Selector

Abstract

The present invention provides a selector comprising: a selector member which is provided with a movement path, the interior of which can be in a vacuum state, and which is movable in one direction; a cradle assembly movable in the one direction within the movement path with respect to the selector member; and an adsorption part which is connected with the support assembly and can adsorb equipment, and when the interior of the moving passage is in a vacuum state, the adsorption part is communicated with the moving passage at a position separated from the equipment so as to enable the interior of the adsorption part to be in a vacuum state, so that the equipment can be adsorbed and held. When the adsorption part adsorbs the device, air inflow into the moving passage is cut off, and the holder assembly moves toward the inside of the selector member.

Description

[0001] This application is a divisional application with application number CN 2020110160002, application date September 24, 2020, and invention name “Selector and hand including the same”. Technical Field

[0002] The present application relates to a selector and a hand comprising the same. Background Art

[0003] In order to test semiconductor components, a tester (TESTER) for testing electrically connected electronic components and a test handler (TEST HANDLER) for electrically connecting the electronic components to the tester are required as equipment. In addition, the test handler uses a test tray (TEST TRAY), which can transport multiple semiconductor components at once in a matrix-like state in order to increase the processing capacity.

[0004] On the other hand, in the test processor, the supply of semiconductor components to be tested is formed in a state of being loaded on a client tray (USER TRAY). Generally, the semiconductor components loaded on the client tray can be transferred by a hand (HAND). The hand can include a selector (PICKER) to hold the semiconductor components. This selector can hold the semiconductor components. A plurality of selectors can also be provided in the hand for holding a plurality of semiconductor components. Such a plurality of selectors are combined with a hand and operate simultaneously.

[0005] However, due to manufacturing, assembly tolerances and driving errors, the distances between the multiple selectors combined with the hand and the multiple semiconductor elements may be different. At this time, due to the different spacings between the multiple selectors and the multiple semiconductor elements, when the selectors pressurize the semiconductor elements, different pressing forces may be applied to the multiple semiconductor elements. For example, the selector closest to the semiconductor element among the multiple selectors may contact the semiconductor element first, so that the pressing force transmitted to the semiconductor element is relatively large compared to another selector. At this time, the semiconductor element subjected to a larger pressing force is more likely to crack.

[0006] Furthermore, in order to improve the efficiency of the device, the selector is required to quickly perform the lifting and lowering operation, which makes it difficult to design a device without impact force between the selector and the semiconductor element. Therefore, there is a growing demand for devices that can improve the efficiency of the device while reducing cracks in the semiconductor element. Summary of the invention

[0007] The embodiments of the present invention are based on the above background, and aim to provide a selector and a hand including the same, which can reduce the impact force between the selector and the device when the selector holds the device, thereby reducing the possibility of cracks in the device.

[0008] According to one embodiment of the present invention, there is provided a selector, comprising: a selector component, the selector component having a moving passage whose interior can be in a vacuum state and movable along one direction; a bracket assembly, the bracket assembly being movable along the one direction within the moving passage relative to the selector component; and an adsorption portion, the adsorption portion being connected to the bracket assembly and being able to adsorb a device, and when the interior of the moving passage is in a vacuum state, the adsorption portion is connected to the moving passage at a position separated from the device to make the interior of the adsorption portion into a vacuum state, thereby being able to adsorb and hold the device.

[0009] Furthermore, a selector is provided, wherein when the adsorption portion adsorbs the device, air flow into the movement passage is cut off, so that the bracket assembly can move toward the inside of the selector member.

[0010] Furthermore, a selector is provided, in which a descending inflow is formed in the selector component, and the descending flow path is used to supply fluid from the outside of the selector component to the inside of the moving path. When the device needs to descend the bracket assembly in an adsorption state, the bracket assembly maintains the inside of the moving path in a vacuum state and can descend by the pressure of the fluid supplied from the descending flow path.

[0011] Furthermore, a selector is provided, wherein the bracket assembly includes a bracket body and a pressurizing protrusion protruding from the outer peripheral surface of the bracket body, the pressurizing protrusion is in contact with the selector component surface on the inner side of the moving passage, and the bracket assembly pressurizes the upper surface of the pressurizing protrusion by the fluid supplied through the descending flow path, thereby driving the descent.

[0012] Furthermore, a selector is provided, which may include a plurality of the bracket assemblies and the adsorption parts. The bracket assembly connected to any one of the plurality of adsorption parts also moves toward the inner side of the selector component when any one of the plurality of adsorption parts adsorbs the device, when another one of the plurality of adsorption parts does not adsorb the device.

[0013] Furthermore, a selector is provided, wherein a support flow path and a branch flow path are formed inside the support assembly, the support flow path is used to connect the movable flow path with the interior of the adsorption portion, the branch flow path branches out from the support flow path, and a main flow path is formed in the selector component, the main flow path can selectively connect the branch flow path with the movable flow path.

[0014] Furthermore, a selector is provided, wherein when the adsorption portion adsorbs the device, the bracket assembly moves toward the inside of the selector component, and the bracket assembly cuts off the connection between the branch passage and the moving passage by moving toward the inside of the selector component.

[0015] Furthermore, a selector is provided, which also includes an opening and closing part, and when the adsorption part adsorbs the device and the bracket assembly is raised or lowered, the opening and closing part opens the bracket flow path so that the bracket flow path is connected with the moving path.

[0016] Furthermore, a hand is provided, comprising: a guide block; a selector block, the selector block being movable along with the guide block; and a selector, the selector being connected to the selector block, the selector comprising: a selector component, the selector component having a moving passage whose interior can be in a vacuum state and being movable in one direction; a bracket assembly, the bracket assembly being movable in the moving passage in the one direction relative to the selector component; and an adsorption portion, the adsorption portion being connected to the bracket assembly and being capable of adsorbing a device, when the interior of the moving passage is in a vacuum state, the adsorption portion is connected to the bracket assembly and is capable of adsorbing a device, and when the interior of the moving passage is in a vacuum state, the adsorption portion is connected to the moving passage at a position separated from the device to make the interior of the adsorption portion in a vacuum state, thereby being capable of adsorbing and holding the device, and the selector may be multiple, and the multiple selectors can adsorb the multiple devices provided, and when any one of the multiple selectors adsorbs the device when another one of the multiple selectors does not adsorb the device, the bracket assembly moves toward the inside of the selector component.

[0017] The embodiments of the present invention have the following effects: when the selector holds the device, the impact force between the selector and the device is reduced, and the possibility of cracks on the device is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A top view of the test processor;

[0019] Figure 2 To be set at Figure 1 A front view of the hand testing the processor;

[0020] Figure 3 A three-dimensional diagram of a selector according to an embodiment of the present invention;

[0021] Figure 4 for Figure 3 An exploded perspective view of the selector;

[0022] Figure 5 For along Figure 3 A cross-sectional view of the selector taken at A-A';

[0023] Figure 6 for Figure 5 A magnified view of B;

[0024] Figure 7 To show Figure 3 Figure 1 of the process of the selector holding the device;

[0025] Figure 8 To show Figure 3 Figure 10 shows a process of releasing the grip of the device by the selector;

[0026] Fig. 9 is an enlarged view of a bracket assembly of a first modified example of the first embodiment of the present invention;

[0027] Fig.10 A front view of a selector provided with a plurality of bracket assemblies and an adsorption portion;

[0028] Fig.11 A perspective view of a selector according to a second embodiment of the present invention;

[0029] Fig.12 for Fig.11 An exploded perspective view of the selector;

[0030] Fig.13 For along Fig.11 A cross-sectional view of the selector cut at C-C';

[0031] Fig.14 When the bracket assembly is raised or lowered, Fig.11 Cross-sectional view of the selector at the C-C' cut. DETAILED DESCRIPTION

[0032] The specific embodiments for realizing the spirit of the present invention are described in detail as follows with reference to the accompanying drawings.

[0033] Furthermore, when describing the present invention, detailed descriptions of known structures or functions may be omitted if it is determined that this would obscure the present invention.

[0034] It should be further understood that if any constituent element is "connected", "supported", "flowed", "supplied", "flowed" or "combined" with other constituent elements, it may be directly connected, supported, flowed, supplied, flowed or combined with other constituent elements, or other constituent elements may exist in between.

[0035] The terms used in this specification are only used to describe specific embodiments and are not intended to limit the present invention. A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0036] In addition, terms such as first, second, etc. may be used to describe various constituent elements, but the corresponding constituent elements are not limited by these terms. These terms are only used to distinguish one constituent element from other constituent elements.

[0037] As used herein, the term "comprising" means specific features, regions, integers, steps, operations, elements and / or components, and does not exclude the existence or addition of other specific features, regions, integers, steps, operations, elements, components and / or groups.

[0038] In addition, in this specification, the upper part, lower part, upper surface, etc. are indicated in the manner of the drawings, and it is preliminarily explained that when the direction of the object is changed, it can be indicated in a different manner. The up and down directions in this specification can be Figure 3 and Fig.11 Up and down direction.

[0039] In one embodiment of the present invention, the selector 1 and the hand 23 including the selector 1 may be disposed in the test processor 10. The test processor 10 will be described below.

[0040] Reference Figure 1 The test processor 10 can classify the device D according to the test result after electrically connecting the device D manufactured by the predetermined manufacturing process to the tester. For example, the device D can be a semiconductor element. Such a test processor 10 can be manufactured in various forms so that the type of the device D to be tested can be optimized. The test processor 10 can also include a user tray 30, and the user tray 30 can provide a space for loading the loading unit 20 and the device D.

[0041] The device loading unit 20 may transfer the device D loaded in the user tray 30 to a test tray 21 described later. The loading unit 20 may include a test tray 21, a loader robot 22, an arrangement module (not shown), and a hand 23.

[0042] The test tray 21 may provide a space in which the device D loaded in the user tray 30 can be loaded.

[0043] The loader robot 22 may support the hand 23 and may reciprocate between the user tray 30 and the test tray 21. The hand 23 may transfer the device D loaded in the user tray 30 to the test tray 21 through the movement of the loader robot 22.

[0044] The arrangement module can arrange the devices D loaded on the test tray 21 in a certain arrangement.

[0045] Reference Figure 2The hand 21 can transfer the device D loaded on the user tray 30 by holding it. The hand 23 can hold or release the device D through the selector 1 described later. In addition, the hand 21 may include the selector 1, the guide block 2, and the selector block 3. The "holding" in this specification is a concept including picking up, holding, and supporting.

[0046] The selector 1 can absorb and hold the device D by moving in one direction. A plurality of such selectors 1 may be provided, and the plurality of selectors 1 may be supported on the selector block 3. For example, the plurality of selectors 1 may be 16 PARA (Parallelism) arranged in the form of 2 columns and 4 rows. However, this is not limited thereto, and the number of selectors 1 may be greater than or less than 16 PARA, and may be set to 32 PARA if necessary.

[0047] When the selector 1 adsorbs the device D, the bracket assembly 200 described later moves toward the inside of the selector 1, thereby moving the device D in one direction. Moreover, one of the multiple selectors 1 can adsorb multiple devices D together with another selector 1. If one of the multiple selectors 1 adsorbs the device D even when the other selector 1 is in a state where the device D is not adsorbed, the bracket assembly 200 will be moved toward the inside of the selector 1. Moreover, when the multiple selectors 1 move together in one direction to adsorb the device D, the bracket assembly 200 provided in the selector 1 adsorbing the device D can move toward the inside of the selector 1. In the multiple selectors 1, the time required for the selectors 1 to adsorb the device D can be different from each other. Due to the time difference required for this absorption, a plurality of bracket assemblies 200 are provided in the multiple selectors 1, and the plurality of bracket assemblies 200 move toward the inside of the selector 1 with a predetermined time difference. For example, the bracket assembly 200 of the selector 1 that adsorbs the device D earlier than another selector 1 in the multiple selectors 1 can move toward the inside of the selector 1 earlier than the other bracket assembly 200.

[0048] The guide block 2 can guide the movement of the selector block 3. The lower side of the guide block 2 can be connected to the selector block 3. Moreover, the guide block 2 can also include an LM (Li near Motion) guide 2a and an insertion protrusion 2b extending in the up-down direction.

[0049] The selector block 3 can support the selector 1. Such a selector block 3 can be connected to the lower side of the guide block 2 and can be raised and lowered. In other words, the selector block 3 can move in the up-down direction, and the movement in the up-down direction can be guided by the LM guide 2a. Through the movement of such a selector block 3, the selector 1 can move in the up-down direction, thereby approaching the device D or moving away from the device D.

[0050] The specific structure of the selector 1 according to an embodiment of the present invention is described as follows with reference to the accompanying drawings.

[0051] Reference Figure 3 , the selector 1 can hold the device D. Such a selector 1 can be supported by the selector block 3 and can be moved in one direction by the movement of the selector block 3. Here, the one direction can be downward or upward. Moreover, if a vacuum is generated inside the selector 1, the device D can be adsorbed by the adsorption force generated by the vacuum. In other words, if the selector 1 does not contact the device D but approaches the device D at a distance less than a predetermined distance, the device D can also be adsorbed and held by the adsorption force. Therefore, even if the selector 1 does not compress or hold the device D, the device D can be stably held.

[0052] Such a selector 1 may include a selector component 100 , a bracket assembly 200 , an adsorption portion 300 , a fixing portion 400 and a bracket O-ring 500 .

[0053] The selector member 100 may support the support assembly 200, the adsorption portion 300, the fixing portion 400, and the support O-ring 500. The selector member 100 may move in one direction so that the adsorption portion 300 described later approaches the device D. In addition, the selector member 100 may include a moving passage 110, a selector flow path 120, a descending flow path 130, and a fixing groove 140.

[0054] Reference Figure 5 , the moving passage 110 may be a space formed inside the selector member 100. Such a moving passage 110 may provide a space capable of accommodating the support assembly 200, and the support assembly 200 may move in the up-down direction inside the moving passage 110. Moreover, the moving passage 110 may be communicated with the selector flow path 120, and may form a vacuum state by the vacuum generated by a vacuum pump (not shown) connected to the selector flow path 120.

[0055] Furthermore, the moving passage 110 may be connected to the descending flow path 130, and a fluid may be supplied from the descending flow path 130 to lower the support assembly 200. A pressurized space 111 may be formed in such a moving passage 110. The pressurized space 111 is connected to the descending flow path 130 in the space of the moving passage 110, and may be a space surrounded by the outer peripheral surface of the support body 210, the pressurizing protrusion 220, and the selector member 100. Furthermore, the pressurized space 111 may be a space in the space of the moving passage 110 that is connected to the selector flow path 120 ( Figures 5 to 7As the bracket assembly 200 moves, the size of the space connected to the selector flow path 120 and the size of the pressurized space 111 can change, but when the bracket assembly 200 moves, the space connected to the selector flow path 120 and the pressurized space 111 will not be connected to each other but will be separated. Due to the separation of the pressurized space 111 and the space connected to the selector flow path 120 in the space of the moving passage 110, even if air is supplied to the pressurized space 111, the vacuum-sealed state formed in the selector flow path 120, the moving passage 110, and the bracket flow path 211 can be maintained. Therefore, in the vacuum-sealed state, while the adsorption portion 300 passes through the vacuum adsorption device D, the bracket assembly 200 can be lowered by the fluid in the flow path pressurized space 111. Moreover, the volume of the pressurized space 111 can be changed by the movement of the bracket assembly 200. In other words, when the bracket assembly 200 moves upward, the volume of the pressurized space 111 may decrease, and when the bracket assembly 2000 moves downward, the volume of the pressurized space 111 may increase.

[0056] On the other hand, in this specification, the “vacuum state” is a concept including an absolute vacuum state and a negative pressure state, wherein the absolute vacuum state is zero atmospheric pressure and the negative pressure state has a pressure lower than the atmospheric pressure.

[0057] Moreover, the vacuum state may include a vacuum open state and a vacuum sealed state. The vacuum open state means that air is sucked into the vacuum pump to form a pressure lower than the atmospheric pressure, but because the space is not sealed, air can flow in from the outside. For example, when the adsorption passage 320, the support flow path 211, the moving passage 110, and the selector flow path 120 are in a vacuum open state, the state may be a state in which a pressure lower than the atmospheric pressure is formed inside, and the air flowing in from the outside flows to the vacuum pump.

[0058] The vacuum-tight state refers to a state in which a pressure lower than the atmospheric pressure is formed by sucking air into a vacuum pump, and the space is sealed so that air does not flow in from the outside. For example, in the vacuum-tight state, the adsorption unit 300 adsorbs the device D, and the adsorption passage 320, the support flow path 211, the moving passage 110, and the selector flow path 120 are not connected to the outside and the air flow from the outside is cut off, thereby forming a vacuum inside them. This vacuum-tight state may include not only a state for maintaining a vacuum inside the adsorption passage 320, the support flow path 211, the moving passage 110, and the selector flow path 120, but also a state in which the adsorption unit 300 adsorbs the device D in a vacuum-open state, so that the air remaining in the adsorption passage 320, the support flow path 211, the moving passage 110, and the selector flow path 120 moves to the vacuum pump.

[0059] The selector flow path 120 may provide a flow path for air to flow. One side of the selector flow path 120 may be connected to the moving path 110, and the other side of the selector flow path 120 may be connected to a vacuum pump (not shown). The interior of the selector flow path 120 may be in a vacuum state by the vacuum pump.

[0060] The downflow path 130 may provide a flow path for a fluid (e.g., air) to flow toward the pressurized space of the moving passage 110. One side of the downflow path 130 may be connected to the moving passage 110, and the other side of the downflow path 130 may be connected to a pressurizing pump (not shown). Moreover, the pressurizing pump may supply fluid to the downflow path 130. The pneumatic fluid generated in the pressurizing pump may be supplied to the pressurized space 111 of the moving passage 110 through the downflow path 130.

[0061] The air flow in the selector flow path 120 and the downflow path 130 can be adjusted by a vacuum pump and a pressure pump, and the driving of the vacuum pump and the pressure pump can be controlled by a control unit (not shown).

[0062] The fixing groove 140 may provide a portion where the first fixing member 410 described later is fixed to the selector member 100. Such a fixing groove 140 may be formed by introducing from the selector member 100 to the inside. Moreover, the fixing groove 140 may be formed corresponding to the shape of the first fixing member 410 so that the first fixing member 410 may be fixed in surface contact with the selector member 100. Moreover, a coupling hole 141 may be formed in the fixing groove 140. Such a coupling hole 141 may be formed by introducing from the selector member 100 to the inside more than the fixing groove 140. The second fixing member 420 described later may be inserted into such a coupling groove 141. An internal thread may be formed in the coupling groove 141, and the internal thread may be engaged with an external thread formed in the second fixing member 420.

[0063] Reference Figure 3 and Figure 6 , the support assembly 200 can move in one direction (for example, downward) to make the adsorption part 300 close to the device D. Such a support assembly 200 can be connected to the adsorption part 300, and can move in the upward and downward directions relative to the selector part 100 inside the moving passage 110. In the vacuum open state, when the adsorption part 300 adsorbs the device D and becomes a vacuum closed state, the air flowing from the outside into the moving passage 110 can be cut off by the device D. When the air flow path flowing into the moving passage 110 is cut off by the device D, the air inside the moving passage 110 is further reduced, and the internal pressure is lower than the external pressure, so that the support assembly 200 can move to the inside of the moving passage 110.

[0064] The support assembly 200 can be lowered by means of the fluid pressure supplied from the descending flow path 130 while maintaining the vacuum-tight state inside the moving passage 110. When the support assembly 200 needs to be lowered, the upper surface of the pressurizing protrusion 220 can be pressurized by the fluid supplied from the descending flow path 130 so as to be lowered. The support assembly 200 may include a support body 210, a pressurizing protrusion 220, a guide groove 230, and a stopper 240.

[0065] The support body 210 can move in one direction to make the adsorption part 300 approach the device D. Such a support body 210 can be connected to the adsorption part 300, and can move in the up-down direction inside the moving passage 110. A support flow path 211 that penetrates the support body 210 can be formed in such a support body 210. The support flow path 211 can provide a flow path for allowing the air outside the selector part 100 to flow inside the selector part 100. In at least a part of the support flow path 211, the air can flow in one direction to adsorb the device D on the adsorption part 300, and the air can flow in another direction to release the adsorption of the device D by the adsorption part 300. One side of such a support flow path 211 can be connected to the adsorption passage 320, and the other side of the support flow path 211 can be connected to the moving passage 110.

[0066] In the bracket body 210, a recess 212 may be formed on the upper side of the pressurizing protrusion 220. By means of such a recess 212, the cross-sectional area of ​​the bracket body 210 may be made smaller from one side to the other side. Figure 6 In the embodiment, the distance from the surface of the support body 210 where the recess 212 is formed to the center of the support body 210 can be reduced as it goes downward. At least a portion of the lower end of the recess 212 includes a surface extending in a direction different from the direction in which the support body 210 extends, for example, such a surface can be a horizontal surface. By means of such a recess 212, the volume of the pressurized space 111 can be further increased, and when pneumatic action is applied to the pressurized space 111, a greater pressure can be applied to the pressurized protrusion 220 described later.

[0067] When pneumatic motion acts on the pressurized space 111, the pressurized protrusion 220 can provide a portion to which pressure is applied, and the pressure is the pressure of the fluid from the descending flow path 130. Such a pressurized protrusion 220 can be formed by protruding from the outer peripheral surface of the support body 210. The pressurized protrusion 220 can maintain surface contact with the selector member 100 inside the moving passage 110 during the movement of the support body 210 in one direction. Through the surface contact between such a pressurized protrusion 220 and the selector member 100, the gap between the pressurized protrusion 220 and the selector member 100 can be minimized. In other words, when pneumatic motion acts on the pressurized space 111, the air leakage (leak) between the pressurized protrusion 220 and the selector member 100 is minimized, so that the pressure applied to the pressurized protrusion 220 can be maintained.

[0068] The guide groove 230 can guide the movement of the bracket body 210. Such a guide groove 230 can be formed by introducing from the outer circumference of the bracket body 210 to the inside. During the movement of the bracket body 210 inside the moving passage 110, the guide groove 230 can be in surface contact with the first fixing member 410.

[0069] The stopper 240 can prevent the bracket body 210 from moving relative to the selector member 100 beyond a predetermined range. Such a stopper 240 can be formed on both sides of the guide groove 230. In other words, the stopper 240 formed by the guide groove 230 introduced into the inner side of the bracket body 210 can be a height difference between the guide groove 230 and the bracket body 210. Such a stopper 240 can include a first stopper end 241 and a second stopper end 242.

[0070] Reference Figure 4 and Figure 6 The first stopper end 241 can prevent the bracket body 210 from moving downward beyond a predetermined range. The first stopper end 241 can be a height difference formed on the upper side of the height difference formed between the guide groove 230 and the bracket body 210. When the bracket body 210 moves downward, the first stopper end 241 is stopped on the first fixing member 410 fixed to the selector member 100, thereby limiting the movement of the bracket body 210.

[0071] The second stopper end 242 can prevent the bracket body 210 from moving upwardly beyond a predetermined range. The second stopper end 242 can be a height difference formed at the lower side of the height difference formed between the guide groove 230 and the bracket body 210. When the bracket body 210 moves upwardly, the second stopper end 242 is stopped on the first fixing member 410 fixed on the selector member 100, thereby limiting the movement of the bracket body 210.

[0072] The adsorption part 300 can adsorb the device D. One side of the adsorption part 300 can be supported by the support assembly 200, and the other side of the adsorption part 300 can provide an adsorption component 310. The adsorption component 310 can contact the device D.

[0073] An adsorption passage 320 penetrating the adsorption part 300 may be formed in the adsorption part 300. One side of such adsorption passage 320 may be communicated with the support flow path 211, and the other side of such adsorption passage 320 may be communicated with the outside (the portion where the device D is adsorbed). When the adsorption passage 320 is in a vacuum open state, the adsorption component 310 may adsorb and hold the device D by the vacuum formed around the adsorption component 310. In other words, when the moving passage 110 and the support flow path 211 are in a vacuum state at a position separated from the device D, the adsorption component 310 communicates with the moving passage 110 and the support flow path 211, thereby adsorbing and holding the device D. Therefore, even if the adsorption component 310 does not pressurize the device D, when it approaches the device D at a distance less than a predetermined distance, it can adsorb and hold the device D. A pressure detection sensor 311a may be provided in the adsorption component 310. When the adsorption component 310 adsorbs the device D, such a pressure detection sensor 311a can measure the pressure applied to the device D. The pressure applied to the device D measured by the pressure detection sensor 311a can be displayed on a display unit (not shown). According to the pressure applied to the device D, phrases such as "grip state" or "grip release state" can be displayed on the display unit.

[0074] The fixing portion 400 may be fixed to the selector member 100 so that the selector member 100 supports the bracket assembly 200. The fixing portion 400 may include a first fixing member 410 and a second fixing member 420.

[0075] The first fixing member 410 can support the bracket assembly 200. In other words, when the vacuum is open, that is, when the pneumatic force does not act on the inner side of the selector member 100, the first fixing member 410 supports the first stop end 241, thereby supporting the bracket assembly 200. Such a first fixing member 410 can prevent the bracket body 210 from moving beyond a predetermined range. The first fixing member 410 can be disposed inside the fixing groove 140. A hole into which the second fixing member 420 can be inserted can be formed in the first fixing member 410.

[0076] The second fixing member 420 can fix the first fixing member 410 to the selector member 100. The second fixing member 420 can be inserted into the hole formed in the first fixing member 410 and the coupling hole 141 formed in the fixing groove 140. In addition, an external thread can be formed on the outer peripheral surface of the second fixing member 420, and the external thread can be engaged with the internal thread formed inside the coupling groove 141.

[0077] The bracket O-ring 500 can prevent air from flowing into the gap formed between the bracket assembly 200 and the selector member 100. In other words, the bracket O-ring 500 is disposed between the bracket assembly 200 and the selector member 100, and can prevent air from leaking out of the gap between the bracket assembly 200 and the selector member 100. For example, the bracket O-ring 500 can be made of a rubber material.

[0078] The operation and effects of the selector 1 having the above-described structure will be described below.

[0079] Reference Figure 7 , the process of selector 1 holding device D is explained. Figure 7 The illustrated tray T may include a user tray 30 , a test tray 21 , and the like.

[0080] The user can lower the selector 1 to release the grip on the device D. Figure 7 ) Moreover, while the selector 1 is descending toward the device D, a vacuum may be formed inside the selector 1, and the vacuum pump may be driven to achieve a vacuum open state. The vacuum generated in the vacuum pump may be formed in the selector flow path 120, the moving path 110, the support flow path 211, and the adsorption path 320, and a vacuum may also be formed around the adsorption component 310 connected to one end of the adsorption path 320. In this vacuum open state, the air flowing into the outside may flow along the adsorption path 320, the support flow path 211, the moving path 110, and the selector flow path 120.

[0081] When the selector 1 is lowered and the suction member 310 approaches the device D at a predetermined distance, the suction member 310 can suction and hold the device D ( Figure 7 ). The selector 1 adsorbs the device D at a position where the adsorption component 310 does not contact the device. In other words, the selector 1 is only lowered to a distance where the adsorption component 310 and the device D can maintain a non-contact distance with each other. When the adsorption component 310 adsorbs the device D, the adsorption passage 320, the support flow path 211, the moving passage 110, and the selector flow path 120 are switched from a vacuum open state to a vacuum sealed state.

[0082] After the adsorption component 310 adsorbs the device D, the device D will cut off the inflow of external air through the adsorption passage 320, so the pressure difference between the outside of the device D and the internal space of the selector 1 (the adsorption passage 320, the support passage 211, the moving passage 110 and the selector flow passage 120) will gradually increase. In other words, when the adsorption component 310 adsorbs the device D, the internal pressure of the moving passage 110 gradually decreases, and the pressure difference generated by this pressure decrease can cause the support assembly 200 to move to the inside of the moving passage 110.

[0083] Furthermore, the second stopper end 242 can limit the movement of the bracket assembly 200 toward the inner side of the moving passage 110 by being stopped on the first fixing member 410 ( Figure 7 During the transfer of the device D by the selector 1, the vacuum formed in the selector flow path 120, the moving path 110, the support flow path 211 and the adsorption path 320 can be maintained.

[0084] In the vacuum sealed state, the bracket assembly 200 can maintain the state where the second locking end 242 is locked on the first fixing component 410, and can also maintain the state where the device D is held by the adsorption portion 300. Figure 7 (The fourth picture)

[0085] Next, refer to Figure 8 , a process of releasing the grip of the selector 1 of the grip device D will be described.

[0086] The user can lower the selector 1 to release the grip on the device D. While the selector 1 is lowered toward the device D, the vacuum sealed state inside the selector 1 can be maintained. In other words, while the selector 1 is lowered, the vacuum formed in the selector flow path 120, the moving path 110, the support flow path 211, and the adsorption path 320 can be maintained. Figure 8 ).

[0087] When the selector 1 drops to a predetermined position, the pneumatic force can be applied from the pressure pump to the pressurized space 111 ( Figure 8 The fluid supplied from the descending flow path 130 can apply pressure to the pressurizing protrusion 220 inside the pressurized space 111, and the support assembly 200 can descend inside the moving passage 110 by the pressure acting on the pressurizing protrusion 220. During the descent of the support assembly 200, the vacuum (vacuum-tight state) formed in the selector flow path 120, the moving passage 110, the support flow path 211, and the adsorption passage 320 can be maintained, and the adsorption portion 300 can also adsorb the device during the descent of the support assembly 200.

[0088] The first locking end 241 is locked to the first fixing member 410, thereby limiting the movement of the bracket assembly 200 to the outside of the moving passage 110 ( Figure 8 ). After the support assembly 200 is lowered to a predetermined position, air may be supplied along the selector flow path 120, the moving path 110, the support flow path 211, and the adsorption path 320. By supplying such air, the vacuum formed in the selector flow path 120, the moving path 110, the support flow path 211, and the adsorption path 320 may be released, and the adsorption portion 300 may release the adsorption of the device D ( Figure 8 (see the fourth picture of ).

[0089] According to the present embodiment, by holding the device D without the selector 1 contacting the device D, it is possible to prevent the selector 1 from striking the device D. Therefore, the possibility of cracking the device can be significantly reduced.

[0090] On the other hand, in addition to this, according to the first modified example of the first embodiment of the present invention, the shape of the bracket body 210 can be changed. Fig. 9 The first modified example of the first embodiment of the present invention is described as follows. When describing the first modified example of the first embodiment of the present invention, the differences compared with the above embodiment are mainly described, and the same descriptions and reference numerals are used in the above embodiment.

[0091] like Fig. 9 As shown, according to the first modification of the first embodiment, the recess 212 may not be formed in the bracket body 210. In such a bracket body 210, the distance from the outer peripheral surface of the bracket body 210 to the center of the bracket body 210 may be constant along one direction.

[0092] On the other hand, a plurality of moving paths 110 , support assemblies 200 , and adsorption units 300 may be provided.

[0093] Reference Fig.10 The moving passages 110 may be formed as a plurality of passages inside the selector member 100, and a plurality of support assemblies 200 may be provided so as to be movable in one direction inside the plurality of moving passages 110. The adsorption portion 300 may be connected to one side of the plurality of support assemblies 200 to hold a plurality of devices D.

[0094] The selector 1 can move in one direction (for example, downward) to absorb and hold a plurality of devices D. During the descent of the selector member 100, the plurality of bracket assemblies 200 can be in the same position relative to the selector member 100. At this time, the position of the bracket assembly 200 is a state in which the first locking end 241 is locked to the first fixing member 410 and no longer moves toward the outside of the selector member 100 relative to the selector member 100.

[0095] When the plurality of adsorption parts 300 approach the plurality of devices D by lowering the selector 1 , the plurality of adsorption parts 300 may adsorb the devices D at positions not in contact with the plurality of devices D. When the adsorption parts 300 adsorb the devices D, the support assembly supporting the adsorption parts 300 may move toward the inner side of the plurality of moving paths 110 .

[0096] On the other hand, when the plurality of adsorption parts 300 adsorb the device D, the plurality of adsorption parts 300 may be at different distances from the device D, so the time required for the plurality of adsorption parts 300 to hold the device D may be different. Due to the time difference during adsorption, the plurality of support assemblies 200 move inside the plurality of moving paths 110 at a predetermined time difference. For example, the support assembly 200 of the adsorption part 300 that adsorbs the device D before other adsorption parts 300 among the plurality of adsorption parts 300 may move to the inside of the moving path 110 before other support assemblies 200. Therefore, Fig.10 As shown, during the period when the plurality of adsorption portions 300 adsorb the device D, the plurality of bracket assemblies 200 and the device D may be in different positions relative to the selector member 100 .

[0097] On the other hand, in addition to this, according to the second embodiment of the present invention, a stopper 400 and an opening and closing portion 600 may also be included. Figures 11 to 14 The second embodiment of the present invention is described as follows. When describing the second embodiment, the differences compared with the above embodiment are mainly described, and the same descriptions and reference numerals are used in the above embodiment.

[0098] Reference Figures 11 to 13 The selector member 100 may include a moving passage 110 , an outer body 150 and an inner body 160 .

[0099] According to the present embodiment, the moving passage 110 may include a space between the outer body 150 and the inner body 160, which may provide a space capable of accommodating the bracket assembly 200. The bracket assembly 200 may move in the moving passage 110 in the up-down direction.

[0100] The outer body 150 can support the inner body 160 and provide a space for accommodating the inner body 160. The inner body 160 can support the bracket assembly 200, the adsorption part 300, the bracket O-ring 500, the opening and closing part 600 and the stopper 700. The outer body 150 can support the inner body 160.

[0101] A main body passage 161 for allowing air to flow may be formed in the inner body 160. Such main body passage 161 may be selectively connected to the branch passage 213 described later. In other words, when the bracket assembly 200 moves toward the inner side of the moving passage 110, one side of the main body passage 161 may be cut off by the bracket body 210. When the bracket assembly 200 moves toward the outer side of the moving passage 110 until the stopper 700 is stuck in the inner body 160, one side of the main body passage 161 may be connected to the branch passage 213. The other side of such main body passage 161 may be connected to the moving passage 110. Therefore, the main body passage 161 may selectively connect the moving passage 110 with the branch passage 213 as the bracket assembly 200 moves.

[0102] The bracket assembly 200 may include a bracket body 210 , a protruding portion 250 , a seating portion 260 , an opening and closing flow path 270 , and a clamping table 280 .

[0103] Reference Fig.13 , the bracket body 210 can move in one direction to bring the adsorption part 300 close to the device D. A branch passage 213 can be formed in this bracket body 210. The branch passage 213 can be a flow path for air flow, and can be branched from the bracket flow path 211. A plurality of such branch passages 213 can be branched from the bracket flow path 211. Moreover, one side of the branch passage 213 can be connected to or cut off from the main passage 161 as the bracket body 210 moves. When the bracket body 210 is at the bottom dead center, the branch passage 213 is located on the upper side of the main passage 161, so that only a part of the branch passage 213 can be connected to the main passage 161. Among them, the bottom dead center of the bracket body 210 represents the position of the bracket body 210 when the bracket body 210 is supported by the inner body 160 through the limiter 700.

[0104] When the device D is adsorbed on the adsorption part 300, the support body 210 can move toward the inside of the moving passage 110. By moving toward the inside of the moving passage 110, the support body 210 can cut off the communication between the branch passage 213 and the main passage 161.

[0105] Reference Fig.14 , the protrusion 250 can prevent the support body 210 from moving relative to the inner body 160 in a manner exceeding a predetermined range. In other words, when the device D is adsorbed on the adsorption portion 300 and the support body 210 moves to the inner side of the moving passage 110, the protrusion 250 is locked on the inner body 160 to limit the movement of the support body 210. Such a protrusion 250 can be formed to protrude from the outer peripheral surface of the support body 210.

[0106] The placement portion 260 may provide a space for placing the opening and closing member 610 described later. Such a placement portion 260 may be formed on one side of the stent flow path 211. Also, the placement portion 260 may be connected to the stent flow path 211.

[0107] The opening and closing flow path 270 can selectively connect the support flow path 211 and the moving path 110. One side of the opening and closing flow path 270 can be connected to one side of the support flow path 211, and the other side of the opening and closing flow path 270 can be connected to the moving path 110. In addition, the opening and closing flow path 270 can provide a space for accommodating the opening and closing member 610 and the elastic member 620 described later.

[0108] The clamping platform 280 can prevent the elastic member 620 from being separated from the closed flow path 270. The clamping platform 280 is formed to protrude toward the inner side of the bracket body 210.

[0109] The opening and closing part 600 can selectively open and close the support flow path 211 and the opening and closing flow path 270. In other words, when the adsorption part 300 adsorbs the device D and the support assembly 200 is raised or lowered, the opening and closing part 600 can open the support flow path 211 to connect the support flow path 211 with the moving path 110. The opening and closing part may include an opening and closing component 610 and an elastic component 620.

[0110] The opening and closing component 610 can be placed in the placement part 260, and can selectively open and close the support flow path 211. When the vacuum pump is not working, the opening and closing component 610 is placed in the placement part 260 by its own weight, and can seal and cut off the support flow path 211 and the opening and closing flow path 270. Moreover, when the vacuum pump is operated and a vacuum is formed in the selector flow path 120, the moving path 110 and the opening and closing flow path 270, the opening and closing component 610 rises inside the opening and closing flow path 270, thereby opening and connecting the support flow path 211 and the opening and closing flow path 270. In more detail, when the vacuum pump is operated and the vacuum force in one direction acting on the opening and closing component 610 is stronger than the elastic force in the other direction, the opening and closing component 270 can rise inside the opening and closing flow path 270, opening and connecting the support flow path 211 and the opening and closing flow path 270. The vacuum force here refers to an external force acting on the opening and closing member 610 through a pressure difference, and the pressure difference is a pressure difference formed when the moving passage 110 becomes a vacuum. Moreover, when the adsorption part 300 adsorbs the device D, the vacuum force acting on the opening and closing member 610 can reach a maximum. When the selector member 100 is moved while maintaining this vacuum-tight state, the position of the opening and closing member 610 can be maintained, and the open state of the opening and closing flow path 270 can be maintained. When the support assembly 200 is raised or lowered, the opening and closing member 610 can cut off the support flow path 211.

[0111] Furthermore, the opening and closing member 610 cuts off the opening and closing flow path 270 and the support flow path 211 before supplying air to the moving passage 110 for lowering the support assembly 200. Therefore, even if air is supplied to the moving passage 110, the opening and closing member 270 can seal the support flow path 211, so that the air supplied to the moving passage 110 can apply pressure to the support assembly 200 and the stopper 700 in the moving passage 110 without leaking to the support flow path 211. Furthermore, the opening and closing member 610 cuts off the opening and closing flow path 270 and the support flow path 211, so that even if air is supplied to the opening and closing flow path 270, the vacuum inside the support flow path 211 can be maintained. By maintaining the vacuum inside the support flow path 211 by means of this opening and closing member 610, the adsorption unit 300 can adsorb the device D during the lowering of the support assembly 200. Furthermore, the opening and closing member 610 can be connected to the elastic member 620.

[0112] The elastic member 620 can provide a restoring force to the opening and closing member 610. Such an elastic member 620 can be disposed inside the through hole 710 formed in the stopper 700. Moreover, when the opening and closing member 610 rises, the elastic member 620 provides a restoring force to the opening and closing member 610 by being stuck on the clamping platform 720. For example, the elastic member 620 can be a coil spring.

[0113] Furthermore, the elastic member 620 applies an elastic force to the opening and closing member 610 that is raised by the vacuum pressure so that it is placed in the placement portion 260. In other words, the opening and closing member 610 that is raised by the vacuum pressure needs to seal the support flow path 211 before applying pneumatic pressure to the moving passage 110. When the vacuum pressure is reduced, the sum of the gravity of the opening and closing member 610 and the elastic force of the elastic member 620 is greater than the vacuum force, so that the opening and closing member can be lowered. Therefore, the elastic member 620 can apply an elastic force to the opening and closing member 610 so that it is placed in the placement portion 260, thereby sealing the support flow path 211.

[0114] In another example, the elastic member 620 can place the opening and closing member 610 in the placement portion 260 by the vacuum pressure difference between the moving passage 110 and the opening and closing flow path 270. In more detail, when the vacuum pump generates a vacuum between the moving passage 110 and the opening and closing flow path 270, a vacuum pressure difference may be generated between the moving passage 110 and the opening and closing flow path 270. Due to this vacuum pressure difference, the opening and closing member 610 can rise inside the opening and closing flow path 270 even with the elastic force of the elastic member 620. When this vacuum state continues, the vacuum pressure difference between the moving passage 110 and the opening and closing flow path 270 gradually decreases over time, and when the vacuum pressure decreases, the opening and closing member 610 can be placed in the placement portion 260 by the elastic force of the elastic member 620.

[0115] The stopper 700 can prevent the support assembly 200 from moving beyond a predetermined range relative to the inner body 160. The stopper 700 can be formed by protruding from one end of the support assembly 200, or can be formed integrally with a part of the support assembly 200. Moreover, when the support assembly 200 is lowered relative to the inner body 160, the stopper 700 is locked at the upper end of the inner body 160, thereby preventing the support assembly 200 from being excessively lowered.

[0116] The function and effect of the selector 1 according to the second embodiment of the present invention are described as follows.

[0117] The user can lower the selector 1 to hold the device D. While the selector 1 is lowered toward the device D, a vacuum can be formed inside the selector 1. This vacuum can be generated by a vacuum pump, and the force generated by the pressure difference generated by this vacuum will be applied to the opening and closing member 610, and the opening and closing member 610 can open the opening and closing flow path 270 and the support flow path 211 by rising in the opening and closing flow path 270.

[0118] The outside air may flow in along the support passage 211, the main passage 161, and the moving passage 110, or may flow in along the support passage 211, the opening and closing passage 270, and the moving passage 110. Moreover, the vacuum generated in the vacuum pump may be formed through the moving passage 110, the opening and closing passage 270, the main passage 161, the branch passage 213, the support passage 211, and the adsorption passage 320, or may be formed around the adsorption member 310 connected to one end of the adsorption passage 320. Therefore, when the selector 1 is lowered so that the adsorption member 310 and the device D approach a predetermined distance or less, the adsorption member 310 may adsorb and hold the device D. The selector 1 adsorbs the device D at a position where the adsorption member 310 and the device D are not in contact. In other words, the selector 1 is lowered only to a distance where the adsorption member 310 and the device do not contact each other. When the adsorption member 310 adsorbs the device D, the adsorption passage 320 , the holder flow passage 211 , the moving passage 110 , and the selector flow passage 120 are switched from a vacuum-open state to a vacuum-sealed state.

[0119] When the adsorption component 310 adsorbs the device D, the device D will cut off the inflow of external air through the adsorption passage 320, so the pressure difference between the outside of the device D and the moving passage 110, the opening and closing flow path 270, the main passage 161, the branch passage 213, the bracket flow path 211 and the adsorption passage 320 will gradually increase. In other words, when the adsorption component 310 adsorbs the device D, the internal pressure of the moving passage 110 gradually decreases, and the pressure difference generated by the decrease in pressure can make the bracket assembly 200 move to the inside of the moving passage 110. Moreover, when the bracket assembly 200 rises, the main passage 161 and the branch passage 213 can be cut off by the bracket body 210. When the protrusion 250 is stuck on the inner body 160, the movement of the bracket assembly 200 to the inside of the moving passage 110 can be restricted.

[0120] The user can lower the selector 1, thereby releasing the grip on the device D. After the selector 1 is lowered to a predetermined position, the vacuum pressure is reduced, so that the opening and closing component 610 can be placed in the placement portion 260 by the elastic force of the elastic component 620. When the opening and closing component 610 is placed in the placement portion 260, the opening and closing flow path 270 and the bracket flow path 211 can be cut off. When such a bracket flow path 211 is cut off, air can be supplied to the moving passage 110 and the opening and closing flow path 270. The pressure of the air supplied to the moving passage 110 and the opening and closing flow path 270 can cause the bracket assembly 200 to be lowered, and the opening and closing component 610 can better seal the bracket flow path 211. At this time, the opening and closing component 610 seals the bracket flow path 211, so that the vacuum state in the bracket flow path 211 and the branch path 213 can be maintained, and the adsorption portion 300 can continue to adsorb the device D. At the moment when the main passage 161 and the branch passage 213 are connected during the descent of the support assembly 200, the vacuum formed in the branch passage 213, the support passage 211, and the adsorption passage 320 can be released. At this time, the air flows inside the support passage 211 and the adsorption passage 320, thereby releasing the gripping state of the adsorption part 300 relative to the device D. When the support assembly 200 descends and the main passage 161 and the branch passage 213 are connected, the stopper 700 is stuck to the inner body 160, thereby limiting the descent of the support assembly 200.

[0121] The embodiments of the present invention are described as specific implementation methods, but this is only illustrative, and the present invention is not limited thereto, and should be interpreted as having the broadest scope of the basic idea described in the present invention. Those skilled in the art can combine or replace the disclosed embodiments to form invisible patterns, but they will not exceed the scope of the present invention. In addition, those skilled in the art can easily change or modify the disclosed implementation methods, and such changes or modifications also belong to the protection scope of the present invention.

Claims

1. A selector, characterized in that: include: A selector component, the selector component having a moving passage whose interior can be in a vacuum state and can move in one direction; a bracket assembly, the bracket assembly being movable in the one direction within the movement path relative to the selector member; as well as The adsorption part is connected to the bracket assembly and can adsorb the device. When the interior of the moving passage is in a vacuum state, the adsorption portion is connected to the moving passage at a position separated from the device to make the interior of the adsorption portion a vacuum state, thereby being able to adsorb and hold the device; When the adsorption portion adsorbs the device, the inflow of air into the movement passage is blocked, and the support assembly moves toward the inside of the selector member.

2. The selector according to claim 1, characterized in that A descending flow path is formed in the selector member, the descending flow path being used to supply a fluid from the outside of the selector member to the inside of the movement passage, When the device requires the support assembly to descend in the adsorption state, the support assembly may descend by the pressure of the fluid supplied from the descending flow path while maintaining the interior of the movement passage in a vacuum state.

3. The selector according to claim 2, characterized in that The support assembly includes a support body and a pressurizing protrusion protruding from the outer peripheral surface of the support body. The pressing protrusion is in surface contact with the selector member on the inner side of the moving passage, The support assembly is driven to descend by pressurizing the upper surface of the pressurizing protrusion with the fluid supplied through the descending flow path.

4. The selector according to claim 1, characterized in that A plurality of the bracket components and the adsorption parts are provided, The bracket assembly connected to any one of the multiple adsorption parts also moves toward the inside of the selector component when any one of the multiple adsorption parts adsorbs the device when another one of the multiple adsorption parts does not adsorb the device.

5. The selector according to claim 1, characterized in that A support flow path and a branch path are formed inside the support assembly. The support flow path is used to connect the moving path with the inside of the adsorption part, and the branch path branches out from the support flow path. A main body passage is formed in the selector member, and the main body passage can selectively connect the branch passage and the moving passage.

6. The selector according to claim 5, characterized in that When the adsorption portion adsorbs the device, the bracket assembly moves toward the inner side of the selector component. The support assembly cuts off the communication between the branch passage and the moving passage by moving toward the inner side of the selector member.

7. The selector according to claim 6, characterized in that It also includes an opening and closing part. When the adsorption part adsorbs the device and the bracket assembly is raised or lowered, the opening and closing part opens the bracket flow path so that the bracket flow path is connected to the moving path.

8. The selector according to claim 3, characterized in that The movement path includes a pressurized space for applying pressure to the support assembly to cause the support assembly to descend; The volume of the pressurized space varies with the movement of the support assembly.

9. The selector according to claim 3, characterized in that The bracket body includes a recessed portion formed on an upper side of the pressurizing protrusion; The recess is configured so that the distance from the surface of the bracket body where the recess is formed to the center of the bracket body decreases downward, and at least a portion of the lower end of the recess includes a surface extending in a direction different from the direction in which the bracket body extends.

10. The selector according to claim 5, characterized in that Also includes: Opening and closing the flow path, selectively connecting the stent flow path with the moving path; as well as An opening and closing portion selectively opens and closes the stent flow path and the opening and closing flow path; The opening and closing portion comprises: An opening and closing component selectively opens and closes the stent flow path; as well as An elastic component, providing a restoring force to the opening and closing component; The support assembly includes a placement portion formed on one side of the support flow path and for placing the opening and closing component; The opening and closing member is seated in the seating portion by gravity and the elastic force of the elastic member, thereby sealing the stent flow path.

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