Polishing device for electrode of polycrystalline silicon reduction furnace

Abstract

The invention relates to the technical field of polycrystalline silicon, in particular to an electrode polishing device for a polycrystalline silicon reduction furnace. The device comprises a chassis (1), a rotating seat (2), a grinding seat (9), a bevel gear box (91), a driving shaft (92), a grinding conical cylinder (93) and a motor (10), the two rotating seats (2) are symmetrically arranged at the top end of the annular base plate (1) with the flange at the bottom, and the grinding seat (9) is movably arranged between the two rotating seats (2). A motor (10) is arranged at the bottom of the grinding base (9) and connected with a driving shaft (92), a plurality of bevel gear boxes (91) are arranged on the driving shaft (92), the bottoms of the bevel gear boxes (91) are connected with the grinding base (9), and a grinding conical barrel (93) is arranged at the other ends of the bevel gear boxes (91). The grinding device has the advantages of high grinding efficiency and high precision. The cleaning effect is good. The operation is convenient. Safety and environmental protection.

Description

Technical Field

[0001] The invention relates to the technical field of polysilicon, and in particular to an electrode polishing device for a polysilicon reduction furnace. Background Art

[0002] The modified Siemens method is the mainstream technology for producing polysilicon in the world. Its core equipment is the reduction furnace. The working principle of the reduction furnace is to react the mixed gas of trichlorosilane and hydrogen to generate polysilicon and deposit it on the silicon core by electrifying the high-temperature silicon core. The reaction materials of the reduction furnace enter the reduction furnace from the chassis. The reaction in the furnace uses the silicon core at about 1050°C as a carrier, and chemical vapor deposition occurs on the surface to generate polysilicon rods. In this process, a hard scale layer will be formed locally on the electrode and the chassis of the reduction furnace; the scale layer will have a serious impact on the insulation performance of the reduction furnace; at the same time, the reflection efficiency of the reflection surface of the reduction furnace is reduced, affecting its energy consumption index, and it will have a serious impact on product quality. Therefore, the scale layer must be cleaned in time.

[0003] At present, the scale layer mainly relies on manual operations such as sandpaper grinding or hand-held grinding tools. Manual operations will cause the surface grinding and polishing accuracy of the reduction furnace's electrodes, magnetic rings and furnace bottom to be uncontrollable. Insufficient grinding accuracy will lead to furnace inversion. During the manual grinding process, dust and toxic substances will cause harm to operators, and manual operation is inefficient. In summary, the current cleaning method is inefficient, ineffective, and easily poses a health threat to operators and affects product quality. Summary of the invention

[0004] The purpose of the present invention is to overcome the defects of the above-mentioned prior art and provide a polysilicon reduction furnace electrode grinding device with high grinding efficiency, high precision, good cleaning effect, convenient operation, safety and environmental protection.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] A polysilicon reduction furnace electrode grinding device, the device comprising: a chassis 1, a rotating seat 2, a grinding seat 9, a bevel gear box 91, a driving shaft 92, a grinding cone 93 and a motor 10;

[0007] The annular bottom plate 1 with a flange at the bottom is provided with two rotating seats 2 symmetrically at the top, and the grinding seat 9 is movably provided between the two rotating seats 2;

[0008] A motor 10 is arranged at the bottom of the grinding seat 9, and the motor 10 is connected to a driving shaft 92. A plurality of bevel gear boxes 91 are arranged on the driving shaft 92. The bottom of the bevel gear box 91 is connected to the grinding seat 9, and a grinding cone cylinder 93 is arranged at the other end.

[0009] Furthermore, an annular rack I5 is provided on the outer periphery of the top end of the chassis 1;

[0010] A driving motor 11 is disposed on the rotating seat 2, and a gear I16 on the driving motor 11 is meshed with a rack I5.

[0011] Furthermore, a vertical rack II6 is provided on one side of the rotating seat 2 close to the grinding seat 9, and a gear II17 driven by a lifting motor 12 respectively provided at both ends of the grinding seat 9 is meshed with the rack II6.

[0012] Furthermore, a low limiter 7 is arranged at the bottom end of the rack II6, and a high limiter 8 is arranged at the top end thereof.

[0013] Furthermore, a plurality of dust suction pipes 94 are provided at the bottom of the grinding seat 9, and the dust suction pipes 94 are connected to the exhaust pipe 13 through pipelines.

[0014] Furthermore, a tenon strip 14 is provided on one side of the rotating seat 2 close to the grinding seat 9 , and mortises 15 respectively provided on both ends of the grinding seat 9 are loosely matched with the tenon strip 14 .

[0015] Furthermore, the bottom of the chassis 1 is provided with three or more leveling feet 19; a level ruler 13 is provided on the leveling feet 19;

[0016] A level ruler II4 is arranged on the grinding seat 9.

[0017] Furthermore, a polishing layer 96 is detachably provided in the polishing cone 93 .

[0018] Furthermore, a plurality of fixing blocks 18 are arranged on the flange of the annular chassis 1 with a flange at the bottom;

[0019] A plurality of screw holes 20 are arranged on the flange of the annular chassis 1 with a flange at the bottom.

[0020] Furthermore, the device also includes a controller;

[0021] The controller is connected to the motor 10 , the driving motor 11 and the lifting motor 12 .

[0022] The present invention provides a polysilicon reduction furnace electrode grinding device, in which a grinding wheel and a dust suction pipe are arranged at the bottom of a grinding seat, and the grinding seat is connected to a rotating seat through a mortise and tenon gap fit with the tenon bar on the rotating seat, and the rotating seat is movably arranged on a chassis, and the chassis is connected to the reduction furnace chassis through bolts that match the screw holes thereon. The mortise and tenon gaps on the grinding seat match with the tenon bar, and the grinding seat can move on the tenon bar. Lifting motors are respectively arranged at both ends of the grinding seat, and the gears on the lifting motors are meshed with the vertical racks on the rotating seat, and the lifting motors drive the grinding seat to rise and fall between the two rotating seats. The low limiter and the high limiter limit the lowest and highest positions of the lifting motor.

[0023] The present invention provides a polysilicon reduction furnace electrode grinding device, wherein a driving motor is arranged on a rotating seat, and a gear on the driving motor meshes with an annular rack arranged on the top periphery of a chassis. The driving motor drives the rotating seat to move on the chassis, thereby driving the grinding seat to rotate in the chassis.

[0024] A motor is arranged at one end of the bottom of the grinding seat, and the motor is connected to the driving shaft. A plurality of bevel gear boxes are arranged on the driving shaft. The bottom of the bevel gear box is connected to the grinding seat, and a grinding cone cylinder is arranged at the other end of the bevel gear box. The bevel gear set in the bevel gear box transmits the power of the driving shaft to the grinding cone cylinder, thereby driving the grinding cone cylinder to rotate.

[0025] The present invention provides a polysilicon reduction furnace electrode grinding device, wherein a dust suction pipe is arranged at the bottom of a grinding seat, the dust suction pipe is connected to an exhaust pipe through a pipeline, and the exhaust pipe is connected to a dust suction device (such as a vacuum cleaner) to collect dust from grinding.

[0026] The present invention provides a polysilicon reduction furnace electrode grinding device, wherein three or more leveling feet are arranged at the bottom of the chassis, a level ruler is arranged on the leveling feet, and a level ruler can also be arranged on the grinding seat. When in use, the horizontal angle is adjusted to ensure that the entire device is installed horizontally on the reduction furnace chassis to ensure grinding accuracy.

[0027] A plurality of fixing blocks on the flange of the annular chassis with flange at the bottom can strengthen the strength of the chassis.

[0028] The lifting motor, the driving motor and the motor on the grinding seat are connected to the controller, and the lifting motor, the driving motor and the motor on the grinding seat are controlled by the controller to realize the automation and fine control of grinding and cleaning.

[0029] Compared with the prior art, the advantages of the polysilicon reduction furnace electrode polishing device provided by the present invention are as follows:

[0030] (1) High grinding efficiency and high precision.

[0031] (2) Good cleaning effect.

[0032] (3) Easy to operate.

[0033] (4)Safety and environmental protection. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 The present invention is a schematic structural diagram of a polysilicon reduction furnace electrode grinding device.

[0035] Figure 2 yes Figure 1 A schematic diagram of the structure of the enlarged view of the middle part.

[0036] Figure 3 The present invention provides a schematic cross-sectional structure diagram of a polysilicon reduction furnace electrode grinding device.

[0037] Figure 4 It is a partially enlarged structural schematic diagram of a polysilicon reduction furnace electrode grinding device provided by the present invention.

[0038] Figure 5 The present invention provides a schematic structural diagram of a grinding cone in a polysilicon reduction furnace electrode grinding device.

[0039] In the figure: 1 is a chassis, 2 is a rotating seat, 3 is a level ruler I, 4 is a level ruler II, 5 is a rack I, 6 is a rack II, 7 is a low limiter, 8 is a high limiter, 9 is a grinding seat, 91 is a bevel gear box, 92 is a drive shaft, 93 is a grinding cone, 94 is a dust suction pipe, 95 is a bevel gear set, 96 is a grinding layer, 10 is a motor, 11 is a drive motor, 12 is a lifting motor, 13 is an exhaust pipe, 14 is a tenon, 15 is a mortise, 16 is a gear I, 17 is a gear II, 18 is a fixing block, 19 is a level foot, and 20 is a screw hole. DETAILED DESCRIPTION

[0040] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail in the following examples. The following examples are only used to illustrate the invention but are not used to limit the scope of the present invention.

[0041] A polysilicon reduction furnace electrode grinding device, the device comprising: a chassis 1, a rotating seat 2, a grinding seat 9, a bevel gear box 91, a drive shaft 92, a grinding cone 93 and a motor 10; the annular chassis 1 with a flange at the bottom is axially symmetrically provided with two rotating seats 2 at the top, and the grinding seat 9 is movably arranged between the two rotating seats 2; a motor 10 is arranged at the bottom of the grinding seat 9, the motor 10 is connected to the drive shaft 92, a plurality of bevel gear boxes 91 are arranged on the drive shaft 92, the bottom of the bevel gear box 91 is connected to the grinding seat 9, and a grinding cone 93 is arranged at the other end.

[0042] Furthermore, an annular rack I5 is provided on the outer periphery of the top end of the chassis 1; a driving motor 11 is provided on the rotating seat 2, and a gear I16 on the driving motor 11 is meshed with the rack I5.

[0043] Furthermore, a vertical rack II6 is provided on one side of the rotating seat 2 close to the grinding seat 9, and a gear II17 driven by a lifting motor 12 respectively provided at both ends of the grinding seat 9 is meshed with the rack II6.

[0044] Furthermore, a low limiter 7 is arranged at the bottom end of the rack II6, and a high limiter 8 is arranged at the top end thereof.

[0045] Furthermore, a plurality of dust suction pipes 94 are provided at the bottom of the grinding seat 9, and the dust suction pipes 94 are connected to the exhaust pipe 13 through pipelines.

[0046] Furthermore, a tenon strip 14 is provided on one side of the rotating seat 2 close to the grinding seat 9 , and mortises 15 respectively provided on both ends of the grinding seat 9 are loosely matched with the tenon strip 14 .

[0047] Furthermore, more than three leveling feet 19 are arranged at the bottom of the chassis 1 ; a level ruler I3 is arranged on the leveling feet 19 ; and a level ruler II4 is arranged on the grinding seat 9 .

[0048] Furthermore, a polishing layer 96 is detachably provided in the polishing cone 93 .

[0049] Furthermore, a plurality of fixing blocks 18 are arranged on the flange of the annular chassis 1 with a flange at the bottom; and a plurality of screw holes 20 are arranged on the flange of the annular chassis 1 with a flange at the bottom.

[0050] Furthermore, the device also includes a controller;

[0051] The controller is connected to the motor 10 , the driving motor 11 and the lifting motor 12 .

[0052] Example 1

[0053] A polysilicon reduction furnace electrode grinding device, the device comprising: a chassis 1, a rotating seat 2, a grinding seat 9, a bevel gear box 91, a drive shaft 92, a grinding cone 93 and a motor 10; the annular chassis 1 with a flange at the bottom is axially symmetrically provided with two rotating seats 2 at the top, and the grinding seat 9 is movably arranged between the two rotating seats 2; a motor 10 is arranged at the bottom of the grinding seat 9, the motor 10 is connected to the drive shaft 92, a plurality of bevel gear boxes 91 are arranged on the drive shaft 92, the bottom of the bevel gear box 91 is connected to the grinding seat 9, and a grinding cone 93 is arranged at the other end.

[0054] An annular rack I5 is arranged on the outer periphery of the top of the chassis 1; a driving motor 11 is arranged on the rotating seat 2, and a gear I16 on the driving motor 11 is meshed with the rack I5. More than three level feet 19 are arranged at the bottom of the chassis 1; a level ruler I3 is arranged on the level foot 19; and a level ruler II4 is arranged on the grinding seat 9. A grinding layer 96 is detachably arranged in the grinding cone 93. A plurality of fixing blocks 18 are arranged on the flange of the annular chassis 1 with a flange at the bottom; and a plurality of screw holes 20 are arranged on the flange of the annular chassis 1 with a flange at the bottom.

[0055] Example 2

[0056] A polysilicon reduction furnace electrode grinding device, the device comprising: a chassis 1, a rotating seat 2, a grinding seat 9, a bevel gear box 91, a drive shaft 92, a grinding cone 93 and a motor 10; the annular chassis 1 with a flange at the bottom is axially symmetrically provided with two rotating seats 2 at the top, and the grinding seat 9 is movably arranged between the two rotating seats 2; a motor 10 is arranged at the bottom of the grinding seat 9, the motor 10 is connected to the drive shaft 92, a plurality of bevel gear boxes 91 are arranged on the drive shaft 92, the bottom of the bevel gear box 91 is connected to the grinding seat 9, and a grinding cone 93 is arranged at the other end.

[0057] An annular rack I5 is arranged on the outer periphery of the top of the chassis 1; a driving motor 11 is arranged on the rotating seat 2, and a gear I16 on the driving motor 11 meshes with the rack I5. A vertical rack II6 is arranged on the rotating seat 2 near the grinding seat 9, and a gear II17 driven by a lifting motor 12 arranged at both ends of the grinding seat 9 meshes with the rack II6. A low limiter 7 is arranged at the bottom of the rack II6, and a high limiter 8 is arranged at the top. A plurality of dust suction pipes 94 are arranged at the bottom of the grinding seat 9, and the dust suction pipes 94 are connected to the exhaust pipe 13 through a pipeline. A tenon 14 is arranged on the rotating seat 2 near the grinding seat 9, and a mortise 15 arranged at both ends of the grinding seat 9 is gap-matched with the tenon 14. More than three horizontal feet 19 are arranged at the bottom of the chassis 1; a level ruler I3 is arranged on the horizontal foot 19; and a level ruler II4 is arranged on the grinding seat 9. A removable grinding layer 96 is arranged in the grinding cone 93. A plurality of fixing blocks 18 are arranged on the flange of the annular chassis 1 with a flange at the bottom; a plurality of screw holes 20 are arranged on the flange of the annular chassis 1 with a flange at the bottom.

[0058] Example 3

[0059] A polysilicon reduction furnace electrode grinding device, the device comprising: a chassis 1, a rotating seat 2, a grinding seat 9, a bevel gear box 91, a drive shaft 92, a grinding cone 93 and a motor 10; the annular chassis 1 with a flange at the bottom is axially symmetrically provided with two rotating seats 2 at the top, and the grinding seat 9 is movably arranged between the two rotating seats 2; a motor 10 is arranged at the bottom of the grinding seat 9, the motor 10 is connected to the drive shaft 92, a plurality of bevel gear boxes 91 are arranged on the drive shaft 92, the bottom of the bevel gear box 91 is connected to the grinding seat 9, and a grinding cone 93 is arranged at the other end.

[0060] An annular rack I5 is arranged on the outer periphery of the top of the chassis 1; a driving motor 11 is arranged on the rotating seat 2, and a gear I16 on the driving motor 11 meshes with the rack I5. A vertical rack II6 is arranged on the rotating seat 2 near the grinding seat 9, and a gear II17 driven by a lifting motor 12 arranged at both ends of the grinding seat 9 meshes with the rack II6. A low limiter 7 is arranged at the bottom of the rack II6, and a high limiter 8 is arranged at the top. A plurality of dust suction pipes 94 are arranged at the bottom of the grinding seat 9, and the dust suction pipes 94 are connected to the exhaust pipe 13 through a pipeline. A tenon 14 is arranged on the rotating seat 2 near the grinding seat 9, and a mortise 15 arranged at both ends of the grinding seat 9 is gap-matched with the tenon 14. More than three horizontal feet 19 are arranged at the bottom of the chassis 1; a level ruler I3 is arranged on the horizontal foot 19; and a level ruler II4 is arranged on the grinding seat 9. A removable grinding layer 96 is arranged in the grinding cone 93. The flange of the annular chassis 1 with flange at the bottom is provided with a plurality of fixing blocks 18; the flange of the annular chassis 1 with flange at the bottom is provided with a plurality of screw holes 20. The device further comprises a controller; the controller is connected with the motor 10, the driving motor 11 and the lifting motor 12.

[0061] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various changes can be made to the technical scheme of the present invention. These simple variations all belong to the protection scope of the present invention.

[0062] It should also be noted that the various specific technical features and steps described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0063] In addition, various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A polysilicon reduction furnace electrode polishing device, characterized in that: The device comprises: a chassis (1), a rotating seat (2), a grinding seat (9), a bevel gear box (91), a driving shaft (92), a grinding cone cylinder (93) and a motor (10); The annular bottom plate (1) with a flange at the bottom has two rotating seats (2) symmetrically arranged at the top, and the grinding seat (9) is movably arranged between the two rotating seats (2); A motor (10) is arranged at the bottom of the grinding seat (9), and the motor (10) is connected to a driving shaft (92). A plurality of bevel gear boxes (91) are arranged on the driving shaft (92), and the bottom of the bevel gear box (91) is connected to the grinding seat (9), and a grinding cone cylinder (93) is arranged at the other end.

2. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: An annular rack I (5) is provided on the outer periphery of the top end of the chassis (1); A driving motor (11) is arranged on the rotating seat (2), and a gear I (16) on the driving motor (11) meshes with a rack I (5).

3. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: A vertical rack II (6) is arranged on one side of the rotating seat (2) close to the grinding seat (9), and a gear II (17) driven by lifting motors (12) respectively arranged at both ends of the grinding seat (9) is meshed with the rack II (6).

4. The electrode polishing device for a polysilicon reduction furnace according to claim 3, characterized in that: A low stopper (7) is arranged at the bottom end of the rack II (6), and a high stopper (8) is arranged at the top end thereof.

5. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: A plurality of dust suction pipes (94) are arranged at the bottom of the grinding seat (9), and the dust suction pipes (94) are connected to the exhaust pipe (13) through pipelines.

6. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: A tenon strip (14) is arranged on one side of the rotating seat (2) close to the grinding seat (9), and mortises (15) respectively arranged at two ends of the grinding seat (9) are loosely matched with the tenon strip (14).

7. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: The bottom of the chassis (1) is provided with more than three leveling feet (19); a level ruler I (3) is provided on the leveling feet (19); A level ruler II (4) is arranged on the grinding seat (9).

8. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: A grinding layer (96) is detachably arranged in the grinding cone (93).

9. The electrode polishing device for a polysilicon reduction furnace according to claim 1, characterized in that: A plurality of fixing blocks (18) are arranged on the flange of the annular chassis (1) with a flange at the bottom; A plurality of screw holes (20) are arranged on the flange of the annular bottom plate (1) with a flange at the bottom.

10. The electrode polishing device for a polysilicon reduction furnace according to claim 3, characterized in that: The device also includes a controller; The controller is connected to the motor (10), the drive motor (11) and the lifting motor (12).

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