Rotating disc type double-sided photoetching machine and material conveying device thereof

Abstract

The invention discloses a rotating disc type double-face photoetching machine and a material conveying device thereof in the technical field of laser engraving, the rotating disc type double-face photoetching machine comprises a workbench, a supporting beam, stand columns and a controller, the supporting beam is located at the top of the workbench, and the stand columns are fixedly connected to the rear sides of the left side and the right side of the top of the workbench; the controller is fixedly connected to the front side of the left side of the top of the workbench, a through groove is formed in the top of the workbench, an auxiliary roller is rotationally connected between the left and right sides of the front and rear side walls of an inner cavity of the through groove, and a first rail is fixedly connected between the front and rear sides of the left and right side walls of the inner cavity of the workbench; according to the rotating disc type double-sided photoetching machine and the material conveying device thereof, automatic feeding and discharging of workpieces can be completed under the condition that the workpieces do not need to be transferred, the feeding and discharging efficiency is improved, continuous machining of the photoetching machine can be achieved, the production efficiency is improved, double-sided photoetching machining of the workpieces can be achieved, secondary machining is not needed, and the production cost is reduced. And more time and labor are saved.

Description

Technical Field

[0001] The invention relates to the technical field of laser engraving, in particular to a turntable type double-sided photolithography machine and a material conveying device thereof. Background Art

[0002] A photolithography machine is also known as a mask alignment exposure machine, exposure system, photolithography system, etc. The commonly used photolithography machine is a mask alignment photolithography machine. The general photolithography process involves cleaning and drying the silicon wafer surface, coating the primer, spin coating photoresist, soft baking, alignment exposure, post-baking, developing, hard baking, and etching. Photolithography means using light to make a pattern, evenly coating the silicon wafer surface with glue, and then transferring the pattern on the mask to the photoresist to temporarily copy the device or circuit structure onto the silicon wafer.

[0003] Although the existing photolithography machine has achieved automated loading, after loading and conveying, the workpiece needs to be transferred to the photolithography machine for processing through a mechanical suction cup device. This transfer process includes loading and unloading, and the efficiency of loading and unloading is still not high. In addition, the existing photolithography machine can only process the workpiece once at a time. After processing, it is necessary to continue processing after the workpiece is unloaded. Continuous processing is not possible, which affects production efficiency. At the same time, the photolithography machine can only process a single side of the workpiece at a time. After all processing is completed, it is necessary to turn it over for secondary processing, which is time-consuming and labor-intensive. For this reason, we propose a turntable double-sided photolithography machine and its material conveying device. Summary of the invention

[0004] The object of the present invention is to provide a turntable double-sided photolithography machine and a material conveying device thereof to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a turntable double-sided lithography machine and a material conveying device thereof, comprising a workbench, a support beam, a column and a controller, wherein the support beam is located at the top of the workbench, the column is fixedly connected to the left and right rear sides of the top of the workbench, the controller is fixedly connected to the left front side of the top of the workbench, a through slot is opened on the top of the workbench, an auxiliary roller is rotatably connected between the left and right sides of the front and rear side walls of the inner cavity of the through slot, a first track is fixedly connected between the front and rear sides of the left and right side walls of the inner cavity of the workbench, a mounting frame is fixedly connected between the left and right sides of the tops of the two first tracks, a lifting slot is opened on the inner front and rear side walls of the mounting frame, a lifting block is slidably connected to the inner cavity of the lifting slot, a tension roller is rotatably connected between the inner side walls of the lifting block, and the top and The top of the working table is fixedly connected to the frame, and the outer side of the working table is rotatably connected to the frame.

[0006] Preferably, the support beam is fixedly connected between the middle of the front and rear side walls of the inner cavity of the through slot, the top of the support beam is rotatably connected to a dividing plate, the middle of the bottom of the support beam is fixedly connected to a rotating motor, the top end of the power output shaft of the rotating motor passes through the support beam and extends to the top of the support beam, and the top end of the power output shaft of the rotating motor is fixedly connected to the middle of the bottom of the dividing plate.

[0007] Preferably, the front and rear side walls and the left and right side walls of the dividing plate are all provided with grooves, the inner cavity of the groove is fixedly connected to an electric push rod, and the top end of the electric push rod is rotatably connected to a connecting block.

[0008] Preferably, the inner cavity of the groove is rotatably connected with a clamping plate located on the upper side of the electric push rod, the top of the connecting block is fixedly connected to the bottom of the clamping plate, the outer wall of the clamping plate is provided with a clamping groove, the inner cavity of the clamping groove is fixedly connected with a second spring, and the end of the second spring is fixedly connected with a push block.

[0009] Preferably, a movable groove is opened on the top of the clamping plate, an electric telescopic rod is fixedly connected to the top of the dividing plate, a connecting rod is fixedly connected to the end of the electric telescopic rod, the bottom end of the connecting rod passes through the movable groove and extends to the inner cavity of the clamping groove, and the bottom end of the connecting rod is fixedly connected to the top of the push block.

[0010] Preferably, the front side wall of the column is fixedly connected to the second track, the front side wall of the second track is slidably connected to a moving seat, and a cross bar is fixedly connected between the front side walls of the moving seat.

[0011] Preferably, a vertical pole is fixedly connected to the middle of the bottom of the cross bar, and a photolithography device is fixedly connected to the bottom of the vertical pole.

[0012] Preferably, a connecting beam is fixedly connected between the upper sides of the inner walls of the columns, a servo motor is fixedly connected to the top of the connecting beam, the bottom end of the power output shaft of the servo motor passes through the connecting beam and extends to the top of the connecting beam, and a screw is fixedly connected to the bottom end of the power output shaft of the servo motor, the bottom end of the screw is rotatably connected to the top of the workbench, a screw block is screwed on the outer side wall of the screw, and the front side wall of the screw block is fixedly connected to the rear side wall of the cross bar.

[0013] Preferably, the controller is electrically connected to the electric slide, the variable frequency motor, the rotary motor, the electric push rod, the electric telescopic rod, the photolithography equipment and the servo motor through electric wires.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The turntable double-sided photolithography machine and its material conveying device support the conveyor belt to rotate through the rotating roller and the moving roller, and support and limit the conveyor belt through the auxiliary roller, and form tension on the conveyor belt through the tension roller. The variable frequency motor drives the rotating roller to rotate, and the conveyor belt also rotates accordingly. The support column on the connecting plate is driven to rotate by the electric slide, and the support column drives the moving roller to move, so as to change the spacing between the rotating roller and the moving roller. The moving roller moves and extends to the bottom of the indexing plate. At the same time, after the tension roller is squeezed, the lifting block squeezes the first spring in the lifting groove. The conveyor belt rotates to directly transport the workpiece to the lower side of the indexing plate, and the workpiece enters the clamping groove in the clamping plate to complete the loading, so that the workpiece can be automatically loaded and unloaded without transferring the workpiece, thereby improving the efficiency of loading and unloading.

[0016] 2. The turntable double-sided photolithography machine and its material conveying device have a clamping plate installed in the groove of the dividing plate. The clamping plate is driven by an electric push rod to move at vertical and horizontal angles. When the workpiece enters the clamping groove, the rotating motor drives the dividing plate to rotate, and rotates to the lower side of the photolithography equipment on the rear side for processing. After the processing is completed, the rotating motor continues to rotate to move the workpiece to the right side, and the electric telescopic rod drives the push block to move through the connecting rod to discharge the workpiece. After discharging, the clamping plate is rotated to the front side again, thereby realizing continuous processing of the photolithography machine and improving production efficiency.

[0017] 3. The turntable double-sided photolithography machine and its material conveying device drive the screw to rotate through a servo motor, and the screw block screwed on the outside of the screw moves downward. The screw block drives the cross bar to move downward while the cross bar moves through the moving seat under the support of the second track. At the same time, the cross bar drives the photolithography equipment to descend through the vertical rod, so that the photolithography equipment is connected to the workpiece, and the front and back surfaces of the workpiece are processed at the same time, thereby realizing double-sided photolithography processing of the workpiece without the need for secondary processing, which is more time-saving and labor-saving. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the main cross-sectional structure of the present invention;

[0020] Figure 3 It is a schematic diagram of the cross-sectional structure of the present invention from the right side;

[0021] Figure 4 It is a schematic diagram of the cross-sectional structure of the mounting frame of the present invention from the right side;

[0022] Figure 5 It is a schematic diagram of the right side cross-sectional structure of the connection plate of the present invention;

[0023] Figure 6 For the present invention Figure 3 Enlarged structural diagram at A in the middle.

[0024] In the figure: 100, workbench; 110, through slot; 111, auxiliary roller; 120, first track; 121, mounting frame; 122, lifting slot; 123, lifting block; 124, tension roller; 125, first spring; 130, electric slide; 131, connecting plate; 132, supporting column; 133, reinforcing plate; 134, moving roller; 140, frame; 141, rotating roller; 142, conveyor belt; 143, limit rod; 144, variable frequency motor; 200, support beam; 210, indexing plate; 2 11. groove; 212. electric push rod; 213. connecting block; 220. rotating motor; 230. clamping plate; 231. clamping groove; 232. second spring; 233. push block; 234. moving groove; 235. electric telescopic rod; 236. connecting rod; 300. column; 310. second track; 311. moving seat; 320. cross bar; 321. vertical pole; 322. photolithography equipment; 330. connecting beam; 331. servo motor; 332. screw; 333. screw block; 400. controller. DETAILED DESCRIPTION

[0025] Embodiment 1:

[0026] See also Figure 1-6The present invention provides a technical solution: a turntable double-sided lithography machine and a material conveying device thereof, comprising a workbench 100, a support beam 200, a column 300 and a controller 400, wherein the support beam 200 is located at the top of the workbench 100, the column 300 is fixedly connected to the left and right rear sides of the top of the workbench 100, the controller 400 is fixedly connected to the left front side of the top of the workbench 100, a through slot 110 is opened at the top of the workbench 100, an auxiliary roller 111 is rotatably connected between the left and right sides of the front and rear side walls of the inner cavity of the through slot 110, a first rail 120 is fixedly connected between the front and rear sides of the left and right side walls of the inner cavity of the workbench 100, a mounting frame 121 is fixedly connected between the left and right sides of the tops of the two first rails 120, and the inner side of the mounting frame 121 The front and rear side walls are provided with lifting grooves 122, the inner cavity of the lifting groove 122 is slidably connected with a lifting block 123, the inner side walls of the lifting block 123 are rotatably connected with a tension roller 124, the top of the lifting block 123 and the top of the inner cavity of the lifting groove 122 are fixedly connected with a first spring 125, the top of the first rail 120 and the inner side of the mounting frame 121 are slidably connected with an electric slide 130, the top of the electric slide 130 is fixedly connected with a connecting plate 131, the top of the connecting plate 131 is fixedly connected with a support column 132 on both sides, the reinforcing plate 133 is fixedly connected between the support column 132 and the connecting plate 131, the moving roller 134 is rotatably connected between the upper sides of the inner side walls of the support column 132, and the left and right sides of the top of the workbench 100 are fixedly connected. The frame 140 is fixedly connected, and a rotating roller 141 is rotatably connected between the outer side of the inner wall of the frame 140, and a conveyor belt 142 is rotatably connected between the rotating roller 141, the tension roller 124 and the moving roller 134. The inner wall of the frame 140 is fixedly connected with a limit rod 143 on both sides, and the outer side of the front side wall of the frame 140 is fixedly connected with a frequency conversion motor 144. The power output shaft of the frequency conversion motor 144 is fixedly connected to the front end of the rotating roller 141. The front and rear side walls and the left and right side walls of the indexing plate 210 are all provided with grooves 211. The inner cavity of the groove 211 is fixedly connected with an electric push rod 212. The top of the electric push rod 212 is rotatably connected with a connecting block 213. The conveyor belt 142 is supported to rotate by the rotating roller 141 and the moving roller 134. At the same time, the auxiliary The auxiliary roller 111 supports and limits the conveyor belt 142, and forms tension on the conveyor belt 142 through the tension roller 124. The frequency conversion motor 144 drives the rotating roller 141 to rotate, and the conveyor belt 142 also rotates accordingly. The support column 132 on the connecting plate 131 is driven to rotate through the electric slide 130, and the support column 132 drives the moving roller 134 to move, thereby changing the distance between the rotating roller 141 and the moving roller 134. The moving roller 134 moves and extends to the bottom of the indexing plate 210. At the same time, after the tension roller 124 is squeezed, the lifting block 123 squeezes the first spring 125 in the lifting groove 122. The conveyor belt 142 rotates to directly transport the workpiece to the lower side of the indexing plate 210, and the workpiece enters the clamping groove 231 in the clamping plate 230 to complete the loading.It can complete the automatic loading and unloading of workpieces without transferring the workpieces, thus improving the efficiency of loading and unloading.

[0027] Embodiment 2:

[0028] See also Figure 1-6The present invention provides a technical solution: a turntable double-sided lithography machine and a material conveying device thereof, comprising a workbench 100, a support beam 200, a column 300 and a controller 400, wherein the support beam 200 is located at the top of the workbench 100, the column 300 is fixedly connected to the left and right rear sides of the top of the workbench 100, the controller 400 is fixedly connected to the left front side of the top of the workbench 100, a through slot 110 is opened at the top of the workbench 100, an auxiliary roller 111 is rotatably connected between the left and right sides of the front and rear side walls of the inner cavity of the through slot 110, a first track 120 is fixedly connected between the front and rear sides of the left and right side walls of the inner cavity of the workbench 100, a mounting frame 121 is fixedly connected between the left and right sides of the tops of the two first tracks 120, and the inner cavity of the mounting frame 121 is fixedly connected to the left and right sides of the tops of the two first tracks 120. A lifting groove 122 is opened on the front and rear side walls, and a lifting block 123 is slidably connected to the inner cavity of the lifting groove 122. A tension roller 124 is rotatably connected between the inner side walls of the lifting block 123. A first spring 125 is fixedly connected between the top of the lifting block 123 and the top of the inner cavity of the lifting groove 122. An electric slide 130 is slidably connected between the top of the first track 120 and located on the inner side of the mounting frame 121. A connecting plate 131 is fixedly connected between the tops of the electric slide 130. Support columns 132 are fixedly connected to the front and rear sides of the top of the connecting plate 131. A reinforcing plate 133 is fixedly connected between the support columns 132 and the connecting plate 131. A moving roller 134 is rotatably connected between the upper sides of the inner side walls of the support columns 132. The left and right sides of the top of the workbench 100 The side is fixedly connected with a frame 140, a rotating roller 141 is rotatably connected between the outer side of the inner wall of the frame 140, a conveyor belt 142 is rotatably connected between the rotating roller 141, the tension roller 124 and the moving roller 134, a limit rod 143 is fixedly connected to the front and rear sides of the inner wall of the frame 140, a variable frequency motor 144 is fixedly connected to the outer side of the front side wall of the frame 140, and the power output shaft of the variable frequency motor 144 is fixedly connected to the front end of the rotating roller 141, a support beam 200 is fixedly connected between the middle of the front and rear side walls of the inner cavity of the through slot 110, a dividing plate 210 is rotatably connected to the top of the support beam 200, a rotating motor 220 is fixedly connected to the middle of the bottom of the support beam 200, and the top end of the power output shaft of the rotating motor 220 passes through the support beam 200. And extends to the top of the support beam 200, and the top end of the power output shaft of the rotating motor 220 is fixedly connected to the middle of the bottom of the indexing plate 210, the front and rear side walls and the left and right side walls of the indexing plate 210 are all provided with grooves 211, the inner cavity of the groove 211 is fixedly connected with an electric push rod 212, the top of the electric push rod 212 is rotatably connected with a connecting block 213, the inner cavity of the groove 211 and the upper side of the electric push rod 212 is rotatably connected with a clamping plate 230, the top of the connecting block 213 is fixedly connected to the bottom of the clamping plate 230, the outer side wall of the clamping plate 230 is provided with a clamping groove 231, the inner cavity of the clamping groove 231 is fixedly connected with a second spring 232, the end of the second spring 232 is fixedly connected with a push block 233, and the top of the clamping plate 230 is provided with a moving groove 234.The top of the indexing plate 210 is fixedly connected with an electric telescopic rod 235, and the end of the electric telescopic rod 235 is fixedly connected with a connecting rod 236. The bottom end of the connecting rod 236 passes through the moving groove 234 and extends to the inner cavity of the clamping groove 231, and the bottom end of the connecting rod 236 is fixedly connected to the top of the push block 233. Through the clamping plate 230 installed in the groove 211 of the indexing plate 210, the clamping plate 230 is driven by the electric push rod 212 to move at vertical and horizontal angles. When the workpiece enters the clamping groove 231, the rotary motor 220 drives the indexing plate 210 to rotate and rotates to the lower side of the photolithography equipment 322 on the rear side for processing. After the processing is completed, the rotary motor 220 continues to rotate to move the workpiece to the right side, and the electric telescopic rod 235 drives the push block 233 to move through the connecting rod 236 to discharge the workpiece. After the discharge, the clamping plate 230 rotates to the front side again, which can realize the continuous processing of the photolithography machine and improve the production efficiency.

[0029] Embodiment three:

[0030] See also Figure 1-6The present invention provides a technical solution: a turntable double-sided lithography machine and a material conveying device thereof, comprising a workbench 100, a support beam 200, a column 300 and a controller 400, wherein the support beam 200 is located at the top of the workbench 100, the column 300 is fixedly connected to the left and right rear sides of the top of the workbench 100, the controller 400 is fixedly connected to the left front side of the top of the workbench 100, a through slot 110 is opened at the top of the workbench 100, an auxiliary roller 111 is rotatably connected between the left and right sides of the front and rear side walls of the inner cavity of the through slot 110, a first track 120 is fixedly connected between the front and rear sides of the left and right side walls of the inner cavity of the workbench 100, and a first track 120 is fixedly connected between the left and right sides of the top of the two first tracks 120. A mounting frame 121 is provided with a lifting groove 122 on the inner front and rear side walls of the mounting frame 121, a lifting block 123 is slidably connected to the inner cavity of the lifting groove 122, a tension roller 124 is rotatably connected between the inner side walls of the lifting block 123, a first spring 125 is fixedly connected between the top of the lifting block 123 and the top of the inner cavity of the lifting groove 122, an electric slide 130 is slidably connected between the top of the first rail 120 and located on the inner side of the mounting frame 121, a connecting plate 131 is fixedly connected between the top of the electric slide 130, a support column 132 is fixedly connected to the front and rear sides of the top of the connecting plate 131, a reinforcing plate 133 is fixedly connected between the support column 132 and the connecting plate 131, and the inner side of the support column 132 A moving roller 134 is rotatably connected between the upper and lower sides of the wall, a frame 140 is fixedly connected to the left and right sides of the top of the workbench 100, a rotating roller 141 is rotatably connected between the outer sides of the inner wall of the frame 140, a conveyor belt 142 is rotatably connected between the rotating roller 141, the tension roller 124 and the moving roller 134, a limiting rod 143 is fixedly connected to the front and rear sides of the inner wall of the frame 140, a frequency conversion motor 144 is fixedly connected to the outer side of the front side wall of the frame 140, and the power output shaft of the frequency conversion motor 144 is fixedly connected to the front end of the rotating roller 141, a second track 310 is fixedly connected to the front side wall of the column 300, a moving seat 311 is slidably connected to the front side wall of the second track 310, and the front side of the moving seat 311 is fixedly connected to the front side wall of the second track 310. A cross bar 320 is fixedly connected between the walls, a vertical bar 321 is fixedly connected to the middle of the bottom of the cross bar 320, a photolithography device 322 is fixedly connected to the bottom of the vertical bar 321, a connecting beam 330 is fixedly connected between the upper sides of the inner walls of the column 300, a servo motor 331 is fixedly connected to the top of the connecting beam 330, the bottom end of the power output shaft of the servo motor 331 passes through the connecting beam 330 and extends to the top of the connecting beam 330, and a screw 332 is fixedly connected to the bottom end of the power output shaft of the servo motor 331, the bottom end of the screw 332 is rotatably connected to the top of the workbench 100, a screw block 333 is screwed to the outer wall of the screw 332, and the front side wall of the screw block 333 is fixedly connected to the rear side wall of the cross bar 320.The controller 400 is electrically connected to the electric slide 130, the variable frequency motor 144, the rotating motor 220, the electric push rod 212, the electric telescopic rod 235, the photolithography device 322 and the servo motor 331 through electric wires. The servo motor 331 drives the screw rod 332 to rotate, and the screw block 333 screwed on the outer side of the screw rod 332 moves downward. The screw block 333 moves while driving the cross bar 320 to descend. The cross bar 320 moves under the support of the second track 310 through the moving seat 311. At the same time, the cross bar 320 drives the photolithography device 322 to descend through the vertical rod 321, so that the photolithography device 322 is clamped on the workpiece, and the front and back sides of the workpiece are processed at the same time, which can realize double-sided photolithography processing of the workpiece without secondary processing, which is more time-saving and labor-saving.

[0031] During specific use, when personnel in this technical field use the photolithography machine for processing, they place the workpiece on the conveyor belt 142 on the left, start the photolithography machine through the controller 400, and the frequency conversion motor 144 drives the rotating roller 141 to rotate, and the conveyor belt 142 also rotates accordingly, and the support column 132 on the connecting plate 131 is driven to rotate through the electric slide 130, and the support column 132 drives the moving roller 134 to move, thereby changing the distance between the rotating roller 141 and the moving roller 134, and the moving roller 134 moves and extends to the bottom of the dividing plate 210. At the same time, after the tension roller 124 is squeezed, the first spring 125 is squeezed in the lifting groove 122 through the lifting block 123, and the conveyor belt 142 rotates to transport the workpiece directly to the lower side of the dividing plate 210, and the workpiece enters the clamping groove 231 in the clamping plate 230 to complete the loading, and the auxiliary roller 111 supports and limits the conveyor belt 142, and forms tension on the conveyor belt 142 through the tension roller 124. , the electric push rod 212 drives it to move at vertical and horizontal angles. When the workpiece enters the clamping groove 231, the rotating motor 220 drives the dividing plate 210 to rotate and rotates to the lower side of the lithography equipment 322 on the rear side for processing. The servo motor 331 drives the screw rod 332 to rotate, and the screw block 333 screwed on the outer side of the screw rod 332 moves downward. While the screw block 333 moves, it drives the cross bar 320 to descend. The cross bar 320 moves under the support of the second track 310 through the moving seat 311. At the same time, the cross bar 320 drives the lithography equipment 322 to descend through the vertical rod 321, so that the lithography equipment 322 is clamped on the workpiece, and the front and back sides of the workpiece are processed at the same time. After the processing is completed, the rotating motor 220 continues to rotate to move the workpiece to the right side. The electric telescopic rod 235 drives the push block 233 to move through the connecting rod 236 to discharge the workpiece. After the discharge, the clamping plate 230 rotates to the front side again.

Claims

1. A turntable double-sided photolithography machine and a material conveying device thereof, characterized in that: The invention comprises a workbench (100), a support beam (200), a column (300) and a controller (400), wherein the support beam (200) is located at the top of the workbench (100), the column (300) is fixedly connected to the left and right rear sides of the top of the workbench (100), the controller (400) is fixedly connected to the left front side of the top of the workbench (100), a through slot (110) is opened at the top of the workbench (100), an auxiliary roller (111) is rotatably connected between the left and right sides of the front and rear side walls of the inner cavity of the through slot (110), and the workbench A first track (120) is fixedly connected between the front and rear sides of the left and right side walls of the inner cavity (100); a mounting frame (121) is fixedly connected between the left and right sides of the top of the two first tracks (120); a lifting groove (122) is opened on the inner front and rear side walls of the mounting frame (121); a lifting block (123) is slidably connected to the inner cavity of the lifting groove (122); a tension roller (124) is rotatably connected between the inner side walls of the lifting block (123); a first spring (124) is fixedly connected between the top of the lifting block (123) and the inner cavity top of the lifting groove (122); 125), an electric slide (130) is slidably connected between the top of the first track (120) and located on the inner side of the mounting frame (121), a connecting plate (131) is fixedly connected between the top of the electric slide (130), a support column (132) is fixedly connected to the front and rear sides of the top of the connecting plate (131), a reinforcing plate (133) is fixedly connected between the support column (132) and the connecting plate (131), a moving roller (134) is rotatably connected between the upper sides of the inner side walls of the support column (132), and the top of the workbench (100) The left and right sides of the frame (140) are fixedly connected to the frame, a rotating roller (141) is rotatably connected between the outer sides of the inner side walls of the frame (140), a conveyor belt (142) is rotatably connected between the rotating roller (141), the tension roller (124) and the moving roller (134), a limiting rod (143) is fixedly connected to the front and rear sides of the inner side walls of the frame (140), a variable frequency motor (144) is fixedly connected to the outer side of the front side wall of the frame (140), and a power output shaft of the variable frequency motor (144) is fixedly connected to the front end of the rotating roller (141).

2. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 1, characterized in that: The support beam (200) is fixedly connected between the middle of the front and rear side walls of the inner cavity of the through slot (110); the top of the support beam (200) is rotatably connected to a dividing plate (210); the middle of the bottom of the support beam (200) is fixedly connected to a rotating motor (220); the top end of the power output shaft of the rotating motor (220) passes through the support beam (200) and extends to the top of the support beam (200); and the top end of the power output shaft of the rotating motor (220) is fixedly connected to the middle of the bottom of the dividing plate (210).

3. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 2, characterized in that: The front and rear side walls and the left and right side walls of the indexing plate (210) are provided with grooves (211), the inner cavity of the groove (211) is fixedly connected to an electric push rod (212), and the top end of the electric push rod (212) is rotatably connected to a connecting block (213).

4. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 3, characterized in that: The inner cavity of the groove (211) is rotatably connected to a clamping plate (230) located on the upper side of the electric push rod (212); the top of the connecting block (213) is fixedly connected to the bottom of the clamping plate (230); the outer wall of the clamping plate (230) is provided with a clamping groove (231); the inner cavity of the clamping groove (231) is fixedly connected to a second spring (232); the end of the second spring (232) is fixedly connected to a push block (233).

5. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 4, characterized in that: A movable groove (234) is formed on the top of the clamping plate (230); an electric telescopic rod (235) is fixedly connected to the top of the dividing plate (210); a connecting rod (236) is fixedly connected to the end of the electric telescopic rod (235); the bottom end of the connecting rod (236) passes through the movable groove (234) and extends to the inner cavity of the clamping groove (231); and the bottom end of the connecting rod (236) is fixedly connected to the top of the pushing block (233).

6. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 5, characterized in that: The front side wall of the column (300) is fixedly connected to a second track (310), the front side wall of the second track (310) is slidably connected to a moving seat (311), and a cross bar (320) is fixedly connected between the front side walls of the moving seat (311).

7. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 6, characterized in that: A vertical rod (321) is fixedly connected to the middle of the bottom of the crossbar (320), and a photolithography device (322) is fixedly connected to the bottom of the vertical rod (321).

8. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 7, characterized in that: A connecting beam (330) is fixedly connected between the upper sides of the inner side walls of the columns (300), a servo motor (331) is fixedly connected to the top of the connecting beam (330), the bottom end of the power output shaft of the servo motor (331) passes through the connecting beam (330) and extends to the top of the connecting beam (330), and a screw rod (332) is fixedly connected to the bottom end of the power output shaft of the servo motor (331), the bottom end of the screw rod (332) is rotatably connected to the top of the workbench (100), a screw block (333) is screwed to the outer side wall of the screw rod (332), and the front side wall of the screw block (333) is fixedly connected to the rear side wall of the cross bar (320).

9. A turntable double-sided photolithography machine and a material conveying device thereof according to claim 8, characterized in that: The controller (400) is electrically connected to the electric slide (130), the variable frequency motor (144), the rotary motor (220), the electric push rod (212), the electric telescopic rod (235), the photolithography equipment (322) and the servo motor (331) through electric wires.

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