Four-mass gyroscope structure

Abstract

The invention provides a four-mass gyroscope structure which comprises a base, a coupling mechanism, a reverse connecting rod mechanism and four substructures with the same structure, and every two adjacent substructures are symmetrically arranged and connected through the coupling mechanism and the reverse connecting rod mechanism; the substructure comprises a sensitive mass block, a detection assembly and a driving assembly, the driving assembly is distributed in the driving direction of the sensitive mass block and connected with the sensitive mass block through a driving vibration transmission beam, and the detection assembly is located in the detection direction of the sensitive mass block and connected with the sensitive mass block through a driving vibration transmission beam. And the first vibration decoupling elastic assembly is connected with the sensitive mass block. The design of the coupling mechanism and the reverse connecting rod mechanism is adopted for the two adjacent substructures, so that the driving interference mode is far away from the working mode, and the environmental adaptability of the gyroscope is improved; and meanwhile, the detection work is in a reverse mode, the interference of the detection of a same-direction mode is avoided, a common-mode error signal is also eliminated by a differential working mode, and the performance of the gyroscope is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of inertial sensors, and in particular relates to a four-mass gyroscope structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single-, dual-, and three-axis combinations. Accelerometers are used to detect the acceleration signals of objects in the three independent axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. By measuring the angular velocity and acceleration of objects in three-dimensional space, they can accurately characterize the posture of the object and have very important application value in navigation.

[0003] In the existing four-mass gyroscope structure, the coupling method between different mass blocks is generally elastic beam connection, so that the movement between the mass blocks is linked. However, this coupling method between different mass blocks makes the same-direction interference mode appear before the reverse working mode. The existence of the same-direction interference mode is not conducive to improving the environmental adaptability of the gyroscope. Summary of the invention

[0004] The purpose of the present invention is to provide a four-mass gyroscope structure, which can at least solve some of the defects existing in the prior art.

[0005] To achieve the above object, the present invention adopts the following technical solution:

[0006] A four-mass gyroscope structure comprises a base, a plurality of coupling mechanisms, a plurality of reverse link mechanisms and four substructures with the same structure, wherein two adjacent substructures are symmetrically arranged and connected through the coupling mechanisms and the reverse link mechanisms;

[0007] The substructure includes a sensitive mass block, a detection component and a driving component. The driving component is distributed in the driving direction of the sensitive mass block and is connected to the sensitive mass block by driving a vibration transfer beam. The detection component is located in the detection direction of the sensitive mass block and is connected to the sensitive mass block through a first vibration decoupling elastic component.

[0008] Furthermore, the sensitive mass blocks of two adjacent substructures along the driving direction and / or the detecting direction are connected via a coupling mechanism.

[0009] Furthermore, the sensitive mass block is connected to the coupling mechanism along the detection direction via a second vibration decoupling elastic component.

[0010] Furthermore, the coupling mechanism includes a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure.

[0011] Furthermore, the driving component includes a driving frame and at least one group of first movable comb teeth and at least one group of first fixed comb teeth arranged in the driving frame; the first movable comb teeth and the first fixed comb teeth correspond one to one and extend along the driving direction, the first fixed comb teeth are anchored on the base, the first movable comb teeth are connected to the driving frame, and the driving frame is connected to the sensitive mass block through a driving vibration transfer beam, so that when the sensitive mass block vibrates along the driving direction, a differential driving capacitance is formed between the first movable comb teeth and the first fixed comb teeth.

[0012] Furthermore, the detection component includes a detection frame and at least one group of second movable comb teeth and at least one group of second fixed comb teeth arranged in the detection frame; the second movable comb teeth and the second fixed comb teeth correspond one to one and extend along the detection direction, the second fixed comb teeth are anchored on the base, the second movable comb teeth are connected to the detection frame, both ends of the detection frame are anchored on the base through a first detection vibration elastic member, and the detection frame is connected to the sensitive mass block through a first vibration decoupling elastic component in the middle of one side close to the sensitive mass block.

[0013] Furthermore, the first vibration decoupling elastic component includes a vibration decoupling straight beam and a U-shaped beam, the vibration decoupling straight beam is located between the sensitive mass block and the detection frame, both ends of the vibration decoupling straight beam are anchored on the base, the opening of the U-shaped beam faces the vibration decoupling straight beam, both ends of the U-shaped beam are connected to the sensitive mass block, and the bottom center of the U-shaped beam is connected to the center of the vibration decoupling straight beam through a connecting beam.

[0014] Furthermore, the sensitive mass block is an H-shaped structure, the U-shaped beam is located in a groove of the H-shaped structure, and both ends of the U-shaped beam are connected to the ends of the vertical section of the H-shaped structure.

[0015] Furthermore, when the four-mass gyro structure vibrates along the driving direction, the four substructures all vibrate along the driving direction and the vibration directions of two adjacent substructures are opposite.

[0016] Furthermore, when the four-mass gyro structure vibrates along the detection direction, the four substructures all vibrate along the detection direction and the vibration directions of two adjacent substructures are opposite.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] (1) The four-mass gyroscope structure provided by the present invention adopts a coupling mechanism and a reverse connecting rod mechanism design for two adjacent substructures, so that in the driving direction, the driving interference mode is far away from the working mode, thereby improving the environmental adaptability of the gyroscope; at the same time, in the detection direction, the detection works in the reverse mode, avoiding the interference of the detection mode in the same direction, and at the same time, the differential working mode also eliminates the common-mode error signal, thereby improving the performance of the gyroscope.

[0019] (2) The four-mass gyroscope structure provided by the present invention adopts a plurality of comb teeth to double the differential capacitance formed during its vibration, thereby increasing the capacitance detection signal and improving the capacitance signal detection sensitivity.

[0020] The present invention will be further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of the four-mass gyroscope of the present invention;

[0022] Figure 2 is a schematic diagram of a single substructure in the four-mass gyroscope structure of the present invention;

[0023] Figure 3 It is a schematic diagram of the installation of the coupling mechanism in the driving direction of the four-mass gyroscope structure of the present invention;

[0024] Figure 4 It is a schematic diagram of the installation of the coupling mechanism in the detection direction in the four-mass gyroscope structure of the present invention;

[0025] Figure 5 It is a schematic diagram of the vibration of the sensitive mass block of the four-mass gyroscope structure of the present invention along the driving direction;

[0026] Figure 6 It is a schematic diagram of the vibration of the sensitive mass block of the four-mass gyro structure of the present invention along the detection direction.

[0027] Explanation of the accompanying drawings: 1. Substructure; 2. Reverse connecting rod mechanism; 3. Coupling mechanism; 4. Sensitive mass block; 5. Drive frame; 6. First movable comb teeth; 7. First fixed comb teeth; 8. First drive vibration elastic member; 9. Drive vibration transfer beam; 10. First detection vibration elastic member; 11. Detection frame; 12. Second fixed comb teeth; 13. Second movable comb teeth; 14. Second detection vibration elastic member; 15. First vibration decoupling elastic component; 16. Vibration decoupling straight beam; 17. U-shaped beam; 18. Connecting beam; 19. Second drive vibration elastic member; 20. Second vibration decoupling elastic component; 21. Coupled straight beam; 22. Coupled oblique beam. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0032] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, this embodiment provides a four-mass gyro structure, including a substrate, a plurality of coupling mechanisms 3, a plurality of reverse link mechanisms 2, and four substructures 1 with the same structure, wherein two adjacent substructures 1 are symmetrically arranged and connected through the coupling mechanism 3 and the reverse link mechanism 2; for a single substructure 1, the substructure 1 includes a sensitive mass block 4, a detection component, and a driving component, wherein the driving component is symmetrically distributed at both ends of the sensitive mass block 4 along the driving direction, and is connected to the sensitive mass block 4 through a driving vibration transfer beam 9, and when the sensitive mass block 4 moves along the driving direction, the driving components on both sides of the sensitive mass block 4 are driven to move synchronously, so that a differential driving capacitance can be formed when the sensitive mass block 4 moves in the driving direction, and the detection component is located at one end of the sensitive mass block 4 along the detection direction, and is connected to the sensitive mass block 4 through a first vibration decoupling elastic component 15. Among them, in this embodiment, the driving direction is the movement direction of the sensitive mass block 4 in the driving state, that is, Figure 1 The detection direction is the moving direction of the sensitive mass block 4 in the detection state, that is, Figure 1 Middle up and down direction.

[0033] Specifically, in the driving direction, the driving components on the inner sides of two adjacent substructures 1 are connected by a coupling mechanism 3 in the driving direction, and the detection components of two adjacent substructures 1 are connected by a reverse linkage mechanism 2, that is, the driving components of the upper left substructure 1 and the upper right substructure 1 are connected by the coupling mechanism 3 in the driving direction, and the detection components of the two substructures 1 are connected by the reverse linkage mechanism 2, and the driving components of the lower left substructure 1 and the lower right substructure 1 are connected by the coupling mechanism 3 in the driving direction, and the detection components of the two substructures 1 are connected by the reverse linkage mechanism. 2; similarly, in the detection direction, the inner sides of two adjacent substructures 1 are connected by a coupling mechanism 3 in the detection direction, and the driving components on the outer sides of two adjacent substructures 1 are connected by a reverse connecting rod mechanism 2, that is, the upper left substructure 1 is connected to the lower left substructure 1 by a coupling mechanism 3 in the detection direction, and the driving components on the outer sides of the two substructures 1 are connected by a reverse connecting rod mechanism 2, and the upper right substructure 1 is connected to the lower right substructure 1 by a coupling mechanism 3 in the detection direction, and the driving components on the outer sides of the two substructures 1 are connected by a reverse connecting rod mechanism 2. Among them, the reverse connecting rod mechanism 2 can adopt an existing connecting rod reverse transmission mechanism, and its specific structure and working principle are not repeated here; the middle part of the reverse connecting rod mechanism 2 in the driving direction and the detection direction is anchored on the base (not shown in the figure), and the two ends of the reverse connecting rod mechanism 2 are connected to the corresponding substructure 1.

[0034] Optional implementations, such as Figure 1 , Figure 3 and Figure 4As shown, the coupling mechanism 3 in the driving direction and the detection direction has the same structure. Specifically, the coupling mechanism 3 includes a coupling straight beam 21 and a plurality of coupling oblique beams 22. One end of the plurality of coupling oblique beams 22 is connected to the coupling straight beam 21, and the other end is connected to the substructure 1. Specifically, the plurality of coupling oblique beams 22 are symmetrically distributed on both sides of the axis of the coupling straight beam 21, and the coupling oblique beams 22 on the same side of the coupling straight beam 21 are symmetrically arranged about the perpendicular midline of the coupling straight beam 21, wherein the coupling straight beam 21 and the coupling oblique beam 22 are both made of a material that can be stretched, bent and deformed, and can be stretched, bent and deformed when subjected to an applied force. In this embodiment, in the driving direction, two adjacent substructures 1 in the driving direction are connected to the coupling inclined beam 22 of the coupling mechanism 3. When the substructures connected at the left and right ends of the coupling mechanism 3 move in the same direction along the driving direction, the coupling straight beam 21 is simultaneously subjected to pressure and tension from the coupling inclined beam 22 on the same side. Since the left and right ends of the coupling mechanism 3 are symmetrical, the pressure and tension are equal in magnitude and opposite in direction. Therefore, the resultant external force on the coupling straight beam 21 is zero, and the coupling straight beam 21 is in a static state, that is, the state of the same-direction movement is suppressed; and when the substructures 1 connected at the left and right ends of the coupling mechanism 3 move in the opposite direction along the driving direction, the coupling straight beam 21 is only subjected to the tension from the coupling inclined beam 22, and the resultant external force on the coupling straight beam 21 is not zero, and the coupling straight beam 21 is in a movable state, that is, the reverse movement can be performed; therefore, the design of connecting the two adjacent substructures 1 in the driving direction through the coupling mechanism 3 can effectively suppress the driving same-direction interference mode, and the same-direction interference vibration frequency is much higher than the reverse working frequency, so that the driving interference mode of the four-mass gyroscope structure is far away from the working mode, thereby improving the environmental adaptability of the gyroscope. Similarly, in the detection direction, connecting two adjacent substructures 1 in the detection direction to the coupling inclined beam 22 of the coupling mechanism 3 can make the two substructures 1 connected by them move in opposite directions in the detection direction. The frequency of the interfering vibration in the same direction is much higher than the reverse working frequency, which effectively isolates the working mode and the interference mode, so that the detection works in the reverse mode. At the same time, the differential working mode also eliminates the common-mode error signal, further improving the performance of the gyroscope.

[0035] Specifically, the coupling straight beam 21 is a frame structure, and the frame structure includes an upper horizontal section and a lower horizontal section, and a plurality of coupling oblique beams 21 are respectively connected to the upper horizontal section and the lower horizontal section. Furthermore, the frame structure also includes an intermediate horizontal section, and the center of the intermediate horizontal section is anchored on the base through an anchor point. In some embodiments, four coupling oblique beams 22 are designed, and the four coupling oblique beams 22 are arranged in groups of two, symmetrically distributed on both sides of the coupling straight beam 21, and each group of two coupling oblique beams forms a V-shape, and the intersection point is located at the center of the upper and lower horizontal sections of the coupling straight beam 21 frame, that is, one end of the upper two coupling oblique beams 22 of the coupling mechanism 3 is connected to the center of the upper horizontal section of the coupling straight beam 21, and the other ends of the upper two coupling oblique beams 22 are respectively connected to the upper parts of two adjacent substructures 1 in the driving direction, so that when the two substructures 1 move in the opposite direction along the driving direction, the center of the upper horizontal section of the coupling straight beam 21 is subjected to the upward pulling force of the upper two coupling oblique beams 22, so that the upper horizontal section of the coupling straight beam 21 is bent and deformed upward; and when the two When the substructures 1 move in the same direction along the driving direction, the center of the upper horizontal section of the coupling straight beam 21 is subjected to downward pressure from one of the coupling inclined beams 22 and upward tension from the other coupling inclined beam 22. The pressure and tension are equal in magnitude and opposite in direction. The resultant external force at the center of the upper horizontal section of the coupling straight beam 21 is zero, so the upper horizontal section of the coupling straight beam 21 is in a static state, that is, the state of moving in the same direction is suppressed; correspondingly, one end of the two lower coupling inclined beams 22 of the coupling mechanism 3 is connected to the center of the lower horizontal section of the coupling straight beam 21, and the other ends of the two lower coupling inclined beams 22 are respectively connected to the lower parts of the two substructures 1. When the two substructures 1 vibrate in the driving direction, the state of moving in the same direction of the lower horizontal section of the coupling straight beam 21 will be suppressed. Similarly, for the coupling mechanism 3 in the detection direction, its coupling straight beam 21 extends along the detection direction, and the ends of the four coupling inclined beams 22 are respectively connected to the left and right centers of the frame of the coupling straight beam 21.

[0036] On the basis of being connected by the coupling mechanism 3, two substructures 1 connected by the same coupling mechanism 3 are further connected by a reverse link mechanism 2. When the four-mass gyro structure vibrates along the driving direction, the four substructures 1 all vibrate along the driving direction and the vibration directions of two adjacent substructures 1 are opposite. Figure 5 Similarly, when the four-mass gyro structure vibrates along the detection direction, the four substructures 1 all vibrate along the detection direction and the vibration directions of two adjacent substructures 1 are opposite, as shown in FIG. Figure 6 As shown; among them, Figure 5 and Figure 6 The direction indicated by the middle arrow is the movement direction of the corresponding sensitive mass block 6.

[0037] In some embodiments, Figure 2As shown, the driving assembly includes a driving frame 5 and at least one group of first movable comb teeth 6 and at least one group of first fixed comb teeth 7 arranged in the driving frame 5; the first movable comb teeth 6 and the first fixed comb teeth 7 correspond to each other one by one and extend along the driving direction, the first fixed comb teeth 7 are anchored on the substrate, the first movable comb teeth 6 are connected to the driving frame 5, and the driving frame 5 is connected to the sensitive mass block 4 through the driving vibration transmission beam 9. When the adjacent sensitive mass blocks 4 in the four-mass gyro structure move in opposite directions along the driving direction, as shown in FIG. Figure 2 and Figure 5 As shown, for a substructure 1, a variable capacitor is formed between its first movable comb teeth 6 and the first fixed comb teeth 7. Since the first movable comb teeth 6 and the first fixed comb teeth 7 of the two driving components at the left and right ends of the sensitive mass block 4 are symmetrically distributed about the sensitive mass block 4, the capacitance values ​​at the left and right ends of the sensitive mass block 4 increase and decrease respectively, and the capacitances at the two ends are differentiated to form a differential capacitance, which increases the driving capacitance and thus increases the driving capability. The comb tooth arrays on the four sensitive mass blocks 4 further increase the driving capability and improve the subsequent capacitance detection sensitivity.

[0038] Optionally, the two ends of the reverse linkage mechanism 2 located in the driving direction are connected to the driving frames 5 of the two adjacent substructures 1 through a first driving vibration elastic member 8. The first driving vibration elastic member 8 can be extended and retracted along the driving direction, for example, a vibration spring, a retractable and bendable U-shaped beam, etc.

[0039] Preferably, the driving frame 5 of the driving assembly connected to the coupling inclined beam 22 in the driving direction is also anchored on the base through a second driving vibration elastic member 19, and the second driving vibration elastic member 19 can be extended and retracted along the driving direction, for example, a vibration spring, a retractable and bendable U-shaped beam, etc. The second driving vibration elastic member 19 is provided to further ensure the stability of the driving assembly moving along the driving direction.

[0040] In some embodiments, Figure 2As shown, the detection component includes a detection frame 11 and at least one group of second movable comb teeth 13 and at least one group of second fixed comb teeth 12 arranged in the detection frame 11; the second movable comb teeth 13 and the second fixed comb teeth 12 correspond to each other one by one and extend along the detection direction, the second fixed comb teeth 12 are anchored on the substrate, and the second movable comb teeth 13 are connected to the detection frame 11; specifically, in a substructure 1, the comb teeth of each group of second movable comb teeth 13 have the same direction, the comb teeth of each group of second fixed comb teeth 12 have the same direction, and the second movable comb teeth 13 and the second fixed comb teeth 12 both extend along the detection direction, and at the same time, the detection components of the two substructures 1 connected by the same coupling mechanism 3 in the detection direction are arranged symmetrically, that is, the comb teeth of the second movable comb teeth 13 and the second fixed comb teeth 12 of the two substructures 1 are opposite. The sensitive mass block 4 vibrates due to the electrostatic force generated by the driving capacitor. When there is an angular velocity input from the outside, the sensitive mass block 4 is subjected to the Coriolis force and then causes vibration in the detection direction, as shown in FIG. Figure 6 As shown, since the two substructures 1 connected by the same coupling mechanism 3 vibrate in the detection direction, the capacitance values ​​of the detection components at both ends increase and decrease respectively, and the capacitances at both ends are differentiated to form a differential capacitance, thereby increasing the capacitance detection signal and subtracting the common mode error signal by difference. The comb array arrangement on the four sensitive mass blocks 4 further increases the capacitance detection signal and improves the capacitance detection sensitivity.

[0041] Preferably, both ends of the detection frame 11 are anchored to the base through the first detection vibration elastic member 10 to ensure the stability of the detection component moving along the detection direction. Since the movement direction of the detection frame 11 is along the detection direction, the first detection vibration elastic member 10 also retracts and contracts along the detection direction. The first detection vibration elastic member 10 can also adopt a vibration spring, a retractable and bendable U-shaped beam, etc.

[0042] The middle part of the detection frame 11 near the sensitive mass block 4 is connected to the sensitive mass block 4 through the first vibration decoupling elastic component 15. Specifically, the first vibration decoupling elastic component 15 includes a vibration decoupling straight beam 16 and a U-shaped beam 17. The vibration decoupling straight beam 16 is located between the sensitive mass block 4 and the detection frame 11. Both ends of the vibration decoupling straight beam 16 are anchored on the base. The opening of the U-shaped beam 17 faces the vibration decoupling straight beam 16. Both ends of the U-shaped beam 17 are connected to the sensitive mass block 4. The bottom center of the U-shaped beam 17 is connected to the center of the vibration decoupling straight beam 16 through a connecting beam 18. At the same time, the middle part of the detection frame 11 is also connected to the center of the vibration decoupling straight beam 16. Wherein, the vibration decoupling straight beam 16 and the U-shaped beam 17 can be stretched, bent and deformed when subjected to force.

[0043] Preferably, both ends of the reverse linkage mechanism 2 located in the detection direction are connected to the detection frames 11 of the two adjacent substructures 1; specifically, the end of the reverse linkage mechanism 2 in the detection direction is connected to the middle of the corresponding detection frame 11 on the side away from the sensitive mass block 4 through the second detection vibration elastic member 14, wherein the second detection vibration elastic member 14 is retracted along the detection direction, and a vibration spring, a retractable and bendable U-shaped beam, etc. can also be used.

[0044] Preferably, the sensitive mass block 4 of the substructure 1 is connected to the coupling mechanism 3 along the detection direction via a second vibration decoupling elastic component 20. The structure of the second vibration decoupling elastic component 20 is the same as that of the above-mentioned first vibration decoupling elastic component 15, which will not be repeated here.

[0045] It should be noted that in the present invention, Figure 5 and Figure 6 The figure is a schematic diagram of the final state of the motion of the movable parts of the four-mass gyroscope structure that vibrates along the driving direction and the detection direction respectively. In order to reflect the motion effect, the movement displacement of the movable parts in the figure is exaggerated.

[0046] The above examples are merely illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. All designs that are the same or similar to the present invention fall within the protection scope of the present invention.

Claims

1. A four-mass gyroscope structure, characterized in that: It comprises a base, a plurality of coupling mechanisms, a plurality of reverse link mechanisms and four substructures with the same structure, wherein two adjacent substructures are symmetrically arranged and connected by the coupling mechanisms and the reverse link mechanisms; The substructure includes a sensitive mass block, a detection component and a driving component. The driving component is distributed in the driving direction of the sensitive mass block and is connected to the sensitive mass block by driving a vibration transfer beam. The detection component is located in the detection direction of the sensitive mass block and is connected to the sensitive mass block through a first vibration decoupling elastic component.

2. The four-mass gyroscope structure according to claim 1, characterized in that: The sensitive masses of two adjacent substructures along the driving direction and / or the detecting direction are connected via a coupling mechanism.

3. The four-mass gyroscope structure according to claim 1, characterized in that: The sensitive mass block is connected to the coupling mechanism along the detection direction via a second vibration decoupling elastic component.

4. The four-mass gyroscope structure according to claim 1, characterized in that: The coupling mechanism comprises a coupling straight beam and a plurality of coupling oblique beams, one end of the plurality of coupling oblique beams is connected to the coupling straight beam, and the other end is connected to the substructure.

5. The four-mass gyroscope structure according to claim 1, characterized in that: The driving component includes a driving frame and at least one group of first movable comb teeth and at least one group of first fixed comb teeth arranged in the driving frame; the first movable comb teeth and the first fixed comb teeth correspond to each other one by one and extend along the driving direction, the first fixed comb teeth are anchored on the base, the first movable comb teeth are connected to the driving frame, and the driving frame is connected to the sensitive mass block through a driving vibration transfer beam, so that when the sensitive mass block vibrates along the driving direction, a differential driving capacitance is formed between the first movable comb teeth and the first fixed comb teeth.

6. The four-mass gyroscope structure according to claim 1, characterized in that: The detection component includes a detection frame and at least one group of second movable comb teeth and at least one group of second fixed comb teeth arranged in the detection frame; the second movable comb teeth and the second fixed comb teeth correspond to each other one by one and extend along the detection direction, the second fixed comb teeth are anchored on the base, and the second movable comb teeth are connected to the detection frame. Both ends of the detection frame are anchored on the base through a first detection vibration elastic member, and the middle part of the detection frame close to the sensitive mass block is connected to the sensitive mass block through a first vibration decoupling elastic component.

7. The four-mass gyroscope structure according to claim 1, characterized in that: The first vibration decoupling elastic component includes a vibration decoupling straight beam and a U-shaped beam, the vibration decoupling straight beam is located between the sensitive mass block and the detection frame, both ends of the vibration decoupling straight beam are anchored on a base, the opening of the U-shaped beam faces the vibration decoupling straight beam, both ends of the U-shaped beam are connected to the sensitive mass block, and the bottom center of the U-shaped beam is connected to the center of the vibration decoupling straight beam through a connecting beam.

8. The four-mass gyroscope structure according to claim 7, characterized in that: The sensitive mass block is an H-shaped structure, the U-shaped beam is located in the groove of the H-shaped structure, and both ends of the U-shaped beam are connected to the ends of the vertical section of the H-shaped structure.

9. The four-mass gyroscope structure according to claim 1, characterized in that: When the four-mass gyro structure vibrates along the driving direction, the four substructures all vibrate along the driving direction and the vibration directions of two adjacent substructures are opposite.

10. The four-mass gyroscope structure according to claim 1, characterized in that: When the four-mass gyro structure vibrates along the detection direction, the four substructures all vibrate along the detection direction and the vibration directions of two adjacent substructures are opposite.

Images