Furnace door device capable of preventing particulate matter from being generated

Abstract

The invention discloses a furnace door device capable of preventing particulate matter from being generated. The furnace door device comprises a protective sleeve, a fixing piece and a furnace door, and the fixing piece penetrates through the protective sleeve to be fixed to the furnace door. The furnace door comprises a supporting disc and a cover plate. A plurality of first through holes which are uniformly distributed are formed in the edge of the surface of the supporting disc; each first through hole is a coaxial two-step stepped hole and comprises a first stepped hole and a second stepped hole which are coaxially communicated, and the diameter of the first stepped hole is larger than that of the second stepped hole; and the cover plate is arranged at the bottom end of the furnace tube equipment and is coaxially placed above the supporting disc. The protective sleeve is made of PTFE materials, is of a hollow cylindrical structure and is arranged in the first stepped hole. The fixing piece sequentially penetrates through the protective sleeve and the second stepped hole to be fixedly connected with the cover plate. According to the device, the problem of abnormal metal friction between the fixing piece and the supporting disc is effectively reduced, particulate matter is prevented from being generated, and the yield of products is increased.

Description

Technical Field

[0001] The invention relates to the field of semiconductor equipment manufacturing, and in particular to a furnace door device for preventing particle generation. Background Art

[0002] The semiconductor furnace tube process is an indispensable part of the semiconductor manufacturing process, which mainly includes steps such as thermal oxidation, diffusion and deposition. By heating the silicon wafer to a high temperature, the surface of the silicon wafer reacts with oxygen to form a silicon oxide film; by introducing impurities (such as phosphorus, boron, etc.) into the semiconductor material to change its electrical properties; and by chemical vapor deposition (CVD) and physical vapor deposition (PVD) to deposit a thin film on the surface of the silicon wafer. Among them, most of the existing diffusion processes are carried out in a batch processing mode. The furnace door needs to be opened and closed many times during the production process, and the joints of the furnace door are prone to friction abnormalities as the number of opening and closing increases, and then generate particles (particles), resulting in excessive metal ion content in the product, affecting the product yield. Therefore, a furnace door device that prevents the generation of particles is needed. Summary of the invention

[0003] The object of the present invention is to provide a furnace door device for preventing the generation of particles, so as to avoid the generation of particles due to abnormal metal friction at the connection of the furnace door after the furnace door is opened and closed many times.

[0004] In order to achieve the above object, the present invention provides a furnace door device for preventing the generation of particulate matter, comprising: a protective cover, a fixing member, and a furnace door, wherein the fixing member passes through the protective cover and is fixed on the furnace door;

[0005] The furnace door comprises:

[0006] A support plate, wherein a plurality of evenly distributed first through holes are provided at the edge of the surface of the support plate; each of the first through holes is a coaxial two-step stepped hole, comprising a coaxially connected first step hole and a second step hole, wherein the diameter of the first step hole is greater than the diameter of the second step hole;

[0007] A cover plate, arranged at the bottom end of the furnace tube device and coaxially placed above the support plate;

[0008] The protective sleeve is made of PTFE material and is a hollow cylindrical structure, and is arranged in the first stepped hole; a second through hole is provided at the top of the protective sleeve, and the diameter of the second through hole is larger than the diameter of the fixing piece and smaller than the diameter of the second stepped hole of the support plate, so that the fixing piece can pass through the second through hole;

[0009] The fixing piece passes through the protective sleeve and the second stepped hole in sequence and is fixedly connected to the cover plate.

[0010] Optionally, the outer diameter of the protective sleeve is the same as the diameter of the first stepped hole, and the height of the protective sleeve is greater than or equal to the height of the first stepped hole.

[0011] Optionally, the surface of the cover plate is provided with a plurality of evenly distributed fixing holes corresponding to the first through holes of the support plate;

[0012] The inner wall of each fixing hole is provided with a thread; the top of the fixing piece is provided with a thread structure, and matches the thread of the inner wall of the fixing hole; the fixing piece is fixedly connected to the cover plate through the thread structure.

[0013] Optionally, the furnace door further comprises a plurality of springs which are evenly arranged at the edge of the support plate, and two ends of each spring are respectively connected to the cover plate and the support plate.

[0014] Optionally, the furnace door further comprises a support arm, one end of which is connected to the support plate, and the other end of which is connected to the cylinder to control the lifting and lowering of the support plate.

[0015] Optionally, the cover plate diameter is larger than the support plate diameter.

[0016] Optionally, a first boss is provided at the bottom end of the fixing member, and the first boss is arranged in the first stepped hole of the supporting plate, and the diameter of the first boss is smaller than the diameter of the first stepped hole and larger than the diameter of the second stepped hole.

[0017] Optionally, a second boss is provided on the lower surface of the threaded structure of the fixing member to limit the depth of the top end of the fixing member inserted into the fixing hole of the cover plate.

[0018] Optionally, the top end of the fixing member passes through the protective sleeve and the second stepped hole of the support plate in sequence, and moves along the threaded structure of the inner wall of the fixing hole of the cover plate until the second boss contacts the lower surface of the cover plate, thereby fixing the support plate and the cover plate together.

[0019] Compared with the prior art, the technical solution of the present invention has at least the following beneficial effects:

[0020] The present invention provides a PTFE protective cover between the fixing part and the through hole of the supporting plate, thereby effectively reducing the problem of abnormal metal friction between the fixing part and the supporting plate, preventing the generation of particulate matter, and improving the yield of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic structural diagram of a furnace door device for preventing the generation of particulate matter according to the present invention.

[0022] Figure 2 for Figure 1 Cross-section view at AA in the middle.

[0023] Figure 3 for Figure 2A partial enlarged view of .

[0024] Figure 4 This is a diagram showing the experimental results of the existing furnace door device.

[0025] Figure 5 This is a diagram showing the experimental results of using the furnace door device of the present invention for preventing the generation of particulate matter.

[0026] In the figure, 1-furnace door, 2-fixing part, 3-protective cover, 5-granular material, 11-support arm, 12-cover plate, 13-spring, 14-support plate, 15-cylinder, 21-first boss, 22-second boss, 41-first stepped hole, 42-second stepped hole. DETAILED DESCRIPTION

[0027] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] like Figure 1 As shown, the furnace door device for preventing the generation of particles of the present invention comprises: a protective cover 3, a fixing member 2, and a furnace door 1. The fixing member 2 passes through the protective cover 3 and is fixed on the furnace door 1.

[0031] like Figure 1 and Figure 2As shown, the furnace door 1 includes: a support arm 11, a cover plate 12, a plurality of springs 13 and a support plate 14. The cover plate 12 is a disc structure, which is arranged at the bottom end of the furnace tube equipment and is used to seal the furnace tube equipment. The support plate 14 is a disc structure, which is arranged below the cover plate 12 and is coaxially placed with the cover plate 12, and the diameter of the support plate 14 is smaller than the diameter of the cover plate 12. A plurality of springs 13 are evenly arranged at the edge of the support plate 14, and the two ends of each spring 13 are respectively connected to the cover plate 12 and the support plate 14, which can buffer the movement of the cover plate 12 and keep the cover plate 12 stable. One end of the support arm 11 is connected to the support plate 14, and the other end is connected to the cylinder 15 to control the lifting and lowering of the support plate 14.

[0032] Specifically, a plurality of evenly distributed first through holes are provided at the edge of the surface of the support plate 14; each of the first through holes is a coaxial two-step stepped hole, including a coaxially connected first step hole 41 and a second step hole 42, and the diameter of the first step hole 41 is larger than the diameter of the second step hole 42. The fixing member 2 can pass through the first step hole 41 and the second step hole 42 in sequence.

[0033] like Figure 3 As shown, a first boss 21 is provided at the bottom end of the fixing member 2. The first boss 21 is fixed in the first step hole 41 when the furnace door 1 is in a stationary state, and its diameter is smaller than the diameter of the first step hole 41 and larger than the diameter of the second step hole 42, so that it can limit the maximum stretching length of the spring 13.

[0034] The top surface of the fixing member 2 is provided with a threaded structure, and the lower surface of the threaded structure of the fixing member 2 is provided with a second boss 22. The surface of the cover plate 12 is provided with a plurality of evenly distributed fixing holes corresponding to the first through holes of the support plate 14, so that the top of the fixing member 2 can be inserted into the corresponding fixing hole. The inner wall of each fixing hole is provided with a thread, and matches the threaded structure of the top of the fixing member 2. After the fixing member 2 passes through the first stepped hole 41 and the second stepped hole 42 of the support plate 14 in sequence, it is inserted into the fixing hole of the cover plate 12 along the inner wall of the fixing hole until the second boss 22 contacts the lower surface of the cover plate 12, thereby limiting the depth of the fixing member 2 inserted into the fixing hole.

[0035] The protective sleeve 3 is a hollow cylindrical structure made of PTFE (polytetrafluoroethylene) material. The PTFE material has the characteristics of high temperature resistance and high lubricity, and can withstand the high surface temperature of the furnace tube equipment (lower than 250°C). At the same time, the surface is smooth and not easy to fall off. The protective sleeve 3 is arranged between the first boss 21 of the fixing member 2 and the first stepped hole 41 of the support plate 14. Its outer diameter is the same as the diameter of the first stepped hole 41, and its height is greater than or equal to the height of the first stepped hole 41, so that the protective sleeve 3 is fixed on the first stepped hole 41, completely isolating the first boss 21 of the fixing member 2 and the inner wall of the first stepped hole 41, and preventing the fixing member 2 and the inner wall of the first stepped hole 41 from colliding and rubbing to produce particles. A second through hole is provided at the top of the protective sleeve 3, and the diameter of the second through hole is greater than the diameter of the fixing member 2 and smaller than the second stepped hole 42 of the support plate 14, so that the fixing member 2 can pass through the second through hole.

[0036] When connecting the support plate 14 and the cover plate 12, the top end of the fixing member 2 passes through the protective cover 3 and the second stepped hole 42 of the support plate 14 in turn, and moves upward along the threaded structure on the inner wall of the fixing hole of the cover plate 12, finally fixing the support plate 14 and the cover plate 12 together.

[0037] When the furnace door 1 of the furnace tube equipment is closed, the cylinder 15 drives the support arm 11 to complete the upward movement, and drives the support plate 14 to move upward. Due to the inertia, the position of the cover plate 12 has not moved at this time, so that the spring 13 is compressed, and at the same time, the support plate 14 and the protective cover 3 in the first stepped hole 41 of the support plate 14 move upward along the fixing member 2; because the cylinder 15 drives the support arm 11 to continue to move upward, it drives the cover plate 12 to move upward; when the cover plate 12 moves to the bottom of the furnace tube equipment, the cylinder 15 ends the upward movement of the support arm 11, and at this time the support plate 14 ends the upward movement and provides an upward supporting force for the spring 13, and the spring 13 is no longer compressed by the inertia of the cover plate 12 and rebounds to recover; as the spring 13 recovers, it drives the cover plate 12 to move upward, completing the closing of the furnace door 1, and at the same time, the first boss 21 of the fixing member 2 moves up and resets along the inner wall of the first stepped hole 41.

[0038] When the furnace door 1 of the furnace tube equipment is opened, the cylinder 15 drives the support arm 11 to complete the downward movement, and drives the support plate 14 to move downward. Due to the inertia, the position of the cover plate 12 is not moved at this time, so that the spring 13 is stretched, and at the same time, the support plate 14 and the protective cover 3 in the first stepped hole 41 thereof move downward along the fixing member 2, and the first boss 21 plays a limiting role in the maximum stretching degree of the spring 13 in the first stepped hole 41; because the cylinder 15 drives the support arm 11 to continue to move downward, the cover plate 12 is driven to move downward; when the cylinder 15 completes the downward movement, the support plate 14 ends the downward movement and remains stationary, providing a downward pulling force for the spring 13, and the spring 13 is no longer stretched by the inertia of the cover plate 12 and rebounds to recover; as the spring 13 recovers, it drives the cover plate 12 to move downward, completing the opening of the furnace door 1, and at the same time, the first boss 21 of the fixing member 2 moves downward along the inner wall of the first stepped hole 41 to reset.

[0039] The furnace door device described in the present invention sets the protective cover 3 between the first stepped hole 41 and the fixing member 2. During the process of opening or closing the furnace door 1, it can effectively prevent the friction between the first boss 21 of the fixing member 2 and the first stepped hole 41 of the support plate 14 from causing particles to be generated due to the change in relative position, thereby improving the yield of the product.

[0040] The particle collection device was placed under the furnace door 1 to verify the particle prevention effect of the furnace door device of the present invention. The existing furnace door device and the furnace door device of the present invention were used to complete 3000 sets of furnace door 1 opening and closing actions. The experimental results were as follows: Figure 4 and Figure 5 As shown, it is obvious that the present invention can significantly reduce the generation of particulate matter compared with the prior art.

[0041] In summary, the present invention effectively reduces the problem of abnormal metal friction between the fixing part and the supporting plate by providing a PTFE material protective cover between the fixing part and the through hole of the supporting plate, prevents the generation of particulate matter, and improves the yield of the product.

[0042] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A furnace door device for preventing the generation of particulate matter, characterized in that: include: A protective cover, a fixing piece, and a furnace door, wherein the fixing piece passes through the protective cover and is fixed on the furnace door; The furnace door comprises: A support plate, wherein a plurality of evenly distributed first through holes are provided at the edge of the surface of the support plate; each of the first through holes is a coaxial two-step stepped hole, comprising a coaxially connected first step hole and a second step hole, wherein the diameter of the first step hole is greater than the diameter of the second step hole; A cover plate, arranged at the bottom end of the furnace tube device and coaxially placed above the support plate; The protective sleeve is made of PTFE material and is a hollow cylindrical structure, and is arranged in the first stepped hole; a second through hole is provided at the top of the protective sleeve, and the diameter of the second through hole is larger than the diameter of the fixing piece and smaller than the diameter of the second stepped hole of the supporting plate, so that the fixing piece can pass through the second through hole; The fixing piece passes through the protective sleeve and the second stepped hole in sequence and is fixedly connected to the cover plate.

2. The furnace door device for preventing particle generation according to claim 1, characterized in that: The outer diameter of the protective sleeve is the same as the diameter of the first stepped hole, and the height of the protective sleeve is greater than or equal to the height of the first stepped hole.

3. The furnace door device for preventing particle generation according to claim 1, characterized in that: The surface of the cover plate is provided with a plurality of evenly distributed fixing holes corresponding to the first through holes of the support plate; The inner wall of each fixing hole is provided with a thread; the top of the fixing piece is provided with a thread structure, and matches the thread of the inner wall of the fixing hole; the fixing piece is fixedly connected to the cover plate through the thread structure.

4. The furnace door device for preventing particle generation according to claim 3, characterized in that: The furnace door further comprises a plurality of springs which are evenly arranged at the edge of the support plate, and the two ends of each spring are respectively connected to the cover plate and the support plate.

5. The furnace door device for preventing particle generation according to claim 4, characterized in that: The furnace door also includes a support arm, one end of which is connected to the support plate, and the other end is connected to the cylinder to control the lifting of the support plate.

6. The furnace door device for preventing particle generation according to claim 4, characterized in that: The diameter of the cover plate is greater than the diameter of the support plate.

7. The furnace door device for preventing particle generation according to claim 4, characterized in that: A first boss is provided at the bottom end of the fixing member. The first boss is arranged in the first stepped hole of the supporting plate. The diameter of the first boss is smaller than the diameter of the first stepped hole and larger than the diameter of the second stepped hole.

8. The furnace door device for preventing particle generation according to claim 4, characterized in that: A second boss is provided on the lower surface of the threaded structure of the fixing piece to limit the depth of the top end of the fixing piece inserted into the fixing hole of the cover plate.

9. The furnace door device for preventing particle generation according to claim 8, characterized in that: The top end of the fixing member passes through the protective sleeve and the second stepped hole of the support plate in turn, and moves along the threaded structure on the inner wall of the fixing hole of the cover plate until the second boss contacts the lower surface of the cover plate, thereby fixing the support plate and the cover plate together.

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