Vacuum coating equipment for slender pipe fitting

By redesigning the arc source layout and optimized structure in the vacuum coating equipment, using motor transmission and three-dimensional rotary frame devices, the problem of uneven coating of slender pipe fittings is solved, and high-quality coating effect is achieved.

CN119243111APending Publication Date: 2025-01-03NUCLEAR POWER INSTITUTE OF CHINA +1
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Patent Information

Application Number
CN202411376207.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-30
Publication Date
2025-01-03

AI Technical Summary

Technical Problem

When existing vacuum coating equipment coats slender pipe fittings, due to the limited distribution of arc source, the coating is uneven and the coating quality is poor.

Method used

A vacuum coating equipment for elongated pipe fittings is designed, including cavity structure, molecular pump control device, arc source spiral arrangement along the circumference, motor transmission device and three-dimensional rotary frame device. Through arc source redesign and structural optimization, slender Uniform coating of pipe fittings under the action of arc source.

Benefits of technology

Complete coating of elongated pipe fittings is achieved, the coating quality is improved, and the coating uneven coating problem is solved due to limited arc source distribution.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The invention relates to vacuum coating equipment for a long and thin pipe fitting. A plurality of molecular pump control devices are fixed on one side of a cavity structure; a plurality of arc sources are arranged on the circumference of the cavity structure; the arc source is arranged on the circumferential surface of the cavity structure in a spiral rising mode. A motor transmission device is arranged outside the cavity structure; the motor transmission device drives the rotating stand driving device to rotate; the rotating stand driving device is connected with a three-dimensional rotating stand device; a slender pipe fitting is placed on the three-dimensional rotating stand device; and the rotating stand driving device drives the three-dimensional rotating stand device, so that the thin and long pipe fitting is coated under the action of the arc source while rotating in the cavity structure. After the arc sources are redesigned and rearranged and the internal structure is changed, complete coating of the slender pipe fitting is achieved, and the technical problem that in existing vacuum coating equipment, due to limitation of arc source distribution and the long size of the slender pipe fitting, complete and uniform coating cannot be achieved, and the coating quality is poor is solved.
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Description

Technical Field

[0001] The embodiments of the present invention relate to a vacuum coating device, and in particular to a vacuum coating device for a slender tube. Background Art

[0002] In existing vacuum coating equipment, due to the limitation of arc source distribution, when vacuum coating slender tubes with existing vacuum coating equipment, the slender tubes are often not completely and evenly coated due to their long size, resulting in very poor coating quality. Summary of the invention

[0003] The purpose of the embodiments of the present invention is to provide a vacuum coating device for a slender tube that can achieve complete coating of the slender tube.

[0004] In order to achieve the above-mentioned purpose, the embodiment of the present invention provides a vacuum coating device for a slender tube, comprising:

[0005] Cavity structure;

[0006] A molecular pump control device, wherein a plurality of the molecular pump control devices are fixed on one side of the cavity structure;

[0007] Arc sources, a plurality of said arc sources are arranged on the circumference of said cavity structure; said plurality of said arc sources are arranged in a spiral ascending manner on the circumferential surface of said cavity structure;

[0008] A motor transmission device, the motor transmission device is arranged outside the cavity structure;

[0009] A rotating frame driving device is arranged inside the cavity structure; the motor transmission device drives the rotating frame driving device to rotate;

[0010] A three-dimensional rotating frame device; the three-dimensional rotating frame device is connected to the rotating frame driving device; a slender tube is placed on the three-dimensional rotating frame device; the rotating frame driving device drives the three-dimensional rotating frame device so that the slender tube rotates in the cavity structure while the slender tube is coated under the action of the arc source.

[0011] Furthermore, in the vacuum coating device for the slender tube of the present invention, a furnace support base is fixed at the bottom of the cavity structure; and a row of windows is fixed between two rows of arc sources on one side of the cavity structure.

[0012] Furthermore, in the vacuum coating device for the elongated tube of the present invention, the cavity structure further comprises:

[0013] A cylinder body is arranged outside the cavity structure; the cylinder body is cylindrical;

[0014] A cylinder cover, fixedly connected to the cylinder body;

[0015] The cylinder bottom cover is fixedly connected to the cylinder bottom cover below the cylinder body.

[0016] Furthermore, in the vacuum coating equipment for slender tubes of the present invention, several heating plates are fixed on the bottom cover of the cylinder inside the cylinder and around the edge of the cylinder; each heating plate is composed of 3 heating units; and a water cooling jacket is fixed on the outside of the heating plate along the inner side of the cylinder.

[0017] Furthermore, in the vacuum coating device for the slender tube of the present invention, the molecular pump control device is arranged in a row longitudinally on the cylinder of the cavity structure; the molecular pump control device further includes:

[0018] A gate valve is fixed on the cylinder from top to bottom, along one side of the cylinder, and is connected to the cylinder;

[0019] A molecular pump is fixedly connected to the air extraction port of the molecular pump at the other end of the plug valve.

[0020] Furthermore, in the vacuum coating equipment for the slender tube of the present invention, several of the arc sources are arranged in a spiral ascending manner along the circumferential surface of the cavity structure; wherein several of the arc sources are arranged in a row and a column during the spiral ascending arrangement; and several of the arc sources are arranged in a parallelogram in the main viewing direction.

[0021] Furthermore, in the vacuum coating device for the elongated tube of the present invention, the motor transmission device further comprises:

[0022] A driving reduction motor, wherein a base of the driving reduction motor is fixed above the cylinder cover of the cavity structure;

[0023] A driving synchronous pulley is fixed on the output end of the driving reduction motor;

[0024] A rotating main shaft is movably connected to the axis of the cylinder cover; the rotating frame driving device is fixedly connected to the lower part of the rotating main shaft;

[0025] A passive synchronous pulley is located above the drum cover and fixed on the rotating main shaft;

[0026] A synchronous belt is arranged on the driving synchronous pulley and the passive synchronous pulley.

[0027] Furthermore, in the vacuum coating device for the elongated tube of the present invention, the three-dimensional rotating frame device further comprises:

[0028] A sealing kit, wherein a plurality of layers of the sealing kit are sleeved on the rotating main shaft of the motor transmission device above the cylinder cover of the cavity structure;

[0029] A large turntable is inside the cylinder, and the center of the large turntable is fixedly connected to the top of the rotating main shaft;

[0030] A large gear is above the large turntable, and the center of the large gear is fixed to the shaft sleeve extending into the cylinder;

[0031] A three-dimensional rotating frame, wherein a plurality of the three-dimensional rotating frames are movably connected along the circumference of the large rotating disk;

[0032] A pinion gear fixedly connected to the pinion gear above any one of the three-dimensional rotating frames;

[0033] The pinion gear meshes with the large gear.

[0034] Furthermore, in the vacuum coating equipment for the slender tube of the present invention, when the large turntable is rotating, any one of the three-dimensional rotating frames performs a first revolution around the large gear while performing a first rotation on itself.

[0035] Furthermore, in the vacuum coating device for the elongated tube of the present invention, any one of the three-dimensional rotating frames further comprises:

[0036] A first self-rotating shaft, one end of which is fixedly connected to the central axis of the pinion gear;

[0037] a ball bearing cover, which is transmitted into the ball bearing cover on the first rotating shaft;

[0038] A ball is placed in a ball box below the ball cover;

[0039] A self-rotating large gear, on the outside of the ball box, and a center hole of the self-rotating large gear fixed on the large turntable;

[0040] A self-rotating small gear meshing with the self-rotating large gear;

[0041] A second self-rotating shaft, one end of which is fixed in the central hole of the self-rotating pinion;

[0042] A small rotating disk is fixed on the small rotating disk at the other end of the second rotating shaft;

[0043] A self-rotating bearing box, the self-rotating bearing box is fixed on the small rotating disk;

[0044] A self-rotating ball, wherein the self-rotating ball is placed in the self-rotating bearing box;

[0045] A self-rotating ball ring, located inside the self-rotating ball and fixed on the second self-rotating shaft in a center hole on the self-rotating ball ring;

[0046] A slender tube is fixedly placed below the second rotation axis;

[0047] Driven by the first rotation shaft, the entire three-dimensional rotating frame is driven to rotate for the first time, and the small turntable is driven to revolve around the large rotation gear for the second time. At the same time, the small rotation gear drives the slender tube on the second rotation shaft to rotate for the second time.

[0048] Compared with the prior art, the embodiments of the present invention adopt a method of fixing a plurality of molecular pump control devices on one side of the cavity structure; setting a plurality of arc sources on the circumference of the cavity structure; the plurality of arc sources are arranged in a spiral ascending manner on the circumferential surface of the cavity structure; setting a motor transmission device on the outside of the cavity structure; setting a turntable drive device on the inside of the cavity structure; the motor transmission device drives the turntable drive device to rotate; connecting a three-dimensional turntable device to the turntable drive device; placing a slender pipe on the three-dimensional turntable device; and driving the three-dimensional turntable device on the turntable drive device, so that the slender pipe is coated under the action of the arc source while the cavity structure rotates. After the arc source is redesigned and arranged and the internal structure is changed, the slender pipe is completely coated, which solves the technical problem that in the existing vacuum coating equipment, due to the limitation of the arc source distribution, when the slender pipe is vacuum coated in the existing vacuum coating equipment, it is often impossible to completely coat the slender pipe uniformly due to the long size of the slender pipe, resulting in a very poor coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention after being rotated 90°;

[0050] Figure 2 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0051] Figure 3 It is a structural schematic diagram of the main viewing direction of the present invention;

[0052] Figure 4 It is a cross-sectional view taken along the line AA of the present invention;

[0053] Figure 5 It is a structural schematic diagram of the present invention in a left-side viewing direction;

[0054] Figure 6 is a schematic diagram of arc source distribution of the present invention;

[0055] Figure 7 It is a schematic diagram of heater distribution of the present invention;

[0056] Figure 8 It is a schematic diagram of the main view direction of the three-dimensional rotating frame device of the present invention;

[0057] Fig. 9 It is a schematic structural diagram of the three-dimensional rotating frame device of the present invention in the BB direction;

[0058] Fig.10 It is a structural schematic diagram of location I of the three-dimensional rotating frame device of the present invention. DETAILED DESCRIPTION

[0059] In order to make the purpose, technical scheme and advantages of the present invention clearer, the following will be described in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present invention, many technical details are provided in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical scheme claimed for protection in the claims of the present application can be implemented.

[0060] The embodiment of the present invention relates to a vacuum coating device for a slender tube, such as Figures 1 to 10 As shown, including:

[0061] The cavity structure 100 on the vacuum coating device for the elongated tube in this embodiment serves as a cavity for placing the elongated tube;

[0062] A plurality of molecular pump control devices 500 are fixed on one side of the cavity structure 100; the molecular pump control devices 500 are used to extract the vacuum of the cavity structure 100; so that the cavity structure 100 is kept in a vacuum state, and the vacuum conditions for vacuum coating can be maintained;

[0063] A plurality of arc sources 4 are arranged on the circumference of the cavity structure 100; the plurality of arc sources 4 are arranged in a spiral ascending manner on the circumferential surface of the cavity structure 100; the arc sources 4 function to evaporate the target material under vacuum conditions by using arc discharge technology and utilizing gas discharge to ionize both the evaporated material and the gas, so that the target material adheres to the surface of the slender tube to complete the coating.

[0064] A motor transmission device 200 is disposed outside the cavity structure 100; the motor transmission device 200 mainly provides driving force for driving the rotating frame driving device 300.

[0065] A rotating frame driving device 300 is arranged inside the cavity structure 100; the motor transmission device 200 drives the rotating frame driving device 300 to rotate; the rotating frame driving device 300 is used to drive the three-dimensional rotating frame device 400

[0066] The three-dimensional rotating frame device 400 is connected to the rotating frame driving device 300; the slender tube 39 is placed on the three-dimensional rotating frame device 400; the rotating frame driving device 300 drives the three-dimensional rotating frame device 400, so that the slender tube 39 rotates in the cavity structure 100, and the slender tube 39 is coated under the action of the arc source 4. In this embodiment, after the arc source 4 is redesigned and arranged and the internal structure is changed, the slender tube 39 is completely coated, which solves the technical problem that in the existing vacuum coating equipment, due to the limitation of the arc source distribution, when the slender tube is vacuum coated in the existing vacuum coating equipment, it is often impossible to completely coat the slender tube uniformly due to the long size of the slender tube, resulting in a very poor coating quality.

[0067] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, a furnace support base 12 is fixed at the bottom of the cavity structure 100; and a row of viewing windows 5 is fixed between two rows of arc sources 4 on one side of the cavity structure 100. The furnace support base 12 is used to support the vacuum coating equipment of the slender tube in this embodiment, and the viewing window 5 is used to observe the coating condition of the slender tube 39.

[0068] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, the cavity structure 100 further includes:

[0069] A cylinder is arranged outside the cavity structure 100; the cylinder 1 is cylindrical; the cylinder 1 serves as the cavity of the vacuum coating device for the elongated tube in this embodiment;

[0070] A cylinder cover 2 is fixedly connected above the cylinder body 1;

[0071] A cylinder bottom cover 13 is fixedly connected below the cylinder body 1. The cylinder cover 2, the cylinder body 1 and the cylinder bottom cover 13 constitute the structure of the cavity structure 100.

[0072] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, inside the cylinder 1, around the edge of the cylinder 1, a number of heating plates 6 are fixed on the cylinder bottom cover 13; each heating plate 6 is composed of 3 heating units, and there are 6 heating plates and 18 heating units in total; outside the heating plates 6, a water cooling jacket 11 is fixed along the inner side of the cylinder 1. The heating plates 6 are used to heat the coating environment of the slender tube; the water cooling jacket 11 heats and cools the coating environment of the slender tube; the water cooling jacket 11 and the heating plates 6 are mainly used to control the temperature of the coating environment.

[0073] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10As shown, the molecular pump control device 500 is arranged in a row longitudinally on the cylinder 1 of the cavity structure 100; the molecular pump control device 500 also includes:

[0074] A gate valve 10 is fixed on the cylinder 1 from top to bottom along one side of the cylinder 1 and is connected to the cylinder 1. The gate valve 10 is used for switching during vacuuming.

[0075] The other end of the gate valve 10 is fixedly connected to the air extraction port of the molecular pump 9 ; the molecular pump 9 is used to extract the vacuum in the cylinder 1 .

[0076] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, several arc sources 4 are arranged in a spiral rise along the circumferential surface of the cavity structure 100; several arc sources 4 are arranged in a row and a column during the spiral rise process; several arc sources 4 are arranged in a parallelogram in the main viewing direction. The arrangement of the arc sources 4 can better coat the slender tube 39 completely, solving the technical problem that in the existing vacuum coating equipment, due to the limitation of arc source distribution, when vacuum coating the slender tube, the existing vacuum coating equipment often cannot coat the slender tube completely and evenly due to the long size of the slender tube, resulting in poor coating quality.

[0077] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, the motor transmission device 200 further includes:

[0078] A base of a driving reduction motor 7 is fixed above the cylinder cover 2 of the cavity structure 100; the driving reduction motor 7 serves as the driving force output of the motor transmission device 200;

[0079] A driving synchronous pulley 71 is fixed on the output end of the driving reduction motor 7; the driving synchronous pulley 71 is used to drive the rotating main shaft 8

[0080] The rotating main shaft 8 is movably connected to the axis position of the cylinder cover 2; the rotating main shaft 8 is fixedly connected to the rotating frame driving device 300 below; the rotating main shaft 8 mainly drives the rotating frame driving device 300 under the output power of the driving reduction motor 7. The rotating frame driving device 300 includes the rotating main shaft 8 and a large turntable 31.

[0081] Above the drum cover 2, a passive synchronous pulley 72 is fixed on the rotating main shaft 8;

[0082] The synchronous belt 73 is arranged on the driving synchronous pulley 71 and the driven synchronous pulley 73. The synchronous belt 73 is installed on the driven synchronous pulley 72 and the driving synchronous pulley 71, and the above structure constitutes the structure of the motor transmission device 200.

[0083] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, the three-dimensional rotating frame device 400 further includes:

[0084] Above the cylinder cover 2 of the cavity structure 100 , a plurality of layers of sealing kits 40 are sleeved on the rotating main shaft 8 of the motor transmission device 200 ; the function of the sealing kit 40 is to seal the rotating main shaft 8 .

[0085] In the cylinder 1, the center of the large turntable 31 is fixedly connected to the top of the rotating main shaft 8; after the rotating main shaft 8 is connected to the large turntable 31, the rotating main shaft 8 drives the large turntable 31 to rotate.

[0086] Above the large turntable 31 , the center of the large gear 31 is fixed to a shaft sleeve 41 extending into the cylinder 1 ; the large gear 32 is used to mesh with the small gear 33 .

[0087] Several three-dimensional rotating racks 600 are movably connected along the circumference of the large rotating disk 31; the three-dimensional rotating racks 600 are used to install the slender pipes 39;

[0088] A small gear 33 is fixedly connected above any three-dimensional rotating frame 600; after the small gear 33 is meshed with the large gear 32, the three-dimensional rotating frame 600 is driven to perform the first revolution and the first rotation;

[0089] The small gear 33 meshes with the large gear 32 .

[0090] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, during the rotation of the large turntable 31 , any three-dimensional rotating frame 600 performs a first revolution around the large gear 32 while performing a first rotation.

[0091] In order to achieve the above technical effects, the vacuum coating equipment of the slender tube in this embodiment, such as Figures 1 to 10 As shown, any three-dimensional rotating frame 600 further includes:

[0092] A first self-rotating shaft 34, one end of which is fixedly connected to the central axis of the pinion gear 33;

[0093] The ball is transmitted to the ball cover 42 on the first rotating shaft 34;

[0094] The ball 38 is placed in the ball cage 43 below the ball cover 42; the ball cover 42, the ball 38 and the ball cage 43 form a rotating structure, and the ball 38 replaces the bearing to ensure that the rotating structure does not get stuck under high temperature conditions.

[0095] On the outside of the ball box 43, a center hole of the rotating large gear 35 is fixed on the large turntable 31;

[0096] The rotating pinion 36 is meshed with the rotating large gear 35; the rotating pinion 36 revolves around the rotating large gear 35;

[0097] One end of the second rotation shaft 37 is fixed in the center hole of the rotation pinion 36; the second rotation shaft 37 drives the small rotating disk 44 to rotate;

[0098] The other end of the second rotation shaft 37 is fixed on a small rotating disk 44;

[0099] A self-rotating bearing box 45 is fixed on the small rotating disk 44;

[0100] A self-rotating ball 46 is placed in the self-rotating bearing box 45;

[0101] On the inner side of the rotating ball 46, in the center hole of the rotating ball ring 47 fixed on the second rotating shaft 37; the rotating bearing box 45, the rotating ball 46 and the rotating ball ring 47 constitute a rotating structure, and the rotating ball 46 replaces the bearing to ensure that the rotating structure does not get stuck under high temperature conditions.

[0102] A slender tube 39 is fixedly placed below the second rotation axis 37;

[0103] Driven by the first rotating shaft 34, the entire three-dimensional rotating frame 600 rotates for the first time, while driving the small turntable 44 to revolve around the rotating large gear 35 for the second time, and the rotating small gear 36 drives the slender tube 39 on the second rotating shaft 37 to rotate for the second time.

[0104] The above-mentioned rotating mechanism can ensure that any three-dimensional rotating frame 600 can rotate evenly, and while revolving, it can also continuously rotate on its own, thereby ensuring that the film layer of the slender tube 39 remains uniform during coating.

[0105] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present invention, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A vacuum coating device for a slender tube, characterized in that: include: Cavity structure; A molecular pump control device, wherein a plurality of the molecular pump control devices are fixed on one side of the cavity structure; Arc sources, a plurality of said arc sources are arranged on the circumference of said cavity structure; said plurality of said arc sources are arranged in a spiral ascending manner on the circumferential surface of said cavity structure; A motor transmission device, the motor transmission device is arranged outside the cavity structure; A rotating frame driving device is arranged inside the cavity structure; the motor transmission device drives the rotating frame driving device to rotate; A three-dimensional rotating frame device; the three-dimensional rotating frame device is connected to the rotating frame driving device; A slender tube is placed on the three-dimensional rotating frame device; the rotating frame driving device drives the three-dimensional rotating frame device, so that the slender tube rotates in the cavity structure while the slender tube is coated under the action of the arc source.

2. The vacuum coating device for elongated tubes according to claim 1, characterized in that: A furnace support base is fixed at the bottom of the cavity structure; and a row of viewing windows is fixed between two rows of arc sources on one side of the cavity structure.

3. The vacuum coating device for a slender tube according to claim 1, characterized in that: The cavity structure further includes: A cylinder body is arranged outside the cavity structure; the cylinder body is cylindrical; A cylinder cover, fixedly connected to the cylinder body; The cylinder bottom cover is fixedly connected to the cylinder bottom cover below the cylinder body.

4. The vacuum coating device for a slender tube according to claim 1, characterized in that: Inside the cylinder, around the edge of the cylinder, a plurality of heating plates are fixed on the cylinder bottom cover; each heating plate is composed of three heating units; outside the heating plates, a water cooling jacket is fixed along the inner side of the cylinder.

5. The vacuum coating device for a slender tube according to claim 1, characterized in that: The molecular pump control device is arranged in a row longitudinally on the cylinder of the cavity structure; the molecular pump control device also includes: A gate valve is fixed on the cylinder from top to bottom, along one side of the cylinder, and is connected to the cylinder; A molecular pump is fixedly connected to the air extraction port of the molecular pump at the other end of the plug valve.

6. The vacuum coating device for an elongated tube according to claim 1, characterized in that: Several arc sources are arranged in a spiral ascending manner along the circumferential surface of the cavity structure; several arc sources are arranged in a row and a column during the spiral ascending arrangement; several arc sources are arranged in a parallelogram in the main viewing direction.

7. The vacuum coating device for a slender tube according to claim 1, characterized in that: The motor transmission device further comprises: A driving reduction motor, wherein a base of the driving reduction motor is fixed above the cylinder cover of the cavity structure; A driving synchronous pulley is fixed on the output end of the driving reduction motor; A rotating main shaft is movably connected to the axis of the cylinder cover; the rotating frame driving device is fixedly connected to the lower part of the rotating main shaft; A passive synchronous pulley is located above the drum cover and fixed on the rotating main shaft; A synchronous belt is arranged on the driving synchronous pulley and the passive synchronous pulley.

8. The vacuum coating device for a slender tube according to claim 1, characterized in that: The three-dimensional rotating frame device further comprises: A sealing kit, wherein a plurality of layers of the sealing kit are sleeved on the rotating main shaft of the motor transmission device above the cylinder cover of the cavity structure; A large turntable is inside the cylinder, and the center of the large turntable is fixedly connected to the top of the rotating main shaft; A large gear is above the large turntable, and the center of the large gear is fixed to the shaft sleeve extending into the cylinder; A three-dimensional rotating frame, wherein a plurality of the three-dimensional rotating frames are movably connected along the circumference of the large rotating disk; A pinion gear fixedly connected to the pinion gear above any one of the three-dimensional rotating frames; The pinion gear meshes with the large gear.

9. The vacuum coating device for an elongated tube according to claim 8, characterized in that: During the rotation of the large turntable, any one of the three-dimensional rotating frames performs a first revolution around the large gear while performing a first rotation on itself.

10. The vacuum coating device for an elongated tube according to claim 8, characterized in that: Any one of the three-dimensional rotating frames further comprises: A first self-rotating shaft, one end of which is fixedly connected to the central axis of the pinion gear; a ball bearing cover, which is transmitted into the ball bearing cover on the first rotating shaft; A ball is placed in a ball box below the ball cover; A self-rotating large gear, on the outside of the ball box, and a center hole of the self-rotating large gear fixed on the large turntable; A self-rotating small gear meshing with the self-rotating large gear; A second self-rotating shaft, one end of which is fixed in the central hole of the self-rotating pinion; A small rotating disk is fixed on the small rotating disk at the other end of the second rotating shaft; A self-rotating bearing box, the self-rotating bearing box is fixed on the small rotating disk; A self-rotating ball, wherein the self-rotating ball is placed in the self-rotating bearing box; A self-rotating ball ring, located inside the self-rotating ball and fixed on the second self-rotating shaft in a center hole on the self-rotating ball ring; A slender tube is fixedly placed below the second rotation axis; Driven by the first rotation shaft, the entire three-dimensional rotating frame is driven to rotate for the first time, while the small turntable is driven to revolve around the large rotation gear for the second time, and the small rotation gear drives the slender tube on the second rotation shaft to rotate for the second time.