell. The sleeve rotating rod on the rear side of the middle connecting sleeve is movably connected to the transmission mechanism.

5. A drying device according to claim 1, characterized in that: The detection mechanism comprises a buffer chamber, one side of the buffer chamber is provided with an air inlet connection port, the other side of the buffer chamber is provided with an air outlet connection port, a detection cylinder is fixedly installed on the top of the buffer chamber, a detection piston is slidably installed inside the detection cylinder, a telescopic sleeve is fixedly connected to the top of the detection piston, a detection spring is fixedly installed on the top of the telescopic sleeve, and a detection connecting rod is slidably installed inside the telescopic sleeve; The two sides of the buffer chamber are respectively connected with the air inlet pipe and the air outlet pipe through the air inlet connecting port and the air outlet connecting port.

6. A drying device according to claim 5, characterized in that: One end of the detection connecting rod is slidably mounted inside the telescopic sleeve, the other end of the detection connecting rod is fixedly connected to the device body, one end of the detection spring is fixedly connected to the top of the telescopic sleeve, and the other end of the detection spring is fixedly connected to the fixed end of the detection connecting rod; The outside of the detection piston fits with the inside of the detection cylinder, the top of the detection piston is slidably connected with the detection connecting rod through a telescopic sleeve, and a transmission mechanism is installed on the outside of the telescopic sleeve.

7. A drying device according to claim 6, characterized in that: The transmission mechanism comprises a transmission connecting seat and a limit rotating disk, the transmission connecting seat is fixedly installed on the outside of the telescopic sleeve, the limit rotating disk is fixedly connected to one end of the sleeve rotating rod extending out of the dehumidification housing, the top of the transmission connecting seat is fixedly installed with a transmission connecting rod, the top of the transmission connecting seat is fixedly installed with a sliding mounting bin, the interior of the sliding mounting bin is fixedly installed with a buffer spring, the top of the buffer spring is fixedly connected with a transmission connecting block, the top of the transmission connecting block is fixedly connected with a limit housing, the interior of the limit housing is provided with a limit sliding groove, the interior of the limit housing is slidably installed with a translation limit plate, a transmission block is fixedly installed on one side of the translation limit plate, a rotation limit block is fixedly installed on the side of the limit rotating disk, and the translation limit block is fixedly installed on the outside of the limit rotating disk; The exteriors of the transmission connection seat and the limiting shell are both in contact with the exterior of the dehumidification shell.

8. A drying device according to claim 7, characterized in that: The top of the transmission connection seat is transmission-connected to the transmission block outside the translation limit plate through a transmission connection rod, and there is a movable space at the connection between the transmission connection rod and the transmission block; The top of the transmission connection seat is movably connected to the limit housing through a buffer spring and a transmission connection block, and the transmission connection block is slidably installed inside the sliding installation bin through the buffer spring.

9. A drying device according to claim 8, characterized in that: The translation limit plate is slidably mounted inside the limit housing through a transmission block, the transmission block outside the translation limit plate passes through the limit slide groove on the limit housing and is transmission-connected to the transmission connecting rod, and the side where the translation limit plate and the translation limit block are clamped is a stepped structure; The top and bottom of the limit turntable are planar structures and are slidably connected to the inside of the limit shell. The top of the limit shell is provided with an arc-shaped protrusion, and the limit turntable is clamped with the arc-shaped protrusion on the top of the limit shell through a rotating limit clamping block on the side.

10. A drying device and a drying method for producing a polyimide film, using the drying device as claimed in any one of claims 1 to 9.

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