Miniature high-voltage transmission-type X-ray ceramic tube

Abstract

The invention provides a miniature high-voltage transmission-type X-ray ceramic tube which comprises a ceramic tube, and a cathode assembly and an anode assembly are installed at the upper end and the lower end of the ceramic tube respectively. The cathode assembly comprises a core column assembly, a cathode seat, a getter, a lamp filament and a focusing head, the cathode seat is hermetically welded at an upper end tube opening of the ceramic tube, the focusing head is hermetically welded in the cathode seat, the lower end of the focusing head extends into the upper end tube opening, and the core column assembly is hermetically inserted in the focusing head; the lamp filament is installed at the lower end of the core column assembly and located in the extending section of the focusing head. The core column assembly comprises a core column kovar sleeve, a core column ceramic chip, a pair of core columns and an exhaust pipe, and the core column kovar sleeve is welded in the focusing head in a sealed mode. The ceramic tube solves the problem that in the prior art, small size and large voltage cannot be achieved, the structural layout and material selection are reasonable, the size of the X-ray tube is shortened under the condition that high voltage is kept, and the ceramic tube is good in insulation and heat dissipation performance and easy to produce.

Description

Technical Field

[0001] The invention relates to the technical field of X-ray tubes, and in particular to a miniature high-voltage transmission X-ray ceramic tube. Background Art

[0002] X-ray tubes are X-ray generating devices. The X-rays they generate can be used for non-destructive testing of the inside of an object and are widely used in the fields of medical treatment, scientific research, material analysis, etc. With the progress of the times and the development of society, portable security inspection and small portable X-ray analysis instruments for random use in the field are the most important in modernization. Portable handheld security inspection equipment requires small X-ray tubes. Currently known X-ray tube technology can no longer achieve small and portable applications. Traditional X-ray tubes are relatively large in size, and the voltage is limited to less than 70KV. For some important applications, higher X-ray energy is required than the X-ray energy generated by the current generation of compact X-ray sources suitable for handheld use.

[0003] These include accurate identification and quantification of elements deep within certain materials, identification of certain heavy elements (e.g., lead and cadmium), imaging of objects inside thin metal housings (such as car doors or metal lockers), and numerous medical and dental imaging applications. These applications generally require the use of higher voltage sources (e.g., 80 to 200 kV) for x-ray generation, and large structural designs of equipment and instruments. This design requires a large space, and for the miniaturization of the structural design, it is necessary to design a smaller x-ray tube. Therefore, to meet the need for innovation of existing and outdated technologies, a miniature high-voltage transmission x-ray ceramic tube was invented. Summary of the invention

[0004] In view of the above problems, the present invention provides a miniature high-voltage transmission X-ray ceramic tube, which solves the problem in the prior art that small volume and high voltage cannot be achieved, rationalizes the structural layout and material selection, shortens the volume of the X-ray tube while maintaining a relatively high voltage, has good insulation and heat dissipation properties, and is easy to produce.

[0005] To solve the above problems, the technical solution adopted by the present invention is: A miniature high-voltage transmission X-ray ceramic tube comprises a ceramic tube, wherein a cathode assembly and an anode assembly are respectively installed at the upper and lower ends of the ceramic tube; The cathode assembly comprises a stem assembly, a cathode seat, a getter, a filament and a focusing head. The cathode seat is sealed and welded to the upper end of the ceramic tube. The focusing head is sealed and welded in the cathode seat, and the lower end extends into the upper end of the tube. The stem assembly is sealed and inserted in the focusing head. The filament is installed at the lower end of the stem assembly and is located in the extension section of the focusing head. The stem assembly comprises a stem cover, a stem ceramic sheet, a pair of stems and an exhaust pipe, the stem cover is sealed and welded in a focusing head, the stem ceramic sheet sealing gasket is arranged at the bottom of the stem cover, the pair of stems and the exhaust pipe are fixedly inserted on the stem cover, the lower ends of the pair of stems extend into the extension section of the focusing head, the two ends of the filament are electrically connected to the pair of stems, and the getter is arranged at the bottom of the stem cover; The anode assembly includes an anode seat, a target piece, a target piece seat and an anode tube. The anode seat is sealed and welded to the lower end of the ceramic tube. The target piece seat is welded to the middle of the anode seat. The target piece is installed in the target piece seat. The anode tube is fixedly installed on the inner side of the anode seat and located in the lower end of the tube. The centers of the filament, the focusing head, the anode tube, the target piece and the transmission window are all on the same axis. The bottom of the anode seat is provided with a transmission window parallel to the target sheet, and the inner surface of the target sheet is plated with a metal film of tungsten; The inner surface of the ceramic tube is plated with an insulating film, which plays a role of high resistance conduction, with a surface resistivity range of 10^9-10^14OhM. The coating prevents electrical breakdown and improves the withstand voltage value. It guides the accumulation of static charge and avoids multiple electrons and avalanche effects generated by discharge.

[0006] Preferably, the target piece is any one of titanium, beryllium and diamond.

[0007] Preferably, the target sheet is a beryllium sheet.

[0008] Preferably, a mounting opening is provided on the cathode seat, the focusing head consists of a focusing end and a sleeve end, the sleeve end sealing sleeve is arranged in the mounting opening, the core column assembly is sealed and sleeved in the sleeve end, the focusing end extends to the upper end tube mouth, and the filament is located in the focusing end.

[0009] Preferably, the outer diameter of the ceramic tube is ø12mm-ø25mm, the length is 30mm-50mm, and the material of the ceramic tube is 99 porcelain.

[0010] Preferably, a cathode radiator is mounted on the cathode seat, and an anode radiator is mounted on the anode seat. The cathode radiator is a heat dissipation sleeve, which is mounted on the cathode seat and the upper end pipe opening, and the inner wall of the heat dissipation sleeve is attached to the cathode seat. The anode radiator is a heat dissipation base, which wraps the anode seat, and the middle part of the heat dissipation base touches the edge of the target sheet, so as to extract the heat from the target sheet and the anode seat.

[0011] Preferably, the thickness of the metal tungsten film is 2µm-18µm.

[0012] Preferably, the upper ends of the pair of core columns are electrically connected to the cathode lead, and the anode seat is electrically connected to the anode lead, adopting a bipolar high voltage design, with positive high voltage +V=35-100KV and negative high voltage -V=-35--100KV, to relieve the unipolar high voltage insulation pressure.

[0013] Preferably, the insulating film is chromium oxide, and the insulating film is coated by a vacuum ion sputtering coating device.

[0014] The present invention also discloses a vacuum ion sputtering coating device, comprising a base, a sealing cover fixedly mounted on the base, a cover of the sealing cover being provided with a sealing cover, a vertical mounting tube fixedly mounted at the center of the base, a target tube being mounted on the mounting tube, a rotating assembly which can drive the target tube to rotate being mounted on the base, a turntable for placing a ceramic tube being also mounted on the base, a cathode plate attached to the inner wall of the target tube being embedded on one side of the mounting tube, an anode plate being mounted on the inner wall of the sealing cover corresponding to the cathode plate, a magnetron assembly being also mounted in the mounting tube, and a vacuum tube and an argon gas tube being connected to the top of the sealing cover.

[0015] The beneficial effects of the present invention are: 1. The outer shell of the X-ray tube uses a 99 porcelain ceramic shell. Compared with the glass tube, the insulation performance of the ceramic tube can more effectively prevent the passage of current and reduce the occurrence of leakage and electron breakdown. The inner wall of the ceramic tube is coated with an insulating film. The coating has the effect of high resistance conduction. The surface resistivity range is 10^9-10^14OhM. The coating prevents electrical breakdown and improves the withstand voltage value, derives the accumulation of static charges, avoids multiple electrons and avalanche effects generated by discharge, can conduct away the accumulated secondary electrons, avoid oxidation caused by arcing of secondary electrons, and improve the high voltage resistance.

[0016] 2. Rationalized structural layout and material selection, designed tube diameter and tube length, shortened the volume of the X-ray tube and the overall dimensions of the tube: outer diameter ø12mm-ø25mm, length 30mm-50mm, currently the smallest and highest voltage X-ray tube in China, voltage ≤180KV, in line with the market demand for portable and handheld instruments.

[0017] 3. The window is a transmission window, which has a smaller size, stronger electron energy, better imaging effect, and a wider electron beam angle (the width can reach 60 degrees-105 degrees). The target is designed in parallel with the transmission window, which is conducive to designing a shorter X-ray tube and a smaller size, and is conducive to the integration of portable X-ray equipment.

[0018] 4. Adopt bipolar high voltage design, positive high voltage +V=35-100KV, negative high voltage -V=-35--100KV, to relieve the unipolar high voltage insulation pressure.

[0019] 5. The anode target adopts beryllium single-sided ion sputtering tungsten film coating technology. The metal film tungsten coating has a controllable thickness of 2µm-18µm, which can reasonably generate strong energy X-rays that can penetrate the target to achieve transmission end emission. The cathode filament emission end and the anode transmission window are designed in concentric circles, and the X-rays are emitted in a straight line.

[0020] 6. Both the cathode and the anode are equipped with radiator cooling units, which can timely and effectively conduct the heat concentrated by the electron beam on the target, effectively protect the damage risk of the beryllium and tungsten layers, and help extend the life of the X-ray tube.

[0021] 7. The cathode assembly and anode assembly of the X-ray ceramic tube are designed as a set, which is convenient for sealing laser welding with the tube body, with higher reliability and faster production efficiency.

[0022] 8. The insulating film is coated by a vacuum ion sputtering coating device. The ceramic tube can be directly placed on the turntable, the sealing cover is evacuated, argon gas is introduced, and high-voltage direct current is applied between the anode and the cathode. The electrons generated by the glow discharge excite the inert gas to produce argon positive ions. The positive ions move toward the target material at high speed, blasting the target atoms out. The magnetron component is used to control the direction and deposit them on the ceramic tube to form a thin film. The target tube rotates evenly, and the ceramic tube rotates to achieve uniform coating on the inner surface of one circle. It is easy to use and has a fast coating speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A perspective view of the present invention; Figure 2 is a cross-sectional view of the present invention; Figure 3 This is a schematic diagram of the structure of the core column assembly proposed by the present invention; Figure 4 It is a cross-sectional schematic diagram of the vacuum ion sputtering coating device proposed by the present invention; Figure 5 A three-dimensional diagram of the vacuum ion sputtering coating device proposed by the present invention; Figure 6 for Figure 4 A schematic diagram of the enlarged structure in FIG.

[0024] In the figure: 1 ceramic tube, 101 insulating film, 2 cathode assembly, 201 core column assembly, 2011 core column cuttable sleeve, 2012 exhaust pipe, 2013 core column, 2014 core column ceramic sheet, 202 cathode seat, 203 focusing head, 204 cathode radiator, 205 getter, 206 filament, 3 anode assembly, 301 anode tube, 302 anode radiator, 303 target sheet, 304 anode seat, 305 transmission window, 4 cathode lead, 5 anode lead, 6 base, 7 sealing cover, 8 sealing cover, 9 vacuum tube, 10 argon gas tube, 11 anode plate, 12 motor, 13 mounting tube, 14 turntable, 15 anti-skid pad, 16 upper pressure cover, 17 cathode plate, 18 magnetron assembly, 19 target tube, 20 lower rotating ring, 21 second magnetic ring, 22 first magnetic ring, 23 outer gear ring, 24 gear, 25 inner gear ring, 26 transmission cavity. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific implementation disclosed below.

[0026] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0027] Reference Figure 1-3 A miniature high-voltage transmission X-ray ceramic tube comprises a ceramic tube 1, a cathode assembly 2 and an anode assembly 3 are respectively installed at the upper and lower ends of the ceramic tube 1, the outer diameter of the ceramic tube 1 is ø12mm-ø25mm, and the length is 30mm-50mm. The material of the ceramic tube 1 is 99 porcelain. Compared with the glass tube, the ceramic tube 1 has better insulation performance and can effectively prevent the passage of current, reduce the occurrence of leakage and electron breakdown, etc., has wear resistance, corrosion resistance, heat resistance, high voltage resistance and insulation performance, and is an ideal vacuum tube shell.

[0028] The cathode assembly 2 includes a stem assembly 201, a cathode seat 202, a getter 205, a filament 206 and a focusing head 203. The cathode seat 202 is sealed and welded to the upper end of the ceramic tube 1. The focusing head 203 is sealed and welded in the cathode seat 202, and the lower end extends to the upper end of the tube. The stem assembly 201 is sealed and inserted in the focusing head 203. The filament 206 is installed at the lower end of the stem assembly 201 and is located in the extension section of the focusing head 203. The filament 206 is made of tungsten wire. The filament 206 is heated to emit electrons, which are focused into an electron beam through the focusing head 203 under high voltage.

[0029] The core column assembly 201 includes a core column thimble 2011, a core column ceramic sheet 2014, a pair of core columns 2013 and an exhaust pipe 2012. The core column thimble 2011 is sealed and welded in the focusing head 203. The core column ceramic sheet 2014 sealing gasket is arranged at the bottom of the core column thimble 2011. The pair of core columns 2013 and the exhaust pipe 2012 are fixedly inserted on the core column thimble 2011. The lower ends of the pair of core columns 2013 extend into the extension section of the focusing head 203. Both ends of the filament 206 are electrically connected to the pair of core columns 2013. The getter 205 is placed at the bottom of the core column thimble 2011. The exhaust pipe 2012 is used for an external vacuum pump to evacuate the ceramic tube 1. The design of the getter 205 can absorb a small amount of gas generated by various components in the ceramic tube 1 during use, thereby ensuring the internal vacuum state and improving the insulation.

[0030] Furthermore, the upper ends of a pair of core columns 2013 are electrically connected to the cathode lead 4, and the anode seat 304 is electrically connected to the anode lead 5, adopting a bipolar high voltage design, with positive high voltage +V=35-100KV and negative high voltage -V=-35--100KV, to relieve the unipolar high voltage insulation pressure.

[0031] The anode assembly 3 includes an anode seat 304, a target piece 303, a target piece seat and an anode tube 301. The anode seat 304 is sealed and welded to the lower end of the ceramic tube 1, and the target piece seat is welded to the middle of the anode seat 304. The target piece 303 is installed in the target piece seat. The anode tube 301 is fixedly installed on the inner side of the anode seat 304 and is located in the lower end of the tube. The centers of the filament 206, the focusing head 203, the anode tube 301, the target piece 303 and the transmission window 305 are all on the same axis. The high-speed electron beam is gathered through the anode tube 301 to impact the anode target piece 303, and the kinetic energy of the electrons is converted into X-rays, which penetrate the target piece 303 and are emitted through the transmission window 305. The transmission window 305 is smaller in size, has stronger electron energy, better imaging effect, and a wider electron beam angle (the width can reach 60 degrees-105 degrees). The target piece 303 and the transmission window 305 are designed in parallel, which is conducive to designing a shorter X-ray tube with a smaller size and is conducive to the integration of a portable X-ray instrument.

[0032] A transmission window 305 parallel to the target piece 303 is provided at the bottom of the anode seat 304. The inner surface of the target piece 303 is coated with a metal film tungsten with a thickness of 2µm-18µm. The film can also be coated by a vacuum ion sputtering coating device to reasonably generate strong energy X-rays that can penetrate the target piece 303 to achieve transmission end face emission. The cathode filament emission end and the anode transmission window are circularly designed, and the X-rays are emitted in a straight line.

[0033] The inner surface of the ceramic tube 1 is plated with an insulating film 101, which is chromium oxide. The insulating film 101 is plated by a vacuum ion sputtering coating device. The coating has the effect of high resistance conduction. The surface resistivity ranges from 10^9 to 10^14OhM. The coating prevents electrical breakdown and improves the withstand voltage. The accumulation of static charge is derived to avoid multiple electrons and avalanche effects generated by discharge. The insulating film 101 can guide away the accumulated secondary electrons to avoid oxidation caused by arcing generated by secondary electrons, thereby improving the high voltage resistance performance.

[0034] The target piece 303 is any one of titanium, beryllium and diamond. Beryllium has low density, is easier for rays to penetrate, and has strong electron energy; diamond has high cost. As the preferred transmission end-face emission, the distance from the object to the focus is shortened, which is conducive to clearer imaging and further improves applicability.

[0035] Furthermore, a mounting opening is provided on the cathode seat 202, and the focusing head 203 is composed of a focusing end and a sleeve end, the sleeve end sealing sleeve is arranged in the mounting opening, the core column assembly 201 is sealed and sleeved in the sleeve end, the focusing end extends to the upper end tube mouth, and the filament 206 is located in the focusing end. They are sleeved and installed in sequence, which is easy to assemble and weld, has higher reliability, and faster production efficiency.

[0036] The welding in the assembly room adopts laser pulse spot welding machine. The advantages of pulse welding machine are: low heat generation, not easy to cause oxidation damage to parts during processing, less slag spattering during welding, high cleanliness of parts after processing, ensuring the quality of the entire product.

[0037] In addition, a cathode radiator 204 is mounted on the cathode seat 202, and an anode radiator 302 is mounted on the anode seat 304. The cathode radiator 204 is a heat dissipation sleeve, which is mounted on the cathode seat 202 and the upper end pipe mouth. The inner wall of the heat dissipation sleeve is attached to the cathode seat 202. The anode radiator 302 is a heat dissipation base, which wraps the anode seat 304, and the middle part contacts the edge of the target piece 303, and is used to conduct heat from the target piece 303 and the anode seat 304. It can timely and effectively conduct the heat concentrated on the target by the electron beam, effectively protect the beryllium and tungsten layers from damage risks, and is beneficial to extending the life of the X-ray tube.

[0038] In order to improve the heat dissipation effect, the gap between the cathode radiator 204 and the cathode seat 202 and the gap between the anode radiator 302 and the anode seat 304 are filled with high thermal conductivity glue to further improve the heat dissipation effect.

[0039] This type of X-ray tube has high ray generation efficiency and radiation flux density. It abandons the thick reflective target and chooses a transmission target with a thickness that can be accurately determined to a few microns. X-rays can directly pass through the thin target and be emitted from the window with less energy loss.

[0040] Reference Figure 4-6 The present invention also discloses a vacuum ion sputtering coating device, including a base 6, a sealing cover 7 is fixedly installed on the base 6, a sealing cover 8 is provided on the cover of the sealing cover 7, a vertical installation tube 13 is fixedly installed at the center of the base 6, a target tube 19 is sleeved on the installation tube 13, a rotating component that can drive the target tube 19 to rotate is installed on the base 6, a turntable 14 for placing a ceramic tube 1 is also installed on the base 6, a cathode plate 17 attached to the inner wall of the target tube 19 is embedded on one side of the installation tube 13, an anode plate 11 is installed on the inner wall of one side of the sealing cover 7 corresponding to the cathode plate 17, a magnetron component 18 is also installed in the installation tube 13, and a vacuum tube 9 and an argon gas tube 10 are also connected to the top of the sealing cover 7.

[0041] Furthermore, a lower rotating ring 20 is mounted on the bottom of the mounting tube 13, and the lower rotating ring 20 is rotatably connected to the base 6. An upper pressure cover 16 is provided on the top cover of the mounting tube 13. The opposite surfaces of the upper pressure cover 16 and the lower rotating ring 20 are provided with an annular groove for clamping the target tube 19, which is easy to disassemble and replace with different target tubes 19 to meet the coating requirements of the insulating film 101 or the target sheet 303.

[0042] Specifically, the rotating assembly includes a transmission cavity 26 arranged in the base 6, an inner gear ring 25 extending into the transmission cavity 26 is fixed at the bottom of the lower rotating ring 20, and an outer gear ring 23 is rotatably connected to the outer periphery of the inner gear ring 25 in the transmission cavity 26, a motor 12 is installed at the bottom of the base 6, the output end of the motor 12 extends into the transmission cavity 26 and is fixed with a gear 24, the gear 24 is meshed with the outer gear ring 23 and the inner gear ring 25, a first magnetic ring 22 is embedded at the top of the outer gear ring 23, and a second magnetic ring 21 that is magnetically attracted to the first magnetic ring 22 is embedded at the bottom of the turntable 14, the motor 12 drives the gear 24 to rotate, and drives the lower rotating ring 20 to rotate through the inner gear ring 25, thereby driving the clamped target barrel 13 to rotate, the target barrel 13 rotates evenly, and at the same time, the outer gear ring 23 drives the turntable 14 to rotate synchronously through the magnetic attraction of the first magnetic ring 22 and the second magnetic ring 21, thereby driving the ceramic tube 1 to rotate, so as to achieve uniform coating on the inner surface of one circle.

[0043] Furthermore, an anti-skid pad 15 is laid on the upper surface of the turntable 14 . The size of the turntable 14 can accommodate the placement of ceramic tubes 1 of different diameters, thereby increasing friction and allowing the ceramic tubes 1 to rotate synchronously with the turntable 14 .

[0044] Furthermore, the magnetron assembly 18 is composed of three vertically arranged magnetic strips, and the magnetic flux lines between the three magnetic strips can guide the target atoms to move toward the inner wall of the ceramic tube 1 .

[0045] Open the sealing cover 8, place the ceramic tube 1 on the turntable 14, cover the sealing cover 8, evacuate the sealing cover 7 through the vacuum tube 9 connected to an external vacuum pump, and then introduce inert gas argon into the inside through the argon tube 10, add high voltage direct current between the anode plate 17 and the cathode plate 11, and the electrons generated by the glow discharge excite the inert gas to produce argon positive ions, which move toward the target tube 19 at high speed, blasting the target atoms out, and using the magnetron component 18 to control the direction to deposit them on the ceramic tube 1 to form a thin film, start the motor 12 to drive the gear 24 to rotate, and drive the lower rotating ring 20 to rotate through the inner gear ring 25, and then drive the clamped target tube 13 to rotate, the target tube 13 rotates evenly, and at the same time, the outer gear ring 23 drives the turntable 14 to rotate synchronously through the magnetic attraction of the first magnetic ring 22 and the second magnetic ring 21, and then drives the ceramic tube 1 to rotate, so that a circle of uniform coating on the inner surface can be achieved, which is convenient to use and has a fast coating speed.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A miniature high-voltage transmission X-ray ceramic tube, characterized in that: It comprises a ceramic tube (1), wherein a cathode assembly (2) and an anode assembly (3) are respectively mounted on the upper and lower ends of the ceramic tube (1); The cathode assembly (2) comprises a stem assembly (201), a cathode seat (202), a getter (205), a filament (206) and a focusing head (203); the cathode seat (202) is sealed and welded to the upper end of the ceramic tube (1); the focusing head (203) is sealed and welded inside the cathode seat (202), and the lower end extends into the upper end of the tube; the stem assembly (201) is sealed and inserted into the focusing head (203); and the filament (206) is installed at the lower end of the stem assembly (201) and is located in an extension section of the focusing head (203); The core column assembly (201) comprises a core column ferrule (2011), a core column ceramic sheet (2014), a pair of core columns (2013) and an exhaust pipe (2012); the core column ferrule (2011) is sealed and welded in the focusing head (203); a sealing gasket of the core column ceramic sheet (2014) is arranged at the bottom of the core column ferrule (2011); the pair of core columns (2013) and the exhaust pipe (2012) are fixedly inserted on the core column ferrule (2011); the lower ends of the pair of core columns (2013) extend into the extension section of the focusing head (203); the two ends of the filament (206) are electrically connected to the pair of core columns (2013); and the getter (205) is arranged at the bottom of the core column ferrule (2011); The anode assembly (3) comprises an anode seat (304), a target piece (303), a target piece seat and an anode tube (301); the anode seat (304) is sealed and welded to the lower end of the ceramic tube (1); the target piece seat is welded to the middle of the anode seat (304); the target piece (303) is installed in the target piece seat; the anode tube (301) is fixedly installed on the inner side of the anode seat (304) and is located in the lower end of the tube; and the centers of the filament (206), the focusing head (203), the anode tube (301), the target piece (303) and the transmission window (305) are all on the same axis; The bottom of the anode seat (304) is provided with a transmission window (305) parallel to the target piece (303), and the inner surface of the target piece (303) is plated with a metal film of tungsten; The inner surface of the ceramic tube (1) is plated with an insulating film (101) for conducting away secondary electrons.

2. A miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The target piece (303) is any one of titanium, beryllium, and diamond.

3. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The target piece (303) is a beryllium piece.

4. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The cathode seat (202) is provided with a mounting opening, the focusing head (203) is composed of a focusing end and a sleeve end, the sleeve end sealing sleeve is arranged in the mounting opening, the stem assembly (201) is sealed and sleeved in the sleeve end, the focusing end extends into the upper end tube opening, and the filament (206) is located in the focusing end.

5. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The outer diameter of the ceramic tube (1) is in the range of ø12 mm to ø25 mm, and the length is in the range of 30 mm to 50 mm. The material of the ceramic tube (1) is 99 ceramic.

6. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The cathode seat (202) is provided with a cathode radiator (204), and the anode seat (304) is provided with an anode radiator (302). The cathode radiator (204) is a heat dissipation sleeve, which is provided on the cathode seat (202) and the upper end pipe opening, and the inner wall of the heat dissipation sleeve is attached to the cathode seat (202). The anode radiator (302) is a heat dissipation base, which wraps around the anode seat (304) and has a middle portion that contacts the edge of the target sheet (303), and is used to conduct heat from the target sheet (303) and the anode seat (304).

7. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The thickness of the metal film tungsten is 2µm-18µm.

8. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The upper ends of the pair of core columns (2013) are electrically connected to the cathode lead (4), and the anode seat (304) is electrically connected to the anode lead (5). A bipolar high voltage design is adopted, with a positive high voltage of +V=35-100KV and a negative high voltage of -V=-35--100KV, thereby alleviating the unipolar high voltage insulation pressure.

9. The miniature high-voltage transmission X-ray ceramic tube according to claim 1, characterized in that: The insulating film (101) is chromium oxide, and the insulating film (101) is coated using a vacuum ion sputtering coating device.

10. The miniature high-voltage transmission X-ray ceramic tube according to claim 9, characterized in that: The vacuum ion sputtering coating device comprises a base (6), a sealing cover (7) is fixedly mounted on the base (6), a cover of the sealing cover (7) is provided with a sealing cover (8), a vertical mounting tube (13) is fixedly mounted at the center of the base (6), a target tube (19) is sleeved on the mounting tube (13), a rotating assembly capable of driving the target tube (19) to rotate is mounted on the base (6), a turntable (14) for placing a ceramic tube (1) is also mounted on the base (6), a cathode plate (17) attached to the inner wall of the target tube (19) is embedded on one side of the mounting tube (13), an anode plate (11) is mounted on the inner wall of one side of the sealing cover (7) corresponding to the cathode plate (17), a magnetron assembly (18) is also mounted in the mounting tube (13), and a vacuum tube (9) and an argon gas tube (10) are also connected to the top of the sealing cover (7).

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