Electrostatic dissipative polyether-ether-ketone composition
Through electrostatic dissipation of polyether ether ketone compositions, including polyether ether ketone resin, multi-wall carbon nanotubes and conductive micropowders, the problem of poor surface resistivity and effect in the semiconductor process is solved, and the problem of poor surface resistivity and effect is achieved through twin-screw extrusion processing. It has stable resistivity and smooth surfaces to prevent static electricity accumulation and frictional damage.
Patent Information
- Application Number
- CN202310798986.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-06-30
- Publication Date
- 2024-12-31
AI Technical Summary
It is difficult for existing polyether ether ketone resins to achieve stable surface resistivity and good surface effects in semiconductor manufacturing, resulting in the problems of static accumulation and frictional damage.
The electrostatic dissipative polyether ether ketone composition is adopted, including polyether ether ketone resin, multi-walled carbon nanotubes, conductive micropowders (such as conductive carbon black, conductive graphite, ground carbon fiber), triphenyl phosphite, lead dioxide, The product with stable surface resistivity is prepared by double screw extrusion processing and granulation.
The product's stable surface resistivity 106-109 is achieved, the electrostatic dissipation function is achieved, and the surface is smooth and free of pitting, reducing frictional damage.
Smart Images
Figure CN119220048A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of resin processing, and in particular to an electrostatic dissipative polyetheretherketone composition. Background Art
[0002] High-temperature resins based on polyetheretherketone have excellent chemical resistance, processability and heat resistance, making them suitable for various tools in semiconductor processes with high performance requirements, such as wafer boxes, mask clips, mask boxes, etc. In semiconductor processes, this type of tooling requires: (1) stable surface resistivity of 10 6 ~10 9 , achieving the function of static dissipation and preventing the chip from being damaged due to static electricity accumulation; (2) at the same time, the surface effect is required to be good, smooth and without pitting, so that the friction with the contacting objects during use is small and not easy to be damaged. Therefore, the art urgently needs to produce a polyetheretherketone composition with improved surface effect and stable surface resistivity. Summary of the invention
[0003] In view of the deficiencies in the prior art, the present invention provides an electrostatic dissipative polyetheretherketone composition. The product made from the polyetheretherketone composition has a smooth surface without pitting and a stable surface resistivity.
[0004] The above technical objectives of the present invention are achieved through the following technical solutions:
[0005] An electrostatic dissipative polyetheretherketone composition comprises the following substances in parts by weight: 90-95 parts of polyetheretherketone resin, 2-5 parts of carbon nanotubes, 3-8 parts of conductive micropowder, 1-3 parts of triphenyl phosphite and 1-3 parts of lead dioxide.
[0006] The present invention is further configured as follows: the carbon nanotubes are multi-walled carbon nanotubes.
[0007] The present invention is further configured as follows: the conductive micropowder is one or more of conductive carbon black, conductive graphite, and ground carbon fiber.
[0008] The present invention is further configured to include the following substances in parts by weight: 90 parts of polyetheretherketone resin, 2 parts of carbon nanotubes, 8 parts of conductive micropowder, 3 parts of triphenyl phosphite, and 3 parts of lead dioxide.
[0009] The present invention is further configured as follows: the polyetheretherketone resin is added to the extruder from the upstream main feeding port of the extruder; and the carbon nanotubes, conductive micropowder, triphenyl phosphite and lead dioxide are added to the extruder through a screw side feeder.
[0010] The present invention is further configured as follows: the polyetheretherketone composition is obtained by twin-screw extrusion processing and granulation, and the twin-screw aspect ratio is 40:1 to 48:1.
[0011] The present invention is further configured as follows: the polyetheretherketone resin is added to the extruder from the upstream main feeding port of the extruder; and the carbon nanotubes, conductive micropowder, triphenyl phosphite and lead dioxide are added to the extruder through a screw side feeder.
[0012] The present invention has the following advantages:
[0013] 1. The product made of the composition of the present invention has a stable surface resistivity of 10 6 ~10 9 , to achieve the function of static dissipation.
[0014] 2. The product made from the composition of the present invention has good surface effect and is smooth without pitting. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 Schematic diagram of detection points on the surface of the test sample in the embodiments and comparative examples of the present application; DETAILED DESCRIPTION
[0016] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.
[0017] An electrostatic dissipative polyetheretherketone composition comprises the following substances: polyetheretherketone resin, carbon nanotubes, conductive micropowder, triphenyl phosphite, and lead dioxide, wherein the carbon nanotubes are multi-walled carbon nanotubes, and the conductive micropowder is one or more of conductive carbon black, conductive graphite, and ground carbon fiber.
[0018] The polyetheretherketone composition is obtained by twin-screw extrusion and granulation, and the twin-screw aspect ratio is 40:1 to 48:1. In the following examples and comparative examples, the extruder used for extrusion is a Coperion STS35 machine, which is specifically set to 40:1. The rotation speed is 300rpm; the extrusion processing temperature is 380-420℃, and the output is 30 kg / hour. Among them, the polyetheretherketone is added from the upstream main feeding port, and the carbon nanotubes, triphenyl phosphite, lead dioxide and the remaining carbon materials are mixed evenly, and then fed from the downstream side. Then extrusion granulation is performed to obtain a polyetheretherketone composition.
[0019] Sample preparation:
[0020] After the polyetheretherketone composition was dried in an oven at 150°C for 4 hours, a 150*150*3mm sample was prepared by injection molding, and then the surface resistivity of the sample was tested. Among them, (1) a PRS-801 resistance tester was used, and the joint was a multi-point joint. (2) A total of 9 points on the sample were taken to test the surface resistivity, see Figure 1 , 9 points are evenly distributed on the sample.
[0021]
[0022]
[0023] In summary, the composition prepared by the technical solution of the present application has a stable surface resistivity of 10 6 ~10 9 , achieving the function of static dissipation, preventing the chip from being damaged due to static electricity accumulation; at the same time, the surface effect is good, smooth and without pitting, so that there is little friction with the contacting objects during use and it is not easy to be damaged.
[0024] The raw materials and models in the examples and comparative examples of the present application are as follows:
[0025] Polyetheretherketone resin, 450G, Victrex
[0026] Carbon nanotubes, NC7000, Nanocyl, Belgium
[0027] Conductive carbon black, Ensaco 250G, Yiruishi
[0028] Milled carbon fiber, C30 M150 UNS, SGL
[0029] Conductive graphite, Timrex KS15, Yiruishi
[0030] Triphenyl phosphite, Nordina
[0031] Lead dioxide, new energy
[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the purpose and scope of the technical solution of the present invention, which should be included in the scope of the claims of the present invention.
Claims
1. An electrostatic dissipative polyetheretherketone composition, characterized in that: The invention comprises the following substances in parts by weight: 90-95 parts of polyetheretherketone resin, 2-5 parts of carbon nanotubes, 3-8 parts of conductive micro powder, 1-3 parts of triphenyl phosphite and 1-3 parts of lead dioxide.
2. An electrostatic dissipative polyetheretherketone composition according to claim 1, characterized in that: The carbon nanotubes are multi-walled carbon nanotubes.
3. The electrostatic dissipative polyetheretherketone composition according to claim 1, characterized in that: The conductive micro powder is one or more of conductive carbon black, conductive graphite, and ground carbon fiber.
4. The electrostatic dissipative polyetheretherketone composition according to claim 1, characterized in that: The invention comprises the following substances in parts by weight: 90 parts of polyetheretherketone resin, 2 parts of carbon nanotubes, 8 parts of conductive micropowder, 3 parts of triphenyl phosphite and 3 parts of lead dioxide.
5. The electrostatic dissipative polyetheretherketone composition according to claim 1, characterized in that: The polyetheretherketone resin is added into the extruder from the upstream main feeding port of the extruder; the carbon nanotubes, conductive micropowder, triphenyl phosphite and lead dioxide are added into the extruder through a screw side feeder.
6. An electrostatic dissipative polyetheretherketone composition as described in claims 1-5, characterized in that: The polyetheretherketone composition is obtained by twin-screw extrusion processing and granulation, and the length-to-diameter ratio of the twin-screw is 40:1 to 48:
1.
7. An electrostatic dissipative polyetheretherketone composition according to claim 6, characterized in that: The polyetheretherketone resin is added into the extruder from the upstream main feeding port of the extruder; the carbon nanotubes, conductive micropowder, triphenyl phosphite and lead dioxide are added into the extruder through a screw side feeder.