Carrying table with reset mapping function

Abstract

The invention discloses a carrier with a reset mapping function, which relates to the field of semiconductor manufacturing and comprises a mapping support arranged on a reference platform and covered by a container. The mapping support is used for supporting and jacking wafers of different specifications; the shifting piece rod extends to the level of the container from the arc-shaped kidney-shaped hole in the reference platform; the rotating mechanism is used for driving the plectrum rod to move; the number of the shifting piece rods is at least four, the shifting piece rods are arranged in a circumferential array mode relative to the container, and the moving direction of the shifting piece rods is close to or far away from the container. According to the invention, fragments caused by manual carrying are reduced, the use space of equipment matched with the carrying platform is reduced through mapping integration, the chip conveying efficiency is improved, and the cost is reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a carrier with a reset mapping function. Background Art

[0002] At present, in the semiconductor manufacturing industry, the protrusion correction mechanism has been widely used. The protrusion correction mechanism operating device is mainly responsible for resetting the protrusions in the Cassette (container for wafers) of the semiconductor wafer to be processed.

[0003] Usually, the loading and unloading of Cassette (container for wafers) needs to be done manually, which is prone to convex pieces and will cause the risk of wafer fragments. Now, an automatic correction function is implemented;

[0004] Usually the MAPPING function is added to the ROBOT, which will affect the use of equipment space, make the equipment larger, and waste costs. Summary of the invention

[0005] The purpose of the present invention is to provide a carrier with a reset mapping function. Traditional carriers do not have automatic reset and automatic mapping functions and need to rely on other equipment to complete them, which affects efficiency.

[0006] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a carrier with a reset mapping function, comprising a mapping bracket arranged on a reference platform and covered by a container;

[0007] The mapping bracket is used to support wafers of different specifications;

[0008] Also includes:

[0009] A paddle rod extending from the arc-shaped waist hole on the reference platform to the level of the container;

[0010] A rotating mechanism for driving the paddle lever to move;

[0011] The number of the paddle rods is at least four, and they are arranged in a circular array about the container, and their movable directions are approaching or moving away from the container.

[0012] Preferably, the container is provided with avoidance grooves at two locations opposite to each other, and the avoidance grooves are used to enable the paddle rod moving toward the container to flexibly contact the wafer so as to be reset on the mapping bracket.

[0013] Preferably, the mapping bracket includes a hydraulic extension portion.

[0014] Preferably, the rotating mechanism comprises:

[0015] A rotating seat, on which a connecting handle is rotatably provided, and an end of the connecting handle is assembled with the paddle lever;

[0016] A driving motor is provided, wherein the driving motor rotates the four connecting handles through a synchronous belt.

[0017] Preferably, a movable groove is provided at the end of the connecting handle, a sliding block for fixing the paddle rod is slidably arranged in the movable groove, and the sliding block is pushed and held at the end of the movable groove by a blocking spring in the movable groove.

[0018] Preferably, it further comprises a transmission device which is coaxially fixedly connected with a transmission gear and a synchronous wheel, wherein the transmission gear on the transmission device is meshed with the passive gear on the connecting handle;

[0019] The synchronous belt is connected to the synchronous wheels of the two transmissions and the synchronous wheels on the two connecting handles.

[0020] Preferably, it further comprises a plurality of telescopic rods, the ends of the telescopic rods are provided with guide wheels, and the guide wheels are rollingly connected to the synchronous belt to keep it taut.

[0021] Preferably, it further comprises an equidistant spring, wherein the equidistant spring is sleeved on the telescopic rod so that the length of the telescopic rod in its default state is maximized.

[0022] Preferably, the paddle lever is covered with a silicone coat.

[0023] In the above technical solution, the present invention provides a carrier with a reset mapping function, which has the following beneficial effects: in order to realize the automatic convex film correction and automatic mapping functions of the carrier, the risk of film fragmentation is reduced, and the equipment space is saved. The film transfer efficiency is improved, and material resources and human resources are saved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0025] Figure 1 A schematic diagram of the overall structure provided for an embodiment of the present invention;

[0026] Figure 2 A schematic diagram of the mapping bracket and the paddle lever structure provided in an embodiment of the present invention;

[0027] Figure 3A schematic structural diagram of a rotating mechanism and a paddle lever provided in an embodiment of the present invention.

[0028] Description of reference numerals:

[0029] 1. Reference platform; 11. Arc waist hole; 2. Mapping bracket; 21. Hydraulic extension part; 3. Container; 31. Avoidance groove; 4. Paddle rod; 5. Rotation mechanism; 51. Rotation seat; 511 Connecting handle; 512. Movable groove; 513. Sliding block; 514. Stop spring; 515. Passive gear; 52. Driving motor; 53. Synchronous belt; 54. Transmission; 55. Telescopic rod; 56. Guide wheel; 57. Equidistant spring. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0031] like Figure 1-3 As shown, a stage with a reset mapping function includes a mapping bracket 2 disposed on a reference platform 1 and covered by a container 3 (the container 3 is fixedly mounted on the reference platform 1);

[0032] Mapping bracket 2 is used to support wafers of different specifications;

[0033] Also includes:

[0034] A paddle rod 4 extending from the arc-shaped waist hole 11 on the reference platform 1 to the level of the container 3;

[0035] A rotating mechanism 5 for driving the paddle lever 4 to move;

[0036] There are at least four paddle levers 4 , which are arranged in a circular array around the container 3 , and their movable directions are moving toward or away from the container 3 .

[0037] Furthermore, the container 3 is provided with avoidance grooves 31 at two locations opposite to each other, and the avoidance grooves 31 are used to enable the paddle rod 4 moving toward the container 3 to flexibly contact the wafer so as to be located at the mapping bracket 2 for reset.

[0038] Secondly, the mapping support 2 includes a hydraulic extension part 21. In the embodiment, the hydraulic extension part 21 can drive the wafers of different specifications placed on the mapping support 2 to move up and down in the container 3.

[0039] As an embodiment further provided by the present invention, the rotating mechanism 5 includes:

[0040] A rotating seat 51, on which a connecting handle 511 is rotatably provided, and an end of the connecting handle 511 is assembled with the paddle lever 4;

[0041] The driving motor 52 rotates the four connecting handles 511 through the synchronous belt 53 .

[0042] As another embodiment further provided by the present invention, a movable groove 512 is opened at the end of the connecting handle 511, and a sliding block 513 for fixing the paddle rod 4 is slidably arranged in the movable groove 512. The sliding block 513 is pushed and retained at the end of the movable groove 512 by a blocking spring 514 in the movable groove 512.

[0043] Specifically, in the embodiment, when the connecting handle 511 rotates, the paddle lever 4 moves in the arc-shaped waist hole 11 , and the paddle lever 4 moves synchronously in the movable groove 512 to adapt to the position change of the paddle lever 4 caused by the movement in the arc-shaped waist hole 11 .

[0044] As another embodiment further provided by the present invention, it also includes a transmission device 54 which is coaxially fixedly connected with a transmission gear and a synchronous wheel, and the transmission gear on the transmission device 54 is meshed with a driven gear 515 on the connecting handle 511;

[0045] The synchronous belt 53 is connected to the synchronous wheels of the two transmission devices 54 and the synchronous wheels on the two connecting handles 511 in driving connection.

[0046] As another embodiment further provided by the present invention, it also includes a plurality of telescopic rods 55, and guide wheels 56 are provided at the ends of the telescopic rods 55. The guide wheels 56 are rollingly connected to the synchronous belt 53 to keep it taut.

[0047] Secondly, it also includes an equidistant spring 57, which is sleeved on the telescopic rod 55 to maximize the length of the telescopic rod 55 in its default state.

[0048] As another embodiment further provided by the present invention, a silicone coat is provided on the paddle rod 4 to prevent the edge of the wafer from being damaged when the paddle rod 4 moves inward.

[0049] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A carrier with a reset mapping function, characterized in that: It comprises a mapping bracket (2) which is arranged on a reference platform (1) and is covered by a container (3); The mapping bracket (2) is used to support wafers of different specifications; Also includes: A plucking rod (4) extending from the arc-shaped waist hole (11) on the reference platform (1) to the level of the container (3); A rotating mechanism (5) for driving the paddle lever (4) to move; The number of the paddle rods (4) is at least four and they are arranged in a circular array about the circumference of the container (3), and their movable directions are moving towards or away from the container (3).

2. A carrier with a reset mapping function according to claim 1, characterized in that: The container (3) is provided with avoidance grooves (31) at two locations opposite to each other, and the avoidance grooves (31) are used to enable the paddle rod (4) approaching the container (3) to movably contact the wafer so as to be reset on the mapping bracket (2).

3. A carrier with a reset mapping function according to claim 1, characterized in that: The mapping bracket (2) comprises a hydraulic jacking extension part (21).

4. The carrier with a reset mapping function according to claim 1, characterized in that: The rotating mechanism (5) comprises: A rotating seat (51), a connecting handle (511) being rotatably arranged on the rotating seat (51), and an end of the connecting handle (511) being assembled with the paddle lever (4); A driving motor (52) is provided, wherein the driving motor (52) causes the four connecting handles (511) to rotate via a synchronous belt (53).

5. A carrier with a reset mapping function according to claim 4, characterized in that: The end of the connecting handle (511) is provided with a movable groove (512), in which a sliding block (513) for fixing the paddle lever (4) is slidably arranged, and the sliding block (513) is pushed and held at the end of the movable groove (512) by a blocking spring (514) in the movable groove (512).

6. The carrier with a reset mapping function according to claim 4, characterized in that: It also includes a transmission device (54) composed of a transmission gear and a synchronous wheel coaxially fixedly connected, wherein the transmission gear on the transmission device (54) is meshed with a driven gear (515) on the connecting handle (511); The synchronous belt (53) is transmission-connected with the synchronous wheels of the two transmission devices (54) and the synchronous wheels on the two connecting handles (511).

7. The carrier with a reset mapping function according to claim 4, characterized in that: It also comprises a plurality of telescopic rods (55), the ends of the telescopic rods (55) are provided with guide wheels (56), and the guide wheels (56) are rollingly connected to the synchronous belt (53) to keep it tight.

8. The carrier with a reset mapping function according to claim 7, characterized in that: It also includes an equidistant spring (57), wherein the equidistant spring (57) is sleeved on the telescopic rod (55) so that the length of the telescopic rod (55) is maximized in its default state.

9. The carrier with a reset mapping function according to claim 1, characterized in that: The paddle lever (4) is covered with a silicone outer coat.

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