Probe head of vertical probe card and preparation method thereof

Abstract

The invention discloses a probe head of a vertical probe card and a preparation method thereof. The probe head comprises a first upper cover plate which is provided with a plurality of first probe holes; the second upper cover plate is connected to the first upper cover plate and is provided with a plurality of second probe holes; the first spacing plate is connected to the second upper cover plate and is provided with a first window, and the first window is used for enabling the probe to extend downwards; the lower cover plate is connected to the first spacing plate and is provided with a plurality of third probe holes, and the fastener is used for detachably connecting the first upper cover plate, the second upper cover plate and the first spacing plate; the probe head has a probe insertion state and a working state, and in the probe insertion state, the first probe hole, the second probe hole and the third probe hole are aligned one by one; in a working state, the first probe hole, the second probe hole and the third probe hole are staggered along the horizontal direction. According to the scheme, the positioning accuracy of the probe of the probe card and each PAD point on the chip can be improved.

Description

Technical Field

[0001] The invention relates to the technical field of probe cards, in particular to a probe head of a vertical probe card and a preparation method thereof. Background Art

[0002] The probe card is a key component in the chip testing process. It is the interface between the tester and the chip under test. It is mainly responsible for the electrical performance test before the chip is packaged, screening out bad chips, preventing bad chips from flowing into the chip packaging process, and reducing chip manufacturing costs. Currently, the probe cards on the market mainly include cantilever probe cards, vertical probe cards, and thin film probe cards. Among them, the vertical probe card is mainly used for the testing of SOC chips, and the probe head (PH) is one of the core components of the vertical probe card.

[0003] The probe head usually includes an upper cover plate, a lower cover plate and multiple probes, wherein the upper cover plate and the lower cover plate are used to support and position the probes, and then connected to other components of the probe card through the upper cover plate or the lower cover plate. The probe head is a very precise mechanical product, wherein the coordination between the MEMS probe and the pinhole on the cover plate needs to be controlled at the micron level. In some small-pitch probe card products, the gap between the probe and the pinhole is often only 2-3 microns. Therefore, how to ensure that the probe and the pinhole are properly coordinated, so as to ensure the precise positioning of the probe and the PAD point of the chip to be tested, is an issue that must be considered during the design and manufacturing of the probe head. Summary of the invention

[0004] In order to overcome the defects in the prior art, an embodiment of the present invention provides a probe head of a vertical probe card and a method for preparing the same, which are used to solve the above-mentioned problems.

[0005] The present application embodiment discloses: a probe head of a vertical probe card, comprising:

[0006] A first upper cover plate, wherein the first upper cover plate is provided with a plurality of first probe holes;

[0007] A second upper cover plate, connected to the first upper cover plate, the second upper cover plate being provided with a plurality of second probe holes;

[0008] A first partition plate is connected to a side of the second upper cover plate facing away from the first upper cover plate, the first partition plate is provided with a first window, and the first window is used for the probe to extend downward;

[0009] A lower cover plate is connected to a side of the first partition plate away from the second upper cover plate, and the lower cover plate is provided with a plurality of third probe holes.

[0010] A fastener, used for detachably connecting the first upper cover plate, the second upper cover plate and the first spacer plate;

[0011] The probe head of the vertical probe card has a pin insertion state and a working state. In the pin insertion state, the first probe hole, the second probe hole and the third probe hole are aligned one by one; in the working state, the first probe hole, the second probe hole and the third probe hole are misaligned in the horizontal direction.

[0012] Specifically, the fastener is a bolt, and the probe head also includes a second partition plate and a third partition plate located between the first upper cover plate and the first partition plate, the second partition plate is located on the side of the third partition plate facing the first upper cover plate, the second partition plate is provided with a second window corresponding to the first window, and the third partition plate is provided with a third window corresponding to the first window, the second upper cover plate is fixed to the third partition plate, the bolts are sequentially passed through the first upper cover plate, the second partition plate, the third partition plate and the first partition plate, and the heads of the bolts are located in the first upper cover plate and the second partition plate.

[0013] Specifically, the probe head further includes a fourth spacer plate, which is located between the second spacer plate and the third spacer plate and has a fourth window, the second upper cover plate is accommodated in the fourth window, and the bolt is passed through the fourth spacer plate.

[0014] Specifically, the first upper cover plate, the second spacer plate and the fourth spacer plate are bonded together, and the second upper cover plate and the third spacer plate are bonded together.

[0015] Specifically, the first upper cover plate includes a main body and a plurality of first extensions, the plurality of first extensions are distributed on both sides of the main body in the length direction and / or width direction, the length and width dimensions of the main body are respectively smaller than the length and width dimensions of the first partition plate, the first extension is provided with a positioning hole, and the first partition plate is provided with a first avoidance hole corresponding to the positioning hole.

[0016] Specifically, the ratio of the total length of all first extension portions on the same side of the main body to the length of the side of the main body is less than or equal to 1 / 3.

[0017] Specifically, the second partition plate is provided with a second extension portion corresponding to the first extension portion, and the second extension portion is provided with a second avoidance hole; the third partition plate is provided with a third extension portion corresponding to the first extension portion, and the third extension portion is provided with a third avoidance hole; the fourth partition plate is provided with a fourth extension portion corresponding to the first extension portion, and the fourth extension portion is provided with a fourth avoidance hole.

[0018] The present application also discloses a method for preparing a probe head of a vertical probe card, comprising the following steps:

[0019] Processing a first probe hole on the first upper cover plate;

[0020] Processing a second probe hole on the second upper cover plate;

[0021] Processing a first window on the first partition plate;

[0022] A third probe hole is machined on the lower cover plate;

[0023] The first upper cover plate, the second upper cover plate, the first partition plate and the lower cover plate are connected in sequence by bolts, wherein the first probe hole, the second probe hole and the third probe hole are aligned one by one, and then the probes are inserted into the first probe hole, the second probe hole and the third probe hole in sequence;

[0024] The second upper cover plate and the lower cover plate are translated to preset positions in the horizontal direction respectively, so that the second probe hole and the third probe hole are respectively misaligned with the first probe hole.

[0025] Specifically, the step of "machining a first probe hole and a positioning hole on the first upper cover plate" also includes: machining bolt head holes for accommodating bolt heads on the first upper cover plate and the second partition plate, machining a second window on the second partition plate, machining a through hole for the bolt to pass through and a fourth window for accommodating the second cover plate on the fourth partition plate, and bonding the first upper cover plate, the second partition plate and the fourth partition plate.

[0026] Specifically, before the step of "machining a second probe hole on the second upper cover plate", it also includes: machining a third window on the third partition plate, machining pin holes for bonding and positioning on the third partition plate and the second upper cover plate, bonding the second upper cover plate to the third partition plate and positioning it through a second positioning pin, and machining a threaded hole on the third partition plate for connecting with the bolt.

[0027] The present invention has at least the following beneficial effects:

[0028] 1. The probe head of this embodiment can be provided with some mutually cooperating limiting posts and limiting holes on the first upper cover plate, the second upper cover plate (or the third spacer plate) and the lower cover plate, so that the first probe hole, the second probe hole and the third probe hole can be horizontally offset to a preset position after the pin insertion is completed, so that all probes can be offset in the same direction, which is convenient for the positioning of the probes, and further facilitates the precise positioning of the probes of the probe card and the PAD points on the chip.

[0029] 2. The first upper cover plate, the second partition plate and the fourth partition plate are bonded together, and countersunk holes for accommodating the bolt heads are processed on the first upper cover plate and the second partition plate, so that the plate thickness is sufficient to cover the bolt heads while thinning the first upper cover plate.

[0030] 3. Pin holes for bonding and positioning are processed on the third partition plate and the second upper cover plate, and the positioning accuracy of the second upper cover plate and the third partition plate is ensured by the second positioning pin. After the second upper cover plate and the third partition plate are bonded together, the second probe hole is processed on the second upper cover plate, and the threaded hole for matching with the bolt is processed on the third partition plate, thereby ensuring the relative position accuracy between the second probe hole and the pin hole on the third partition plate.

[0031] 4. The probe head is positioned by cooperating the positioning hole on the first extension of the first upper cover plate with the first positioning pin in the sink groove of the connecting plate. On the one hand, the positioning accuracy of repeated assembly of the first upper cover plate and the connecting plate can be improved. On the other hand, the thickness of the step surface of the connecting plate can be retained to the greatest extent, thereby ensuring the connection strength between the connecting plate and the probe head and avoiding deformation of the probe card.

[0032] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 is a simplified structural schematic diagram of a probe head of a vertical probe card in an embodiment of the present invention;

[0035] Figure 2 is a schematic structural diagram of a probe head of a vertical probe card in an embodiment of the present invention (with the first upper cover plate facing upward);

[0036] Figure 3 is a schematic structural diagram of a probe head of a vertical probe card in an embodiment of the present invention (the lower cover plate is facing upward);

[0037] Figure 4 is a schematic structural diagram of a first upper cover plate in an embodiment of the present invention;

[0038] Figure 5 Schematic diagram of the structure of the connecting plate in an embodiment of the present invention.

[0039] The figure marks of the above drawings are: 1. first upper cover plate; 11. main body; 12. first extension portion; 121. positioning hole; 2. second upper cover plate; 3. first partition plate; 4. lower cover plate; 5. bolt; 6. second partition plate; 7. third partition plate; 8. fourth partition plate; 9. connecting plate; 91. step surface; 92. sink groove; 93. first positioning pin; probe, 10. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "fixed", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0042] In the present invention, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may include the first feature and the second feature being in direct contact, or may include the first feature and the second feature being in contact not directly but through another feature between them. Moreover, a first feature being “above”, “below”, and “above” a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature includes the first feature being below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0043] In the description of this embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application.

[0044] In addition, the terms "first", "second", etc. are only used to distinguish in description and have no special meaning.

[0045] Combination Figures 1 to 3As shown, the probe head of the vertical probe card of this embodiment mainly includes: a first upper cover plate 1, a second upper cover plate 2, a first spacer plate 3, a lower cover plate 4, a fastener, and of course, a probe 10. Among them, the first upper cover plate 1 is provided with a plurality of first probe holes for the probes 10 to pass through; the second upper cover plate 2 is connected to the lower side of the first upper cover plate 1, and is provided with a plurality of second probe holes; the first spacer plate 3 is connected to the side of the second upper cover plate 2 away from the first upper cover plate 1, and the first spacer plate 3 is provided with a first window, and the first window is used for the probe 10 to extend downward. The difference between the first window and the probe hole is that the aperture of the probe hole is similar to the needle diameter of the probe, and each probe hole is only for one probe 10 to pass through, while the first window is not used as a probe installation hole, and can be used for many probes 10 to pass through at the same time; the lower cover plate 4 is connected to the side of the first spacer plate 3 away from the second upper cover plate 2, and the lower cover plate 4 is provided with a plurality of third probe holes; the fastener is used to detachably connect the first upper cover plate 1, the second upper cover plate 2 and the first spacer plate 3.

[0046] After the above components are assembled, they are mounted on the connecting plate 9 and connected with other components of the probe card through the connecting plate 9. Specifically, the connecting plate 9 has a step surface 91, and the first spacer plate 3 is connected to the step surface 91.

[0047] The probe head of the vertical probe card of this embodiment has a pin insertion state and a working state. In the pin insertion state, a plurality of first probe holes, a plurality of second probe holes and a plurality of third probe holes are aligned one by one. In other words, in the pin insertion state, the axes of the first probe holes, the second probe holes and the third probe holes substantially coincide to ensure that the probes can be installed smoothly; in the working state, the first probe holes, the second probe holes and the third probe holes are offset in the horizontal direction. In this way, all the probes can be offset in the same direction, which is convenient for positioning the probes, and further facilitates the positioning of the probe card and each PAD point on the chip.

[0048] like Figure 1 As shown, the fastener of this embodiment is a bolt 5. During assembly, the head of the bolt 5 is located inside the first upper cover plate 1 and cannot protrude from the end of the first upper cover plate 1, and the rod is connected to the first partition plate 3 through a thread.

[0049] like Figure 1As shown, in order to meet the overall thickness requirements of the probe head and not increase the processing difficulty of the first probe hole of the first upper cover plate 1 (therefore, the thickness of the first upper cover plate 1 is not increased), the probe head of this embodiment also includes a second spacer 6 and a third spacer 7, the second spacer 6 and the third spacer 7 are both located between the first upper cover plate 1 and the first spacer 3, and the second spacer 6 is located on the side of the third spacer 7 facing the first upper cover plate 1, the second spacer 6 is provided with a second window corresponding to the first window, and the third spacer 7 is provided with a third window corresponding to the first window, and the functions of the second window and the third window are substantially the same as those of the first window. In order to avoid the overall thickness of the probe head being too large, it is possible to consider reducing the thickness of the first upper cover plate 1, but this will cause the problem that the bolt head protrudes from the first upper cover plate 1. In order to avoid the bolt head protruding from the first upper cover plate 1, a part of the countersunk hole for accommodating the bolt head can be extended into the second spacer 6, that is, a part of the bolt head is located in the first upper cover plate 1, and the other part is located in the second spacer 6. At the same time, the outer dimensions of the second upper cover plate 2 can be reduced so that the second upper cover plate 2 is fixed on the third partition plate 7 and located between the plurality of bolts 5. In other words, the second upper cover plate 2 is located in the space surrounded by the plurality of bolts 5. In this way, the bolts 5 do not need to pass through the second upper cover plate 2. Therefore, the thickness of the probe head does not include the thickness of the second upper cover plate 2. After assembly, the screw of the bolt 5 passes through the first upper cover plate 1, the second partition plate 6, the third partition plate 7 and the first partition plate 3 in sequence.

[0050] The probe head of this embodiment further comprises a fourth partition plate 8, which is located between the second partition plate 6 and the third partition plate 7 and has a fourth window. The second upper cover plate 2 is accommodated in the fourth window, and the bolt 5 is also passed through the fourth partition plate 8.

[0051] In order to improve the connection accuracy of each component, the first upper cover plate 1 and the second partition plate 6 are bonded to each other, preferably, the fourth partition plate 8 is also bonded to the second partition plate 6, and the second upper cover plate 2 and the third partition plate 7 are bonded. After the first upper cover plate 1, the second partition plate 6 and the fourth partition plate 8 are bonded, countersunk holes for accommodating bolt heads are processed on the three at the same time; after the second upper cover plate 2 and the third partition plate 7 are bonded, the second probe hole is processed on the second upper cover plate 2 and the threaded hole is processed on the third partition plate 7, so as to ensure the relative positioning accuracy between the second probe hole and the threaded hole.

[0052] like Figure 2 , Figure 3 and Figure 5As shown, the connecting plate 9 of the present embodiment is provided with a step surface 91 for connecting with the first spacer plate 3, and a first positioning pin 93 is provided on the step surface 91. During installation, the first positioning pin 93 is passed through the first upper cover plate 1 and the first spacer plate 3. The first upper cover plate 1 is located on the side of the first spacer plate 3 facing the step surface 91. In other words, the first upper cover plate 1 is closer to the step surface 91 than the first spacer plate 3. When a damaged probe needs to be replaced, the first spacer plate 3 and the first upper cover plate 1 need to be removed from the connecting plate 9 and reassembled after the replacement is completed. Repeated disassembly and assembly may lead to the risk of unstable probe position. Since the first upper cover plate 1 is mainly used for the installation and positioning of the probe, and the first spacer plate 3 is not provided with a probe hole for installing and positioning the probe, the position accuracy and stability of the probe and other components on the probe card can be improved by directly positioning the first upper cover plate 1 and the connecting plate 9. In view of this, Figure 4 As shown, the first upper cover plate 1 of the present embodiment includes a main body 11 and a plurality of first extensions 12, and the plurality of first extensions 12 are distributed on both sides of the main body 11 along the length direction and / or width direction of the main body 11. The first extension 12 is provided with a positioning hole 121, and the positioning hole 121 is used to connect with the first positioning pin 93 on the step surface 91. As mentioned above, the first positioning pin 93 is also penetrated on the first partition plate 3, so the first partition plate 3 is provided with a first avoidance hole for avoiding the first positioning pin 93. Preferably, the aperture of the first avoidance hole is larger than the aperture of the positioning hole 121. In other words, the first avoidance hole can play a positioning role without cooperating with the first positioning pin 93.

[0053] If the first extension 12 of the first upper cover plate 1 is directly stacked on the step surface 91 of the connecting plate 9, the total thickness of the connecting plate 9, the first upper cover plate 1 and the first partition plate 3 will be too large after assembly. In order to solve the above problem, a recessed groove 92 may be provided on the step surface 91 of the connecting plate 9 of this embodiment, and the first positioning pin 93 is provided in the recessed groove 92. During assembly, the first extension 12 of the first upper cover plate 1 is embedded in the recessed groove 92. That is, since the thickness of the connecting plate 9 used for connecting with the first upper cover plate 1 is reduced to form the recessed groove 92, the thickness of the assembly will not be additionally occupied when the first upper cover plate 1 is connected to the connecting plate 9. At the same time, in order to avoid the excessive reduction of the step surface 91 due to the excessive area of ​​the recessed groove 92 on the step surface 91 of the connecting plate 9, which in turn causes the step surface 91 to be insufficiently strong and thus causes the risk of deformation after connection with the probe head, the ratio of the total length of all the first extensions 12 on the same side of the first upper cover plate 1 to the length of the corresponding side of the main body 11 is less than or equal to 1 / 3. Specifically, if Figure 4As shown, one side of the main body 11 has an extension, and the ratio of the length of the connection between the extension and the main body 11 to the length of the main body 11 on this side is generally between 1 / 7 and 1 / 6. If there are multiple extensions on this side, the ratio of the sum of the lengths of the connection between the multiple extensions and the main body 11 to the length of the main body 11 on this side is less than or equal to 1 / 3. The shape of the sinking groove 92 on the step surface 91 is preferably contoured to the first extension 12, and the size is slightly larger than the first extension 12 to ensure that the two do not affect the fit, and the size of the sinking groove 92 should not be too larger than the first extension 12.

[0054] Preferably, the second partition plate 6 of the present embodiment may be provided with a second extension portion corresponding to the first extension portion 12, and the second extension portion is provided with a second avoidance hole; the third partition plate 7 is provided with a third extension portion corresponding to the first extension portion 12, and the third extension portion is provided with a third avoidance hole; the fourth partition plate 8 is provided with a fourth extension portion corresponding to the first extension portion 12, and the fourth extension portion is provided with a fourth avoidance hole. The apertures of the second avoidance hole, the third avoidance hole and the fourth avoidance hole are larger than the aperture of the positioning hole 121. Specifically, the size and shape of the second partition plate 6, the third partition plate 7 and the fourth partition plate 8 are substantially the same as those of the first upper cover plate 1, the shape and size of the second extension portion, the third extension portion and the fourth extension portion are the same as those of the first extension portion 12, and the sum of the thicknesses of the first extension portion 12, the second extension portion, the third extension portion and the fourth extension portion is equal to the thickness of the sink 92. By adopting the above solution, the strength of the connection between the first extension portion 12 and the sink 92 can be improved, and deformation of the first extension portion 12 can be avoided.

[0055] The method for preparing the probe head of the vertical probe card of this embodiment is as follows:

[0056] Step 1: Processing a first probe card and a positioning hole 121 on the first upper cover plate 1 .

[0057] Step 2: Process a second probe hole on the second upper cover plate 2 .

[0058] Step 3: Processing a first window on the first partition plate 3 .

[0059] Step 4: Process a third probe hole on the lower cover plate 4 .

[0060] Step 5: Use bolts 5 to connect the first upper cover plate 1, the second upper cover plate 2, the first partition plate 3 and the lower cover plate 4 in sequence, wherein the axes of the first probe hole, the second probe hole and the third probe hole are aligned one by one, and then the probes are inserted into the first probe hole, the second probe hole and the third probe hole in sequence.

[0061] Step 6: Horizontally translate the second upper cover plate 2 and the lower cover plate 4 to a preset position so that the second probe hole and the third probe hole are respectively misaligned with the first probe hole, and then tighten the bolt 5 .

[0062] The order of the above steps 1 to 4 may be disrupted.

[0063] In the above-mentioned step 1, after the first probe hole and the positioning hole 121 are processed on the first upper cover plate 1, the following steps are also included: bolt head holes (i.e., countersunk holes) for accommodating the heads of the bolts 5 are processed on the first upper cover plate 1 and the second partition plate 6, a second window is processed on the second partition plate 6, a fourth window and a through hole for the screw rod of the bolt 5 to pass through are processed on the fourth partition plate 8, and the first upper cover plate 1, the second partition plate 6 and the fourth partition plate 8 are bonded together.

[0064] Before the above-mentioned step 2, that is, before processing the second probe hole on the second upper cover plate 2, the following steps are also included: processing a third window on the third partition plate 7, processing pin holes for bonding and positioning on the third partition plate 7 and the second upper cover plate 2, bonding the second upper cover plate 2 to the third partition plate 7 and positioning it by the second positioning pin, and processing a threaded hole on the third partition plate 7 for connecting with the bolt 5.

[0065] In summary, the probe head of the vertical probe card and the manufacturing method thereof of this embodiment have the following advantages:

[0066] 1. The first upper cover plate 1, the second partition plate 6 and the fourth partition plate 8 are bonded together, and countersunk holes for accommodating the bolt heads are processed on the first upper cover plate 1 and the second partition plate 6, so that the plate thickness is sufficient to cover the bolt heads while the first upper cover plate 1 is thinned.

[0067] 2. After bonding the second upper cover plate 2 and the third partition plate 7 together, a second probe hole is processed on the second upper cover plate 2 and a threaded hole for matching with the bolt 5 is processed on the third partition plate 7, thereby ensuring the relative position accuracy between the second probe hole and the threaded hole.

[0068] 3. The probe head is positioned by cooperating the positioning hole 121 on the first extension portion 12 of the first upper cover plate 1 with the first positioning pin 93 in the recess 92 of the connecting plate 9. On the one hand, the positioning accuracy of repeated assembly of the first upper cover plate 1 and the connecting plate 9 can be improved. On the other hand, the thickness of the step surface 91 of the connecting plate 9 can be retained to the greatest extent, thereby ensuring the connection strength between the connecting plate 9 and the probe head and avoiding deformation of the probe card.

[0069] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A probe head of a vertical probe card, characterized in that: include: A first upper cover plate, wherein the first upper cover plate is provided with a plurality of first probe holes; A second upper cover plate, connected to the first upper cover plate, the second upper cover plate being provided with a plurality of second probe holes; A first partition plate is connected to a side of the second upper cover plate facing away from the first upper cover plate, the first partition plate is provided with a first window, and the first window is used for the probe to extend downward; A lower cover plate is connected to a side of the first partition plate away from the second upper cover plate, and the lower cover plate is provided with a plurality of third probe holes. A fastener, used for detachably connecting the first upper cover plate, the second upper cover plate and the first spacer plate; The probe head of the vertical probe card has a pin insertion state and a working state. In the pin insertion state, the first probe hole, the second probe hole and the third probe hole are aligned one by one; in the working state, the first probe hole, the second probe hole and the third probe hole are misaligned in the horizontal direction.

2. The probe head of the vertical probe card according to claim 1, characterized in that: The fastener is a bolt, and the probe head also includes a second partition plate and a third partition plate located between the first upper cover plate and the first partition plate, the second partition plate is located on the side of the third partition plate facing the first upper cover plate, the second partition plate is provided with a second window corresponding to the first window, and the third partition plate is provided with a third window corresponding to the first window, the second upper cover plate is fixed to the third partition plate, the bolts are sequentially passed through the first upper cover plate, the second partition plate, the third partition plate and the first partition plate, and the heads of the bolts are located in the first upper cover plate and the second partition plate.

3. The probe head of the vertical probe card according to claim 2, characterized in that: The probe head further includes a fourth spacer plate, which is located between the second spacer plate and the third spacer plate and has a fourth window. The second upper cover plate is accommodated in the fourth window, and the bolt is passed through the fourth spacer plate.

4. The probe head of the vertical probe card according to claim 3, characterized in that: The first upper cover plate, the second partition plate and the fourth partition plate are bonded together, and the second upper cover plate and the third partition plate are bonded together.

5. The probe head of the vertical probe card according to claim 3, characterized in that: The first upper cover plate includes a main body and a plurality of first extensions, wherein the plurality of first extensions are distributed on both sides of the main body in the length direction and / or the width direction, wherein the length and width dimensions of the main body are respectively smaller than the length and width dimensions of the first partition plate, and the first extension is provided with a positioning hole, and the first partition plate is provided with a first avoidance hole corresponding to the positioning hole.

6. The probe head of the vertical probe card according to claim 5, characterized in that: The ratio of the total length of all first extensions on the same side of the main body to the length of the side of the main body is less than or equal to 1 / 3.

7. The probe head of the vertical probe card according to claim 5, characterized in that: The second partition plate is provided with a second extension portion corresponding to the first extension portion, and the second extension portion is provided with a second avoidance hole; the third partition plate is provided with a third extension portion corresponding to the first extension portion, and the third extension portion is provided with a third avoidance hole; the fourth partition plate is provided with a fourth extension portion corresponding to the first extension portion, and the fourth extension portion is provided with a fourth avoidance hole.

8. A method for preparing a probe head of a vertical probe card, characterized in that: The following steps are involved: Processing a first probe hole on the first upper cover plate; Processing a second probe hole on the second upper cover plate; Processing a first window on the first partition plate; A third probe hole is machined on the lower cover plate; The first upper cover plate, the second upper cover plate, the first partition plate and the lower cover plate are connected in sequence by bolts, wherein the first probe hole, the second probe hole and the third probe hole are aligned one by one, and then the probes are inserted into the first probe hole, the second probe hole and the third probe hole in sequence; The second upper cover plate and the lower cover plate are translated to preset positions in the horizontal direction respectively, so that the second probe hole and the third probe hole are respectively misaligned with the first probe hole.

9. The method for preparing a probe head of a vertical probe card according to claim 8, characterized in that: The step of "machining a first probe hole and a positioning hole on the first upper cover plate" also includes: machining bolt head holes for accommodating bolt heads on the first upper cover plate and the second partition plate, machining a second window on the second partition plate, machining a through hole for the bolt to pass through and a fourth window for accommodating the second cover plate on the fourth partition plate, and bonding the first upper cover plate, the second partition plate and the fourth partition plate.

10. The method for preparing a probe head of a vertical probe card according to claim 8, characterized in that: Before the step of "machining a second probe hole on the second upper cover plate", it also includes: machining a third window on the third partition plate, machining pin holes for bonding and positioning on the third partition plate and the second upper cover plate, bonding the second upper cover plate to the third partition plate and positioning it through a second positioning pin, and machining a threaded hole on the third partition plate for connecting with the bolt.

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