Multi-process coating equipment and method thereof

Abstract

The invention relates to multi-process coating equipment. The multi-process coating equipment comprises a feeding cavity; an inlet of the heating cavity is operably communicated with an outlet of the feeding cavity; the plurality of process cavities are connected in series and are operably communicated, and the inlet of the first process cavity is operably communicated with the outlet of the heating cavity; an inlet of the discharging cavity is operably communicated with an outlet of the last process cavity; and the vacuum system is in operable communication with the feeding cavity, the heating cavity, the plurality of process cavities and the discharging cavity. In addition, the invention further relates to a film coating method adopting the multi-process film coating equipment. The device can support more than three coating processes for one-time deposition, has the characteristics of convenience in feeding and discharging, high coating speed, high coating quality and the like, does not generate plasmas in the coating process, is high in deposited film quality, and does not generate harmful gases at the same time.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and more specifically, to a multi-process coating equipment and a method thereof. Background Art

[0002] The mainstream coating equipment on the market currently uses chemical vapor deposition technology, the principle of which is to use gaseous precursors to decompose certain components in the gaseous precursors through chemical reactions between atoms and molecules to form a thin film on the substrate. The commonly used equipment is PECVD, which stimulates the reaction gas to decompose into highly reactive substances in a glow discharge plasma, and these substances undergo chemical reactions on the substrate surface to deposit and produce thin films.

[0003] However, current PECVD technology equipment has the following disadvantages: (1) slow film deposition speed; (2) easy production of particles during the process, affecting the coating quality; (3) plasma is generated during the coating process, affecting the coating quality.

[0004] Therefore, the existing technology needs to be improved, and a new type of coating equipment needs to be designed urgently. Summary of the invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a multi-process coating device and method thereof. The design of the present invention does not generate plasma during the coating process, the deposited film is of high quality, and no harmful gas is generated.

[0006] In order to solve the above technical problems or achieve the above objectives, the present invention adopts the following technical solutions:

[0007] According to one aspect of the present invention, there is provided a multi-process coating device, comprising:

[0008] Feed cavity;

[0009] a heating chamber, the inlet of the heating chamber being operably connected to the outlet of the feed chamber;

[0010] A plurality of process chambers, wherein the plurality of process chambers are operably connected in series, and an inlet of a first process chamber is operably connected to an outlet of the heating chamber;

[0011] a discharge chamber, the inlet of which is operably connected to the outlet of the last process chamber;

[0012] A vacuum system is operably connected to the feed chamber, the heating chamber, the plurality of process chambers and the discharge chamber.

[0013] In one embodiment of the present invention, the multi-process coating equipment further comprises:

[0014] A loading rack, which is operably connected to the inlet of the feeding chamber and transports the carrier to be coated into the feeding chamber;

[0015] The unloading rack is operably connected to the outlet of the discharge chamber and transports the coated carrier to a desired position.

[0016] In one embodiment of the present invention, the loading rack conveys the carrier to be coated into the feeding chamber by automatic or manual operation of the driving mechanism, and the unloading rack conveys the coated carrier to the desired position by automatic or manual operation of the driving mechanism.

[0017] In one embodiment of the present invention, the loading rack, the feeding chamber, the heating chamber, the plurality of process chambers, the discharging chamber and the unloading rack are operably connected to each other via an isolation mechanism.

[0018] In one embodiment of the present invention, the isolation mechanism comprises a gate valve and / or a flap valve.

[0019] In one embodiment of the present invention, the components of the feed chamber, the heating chamber, the plurality of process chambers and the discharge chamber all include:

[0020] A lower frame, the lower frame being fixed on the ground;

[0021] A cavity, which is fixed on the lower frame;

[0022] The tray conveying assembly is fixed on the cavity and carries and conveys the corresponding carrier plate.

[0023] In one embodiment of the present invention, the lower frame is fixed to the ground by foot cup installation, the cavity is fixed to the lower frame by leveling with a combination of screws and top screws, and the pallet conveying assembly is fixed to the cavity by leveling with a combination of screws and top screws.

[0024] In one embodiment of the present invention, both the loading rack and the unloading rack include:

[0025] a lower frame fixed to the ground;

[0026] an upper frame fixed to the lower frame;

[0027] The pallet conveying assembly is fixed on the upper frame and carries and conveys the corresponding carrier plate.

[0028] In one embodiment of the present invention, the lower frame is fixed to the ground by foot cups, the upper frame is fixed to the lower frame by leveling with a combination of screws and top screws, and the pallet conveying assembly is fixed to the upper frame by leveling with a combination of screws and top screws.

[0029] In one embodiment of the present invention, the vacuum system includes any one of a dry pump and a molecular pump or a combination thereof.

[0030] In one embodiment of the present invention, when the vacuum system includes both a dry pump and a molecular pump, the feed chamber and the discharge chamber are operably connected to the dry pump only, the heating chamber and the multiple process chambers are operably connected to the combination of the dry pump and the molecular pump, and the dry pump is connected to the exhaust port of the molecular pump, and the molecular pump is connected to the corresponding chamber through an angle valve.

[0031] In one embodiment of the present invention, the dry pump controls the vacuum degree in the corresponding cavity through the first baffle valve, and the molecular pump controls the vacuum degree in the corresponding cavity through the second baffle valve.

[0032] In one embodiment of the present invention, an adjustable hot wire structure is disposed in each process chamber, and the adjustable hot wire structure adjusts the distance from the carrier substrate to adjust the temperature of the carrier.

[0033] In one embodiment of the present invention, the adjustable hot wire structure comprises:

[0034] Hot wire fixing seat;

[0035] A hot wire chuck, wherein a hot wire adjustment support is provided on the hot wire chuck;

[0036] An electrode module, the electrode module is connected to the hot wire clamp;

[0037] A hot wire, one end of which is connected to a hot wire fixing seat through a hot wire connecting block and the other end is connected to a hot wire adjusting support. The hot wire, the hot wire connecting block and the hot wire fixing seat move together so that the hot wire is at different positions on the hot wire adjusting support, thereby adjusting the distance between the hot wire and the carrier substrate.

[0038] In one embodiment of the present invention, multiple process chambers continuously coat the same carrier, or multiple processes successively coat multiple carriers.

[0039] According to another aspect of the present invention, a multi-process coating method is provided. The multi-process coating method is implemented by using the multi-process coating device as described above. The multi-process coating method comprises the following steps:

[0040] The feeding chamber, the heating chamber, the multiple process chambers and the discharging chamber are evacuated by a vacuum system;

[0041] In response to the vacuum treatment reaching a preset pressure, the carrier in the feed chamber is sequentially fed into the heating chamber and a plurality of process chambers for coating treatment;

[0042] After the last process chamber is processed, the coated carrier is placed into the discharge chamber and discharged after the vacuum is broken.

[0043] In one embodiment of the present invention, the multi-process coating method further comprises:

[0044] The carrier plate to be coated is transported into the feed chamber through the loading rack;

[0045] The coated carrier is transported to the required position through the unloading rack.

[0046] The technical solution provided by the present invention has the following advantages compared with the prior art:

[0047] The structural solution of the present invention is simple in layout and convenient to use. The present invention can realize continuous coating and has high use efficiency. The present invention can support the deposition of more than three coating processes at one time, and has the characteristics of convenient loading and unloading, adjustable spacing between the hot wire and the carrier, fast coating speed, high coating quality, etc. In addition, the present invention does not generate plasma during the coating process, the deposited film has high quality, and no harmful gas is generated. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0049] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the description of the embodiments or the prior art are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0050] Figure 1 A schematic diagram showing the structure of a multi-process coating device provided in a preferred embodiment of the present invention is shown;

[0051] Figure 2 A schematic diagram of the composition structure of the vacuum system used in the preferred embodiment of the present invention is shown;

[0052] Figure 3 A brief structural diagram of an adjustable hot wire structure used in a preferred embodiment of the present invention is shown;

[0053] Figure 4 Shows Figure 1 Schematic diagram of the specific structure

[0054] Figure 5a and 5b Shows Figure 4 The front view and side view of the upper and lower material rack structures;

[0055] Figure 6a and 6b Shows Figure 4 Front and side views of each chamber assembly used in;

[0056] Figure 7a and 7b Shows Figure 4 Front and side views of the connection between the dry pump and the molecular pump of the medium vacuum system;

[0057] Figure 8 A schematic diagram showing the structure of a multi-process coating device provided in another embodiment of the present invention is shown;

[0058] Fig. 9 A schematic structural diagram of a multi-process coating device provided in another embodiment of the present invention is shown;

[0059] Fig.10 A schematic structural diagram of a multi-process coating device provided in another embodiment of the present invention is shown;

[0060] Fig.11 A schematic diagram of the structure of a vacuum system used in another embodiment of the present invention is shown;

[0061] Fig.12 A schematic diagram showing the composition structure of a vacuum system used in another embodiment of the present invention is shown;

[0062] Fig.13 A schematic diagram showing the composition structure of a vacuum system used in another embodiment of the present invention is shown;

[0063] Fig.14 A schematic structural diagram of an adjustable hot wire structure used in another embodiment of the present invention is shown;

[0064] Fig.15 A schematic flow chart of a multi-process coating method provided in a preferred embodiment of the present invention is shown.

[0065] Among them, 1. loading rack; 2. feeding chamber; 3. heating chamber; 4. process chamber; 41. first process chamber; 42. second process chamber; 43. third process chamber; 5. discharging chamber; 6. unloading rack; 7. vacuum system; 8. dry pump; 9. molecular pump; 10. first baffle valve; 11. second baffle valve; 12. upper and lower rack parts; 13. chamber assembly; 14. upper frame; 15. lower frame; 16. tray conveying assembly; 17. isolation mechanism; 18. lower frame; 19. cavity; 20. angle valve; 21. carrier substrate; 22. hot wire; 23. hot wire fixing seat; 24. hot wire connecting block; 25. hot wire adjustment support; 26. hot wire chuck; 27. electrode module; 28. slide rod. DETAILED DESCRIPTION

[0066] In order to more clearly understand the above-mentioned purposes, features and advantages of the present disclosure, the embodiments of the present disclosure will be further described below. It should be noted that the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0067] In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure, but the present disclosure may also be implemented in other ways different from those described herein; obviously, the embodiments in the specification are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0068] Figure 1 FIG. 2 shows a schematic diagram of the structure of a multi-process coating device provided in a preferred embodiment of the present invention. Figure 1 As shown, a multi-process coating equipment includes: a loading rack 1, a feeding chamber 2, a heating chamber 3, a plurality of process chambers 4 (including a first process chamber 41, a second process chamber 42 and a third process chamber 43), a discharging chamber 5, a discharging rack 6 and a vacuum system 7. The loading rack 1 is operably connected to the inlet of the feeding chamber 2 and conveys the carrier to be coated to the feeding chamber 2, the inlet of the heating chamber 3 is operably connected to the outlet of the feeding chamber 2, the first process chamber 41, the second process chamber 42 and the third process chamber 43 are operably connected in series, and the inlet of the first process chamber 41 is operably connected to the outlet of the heating chamber 3, the inlet of the discharging chamber 5 is operably connected to the outlet of the third process chamber 43, the vacuum system 7 is operably connected to the feeding chamber 2, the heating chamber 3, the first process chamber 41, the second process chamber 42, the third process chamber 43 and the discharging chamber 5, and the discharging rack 6 is operably connected to the outlet of the discharging chamber 5 and conveys the coated carrier to a desired position.

[0069] The present invention can support the deposition of more than three coating processes at one time, and has the characteristics of convenient loading and unloading, fast coating speed, high coating quality, etc. In addition, the present invention does not generate plasma during the coating process, the deposited film has high quality, and no harmful gases are generated.

[0070] In the above Figure 1 In the structure shown, the loading rack 1 and the unloading rack 6 can realize the rapid loading and unloading of the carrier plate. The loading rack 1 can transport the carrier plate to be coated into the feed chamber 2 through the automatic operation of the driving mechanism or manual operation, and the unloading rack 6 can also transport the coated carrier plate to the desired position through the automatic operation of the driving mechanism or manual operation.

[0071] In the above Figure 1 In the structure shown, the loading rack 1, the feeding chamber 2, the heating chamber 3, the plurality of process chambers 4, the discharging chamber 5 and the unloading rack 6 are connected to each other through an isolation mechanism 17 ( Figure 4 As shown), the isolation mechanism 17 is operably connected, and includes a gate valve and / or a flap valve, and a gate valve is preferably used.

[0072] Figure 2 The present invention is shown Figure 1 Schematic diagram of the composition of the vacuum system used in the structure. Figure 2 As shown, the vacuum system 7 includes both a dry pump 8 and a molecular pump 9, the feed chamber 2 and the discharge chamber 5 are only operably connected to the dry pump 8, and the heating chamber 3 and the plurality of process chambers 4 are operably connected to the combination of the dry pump 8 and the molecular pump 9. In addition, the dry pump 8 controls the vacuum degree in the corresponding chamber through the first baffle valve 10, and the molecular pump 9 controls the vacuum degree in the corresponding chamber through the second baffle valve 11. In this embodiment, the isolation of the feed chamber 2 ensures that the process chamber 4 does not directly contact the atmosphere, prevents the atmosphere from polluting the interior of the process chamber 4, and improves the quality of the deposited film in the process chamber 4.

[0073] Figure 3 Shown above Figure 1 A brief structural diagram of the adjustable hot wire structure used in the structure. Figure 3 As shown, an adjustable hot wire structure is provided in each process chamber 4, through which the distance between the hot wire and the carrier can be adjusted to adjust the temperature of the carrier. The adjustable hot wire structure specifically includes: a hot wire fixing seat 23, a hot wire clamp 26, an electrode module 27, a hot wire 22, a hot wire connecting block 24 and a hot wire adjusting support 25, the hot wire clamp 26 is provided with a hot wire adjusting support 25, the electrode module 27 is connected to the hot wire clamp 26, one end of the hot wire 22 is connected to the hot wire fixing seat 23 through the hot wire connecting block 24 and the other end is connected to the hot wire adjusting support 25, while keeping the electrode module 27 and the hot wire clamp 26 unchanged, the hot wire 22, the hot wire connecting block 24 and the hot wire fixing seat 23 are moved together so that the hot wire 22 is at different positions on the hot wire adjusting support 25, and the distance between the hot wire 22 and the carrier substrate 21 is adjusted.

[0074] Figure 4 Shown above Figure 1 Specific structural diagram of Figure 4 As shown, in Figure 4 In the above figure, the upper and lower material racks 12 are on both sides (the upper material rack 1 is on the far left, and the lower material rack 6 is on the far right), and the chamber components 13 of each chamber (feeding chamber 2, heating chamber 3, three process chambers 4 and discharge chamber 5) are in the middle. Each chamber is operably connected or communicated through an isolation mechanism 17 (preferably a gate valve). Figure 4 In the figure below, the structure of the vacuum system 7 is shown.

[0075] Figure 5a and 5b Shows Figure 4 The front and side views of the upper and lower material racks. Figure 5a and 5bAs shown, the upper and lower racks 1 and 6 in the upper and lower racks 12 each include an upper frame 14, a lower frame 15, and a pallet conveying assembly 16. The lower frame 15 is fixed to the ground through a foot cup installation, the upper frame 14 is fixed to the lower frame 15 through leveling by a combination of screws and top screws, and the pallet conveying assembly 16 is fixed to the upper frame 14 through leveling by a combination of screws and top screws and carries and conveys the corresponding carrier.

[0076] Figure 6a and 6b Shows Figure 4 The front and side views of the various chamber components used in the embodiment. Figure 6a and 6b As shown, the components of the feed chamber 2, the heating chamber 3, the three process chambers 4 and the discharge chamber 5 all include a lower frame 18, a chamber 19 and a pallet conveying assembly 16. The lower frame 18 is fixed to the ground through a foot cup installation, the chamber 19 is fixed to the lower frame 18 through leveling by a combination of screws and top screws, and the pallet conveying assembly 16 is fixed to the chamber 19 through leveling by a combination of screws and top screws and carries and conveys the corresponding carrier. The chamber 19 is fixed in a similar manner to the upper frame 14, and the chambers 19 are connected by a gate valve: the conventional practice is to use a flap valve, but since the flap valve is difficult to install and is not modular and easy to clean, it is upgraded here to a modular gate valve. The gate valve has no installation direction requirements, so the structure of the entire system can be greatly simplified, and all chambers 19 can be the same, and the connection of the chambers 19 is also solved by the connection of the gate valve.

[0077] Figure 7a and 7b Shows Figure 4 Front and side views of the connection between the dry pump and molecular pump of the medium vacuum system. Figure 7a and 7b As shown, the vacuum system 7 includes a dry pump 8 and a molecular pump 9 . The dry pump 8 is connected to the exhaust port of the molecular pump 9 and serves as a pre-pump of the molecular pump 9 . The molecular pump 9 is connected to the corresponding chamber through an angle valve 20 .

[0078] When the above-mentioned equipment is used, when depositing a thin film on the substrate in the carrier, first put the carrier into the loading rack 1, open the gate valve at the entrance of the feeding chamber 2, and control the driving mechanism of the loading rack 1 to automatically or manually transport the carrier into the feeding chamber 2. After closing the entrance of the feeding chamber 2, all chambers of the entire equipment are evacuated. After reaching the preset air pressure, open the gate valve between the feeding chamber 2 and the heating chamber 3, so that the carrier enters the heating chamber 3 for preheating treatment, and then open the gate valve between the heating chamber 3 and the first process chamber 41, push the carrier into the first process chamber 41, and close the gate valve to perform process 1. After process 1 in the first process chamber 41 is completed, if it is necessary to enter the second process chamber 42 for process 2, open the gate valve between the first process chamber 41 and the second process chamber 42, push the carrier into the second process chamber 42, and close the gate valve to perform process 2. After the process 2 in the second process chamber 42 is completed, if it is necessary to enter the third process chamber 43 for process 3, the gate valve between the second process chamber 42 and the third process chamber 43 is opened, and the carrier is pushed into the third process chamber 43. After closing the gate valve, process 3 is performed, and so on, until all the required processes are completed. Then, the gate valve between the third process chamber 43 and the unloading chamber 5 is opened, and the carrier is pushed into the unloading chamber 5, and the vacuum of the unloading chamber 5 is broken before unloading. The uncoated carrier is transported to the desired position through the unloading rack 6.

[0079] In the operation of the above equipment, the same carrier can be processed through the first process chamber 41, the second process chamber 42, and the third process chamber 43. Of course, the above equipment can also support different carriers to be processed at the same time. When the carrier one is processed in the first process chamber 41, the carrier two can enter the heating chamber 2 for heating. When the carrier one is processed and discharged, the carrier two can enter the corresponding first process chamber 41 for processing, so as to realize the coating of multiple carriers one after another.

[0080] Figure 8 FIG. 2 shows a schematic diagram of the structure of a multi-process coating device provided in another embodiment of the present invention. Figure 8 As shown, Figure 1 The structure shown is similar to that shown in FIG. 1 , in this embodiment, two sets of parallel coating equipment are arranged between the loading rack 1 and the unloading rack 6. Figure 8, the loading rack 1 can transport the carrier to the upper and lower sets of coating equipment. For example, the loading rack 1 can transport the carrier to the upper coating equipment. After passing through the feeding chamber 2, the vacuum system 7 is vacuumized, and then enters the heating chamber 3 for preheating, and then enters the first process chamber 41 for process one, the second process chamber 42 for process two, and the third process chamber 43 for process three. After that, it enters the discharge chamber 5 to break the vacuum and is transported through the unloading rack 6. At this time, the lower coating equipment can be used as a backup. Similarly, the loading rack 1 can transport the carrier to the lower coating equipment, and the upper coating equipment is used as a backup. Of course, the upper and lower sets of coating equipment in this embodiment can be used at the same time. For example, when coating multiple carriers, the loading rack 1 can transport the corresponding carriers to the upper and lower sets of coating equipment respectively, so as to realize multi-process coating of multiple carriers at the same time.

[0081] Fig. 9 FIG. 2 shows a schematic diagram of the structure of a multi-process coating device provided in another embodiment of the present invention. Fig. 9 As shown, Figure 8 Similar to the structure shown in FIG. 1 , two sets of parallel coating equipment are also provided in this embodiment. Fig. 9 , the loading rack 1 can transport the carrier plate to the feed chamber 2, and the outlet of the feed chamber 2 is set to two upper and lower outlets, and the two outlets are respectively operably connected to the heating chamber 3, the first process chamber 41, the second process chamber 42 and the third process chamber 43 in turn, and then the two outlets of the third process chamber 43 are respectively operably connected to the two entrances of the discharge chamber 5, and the outlet of the discharge chamber 5 is operably connected to the unloading rack 6. The loading rack 1 transports the carrier plate to the feed chamber 2, and the vacuum system 7 is vacuumized. The carrier plate in the feed chamber 2 can selectively enter the heating chamber 3 of the upper coating equipment for preheating, and then enter the first process chamber 41 for process one, the second process chamber 42 for process two, and the third process chamber 43 for process three, and then enter the discharge chamber 5 to break the vacuum and transport it through the unloading rack 6. At this time, the coating equipment below can be used as a backup. Similarly, the carrier plate in the feed chamber 2 can selectively enter the coating equipment below, and the coating equipment above is used as a backup. Of course, the upper and lower sets of coating equipment in this embodiment can be used at the same time. For example, when coating multiple carriers, after the loading rack 1 transports the multiple carriers to the feed chamber, the corresponding carriers in the feed chamber 2 can be transported to the upper and lower sets of coating equipment respectively, thereby realizing multi-process coating of multiple carriers at the same time.

[0082] Fig.10 FIG. 2 shows a schematic diagram of the structure of a multi-process coating device provided in another embodiment of the present invention. Fig.10 As shown, Fig. 9 Similar to the structure shown in FIG. 1 , two sets of parallel coating equipment are also provided in this embodiment. Fig.10, the loading rack 1 can transport the carrier to the feeding chamber 2, and the carrier in the feeding chamber 2 enters the heating chamber 3. The outlet of the heating chamber 3 is set to two upper and lower outlets, and the two outlets are respectively operably connected to the first process chamber 41, the second process chamber 42 and the third process chamber 43, and then the outlets of the two third process chambers 43 are respectively operably connected to the two entrances of the discharge chamber 5, and the outlet of the discharge chamber 5 is operably connected to the unloading rack 6. The loading rack 1 transports the carrier to the feeding chamber 2, and the vacuum system 7 is vacuumized. The carrier in the feeding chamber 2 enters the heating chamber 3. The carrier in the heating chamber 3 can selectively enter the first process chamber 41 of the upper coating equipment for process one, the second process chamber 42 for process two, and the third process chamber 43 for process three, and then enter the discharge chamber 5 to break the vacuum and transport through the unloading rack 6. At this time, the coating equipment below can be used as a backup. Similarly, the carrier in the heating chamber 3 can selectively enter the coating equipment below, and the coating equipment above is used as a backup. Of course, the upper and lower sets of coating equipment in this embodiment can be used at the same time. For example, when coating multiple carriers, the loading rack 1 transports the multiple carriers to the feed chamber 2. Then, the corresponding carriers in the feed chamber 2 enter the heating chamber 3 and are respectively transported to the upper and lower sets of coating equipment, thereby realizing multi-process coating of multiple carriers at the same time.

[0083] Fig.11 FIG. 2 shows a schematic diagram of the composition structure of a vacuum system used in another embodiment of the present invention. Fig.11 As shown, Figure 2 The structure of the embodiment is similar to that of the embodiment. In this embodiment, the vacuum system only uses a dry pump 8. The dry pump 8 controls the vacuum degree in the feed chamber 2, the heating chamber 3, the multiple process chambers 4 and the discharge chamber 5 through the first baffle valve 10.

[0084] Fig.12 FIG. 2 shows a schematic diagram of the composition structure of a vacuum system used in another embodiment of the present invention. Fig.12 As shown, Figure 2 The structure of the embodiment is similar to that of the embodiment. In this embodiment, the vacuum system only uses a molecular pump 9. The molecular pump 9 controls the vacuum degree in the feed chamber 2, the heating chamber 3, the multiple process chambers 4 and the discharge chamber 5 through the second baffle valve 11.

[0085] Fig.13 FIG. 2 shows a schematic diagram of the composition structure of a vacuum system used in another embodiment of the present invention. Fig.13 As shown, Figure 2 The structure of the embodiment is similar to that of the embodiment. The vacuum system in this embodiment adopts a combination of a dry pump 8 and a molecular pump 9. The dry pump 8 and the molecular pump 9 control the vacuum degree in the feed chamber 2, the heating chamber 3, the multiple process chambers 4 and the discharge chamber 5 through the first baffle valve 10 and the second baffle valve 11 respectively.

[0086] Fig.14FIG. 2 shows a schematic structural diagram of an adjustable hot wire structure used in another embodiment of the present invention. Fig.14 As shown, Figure 3 The difference is that in this embodiment, a slide bar 28 is arranged between the hot wire fixing seat 23, and the hot wire connecting block 24 is slidably arranged on the slide bar 28. When the electrode module 27, the hot wire clamp 26 and the hot wire fixing seat 23 are kept unchanged, the hot wire 22 and the hot wire connecting block 24 slide along the slide bar 28 so that the hot wire 22 is located at different positions on the hot wire adjustment support 25, and the distance between the hot wire 22 and the carrier substrate 21 is adjusted.

[0087] Fig.15 FIG. 2 shows a schematic flow chart of a multi-process coating method provided in a preferred embodiment of the present invention. Fig.15 As shown, the present invention provides a multi-process coating method, which is implemented by using the above-mentioned multi-process coating equipment, and the multi-process coating method includes the following steps:

[0088] S1: vacuumizing the feed chamber 2, the heating chamber 3, the plurality of process chambers 4 and the discharge chamber 5 through the vacuum system 7;

[0089] S2: in response to the vacuum treatment reaching a preset pressure, the carrier in the feed chamber 2 is sequentially introduced into the heating chamber 3 and the plurality of process chambers 4 for coating treatment;

[0090] S3: After the last process chamber 4 is processed, the coated carrier is placed into the discharge chamber 5 and discharged after the vacuum is broken.

[0091] In the above multi-process coating method, the multi-process coating method may further include:

[0092] Before step S1, the carrier to be coated is transported to the feed chamber 2 through the loading rack 1;

[0093] After step S3, the coated carrier is transported to a desired position by the unloading rack 6.

[0094] It can be seen that the structural solution of the present invention is simple in layout and easy to use. The present invention can realize continuous coating and has high efficiency. The present invention can support the deposition of more than three coating processes at one time, and has the characteristics of convenient loading and unloading, adjustable spacing between the hot wire and the carrier, fast coating speed, high coating quality, etc. In addition, the present invention does not generate plasma during the coating process, the deposited film is of high quality, and no harmful gases are generated.

[0095] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusions, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to the process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including a..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0096] The above is only an embodiment of the present application, and the embodiment enables those skilled in the art to understand and implement the present application. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments described herein, but will conform to the widest scope consistent with the principles and features disclosed herein.

Claims

1. A multi-process coating equipment, characterized in that: include: Feed cavity; a heating chamber, wherein an inlet of the heating chamber is operably connected to an outlet of the feed chamber; A plurality of process chambers, wherein the plurality of process chambers are operably connected in series, and an inlet of a first process chamber is operably connected to an outlet of the heating chamber; A discharge chamber, the inlet of which is operably connected to the outlet of the last process chamber; A vacuum system is operably connected to the feed chamber, the heating chamber, the plurality of process chambers and the discharge chamber.

2. The multi-process coating equipment according to claim 1, characterized in that: Also includes: A loading rack, which is operably connected to the inlet of the feeding chamber and transports the carrier to be coated into the feeding chamber; A material unloading rack is operably connected to the outlet of the material unloading chamber and transports the coated carrier to a desired position.

3. The multi-process coating equipment according to claim 1, characterized in that: The components of the feed chamber, the heating chamber, the plurality of process chambers and the discharge chamber all include: A lower frame, wherein the lower frame is fixed on the ground; A cavity, wherein the cavity is fixed on the lower frame; A tray conveying assembly is fixed on the cavity and carries and conveys a corresponding carrier plate.

4. The multi-process coating equipment according to claim 2, characterized in that: The loading rack and the unloading rack both include: A lower frame, wherein the lower frame is fixed on the ground; an upper frame, wherein the upper frame is fixed to the lower frame; A pallet conveying assembly is fixed on the upper frame and carries and conveys a corresponding carrier plate.

5. The multi-process coating equipment according to claim 1, characterized in that: The vacuum system includes any one of a dry pump and a molecular pump or a combination thereof.

6. The multi-process coating equipment according to claim 5, characterized in that: When the vacuum system includes both a dry pump and a molecular pump, the feed chamber and the discharge chamber are only operably connected to the dry pump, the heating chamber and the plurality of process chambers are operably connected to the combination of the dry pump and the molecular pump, and the dry pump is connected to the exhaust port of the molecular pump, and the molecular pump is connected to the corresponding chamber via an angle valve.

7. The multi-process coating equipment according to claim 1, characterized in that: An adjustable hot wire structure is arranged in each process chamber, and the adjustable hot wire structure adjusts the distance from the carrier substrate to adjust the temperature of the carrier.

8. The multi-process coating equipment according to claim 7, characterized in that: The adjustable hot wire structure comprises: Hot wire fixing seat; A hot wire chuck, wherein a hot wire adjustment support is provided on the hot wire chuck; An electrode module, wherein the electrode module is connected to the hot wire clamp; A hot wire, one end of which is connected to the hot wire fixing seat through a hot wire connecting block and the other end is connected to the hot wire adjusting support. The hot wire, the hot wire connecting block and the hot wire fixing seat move together so that the hot wire is at different positions on the hot wire adjusting support, thereby adjusting the distance between the hot wire and the carrier substrate.

9. A multi-process coating method, characterized in that: The multi-process coating method is implemented by using a multi-process coating device as described in any one of claims 1 to 8, and the multi-process coating method comprises the following steps: The feeding chamber, the heating chamber, the multiple process chambers and the discharging chamber are evacuated by a vacuum system; In response to the vacuum treatment reaching a preset pressure, the carrier in the feed chamber is sequentially introduced into the heating chamber and a plurality of process chambers for coating treatment; After the last process chamber is processed, the coated carrier is placed into the discharge chamber and discharged after the vacuum is broken.

10. The multi-process coating method according to claim 9, characterized in that: Also includes: The carrier plate to be coated is transported into the feed chamber through the loading rack; The coated carrier is transported to the required position through the unloading rack.

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